CN105405601A - Metallized ferrite magnetic core and preparation method thereof - Google Patents
Metallized ferrite magnetic core and preparation method thereof Download PDFInfo
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- CN105405601A CN105405601A CN201510946887.8A CN201510946887A CN105405601A CN 105405601 A CN105405601 A CN 105405601A CN 201510946887 A CN201510946887 A CN 201510946887A CN 105405601 A CN105405601 A CN 105405601A
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- Prior art keywords
- ferrite core
- nickel
- copper alloy
- alloy layer
- chrome
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- 229910000859 α-Fe Inorganic materials 0.000 title claims abstract description 73
- 238000002360 preparation method Methods 0.000 title claims abstract description 17
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 44
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 43
- 229910000881 Cu alloy Inorganic materials 0.000 claims abstract description 41
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 claims abstract description 41
- 229910052751 metal Inorganic materials 0.000 claims abstract description 39
- 239000002184 metal Substances 0.000 claims abstract description 39
- 229910052709 silver Inorganic materials 0.000 claims abstract description 38
- 239000004332 silver Substances 0.000 claims abstract description 38
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims abstract description 26
- 238000001465 metallisation Methods 0.000 claims description 26
- 229910000792 Monel Inorganic materials 0.000 claims description 15
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 10
- 238000004140 cleaning Methods 0.000 claims description 8
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910052804 chromium Inorganic materials 0.000 abstract description 10
- 239000011651 chromium Substances 0.000 abstract description 10
- 239000011248 coating agent Substances 0.000 abstract description 9
- 238000000576 coating method Methods 0.000 abstract description 9
- 239000000853 adhesive Substances 0.000 abstract description 6
- 230000001070 adhesive effect Effects 0.000 abstract description 6
- 238000004544 sputter deposition Methods 0.000 abstract description 4
- 239000010410 layer Substances 0.000 description 89
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- 238000001771 vacuum deposition Methods 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 5
- 238000010981 drying operation Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 238000010276 construction Methods 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 238000007664 blowing Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000003064 anti-oxidating effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011104 metalized film Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/24—Magnetic cores
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
- C23C28/021—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one metal alloy layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/032—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
- H01F1/10—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials non-metallic substances, e.g. ferrites, e.g. [(Ba,Sr)O(Fe2O3)6] ferrites with hexagonal structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/04—Fixed inductances of the signal type with magnetic core
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
- Hard Magnetic Materials (AREA)
Abstract
The embodiment of the invention provides a metallized ferrite magnetic core, which comprises a ferrite magnetic core, wherein an electrode region is arranged on the ferrite magnetic core; a metal coating which is used for being connected with other devices is formed in the electrode region; the metal coating comprises a chromium layer, a nickel-copper alloy layer and a silver layer, which are sequentially formed on the surface of the electrode region in a stacked manner; and the chromium layer, the nickel-copper alloy layer and the silver layer are prepared in a magnetron sputtering manner. The metal coating of the metallized ferrite magnetic core provided by the invention has the advantages of high adhesive force, high heat resistance, good weldability, low cost and the like. The embodiment of the invention further provides a preparation method of the metallized ferrite magnetic core. The method is high in sputtering film-forming speed, free of pollution in the whole process and low in cost.
Description
Technical field
The present invention relates to paster power magnetic core manufacture field, particularly relate to a kind of metallization FERRITE CORE and preparation method thereof.
Background technology
At current smart mobile phone, under the spring tide of panel computer, microminiaturized to electronic component, the requirement of Surface Mounting Technology is more and more stronger, and power inductance stands in the breach especially.And the environmental requirement of product is also more and more higher, all products must cross every test such as ROSH and halogen.
Traditional ferrite paster power magnetic core metallization process mainly comprises magnetic core end points and is stained with the processes such as silver slurry, high temperature sintering, electronickelling, tin, it exists, and energy consumption is high, pollution is large, the shortcoming of cost intensive, poor reliability, disagree with the development trend of current construction conservation-minded society and green process technology, be not suitable for the processing continuing to be applied to ferrite paster power magnetic core.Therefore, seeking a kind of friendly process, to carry out metallization to ferrite paster power magnetic core imperative.
