CN105405797A - Air charging floating mechanism - Google Patents
Air charging floating mechanism Download PDFInfo
- Publication number
- CN105405797A CN105405797A CN201511015443.9A CN201511015443A CN105405797A CN 105405797 A CN105405797 A CN 105405797A CN 201511015443 A CN201511015443 A CN 201511015443A CN 105405797 A CN105405797 A CN 105405797A
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- China
- Prior art keywords
- pedestal
- diaphragm
- upper cover
- floating
- hole
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67271—Sorting devices
Abstract
The invention provides an air charging floating mechanism. The air charging floating mechanism comprises a base, and a base roof cover arranged at the top of the base; the base is provided with an installation cavity opening upwards, the base roof cover is provided with a through hole in vertical direction, and the bottom of the base is provided with an air inlet communicated with the installation cavity; the installation cavity is internally provided with a jacking mechanism, and the jacking mechanism comprises a floating rod, a membrane and a fixed membrane ring arranged from top to bottom; the opening of the membrane is set downwards, the membrane, the fixed membrane ring, the floating rod and the through hole are arranged concentrically, and a spring is arranged between a base plate and the base roof cover. In the air charging floating mechanism provided by the invention, jacking action of the jacking mechanism is realized by means of providing air into the installation cavity, thus, stationarity of the jacking action is guaranteed; moreover, the air charging floating mechanism is highly automatic, generates relatively low noise and occupies relatively small space.
Description
Technical field
The present invention relates to precision optical machinery field, particularly relate to a kind of IC of being applied to pick up the automatic Test handler of the formula of putting give gas relocation mechanism.
Background technology
Envelope vigorous is at present surveyed the market demand and is proposed new requirement to the production capacity of Feng Ce enterprise and the stability of production.But existing envelope measurement equipment (as automatic detection classifier etc.) is difficult to meet the requirement of producing.Its main cause is, old envelope measurement equipment automatic performance is poor, is all generally to adopt artificial or semi-automatic feeding mechanism, is difficult to the actual needs that satisfied current IC packing forms, model are quick and various.Existing mechanism for testing is owing to giving the overall dimensions of gas relocation mechanism mechanism bigger than normal, and comparatively large to the impulsive force of material during test, noise is also large, easily causes damage to product.Therefore, the R&D personnel of this area be devoted to develop always a kind of automatic floating, registration, the life-span is permanent, space hold is little, charged air pressure is large be applied to automatic battery checker to gas relocation mechanism.
Summary of the invention
In view of this, the present invention is intended to propose one to gas relocation mechanism, and comparatively large to solve existing floating installation impulsive force, noise is also large, easily causes the technical problems such as damage to product.
For achieving the above object, technical scheme of the present invention is achieved in that
A kind of to gas relocation mechanism, comprise the pedestal upper cover of pedestal and the setting of this pedestal top, described pedestal is provided with the installation cavity of opening upwards, described pedestal upper cover vertical direction is provided with through hole, this through hole and installation cavity are just to setting, the bottom of described pedestal is provided with the air admission hole be communicated with installation cavity, lifting body is provided with in described installation cavity, described lifting body comprises the floating lever arranged from top to bottom, diaphragm and fixing diaphragm ring, described floating lever, diaphragm and fixing diaphragm ring connect as one, described diaphragm Open Side Down arrange, described diaphragm, fixing diaphragm ring, floating lever and through hole are arranged with one heart, the outward flange of described diaphragm and installation cavity sealing bottom surface are arranged, inlet chamber is formed between described diaphragm and installation cavity bottom surface, described floating lever comprises base plate and column, described column is vertically arranged on the upper surface of base plate, and column is just arranged through hole, column can slide up and down in through hole, spring is provided with between described base plate and pedestal upper cover.
Further, be provided with guide finger between described fixing diaphragm Ring current distribution place and pedestal, described guide finger is vertically fixed on pedestal, and described fixing diaphragm ring and guide finger are slidably connected.
Further, described guide finger is connected with foundation bolt.
