CN105415193A - Grinding wheel dressing device - Google Patents
Grinding wheel dressing device Download PDFInfo
- Publication number
- CN105415193A CN105415193A CN201510866894.7A CN201510866894A CN105415193A CN 105415193 A CN105415193 A CN 105415193A CN 201510866894 A CN201510866894 A CN 201510866894A CN 105415193 A CN105415193 A CN 105415193A
- Authority
- CN
- China
- Prior art keywords
- connecting plate
- rotating shaft
- module
- oilstone
- finishing portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/04—Devices or means for dressing or conditioning abrasive surfaces of cylindrical or conical surfaces on abrasive tools or wheels
- B24B53/053—Devices or means for dressing or conditioning abrasive surfaces of cylindrical or conical surfaces on abrasive tools or wheels using a rotary dressing tool
Abstract
The invention provides a grinding wheel dressing device applied to wafer grinding equipment. The grinding wheel dressing device comprises a dressing part for grinding wheel dressing, a rotating mechanism for driving the dressing part to rotate and a linear motor module (1). The dressing part is fixedly connected to the rotating mechanism. A module connecting plate (2) is arranged on the linear motor module (1) and fixedly connected with the rotating mechanism. The module connecting plate (2) moves on the linear motor module (1) in the linear direction to drive the dressing part to be fed. In this way, a grinding wheel is cleaned and dressed timely while a wafer is ground, invalid wafer grinding time is shortened, and wafer grinding accuracy is improved; meanwhile, the rotation speed and the feed rate of the dressing part can be controlled through a driver, and the grinding wheel dressing efficiency is guaranteed; and the grinding wheel dressing device is simple and reliable in structure and convenient to use.
Description
Technical field
The present invention relates to grinding equipment technical field, refer to a kind of wheel dresser being applied to wafer equipment for grinding especially.
Background technology
In semiconductor manufacturing equipment grinding process, surface roughness and the silicon wafer thickness variable quantity (TTV) of wafer directly depend on the shape of emery wheel and the cleannes of contact surface.In the grinding process to some harder substrates, substrate residue can be attached on emery wheel, affects substrate removal amount, working (machining) efficiency and substrate surface machining accuracy, and therefore emery wheel needs to clear up timely and repair, otherwise can cause the error of grinding accuracy.Current crushing is owing to lacking restoring on line technology, general employing crushing sheet off-line finishing, there is two problems in this method for trimming: is the time being difficult to accurately grasp crushing on the one hand, by virtue of experience can only determine that time off-line is repaired emery wheel, add the wafer invalid grinding time; Be then that wafer dismounting can cause multiple bearing on the other hand, thus affect the grinding accuracy of wafer.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of wheel dresser, repair to solve existing emery wheel off-line the grinding accuracy error needing wafer dismounting to cause multiple bearing to cause, and be difficult to the problem accurately grasping the invalid grinding time increase that the crushing time causes.
For solving the problems of the technologies described above, embodiments of the invention provide a kind of wheel dresser, are applied to wafer equipment for grinding, comprise:
One for the finishing portion of crushing;
One rotating mechanism for driving finishing portion to rotate, finishing portion is fixedly connected on rotating mechanism;
One linear motor module, linear motor module is provided with a module connecting plate, rotating mechanism is fixedly connected with module connecting plate, drives finishing portion feeding by module connecting plate the mobile of linear motor module ascender line direction.
Preferably, finishing portion comprises an oilstone, the oilstone connecting plate be fixedly connected with rotating mechanism, is arranged at the oilstone chucking appliance for fixing oilstone on oilstone connecting plate.
Preferably, rotating mechanism comprises:
The rotating shaft that first end is fixedly connected with finishing portion;
One stepper motor, the output shaft of stepper motor is connected with the second end of rotating shaft by a shaft coupling, during output shaft rotation, drives shaft coupling that rotating shaft is rotated.
Further, rotating shaft periphery is arranged with a bearing block, and bearing block is fixed on module connecting plate.
Further, the multiple bearings being sheathed on rotating shaft, multiple cone spacer, at least one outer ring spacer, a shield bearing lid and an anti-loosening bearing cap is provided with between rotating shaft and bearing block.
Further, the output shaft side of stepper motor is provided with an electric rotating support, and electric rotating support is fixed on module connecting plate.
Technique scheme of the present invention at least comprises following beneficial effect:
Technique scheme of the present invention drives finishing portion feeding and emery wheel face by linear motor module in preset frequency, rotating mechanism drives finishing portion to rotate trimming wheel simultaneously, while wafer grinding, emery wheel cleared up in time like this and repair, to reduce the wafer invalid grinding time, and improve wafer grinding accuracy; Meanwhile, the speed of rotation of finishing portion and feed rate can pass through driver control, ensure the efficiency of crushing; And this wheel dresser is simple and reliable for structure, easy to use.
