CN101419319A - Split pattern displacement deviation monitoring system - Google Patents
Split pattern displacement deviation monitoring system Download PDFInfo
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- CN101419319A CN101419319A CNA2008102033818A CN200810203381A CN101419319A CN 101419319 A CN101419319 A CN 101419319A CN A2008102033818 A CNA2008102033818 A CN A2008102033818A CN 200810203381 A CN200810203381 A CN 200810203381A CN 101419319 A CN101419319 A CN 101419319A
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Abstract
The invention relates to a tiled grating displacement error monitoring system, which comprises a grating tiling device for mounting a tiled grating, wherein a fine adjuster platform of the grating tiling device is provided with a piezoceramics driver; two polar plates of a first digital capacitance micro-displacement sensor are oppositely arranged on positions in the horizontal direction of a coarse adjuster platform and a lower platform of the fine adjuster respectively; two polar plates of a second digital capacitance micro-displacement sensor are oppositely arranged on positions perpendicular to the lower platform and an upper platform of the fine adjuster respectively; output ends of the first and second digital capacitance micro-displacement sensors are connected with the input end of a signal sample circuit; the output end of the signal sample circuit is connected with the input end of a controller of a singlechip; the output end of the singlechip is connected with a PC through a serial port communication circuit; and the output end of the PC is connected with the control end of the piezoceramics driver through a D/A converter.
Description
Technical field
The present invention relates to grating, particularly a kind of to being applied to the jointing grating offset deviation monitoring system in the high power laser system.
Technical background
In the laser fusion project, for obtaining the short pulse high power laser light output of tens fs (femtosecond) or several ps (psec), need to use large-area grating to come laser pulse is compressed, because technical reason, directly make not only difficulty but also uneconomical of heavy caliber diffraction grating, at present, a kind of alternative method is to adopt grating splicing means to obtain bigbore diffraction grating, so-called grating splicing, it is the sub-gratings that has identical parameters with several, locus by precision is adjusted, and makes the enough little or coordination phase of its mutual phasic difference, thereby is equivalent to a complete grating.
Realize large-area grating splicing, key is to realize coplane precision high between each sub-gratings and grating piece stability at interval, require the coplane precision between each sub-gratings should remain in tens nm magnitudes, piece between the grating is at interval less than 1/10 of sub-gratings line width, promptly in tens nm scopes.The grating splicing apparatus that we adopt at present comprises adjuster platform 9 and rack and rinion adjustment platform 10 two parts, carry out coarse adjustment earlier, deviation after the locking is within effective range of adjustment of adjuster platform 9, do further to adjust by adjuster platform 9 again, adjuster platform 9 be with flexible hinge as kinematic pair, piezoelectric ceramics constitutes as the micro-displacement platform of driver.
Be spliced into example with two blocks of gratings, its grating splicing apparatus structural representation is as shown in Figure 1: the first sub-gratings G1 is installed on the rack and rinion adjustment platform 10, as the benchmark grating, adjuster platform 9 is made of two-layer platform up and down, lower floor's platform 91 has the bidimensional translation and one dimension rotates adjusting, upper platform 92 is installed on lower floor's platform, comprise bidimensional and rotate adjusting, the second sub-gratings G2 is installed on the upper platform 92, coplane accuracy error between the first sub-gratings G1, the second sub-gratings G2 is S, and piece is spaced apart L.
According to the adjustment accuracy requirement in the grating splicing, splicing apparatus also must have very high stability except the Motion Resolution rate that will have submicron order, and (grating coplane accuracy error is S promptly in splicing grating to be adjusted to ideal position
0, piece is spaced apart L
0) after, keep its change in displacement in the scope (less than 20nm) that allows, so splicing apparatus should have bigger rigidity, to weaken the influence of external interference.But experimental result shows, because characteristics such as the sluggishness that piezoelectric ceramic actuator itself has, creep, the displacement output bias in the horizontal and vertical directions of adjuster platform 2 can slowly change along with the variation of time, finally all can only reach micron dimension, can't satisfy the stability requirement of the location of grating splicing, thereby have a strong impact on the spatial character of laser pulse.
