CN105405797B - One kind gives gas relocation mechanism - Google Patents
One kind gives gas relocation mechanism Download PDFInfo
- Publication number
- CN105405797B CN105405797B CN201511015443.9A CN201511015443A CN105405797B CN 105405797 B CN105405797 B CN 105405797B CN 201511015443 A CN201511015443 A CN 201511015443A CN 105405797 B CN105405797 B CN 105405797B
- Authority
- CN
- China
- Prior art keywords
- pedestal
- diaphragm
- relocation mechanism
- floating
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67271—Sorting devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Diaphragms And Bellows (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The invention provides one kind to give gas relocation mechanism, covered on pedestal including setting at the top of pedestal and the pedestal, the pedestal is provided with the installation cavity of opening upwards, lid vertical direction is provided with through hole on the pedestal, the bottom of the pedestal is provided with the air admission hole connected with installation cavity, lifting body is provided with the installation cavity, the lifting body includes the floating lever, diaphragm and fixed diaphragm ring from top to bottom set, the diaphragm Open Side Down set, the diaphragm, fixed diaphragm ring, floating lever and through hole are arranged concentrically, and spring is provided between being covered on the bottom plate and pedestal.A kind of jacking action given in gas relocation mechanism, lifting body is realized by being supplied into installation cavity of the present invention, ensure that the stationarity of jacking action, in addition, present apparatus automaticity is higher, noise is smaller, and space is smaller.
Description
Technical field
The present invention relates to precision optical machinery field, more particularly to it is a kind of applied to IC pick up the automatic testing, sorting machine of the formula of putting to gas
Relocation mechanism.
Background technology
Envelope vigorous at present surveys the market demand and the production capacity of Feng Ce enterprises and the stability of production is proposed newly
Requirement.But existing envelope measurement equipment (such as automatic detection classifier) is difficult to the requirement for meeting production.Itself main reason is that,
Old envelope measurement equipment automatic performance is poor, typically using artificial or semi-automatic feeding mechanism, it is difficult to meets current IC envelopes
Dress form, model are quick and various to be actually needed.Existing mechanism for testing is surveyed because the overall dimensions to gas relocation mechanism are bigger than normal
Larger to the impulsive force of material during examination, noise is also big, easily product is caused to damage.Therefore, the R＆D personnel one of this area
It is straight be directed to developing a kind of automatic floating, registration, the life-span is permanent, space hold is small, charged air pressure is big be applied to it is automatic
Battery checker gives gas relocation mechanism.
The content of the invention
In view of this, the present invention is directed to propose a kind of give gas relocation mechanism, with solve existing floating installation impulsive force compared with
Greatly, noise is also big, and the technical problems such as damage are easily caused to product.
To reach above-mentioned purpose, the technical proposal of the invention is realized in this way：
One kind, which is given on the pedestal set at the top of gas relocation mechanism, including pedestal and the pedestal, to be covered, and the pedestal is provided with opening
Upward installation cavity, lid vertical direction is provided with through hole on the pedestal, and the through hole and installation cavity face are set, the pedestal
Bottom is provided with the air admission hole connected with installation cavity, and lifting body is provided with the installation cavity, and the lifting body is included by up to
Floating lever, diaphragm and the fixed diaphragm ring of lower setting, the floating lever, diaphragm and fixed diaphragm ring connect as one, the film
Open Side Down sets for piece, and the diaphragm, fixed diaphragm ring, floating lever and through hole are arranged concentrically, the outward flange of the diaphragm and
Installation cavity sealing bottom surface is set, and inlet chamber is formed between diaphragm and the installation cavity bottom surface, and the floating lever includes bottom plate and column,
The column is vertically arranged in the upper surface of bottom plate, and column face through hole is set, and column can slide up and down in through hole, described
Spring is provided between being covered on bottom plate and pedestal.
Further, guide finger is provided between pedestal at the center of the fixed diaphragm ring, the guide finger is fixed vertically
On pedestal, the fixed diaphragm ring and guide finger are slidably connected.
Further, the guide finger connects with foundation bolt.
Further, the bottom surface covered on the pedestal is symmetrically provided with two floating adjusting pins, described two adjustment of floating
Pin is respectively straight pin, and the bottom of two floating adjusting pins is respectively equipped with guide part, and the bottom plate and this two, which float, to be adjusted
Pin is provided with pilot hole correspondingly.
