CN108227056A - A kind of preparation method of plane double balzed grating - Google Patents
A kind of preparation method of plane double balzed grating Download PDFInfo
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- CN108227056A CN108227056A CN201711434100.5A CN201711434100A CN108227056A CN 108227056 A CN108227056 A CN 108227056A CN 201711434100 A CN201711434100 A CN 201711434100A CN 108227056 A CN108227056 A CN 108227056A
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- balzed grating
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
Abstract
An embodiment of the present invention provides a kind of methods for making plane double balzed grating, make the first plane balzed grating, with the first blaze angle and the second plane balzed grating, with the second blaze angle, pass through the splicing and duplication of the first blaze angle and two pieces of plane balzed grating,s of the second blaze angle, to realize the making of plane double balzed grating, production method grating efficiency is high, beam quality is good, the double balzed grating high yield rate of making, it is easily achieved, the plane double balzed grating production method has very strong flexibility, not by grating blaze angle, the limitation of the factors such as area of raster, produced double balzed grating has broken away from the constraint of adjustment mechanism, the position of grating and posture will not change again in storing process, also it is more flexible in use and conveniently.
Description
Technical field
The present invention relates to diffraction grating manufacture technology fields, and in particular to a kind of method for making plane double balzed grating,
Plane double balzed grating and the more balzed grating,s of plane.
Background technology
Diffraction grating is a kind of high-resolution dispersive optical elements, is widely used in monochromator, spectrum analysis, light lead to
The scientific domains such as letter technology.
The luminous energy of more seam gratings is concentrated mainly on zero level, and various wavelength cannot be separated, and the practical application of grating
In then need to concentrate on luminous energy as much as possible in a certain specific level.Therefore the groove profile of design diffraction grating is needed, is made
Most of light energy is concentrated in the diffraction time of design.When being detected from design direction, the maximum intensity of spectrum, this phenomenon claims
To glitter (blaze), this grating is known as balzed grating,.Glittering is so that grating diffration efficiency is greatly improved.But
In broadband, such as all want to infrared band to obtain higher diffraction efficiency or highly difficult from ultraviolet, therefore, occur double
Balzed grating, product to realize in broadband, there is higher, uniform diffraction efficiency.Double balzed grating is due to having wide wave
The high efficiency advantage of section has boundless market prospects.
At present, the main production method of double balzed grating mainly includes following two：One kind is mechanical scratching production method,
Chinese invention patent " a kind of production method of double balzed grating ", application number：CN201310561094.5, the method improve sudden strains of a muscle
Icking tool replacing options during interregional precise transition of shining, but mechanical scratching makes double balzed grating and is easy to by accuracy of machines
Influence causes cohesive position uncomfortable and then generates Divided errors, can not ensure beam quality, reduce the theory of double balzed grating
Efficiency in addition, different delineation areas and incisure density are required to a set of quarter tool replacing structure, makes double balzed grating cost big week
Phase is long；Another method is to make double balzed grating using holographic method, and Chinese invention patent be " a kind of holographic double balzed grating
Production method ", application number：CN201110318455.4, this method are theoretically easy to implement, but the grating of holographic method etching
Groove profile is difficult to control, and cutting is coarse, and diffraction efficiency is low.Therefore, it is necessary to seek a kind of new method to make the double glitterings of plane
Grating, and then solve the above problems.
Invention content
In view of this, an embodiment of the present invention provides a kind of method for making plane double balzed grating, planes pair to glare
Grid and the more balzed grating,s of plane, by the splicing and duplication of the first blaze angle and two pieces of plane balzed grating,s of the second blaze angle,
Realize the making of plane double balzed grating, production method grating efficiency is high, beam quality is good, the double balzed grating finished product of making
Rate is high, is easily achieved, which has very strong flexibility, not by grating blaze angle, grating face
The limitation of the factors such as product.