Summary of the invention
The objective of the invention is to overcome the time dependent problem of above-mentioned existing sub-gratings relative position, a kind of jointing grating offset deviation monitoring system is provided, require this system can ensure that the long-time position stability of described jointing grating is better than 15nm, and have characteristics such as measurement performance is stable, cost is low, simple in structure, easy to operate.
Technical solution of the present invention is:
A kind of jointing grating offset deviation monitoring system, comprise for the grating splicing apparatus that jointing grating is installed, this grating splicing apparatus is made up of rack and rinion adjustment platform and adjuster platform, described rack and rinion adjustment platform has latch-up structure, described adjuster platform is made of underlying platform and upper platform, this adjuster platform is equipped with piezoelectric ceramic actuator, this piezoelectric ceramic actuator is made up of horizontal piezoelectric ceramic actuator and vertical piezoelectric ceramic actuator, horizontal piezoelectric ceramic actuator drives the horizontal shift of this adjuster platform with respect to described rack and rinion adjustment platform, described vertical piezoelectric ceramic actuator drives the upper platform perpendicular displacement of this adjuster platform, it is characterized in that:
The two-plate of the first capacitance digital micro-displacement sensor relatively is installed in the position of the underlying platform horizontal direction of described rack and rinion adjustment platform and adjuster respectively, and the two-plate of the second capacitance digital micro-displacement sensor relatively is installed in the position of the vertical direction of the underlying platform of described adjuster and upper platform respectively;
The input end of the output termination signal sample circuit of the described first capacitance digital micro-displacement sensor and the second capacitance digital micro-displacement sensor, the input end of the output terminal order sheet machine controller of this signal sample circuit, the output terminal of this singlechip controller connects PC through serial communication circuit, and the output terminal of this PC links to each other with the control end of described piezoelectric ceramic actuator through D/A converter.
Described jointing grating is made of first sub-gratings and second sub-gratings, described first sub-gratings is installed on the surface level of described rack and rinion adjustment platform, as the benchmark grating, second sub-gratings is installed on the surface level of upper platform of described adjuster platform behind the rack and rinion adjustment platform locking.
Described signal sample circuit is the electric capacity digital quantizer.
Because the sluggishness that piezoelectric ceramic actuator itself has, characteristics such as creep, the adjuster platform can not keep stable in the displacement output of level and vertical direction, but along with the time changes, offset deviation constantly increases, this moment, the polar plate spacing of the grating piece interval L and the first capacitance digital micro-displacement sensor produced same variable quantity, coplane accuracy error S then produces same variable quantity with the polar plate spacing of the second capacitance digital micro-displacement sensor, therefore need measure the polar plate spacing variable quantity of the first capacitance digital micro-displacement sensor and the second capacitance digital micro-displacement sensor respectively, the piece that can try to achieve jointing grating simultaneously is the L variable quantity of surface accuracy deviation S together at interval.
Capacitance between the two-plate of the online detection first capacitance digital micro-displacement sensor of signal sample circuit, this capacitance is as the value of feedback of pattern displacement deviation detection system, by singlechip controller capacitance is carried out arithmetic mean, last arithmetic mean M is the feedback capacity value that obtains at last, pass to PC by serial port circuit, by PC the feedback capacity value is handled, be translated into actual offset deviation, and try to achieve the needed driving voltage of piezoelectric ceramic actuator, via after the D/A conversion driving voltage being applied on the described piezoelectric ceramic actuator, drive the adjuster platform and change displacement, thereby regulate and the piece of stablizing two sub-gratings is spaced apart desirable L
0State satisfies the position stability requirement of sub-gratings.
The principle of work of the second capacitance digital micro-displacement sensor and the first capacitance digital micro-displacement sensor are similar, no longer describe in detail.