Further, gone back on the bottom surface covered on the pedestal and be symmetrically provided with two the first alignment pins, described two first
Alignment pin is respectively step pin, and the less one end of the first alignment pin diameter and pedestal top cap connect, and first alignment pin is straight
The length of the larger one end in footpath is less than floating adjusting pin and is located at the length outside being covered on pedestal, the bottom plate and two first alignment pins
It is provided with positioning hole correspondingly.
Further, described two floating adjusting pins and two the first alignment pins are in " ten " set up of character patt ern.
Further, two the second alignment pins are provided between being covered on the pedestal and pedestal, two second alignment pins are fixed
On pedestal 1, lid is provided with connecting hole correspondingly with two second alignment pins on the pedestal.
Further, the spring housing is on column.
Further, the diaphragm is fluorine gel silica membrane.
Further, bolt connection between being covered on the pedestal and pedestal, the floating lever, diaphragm and fixed diaphragm interannular are
Bolt connection.
Relative to prior art, one kind of the present invention has the advantage that to gas relocation mechanism：
(1) it is of the present invention a kind of in gas relocation mechanism, installation cavity is provided between being covered on pedestal and pedestal, is being pacified
The lifting body connected and composed by floating lever, diaphragm and fixed diaphragm ring is provided with behaveing affectedly, and by being supplied into installation cavity
The jacking action of lifting body is realized, wherein floating lever includes bottom plate and column, and the structure type ensure that the flat of jacking action
Stability, in addition, present apparatus automaticity is higher, noise is smaller, and space is smaller.
(2) it is of the present invention it is a kind of give in gas relocation mechanism, in order to ensure the accuracy of the jacking stroke of lifting body,
There is provided guide finger, floating adjusting pin and the triple guiding-positioning structure forms of the first alignment pin, lifting body to pop up process
In, guide finger plays preliminary guide effect to lifting body first, then carries out secondary guiding by floating guiding pin, due to top
The rising for rising mechanism is that diaphragm is popped up in the presence of gas and formed, and floating adjusting pin, which also acts as, prevents lifting body from reversing
Effect, the first alignment pin plays a part of further positioning, and ensures that column is accurately inserted into through hole, and ensure that
During lifting body moves up, stationarity that floating lever moves up.
Brief description of the drawings
The accompanying drawing for forming the part of the present invention is used for providing a further understanding of the present invention, schematic reality of the invention
Apply example and its illustrate to be used to explain the present invention, do not form inappropriate limitation of the present invention.In the accompanying drawings：
Fig. 1 is to give gas relocation mechanism exploded view described in the embodiment of the present invention；
Fig. 2 is to give gas relocation mechanism stereogram described in the embodiment of the present invention；
Fig. 3 is to give gas relocation mechanism sectional view described in the embodiment of the present invention；
Fig. 4 is to lifting body structural representation in gas relocation mechanism described in the embodiment of the present invention；
Description of reference numerals：
1- pedestals, covering on 2- pedestals, 3- floating levers, 4- fixes diaphragm ring,
The alignment pins of 5- first, 6- guide fingers, 7- floating adjusting pins, 8- screws,
The alignment pins of 9- second, 10- bolts, 11- springs, 12- diaphragms,
31- bottom plates, 32- columns.
Embodiment
It should be noted that in the case where not conflicting, the feature in embodiment and embodiment in the present invention can phase
Mutually combination.
Describe the present invention in detail below with reference to the accompanying drawings and in conjunction with the embodiments.
