CN101863031A - Multi-dimensional manipulator driving device for special equipment of semiconductor - Google Patents

Multi-dimensional manipulator driving device for special equipment of semiconductor Download PDF

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Publication number
CN101863031A
CN101863031A CN 201010181436 CN201010181436A CN101863031A CN 101863031 A CN101863031 A CN 101863031A CN 201010181436 CN201010181436 CN 201010181436 CN 201010181436 A CN201010181436 A CN 201010181436A CN 101863031 A CN101863031 A CN 101863031A
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CN
China
Prior art keywords
bearing
rotating shaft
driving motor
block
direct driving
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Granted
Application number
CN 201010181436
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Chinese (zh)
Other versions
CN101863031B (en
Inventor
张玮琪
衣忠波
张文斌
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CETC Beijing Electronic Equipment Co
Original Assignee
Beijing Semiconductor Equipment Institute
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Publication date
Application filed by Beijing Semiconductor Equipment Institute filed Critical Beijing Semiconductor Equipment Institute
Priority to CN2010101814367A priority Critical patent/CN101863031B/en
Publication of CN101863031A publication Critical patent/CN101863031A/en
Application granted granted Critical
Publication of CN101863031B publication Critical patent/CN101863031B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The invention discloses a multi-dimensional manipulator driving device for special equipment of a semiconductor, which comprises a transmission direct drive motor which is directly connected with a rotating shaft, and a rotary servo motor which is indirectly connected with the rotating shaft, wherein the rotating shaft is a hollow shaft which is penetrated through the transmission direct drive motor and a connection base, the upper end of the connection base is connected with the lower end of the transmission direct drive motor, the lower end of the connection base is installed on the rotating shaft, a bearing block is installed at the upper end of a base, a bearing is supported between the bearing block and the rotating shaft, a coupling, a bearing lock nut, a bearing retainer, a bearing cover, the bearing, an inner ring spacer and an outer ring spacer are installed at the lower end of the rotating shaft, the bearing cover compresses the bearing and is installed at the lower end of the bearing block, the upper end of a deceleration machine is mounted at the lower end of the base, and the lower end of the deceleration machine is provided with the rotary servo motor. The driving interface of the rotary servo motor is connected with an upper computer. The invention has the characteristics of large moment, high precision, low cost, compact structure and convenient installation and maintenance.