The present invention provides a kind of method for making plane double balzed grating, the method includes：
Make the first plane balzed grating, with the first blaze angle and the second plane glittering with the second blaze angle
Grating, wherein the first blaze angle and the second blaze angle are different；
The first plane balzed grating, and the second plane balzed grating, are carried out to plating oil film and aluminium film respectively and put
It is placed in splicing body；
Adjust the position of the first plane balzed grating, and the second plane balzed grating, on the splicing body
With posture so that the stitching error of five dimensions is fixed after being less than permissible value, the stitching error of five dimensions is described
Three-dimensional perspective error and bidimensional displacement error between first plane balzed grating, and the second plane balzed grating, wherein institute
Three-dimensional perspective error is stated to include rotating mistake around grid line direction rotation error, around dispersion direction rotation error, around grating normal direction
Difference；The bidimensional displacement error includes length travel error, lateral displacement error；
By the spliced first plane balzed grating, and the second plane balzed grating, coating resin glue；
Double balzed grating substrate is placed on resin glue and to just described first plane balzed grating, and described second flat
Face balzed grating,；
By the double balzed grating substrate and the first plane balzed grating, and described the after the resin adhesive curing
Two plane balzed grating,s obtain plane double balzed grating after being detached.
Optionally, the lateral displacement error Δ x is the integral multiple of d/ (2m), wherein, grating constant d, diffraction time
For m, lateral displacement error Δ x permissible values are 0.1 millimeter.
Optionally, the first plane balzed grating, of the making with the first blaze angle and with the second blaze angle the
Two plane balzed grating,s, including：
At least with the first blaze angle is made of mechanical scratching method, holographic ion beam etching or microelectronics photoetching process
One plane balzed grating, and the second plane balzed grating, with the second blaze angle.
Optionally, the adjustment the first plane balzed grating, and the second plane balzed grating, are in the splicing machine
Position on structure, which to splice after gap is less than permissible value, carries out splicing fixation, including：
The adjustment the first plane balzed grating, and the second plane balzed grating, are on the splicing body
Position so that splice gap fixes less than the splicing that one-dimensional distribution is planar carried out after permissible value.Preferably, the adjustment institute
Stating the position of the first plane balzed grating, and the second plane balzed grating, on the splicing body causes the splicing of five dimensions to miss
Difference is fixed less than the splicing that one-dimensional distribution is planar carried out after permissible value.
The present invention also provides a kind of plane double balzed grating, the plane double balzed grating is double by making plane as described above
The method of balzed grating, is made.
The present invention provides a kind of method for making the more balzed grating,s of plane again, the method includes：
At least three plane balzed grating,s are made, at least three planes balzed grating, is included with the first blaze angle
The third plane glittering of first plane balzed grating, the second plane balzed grating, with the second blaze angle and third blaze angle
Grating, wherein the first blaze angle, the second blaze angle and third blaze angle are different；
At least three planes balzed grating, is carried out to plating oil film and aluminium film respectively and is positioned over splicing body；
It adjusts position and posture of at least three planes balzed grating, on the splicing body and causes five dimensions
Stitching error be less than permissible value after be fixed, the stitching errors of five dimensions glares at least three plane
Three-dimensional perspective error and bidimensional displacement error between grid are missed wherein the three-dimensional perspective error includes rotating around grid line direction
Difference, around dispersion direction rotation error, around grating normal direction rotation error；The bidimensional displacement error is missed including length travel
Difference, lateral displacement error；
By the spliced at least three planes balzed grating, coating resin glue；
Balzed grating, substrate is placed on resin glue and to just described at least three planes balzed grating,；
The balzed grating, substrate and at least three planes balzed grating, are divided after the resin adhesive curing
The more double balzed gratings of plane are obtained from after.
Optionally, the more balzed grating,s of the plane include N number of glittering angular zone, and N number of glittering region can be according to setting
Meter demand planar carries out Two dimensional Distribution, wherein, N is the natural number more than or equal to 3.
The present invention provides a kind of plane more balzed grating,s again, and the more balzed grating,s of plane are dodged more by above-mentioned making plane
The method of credit grating is made.
The method of the making plane double balzed grating of the present invention is promoted, it is double to produce plane according to this method
Balzed grating, can also prepare the more balzed grating,s of plane.