It is as Figure 1-Figure 4, a kind of to give lid 2 on gas relocation mechanism, including pedestal 1 and the pedestal of the top of pedestal 1 setting,
Connected by bolt 10 between lid 2 and pedestal on the pedestal, and connected for the ease of quick, on pedestal 1 and pedestal between lid 2
Provided with two the second alignment pins 9, this two the second alignment pins 9 are symmetrical arranged, and opening upwards are provided with the upper surface of the pedestal 1
Installation cavity, be provided with through hole at the center of lid 2 on vertical direction on pedestal, the through hole and installation cavity face are set, the base
The bottom of seat 1 is provided with the air admission hole that connect with installation cavity, and the installation cavity is interior to be provided with lifting body, the lifting body including by
The up to lower floating lever 3 set, diaphragm 12 and fixed diaphragm ring 4, the diaphragm 12 is fluorine gel silica membrane, fluorine gel silica membrane tool
There is very strong practical performance, can be in -50 degree and 200 degree of long-term uses of high temperature, its flexible number is up to more than 50,000,000 times, institute
State diaphragm 12, fixation diaphragm ring 4, floating lever 3 and through hole to be arranged concentrically, the floating lever 3 includes bottom plate 31 and column 32, described
Column 32 is vertically arranged in the upper surface of bottom plate 31, and the face through hole of column 32 is set, and column 32 can slide up and down in through hole,
Fixed diaphragm ring 4 includes supporting plate and support column, and the support column is fixed on the upper surface of supporting plate, the floating lever 3, diaphragm
12 are linked into an integrated entity with fixed diaphragm ring 4 by bolt 10, wherein, bottom plate 31 is close to the upper surface of diaphragm 12, and diaphragm 12 is set with
On the support columns, the lower surface of diaphragm is close in the upper surface of supporting plate, ensure that between floating lever 3, diaphragm 12 and fixed diaphragm ring 4
Air-tightness, Open Side Down sets for the diaphragm 12, and the outward flange of the diaphragm 12 is pressed on installation cavity bottom by lid 2 on pedestal
On face, ensure diaphragm 12 outward flange and installation cavity bottom surface be in sealed set, formed between the diaphragm 12 and installation cavity bottom surface into
Air cavity, in order to ensure the linearity of lifting body jacking action, it is provided with and is oriented between pedestal 1 at the center of fixed diaphragm ring 4
Pin 6, the guide finger 6 are fixed on pedestal 1 by screw 8, and the fixed diaphragm ring 4 and guide finger 6 are slidably connected；In bottom plate
31 and pedestal on be provided with spring 11 between lid 2, the spring 11 is sleeved on the face of cylinder of column 32.The design of the spring 11 is on the one hand
It ensure that and cushioning effect is played to moving up for floating lever 3 when diaphragm 12 drives floating lever 3 to move up, prevent floating lever 3 and pedestal
Hardness between upper lid 2 is collided, and on the other hand, when inlet chamber return-air, floating lever 3 is under the effect of the elastic force of spring 11, band dynamic diaphragm
12 reset.
The bottom surface of lid 2 is symmetrically provided with two floating adjusting pins 7 and two the first alignment pins 5 on the pedestal, described
Into " ten " set up of character patt ern, described two floating adjusting pins 7 are respectively cylinder for two floating adjusting pins 7 and two the first alignment pins 5
Pin, the bottoms of two floating adjusting pins 7 are respectively equipped with guide part, a pair of the bottom plate 31 and two floating adjusting pins 7 one
That answers is provided with pilot hole；Two floating adjusting pins 7 play a part of being oriented to and prevent to reverse during moving up floating lever 3；Institute
Two the first alignment pins 5 respectively step pin is stated, lid 2 connects on the less one end of the diameter of the first alignment pin 5 and pedestal, described
The length that first alignment pin 5 is relatively large in diameter one end is less than floating adjusting pin 7 and is located at length on pedestal outside lid 2, then the bottom
Plate 31 and this two the first alignment pins 5 are provided with positioning hole correspondingly, and the structure type is right by floating adjusting pin 7 first
Floating lever 3 plays guide effect, then plays pinpoint effect to floating lever 3 by two the first alignment pins 5.
The concrete operations of the present apparatus are as described below：
This is arranged on into IC to gas relocation mechanism to pick up on the automatic testing, sorting machine of the formula of putting, when between diaphragm 12 and installation cavity bottom surface
Inlet chamber air inlet when, the diaphragm 12 of lifting body is oriented to by the guide finger 6 on body base 1, can up be ejected, Zhi Houfu
Lever 3 is positioned by the precision positioning pin 5 on body base lid 2, and now internal actions are completed, and inside supply exists always, supplies
The size of pressure is determined that the output loading in the case of 0.5PMa of normal work air pressure reaches to be adjusted by chip under test contact force
100kgf power, now, the top surface of column 32 are stretched out by through hole, and chip is lifted, and chip is carried out by other other components
Draw, dock with test board being tested, the present apparatus mainly solve chip avoided when being accurately positioned it is mechanical contact firmly,
There is certain amount of floating to eliminate the mode of hard link, after the completion of precision positioning, ensure that the integrality of product.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
God any modification, equivalent substitution and improvements made etc., should be included in the scope of the protection with principle.