Accompanying drawing explanation
Fig. 1 represents the structural representation of embodiment of the present invention wheel dresser;
Fig. 2 represents the structure sectional view of embodiment of the present invention wheel dresser.
[Main Reference Numerals explanation]
1-linear motor module, 2-module connecting plate, 3-stepper motor, 4-electric rotating support, 5-shaft coupling, 6-rotating shaft, the anti-loosening bearing cap of 7-, 8-shield bearing lid, 9-bearing block, 10-cone spacer, 11-bearing, 12-outer ring spacer, 13-oilstone connecting plate, 14-oilstone chucking appliance, 15-oilstone.
Detailed description of the invention
For making the technical problem to be solved in the present invention, technical scheme and advantage clearly, be described in detail below in conjunction with the accompanying drawings and the specific embodiments.
As shown in Figure 1-2, the embodiment of the present invention, for existing problem, provides a kind of wheel dresser, is applied to wafer equipment for grinding, comprises: one for the finishing portion of crushing; One rotating mechanism for driving finishing portion to rotate, finishing portion is fixedly connected on rotating mechanism; One linear motor module 1, linear motor module 1 is provided with a module connecting plate 2, rotating mechanism is fixedly connected with module connecting plate 2, drives finishing portion feeding by module connecting plate 2 the mobile of linear motor module 1 ascender line direction.Like this, by being preset with the linear motor module 1 of feeding frequency, make module connecting plate 2 along the predetermined trajectory Linear-moving on linear motor module 1 in the given time, move with the mobile rotating mechanism be fixedly connected with this module connecting plate 2 that drives of module connecting plate 2, to make the finishing portion feeding trimming wheel be fixed on this rotating mechanism, now rotating mechanism drives finishing portion rotation clear up emery wheel and repair.Here, linear motor module 1 is generally made up of leading screw, motor, shaft coupling etc., and compact structure is simple, easy to use; In addition, the speed of rotation of finishing portion, feed rate and feeding frequency can be controlled by driver, namely can be controlled the feed rate of finishing portion and feeding frequency the rate travel of module connecting plate 2 on the linear direction of planned orbit, travel frequency by the driver of linear motor module 1, can be controlled by the speed of rotation of the driver of rotating mechanism to finishing portion, like this to ensure crushing efficiency.
Preferably, finishing portion comprises an oilstone 15, the oilstone connecting plate 13 be fixedly connected with rotating mechanism, is arranged at the oilstone chucking appliance 14 for fixing oilstone 15 on oilstone connecting plate 13.
Preferably, rotating mechanism comprises: the rotating shaft 6 that first end is fixedly connected with finishing portion; One stepper motor 3, the output shaft of stepper motor 3 is connected with the second end of rotating shaft 6 by a shaft coupling 5, during output shaft rotation, drives shaft coupling 5 that rotating shaft 6 is rotated.The output shaft of stepper motor 3 is connected with the second end of rotating shaft 6 by shaft coupling 5, jointly rotate with the output shaft of stepper motor 3 to make rotating shaft 6, reach to drive and be fixed on the finishing portion of rotating shaft 6 first end and rotating shaft 6 rotates with set rate, emery wheel is cleared up and repairs.Here, the set rate of rotation can be exported by the rotation of driver control stepper motor 3 and control.
Further, as shown in Figure 2, rotating shaft 6 periphery is arranged with a bearing block 9, and bearing block 9 is fixed on module connecting plate 2.The output shaft side of stepper motor 3 is provided with an electric rotating support 4, and electric rotating support 4 is fixed on module connecting plate 2.Further, be provided with between rotating shaft 6 and bearing block 9 be sheathed on rotating shaft 6 multiple bearings 11, multiple cone spacer 10, at least one outer ring spacer 12, one shield bearing lid 8 and an anti-loosening bearing cap 7, wherein, often one, interval cone spacer 10 between adjacent two bearings 11, often one, interval bearing 11 between adjacent two cone spacers 10, outer ring spacer 12 is sheathed on outside cone spacer 10.By bearing block 9, electric rotating support 4, make being fixedly connected with of rotating shaft 6 and stepper motor 3 and module connecting plate 2, to make rotating shaft 6 and stepper motor 3 be driven by module connecting plate better, make finishing portion feeding trimming wheel, between rotating shaft 6 and bearing block 9 by away from rotating shaft 6 second end to gradually on the second extreme direction, alternate sheathed bearing 11 and cone spacer 10 successively on rotating shaft 6, namely on the direction away from rotating shaft 6 second end, first sheathed bearing 11, and at every one, interval cone spacer 10 between adjacent two bearings 11, often one, interval bearing 11 between adjacent two cone spacers 10, and the outer sheathed outer ring spacer 12 of cone spacer 10 between two bearings 11, like this to make rotating shaft 6 rotate to steady and smooth, here, in general, according to actual needs between rotating shaft 6 and bearing block 9, can sheathed two bearings 11 on rotating shaft 6, two cone spacers 10 and an outer ring spacer 12, in addition at the end of bearing block 9 near rotating shaft 6 second end place, a sheathed anti-loosening bearing cap 7 on rotating shaft 6, anti-loosening bearing cap 7 is disposed adjacent with cone spacer 10, and the outer sheathed shield bearing lid 8 of cone spacer 10 between this anti-loosening bearing cap 7 and bearing 11, by this shield bearing lid 8 to make to closely cooperate between anti-loosening bearing cap 7 and bearing block 9.
