KR20090013299A - The rotating table using air bearing - Google Patents

The rotating table using air bearing Download PDF

Info

Publication number
KR20090013299A
KR20090013299A KR1020070077286A KR20070077286A KR20090013299A KR 20090013299 A KR20090013299 A KR 20090013299A KR 1020070077286 A KR1020070077286 A KR 1020070077286A KR 20070077286 A KR20070077286 A KR 20070077286A KR 20090013299 A KR20090013299 A KR 20090013299A
Authority
KR
South Korea
Prior art keywords
shaft
air bearing
air
collar
housing
Prior art date
Application number
KR1020070077286A
Other languages
Korean (ko)
Inventor
이동헌
육인수
Original Assignee
주식회사 알피에스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 알피에스 filed Critical 주식회사 알피에스
Priority to KR1020070077286A priority Critical patent/KR20090013299A/en
Publication of KR20090013299A publication Critical patent/KR20090013299A/en

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q16/00—Equipment for precise positioning of tool or work into particular locations not otherwise provided for
    • B23Q16/02—Indexing equipment
    • B23Q16/022—Indexing equipment in which only the indexing movement is of importance
    • B23Q16/025—Indexing equipment in which only the indexing movement is of importance by converting a continuous movement into a rotary indexing movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/02—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of drums or rotating tables or discs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C17/00—Sliding-contact bearings for exclusively rotary movement
    • F16C17/10—Sliding-contact bearings for exclusively rotary movement for both radial and axial load
    • F16C17/102—Sliding-contact bearings for exclusively rotary movement for both radial and axial load with grooves in the bearing surface to generate hydrodynamic pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0625—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via supply slits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

A spinning table using an air bearing is provided to get torque with compressed air, reduce noise and increase economical efficiency. A spinning table using an air bearing comprises a housing(3), a shaft(6) of cylindrical shape whose upper edge is protruded out, a shaft collar(2) combined in the lower part of shaft, an air bearing(4), including an exhaust path(7) in a bottom of inside, installed in an exterior of shaft body and a cover(5) installed in a top of the air bearing. The lower part of the housing connects with a base plate(1). The upper part of the air bearing includes a ring for maintaining vacuum. The middle of one side of the housing includes an air inlet(100). The lower side of the air inlet includes a muffler(30).

Description

에어베어링을 이용한 회전테이블{The rotating table using air bearing} The rotating table using air bearings

본 발명은 정밀기기 및 반도체부품 가공에 사용되는 회전테이블을 개량한 것으로서, 압축공기에 의해 회전력을 얻는 저속형 회전테이블로서, 회전수의 조절이 가능한 에어베어링을 이용한 회전테이블에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is an improvement of a rotating table used for processing precision instruments and semiconductor parts, and is a low speed rotary table that obtains rotational force by compressed air, and relates to a rotating table using an air bearing whose rotation speed can be adjusted.

회전테이블은 각종 정밀기기, 반도체 부품의 검사나, 회전에 의해 제조되는 제조장치에 사용되는 기계로서, 모터에 풀리나 체인을 이용하여 테이블을 회전시키거나, 공기압, 유압을 이용하여 회전시켜 사용하고 있다.The rotary table is a machine used for inspection of various precision instruments and semiconductor parts or a manufacturing apparatus manufactured by rotation. The rotary table is used to rotate a table using a pulley or a chain on a motor, or by using pneumatic or hydraulic pressure. .

일반적으로 에어베어링 중에서 미끄럼 베어링은 베어링 면과 운동면이 윤활유로 형성된 미끄럼 막을 사이에 두고 접촉하고 있으므로 윤활유의 종류에 따라 다소 차이가 있기는 하지만 마찰, 소음, 열 발생 등 두 면이 마찰함으로써 야기되는 어느 정도의 기계적 손실은 피할 수 없게 된다.In general, in the air bearings, the sliding bearings are in contact with the sliding surface formed by the lubricating oil between the bearing surface and the moving surface. Some mechanical loss is inevitable.