Claims (10)
1. one kind gives gas relocation mechanism, it is characterised in that：Covered on pedestal including setting at the top of pedestal (1) and the pedestal (1)
(2), the pedestal (1) is provided with the installation cavity of opening upwards, and lid (2) vertical direction is provided with through hole, the through hole on the pedestal
Set with installation cavity face, the bottom of the pedestal (1) is provided with the air admission hole connected with installation cavity, and top is provided with the installation cavity
Mechanism is risen, the lifting body includes the floating lever (3), diaphragm (12) and fixed diaphragm ring (4) from top to bottom set, described floating
Lever (3), diaphragm (12) and fixed diaphragm ring (4) connect as one, and Open Side Down sets for the diaphragm (12), the diaphragm
(12), fixed diaphragm ring (4), floating lever (3) and through hole are arranged concentrically, and the outward flange and installation cavity bottom surface of the diaphragm (12) are close
Envelope is set, and inlet chamber is formed between the diaphragm (12) and installation cavity bottom surface, the floating lever (3) includes bottom plate (31) and column
(32), the column (32) is vertically arranged in the upper surface of bottom plate (31), and column (32) face through hole is set, and column (32) exists
It can be slided up and down in through hole, spring (11) is provided between lid (2) on the bottom plate (31) and pedestal.
2. one kind according to claim 1 gives gas relocation mechanism, it is characterised in that:The center of the fixed diaphragm ring (4)
Guide finger (6) is provided between place and pedestal (1), the guide finger (6) is fixed on pedestal (1) vertically, the fixed diaphragm ring (4)
It is slidably connected with guide finger (6).
3. one kind according to claim 2 gives gas relocation mechanism, it is characterised in that：The guide finger (6) and pedestal (1) spiral shell
Silk connection.
4. one kind according to claim 1 or 2 gives gas relocation mechanism, it is characterised in that：The bottom surface of (2) is covered on the pedestal
Two floating adjusting pins (7) symmetrically are provided with, described two floating adjusting pins (7) are respectively straight pin, this two adjustment of floating
The bottom of pin (7) is respectively equipped with guide part, and the bottom plate (31) and two floating adjusting pins (7) are provided with correspondingly to be oriented to
Hole.
5. one kind according to claim 4 gives gas relocation mechanism, it is characterised in that：Covered on the pedestal on the bottom surface of (2)
Two the first alignment pins (5) symmetrically also are provided with, described two first alignment pins (5) are respectively step pin, first alignment pin
(5) (2) connection is covered on the less one end of diameter and pedestal, first alignment pin (5) is relatively large in diameter the length of one end less than floating
Dynamic adjusting pin (7), which is located on pedestal, covers the length of (2) outside, and the bottom plate (31) and two first alignment pins (5) correspond
Be provided with positioning hole.
6. one kind according to claim 5 gives gas relocation mechanism, it is characterised in that：Described two floating adjusting pins (7) and
Two the first alignment pins (5) are in " ten " set up of character patt ern.
7. one kind according to claim 1 gives gas relocation mechanism, it is characterised in that：(2) are covered on the pedestal (1) and pedestal
Between be provided with two the second alignment pins (9), two second alignment pins (9) are fixed on pedestal (1), on the pedestal cover (2) with
Two second alignment pins (9) are provided with connecting hole correspondingly.
8. one kind according to claim 1 gives gas relocation mechanism, it is characterised in that：The spring (11) is sleeved on column
(32) on.
9. one kind according to claim 1 gives gas relocation mechanism, it is characterised in that：The diaphragm (12) is fluorine pellosil
Piece.