The present invention has following advantage:
1, the adjusting control stiffness is good, and the present invention makes the coplane accuracy error S of splicing sub-gratings less than 15nm, and grating piece L long-time stability at interval is better than 15nm;
2, with low cost, measuring accuracy height, good reliability;
3, circuit structure is simple, easy to operate, and the space that needs is little.
Description of drawings
Fig. 1 is the structural representation of grating splicing apparatus platform.
Fig. 2 is the structural representation of capacitance sensing type jointing grating offset deviation monitoring system of the present invention.
Fig. 3 is piezoelectric ceramic actuator 8 mounting structure synoptic diagram of the present invention.
Embodiment
The invention will be further described below in conjunction with drawings and Examples, but should not limit protection scope of the present invention with this.
See also Fig. 2, Fig. 2 is the structural representation of jointing grating offset deviation monitoring system of the present invention, and as seen from the figure, jointing grating offset deviation monitoring system of the present invention comprises:
Form the adjustment platform by rack and rinion adjustment platform 10 and adjuster platform 9, described rack and rinion adjustment platform 10 has latch-up structure, described adjuster platform 9 is made of underlying platform 91 and upper platform 92, this adjuster platform 9 is equipped with horizontal piezoelectric ceramic actuator 81 and vertical piezoelectric ceramic actuator 82,83, by horizontal piezoelectric ceramic actuator 81 and vertical piezoelectric ceramic actuator 82,83 form piezoelectric ceramic actuator 8, horizontal piezoelectric ceramic actuator 81 drives the horizontal shift campaign of this adjuster platform 9 with respect to described rack and rinion adjustment platform 10, described vertical piezoelectric ceramic actuator 82,83 drive the upper platform 92 perpendicular displacement campaigns of this adjuster platform 9;
The first sub-gratings G1 is installed on the surface level of described rack and rinion adjustment platform 10, after rack and rinion adjustment locking as the benchmark grating, the sub-G2 of second sub-gratings is installed on the surface level of upper platform 92 of described adjuster platform 9, and the described first sub-gratings G1 and the second sub-gratings G2 constitute jointing grating;
First pole plate 11 of the first capacitance digital micro-displacement sensor 1 and second pole plate 12 relatively are installed in the position of underlying platform 91 horizontal directions of described rack and rinion adjustment platform 10 and adjuster 9 respectively, then the piece between first pole plate 11 of the first capacitance digital micro-displacement sensor 1 and the spacing variable quantity between second pole plate 12 and the described first sub-gratings G1 and the second sub-gratings G2 at interval the L variable quantity remain consistent; First pole plate 21 of the second capacitance digital micro-displacement sensor 2 and second step 22 relatively are installed in the position of the vertical direction of the underlying platform 91 of described adjuster 9 and upper platform 92 respectively, and first pole plate 21 of the then described second capacitance digital micro-displacement sensor 2 and the spacing variable quantity between second step 22 remain consistent with the coplane accuracy error S variable quantity of the described first sub-gratings G1 and the second sub-gratings G2;
The input end of the output termination signal sample circuit 3 of the described first capacitance digital micro-displacement sensor 1 and the second capacitance digital micro-displacement sensor 2, the input end of the output terminal order sheet machine controller 4 of this signal sample circuit 3, the output terminal of this singlechip controller 4 connects PC 6 through serial communication circuit 5, and the output terminal of this PC 6 links to each other through the control end of D/A converter 7 with described piezoelectric ceramic actuator 8.
First pole plate 11 of the described first capacitance digital micro-displacement sensor 1, the real-time spacing between second pole plate 12 are made as L
/, initial separation is defined as L
/ 0, the spacing variation delta L between the two-plate of this first capacitance digital micro-displacement sensor 1 then
/Equate with the piece interval variation amount Δ L of described jointing grating.
Because characteristics such as the intrinsic sluggishness of piezoelectric ceramics, creep will make the second sub-gratings G2 depart from initial predeterminated position over time, we need measure the spacing variation delta L between the two-plate of the first capacitance digital micro-displacement sensor 1
/, be the variation delta L of jointing grating piece L; Measure the spacing variation delta S between the two-plate of the second capacitance digital micro-displacement sensor 2
/, be the variation delta S of the coplane accuracy error S of jointing grating.