이러한 기계적 손실을 배제하여 베어링의 성능을 향상시키기 위해 개발된 것이 공압식 베어링이며, 이 베어링의 대표적인 예로서 에어 베어링을 들 수 있다.Pneumatic bearings have been developed to exclude such mechanical losses and improve the performance of bearings, and air bearings are a representative example of these bearings.

에어 베어링은 가이드 레일과 슬라이더 사이의 베어링 틈새에 압축공기를 분사시켜 형성되는 공기압에 의해 슬라이더를 부상시켜 하중을 지지하도록 되어 있으 며, 슬라이더와 가이드 레일의 형상에 따라 장방형 또는 T자형으로 나눌 수 있다.Air bearings support the load by floating the slider by the air pressure formed by spraying compressed air into the bearing gap between the guide rail and the slider, and can be divided into rectangular or T-shaped according to the shape of the slider and guide rail. .

국내출원번호 제1999-48582(1999.11.04)호에는 모터의 회전자 일측 연장선상에 형성된 스핀들의 외경면에 소정의 이격공간을 가지며 결합되어 스핀들의 외경면에 에어를 분사하여 스핀들이 에어와 접동회전하는 기술이 알려져 있으며,Domestic application No. 1999-48582 (1999.11.04) has a predetermined separation space on the outer diameter surface of the spindle formed on one extension line of the rotor of the motor and is coupled to inject air to the outer diameter surface of the spindle so that the spindle slides with air. Rotating technology is known,

국내특허등록공보 등록번호 제 10-0556553호는 작업물이 세팅되어 회전가능하게 설치된 회전테이블(4)을 구비하되, 상기 회전테이블(4)의 외주부 하부에 부착되는 경면(鏡面)가공된 하면(51)을 가지는 환상의 유체미끄럼베어링(5)과; 공작기계의 기체(機體; BASE)에 지지되어 상기 유체미끄럼베어링(5)과 윤활유(O)를 수납하여 회전 가능하게 지지하도록 그 내면이 경면(鏡面)가공된 유체수납구(6);로 이루어지는 회전테이블용 하이브리드 베어링에 있어서, 상기 유체미끄럼베어링(5)의 하면(51)에는 경면가공된 주철면(51A)과 타카이드면(51B)이 교호로 마련되는 베어링 시스템을 제공된 회전테이블용 하이브리드 베어링에 관한 기술이 공개되어 있고,Korean Patent Registration Publication No. 10-0556553 has a rotary table 4 rotatably installed to set a workpiece, and is provided with a mirror-finished bottom surface attached to a lower portion of the outer periphery of the rotary table 4 ( An annular fluid sliding bearing 5 having 51); A fluid storage port 6 whose inner surface is mirror-finished so as to be supported by a base of the machine tool and rotatably supported by the fluid sliding bearing 5 and the lubricant O; In the hybrid bearing for a table, a bearing system is provided on the lower surface 51 of the fluid sliding bearing 5 alternately provided with a mirror-machined cast iron surface 51A and a tactical surface 51B. The technology is open to the public,

