CN208771124U - A kind of waste gas recovering device in production of polysilicon - Google Patents
A kind of waste gas recovering device in production of polysilicon Download PDFInfo
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- CN208771124U CN208771124U CN201821238096.5U CN201821238096U CN208771124U CN 208771124 U CN208771124 U CN 208771124U CN 201821238096 U CN201821238096 U CN 201821238096U CN 208771124 U CN208771124 U CN 208771124U
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Abstract
The utility model relates to technical field of polysilicon production, and in particular to the waste gas recovering device in a kind of production of polysilicon comprising: air-breathing surge tank, for receiving exhaust gas, gas outlet is connected to air inlet with off-gas compressor；Off-gas compressor is connected to exhaust surge tank；Exhaust surge tank is connected to the first cooler；One end of adsorption tower is provided with first entrance and second outlet；First outlet and second entrance is arranged in the other end；First entrance is connected to the first cooler；Second entrance is used to be filled with nitrogen hydrogen mixeding gas to adsorption tower；Second outlet is connected to the second cooler；Temperature-adjusting device is provided on adsorption tower；Second cooler is connected to gas-liquid separator；Gas vent and liquid outlet are provided on gas-liquid separator；Gas vent is connected to air-breathing surge tank.The discharge that chlorosilane can be not only reduced using the utility model, is reduced environmental pollution, and can save exhaust-gas treatment cost, and then reduces production cost.
Description
Technical field
The utility model relates to the waste gas recovery dresses in technical field of polysilicon production more particularly to a kind of production of polysilicon
It sets.
Background technique
Polysilicon is the raw material for preparing semiconductor devices and solar battery, is global electronics industry and photovoltaic industry
Foundation stone, preparing the most important method of polysilicon at present is Siemens Method, and cardinal principle is, by high-purity hydrogen and high-purity
The reactant (mostly silicon halide, such as trichlorosilane) of silicon is used as raw material, is passed into reaction vessel (i.e. polycrystalline by a certain percentage
Si reduction furnace), in the environment of high temperature and pressure, the reactant of hydrogen reducing silicon, so that polysilicon is formed, the polysilicon meeting of formation
It is deposited on silicon core, obtains polycrystalline silicon rod.
A large amount of exhaust gas can be generated, in polysilicon production process in order to avoid large quantity of exhaust gas outlet causes dirt to environment
Dye, threatens to personal safety, it is necessary to handle exhaust gas.Chlorosilane contains in the hydrogeneous exhaust gas that each process units is released
Amount is higher, and the mode for handling exhaust gas in the prior art is through the elution of level-one water by the gas of this part chlorine-containing silane except chlorosilane
Afterwards, the gas phase of acid gas-containing enters two-step washing tower after alkali liquid washing is in neutrality, and the mixed gas of chlorine-containing silane is directly arranged
Enter atmosphere.This mode, the chlorosilane in one side exhaust gas can not recycle, need to be by extraneous additional substance of the supplement containing chlorine to make up
The consumption of chlorine element in polysilicon production process can largely waste chlorosilane resource；On the other hand, when handling exhaust gas,
It is big to consume alkali, water consumption, increases operating cost, the solid waste of generation is more, and sewage and solid waste are difficult to handle；Moreover, because of chlorosilane
It leaks, environment can be caused seriously to pollute, threaten personal safety.
Utility model content
In view of this, the present invention provides the waste gas recovering device in a kind of production of polysilicon, a purpose is to subtract
The discharge of few chlorosilane, reduces environmental pollution；
Another object is to save exhaust-gas treatment cost, and then reduces production cost.
In order to achieve the above objectives, the utility model mainly provides the following technical solutions:
The embodiments of the present invention provide the waste gas recovering device in a kind of production of polysilicon, comprising: air-breathing surge tank,
Off-gas compressor, exhaust surge tank, the first cooler, adsorption tower, the second cooler and knockout drum；
The air inlet of the air-breathing surge tank is for receiving exhaust gas, the gas outlet of the air-breathing surge tank and the exhaust gas pressure
The air inlet of contracting machine is connected to；The gas outlet of the off-gas compressor is connected to the air inlet of the exhaust surge tank；The exhaust
The gas outlet of surge tank is connected to the air inlet of first cooler；
First entrance, first outlet, second entrance and second outlet are provided on the adsorption tower；
The first entrance is fixedly provided in one end of the adsorption tower, connects with the gas outlet of first cooler
It is logical；The first outlet is fixedly provided in the other end of the adsorption tower, for being discharged by useless after adsorption tower absorption
Gas；
The second entrance is fixedly provided in the other end of the adsorption tower, mixed for being filled with nitrogen hydrogen to the adsorption tower
Close gas；The second outlet is fixedly provided in one end of the adsorption tower, is connected to the air inlet of second cooler；
Active carbon is filled in the adsorption tower；It is provided with temperature-adjusting device on the adsorption tower, adjusts the absorption
The temperature of tower；
The gas outlet of second cooler is connected to the gas-liquid separator；
Gas vent and liquid outlet are provided on the gas-liquid separator；The gas vent and the air-breathing surge tank
Air inlet connection；The liquid outlet is for being discharged liquid.