As can be seen from the above technical solutions, the embodiment of the present invention has the following advantages：
An embodiment of the present invention provides a kind of method for making plane double balzed grating, the sides of the making more balzed grating,s of plane
Method, plane double balzed grating and the more balzed grating,s of plane make the first plane balzed grating, and tool with the first blaze angle
There is the second plane balzed grating, of the second blaze angle, wherein the first blaze angle and the second blaze angle are different, by first plane
Balzed grating, and the second plane balzed grating, carry out plating oil film and aluminium film and are positioned over splicing body respectively, adjustment described the
The position and posture of one plane balzed grating, and the second plane balzed grating, on the splicing body cause five dimensions
Stitching error be less than permissible value after be fixed, the stitching errors of five dimensions for the first plane balzed grating, and
Three-dimensional perspective error and bidimensional displacement error between the second plane balzed grating, wherein the three-dimensional perspective error includes
Around grid line direction rotation error, around dispersion direction rotation error, around grating normal direction rotation error；The bidimensional displacement error
Including length travel error, lateral displacement error, the spliced first plane balzed grating, and second plane are dodged
Grating of shining is coated with resin glue, double balzed grating substrate is placed on resin glue and to just described first plane balzed grating, and institute
The second plane balzed grating, is stated, the double balzed grating substrate and first plane glare after the resin adhesive curing
Grid and the second plane balzed grating, obtain plane double balzed grating after being detached, and are glittered by the first blaze angle and second
The splicing and duplication of two pieces of plane balzed grating,s at angle, to realize the making of plane double balzed grating, production method grating efficiency
Height, beam quality are good, and the double balzed grating high yield rate of making is easily achieved, which has
Very strong flexibility is not limited by factors such as grating blaze angle, area of rasters, and produced double balzed grating has broken away from tune
The constraint of complete machine structure, the position and attitude of grating will not change again in storing process, in use it is more flexible and
It is convenient.
Description of the drawings
Fig. 1 is the stitching error signal of five dimensions of the method for the making plane double balzed grating in the embodiment of the present invention
Figure；
Fig. 2 is the schematic diagram of the method for making plane double balzed grating provided in the embodiment of the present invention；.
Fig. 3 is that the plane double balzed grating of the method for making plane double balzed grating provided in the embodiment of the present invention replicates
Process schematic representation；
Fig. 4 is the Two dimensional Distribution schematic diagram of the more balzed grating,s of plane provided in the embodiment of the present invention.
Specific embodiment
In order to which those skilled in the art is made to more fully understand the present invention program, below in conjunction in the embodiment of the present invention
The technical solution in the embodiment of the present invention is clearly and completely described in attached drawing, it is clear that described embodiment is only
The embodiment of a part of the invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
Member's all other embodiments obtained without making creative work should all belong to the model that the present invention protects
It encloses.
Term " first ", " second ", " third " in description and claims of this specification and above-mentioned attached drawing, "
The (if present)s such as four " are the objects for distinguishing similar, and specific sequence or precedence are described without being used for.It should manage
The data that solution uses in this way can be interchanged in the appropriate case, so that the embodiments described herein can be in addition to illustrating herein
Or the sequence other than the content of description is implemented.In addition, term " comprising " and " having " and their any deformation, it is intended that
Cover it is non-exclusive include, for example, containing the process of series of steps or unit, method, system, product or equipment need not limit
In those steps or unit for clearly listing, but may include not listing clearly or for these processes, method, production
The intrinsic other steps of product or equipment or unit.