동 공보 등록번호 제 10-0370636호에는 피처리기판이 배치되는 회전 가능한 회전대와, 이 회전대를 회전 구동하는 회전구동체와, 이 회전대와 함께 회전하고, 회전대 위쪽에 있어서 피처리기판 가장자리부를 유지하기 위해 회전대 가장자리부 근방에 회동지지점을 가지고, 이 회동지지점을 중심으로 하여 회전대에 대하여 반지름방향으로 회동이 자유롭고, 피처리기판을 유지하는 유지부 및 피가압부를 각각 가지는 복수의 유지부재와, 유지부재 각각의 유지부를 회전대의 중심측에 힘을 가하는 힘을 가하는부재와, 회전대 아래쪽에 배치되고, 힘을 가하는 부재의 힘을 가 하는 방향과는 역방향으로 상기 피가압부를 가압하는 가압부재와, 이 가압부재를 상하방향으로 구동하는 구동기구에 의해 구성되는 회전처리장치가 공개되어 있으며,Publication No. 10-0370636 discloses a rotatable swivel on which a substrate to be processed is disposed, a swivel drive for rotationally driving the swivel, and rotating with the swivel, to hold the edge of the substrate above the swivel. And a plurality of holding members each having a rotation support point near the edge of the swivel base, freely rotating in the radial direction with respect to the swivel base, and having a holding portion and a pressurized portion for holding the substrate to be processed, respectively. A member for applying a force for applying a force to the center side of the rotary table, a pressure member disposed below the rotary table, for pressing the member to be pressed in a direction opposite to the direction of applying a force of the member for applying a force, and the pressure The rotation processing apparatus comprised by the drive mechanism which drives a member to an up-down direction is disclosed,

동 공보 등록번호 제10-0075041호에는 베이스(3)에 회전이동이 자유롭게 지지된 회전 테이블을 랙·피니언 기구(9)로 선회시키고 베이스에 설치한 위치결정부재(6a,6b)의 회전 테이블에 설치한 스토퍼를 맞닿게 하여 선회 끝의 위치결정을 하는 분할장치에서 베이스에 이송나사축을 설치하고 이송나사축의 한쪽 끝에 브레이크 부착 전동모터를 접속하고 이송나사축에 이송너트를 나사와 함께 고정하고 이송너트와 랙을 서로 끼워 위치시키는 회전테이블에 관한 기술이 공개되어 있으나, Publication No. 10-0075041 discloses a rotary table freely rotatable on the base 3 with a rack and pinion mechanism 9, and on a rotary table of the positioning members 6a and 6b mounted on the base. Install the feed screw shaft on the base in the dividing device for positioning the stopper by contacting the installed stopper, connect the electric motor with brake to one end of the feed screw shaft, fix the feed nut on the feed screw shaft together with the screw, and feed nut The technology related to the rotary table for positioning the rack and the rack is disclosed,

상기와 같은 종래의 기술 테이블을 회전시키는 기술구성이 복잡하고, 발란스(균형)가 잡히지 않아 정밀제품 가공시 많은 문제점이 있어 왔다. The technical configuration of rotating the conventional technology table as described above is complicated, and there are many problems in processing a precision product because there is no balance (balance).

본 발명은 상기와 같은 문제점을 해결하고자, 압축공기로 회전력을 얻는 저속형 회전테이블로서, 회전수의 조절이 가능하며, 압축공기가 공급되어 압축공기에 의해 에어베어링의 내부를 통과하여 외부로 배출되는 통로에 날개를 달아주어 날개와 배출되는 압축공기 사이의 마찰(저항)에 의해 힘이 발생되어 회전하는 원리로 날개의 각도의 조절에 의해 회전수를 조절하는 에어베어링을 이용한 회전테이블을 제공하는 것이 본 발명이 이루고자 하는 기술적 과제인 것이다.The present invention is to solve the above problems, as a low-speed rotary table to obtain a rotational force to the compressed air, it is possible to adjust the rotation speed, the compressed air is supplied through the inside of the air bearing by the compressed air discharged to the outside Provides a rotary table using an air bearing that adjusts the number of revolutions by adjusting the angle of the wing in the principle that the force is generated by the friction (resistance) between the wing and the discharged compressed air by attaching the wing to the passage. That is the technical problem to be achieved by the present invention.