Further, the upper end of the adsorption tower is arranged in the first outlet；
The upper end of the adsorption tower is arranged in the second entrance.
Further, the temperature-adjusting device is fixedly provided in the outside of the adsorption tower, by the adsorption tower packet
It encloses；
There is water in the temperature-adjusting device, the adsorption tower is heated by heating water.
Further, the adsorption tower is multiple；Multiple adsorption towers are set side by side；Multiple adsorption towers respectively with
First cooler is connected to second cooler.
Further, it is set respectively in the first entrance, the first outlet, the second entrance and the second outlet
It is equipped with control valve.
Further, the control valve is motor-driven valve.
Further, second cooler is multiple；Multiple second coolers are sequentially connected in series.
Further, at least one deep freezer in multiple second coolers.
Further, active carbon adsorption column is filled in the adsorption tower.
Further, first cooler is water cooler；First cooler uses circulating water.
By above-mentioned technical proposal, the waste gas recovering device in the utility model production of polysilicon at least has following excellent
Point:
The discharge that chlorosilane can not only be reduced, reduces environmental pollution, and can save exhaust-gas treatment cost, and then drops
Low production cost.
The above description is merely an outline of the technical solution of the present invention, in order to better understand the skill of the utility model
Art means, and can be implemented in accordance with the contents of the specification, below on the preferred embodiment of the present invention and the accompanying drawings in detail
It describes in detail bright as after.
Detailed description of the invention
Fig. 1 is the schematic diagram of the waste gas recovering device in a kind of production of polysilicon provided by the embodiment of the utility model.
It is as shown in the figure:
1 is air-breathing surge tank, and 2 be off-gas compressor, and 3 is are vented surge tank, and 4 be the first cooler, and 5 be adsorption tower, 5-1
For first entrance, 5-2 is second outlet, and 5-3 is first outlet, and 5-4 is second entrance, and 6 be the second cooler, and 7 be gas-liquid point
From tank.
Specific embodiment
Further to illustrate that the utility model is the technical means and efficacy reaching predetermined purpose of utility model and being taken,
Below in conjunction with attached drawing and preferred embodiment, to specific embodiment, structure, feature and its function according to the present utility model application
Effect, detailed description is as follows.In the following description, what different " embodiment " or " embodiment " referred to is not necessarily same implementation
Example.In addition, the special characteristic, structure or feature in one or more embodiments can be combined by any suitable form.
As shown in Figure 1, the waste gas recovering device in a kind of production of polysilicon that one embodiment of the utility model proposes,
It include: that air-breathing surge tank 1, off-gas compressor 2, exhaust surge tank 3, the first cooler 4, adsorption tower 5, the second cooler 6 are gentle
Liquid knockout drum 7；
For receiving exhaust gas, air-breathing surge tank 1 can be connect the air inlet of air-breathing surge tank 1 with the production line of polysilicon,
To absorb the exhaust gas being discharged in production of polysilicon.The gas outlet of air-breathing surge tank 1 is connected to the air inlet of off-gas compressor 2；It is useless
The gas outlet of air compressor 2 is connected to the air inlet of exhaust surge tank 3；It is slow that exhaust gas enters exhaust after the compression of off-gas compressor 2
Rush tank 3；The gas outlet of exhaust surge tank 3 is connected to the air inlet of the first cooler 4；Exhaust gas that surge tank 3 is discharged is vented through the
Enter adsorption tower 5 after one cooler 4 is cooling；First entrance 5-1, first outlet 5-3, second entrance 5-4 are provided on adsorption tower 5
With second outlet 5-2；First entrance 5-1 is fixedly provided in one end of adsorption tower 5, the gas outlet with the first cooler 4；For
Receive the exhaust gas of the first cooler 4 discharge；First outlet 5-3 is fixedly provided in the other end of adsorption tower 5, is inhaled for being discharged
Exhaust gas after the attached absorption of tower 5；The biggish macromolecular substances of chlorosilane isopolarity are from bottom to top gradually adsorbed tower 5 through adsorption tower 5
Middle active carbon adsorption, the mixed gas after being adsorbed are emitted into atmosphere by first outlet 5-3.