Further, the bottom surface symmetry of described pedestal upper cover be provided with two floating adjusting pins, described two floating adjusting pins are respectively straight pin, and the bottom of these two floating adjusting pins is respectively equipped with guide part, and described base plate and these two floating adjusting pins are provided with pilot hole one to one.
Further, that the bottom surface of described pedestal upper cover is gone back symmetry is provided with two the first alignment pins, described two the first alignment pins are respectively step pin, one end that this first alignment pin diameter is less is connected with pedestal upper cover, the length of described first larger one end of alignment pin diameter is less than floating adjusting pin and is positioned at length outside pedestal upper cover, and described base plate and these two first alignment pins are provided with location hole one to one.
Further, described two floating adjusting pins and two the first alignment pins are in " ten " set up of character patt ern.
Further, be provided with two the second alignment pins between described pedestal and pedestal upper cover, these two second alignment pins are fixed on pedestal 1, and described pedestal upper cover and this two the second alignment pins are provided with connecting hole one to one.
Further, described spring housing is contained on column.
Further, described diaphragm is fluorine gel silica membrane.
Further, between described pedestal with pedestal upper cover, bolt is connected, and described floating lever, diaphragm and fixing diaphragm interannular are that bolt is connected.
Relative to prior art, one of the present invention has following advantage to gas relocation mechanism:
(1) one of the present invention is in gas relocation mechanism, installation cavity is provided with between pedestal and pedestal upper cover, the lifting body connected and composed by floating lever, diaphragm and fixing diaphragm ring is provided with in installation cavity, and by realizing the jacking action of lifting body to air feed in installation cavity, wherein floating lever comprises base plate and column, and this version ensure that the stationarity of jacking action, in addition, this plant automation degree is higher, and noise is less, and space is less.
(2) one of the present invention is in gas relocation mechanism, in order to ensure the accuracy of the jacking stroke of lifting body, be provided with guide finger, floating adjusting pin and the triple guiding-positioning structure form of the first alignment pin, lifting body pops up in process, first guide finger plays preliminary guide effect to lifting body, then secondary guiding is carried out by floating guiding pin, rising due to lifting body is that diaphragm pops up and forms under the effect of gas, floating adjusting pin also plays the effect preventing lifting body from reversing, first alignment pin plays the effect of location further, ensure that column is inserted in through hole accurately, and ensure that and move past in journey on lifting body, the stationarity that floating lever moves.
Accompanying drawing explanation
The accompanying drawing forming a part of the present invention is used to provide a further understanding of the present invention, and schematic description and description of the present invention, for explaining the present invention, does not form inappropriate limitation of the present invention.In the accompanying drawings:
Fig. 1 for described in the embodiment of the present invention give gas relocation mechanism exploded view;
Fig. 2 for described in the embodiment of the present invention give gas relocation mechanism stereogram;
Fig. 3 for described in the embodiment of the present invention give gas relocation mechanism cutaway view;
Fig. 4 is for giving lifting body structural representation in gas relocation mechanism described in the embodiment of the present invention;
Description of reference numerals:
1-pedestal, 2-pedestal upper cover, 3-floating lever, 4-fixes diaphragm ring,
5-first alignment pin, 6-guide finger, 7-floats adjusting pin, 8-screw,
9-second alignment pin, 10-bolt, 11-spring, 12-diaphragm,
31-base plate, 32-column.
Embodiment
It should be noted that, when not conflicting, the embodiment in the present invention and the feature in embodiment can combine mutually.
Below with reference to the accompanying drawings and describe the present invention in detail in conjunction with the embodiments.