Traditional signal sample circuit adopts discrete component, because the uncertainty of part characteristic, common sensitivity of the sample circuit that discrete component constituted and precision all are difficult to guarantee, the circuit structure complexity, and poor stability is difficult to the measuring accuracy that reaches higher.
Described AD7746 type electric capacity digital quantizer have and internal integrated circuit between bus (Inter IC Bus abbreviates I as
2C) compatible serial interface and two external capacitor passages, be first passage and second channel, capacitance between the two-plate of their the online detection first capacitance digital micro-displacement sensors 1 of difference and the second capacitance digital micro-displacement sensor 2, this capacitance is as the value of feedback of pattern displacement deviation detection system, by with I
2The C compatible serial interface passes to singlechip controller 4 and (requires singlechip controller to have I
2C interface, the present invention selects the PIC18F252 single-chip microcomputer for use) in, singlechip controller 4 is in the processing procedure to the capacitance that collects, gross error and arithmetic mean value-based algorithm are removed in employing, last arithmetic mean M is the feedback capacity value that obtains at last, (serial port circuit has a lot of general chips by serial communication circuit 5, present embodiment is selected the MAX3232 chip of MAXIM company for use) pass to PC 6, handle by 6 pairs of feedback capacity values of PC, be translated into actual offset deviation, and try to achieve the horizontal piezoelectric ceramic actuator 81 of piezoelectric ceramic actuator 8 and vertical piezoelectric ceramic actuator 82,83 needed driving voltages, via the horizontal piezoelectric ceramic actuator 81 and the vertical piezoelectric ceramic actuator 82 that after 7 conversions of 16 D/A converters driving voltage are added in piezoelectric ceramic actuator 8, on 83, horizontal piezoelectric ceramic actuator 81 is used to adjust grating piece L at interval, vertical piezoelectric ceramic actuator 82,83 are used to adjust grating coplane accuracy error S, thereby the piece of regulating and stablizing two sub-gratings at interval L together surface accuracy deviation S satisfy the position stability requirement of sub-gratings in perfect condition.
Described PC 6 adopts the LABVIEW software programming.
The course of work of the present invention is as follows:
Constituting jointing grating at the described first sub-gratings G1 and the second sub-gratings G2, to adjust to required grating coplane accuracy error be S
0, piece is spaced apart L
0After, drive system of the present invention and start working,
The AD7746 type electric capacity digital quantizer of described signal sample circuit 3 is gathered the capacitance of the polar plate spacing variation of the first capacitance digital micro-displacement sensor 1 and the second capacitance digital micro-displacement sensor 2, imports described singlechip controller 4;
This singlechip controller 4 adopts and removes gross error and arithmetic mean value-based algorithm, and last arithmetic mean M is the feedback capacity value that obtains at last, by the described PC 6 of described serial communication circuit 5 inputs;
Described PC 6 at first carries out calculation process to the capacitance that the polar plate spacing from the reflection first capacitance digital micro-displacement sensor 1 of serial communication circuit 5 input and the second capacitance digital micro-displacement sensor 2 changes, and tries to achieve the real-time spacing L between the pole plate of the first capacitance digital micro-displacement sensor 1 and the second capacitance digital micro-displacement sensor 2 respectively
/With S
/, and respectively with the pole plate initial separation L of the first capacitance digital micro-displacement sensor 1 and the second capacitance digital micro-displacement sensor 2
/ 0And S
/ 0Compare, try to achieve deviation delta L between the two respectively
/With Δ S
/, this deviation is the piece interval variation amount Δ L and the coplane accuracy error variation delta S of jointing grating; Then to deviation delta L
/With Δ S
/Carry out computing, try to achieve the horizontal piezoelectric ceramic actuator 81 of described piezoelectric ceramic actuator 8 and the needed driving voltage of vertical piezoelectric ceramic actuator 82,83, and to the horizontal piezoelectric ceramic actuator 81 of described piezoelectric ceramic actuator 8 and vertically piezoelectric ceramic actuator 82,83 apply corresponding driving voltage, realization is adjusted control to the displacement of adjuster platform 9, the piece that makes jointing grating at interval L together surface accuracy deviation S return to original state L
0And S
0,, ensure the long-time position stability of described jointing grating offset deviation amount with this monitoring automatically that circulates.