Second entrance 5-4 is fixedly provided in the other end of adsorption tower 5, for being filled with nitrogen hydrogen mixeding gas to adsorption tower 5；
Second outlet 5-2 is fixedly provided in one end of adsorption tower 5, is connected to the air inlet of the second cooler 6；Filling in adsorption tower 5
Active charcoal；It is provided with temperature-adjusting device on adsorption tower 5, adjusts the temperature of adsorption tower 5；It is needing to be inhaled in adsorption tower 5
When attached substance is cleared up, first entrance 5-1 and first outlet 5-3 is closed, gives adsorption tower 5 to heat using temperature-adjusting device, beats
Second entrance 5-4 is opened, a small amount of pure nitrogen and hydrogen mixed gas is passed through, adsorbs the macromolecular complex such as chlorosilane on the activated carbon
Matter, absorbs that heat gradually disengages active carbon, the gas that enters through second entrance 5-4 brings the second cooler 6 into a low voltage state,
And then enters gas-liquid separator 7 and handle；The gas outlet of second cooler 6 is connected to gas-liquid separator 7；It is set on gas-liquid separator 7
It is equipped with gas vent and liquid outlet；Gas vent is connected to the air inlet of air-breathing surge tank 1；Liquid outlet is used for discharge liquor
Body.Divide after the second cooler 6 gradually cools down, condenses into gas-liquid into the macromolecular substances of the second cooler 6, such as chlorosilane
From in tank 7.The condensation of the macromolecular substances such as chlorosilane is sent to downstream units after being in a liquid state and is continued to use, and has recycled in hydrogeneous exhaust gas
Chlorosilane improves raw material availability.Gaseous material then enters the air inlet of air-breathing surge tank 1, can be recycled.
The waste gas recovering device in a kind of production of polysilicon that one embodiment of the utility model proposes, can not only subtract
The discharge of few chlorosilane, reduces environmental pollution, and can save exhaust-gas treatment cost, and then reduces production cost.
As the preferred of above-described embodiment, the upper end of adsorption tower 5 is arranged in first outlet 5-3；Exhaust gas is set to be adsorbed tower 5
When absorption, exhaust gas flows from bottom to top, and active carbon is made to adsorb the macromolecular substances in exhaust gas well.Second entrance 5-4 setting
In the upper end of adsorption tower 5, make when needing to clear up the substance in adsorption tower 5, opens below into gas, chlorine from the upper end of adsorption tower 5
The substances such as silane can be brought into the second cooler 6 by gas, be further processed.
As the preferred of above-described embodiment, temperature-adjusting device is fixedly provided in the outside of adsorption tower 5, by adsorption tower 5
It surrounds；Heating while to carry out comprehensive to adsorption tower 5 facilitates the temperature of control adsorption tower 5, and then controls in adsorption tower 5
The temperature of active carbon.There is water in temperature-adjusting device, adsorption tower 5 is heated by heating water, is heated by water, makes to live
Property charcoal temperature change it is softer, convenient for keep active carbon temperature.
As the preferred of above-described embodiment, adsorption tower 5 is multiple；Multiple adsorption towers 5 are set side by side；Multiple adsorption towers 5 divide
It is not connected to the first cooler 4 and the second cooler 6.When an adsorption tower 5 can be made to need to clear up, that is, cleared up；Absorption
The task of exhaust gas can use the substitution of other adsorption towers 5, and adsorption tower 5 is allow constantly to adsorb exhaust gas.
As the preferred of above-described embodiment, first entrance 5-1, first outlet 5-3, second entrance 5-4 and second outlet 5-2
On be respectively arranged with control valve, with facilitate control adsorption tower 5 absorption and cleaning；Facilitate switching adsorption tower 5 to adsorb exhaust gas, makes to give up
The absorption work of gas can continue.
As the preferred of above-described embodiment, control valve is motor-driven valve, to be connect with control system, convenient long-range control.
As the preferred of above-described embodiment, the second cooler 6 is multiple；Multiple second coolers 6 are sequentially connected in series, to need
The Litter to be recycled can be condensed to needing temperature.
As the preferred of above-described embodiment, at least one deep freezer in multiple second coolers 6, so that temperature can reach
To suitable temperature.
As the preferred of above-described embodiment, active carbon adsorption column is filled in adsorption tower 5, from bottom to up in order to adsorption tower 5
Exhaust gas is adsorbed, adsorption effect is improved.
As the preferred of above-described embodiment, the first cooler 4 is water cooler；First cooler 4 uses circulating water.