As Figure 1-Figure 4, a kind of to gas relocation mechanism, comprise the pedestal upper cover 2 of pedestal 1 and the setting of this pedestal 1 top, described pedestal upper cover 1 is connected by bolt 10 with between pedestal, and for the ease of quick connection, two the second alignment pins 9 are provided with between pedestal 1 and pedestal upper cover 2, these two the second alignment pins 9 are symmetrical arranged, the installation cavity of opening upwards is provided with at the upper surface of described pedestal 1, the center vertical direction of pedestal upper cover 2 is provided with through hole, this through hole and installation cavity are just to setting, the bottom of described pedestal 1 is provided with the air admission hole be communicated with installation cavity, lifting body is provided with in described installation cavity, described lifting body comprises the floating lever 3 arranged from top to bottom, diaphragm 12 and fixing diaphragm ring 4, described diaphragm 12 is fluorine gel silica membrane, this fluorine gel silica membrane has very strong Practical Performance, can at-50 degree and high temperature 200 degree of Long-Time Service, its flexible number of times is up to more than 5,000 ten thousand times, described diaphragm 12, fixing diaphragm ring 4, floating lever 3 and through hole are arranged with one heart, described floating lever 3 comprises base plate 31 and column 32, described column 32 is vertically arranged on the upper surface of base plate 31, column 32 is just arranged through hole, and column 32 can slide up and down in through hole, fixing diaphragm ring 4 comprises supporting bracket and support column, described support column is fixed on the upper surface of supporting bracket, described floating lever 3, diaphragm 12 and fixing diaphragm ring 4 are linked into an integrated entity by bolt 10, wherein, base plate 32 is close to the upper surface of diaphragm 12, diaphragm 12 is set with on the support columns, the upper surface of supporting bracket is close to the lower surface of diaphragm, ensure that floating lever 3, air-tightness between diaphragm 12 and fixing diaphragm ring 4, described diaphragm 12 Open Side Down arrange, the outward flange of described diaphragm 12 is pressed on installation cavity bottom surface by pedestal upper cover 2, ensure that outward flange and the installation cavity bottom surface of diaphragm 12 are arranged in sealing, inlet chamber is formed between described diaphragm 12 and installation cavity bottom surface, in order to ensure the linearity of lifting body jacking action, guide finger 6 is provided with between the center and pedestal 1 of fixing diaphragm ring 4, described guide finger 6 is fixed on pedestal 1 by screw 8, described fixing diaphragm ring 4 and guide finger 6 are slidably connected, between base plate 31 and pedestal upper cover 2, be provided with spring 11, this spring 11 is sleeved on the face of cylinder of column 32.The design of this spring 11 ensure that on the one hand plays cushioning effect when diaphragm 12 drives and floating lever 3 moves to floating lever 3 moves, to prevent between floating lever 3 and pedestal upper cover 2 rigid collides, on the other hand, when inlet chamber return-air, floating lever 3 is under the effect of spring 11 elastic force, and band dynamic diaphragm 12 resets.
Described pedestal upper cover 2 bottom surface symmetry be provided with two floating adjusting pins 7 and two the first alignment pins 5, described two floating adjusting pins 7 and two the first alignment pins 5 one-tenth " ten " set up of character patt erns, described two floating adjusting pins 7 are respectively straight pin, the bottom of these two floating adjusting pins 7 is respectively equipped with guide part, and described base plate 31 and these two floating adjusting pins 7 are provided with pilot hole one to one; Two floating adjusting pins, 7 pairs of floating levers 3 move past in journey the effect played guiding and prevent from reversing; Described two the first alignment pins 5 are respectively step pin, one end that this first alignment pin 5 diameter is less is connected with pedestal upper cover 2, the length of described first larger one end of alignment pin 5 diameter is less than floating adjusting pin 7 and is positioned at length outside pedestal upper cover 2, then described base plate 31 and these two the first alignment pins 5 are provided with location hole one to one, first this version be play guide effect by floating adjusting pin 7 pairs of floating levers 3, then play pinpoint effect by two the first alignment pins, 5 pairs of floating levers 3.
