Summary of the invention
The object of the invention just is to provide a kind of multi-dimensional manipulator driving device for special equipment of semiconductor, and it has solved, and traditional motor driver is loosely organized, precision is low, do not allow manageable technical problem; And solved the high problem of directly driven motor device cost.
For realizing above-mentioned purpose; Technical scheme of the present invention is: multi-dimensional manipulator driving device for special equipment of semiconductor comprises transmission direct driving motor, rotating shaft, Connection Block, bearing, cone spacer, outer ring spacer, end ring, bearing gland, bearing locking nut, shaft coupling, rotating servo motor, reductor, bearing block, base; Rotating shaft is a hollow shaft, and transmission direct driving motor and Connection Block are run through in the rotating shaft upper end, and the transmission direct driving motor directly is connected with rotating shaft; The top of Connection Block and transmission direct driving motor lower ends connect, and the lower end of Connection Block is assemblied on the rotating shaft;
On the rotating shaft under the Connection Block through bearings and be connected with bearing block; Bearing block is installed in the top of base; Be equipped with cone spacer, outer ring spacer, end ring, bearing gland, bearing locking nut under the bearing on the rotating shaft successively; Bearing gland compresses bearing and is installed in the bearing block lower end, and bearing locking nut is contained in and blocks bearing gland on the rotating shaft; The rotating shaft lower end is connected with the output shaft of reductor through shaft coupling, and the upper end of reductor is installed in the base lower end, and the reductor lower end is equipped with rotating servo motor; The driving interface of rotating servo motor is connected with host computer.The upper end of rotating shaft according to the invention can be connected with another joint transmission mechanism, realizes the complex track motion in multi-dimensional manipulator joint.
Transmission direct driving motor according to the invention can be realized from low speed to powerful smoothness run at a high speed for peace river direct driving motor.
Said host computer can comprise motion control card, single-chip microcomputer, PLC controller and impulse generator.
The present invention compared with prior art has following beneficial effect:
The present invention is made up of transmission direct driving motor, rotating shaft, Connection Block, bearing, cone spacer, outer ring spacer, end ring, bearing gland, bearing locking nut, shaft coupling, rotating servo motor, reductor, bearing block, base.Its Connection Block upper end and transmission direct driving motor lower ends, the Connection Block lower end is installed on the rotating shaft, and is simple in structure, and the centralized positioning precision is high; Be connected by bearings between bearing block and the rotating shaft, can improve the rigidity of rotating shaft; Rotating shaft is designed to hollow shaft, makes the various pipelines of multi-dimensional manipulator front end can be hidden in wherein, utilizes hollow structure, is convenient to realize stretching motion; This transmission direct driving motor adopts peace river direct driving motor to have that moment is big, precision is high and characteristics such as cost is low.Adopt the present invention can make that the joint part structure of multi-dimensional manipulator is compact more, guarantee precision easily, be convenient to the advantage of installation and maintenance.Motor-driven interface range of the present invention is wider, can adopt the host computer of formations such as motion control card, single-chip microcomputer, PLC controller and impulse generator to control, and is applicable to the multi-dimensional manipulator in the various fields.
The specific embodiment
Below in conjunction with accompanying drawing the present invention is done further detailed explanation.
Shown in accompanying drawing 1, multi-dimensional manipulator driving device for special equipment of semiconductor of the present invention comprises transmission direct driving motor 1, rotating shaft 2, Connection Block 3, bearing 4, cone spacer 5, outer ring spacer 6, end ring 7, bearing gland 8, bearing locking nut 9, shaft coupling 10, rotating servo motor 11, reductor 12, bearing block 13, base 14; Rotating shaft 2 is for running through the hollow shaft of transmission direct driving motor 1 and Connection Block 3; Connection Block 3 upper ends and transmission direct driving motor 1 lower ends; Connection Block 3 lower ends are installed on the rotating shaft 2, and bearing block 13 is installed in base 14 upper ends, are supported by bearing 4 between bearing block 13 and the rotating shaft 2; And rotating shaft 2 lower ends are equipped with bearing 4, inside and outside spacer ring 5,6, end ring 7, bearing gland 8, bearing locking nut 9, shaft coupling 10 successively; Bearing gland 8 compresses bearing 4 and is installed in bearing block 13 lower ends, and reductor 12 upper ends are installed in base 14 lower ends, and reductor 12 lower ends are equipped with rotating servo motor 11.The driving interface of rotating servo motor 11 is connected with host computer.
This novel multi-dimensional manipulator driving device primary structure is: by forming with a rotating servo motor 11 that links to each other indirectly with rotating shaft 2 with the transmission direct driving motor 1 that rotating shaft 2 directly links to each other; Supported by bearing 4 between bearing block 13 and the rotating shaft 2, bearing gland 8 compresses bearing 4.The output shaft of rotating servo motor 11 is rotated by PC control, and driven rotary axle 2 makes 1 rotation of transmission direct driving motor indirectly, and rotating shaft 2 upper ends can be connected with another joint transmission mechanism, realizes the complex track motion in multi-dimensional manipulator joint.