상기와 같은 목적을 달성하기 위하여 본 발명은 압축공기에 의해 회전력을 얻는 저속형 회전테이블로서, 공급되는 압축공기에 의해 에어베어링의 기능이 끝나면, 외부로 배출되는 통로에 날개를 달아주어 날개와 배출되는 압축공기 사이의 마찰(저항)에 의해 힘이 발생되어 회전하는 원리로 날개의 각도의 조절에 의해 회전수를 회전수의 조절이 수십rpm~수백rpm 까지 조절하는 장치인 것이다.In order to achieve the above object, the present invention is a low-speed rotary table to obtain a rotational force by the compressed air, when the function of the air bearing by the supplied compressed air, the wing is discharged by attaching the wing to the passage discharged to the outside The force is generated by the friction (resistance) between the compressed air to be rotated by the principle of the rotation of the blade by adjusting the rotational speed of the device to adjust the number of revolutions from tens of rpm to hundreds of rpm.

상기와 같은 본 발명은 압축공기를 이용하여, 회전력을 얻어 날개의 각도에 의해 회전수의 조절이 가능하여 소음이 없는 친환경적이며 경제적인 장점이 있는 것이다.The present invention as described above has the advantage of eco-friendly and economical without noise by adjusting the rotation speed by the angle of the blade to obtain a rotational force by using the compressed air.

본 발명은 베이스판(1)의 상부에 회전체인 샤프트(6)가 내장된 에어베어링(4)이 일정공간을 형성하도록 결합된 하우징(3)이 설치하되 샤프트(6)의 하부에 결합된 샤프트칼라(2)와 일정공간을 형성하여 샤프트(6)와 샤프트칼라(2)의 회전을 원활하게 하였다.The present invention is installed on the upper portion of the base plate 1, the housing (3) coupled to the air bearing (4) with a built-in shaft 6 is formed in a predetermined space is coupled to the lower portion of the shaft (6) The shaft collar 2 and a predetermined space were formed to smoothly rotate the shaft 6 and the shaft collar 2.

본 발명의 에어베어링을 이용한 회전테이블을 도면을 참고하여 상세히 설명하면 다음과 같다. Turning to the rotary table using the air bearing of the present invention with reference to the drawings in detail as follows.

도1 본 발명의 에어베어링을 이용한 회전테이블 전체도, 도2 본 발명의 에어 베어링을 이용한 회전테이블 측면 상세도, 도3 본 발명의 에어베어링을 이용한 회전테이블 평면 상세도, 도4 본 발명의 샤프트와 샤프트칼라(Shaft Collar) 분해 조립 상세도, 도5 본 발명의 샤프트 평면 상세도, 도6 본 발명의 샤프트칼라(Shaft Collar) 평면 상세도를 도시한 것이며, 베이스판(1), 샤프트칼라(COLLAR)(2), 하우징(3), 에어베어링(4), 커버(5), 샤프트(6), 배출통로(7), 링(19), 샤프트칼라몸체(21), 날개(22), 샤프트칼라내부공간부(24), 샤프트칼라결합통공부(25), 소음기(30), 샤프트상부(61), 샤프트몸체(62), 샤프트하부테두리단턱(63), 샤프트내부공간부(64), 샤프트결합통공부(65), 에어주입구(100)를 나타낸 것임을 알 수 있다. 1 is an overall view of a rotating table using the air bearing of the present invention, FIG. 2 is a detailed side view of the rotating table using the air bearing of the present invention, FIG. 3 is a detailed view of a rotating table using the air bearing of the present invention, and FIG. 4 is a shaft of the present invention. And Shaft Collar disassembly and assembly details, FIG. 5 shows a detailed view of the shaft plane of the present invention, and FIG. 6 shows a detailed view of the Shaft Collar plane of the present invention, wherein the base plate 1 and the shaft collar ( COLLAR (2), housing (3), air bearing (4), cover (5), shaft (6), discharge passage (7), ring (19), shaft collar body (21), wing (22), Shaft collar inner space 24, shaft collar coupling through 25, silencer 30, shaft upper portion 61, shaft body 62, shaft lower edge step 63, shaft inner space 64 It can be seen that the shaft coupling through-hole 65, air inlet 100 is shown.