Summary of the invention
Given this, embodiments provide a kind of metallization FERRITE CORE and preparation method thereof, with solve existing FERRITE CORE metallization process energy consumption high, pollute large, cost intensive, and the layer of metallized film poor reliability obtained, the problem that performance is not good.
First aspect, embodiments provide a kind of metallization FERRITE CORE, comprise FERRITE CORE, described FERRITE CORE is provided with electrode zone, described electrode zone is formed with the coat of metal for being connected with other devices, the described coat of metal comprises the layers of chrome, nickel-copper alloy layer and the silver layer that stack gradually and be formed in described electrode area surfaces, and described layers of chrome, nickel-copper alloy layer and silver layer are prepared by magnetron sputtering.
The present invention's FERRITE CORE that metallizes adopts layers of chrome bottoming, can improve coat of metal adhesive force; Nickel-copper alloy layer is formed again, to form weld layer in layers of chrome; Described silver layer is arranged on outermost layer, forms protective layer, nickel-copper alloy layer can be protected not oxidized; Simultaneously because silver and scolding tin compatibility are good, thus solderability can be improved.The present invention is by adopting the coat of metal of above-mentioned special construction, and coating adhesion is high, thermal endurance is strong, solderability is good, and cost is low.
Preferably, the thickness of described layers of chrome is 0.1-1.0 micron.More preferably, the thickness of described layers of chrome is 0.2-0.3 micron.
Preferably, the thickness of described nickel-copper alloy layer is 0.7-2.0 micron.More preferably, the thickness of described nickel-copper alloy layer is 1.2-1.5 micron.
Preferably, in described nickel-copper alloy layer, the mass content of nickel is greater than 70%.
Preferably, the thickness of described silver layer is 0.1-1.0 micron.More preferably, the thickness of described silver layer is 0.2-0.3 micron.
Because the metallic coating mass of special construction of the present invention is high, therefore can the thickness setting of corresponding minimizing coating, thus not only increase welding quality, and substantially increase production efficiency, reduce metallization cost.
For playing good anti-oxidation effect, preferably, the silver-colored purity of described silver layer is more than 3N.
The metallize concrete shape of FERRITE CORE of the present invention is not limit, such as, can be I shape.The present invention's FERRITE CORE that metallizes is specifically as follows a magnetic core electrode.
The one metallization FERRITE CORE that embodiment of the present invention first aspect provides, its coat of metal comprises the layers of chrome, nickel-copper alloy layer and the silver layer that stack gradually, layers of chrome can improve coating adhesion, nickel-copper alloy layer forms weld layer, silver layer can protect nickel-copper alloy layer not oxidized, can improve solderability simultaneously; The final described coat of metal has that adhesive force is high, thermal endurance is strong, solderability is good, and low cost and other advantages.
Second aspect, embodiments provides a kind of preparation method of above-mentioned metallization FERRITE CORE, comprises the following steps:
(1) get FERRITE CORE, described FERRITE CORE is cleaned and dries, described FERRITE CORE is provided with electrode zone;
(2) adopt the mode of magnetron sputtering to prepare the coat of metal at described electrode area surfaces, obtain the FERRITE CORE that metallizes, the described coat of metal comprises the layers of chrome, nickel-copper alloy layer and the silver layer that stack gradually and be formed in described electrode area surfaces.
The operation of described cleaning is powder in order to remove magnetic core surface and stain.
Preferably, the step of described cleaning specifically comprises: first adopt alcohol-pickled 5-10 minute, then Ultrasonic Cleaning 10-20 minute at 40-60 DEG C of temperature, then uses clear water rinsing 1-3 minute, then normal temperature Ultrasonic Cleaning 10-20 minute, finally uses 50-80 DEG C of hot water rinsing 1-3 minute.
