CN105387805B - Stitching error detection method based on far-field spot energy curve - Google Patents
Stitching error detection method based on far-field spot energy curve Download PDFInfo
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- CN105387805B CN105387805B CN201510881610.1A CN201510881610A CN105387805B CN 105387805 B CN105387805 B CN 105387805B CN 201510881610 A CN201510881610 A CN 201510881610A CN 105387805 B CN105387805 B CN 105387805B
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Abstract
Stitching error detection method based on far-field spot energy curve, the error-detecting field being related in jointing grating, solve the problems, such as that existing jointing grating error detection method can not meet directly to cause that calculating process is not cumbersome again from the performance indications for providing jointing grating using angle simultaneously, present invention selection far-field spot energy is as coarse adjustment reference, far-field spot energy curve is as accurate adjustment reference, resolution ratio is as final adjustment index, the person that establishes preparing grating directly contacts with grating user's, communicating with each other between grating user and preparing grating person of being more convenient for；In addition, method in present embodiment need not identify light spot shape, only need by energy curve it may determine that going out existing stitching error, the energy curve directly received by CCD judges, and according to the resolution ratio that energy curve measures as adjustment index, the precision of measurement is high, in the absence of the error for judging light spot energy shape indirectly and introducing.The precision of the method measurement of the present invention is high.
Description
Technical field
The present invention relates to the error-detecting field in jointing grating, and in particular to a kind of based on far-field spot energy curve
Stitching error detection method.
Background technology
Large scale plane diffraction grating suffers from numerous scientific research fields such as celestial spectrum analysis, inertial confinement fusion
Important application.Meter-sized plane diffraction grating, which is made, using joining method can solve the problem that making monolithic large scale plane spreads out
Penetrate problems existing for grating, therefore to make large scale grating significant using legal system is spliced, and the mistake of jointing grating
Difference detection is to ensure that jointing grating disclosure satisfy that the important prerequisite of use demand.
The error-detecting of jointing grating typically uses two methods：Interference fringe method and far-field spot energy method.Either
Using interference fringe method or far-field spot energy method, whether the diffraction light phase difference that its essence is to detect jointing grating meets
Splicing requires.Interference fringe method is the interference fringe adjustment jointing grating posture measured according to interferometer, is then surveyed by interferometer
The wavefront value obtained judges whether to be adjusted to meet the requirements.The advantages of this method, is that the measurement accuracy of interferometer is high, interference fringe
It is easy to observe, but it is the index that jointing grating producer provides to splice wavefront value, can not directly react jointing grating to its institute
In the influence caused by system performance index.Far-field spot energy method is to extract far-field spot shape by algorithm, according to far field
Light spot shape adjusts jointing grating posture, judges whether to be adjusted to meet the requirements by closed circle self-energy judgment criterion.The party
The advantages of method, is influence caused by directly reacting jointing grating system to where it by analysing energy distribution situation, but far field
Light spot shape is not easy to identify compared with interference fringe, and calculating process is cumbersome.
Grating is generally used in spectral instrument, the requirement that grating user proposes is usually as beam splitter
The Grating requirements provided based on spectral resolution, and the index that preparing grating person provides be usually grating wavefront value, it is necessary to through
The relation for calculating and could establishing wavefront value and resolution ratio is crossed, this method needs pass through calculating and can not be directly from using angle
Provide the performance indications of grating.If the detection method of stitching error can either be directly from the performance that jointing grating is provided using angle
Index make it that calculating process is not cumbersome again, and the two methods of above-mentioned use can not meet to require.
The content of the invention
The present invention can not meet directly to provide from using angle simultaneously to solve existing jointing grating error detection method
A kind of the problem of performance indications of jointing grating cause calculating process not cumbersome again, there is provided spelling based on far-field spot energy curve
Connect error detection method.