구조를 살펴보면, 도1 내지 도3에 도시된 바와 같이, 본 발명의 에어베어링을 이용한 회전테이블은 상부테두리가 외부로 돌출된 원통형상의 샤프트(6)와, 상기 샤프트(6)의 하부에 결합된 샤프트칼라(2)와, 상기 샤프트(6)의 샤프트몸체(62)의 외부에 설치되며 내측 하부에 배출통로가 구비된 에어베어링(4)과, Looking at the structure, as shown in Figures 1 to 3, the rotary table using the air bearing of the present invention is coupled to the cylindrical shaft 6, the upper edge protruding outward, the lower portion of the shaft 6 An air bearing 4 installed at an outer side of the shaft collar 2 and the shaft body 62 of the shaft 6 and having a discharge passage at an inner lower portion thereof;

상기 에어베어링(4)의 상부에 설치된 커버(5)와, A cover 5 installed on an upper portion of the air bearing 4,

상기 에어베어링(4)의 측면이 일정공간부가 형성되도록 이격되어 결합된 하우징(3)과,The side of the air bearing 4 is coupled to the housing 3 spaced apart to form a predetermined space portion,

상기 하우징(3)의 하부에 설치되어 있으며, 하우징(3)의 내부에 결합된 샤프트칼라(2)의 하부에 일정공간부가 형성되도록 결합된 베이스판(1)과,A base plate (1) installed at a lower portion of the housing (3) and coupled to form a predetermined space portion at a lower portion of the shaft collar (2) coupled to the inside of the housing (3);

상기 에어베어링(4)의 상부는 커버(5)와 하우징(3)상부가 견고하게 결착되어 진공을 유지하기 위하여 내장된 링(19)과,The upper portion of the air bearing (4) is a ring (19) is built in the cover 5 and the upper portion of the housing 3 is firmly fixed to maintain a vacuum,

상기 하우징(3)의 측면 중간 일측에 설치된 에어호스가 결착되는 에어주입구(100)와, 상기 에어주입구(100)의 하부 일측에 설치된 소음기(30)로 구성된 구조임을 알 수 있다.It can be seen that the structure is composed of an air inlet 100 to which the air hose is installed on one side of the middle side of the housing 3, and a silencer 30 provided on the lower side of the air inlet 100.

상기 샤프트(6)는 도4 및 도5에 도시된 바와 같이, 원통관 형상의 샤프트몸체(62)와, 상기 샤프트몸체(62)의 상부에 설치되며 외부로 돌출된 샤프트상부(61)와, 상기 샤프트몸체(62)의 하부에 형성되며 테두리 끝단부에 홈이 형성된 샤프트하부테두리단턱(63)과, 상기 샤프트상부(61) 및 샤프트하부테두리단턱(63) 테두리에 다수개 설치된 샤프트결합통공부(65)로 구성되어 있고,4 and 5, the shaft 6 has a cylindrical tubular shaft body 62, a shaft upper part 61 protruding outwardly and installed on the shaft body 62. Shaft lower periphery (63) formed in the lower portion of the shaft body 62 and the groove is formed in the edge of the edge, and the shaft coupling through hole provided in the plurality of shaft upper edge (61) and shaft lower edge (63) It consists of 65,

상기 샤프트칼라(2)는 도4 및 도6에 도시된 바와 같이, 샤프트(6)의 하부에 결합되도록 샤프트(6)의 하부구조에 대응되는 구조로서, 중앙부에 통공이 구비된 도넛형상으로서, 중앙은 샤프트(6)의 하부에 결합되며, 테두리부분은 에어베어링(4)의 하부에 결합되며, The shaft collar 2 is a structure corresponding to the lower structure of the shaft 6 to be coupled to the lower portion of the shaft 6, as shown in Figures 4 and 6, a donut shape having a through hole in the center, The center is coupled to the bottom of the shaft 6, the rim is coupled to the bottom of the air bearing 4,