Described drying operation is the moisture content in order to remove magnetic core surface, can carry out in an oven.Preferably, oven temperature is 130-170 DEG C, time 10-20 minute.
Magnetron sputtering of the present invention adopts magnetron vacuum coating machine to carry out, and its detailed process parameter does not do particular determination, can obtain each coat of metal.
Preferably, magnetron sputtering is adopted to prepare in the process of described layers of chrome: take crome metal as target, the thickness of described layers of chrome is 0.1-1.0 micron.Preferably, the electric current that described crome metal target passes into is 20-25A.
Preferably, magnetron sputtering is adopted to prepare in the process of described nickel-copper alloy layer: take monel as target, the thickness of described nickel-copper alloy layer is 0.7-2.0 micron.Preferably, the electric current that described monel target passes into is 20-25A.Preferably, in described nickel-copper alloy layer, the mass content of nickel is greater than 70%.
Preferably, magnetron sputtering is adopted to prepare in the process of described silver layer: take argent as target, the thickness of described silver layer is 0.1-1.0 micron.Preferably, the electric current that described silver-colored target passes into is 15-20A.
Preferably, in the present invention, the vacuum degree in magnetron sputtering process is 0.1-10Pa, and Sputtering power density is 0.1-20W/cm
2.The time of magnetron sputtering determines according to presetting thickness of coating.
The preparation method of the metallization FERRITE CORE that embodiment of the present invention second aspect provides, utilize magnetron sputtering technique, form metallization solder joint with the sputtering of metal targets chromium target, monel target and silver-colored target, coat of metal adhesive force is high, thermal endurance is strong, solderability is good, and spatter film forming speed is fast, and technique whole process is pollution-free, cost is low, thus magnetic core electrode pads can be made can to meet the requirement of solderability, soldering resistance and adhesive force, can environmental protection be ensured again, without any pollution and economy.
Accompanying drawing explanation
Fig. 1 is that the present invention metallizes ferrite core structure figure;
Fig. 2 is the section amplification figure of the a-quadrant of Fig. 1;
Fig. 3 is the upward view of the metallization FERRITE CORE of Fig. 1;
Fig. 4 is the process chart of the embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Refer to Fig. 1-Fig. 3, embodiments provide a kind of metallization FERRITE CORE, comprise FERRITE CORE 100, the side of described FERRITE CORE 100 is provided with electrode zone 101, this electrode zone is the one side contacted with pcb board paster, described electrode zone 101 is formed with the coat of metal for being connected with other devices, Figure 2 shows that the section structure enlarged drawing of a-quadrant in Fig. 1, shown in contrast Fig. 3, this coat of metal comprises the layers of chrome 10 stacking gradually and be formed in described electrode zone 101 surface, nickel-copper alloy layer 20 and silver layer 30, described layers of chrome 10, nickel-copper alloy layer 20 and silver layer 30 are prepared by magnetron sputtering.
Preferably, the thickness of described layers of chrome is 0.1-1.0 micron.More preferably, the thickness of described layers of chrome is 0.2-0.3 micron.
Preferably, the thickness of described nickel-copper alloy layer is 0.7-2.0 micron.More preferably, the thickness of described nickel-copper alloy layer is 1.2-1.5 micron.Preferably, in described nickel-copper alloy layer, the mass content of nickel is greater than 70%.
Preferably, the thickness of described silver layer is 0.1-1.0 micron.More preferably, the thickness of described silver layer is 0.2-0.3 micron.
The coat of metal of the above-mentioned special construction of the present invention has that adhesive force is high, thermal endurance is strong, solderability is good, and low cost and other advantages.
The metallization FERRITE CORE of the embodiment of the present invention can be used as the magnetic core use of chip inductor.The shape of the coat of metal can be set to rectangle, circle or other shapes according to the shape of electrode zone and actual needs.