The concrete operations of this device illustrate as follows:
Being arranged on IC to gas relocation mechanism this picks up on the automatic Test handler of the formula of putting, during inlet chamber air inlet when between diaphragm 12 and installation cavity bottom surface, the diaphragm 12 of lifting body is led by the guide finger 6 on body base 1, can up be ejected, floating lever 3 is located by the precision positioning pin 5 on body base lid 2 afterwards, now internal actions completes, inner air feed exists always, size for air pressure is determined to adjust by chip under test contact force, the output loading in 0.5PMa situation of normal operating air pressure reaches the power of 100kgf, now, the end face of column 32 is stretched out by through hole, chip lifting is risen, the absorption of chip is carried out by other other assemblies, carry out docking with test board testing, machinery hard contact is avoided when this device mainly solves the accurate location of chip, there is certain amount of floating to eliminate the mode of hard link, after precision positioning completes, ensure that the integrality of product.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. give gas relocation mechanism for one kind, it is characterized in that: the pedestal upper cover (2) comprising pedestal (1) and the setting of this pedestal (1) top, described pedestal (1) is provided with the installation cavity of opening upwards, described pedestal upper cover (2) vertical direction is provided with through hole, this through hole and installation cavity are just to setting, the bottom of described pedestal (1) is provided with the air admission hole be communicated with installation cavity, lifting body is provided with in described installation cavity, described lifting body comprises the floating lever (3) arranged from top to bottom, diaphragm (12) and fixing diaphragm ring (4), described floating lever (3), diaphragm (12) and fixing diaphragm ring (4) connect as one, described diaphragm (12) Open Side Down arrange, described diaphragm (12), fixing diaphragm ring (4), floating lever (3) and through hole are arranged with one heart, the outward flange of described diaphragm (12) and installation cavity sealing bottom surface are arranged, inlet chamber is formed between described diaphragm (12) and installation cavity bottom surface, described floating lever (3) comprises base plate (31) and column (32), described column (32) is vertically arranged on the upper surface of base plate (31), and column (32) is just arranged through hole, column (32) can slide up and down in through hole, spring (11) is provided with between described base plate (31) and pedestal upper cover (2).
2. one according to claim 1 is to gas relocation mechanism, it is characterized in that: between the center of described fixing diaphragm ring (4) and pedestal (1), be provided with guide finger (6), described guide finger (6) is vertically fixed on pedestal (1), and described fixing diaphragm ring (4) and guide finger (6) are slidably connected.
3. one according to claim 2 is to gas relocation mechanism, it is characterized in that: described guide finger (6) is connected with pedestal (1) screw.
4. one according to claim 1 and 2 is to gas relocation mechanism, it is characterized in that: the bottom surface symmetry of described pedestal upper cover (2) be provided with two floating adjusting pins (7), described two floating adjusting pins (7) are respectively straight pin, the bottom of these two floating adjusting pins (7) is respectively equipped with guide part, and described base plate (31) and this two floating adjusting pins (7) are provided with pilot hole one to one.
5. one according to claim 4 is to gas relocation mechanism, it is characterized in that: that the bottom surface of described pedestal upper cover (2) is gone back symmetry is provided with two the first alignment pins (5), described two the first alignment pins (5) are respectively step pin, one end that this first alignment pin (5) diameter is less is connected with pedestal upper cover (2), the length of the larger one end of described first alignment pin (5) diameter is less than floating adjusting pin (7) and is positioned at pedestal upper cover (2) length outward, described base plate (31) and this two the first alignment pins (5) are provided with location hole one to one.
6. one according to claim 5 is to gas relocation mechanism, it is characterized in that: described two floating adjusting pins (7) and two the first alignment pins (5) are in " ten " set up of character patt ern.
7. one according to claim 1 is to gas relocation mechanism, it is characterized in that: between described pedestal (1) and pedestal upper cover (2), be provided with two the second alignment pins (9), these two second alignment pins (9) are fixed on pedestal (1), and described pedestal upper cover (2) and these two second alignment pins (9) are provided with connecting hole one to one.
8. one according to claim 1 is to gas relocation mechanism, it is characterized in that: described spring (11) is sleeved on column (32).
9. one according to claim 1 is to gas relocation mechanism, it is characterized in that: described diaphragm (12) is fluorine gel silica membrane.