10. one kind according to claim 1 gives gas relocation mechanism, it is characterised in that：Covered on the pedestal (1) and pedestal
(2) bolt connection between, it is bolt connection between the floating lever (3), diaphragm (12) and fixed diaphragm ring (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511015443.9A CN105405797B (en) | 2015-12-30 | 2015-12-30 | One kind gives gas relocation mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511015443.9A CN105405797B (en) | 2015-12-30 | 2015-12-30 | One kind gives gas relocation mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105405797A CN105405797A (en) | 2016-03-16 |
| CN105405797B true CN105405797B (en) | 2018-01-12 |
Family
ID=55471200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201511015443.9A Active CN105405797B (en) | 2015-12-30 | 2015-12-30 | One kind gives gas relocation mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105405797B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108000549B (en) * | 2017-12-27 | 2023-12-05 | 天津金海通半导体设备股份有限公司 | Vacuum grabbing sheet type product floating sucker mechanism |
| CN112798941B (en) * | 2021-04-13 | 2021-07-06 | 天津金海通半导体设备股份有限公司 | Two-stage floating suction head device suitable for multi-stage adjustment of different use temperatures and pressures |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101794719A (en) * | 2010-03-23 | 2010-08-04 | 中国电子科技集团公司第二研究所 | Automatic lifting and adsorbing mechanism for wafer |
| CN202638769U (en) * | 2012-05-29 | 2013-01-02 | 格兰达技术（深圳）有限公司 | Test grip assembly device of integrated circuit (IC) chip test sorting machine |
| CN203404383U (en) * | 2013-06-19 | 2014-01-22 | 陈明生 | Inflatable seat and air valve structure thereof |
| CN205376480U (en) * | 2015-12-30 | 2016-07-06 | 天津金海通自动化设备制造有限公司 | Floating installation of giving gas |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20090013299A (en) * | 2007-08-01 | 2009-02-05 | 주식회사 알피에스 | The rotating table using air bearing |
| US9502279B2 (en) * | 2013-06-28 | 2016-11-22 | Lam Research Corporation | Installation fixture having a micro-grooved non-stick surface |
-
2015
- 2015-12-30 CN CN201511015443.9A patent/CN105405797B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101794719A (en) * | 2010-03-23 | 2010-08-04 | 中国电子科技集团公司第二研究所 | Automatic lifting and adsorbing mechanism for wafer |
| CN202638769U (en) * | 2012-05-29 | 2013-01-02 | 格兰达技术（深圳）有限公司 | Test grip assembly device of integrated circuit (IC) chip test sorting machine |
| CN203404383U (en) * | 2013-06-19 | 2014-01-22 | 陈明生 | Inflatable seat and air valve structure thereof |
| CN205376480U (en) * | 2015-12-30 | 2016-07-06 | 天津金海通自动化设备制造有限公司 | Floating installation of giving gas |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105405797A (en) | 2016-03-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105405797B (en) | One kind gives gas relocation mechanism | |
| CN102778590A (en) | Fixture suitable for circuit board testing table | |
| CN110108909A (en) | A kind of ICT test fixture | |
| US3945248A (en) | Wire bond integrity tester | |
| CN104330008B (en) | A kind of rocking arm set component dimension measuring device and measuring method | |
| WO2023092899A1 (en) | Membrane probe card and probe head thereof | |
| CN206193046U (en) | Two kickboard formula optical chip module test sockets | |
| WO2023092898A1 (en) | Membrane probe card and probe head thereof | |
| CN205376480U (en) | Floating installation of giving gas | |
| JP2006331666A (en) | Ic socket | |
| CN106092245A (en) | A kind of tester for detecting inside lithium ion cell spatial volume and method of testing thereof | |
| CN207395951U (en) | Pressure meter structure | |
| CN107764636A (en) | A kind of deformation measuring device and method of cuboid rock sample conventional triaxial compression test | |
| WO2023092897A1 (en) | Membrane probe card and probe head thereof | |
| CN106225739A (en) | A kind of Pneumatic measuring head measuring high accuracy hemisphere sphere diameter | |
| CN210603255U (en) | Step appearance takes precautions against earthquakes | |
| CN103474385B (en) | Chip adhesive workbench | |
| CN206505156U (en) | A kind of wafer scale environmental reliability test loaded tool and tester table | |
| CN108981633A (en) | A kind of detection device of engine cylinder body | |
| TWI742934B (en) | Probing system | |
| CN207231776U (en) | Variable force application apparatus | |
| CN205483858U (en) | Falling ball test device | |
| CN208847067U (en) | A kind of workpiece bottom outlet suspension type detection device | |
| CN206930509U (en) | Make the etch station and gas-phase decomposition equipment of the sample of the amount of metal for measuring silicon chip surface | |
| TWI706140B (en) | Electronic component conveying device and electronic component inspection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 300384 A106, No.8 Wuhua Road, Huayuan Industrial Zone, Binhai New Area, Tianjin Patentee after: Tianjin jinhaitong Semiconductor Equipment Co.,Ltd. Address before: 300384 industrial incubation-2, North 2-504, No. 18, Haitai West Road, Huayuan Industrial Zone, hi tech Zone, Binhai New Area, Tianjin Patentee before: JHT DESIGN Co.,Ltd. |