CN105399064B - A kind of nitrogen purification device and nitrogen purification method - Google Patents
A kind of nitrogen purification device and nitrogen purification method Download PDFInfo
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- CN105399064B CN105399064B CN201510907889.6A CN201510907889A CN105399064B CN 105399064 B CN105399064 B CN 105399064B CN 201510907889 A CN201510907889 A CN 201510907889A CN 105399064 B CN105399064 B CN 105399064B
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims abstract description 106
- 229910052757 nitrogen Inorganic materials 0.000 title claims abstract description 52
- 238000000746 purification Methods 0.000 title claims abstract description 25
- 238000000034 method Methods 0.000 title claims abstract description 14
- 239000007789 gas Substances 0.000 claims abstract description 94
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 42
- 239000001301 oxygen Substances 0.000 claims abstract description 42
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 42
- 238000001035 drying Methods 0.000 claims abstract description 37
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 33
- 229910001868 water Inorganic materials 0.000 claims abstract description 33
- 238000002485 combustion reaction Methods 0.000 claims abstract description 30
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 23
- 229910052698 phosphorus Inorganic materials 0.000 claims abstract description 19
- 239000011574 phosphorus Substances 0.000 claims abstract description 19
- 239000000843 powder Substances 0.000 claims abstract description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000000741 silica gel Substances 0.000 claims abstract description 16
- 229910002027 silica gel Inorganic materials 0.000 claims abstract description 16
- 239000002808 molecular sieve Substances 0.000 claims description 9
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 claims description 9
- 230000008859 change Effects 0.000 claims description 8
- 239000001257 hydrogen Substances 0.000 claims description 8
- 229910052739 hydrogen Inorganic materials 0.000 claims description 8
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 4
- 229910010293 ceramic material Inorganic materials 0.000 claims description 3
- 230000004044 response Effects 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 abstract description 7
- 230000008569 process Effects 0.000 abstract description 4
- 238000010521 absorption reaction Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 3
- 238000004134 energy conservation Methods 0.000 abstract description 2
- 230000007613 environmental effect Effects 0.000 abstract description 2
- 239000007788 liquid Substances 0.000 description 9
- 239000000956 alloy Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 6
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 229910052743 krypton Inorganic materials 0.000 description 2
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052754 neon Inorganic materials 0.000 description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910000070 arsenic hydride Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 150000003016 phosphoric acids Chemical class 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
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- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Abstract
The invention belongs to gas purifier field, specially a kind of nitrogen purification device and nitrogen purification method, it is included in two ends and is respectively equipped with air inlet and the combustion furnace of gas outlet, both ends are respectively equipped with air inlet and gas outlet and the internal reactor that phosphorus powder is housed, and closed water container and upper and lower ends with air inlet pipe and escape pipe are respectively provided with the drying of air inlet pipe and escape pipe；If dried layer layer of silica gel is distributed with the drying from bottom to top；Combustion furnace, reactor, water container and drying are sequentially connected, the escape pipe connection collecting tank of drying.It uses chemical reaction and method for being combined of Physical Absorption to clean the nitrogen for being mixed with oxygen and reducibility gas, whole technical process, energy-conserving and environment-protective and prototype material can be repeatedly utilized so that, energy-conservation environmental protection again.
Description
Technical field
The invention belongs to gas purifier field, specially a kind of nitrogen purification device and nitrogen purification method.
Background technology
In semi-conductor industry, it is often necessary to hydrogen, nitrogen, inert gas (helium, neon, argon, krypton, xenon), reducibility gas (arsenic
Change hydrogen, hydrogen phosphide, ammonia, silication hydrogen etc.), and need these gases that there is " ultra-high purity ", especially need to have extremely low
The impurity such as the level oxygen gas and water of content, carbon dioxide, carbon monoxide.
The gas purifier of in the market, typically take on getter with aluminium, magnesium, zirconium etc. " active metal ".When hydrogen, nitrogen
Gas, inert gas (helium, neon, argon, krypton, xenon), reducibility gas (arsenic hydride, hydrogen phosphide, ammonia, silication hydrogen etc.) are lived by these
When sprinkling metal, oxygen gas and water therein, carbon dioxide, carbon monoxide are absorbed by these active metals, and gas is purified.But
These active metals are all solids, when Surface absorption after containing oxygen element of solid, become metal oxide, form in metal surface
One layer " shell ", the metal that this layer " shell " hinders solid interior further absorb.Such as a kind of Chinese CN103816770A " gases
Purifier ", the gas purifier include a kind of liquid alloy material, and the liquid alloy material is placed in a rustless steel container；
There are gas access and gas vent on rustless steel container, gas access is inserted in liquid alloy, and gas vent is on liquid alloy
Face；When gas passes through liquid alloy, the foreign gas containing oxygen element in gas is all absorbed by the liquid alloy；Enter in gas
There is a liquidproof alloy backflow device on mouthful, prevent liquid alloy adverse current and sprayed from gas access.And for example Chinese document
1992《Aluminium is processed》In " research of nitrogen purification soil skill in aluminum liquid purifying device " its use industrial general nitrogen through two level purifying and
Compound flow rises to the technical process of High Purity Nitrogen.