10. one according to claim 1 is to gas relocation mechanism, it is characterized in that: between described pedestal (1) with pedestal upper cover (2), bolt is connected, for bolt is connected between described floating lever (3), diaphragm (12) with fixing diaphragm ring (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511015443.9A CN105405797B (en) | 2015-12-30 | 2015-12-30 | One kind gives gas relocation mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511015443.9A CN105405797B (en) | 2015-12-30 | 2015-12-30 | One kind gives gas relocation mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105405797A true CN105405797A (en) | 2016-03-16 |
| CN105405797B CN105405797B (en) | 2018-01-12 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201511015443.9A Active CN105405797B (en) | 2015-12-30 | 2015-12-30 | One kind gives gas relocation mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105405797B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108000549A (en) * | 2017-12-27 | 2018-05-08 | 天津金海通自动化设备制造有限公司 | A kind of vacuum captures chip product floating sucking disc mechanism |
| CN112798941A (en) * | 2021-04-13 | 2021-05-14 | 天津金海通半导体设备股份有限公司 | Two-stage floating suction head device suitable for multi-stage adjustment of different use temperatures and pressures |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20090013299A (en) * | 2007-08-01 | 2009-02-05 | 주식회사 알피에스 | The rotating table using air bearing |
| CN101794719A (en) * | 2010-03-23 | 2010-08-04 | 中国电子科技集团公司第二研究所 | Automatic lifting and adsorbing mechanism for wafer |
| CN202638769U (en) * | 2012-05-29 | 2013-01-02 | 格兰达技术（深圳）有限公司 | Test grip assembly device of integrated circuit (IC) chip test sorting machine |
| CN203404383U (en) * | 2013-06-19 | 2014-01-22 | 陈明生 | Inflatable seat and air valve structure thereof |
| US20150003903A1 (en) * | 2013-06-28 | 2015-01-01 | Lam Research Corporation | Installation fixture having a micro-grooved non-stick surface |
| CN205376480U (en) * | 2015-12-30 | 2016-07-06 | 天津金海通自动化设备制造有限公司 | Floating installation of giving gas |
-
2015
- 2015-12-30 CN CN201511015443.9A patent/CN105405797B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20090013299A (en) * | 2007-08-01 | 2009-02-05 | 주식회사 알피에스 | The rotating table using air bearing |
| CN101794719A (en) * | 2010-03-23 | 2010-08-04 | 中国电子科技集团公司第二研究所 | Automatic lifting and adsorbing mechanism for wafer |
| CN202638769U (en) * | 2012-05-29 | 2013-01-02 | 格兰达技术（深圳）有限公司 | Test grip assembly device of integrated circuit (IC) chip test sorting machine |
| CN203404383U (en) * | 2013-06-19 | 2014-01-22 | 陈明生 | Inflatable seat and air valve structure thereof |
| US20150003903A1 (en) * | 2013-06-28 | 2015-01-01 | Lam Research Corporation | Installation fixture having a micro-grooved non-stick surface |
| CN205376480U (en) * | 2015-12-30 | 2016-07-06 | 天津金海通自动化设备制造有限公司 | Floating installation of giving gas |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108000549A (en) * | 2017-12-27 | 2018-05-08 | 天津金海通自动化设备制造有限公司 | A kind of vacuum captures chip product floating sucking disc mechanism |
| CN108000549B (en) * | 2017-12-27 | 2023-12-05 | 天津金海通半导体设备股份有限公司 | Vacuum grabbing sheet type product floating sucker mechanism |
| CN112798941A (en) * | 2021-04-13 | 2021-05-14 | 天津金海通半导体设备股份有限公司 | Two-stage floating suction head device suitable for multi-stage adjustment of different use temperatures and pressures |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105405797B (en) | 2018-01-12 |
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Address after: 300384 A106, No.8 Wuhua Road, Huayuan Industrial Zone, Binhai New Area, Tianjin Patentee after: Tianjin jinhaitong Semiconductor Equipment Co.,Ltd. Address before: 300384 industrial incubation-2, North 2-504, No. 18, Haitai West Road, Huayuan Industrial Zone, hi tech Zone, Binhai New Area, Tianjin Patentee before: JHT DESIGN Co.,Ltd. |