Description

A kind of multi-dimensional manipulator driving device for special equipment of semiconductor
Technical field
The present invention relates to a kind of multi-dimensional manipulator driving device, particularly a kind of semiconductor manufacturing equipment direct driving motor drive unit of the joint rotation of multi-dimensional manipulator.
Background technology
In the semiconductor manufacturing equipment manufacture process, realize that with multi-dimensional manipulator the automatic transmission of silicon chip is a key technology.Multi-dimensional manipulator generally has two above rotary joints, and motor driver is arranged on each joint, drives the joint and rotates, and the movement locus of arm end is the synthetic of several joint motions.The end of conventional robot data computation amount when transmission is bigger, and the cost of kinematic system is higher, and traditional motor driver is loosely organized, precision is low, be not easy control.
Summary of the invention
Purpose of the present invention just is to provide a kind of multi-dimensional manipulator driving device for special equipment of semiconductor, and it has solved, and traditional motor driver is loosely organized, precision is low, do not allow manageable technical problem; And solved the high problem of directly driven motor device cost.
For achieving the above object, technical scheme of the present invention is: multi-dimensional manipulator driving device for special equipment of semiconductor comprises transmission direct driving motor, rotating shaft, Connection Block, bearing, cone spacer, outer ring spacer, end ring, bearing gland, bearing locking nut, shaft coupling, rotating servo motor, reductor, bearing block, base; Rotating shaft is a hollow shaft, and transmission direct driving motor and Connection Block are run through in the rotating shaft upper end, and the transmission direct driving motor directly is connected with rotating shaft; The top of Connection Block is connected with transmission direct driving motor lower end, and the lower end of Connection Block is assemblied on the rotating shaft;
On the rotating shaft under the Connection Block by bearings and be connected with bearing block, bearing block is installed in the top of base, be equipped with cone spacer, outer ring spacer, end ring, bearing gland, bearing locking nut under the bearing on the rotating shaft successively, bearing gland compresses bearing and is installed in the bearing block lower end, and bearing locking nut is contained in and blocks bearing gland on the rotating shaft; The rotating shaft lower end is connected with the output shaft of reductor by shaft coupling, and the upper end of reductor is installed in the base lower end, and the reductor lower end is equipped with rotating servo motor; The driving interface of rotating servo motor is connected with host computer.The upper end of rotating shaft of the present invention can be connected with another joint transmission mechanism, realizes the complex track motion in multi-dimensional manipulator joint.
Transmission direct driving motor of the present invention can be realized from low speed to powerful smoothness run at a high speed for peace river direct driving motor.
Described host computer can comprise motion control card, single-chip microcomputer, PLC controller and impulse generator.
The present invention compared with prior art has following beneficial effect:
The present invention is made up of transmission direct driving motor, rotating shaft, Connection Block, bearing, cone spacer, outer ring spacer, end ring, bearing gland, bearing locking nut, shaft coupling, rotating servo motor, reductor, bearing block, base.Its Connection Block upper end links to each other with transmission direct driving motor lower end, and the Connection Block lower end is installed on the rotating shaft, and is simple in structure, centralized positioning precision height; Be connected by bearings between bearing block and the rotating shaft, can improve the rigidity of rotating shaft; Rotating shaft is designed to hollow shaft, makes the various pipelines of multi-dimensional manipulator front end can be hidden in wherein, utilizes hollow structure, is convenient to realize stretching motion; This transmission direct driving motor adopts peace river direct driving motor to have that moment is big, precision is high and characteristics such as cost is low.Adopt the present invention can make that the joint part structure of multi-dimensional manipulator is compact more, guarantee precision easily, be convenient to the advantage of installation and maintenance.Motor-driven interface range of the present invention is wider, can adopt the host computer of formations such as motion control card, single-chip microcomputer, PLC controller and impulse generator to control, and is applicable to the multi-dimensional manipulator in the various fields.
Description of drawings
Fig. 1 is a structural representation of the present invention
In the accompanying drawing: 1-transmission direct driving motor 2-rotating shaft 3-Connection Block 4-bearing 5-cone spacer 6-outer ring spacer 7-end ring 8-bearing gland 9-bearing locking nut 10-shaft coupling 11-rotating servo motor 12-reductor 13-bearing block 14-base.
The specific embodiment
The present invention will be further described in detail below in conjunction with accompanying drawing.
As shown in Figure 1, multi-dimensional manipulator driving device for special equipment of semiconductor of the present invention comprises transmission direct driving motor 1, rotating shaft 2, Connection Block 3, bearing 4, cone spacer 5, outer ring spacer 6, end ring 7, bearing gland 8, bearing locking nut 9, shaft coupling 10, rotating servo motor 11, reductor 12, bearing block 13, base 14; Rotating shaft 2 is for running through the hollow shaft of transmission direct driving motor 1 and Connection Block 3, Connection Block 3 upper ends link to each other with transmission direct driving motor 1 lower end, Connection Block 3 lower ends are installed on the rotating shaft 2, bearing block 13 is installed in base 14 upper ends, support by bearing 4 between bearing block 13 and the rotating shaft 2, and rotating shaft 2 lower ends are equipped with bearing 4 successively, in, outer ring spacer 5,6, end ring 7, bearing gland 8, bearing locking nut 9, shaft coupling 10, bearing gland 8 compresses bearing 4 and is installed in bearing block 13 lower ends, reductor 12 upper ends are installed in base 14 lower ends, and reductor 12 lower ends are equipped with rotating servo motor 11.The driving interface of rotating servo motor 11 is connected with host computer.
This novel multi-dimensional manipulator driving device primary structure is: by forming with a rotating servo motor 11 that links to each other indirectly with rotating shaft 2 with the transmission direct driving motor 1 that rotating shaft 2 directly links to each other, supported by bearing 4 between bearing block 13 and the rotating shaft 2, bearing gland 8 compresses bearing 4.The output shaft of rotating servo motor 11 is rotated by PC control, and driven rotary axle 2 makes 1 rotation of transmission direct driving motor indirectly, and rotating shaft 2 upper ends can be connected with another joint transmission mechanism, realizes the complex track motion in multi-dimensional manipulator joint.