But this method, efficiency is all very low, for absorbing the metal liquid of foreign gas after foreign gas has been absorbed not
It can reuse, cause ample resources to waste.
The content of the invention
The present invention provides a kind of nitrogen purification device, the method that it uses chemical reaction and Physical Absorption is combined to containing
The nitrogen of the foreign gases such as O2, H2, CO, CO and CH4 is cleaned, whole technical process, energy-conserving and environment-protective and prototype material
Recycling, energy-conservation environmental protection again.
The specific technical scheme that the present invention takes is：A kind of nitrogen purification device, for being mixed with oxygen and reducibility gas
Nitrogen purifying；It is included in two ends and is respectively equipped with air inlet and the combustion furnace of gas outlet, both ends is respectively equipped with air inlet
With gas outlet and the internal reactor that phosphorus powder is housed, closed water container and upper and lower ends with air inlet pipe and escape pipe
It is respectively provided with the drying of air inlet pipe and escape pipe；If dried layer layer of silica gel is distributed with the drying from bottom to top；Combustion furnace,
Reactor, water container and drying are sequentially connected, the escape pipe connection collecting tank of drying.
As the preferable technical scheme of the present invention, in addition to the molecular sieve being connected between drying and collecting tank, institute
It is 3A, 4A or 5A molecular sieve to state molecular sieve.
It is described to be mixed with reducibility gas in the nitrogen of oxygen and reducibility gas as the preferable technical scheme of the present invention
Predominantly carbon monoxide, hydrogen and organic gas.
As the preferable technical scheme of the present invention, the reactor is inorganic ceramic material.
As the preferable technical scheme of the present invention, heating wire is disposed with the reactor.
As the preferable technical scheme of the present invention, transparent observation window is additionally provided with the reactor.
As the preferable technical scheme of the present invention, the air inlet periphery of the combustion furnace there also is provided several and uniformly divide
The pure oxygen supply orifice of cloth.
Another object of the present invention is to provide a kind of method of nitrogen purification, comprise the following steps：
A, the nitrogen for being mixed with oxygen and reducibility gas enters combustion furnace by the air inlet of combustion furnace, and combustion furnace, which is powered, to be drawn
The Oxygen in Nitrogen that arc to be mixed with oxygen and reducibility gas reacts with reducibility gas, removes reducibility gas；
B, heating response kettle to the temperature of reactor is 50-90 DEG C, and the gas through combustion furnace gas outlet is passed through inside and is equipped with
The reactor of phosphorus powder, the oxygen in gas react with phosphorus powder, remove oxygen；
C, pass through closed water container by the gas of reactor gas outlet, remove water-soluble composition, obtain from
The gas that water container escape pipe goes out；
D, the gas gone out from water container escape pipe passes through drying, and the silica gel for being layered placement in drying from top to bottom enters
Row water suction, when the silica gel of the superiors of drying does not change colour, nitrogen collecting tank is directly taken in by the gas of drying.
As the preferable technical scheme of the present invention, the phosphorus powder is red phosphorus.
Beneficial effects of the present invention
The present invention is mixed with the Oxygen in Nitrogen of oxygen and reducibility gas by combustion furnace, the reactor equipped with phosphorus powder
It can be exhausted with reducibility gas, and oxygen and the product of phosphorus powder reaction can reclaim adding for phosphoric acid class product
Work；Use silica gel in the drying process, silica gel can absorb water other silica gel color change can be used for judging be in nitrogen
It is no also to contain water；By that can be reused after drying after silica gel water suction simultaneously, cost has fundamentally been saved.
Brief description of the drawings
The installation diagram of the nitrogen purification device of the present invention of accompanying drawing 1；
In figure：1st, combustion furnace；2nd, reactor；3rd, water container；4th, drying.
Embodiment
In order to preferably explain technical scheme, it is described with reference to the accompanying drawings and examples.