샤프트칼라몸체(21)와, 상기 샤프트칼라몸체(21)의 테두리에 설치된 다수개의 날개(22)와, 상기 샤프트칼라몸체(21)의 중앙부에 형성된 샤프트칼라내부공간부(24)와, 상기 샤프트칼라몸체(21)에 일정간격 이격되어 설치된 다수개의 샤프트칼라결합통공부(25)로 구성되어 있음을 알 수 있다. Shaft collar body 21, a plurality of wings 22 provided on the edge of the shaft collar body 21, the shaft collar inner space 24 formed in the central portion of the shaft collar body 21, and the shaft It can be seen that the collar body 21 is composed of a plurality of shaft collar coupling through-hole 25 spaced apart by a predetermined interval.

사용상태를 설명하면, 에어주입기(100)를 통해 에어를 내부로 공급하면, 에 어베어링(4)을 통과하여 에어베어링(4)의 하부 일측에 설치된 배출통로(7)를 거쳐 에어가 배출시, 배출통로(7)의 하부에 설치된 샤프트칼라(2)의 날개에 에어가 부딪혀 날개가 저항을 받아 회전하면서 샤프트칼라(2)의 상부에 결합된 원통관 형상의 샤프트(6)가 회전하며, 이때 날개와 압축공기와의 부딪칠 경우 발생하는 고음을 감소하기 위하여 하우징 하부 일측에 소음기에 의해 소음을 감소시키도록 하여 사용하는 방법인 것이다. Referring to the state of use, when the air is supplied through the air injector 100, when the air is discharged through the air passage (4) through the discharge passage 7 installed on the lower side of the air bearing (4) When the air hits the blade of the shaft collar 2 installed at the lower portion of the discharge passage 7 and the blade rotates under resistance, the cylindrical shaft shaft 6 coupled to the upper portion of the shaft collar 2 rotates. At this time, in order to reduce the high sound generated when colliding with the wing and compressed air is to use the method to reduce the noise by the silencer on the lower side of the housing.

도1 본 발명의 에어베어링을 이용한 회전테이블 전체도1 is an overall view of a rotary table using the air bearing of the present invention

도2 본 발명의 에어베어링을 이용한 회전테이블 측면 상세도Figure 2 is a side view of the rotary table using the air bearing of the present invention

도3 본 발명의 에어베어링을 이용한 회전테이블 평면 상세도3 is a detailed view of a rotating table using the air bearing of the present invention

도4 본 발명의 샤프트와 샤프트칼라(Shaft Collar) 분해 조립 상세도4 is an exploded view of the shaft and shaft collar of the present invention.

도5 본 발명의 샤프트 평면 상세도Figure 5 Detailed view of the shaft of the present invention

도6 본 발명의 샤프트칼라(Shaft Collar) 평면 상세도Figure 6 Detailed view of the shaft collar of the present invention

<도면의 부호설명><Description of the Drawings>

베이스판(1), 샤프트칼라(COLLAR)(2), 하우징(3), 에어베어링(4), 커버(5), 샤프트(6), 배출통로(7), 링(19), 샤프트칼라몸체(21), 날개(22), 샤프트칼라내부공간부(24), 샤프트칼라결합통공부(25), 소음기(30), 샤프트상부(61), 샤프트몸체(62), 샤프트하부테두리단턱(63), 샤프트내부공간부(64), 샤프트결합통공부(65), 에어주입구(100).Base plate (1), shaft collar (2), housing (3), air bearing (4), cover (5), shaft (6), discharge passage (7), ring (19), shaft collar body 21, the blade 22, the shaft collar inner space 24, the shaft collar coupling through 25, the silencer 30, the upper shaft 61, the shaft body 62, the shaft lower edge step 63 ), The shaft inner space 64, the shaft coupling through-hole 65, the air inlet 100.