Refer to Fig. 4, embodiments provide a kind of preparation method of above-mentioned metallization FERRITE CORE, comprise the following steps:
(1) get FERRITE CORE, described FERRITE CORE is cleaned and dries, described FERRITE CORE is provided with electrode zone;
The operation of described cleaning is powder in order to remove magnetic core surface and stain.
Preferably, the step of described cleaning specifically comprises: first adopt alcohol-pickled 5-10 minute, then Ultrasonic Cleaning 10-20 minute at 40-60 DEG C of temperature, then uses clear water rinsing 1-3 minute, then normal temperature Ultrasonic Cleaning 10-20 minute, finally uses 50-80 DEG C of hot water rinsing 1-3 minute.
Described drying operation is the moisture content in order to remove magnetic core surface, can carry out in an oven.Preferably, oven temperature is 130-170 DEG C, time 10-20 minute.
(2) adopt the mode of magnetron sputtering to prepare the coat of metal at described electrode area surfaces, obtain the FERRITE CORE that metallizes, the described coat of metal comprises the layers of chrome, nickel-copper alloy layer and the silver layer that stack gradually and be formed in described electrode area surfaces.
Magnetron sputtering of the present invention adopts magnetron vacuum coating machine to carry out, and its detailed process parameter does not do particular determination, can obtain each coat of metal.
Particularly, the magnetic-core arranging after drying is put in special tool well, fixes, only expose electrode zone, then install on the horse of vacuum coating, advance vacuum machine, vacuumize, then input argon gas in vacuum chamber, and the pressure maintaining argon gas in vacuum chamber is 2 × 10
-1pa-8 × 10
-1within the scope of Pa.
Preferably, magnetron sputtering is adopted to prepare in the process of described layers of chrome: take crome metal as target, the thickness of described layers of chrome is 0.1-1.0 micron.Preferably, the electric current that described crome metal target passes into is 20-25A.
Preferably, magnetron sputtering is adopted to prepare in the process of described nickel-copper alloy layer: take monel as target, the thickness of described nickel-copper alloy layer is 0.7-2.0 micron.Preferably, the electric current that described monel target passes into is 20-25A.
Preferably, magnetron sputtering is adopted to prepare in the process of described silver layer: take argent as target, the thickness of described silver layer is 0.1-1.0 micron.Preferably, the electric current that described silver-colored target passes into is 15-20A.
Preferably, in the present invention, the vacuum degree in magnetron sputtering process is 0.1-10Pa, and Sputtering power density is 0.1-20W/cm
2.The time of magnetron sputtering determines according to presetting thickness of coating.
The preparation method of the above-mentioned metallization FERRITE CORE of the embodiment of the present invention, spatter film forming speed is fast, and technique whole process is pollution-free, and cost is low.
Below by way of embodiment more specifically, the present invention is further elaborated.
Embodiment one
A preparation method for above-mentioned metallization FERRITE CORE, comprises the following steps:
(1) get FERRITE CORE, described FERRITE CORE is cleaned and dries, described FERRITE CORE is provided with electrode zone;
Its cleaning operation is specially: FERRITE CORE is placed in stainless steel basket, first soaks 5 minutes in alcohol, then in 50 DEG C of Ultrasonic Cleanings 10 minutes; Use clear water rinsing again 1 minute; Then normal temperature Ultrasonic Cleaning 20 minutes; Finally use hot water rinsing 2 minutes; Dry up with blowing hot wind, then shakeout and be placed in net dish, to be dried;
Described drying operation carries out in an oven, and particularly, divided in net dish by magnetic core, put in baking oven, oven temperature is set as 150 DEG C, 15 minutes time; Be dried to and there is no steam;
(2) adopt the mode of magnetron sputtering to prepare the coat of metal at described electrode area surfaces, obtain the FERRITE CORE that metallizes, the described coat of metal comprises the layers of chrome, nickel-copper alloy layer and the silver layer that stack gradually and be formed in described electrode area surfaces.