Embodiment
A kind of nitrogen purification device, the purifying of the nitrogen for being mixed with oxygen and reducibility gas；It is included in two ends part
Not She You air inlet and gas outlet combustion furnace 1, both ends are respectively equipped with air inlet and gas outlet and internal anti-equipped with phosphorus powder
Kettle 2 is answered, closed water container 3 and upper and lower ends with air inlet pipe and escape pipe are respectively provided with the dry of air inlet pipe and escape pipe
Dry cylinder 4；If dried layer layer of silica gel is distributed with from bottom to top in the drying 4；Combustion furnace 1, reactor 2, water container 3 and drying
Cylinder 4 is sequentially connected, the escape pipe connection collecting tank of drying 4.
The nitrogen for being mixed with oxygen and reducibility gas enters combustion furnace 1 by the air inlet of combustion furnace 1, is mixed with oxygen and goes back
Reducibility gas and the oxygen of excess in the nitrogen of originality gas react, and reducibility gas runs out of；Combustion furnace 1 goes out
The air inlet of gas port coupled reaction kettle 2, the oxygen being mixed with the nitrogen of oxygen and reducibility gas with being passed through excessive oxygen in addition
For gas with phosphorus powder reaction until oxygen is exhausted, the gas outlet of reactor 2 connects the air inlet pipe of closed water container 3, reaction
The gas that kettle 2 comes out is passed through closed water container 3, and closed water container 3 absorbs to the gas for being dissolved in water；Through overstocked
The air inlet pipe of the escape pipe connection drying 4 of container is closed, the silica gel in drying 4 successively carries out removing for gas from lower floor's web tier
Water, the gas after the water removal of drying 4 are pure nitrogen gas, and the escape pipe of drying 4 connects the collecting tank of nitrogen；
When nitrogen purification device works, a, oxygen is mixed with and the nitrogen of reducibility gas is entered by the air inlet of combustion furnace 1
Enter combustion furnace 1, the energization striking of combustion furnace 1 make it that the Oxygen in Nitrogen for being mixed with oxygen and reducibility gas and reducibility gas are anti-
Should, remove reducibility gas；In order to ensure that reducibility gas can react completely, added in addition by the air inlet of combustion furnace 1
Excessive oxygen；
B, the temperature of heating response kettle 2 to reactor 2 is 50-90 DEG C, and the gas come out from combustion furnace 1 is passed through inside and is equipped with
The reactor 2 of phosphorus powder, oxygen and phosphorus powder in the gas that combustion furnace 1 comes out react, and remove oxygen；In order to clearly know oxygen
Whether it is exhausted, the phosphorus powder is red phosphorus, judges whether oxygen is exhausted by red phosphorus color；
C, the gas come out by reactor 2 passes through closed water container 3, absorbs the material that water is dissolved in gas, obtains
To the gas gone out from water container escape pipe；
D, the gas gone out from water container escape pipe is dried by drying 4, silica gel in drying 4 layering placement and
Silica gel is successively removed water from lower floor toward upper strata, when the silica gel of the superiors of drying 4 does not change colour, by the gas of drying 4
Body directly takes in nitrogen collecting tank.
In order that the nitrogen that must be purified is purer, in addition to the molecular sieve being connected between drying 4 and collecting tank, for inhaling
Foreign gas residue that each step is remained and its micro is received, the molecular sieve is 3A, 4A or 5A molecular sieve.
The scope that the nitrogen purification device of the present invention is applied is more suitable for, and the reducibility gas being mixed with nitrogen is mainly an oxygen
Change carbon, hydrogen and organic gas.
In order to improve the service life of reactor 2, reactor 2 is avoided to corrode, the reactor 2 is inorganic ceramic material.
In order to improve consumption degree of the phosphorus powder to oxygen so that the oxygen in reactor 2 can be all consumed, the reaction
Heating wire is disposed with kettle 2, and transparent observation window is additionally provided with reactor 2, for observing phosphorus powder color change, is judged
Whether the amount of phosphorus powder enables oxygen total overall reaction complete enough.
When consuming reducibility gas, in order to avoid the deficiency of amount of oxygen, there also is provided on the air inlet periphery of combustion furnace 1
Several equally distributed pure oxygen supply orifices, for providing the oxygen supply of reducibility gas process.
It should be appreciated that the above-mentioned embodiment of the present invention is used only for exemplary illustration or explains the present invention's
Principle, without being construed as limiting the invention.Therefore, that is done without departing from the spirit and scope of the present invention is any
Modification, equivalent substitution, improvement etc., should be included in the scope of the protection.In addition, appended claims purport of the present invention
Covering the whole changes fallen into scope and border or this scope and the equivalents on border and repairing
Change example.