With reference to shown in Fig. 1 and Fig. 2, a kind of method for making plane double balzed grating provided by the invention, the method packet
It includes：
S101 makes the first plane balzed grating, with the first blaze angle and the second plane with the second blaze angle
Balzed grating, wherein the first blaze angle and the second blaze angle are different；
The first plane balzed grating, and the second plane balzed grating, are carried out plating oil film and aluminium film by S102 respectively
And it is positioned over splicing body；
S103 adjusts the first plane balzed grating, and the second plane balzed grating, on the splicing body
Position and posture cause the stitching error of five dimensions is less than after permissible value to carry out the splicing of one-dimensional distribution and fix, five dimensions
Three-dimensional perspective error and bidimensional of the stitching error between the first plane balzed grating, and the second plane balzed grating,
Displacement error, wherein the three-dimensional perspective error include around grid line direction rotation error, around dispersion direction rotation error, around grating
Normal direction rotation error；The bidimensional displacement error includes length travel error, lateral displacement error；
The spliced first plane balzed grating, and the second plane balzed grating, are coated with resin glue by S104；
Double balzed grating substrate is placed on resin glue and to just described first plane balzed grating, and described by S105
Two plane balzed grating,s；
S106, by the double balzed grating substrate and the first plane balzed grating, and institute after the resin adhesive curing
It states after the second plane balzed grating, is detached and obtains plane double balzed grating.
An embodiment of the present invention provides a kind of methods for making plane double balzed grating, are dodged by the first blaze angle and second
The splicing and duplication of two pieces of plane balzed grating,s at credit angle, to realize the making of plane double balzed grating, production method grating effect
Rate is high, beam quality is good, and the double balzed grating high yield rate of making is easily achieved, plane double balzed grating production method tool
There is very strong flexibility, do not limited by factors such as grating blaze angle, area of rasters, produced double balzed grating is broken away from
The constraint of adjustment mechanism, the position and attitude of grating will not change again in storing process, more flexible in use
Conveniently.
Splicing body has the platform of holding plane balzed grating, and the adjustment mechanism of adjustment position of platform and posture, can
To realize the splicing to two or more plane balzed grating,s.
The lateral displacement error Δ x can cause energy loss, and the accounting of off-energy is δ=(be incident on double glare
The luminous energy E of grid splicing gap area Δ x1)/(is incident on the luminous energy E of double balzed grating diffractive grating regions2), if grating constant is
D, diffraction time m, the lateral displacement error Δ x of two blocks of gratings is the integral multiple of d/ (2m) when grating splices in step (S103)
When, grating beam quality is not influenced, but Δ x increases can increase the accounting δ of off-energy, therefore it is required that the lateral position of two blocks of gratings
Shift error Δ x is less than 0.1mm, and described five tie up the permissible value of the stitching error of other four dimensions in stitching errors, according to
The first plane balzed grating, and the second plane balzed grating, size, flare angle and use grade at incisure density
Inferior combined factors influence, calculated obtained by.Specific those of ordinary skill in the art can flexibly select, this is not limited
It is fixed.
Optionally, the first plane balzed grating, of the making with the first blaze angle and with the second blaze angle the
Two plane balzed grating,s, including：
At least with the first blaze angle is made of mechanical scratching method, holographic ion beam etching or microelectronics photoetching process
One plane balzed grating, and the second plane balzed grating, with the second blaze angle, wherein, for mechanical scratching method, it is holographic from
Beamlet etches or microelectronics photoetching process, and those of ordinary skill in the art are not it is to be appreciated that repeat specifically.
The method of the making plane double balzed grating of the present invention is promoted, it is double to produce plane according to this method
Balzed grating, can also prepare the more balzed grating,s of plane.
Specifically, for wherein two-by-two balzed grating, splicing can according to plane double balzed grating joining method into
Row, the more balzed grating,s of plane include N number of glittering angular zone, it is described it is N number of glittering region can according to design requirement planar into
Row Two dimensional Distribution, wherein, N is the natural number more than or equal to 3.
The method provided by the invention for making plane double balzed grating is introduced with reference to a kind of embodiment below.
Specifically, with reference to Fig. 1 to Fig. 3, the making of plane double balzed grating mainly includes the following steps that：
S1, respectively making meet design requirement with the first blaze angle θ1The first plane balzed grating, 1 and with second
Blaze angle θ2The second plane balzed grating, 2, production method is selected according to design requirement, can be mechanical scratching method, it is holographic from
Beamlet etching and microelectronics photoetching process etc..