Stitching error detection method based on far-field spot energy curve, this method are realized by following steps：
Step 1: benchmark grating and the grating that stitching error be present relative to benchmark grating are positioned over as jointing grating
In far field construction light path, incident ray produces zero order light through benchmark grating and the grating that stitching error be present relative to benchmark grating
And diffraction light, zero order light are received after the first lens by area array CCD 1, diffraction light is received after the second lens by area array CCD 2, institute
State CCD1 and receive far field construction zero level hot spot in lens focal plane, CCD2 receives far field construction level hot spot in lens focal plane；Prison
Survey area array CCD 1 and the pixel energy curve of certain a line of area array CCD 2 or a certain row；Analyze the area array CCD 1 and face battle array simultaneously
The far-field spot energy diagram and the energy curve figure of output that CCD2 is received；
Step 2: the shape of the far-field spot energy diagram received according to the area array CCD 1 described in step 1 and area array CCD 2
Judge the benchmark grating and stitching error existing for the grating of stitching error be present relative to benchmark grating, stitching error by
During step is small, when that can not determine whether to exist stitching error according to the light spot energy figure, then according to energy curve
Figure adjusts stitching error value, when first when energy curve figure is minimum and curved profile is symmetrical, this part stitching error adjustment knot
Beam；
Step 3: using the halfwidth numerical value of energy curve in the energy curve figure of step 2 measurement as point of jointing grating
Resolution, judges whether resolution ratio meets design requirement, if it is, splicing is completed, if it is not, then continuing fine setting up to measurement
The resolution ratio of jointing grating meets to require.
Beneficial effects of the present invention：Stitching error detection method of the present invention based on far-field spot energy curve,
Compared with prior art, the present invention has advantages below：First, using analysis far-field spot shape and far-field spot energy curve phase
With reference to mode, it is not necessary to identify light spot shape, it is only necessary to by energy curve it may determine that going out existing stitching error, because
There can be error when identifying light spot shape, therefore the energy curve directly received by CCD judges, the precision of measurement is high；2nd,
Using resolution ratio as basis for estimation, determine whether the energy curve of final adjustment meets to require, the resolution ratio proposed with grating user
It is required that match, communicating with each other between grating user and preparing grating person of being more convenient for.
Brief description of the drawings
Fig. 1 is that light path is bowed in the stitching error detection method of the present invention based on far-field spot energy curve
View；
Fig. 2 a and Fig. 2 b are respectively the stitching error detection side of the present invention based on far-field spot energy curve in Fig. 2
The energy hot spot figure that zero level light path detector C CD2 is received in method；
Fig. 3 a to Fig. 3 f, Fig. 3 b and Fig. 3 c are respectively the spelling of the present invention based on far-field spot energy curve in Fig. 3
Connect the energy hot spot and energy curve schematic diagram that zero level light path detector C CD2 is received in error detection method；Wherein, Fig. 3 a are
The whole light spot energy figure at initial stage of accurate adjustment, the energy curve of output that Fig. 3 b are expert at by CCD2 energy peaks, Fig. 3 c are CCD2 energy
The energy curve of output of peak value column；The whole later stage light spot energy figure of Fig. 3 d accurate adjustments, Fig. 3 e are expert at by CCD2 energy peaks
Energy curve of output, Fig. 3 f be CCD2 energy peak columns energy curve of output.
Fig. 4 is optical diffraction CCD1 in the stitching error detection method of the present invention based on far-field spot energy curve
The energy hot spot figure of reception；
Fig. 5 a to Fig. 5 f are in the stitching error detection method of the present invention based on far-field spot energy curve in Fig. 5
The energy hot spot and energy curve schematic diagram that optical diffraction CCD1 is received；Wherein, Fig. 5 a are the whole light spot energy figure at initial stage of accurate adjustment,
The energy curve of output that Fig. 5 b are expert at by CCD1 energy peaks, Fig. 5 c are that the energy output of CCD1 energy peak columns is bent
Line, Fig. 5 d is the whole later stage light spot energy figures of accurate adjustment, the energy curve of output that Fig. 5 e are expert at by CCD1 energy peaks, and Fig. 5 f are
The energy curve of output of CCD1 energy peak columns.
Embodiment
Embodiment one, with reference to Fig. 1 to Fig. 5 illustrate present embodiment, the splicing based on far-field spot energy curve
Error detection method, this method are realized by following steps：
Step 1: benchmark grating and the grating that stitching error be present relative to benchmark grating are positioned over as jointing grating
In far field construction light path, incident ray produces zero order light through benchmark grating and the grating that stitching error be present relative to benchmark grating
And diffraction light, zero order light are received after the first lens by area array CCD 1, diffraction light is received after the second lens by area array CCD 2, institute
State CCD1 and receive far field construction zero level hot spot in lens focal plane, CCD2 receives far field construction level hot spot in lens focal plane；Prison
Survey area array CCD 1 and the pixel energy curve of certain a line of area array CCD 2 or a certain row；Analyze the area array CCD 1 and face battle array simultaneously
The far-field spot energy diagram and the energy curve figure of output that CCD2 is received；
Step 2: the shape of the far-field spot energy diagram received according to the area array CCD 1 described in step 1 and area array CCD 2
Judge the benchmark grating and stitching error existing for the grating of stitching error be present relative to benchmark grating, stitching error by
During step is small, when that can not determine whether to exist stitching error according to the light spot energy figure, then according to energy curve
Figure adjusts stitching error value, when first when energy curve figure is minimum and curved profile is symmetrical, this part stitching error adjustment knot
Beam；
Step 3: using the halfwidth numerical value of energy curve in the energy curve figure of step 2 measurement as point of jointing grating
Resolution, judges whether resolution ratio meets design requirement, if it is, splicing is completed, if it is not, then continuing fine setting up to measurement
The resolution ratio of jointing grating meets to require.