Sputter layers of chrome: be put in special tool well by magnetic-core arranging, fix, only expose electrode zone, then installs on the horse of vacuum coating, and advance vacuum machine, vacuumize, background vacuum is greater than 5 × 10
-3pa, on crome metal target power supply is logical, be filled with argon gas, start sputter, the current settings that chromium target is logical is 20A, and the thickness of gained layers of chrome is 0.1 micron;
Before sputter, chromium target is spattered in advance, the oxide of stripper surface or foreign material.
Sputter nickel-copper alloy layer: the power supply of closing chromium target, opens the power supply of monel target, and the current settings that monel target is logical is 20A, and the thickness of gained nickel-copper alloy layer is 0.8 micron;
Sputter silver layer: the power supply of closing monel target, opens the power supply of argent target, and the current settings that silver-colored target is logical is 15A, and the thickness of gained silver layer is 0.1 micron.
Embodiment two
A preparation method for above-mentioned metallization FERRITE CORE, comprises the following steps:
(1) get FERRITE CORE, described FERRITE CORE is cleaned and dries, described FERRITE CORE is provided with electrode zone;
Its cleaning operation is specially: FERRITE CORE is placed in stainless steel basket, first soaks 10 minutes in alcohol, then in 40 DEG C of Ultrasonic Cleanings 20 minutes; Use clear water rinsing again 2 minutes; Then normal temperature Ultrasonic Cleaning 15 minutes; Finally use hot water rinsing 3 minutes; Dry up with blowing hot wind, then shakeout and be placed in net dish, to be dried;
Described drying operation carries out in an oven, and particularly, divided in net dish by magnetic core, put in baking oven, oven temperature is set as 170 DEG C, 10 minutes time; Be dried to and there is no steam;
(2) adopt the mode of magnetron sputtering to prepare the coat of metal at described electrode area surfaces, obtain the FERRITE CORE that metallizes, the described coat of metal comprises the layers of chrome, nickel-copper alloy layer and the silver layer that stack gradually and be formed in described electrode area surfaces.
Sputter layers of chrome: be put in special tool well by magnetic-core arranging, fix, only expose electrode zone, then installs on the horse of vacuum coating, and advance vacuum machine, vacuumize, background vacuum is greater than 5 × 10
-3pa, on crome metal target power supply is logical, be filled with argon gas, start sputter, the current settings that chromium target is logical is 25A, and the thickness of gained layers of chrome is 0.5 micron;
Sputter nickel-copper alloy layer: the power supply of closing chromium target, opens the power supply of monel target, and the current settings that monel target is logical is 25A, and the thickness of gained nickel-copper alloy layer is 2.0 microns;
Sputter silver layer: the power supply of closing monel target, opens the power supply of argent target, and the current settings that silver-colored target is logical is 20A, and the thickness of gained silver layer is 0.6 micron.
Embodiment three
A preparation method for above-mentioned metallization FERRITE CORE, comprises the following steps:
(1) get FERRITE CORE, described FERRITE CORE is cleaned and dries, described FERRITE CORE is provided with electrode zone;
Its cleaning operation is specially: FERRITE CORE is placed in stainless steel basket, first soaks 8 minutes in alcohol, then in 60 DEG C of Ultrasonic Cleanings 15 minutes; Use clear water rinsing again 1 minute; Then normal temperature Ultrasonic Cleaning 15 minutes; Finally use hot water rinsing 1 minute; Dry up with blowing hot wind, then shakeout and be placed in net dish, to be dried;
Described drying operation carries out in an oven, and particularly, divided in net dish by magnetic core, put in baking oven, oven temperature is set as 130 DEG C, 20 minutes time; Be dried to and there is no steam;
(2) adopt the mode of magnetron sputtering to prepare the coat of metal at described electrode area surfaces, obtain the FERRITE CORE that metallizes, the described coat of metal comprises the layers of chrome, nickel-copper alloy layer and the silver layer that stack gradually and be formed in described electrode area surfaces.