Claims (9)
1. a kind of nitrogen purification device, the purifying of the nitrogen for being mixed with oxygen and reducibility gas；It is characterised in that it includes two
Individual end is respectively equipped with air inlet and the combustion furnace of gas outlet, and both ends are respectively equipped with air inlet and gas outlet and inside and phosphorus is housed
The reactor of powder, closed water container and upper and lower ends with air inlet pipe and escape pipe are respectively provided with air inlet pipe and escape pipe
Drying；If dried layer layer of silica gel is distributed with the drying from bottom to top；Combustion furnace, reactor, water container and drying
Cylinder is sequentially connected, the escape pipe connection collecting tank of drying.
2. nitrogen purification device according to claim 1, it is characterised in that also include being connected between drying and collecting tank
Molecular sieve, the molecular sieve is 3A, 4A or 5A molecular sieve.
3. nitrogen purification device according to claim 1, it is characterised in that the nitrogen for being mixed with oxygen and reducibility gas
Middle reducibility gas is mainly carbon monoxide, hydrogen and organic gas.
4. nitrogen purification device according to claim 1, it is characterised in that the reactor is inorganic ceramic material.
5. the nitrogen purification device according to claim 1 or 4, it is characterised in that be disposed with heating wire in the reactor.
6. the nitrogen purification device according to claim 1 or 4, it is characterised in that transparent sight is additionally provided with the reactor
Examine window.
7. nitrogen purification device according to claim 1, it is characterised in that the air inlet periphery of the combustion furnace there also is provided
Several equally distributed pure oxygen supply orifices.
A kind of 8. method of nitrogen purification, it is characterised in that comprise the following steps：
A, the nitrogen for being mixed with oxygen and reducibility gas enters combustion furnace by the air inlet of combustion furnace, and combustion furnace energization striking makes
The Oxygen in Nitrogen that oxygen and reducibility gas must be mixed with reacts with reducibility gas, removes reducibility gas；
B, the temperature of heating response kettle to reactor is 50-90 DEG C, and the gas through combustion furnace gas outlet is passed through inside and phosphorus powder is housed
Reactor, the oxygen in gas reacts with phosphorus powder, removes oxygen；
C, pass through closed water container by the gas of reactor gas outlet, remove water-soluble composition, obtain from being filled with water
The gas that container escape pipe goes out；
D, the gas gone out from water container escape pipe passes through drying, and the silica gel for being layered placement in drying from top to bottom is inhaled
Water, when the silica gel of the superiors of drying does not change colour, nitrogen collecting tank is directly taken in by the gas of drying.
9. the method for nitrogen purification according to claim 8, it is characterised in that the phosphorus powder is red phosphorus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510907889.6A CN105399064B (en) | 2015-12-10 | 2015-12-10 | A kind of nitrogen purification device and nitrogen purification method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510907889.6A CN105399064B (en) | 2015-12-10 | 2015-12-10 | A kind of nitrogen purification device and nitrogen purification method |
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| Publication Number | Publication Date |
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| CN105399064A CN105399064A (en) | 2016-03-16 |
| CN105399064B true CN105399064B (en) | 2017-12-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510907889.6A Expired - Fee Related CN105399064B (en) | 2015-12-10 | 2015-12-10 | A kind of nitrogen purification device and nitrogen purification method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109179346B (en) * | 2018-10-15 | 2021-01-12 | 杭州博大净化设备有限公司 | Nitrogen purification equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2887423Y (en) * | 2006-03-31 | 2007-04-11 | 戚励 | Nitrogen purifier |
| CN101700878A (en) * | 2009-09-09 | 2010-05-05 | 张文波 | Nitrogen purification method |
| CN101869797A (en) * | 2010-07-30 | 2010-10-27 | 上海穗杉实业有限公司 | Method and apparatus for extracting high-purity nitrogen from air |
| CN102380313A (en) * | 2010-08-31 | 2012-03-21 | 大阳日酸株式会社 | Gas purifying method and gas purifying apparatus |
-
2015
- 2015-12-10 CN CN201510907889.6A patent/CN105399064B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2887423Y (en) * | 2006-03-31 | 2007-04-11 | 戚励 | Nitrogen purifier |
| CN101700878A (en) * | 2009-09-09 | 2010-05-05 | 张文波 | Nitrogen purification method |
| CN101869797A (en) * | 2010-07-30 | 2010-10-27 | 上海穗杉实业有限公司 | Method and apparatus for extracting high-purity nitrogen from air |
| CN102380313A (en) * | 2010-08-31 | 2012-03-21 | 大阳日酸株式会社 | Gas purifying method and gas purifying apparatus |
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