In the present invention one specific embodiment, the linear motor module 1 of wheel dresser is by leading screw, motor, the formations such as shaft coupling, the side of linear motor module 1 is provided with the module connecting plate 2 be connected with leading screw, make module connecting plate 2 can along the planned orbit Linear-moving of leading screw, module connecting plate 2 is fixedly connected with stepper motor 3 by electric rotating support 4, be fixedly connected with rotating shaft 6 by bearing block 9, stepper motor 3 and rotating shaft 6 synchronizing moving is driven along planned orbit Linear-moving to make the module connecting plate 2 of the linear motor module 1 under driver control, make oilstone connecting plate 13 feeding be fixedly connected with rotating shaft 6 thus, make further to be arranged on oilstone connecting plate 13, and contact the emery wheel flank of tooth with the oilstone 15 that oilstone chucking appliance 14 is fixedly clamped, simultaneously, by the rotating shaft 6 that shaft coupling 5 is connected with the output shaft of stepper motor 3, under the control of driver, the output shaft of stepper motor 3 rotates with the predetermined speed of rotation and drives rotating shaft 6 to rotate, and then the substrate residue be attached to when driving the oilstone 15 on oilstone connecting plate 13 to rotate by set rate to remove wafer grinding on emery wheel, complete the cleaning to emery wheel and finishing.Further, be provided with bearing 11, cone spacer 10 and outer ring spacer 12 etc., can make rotating shaft 6 under the drive of stepper motor 3 between rotating shaft 6 and bearing block 9, steady and smooth ground rotates more.
The wheel dresser of the above embodiment of the present invention can be cleared up in time emery wheel and repair while wafer grinding, to reduce the wafer invalid grinding time, and improves wafer grinding accuracy; Meanwhile, the speed of rotation of finishing portion and feed rate can pass through driver control, ensure the efficiency of crushing; And this wheel dresser is simple and reliable for structure, easy to use.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the prerequisite not departing from principle of the present invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (6)
1. a wheel dresser, is applied to wafer equipment for grinding, it is characterized in that, comprising:
One for the finishing portion of crushing;
One rotating mechanism for driving described finishing portion to rotate, described finishing portion is fixedly connected on described rotating mechanism;
One linear motor module (1), described linear motor module (1) is provided with a module connecting plate (2), described rotating mechanism is fixedly connected with described module connecting plate (2), drives described finishing portion feeding by described module connecting plate (2) the mobile of described linear motor module (1) ascender line direction.
2. wheel dresser according to claim 1, it is characterized in that, described finishing portion comprises an oilstone (15), the oilstone connecting plate (13) be fixedly connected with described rotating mechanism, is arranged at the oilstone chucking appliance (14) for fixing described oilstone (15) on described oilstone connecting plate (13).
3. wheel dresser according to claim 1, is characterized in that, described rotating mechanism comprises:
The rotating shaft (6) that first end is fixedly connected with described finishing portion;
One stepper motor (3), the output shaft of described stepper motor (3) is connected with the second end of described rotating shaft (6) by a shaft coupling (5), during described output shaft rotation, drive described shaft coupling (5) that described rotating shaft (6) is rotated.
4. wheel dresser according to claim 3, is characterized in that, described rotating shaft (6) periphery is arranged with a bearing block (9), and described bearing block (9) is fixed on described module connecting plate (2).
5. wheel dresser according to claim 4, it is characterized in that, be provided with between described rotating shaft (6) and described bearing block (9) and be sheathed on multiple bearings (11) of described rotating shaft (6), multiple cone spacer (10), at least one outer ring spacer (12), a shield bearing lid (8) and an anti-loosening bearing cap (7).