S2, there will be the first blaze angle θ1The first plane balzed grating, 1 and with blaze angle θ2The second plane glare
Grid 2 are coated with oil film and aluminium film successively, are then fixed in splicing body 3 and splicing construction 4, and two are measured by error detecting system
The stitching error of grating, adjustment splicing body cause stitching error in allowed band, complete the stringent splicing of two gratings.
The duplication of S3, plane double balzed grating.
A, resin glue will be coated on spliced two pieces of balzed grating,s；
B, clean double balzed grating substrate 5 is placed on two pieces of balzed grating,s of coating resin glue, treats resin adhesive curing
Double balzed grating substrate with jointing grating is detached afterwards, cleans grating surface, completes the making of double balzed grating 5.
Referring to attached drawing 1, in step S2, there will be the first blaze angle θ1The first plane balzed grating, 1 and with second dodge
Shine angle θ2The second plane balzed grating, 2, there are five dimension stitching errors, pass through stitching error detecting system ZYGO interferometers and detect
Stitching error, and be adjusted by adjusting mechanism, it when fringe inclination and misplaces in allowable range of error, completes grating and spell
It connects.
The oil film being coated in step s 2 is used for the separation of the double balzed grating and two pieces of jointing gratings of preparing grating.
Resin glue is cold setting resin glue in step s3, is plated for enhancing in double balzed grating substrate and step (2)
The aluminium film bonding of system.
In step s 2, there is the first blaze angle θ1With the second blaze angle θ2Two pieces of balzed grating,s lateral displacement error
Δ x can cause energy loss, and the accounting of off-energy is δ=(be incident on the luminous energy that double balzed grating splices gap area Δ x
E1)/(is incident on the luminous energy E of double balzed grating diffractive grating regions2)。
If grating constant is d, the lateral displacement error Δ x of two blocks of gratings when grating splices in diffraction time m, step S2
During integral multiple for d/ (2m), grating beam quality is not influenced, but Δ x increases can increase the accounting δ of off-energy, therefore it is required that
The lateral displacement error Δ x of two blocks of gratings is less than 0.1mm, and five tie up permitting for the stitching error of other four dimensions in stitching errors
Perhaps it is worth, according to the first plane balzed grating, and the second plane balzed grating, size, flare angle, groove is close
Degree and influenced using the inferior combined factors of grade, calculated obtained by.
Accordingly, the present invention also provides a kind of plane double balzed gratings, and the plane double balzed grating by making as described above
The method for making plane double balzed grating is made, and specific joining method is introduced above, is not repeated herein.
With reference to shown in Fig. 4, according to the production method of the plane double balzed grating of proposition, plane can be designed and produced out and glittered more
Grating, designs and produces out the more balzed grating,s of plane, and flare angle is respectively θ1…θN, the plane more glittered after being replicated
More balzed grating,s, the more balzed grating,s of the plane include N number of glittering angular zone, and N number of glittering area can be according to design requirement in plane
Interior carry out Two dimensional Distribution, wherein, N is the natural number more than or equal to 3, and specific number can select, this is not limited as needed
It is fixed.
The present invention provides a kind of method for making the more balzed grating,s of plane again, the method includes：
At least three plane balzed grating,s are made, at least three plane balzed grating,s include first with the first blaze angle
The third plane of plane balzed grating, the second plane balzed grating, with the second blaze angle and third blaze angle glares
Grid, wherein the first blaze angle, the second blaze angle and third blaze angle are different, here plane balzed grating, include at least three or
Three or more；
At least three planes balzed grating, is carried out to plating oil film and aluminium film respectively and is positioned over splicing body；
It adjusts position and posture of at least three planes balzed grating, on the splicing body and causes five dimensions
Stitching error be less than permissible value after be fixed, the stitching errors of five dimensions glares at least three plane
Three-dimensional perspective error and bidimensional displacement error between grid are missed wherein the three-dimensional perspective error includes rotating around grid line direction
Difference, around dispersion direction rotation error, around grating normal direction rotation error；The bidimensional displacement error is missed including length travel
Difference, lateral displacement error；
By the spliced at least three planes balzed grating, coating resin glue；
Balzed grating, substrate is placed on resin glue and to just described at least three planes balzed grating,；
The balzed grating, substrate and at least three planes balzed grating, are divided after the resin adhesive curing
The more double balzed gratings of plane are obtained from after.