Experimental result proves, jointing grating offset deviation monitoring system of the present invention can guarantee to splice the coplane accuracy error S of sub-gratings less than 15nm, grating piece L long-time stability at interval is better than 15nm, satisfy the adjustment accuracy requirement of grating splicing fully, and have characteristics such as monitoring performance is stable, cost is low, simple in structure, easy to operate.
Claims (3)
1, a kind of jointing grating offset deviation monitoring system, comprise for the grating splicing apparatus that jointing grating is installed, this grating splicing apparatus is made up of rack and rinion adjustment platform and adjuster platform, described rack and rinion adjustment platform has latch-up structure, described adjuster platform is made of underlying platform and upper platform, this adjuster platform is equipped with piezoelectric ceramic actuator, this piezoelectric ceramic actuator is made up of horizontal piezoelectric ceramic actuator and vertical piezoelectric ceramic actuator, horizontal piezoelectric ceramic actuator drives the horizontal shift of this adjuster platform with respect to described rack and rinion adjustment platform, described vertical piezoelectric ceramic actuator drives the upper platform perpendicular displacement of this adjuster platform, it is characterized in that:
The two-plate of the first capacitance digital micro-displacement sensor relatively is installed in the position of the underlying platform horizontal direction of described rack and rinion adjustment platform and adjuster respectively, and the two-plate of the second capacitance digital micro-displacement sensor relatively is installed in the position of the vertical direction of the underlying platform of described adjuster and upper platform respectively;
The input end of the output termination signal sample circuit of the described first capacitance digital micro-displacement sensor and the second capacitance digital micro-displacement sensor, the input end of the output terminal order sheet machine controller of this signal sample circuit, the output terminal of this singlechip controller connects PC through serial communication circuit, and the output terminal of this PC links to each other with the control end of described piezoelectric ceramic actuator through D/A converter.
2, jointing grating offset deviation monitoring system according to claim 1, it is characterized in that described jointing grating is made of first sub-gratings and second sub-gratings, described first sub-gratings is installed on the surface level of described rack and rinion adjustment platform, as the benchmark grating, second sub-gratings is installed on the surface level of upper platform of described adjuster platform behind the rack and rinion adjustment platform locking.
3, jointing grating offset deviation monitoring system according to claim 1 is characterized in that described signal sample circuit is the electric capacity digital quantizer.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008102033818A CN101419319A (en) | 2008-11-26 | 2008-11-26 | Split pattern displacement deviation monitoring system |
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|---|---|---|---|
| CNA2008102033818A CN101419319A (en) | 2008-11-26 | 2008-11-26 | Split pattern displacement deviation monitoring system |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102156340A (en) * | 2011-03-31 | 2011-08-17 | 哈尔滨工业大学 | High-precision pose adjusting device for spliced grating |
| CN104423031A (en) * | 2013-08-29 | 2015-03-18 | 清华大学 | Grating deformation driving mechanism and manufacturing method thereof |