6. wheel dresser according to claim 3, it is characterized in that, the output shaft side of described stepper motor (3) is provided with an electric rotating support (4), and described electric rotating support (4) is fixed on described module connecting plate (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510866894.7A CN105415193A (en) | 2015-11-30 | 2015-11-30 | Grinding wheel dressing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510866894.7A CN105415193A (en) | 2015-11-30 | 2015-11-30 | Grinding wheel dressing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105415193A true CN105415193A (en) | 2016-03-23 |
Family
ID=55493955
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510866894.7A Pending CN105415193A (en) | 2015-11-30 | 2015-11-30 | Grinding wheel dressing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105415193A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106733792A (en) * | 2016-12-12 | 2017-05-31 | 北京中电科电子装备有限公司 | A kind of cleaning device for semiconductor grinding station |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3897226B2 (en) * | 2001-03-21 | 2007-03-22 | 株式会社ジェイテクト | Grinding wheel correction method and grinding wheel correction device |
| CN101863031A (en) * | 2010-05-25 | 2010-10-20 | 中国电子科技集团公司第四十五研究所 | Multi-dimensional manipulator driving device for special equipment of semiconductor |
| CN204053617U (en) * | 2014-06-30 | 2014-12-31 | 东莞市乔锋机械有限公司 | A kind of vertical metal processing center machine of screw structure improvement |
| CN204277784U (en) * | 2014-11-11 | 2015-04-22 | 许定明 | A kind of cutter sharpener special grinding wheel trimming device |
-
2015
- 2015-11-30 CN CN201510866894.7A patent/CN105415193A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3897226B2 (en) * | 2001-03-21 | 2007-03-22 | 株式会社ジェイテクト | Grinding wheel correction method and grinding wheel correction device |
| CN101863031A (en) * | 2010-05-25 | 2010-10-20 | 中国电子科技集团公司第四十五研究所 | Multi-dimensional manipulator driving device for special equipment of semiconductor |
| CN204053617U (en) * | 2014-06-30 | 2014-12-31 | 东莞市乔锋机械有限公司 | A kind of vertical metal processing center machine of screw structure improvement |
| CN204277784U (en) * | 2014-11-11 | 2015-04-22 | 许定明 | A kind of cutter sharpener special grinding wheel trimming device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106733792A (en) * | 2016-12-12 | 2017-05-31 | 北京中电科电子装备有限公司 | A kind of cleaning device for semiconductor grinding station |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105538110B (en) | A kind of grinding processed for substrate is with polishing dual-purpose Flexible Manufacture device | |
| CN102632436A (en) | Blade grinding machine for external conical surface of drill | |
| CN102152238B (en) | Grinding processing method and device for online grinding wheel dressing by ultrasonic vibration and | |
| CN101612715B (en) | Method and system for grinding double sides of disc type rotary work piece, and vertical double-sided grinding machine with numerical control synchronous double-sided grinding head | |
| CN103551925A (en) | Positive and negative blade electrodes alternated type electrorheological buffing device | |
| CN102528665A (en) | Novel numerical-control grinding wheel dressing device | |
| CN204725327U (en) | A kind of multi-thread emery wheel compound automatic trimming device | |
| CN203292997U (en) | Simple and efficient steel tube polishing device | |
| CN105415193A (en) | Grinding wheel dressing device | |
| CN203973341U (en) | A kind of Large Sand band polishing machine of processing deflector roll | |
| CN203804342U (en) | Polishing machine for gears of rotor shafts | |
| CN104128854A (en) | Anti-falling polishing device for metal tubes | |
| CN101817159A (en) | Parts surface grinding and polishing method by electric spark at flexible electrode and system thereof | |
| CN105058234A (en) | Polishing machine with workpiece rotation supporting device | |
| CN205254743U (en) | Automatic polishing and grinding machine of many sand ball | |
| CN205043605U (en) | Single face polishing grinding device | |
| CN211681329U (en) | Alumina ceramics equipment of polishing | |
| CN203542299U (en) | Device for slotting and grinding saw blade | |
| CN104416465A (en) | Novel numerical control grinding wheel dressing device | |
| CN102554787B (en) | Diamond grinding block dressing device for polished tile | |
| CN206662742U (en) | The toolbox of lathe | |
| CN102101257B (en) | Substrate end surface grinding device | |
| CN206154010U (en) | Duplex position knife grinding structure | |
| CN216991331U (en) | Cleaning device of edge roller for float glass production line | |
| CN104842274A (en) | Cup grinding wheel-electric spark composite trimmer for superhard abrasive grinding wheel |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160323 |