Claims (3)

에어베어링을 이용한 회전테이블에 있어서,In a rotary table using air bearings, 상부테두리가 외부로 돌출된 원통형상의 샤프트(6)와, 상기 샤프트(6)의 하부에 결합된 샤프트칼라(2)와, 상기 샤프트(6)의 샤프트몸체(62)의 외부에 설치되며 내측 하부에 배출통로가 구비된 에어베어링(4)과, Cylindrical shaft 6 with an upper edge projecting outward, a shaft collar 2 coupled to a lower portion of the shaft 6, and a shaft inner portion 62 of the shaft 6, which is installed outside An air bearing 4 having a discharge passage therein, 상기 에어베어링(4)의 상부에 설치된 커버(5)와, A cover 5 installed on an upper portion of the air bearing 4, 상기 에어베어링(4)의 측면이 일정공간부가 형성되도록 이격되어 결합된 하우징(3)과,The side of the air bearing 4 is coupled to the housing 3 spaced apart to form a predetermined space portion, 상기 하우징(3)의 하부에 설치되어 있으며, 하우징(3)의 내부에 결합된 샤프트칼라(2)의 하부에 일정공간부가 형성되도록 결합된 베이스판(1)과,A base plate (1) installed at a lower portion of the housing (3) and coupled to form a predetermined space portion at a lower portion of the shaft collar (2) coupled to the inside of the housing (3); 상기 에어베어링(4)의 상부는 커버(5)와 하우징(3)상부가 견고하게 결착되어 진공을 유지하기 위하여 내장된 링(19)과,The upper portion of the air bearing (4) is a ring (19) is built in the cover 5 and the upper portion of the housing 3 is firmly fixed to maintain a vacuum, 상기 하우징(3)의 측면 중간 일측에 설치된 에어호스가 결착되는 에어주입구(100)와, 상기 에어주입구(100)의 하부 일측에 설치된 소음기(30)를 포함하여 구성되어 있음을 특징으로 하는 에어베어링을 이용한 회전테이블An air bearing, characterized in that it comprises an air inlet 100 is fixed to the air hose installed on one side of the middle side of the housing 3, and a silencer 30 provided on the lower side of the air inlet 100 Rotating table 청구항 1에 있어서, 상기 샤프트(6)는 원통관 형상의 샤프트몸체(62)와,The method of claim 1, wherein the shaft (6) is a cylindrical shaft-shaped shaft body 62, 상기 샤프트몸체(62)의 상부에 설치되며 외부로 돌출된 샤프트상부(61)와, 상기 샤프트몸체(62)의 하부에 형성되며 테두리 끝단부에 홈이 형성된 샤프트하부 테두리단턱(63)과, 상기 샤프트상부(61) 및 샤프트하부테두리단턱(63) 테두리에 다수개 설치된 샤프트결합통공부(65)를 포함하여 구성되어 있음을 특징으로 하는 에어베어링을 이용한 회전테이블.An upper shaft 61 installed at an upper portion of the shaft body 62 and protruding to the outside; a lower shaft edge jaw 63 formed at a lower portion of the shaft body 62 and having a groove formed at an edge of the shaft; Rotary table using an air bearing, characterized in that it comprises a plurality of shaft coupling through-holes 65 are provided in the upper shaft portion 61 and the lower shaft edge step 63. 청구항 1에 있어서, 상기 샤프트칼라(2)는 중앙부에 통공이 구비된 도넛형상으로서, 중앙은 샤프트(6)의 하부에 결합되며, 테두리부분은 에어베어링(4)의 하부에 결합되는 구조로서,The method of claim 1, wherein the shaft collar (2) is a donut shape having a through-hole in the center, the center is coupled to the lower portion of the shaft (6), the edge portion is a structure coupled to the lower portion of the air bearing (4), 샤프트칼라몸체(21)와, 상기 샤프트칼라몸체(21)의 테두리에 설치된 다수개의 날개(22)와, 상기 샤프트칼라몸체(21)의 중앙부에 형성된 샤프트칼라내부공간부(24)와, 상기 샤프트칼라몸체(21)에 일정간격 이격되어 설치된 다수개의 샤프트칼라결합통공부(25)를 포함하여 구성되어 있음을 특징으로 하는 에어베어링을 이용한 회전테이블.Shaft collar body 21, a plurality of wings 22 provided on the edge of the shaft collar body 21, the shaft collar inner space 24 formed in the central portion of the shaft collar body 21, and the shaft Rotary table using an air bearing, characterized in that it comprises a plurality of shaft collar coupling through-hole portion 25 is installed spaced apart at a predetermined interval on the collar body (21).
KR1020070077286A 2007-08-01 2007-08-01 The rotating table using air bearing KR20090013299A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020070077286A KR20090013299A (en) 2007-08-01 2007-08-01 The rotating table using air bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020070077286A KR20090013299A (en) 2007-08-01 2007-08-01 The rotating table using air bearing