Meet design requirement, in particular in the design process described in present embodiment, according to being actually needed adjustment
The size of resolution ratio.
Far-field spot energy is selected to join as coarse adjustment reference, far-field spot energy curve as accurate adjustment in present embodiment
According to resolution ratio is as final adjustment index, and establishing preparing grating, person contacts with the direct of grating user, grating use of being more convenient for
Communicating with each other between family and preparing grating person；In addition, the method in present embodiment need not identify light spot shape, it is only necessary to logical
Energy curve is crossed it may determine that going out existing stitching error, the energy curve directly received by CCD judges, and according to energy
The resolution ratio of curved measurement is measured as adjustment index, the precision of measurement is high, is introduced in the absence of light spot energy shape is judged indirectly
Error.
With reference to Fig. 1, grating establishes cartesian space rectangular coordinate system on the basis of grating G1, and G2 is the light for existing error
Grid, x-axis are grating vector direction, and y-axis is the grid line direction of grating, and z-axis is perpendicular to the direction of grating planar.Zero level photo measure
Three-dimensional error, i.e. the three-dimensional perspective error delta θ around x, y, z axlex、Δθy, Δ z, diffraction photo measure five tie up error, i.e. Δ θx、Δ
θy、ΔθzWith bidimensional displacement error Δ x, the Δ z along x, z-axis.
With reference to Fig. 2, CCD2 is the detector for receiving zero level energy hot spot, includes three-dimensional error information Δ θx、Δθy, Δ z,
Add one group of measurement and first eliminate error delta z, the energy hot spot received further according to CCD1, coarse regulation Δ θx、Δθy.Fig. 2 (a) is
Δθx＞ Δs θyWhen energy hot spot figure, when obvious separation occurs on the longitudinal direction of detector for energy, now need to adjust Δ
θx；Fig. 2 (b) is Δ θy＞ Δs θxWhen energy hot spot figure, when obvious separation occurs in the transverse direction of detector for energy, now
Need to adjust Δ θy。
With reference to Fig. 3, when human eye can not identify Δ θx、ΔθyDuring change to far-field spot energy production, now coarse adjustment
It is whole to terminate, it is necessary to which the energy curve exported according to detector further adjusts the remaining margin of error.In Fig. 3 a, Fig. 3 b and Fig. 3 c
Three width figures are the whole light spot energy figure at initial stage of accurate adjustment respectively, the energy curve of output that detector C CD2 energy peaks are expert at, are visited
The energy curve of output of device CCD2 energy peak columns is surveyed, from the peak of curve point of curve it can be seen from the figure that row and column not
Have at center 0, adjust Δ θx、ΔθyMake the energy curve of row and column tend to center 0；Fig. 3 d, Fig. 3 e and Fig. 3 f
In three width figures be the whole later stage light spot energy figure of accurate adjustment respectively, the output of energy that detector C CD2 energy peaks are expert at is bent
Line, the energy curve of output of detector C CD2 energy peak columns, from the peak of curve of curve it can be seen from the figure that row and column
Put close at center 0, but energy curve still has segmental defect, is required according to available accuracy, can further adjust, but
Because system there may be the factors such as aberration, we think that Fig. 3 (b) is the situation that adjustment meets to require for the time being.
With reference to Fig. 4, CCD1 is the detector for receiving diffraction energy hot spot, and five dimension control information Δ θ are included in diffraction lightx、
Δθy、Δθz, Δ x, Δ z, zero order light adjusted three-dimensional error Δ θx、Δθy, Δ z, i.e., remaining bidimensional is included in diffraction light
Control information Δ θz、Δx.Fig. 4 is the far-field spot energy diagram in coarse regulation stage, adjustment Δ θzUntil human eye distinguishes not glossing up
Change.