| CN104626582A (en) * | 2015-01-21 | 2015-05-20 | 深圳长朗三维科技有限公司 | Leveling device and leveling method of large-size fused deposition 3D printer |
| CN105387805A (en) * | 2015-12-04 | 2016-03-09 | 中国科学院长春光学精密机械与物理研究所 | Splicing error detection method based on far-field light spot energy curve |
| CN107024753A (en) * | 2016-02-02 | 2017-08-08 | 索尼公司 | lens unit, imaging device and control method |
| CN108169205A (en) * | 2017-12-27 | 2018-06-15 | 中国科学院长春光学精密机械与物理研究所 | A kind of space heterodyne Raman spectrometer light channel structure |
| CN108227056A (en) * | 2017-12-26 | 2018-06-29 | 中国科学院长春光学精密机械与物理研究所 | A kind of preparation method of plane double balzed grating |
| CN108444389A (en) * | 2017-12-26 | 2018-08-24 | 中国科学院长春光学精密机械与物理研究所 | A kind of production method of Chinese character pin-shaped displacement measurement grating |
| CN109163659A (en) * | 2018-09-12 | 2019-01-08 | 清华大学深圳研究生院 | Detection system, splicing system, detection method, joining method and jointing grating ruler |
| CN113655614A (en) * | 2021-08-13 | 2021-11-16 | 中国科学院长春光学精密机械与物理研究所 | Echelle grating splicing method and system |
| CN114838639A (en) * | 2022-04-20 | 2022-08-02 | 湖北三江航天万峰科技发展有限公司 | Discontinuous spatial combination detection platform and flatness detection method thereof |
-
2008
- 2008-11-26 CN CNA2008102033818A patent/CN101419319A/en active Pending
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102156340A (en) * | 2011-03-31 | 2011-08-17 | 哈尔滨工业大学 | High-precision pose adjusting device for spliced grating |
| CN102156340B (en) * | 2011-03-31 | 2012-05-30 | 哈尔滨工业大学 | High-precision pose adjusting device for spliced grating |
| CN104423031A (en) * | 2013-08-29 | 2015-03-18 | 清华大学 | Grating deformation driving mechanism and manufacturing method thereof |
| CN104626582A (en) * | 2015-01-21 | 2015-05-20 | 深圳长朗三维科技有限公司 | Leveling device and leveling method of large-size fused deposition 3D printer |
| CN105387805A (en) * | 2015-12-04 | 2016-03-09 | 中国科学院长春光学精密机械与物理研究所 | Splicing error detection method based on far-field light spot energy curve |
| CN105387805B (en) * | 2015-12-04 | 2017-12-26 | 中国科学院长春光学精密机械与物理研究所 | Stitching error detection method based on far-field spot energy curve |
| CN107024753A (en) * | 2016-02-02 | 2017-08-08 | 索尼公司 | lens unit, imaging device and control method |
| CN107024753B (en) * | 2016-02-02 | 2022-01-18 | 索尼公司 | Lens unit, imaging device, and control method |
| CN108227056A (en) * | 2017-12-26 | 2018-06-29 | 中国科学院长春光学精密机械与物理研究所 | A kind of preparation method of plane double balzed grating |
| CN108444389A (en) * | 2017-12-26 | 2018-08-24 | 中国科学院长春光学精密机械与物理研究所 | A kind of production method of Chinese character pin-shaped displacement measurement grating |
| CN108227056B (en) * | 2017-12-26 | 2019-11-15 | 中国科学院长春光学精密机械与物理研究所 | A kind of preparation method of plane double balzed grating |
| CN108169205A (en) * | 2017-12-27 | 2018-06-15 | 中国科学院长春光学精密机械与物理研究所 | A kind of space heterodyne Raman spectrometer light channel structure |
| CN109163659A (en) * | 2018-09-12 | 2019-01-08 | 清华大学深圳研究生院 | Detection system, splicing system, detection method, joining method and jointing grating ruler |
| CN113655614A (en) * | 2021-08-13 | 2021-11-16 | 中国科学院长春光学精密机械与物理研究所 | Echelle grating splicing method and system |
| CN114838639A (en) * | 2022-04-20 | 2022-08-02 | 湖北三江航天万峰科技发展有限公司 | Discontinuous spatial combination detection platform and flatness detection method thereof |
| CN114838639B (en) * | 2022-04-20 | 2023-12-15 | 湖北三江航天万峰科技发展有限公司 | Discontinuous space combination detection platform and flatness detection method thereof |
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Open date: 20090429 |