Optionally, the more balzed grating,s of the plane include N number of glittering angular zone, and N number of glittering region can be according to setting
Meter demand planar carries out Two dimensional Distribution, wherein, N is the natural number more than or equal to 3.
The present invention provides a kind of plane more balzed grating,s again, and the more balzed grating,s of plane are dodged more by above-mentioned making plane
The method of credit grating is made, and specifically, the splicing for wherein at least three with the plane balzed grating, of different blaze angles can
To be carried out according to the joining method of plane double balzed grating, the more balzed grating,s of plane include N number of glittering angular zone, N number of sudden strain of a muscle
Credit region can planar carry out Two dimensional Distribution according to design requirement, wherein, N is the natural number more than or equal to 3.
An embodiment of the present invention provides a kind of method for making plane double balzed grating, the sides of the making more balzed grating,s of plane
Method, plane double balzed grating and the more balzed grating,s of plane make the first plane balzed grating, and tool with the first blaze angle
There is the second plane balzed grating, of the second blaze angle, wherein the first blaze angle and the second blaze angle are different, by first plane
Balzed grating, and the second plane balzed grating, carry out plating oil film and aluminium film and are positioned over splicing body respectively, adjustment described the
The position and posture of one plane balzed grating, and the second plane balzed grating, on the splicing body cause five dimensions
Stitching error be less than permissible value after be fixed, the stitching errors of five dimensions is the first plane balzed grating, and described
Three-dimensional perspective error and bidimensional displacement error between second plane balzed grating, wherein the three-dimensional perspective error is included around grid
Line direction rotation error, around dispersion direction rotation error, around grating normal direction rotation error；The bidimensional displacement error includes
Length travel error, lateral displacement error glare the spliced first plane balzed grating, and second plane
Grid are coated with resin glue, double balzed grating substrate are placed on resin glue and to just described first plane balzed grating, and described the
Two plane balzed grating,s, after the resin adhesive curing by the double balzed grating substrate and the first plane balzed grating, and
The second plane balzed grating, obtains plane double balzed grating after being detached, and passes through the first blaze angle and the second blaze angle
The splicing and duplication of two pieces of plane balzed grating,s, to realize the making of plane double balzed grating, production method grating efficiency is high, wave
Preceding high-quality, more balzed grating, high yield rates of making are easily achieved, which has very strong
Flexibility is not limited by factors such as grating blaze angle, area of rasters, and produced double balzed grating has taken off adjustment mechanism
Constraint, the position of grating and posture will not change again in storing process, also more flexible and square in use
Just.
It is apparent to those skilled in the art that for convenience and simplicity of description, the system of foregoing description,
The specific work process of device and unit can refer to the corresponding process in preceding method embodiment, and details are not described herein.
A kind of method for making plane double balzed grating provided by the present invention is described in detail above, for this
The thought of the those skilled in the art in field, according to the present invention embodiment have change in specific embodiments and applications
Become part, in conclusion the content of the present specification should not be construed as limiting the invention.
Claims (10)
- A kind of 1. method for making plane double balzed grating, which is characterized in that the method includes：The first plane balzed grating, with the first blaze angle and the second plane balzed grating, with the second blaze angle are made, Wherein the first blaze angle and the second blaze angle are different；The first plane balzed grating, and the second plane balzed grating, are carried out to plating oil film and aluminium film respectively and are positioned over Splicing body；Adjust the position and appearance of the first plane balzed grating, and the second plane balzed grating, on the splicing body State causes the stitching error of five dimensions to be fixed after being less than permissible value, and the stitching error of five dimensions is described first Three-dimensional perspective error and bidimensional displacement error between plane balzed grating, and the second plane balzed grating, wherein described three Tie up angular error include around grid line direction rotation error, around dispersion direction rotation error, around grating normal direction rotation error；Institute It states bidimensional displacement error and includes length travel error, lateral displacement error；By the spliced first plane balzed grating, and the second plane balzed grating, coating resin glue；Double balzed grating substrate is placed on resin glue and just described first plane balzed grating, and second plane are dodged Credit grating；By the double balzed grating substrate and the first plane balzed grating, and described second flat after the resin adhesive curing Face balzed grating, obtains plane double balzed grating after being detached.