With reference to Fig. 5, Fig. 5 a, Fig. 5 b and Fig. 5 c three width figures are the whole light spot energy figure at initial stage of accurate adjustment respectively, detector
The energy curve of output that CCD1 energy peaks are expert at, the energy curve of output of detector C CD1 energy peak columns, from song
The peak of curve point of line it can be seen from the figure that row and column is not located at center 0, adjustment Δ θz, Δ x make row and column
Energy curve tends to center 0；Three width figures in Fig. 5 d, Fig. 5 e and Fig. 5 f are the whole later stage light spot energy figure of accurate adjustment respectively,
The energy curve of output that detector C CD1 energy peaks are expert at, the energy output of detector C CD1 energy peak columns are bent
Line, from the peak of curve point of curve it can be seen from the figure that row and column close to center 0 at, now think that adjustment conforms to
Ask.
Finally measure the energy curve halfwidth that detector C CD1 energy peaks are expert at, the resolution as jointing grating
Rate, because the resolution ratio of seam crossing is comparatively minimum, therefore the resolution ratio of jointing grating is used as using the resolution ratio of seam crossing
It is rational, it is final to determine whether jointing grating meets to require according to requirement of the grating user to grating resolution.
Claims (3)
1. the stitching error detection method based on far-field spot energy curve, it is characterized in that, this method is realized by following steps：
Step 1: benchmark grating and the grating that stitching error be present relative to benchmark grating are positioned over far field as jointing grating
In optical diffraction, incident light produces zero order light and diffraction through benchmark grating and the grating that stitching error be present relative to benchmark grating
Light, zero order light are received after the first lens by area array CCD 1, and diffraction light is received after the second lens by area array CCD 2, the CCD1
Far field zero level hot spot is received in the first lens focal plane, CCD2 receives far field construction level hot spot in the second lens focal plane；Monitoring
Area array CCD 1 and the pixel energy curve of certain a line of area array CCD 2 or a certain row；Analyze the area array CCD 1 and area array CCD 2 simultaneously
The far-field spot energy diagram of reception and the energy curve figure of output；
Step 2: the shape of the far-field spot energy diagram received according to the area array CCD 1 described in step 1 and area array CCD 2 judges
The benchmark grating and stitching error existing for the grating of stitching error be present relative to benchmark grating, progressively adjusted in stitching error
In small process, when that can not determine whether to exist stitching error according to the light spot energy figure, then adjusted according to energy curve figure
Whole stitching error value, first when energy curve figure is minimum and when curved profile is symmetrical, and stitching error adjustment terminates；
Step 3: using the halfwidth numerical value of energy curve in the energy curve figure of step 2 measurement as the resolution of jointing grating
Rate, judges whether resolution ratio meets design requirement, if it is not, then continuing fine setting until the resolution ratio of the jointing grating of measurement meets
It is required that if it is, complete splicing.
2. the stitching error detection method according to claim 1 based on far-field spot energy curve, it is characterised in that step
In rapid two, refer to that human eye can not differentiate glossing up energy when that can not determine whether to exist stitching error according to the light spot energy figure
The situation of change of spirogram.
3. the stitching error detection method according to claim 1 based on far-field spot energy curve, it is characterised in that with
Benchmark grating establishes cartesian space rectangular coordinate system, zero level photo measure three-dimensional error, i.e. the three-dimensional perspective error around x, y, z axle
Δθx、Δθy, Δ z, diffraction photo measure five tie up error be Δ θx、Δθy, Δ z and along x, bidimensional displacement error Δ x, the Δ θ of z-axisz,
Grating vector direction on the basis of x-axis, the grid line direction of grating on the basis of y-axis, z-axis are perpendicular to the direction of benchmark grating planar.
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| CN105806482B (en) * | 2016-05-23 | 2018-03-16 | 中国科学院长春光学精密机械与物理研究所 | The stitching error correction system and method for jointing grating |
| CN106932173B (en) * | 2017-04-06 | 2019-01-04 | 哈尔滨工业大学 | The measurement method of high-precision heavy-caliber optical grating five degree of freedom splicing precision |
| CN109405743B (en) | 2018-11-29 | 2020-07-10 | 武汉华星光电技术有限公司 | Positioning method and positioning device of display module, controller and storage medium |
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