The waste gas recovering device in a kind of production of polysilicon that one embodiment of the utility model proposes, can not only subtract
The discharge of few chlorosilane, reduces environmental pollution, and can reduce the generation of waste water in production process, exhaust gas and waste residue, saves
Exhaust-gas treatment cost, and then production cost is reduced, and the processing pressure of polycrystalline silicon production system can be reduced, keep system more steady
It is fixed.
It further illustrates, although terms first, second etc. can be used for describing various elements herein, these arts
Language should in no way limit these elements.These terms are only used to distinguish an element and another element.For example, first element can be by
Referred to as second element, also, similarly, second element can be referred to as first element, and these terms are only used to distinguish a member
Part and another element.Without departing from the range of exemplary embodiment.Similarly, element one, element two also not representation element
Sequentially, these terms are only used to distinguish an element and another element.As used herein, term "and/or" includes one or more
A associated any combination for listing project and all combinations.
The above descriptions are merely preferred embodiments of the present invention, not makees in any form to the utility model
Limitation, any simple modification, equivalent change and modification made by the above technical examples according to the technical essence of the present invention,
It is still within the scope of the technical solutions of the present invention.
Claims (10)
1. the waste gas recovering device in a kind of production of polysilicon characterized by comprising air-breathing surge tank, off-gas compressor, row
Gas surge tank, the first cooler, adsorption tower, the second cooler and knockout drum；
The air inlet of the air-breathing surge tank is for receiving exhaust gas, the gas outlet of the air-breathing surge tank and the off-gas compressor
Air inlet connection；The gas outlet of the off-gas compressor is connected to the air inlet of the exhaust surge tank；The exhaust buffering
The gas outlet of tank is connected to the air inlet of first cooler；
First entrance, first outlet, second entrance and second outlet are provided on the adsorption tower；
The first entrance is fixedly provided in one end of the adsorption tower, is connected to the gas outlet of first cooler；Institute
The other end that first outlet is fixedly provided in the adsorption tower is stated, for being discharged by the exhaust gas after adsorption tower absorption；
The second entrance is fixedly provided in the other end of the adsorption tower, for being filled with nitrogen and hydrogen mixture to the adsorption tower
Body；The second outlet is fixedly provided in one end of the adsorption tower, is connected to the air inlet of second cooler；
Active carbon is filled in the adsorption tower；It is provided with temperature-adjusting device on the adsorption tower, adjusts the adsorption tower
Temperature；
The gas outlet of second cooler is connected to the knockout drum；
Gas vent and liquid outlet are provided on the knockout drum；The gas vent and the air-breathing surge tank into
Port connection；The liquid outlet is for being discharged liquid.
2. the waste gas recovering device in production of polysilicon according to claim 1, which is characterized in that
The upper end of the adsorption tower is arranged in the first outlet；
The upper end of the adsorption tower is arranged in the second entrance.
3. the waste gas recovering device in production of polysilicon according to claim 2, which is characterized in that
The temperature-adjusting device is fixedly provided in the outside of the adsorption tower, and the adsorption tower is surrounded；
There is water in the temperature-adjusting device, the adsorption tower is heated by heating water.
4. the waste gas recovering device in production of polysilicon according to claim 3, which is characterized in that
The adsorption tower is multiple；Multiple adsorption towers are set side by side；Multiple adsorption towers are cooling with described first respectively
Device is connected to second cooler.
5. the waste gas recovering device in production of polysilicon according to claim 4, which is characterized in that
Control valve is respectively arranged in the first entrance, the first outlet, the second entrance and the second outlet.
6. the waste gas recovering device in production of polysilicon according to claim 5, which is characterized in that
The control valve is motor-driven valve.
7. the waste gas recovering device in production of polysilicon according to claim 6, which is characterized in that
Second cooler is multiple；Multiple second coolers are sequentially connected in series.
8. the waste gas recovering device in production of polysilicon according to claim 7, which is characterized in that
At least one deep freezer in multiple second coolers.
9. the waste gas recovering device in production of polysilicon according to claim 8, which is characterized in that
Active carbon adsorption column is filled in the adsorption tower.
10. the waste gas recovering device in production of polysilicon according to claim 9, which is characterized in that
First cooler is water cooler；First cooler uses circulating water.
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| CN201821238096.5U CN208771124U (en) | 2018-08-01 | 2018-08-01 | A kind of waste gas recovering device in production of polysilicon |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110280098A (en) * | 2019-04-25 | 2019-09-27 | 新疆大全新能源股份有限公司 | The recovery method of chlorosilane in a kind of hydrogeneous exhaust gas |
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2018
- 2018-08-01 CN CN201821238096.5U patent/CN208771124U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110280098A (en) * | 2019-04-25 | 2019-09-27 | 新疆大全新能源股份有限公司 | The recovery method of chlorosilane in a kind of hydrogeneous exhaust gas |
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