Publications (1)

Publication Number Publication Date
KR20090013299A true KR20090013299A (en) 2009-02-05

Family

ID=40683760

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070077286A KR20090013299A (en) 2007-08-01 2007-08-01 The rotating table using air bearing

Country Status (1)

Country Link
KR (1) KR20090013299A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105405797A (en) * 2015-12-30 2016-03-16 天津金海通自动化设备制造有限公司 Air charging floating mechanism
CN110388437A (en) * 2019-08-22 2019-10-29 江苏集萃精凯高端装备技术有限公司 A kind of high rigidity air turbine driving rotary axis system device capable of reversing
CN114294330A (en) * 2021-12-30 2022-04-08 哈尔滨工业大学 High-precision rotating ring-shaped part inner supporting air-floating type static balancing device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105405797A (en) * 2015-12-30 2016-03-16 天津金海通自动化设备制造有限公司 Air charging floating mechanism
CN110388437A (en) * 2019-08-22 2019-10-29 江苏集萃精凯高端装备技术有限公司 A kind of high rigidity air turbine driving rotary axis system device capable of reversing
CN114294330A (en) * 2021-12-30 2022-04-08 哈尔滨工业大学 High-precision rotating ring-shaped part inner supporting air-floating type static balancing device
CN114294330B (en) * 2021-12-30 2022-09-23 哈尔滨工业大学 High-precision rotating ring-shaped part inner supporting air-floating type static balancing device

Similar Documents

Publication Publication Date Title
US9347450B2 (en) Centrifugal compressor
WO2020048092A1 (en) Pneumatic clamping chuck
CN102398162B (en) High-precise rotating working platform directly driven by torque motor
JP2012503338A5 (en)
JP2006170209A5 (en)
JP4146151B2 (en) Hydrostatic gas bearing and spindle device using the same
CN1738169A (en) Small motor
KR20090013299A (en) The rotating table using air bearing
JP2006194243A5 (en)
EP1750352A3 (en) Spindle motor and disk drive unit
US7255546B1 (en) Spindle for a vane motor
JP2010193710A5 (en)
CN110449923A (en) Rotary table structure and workpiece processing equipment with same
WO2008143055A1 (en) Angular indexing device for machine tool
ES2204821T3 (en) CLUTCH DEVICE.
EP1582773A3 (en) Pulley structure
JP6370416B2 (en) Vacuum pump, permanent magnet support, monolithic permanent magnet, and manufacturing method of monolithic permanent magnet
JP2509468Y2 (en) Rotor bearing device
CN111390845B (en) Static pressure rotary worktable
JP5932319B2 (en) Spindle unit
EP2348616A3 (en) Spindle motor
CN219521237U (en) Turntable structure
WO2022153737A1 (en) Spindle device
CN204941932U (en) A kind of oil-free vortex air compressor
CN219170614U (en) Pneumatic rotary positioning carrier disc

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application