- 2. the method according to claim 1 for making plane double balzed grating, which is characterized in that the lateral displacement error Δ x is the integral multiple of d/ (2m), wherein, grating constant d, diffraction time m, lateral displacement error Δ x permissible values are 0.1 milli Rice.
- 3. the method according to claim 1 for making plane double balzed grating, which is characterized in that described make has first First plane balzed grating, of blaze angle and the second plane balzed grating, with the second blaze angle, including：The first plane with the first blaze angle is made using mechanical scratching method, holographic ion beam etching or microelectronics photoetching process to dodge Credit grating and the second plane balzed grating, with the second blaze angle.
- 4. the method according to claim 1 for making plane double balzed grating, which is characterized in that the adjustment described first The position of plane balzed grating, and the second plane balzed grating, on the splicing body so that splicing gap is less than permission Splicing fixation is carried out after value, including：The position of adjustment the first plane balzed grating, and the second plane balzed grating, on the splicing body So that splicing gap is fixed less than the splicing that one-dimensional distribution is planar carried out after permissible value.
- 5. the method according to claim 1 for making plane double balzed grating, which is characterized in that described by double balzed grating Substrate be placed on resin glue and to just described first plane balzed grating, and the second plane balzed grating, before, also wrap It includes：The double balzed grating substrate is cleaned.
- 6. the method according to claim 1 for making plane double balzed grating, which is characterized in that described to treat the resin glue The double balzed grating substrate and the first plane balzed grating, and the second plane balzed grating, are divided after curing Plane double balzed grating is obtained from after, including：It is described after the resin adhesive curing by the double balzed grating substrate and the first plane balzed grating, and described the Two plane balzed grating,s are detached；Plane double balzed grating is obtained after carrying out surface clean to the double balzed grating substrate.
- 7. a kind of plane double balzed grating, which is characterized in that the plane double balzed grating is by any in such as claim 1 to 6 The method of making plane double balzed grating described in is made.
- A kind of 8. method for making the more balzed grating,s of plane, which is characterized in that the method includes：At least three plane balzed grating,s are made, at least three planes balzed grating, includes first with the first blaze angle The third plane of plane balzed grating, the second plane balzed grating, with the second blaze angle and third blaze angle glares Grid, wherein the first blaze angle, the second blaze angle and third blaze angle are different；At least three planes balzed grating, is carried out to plating oil film and aluminium film respectively and is positioned over splicing body；Adjust the spelling that position and posture of at least three planes balzed grating, on the splicing body cause five dimensions Error is connect less than being fixed after permissible value, the stitching errors of five dimensions for at least three planes balzed grating, it Between three-dimensional perspective error and bidimensional displacement error, wherein the three-dimensional perspective error include around grid line direction rotation error, around Dispersion direction rotation error, around grating normal direction rotation error；The bidimensional displacement error includes length travel error, transverse direction Displacement error；By the spliced at least three planes balzed grating, coating resin glue；Balzed grating, substrate is placed on resin glue and to just described at least three planes balzed grating,；After the balzed grating, substrate is detached at least three planes balzed grating, after the resin adhesive curing Obtain the more double balzed gratings of plane.
- 9. the more balzed grating,s of plane according to claim 8, which is characterized in that the more balzed grating,s of plane include N number of Glitter angular zone, it is described it is N number of glittering region can Two dimensional Distribution planar be carried out according to design requirement, wherein, N be more than etc. In 3 natural number.
- 10. a kind of more balzed grating,s of plane, which is characterized in that the more balzed grating,s of plane are by as claimed in claim 8 or 9 The method for making the more balzed grating,s of plane is made.
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| CN115079321A (en) * | 2021-03-12 | 2022-09-20 | 华为技术有限公司 | Grating structural member and manufacturing method thereof, grating structural template and related equipment |
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