Claims (2)

1. multi-dimensional manipulator driving device for special equipment of semiconductor, it is characterized in that: it comprises transmission direct driving motor (1), rotating shaft (2), Connection Block (3), bearing (4), cone spacer (5), outer ring spacer (6), end ring (7), bearing gland (8), bearing locking nut (9), shaft coupling (10), rotating servo motor (11), reductor (12), bearing block (13), base (14); Rotating shaft (2) is a hollow shaft, and transmission direct driving motor (1) and Connection Block (3) are run through in rotating shaft (2) upper end, and transmission direct driving motor (1) directly is connected with rotating shaft (2); The top of Connection Block (3) is connected with transmission direct driving motor (1) lower end, and the lower end of Connection Block (3) is assemblied on the rotating shaft (2);
Rotating shaft (2) under Connection Block (3) is gone up and is supported and be connected with bearing block (13) by bearing (4), bearing block (13) is installed in the top of base (14), on rotating shaft (2), be equipped with cone spacer (5), outer ring spacer (6), end ring (7), bearing gland (8), bearing locking nut (9) under the bearing (4) successively, bearing gland (8) compresses bearing (4) and is installed in bearing block (13) lower end, and bearing locking nut (9) is contained in and blocks bearing gland (8) on the rotating shaft (2); Rotating shaft (2) lower end is connected with the output shaft of reductor (12) by shaft coupling (10), and the upper end of reductor (12) is installed in base (14) lower end, and reductor (12) lower end is equipped with rotating servo motor (11).
2. a kind of multi-dimensional manipulator driving device for special equipment of semiconductor according to claim 1 is characterized in that: described transmission direct driving motor (1) can be realized from low speed to powerful smoothness run at a high speed for adopting peace river direct driving motor.
CN2010101814367A 2010-05-25 2010-05-25 Multi-dimensional manipulator driving device for special equipment of semiconductor Active CN101863031B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010101814367A CN101863031B (en) 2010-05-25 2010-05-25 Multi-dimensional manipulator driving device for special equipment of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010101814367A CN101863031B (en) 2010-05-25 2010-05-25 Multi-dimensional manipulator driving device for special equipment of semiconductor

Publications (2)

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CN101863031A true CN101863031A (en) 2010-10-20
CN101863031B CN101863031B (en) 2012-06-13

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102303259A (en) * 2011-08-22 2012-01-04 贵州航天新力铸锻有限责任公司 Method for frictional self-locking clamping and cutting of conical hole piece
CN105415193A (en) * 2015-11-30 2016-03-23 北京中电科电子装备有限公司 Grinding wheel dressing device
CN111216156A (en) * 2020-01-20 2020-06-02 常州机电职业技术学院 Rotary connecting device of robot tail end actuating mechanism

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2851958A1 (en) * 1977-12-06 1979-06-07 Vyzk Vyvojovy Ustav Elektric Electrically driven industrial robot arm - has supporting body fixed to stator of first motor driving second stator
DE4314628C1 (en) * 1993-05-04 1994-06-23 Schunk Fritz Gmbh Electrical rotary or swivelling unit for manipulator e.g. industrial robot
CN201186440Y (en) * 2007-12-25 2009-01-28 中国电子科技集团公司第四十五研究所 Multiple joint robot direct-driven motor driving device
JP2009297886A (en) * 2008-06-17 2009-12-24 Kitagawa Iron Works Co Ltd Workpiece gripping device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2851958A1 (en) * 1977-12-06 1979-06-07 Vyzk Vyvojovy Ustav Elektric Electrically driven industrial robot arm - has supporting body fixed to stator of first motor driving second stator
DE4314628C1 (en) * 1993-05-04 1994-06-23 Schunk Fritz Gmbh Electrical rotary or swivelling unit for manipulator e.g. industrial robot
CN201186440Y (en) * 2007-12-25 2009-01-28 中国电子科技集团公司第四十五研究所 Multiple joint robot direct-driven motor driving device
JP2009297886A (en) * 2008-06-17 2009-12-24 Kitagawa Iron Works Co Ltd Workpiece gripping device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102303259A (en) * 2011-08-22 2012-01-04 贵州航天新力铸锻有限责任公司 Method for frictional self-locking clamping and cutting of conical hole piece
CN105415193A (en) * 2015-11-30 2016-03-23 北京中电科电子装备有限公司 Grinding wheel dressing device
CN111216156A (en) * 2020-01-20 2020-06-02 常州机电职业技术学院 Rotary connecting device of robot tail end actuating mechanism

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Owner name: CETC BEIJING ELECTRONIC EQUIPMENT CO., LTD.

Free format text: FORMER OWNER: NO.45 INST., CHINA ELECTRONIC SCIENCE AND TECHNOLOGY GROUP CORP.

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Applicant before: No.45 Inst., China Electronic science and Technology Group Corp.

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