Sputter layers of chrome: be put in special tool well by magnetic-core arranging, fix, only expose electrode zone, then installs on the horse of vacuum coating, and advance vacuum machine, vacuumize, background vacuum is greater than 1 × 10
-2pa, on crome metal target power supply is logical, be filled with argon gas, start sputter, the current settings that chromium target is logical is 22A, and the thickness of gained layers of chrome is 0.3 micron.
Sputter nickel-copper alloy layer: the power supply of closing chromium target, opens the power supply of monel target, and the current settings that monel target is logical is 22A, and the thickness of gained nickel-copper alloy layer is 1.0 microns.
Sputter silver layer: the power supply of closing monel target, opens the power supply of argent target, and the current settings that silver-colored target is logical is 18A, and the thickness of gained silver layer is 0.3 micron.
Carry out solderability, thermal endurance and peel strength performance test to the above embodiment of the present invention gained metallization FERRITE CORE, test result is good.
The above is the preferred implementation of the embodiment of the present invention; should be understood that; for those skilled in the art; under the prerequisite not departing from embodiment of the present invention principle; can also make some improvements and modifications, these improvements and modifications are also considered as the protection range of the embodiment of the present invention.
Claims (10)
1. a metallization FERRITE CORE, comprise FERRITE CORE, described FERRITE CORE is provided with electrode zone, it is characterized in that, described electrode zone is formed with the coat of metal for being connected with other devices, the described coat of metal comprises the layers of chrome, nickel-copper alloy layer and the silver layer that stack gradually and be formed in described electrode area surfaces, and described layers of chrome, nickel-copper alloy layer and silver layer are prepared by magnetron sputtering.
2. metallize FERRITE CORE as claimed in claim 1, it is characterized in that, the thickness of described layers of chrome is 0.1-1.0 micron.
3. metallize FERRITE CORE as claimed in claim 1, it is characterized in that, the thickness of described nickel-copper alloy layer is 0.7-2.0 micron, and in described nickel-copper alloy layer, the mass content of nickel is greater than 70%.
4. metallize FERRITE CORE as claimed in claim 1, it is characterized in that, the thickness of described silver layer is 0.1-1.0 micron.
5. metallize FERRITE CORE as claimed in claim 1, it is characterized in that, the silver-colored purity of described silver layer is more than 3N.
6. a preparation method for the FERRITE CORE that metallizes, is characterized in that, comprises the following steps:
(1) get FERRITE CORE, described FERRITE CORE is cleaned and dries, described FERRITE CORE is provided with electrode zone;
(2) adopt the mode of magnetron sputtering to prepare the coat of metal at described electrode area surfaces, obtain the FERRITE CORE that metallizes, the described coat of metal comprises the layers of chrome, nickel-copper alloy layer and the silver layer that stack gradually and be formed in described electrode area surfaces.
7. the preparation method of metallization FERRITE CORE as claimed in claim 6, it is characterized in that, the step of described cleaning specifically comprises: first adopt alcohol-pickled 5-10 minute, then Ultrasonic Cleaning 10-20 minute at 40-60 DEG C of temperature, use clear water rinsing 1-3 minute again, then normal temperature Ultrasonic Cleaning 10-20 minute, finally uses 50-80 DEG C of hot water rinsing 1-3 minute.
8. the preparation method of metallization FERRITE CORE as claimed in claim 6, is characterized in that, adopts magnetron sputtering to prepare in the process of described layers of chrome: take crome metal as target, the thickness of described layers of chrome is 0.1-1.0 micron.
9. the preparation method of metallization FERRITE CORE as claimed in claim 6, it is characterized in that, magnetron sputtering is adopted to prepare in the process of described nickel-copper alloy layer: to take monel as target, the thickness of described nickel-copper alloy layer is 0.7-2.0 micron, in described nickel-copper alloy layer, the mass content of nickel is greater than 70%.
10. the preparation method of metallization FERRITE CORE as claimed in claim 6, is characterized in that, adopts magnetron sputtering to prepare in the process of described silver layer: take argent as target, the thickness of described silver layer is 0.1-1.0 micron.
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