CN105349969B - 一种称重装置 - Google Patents
一种称重装置 Download PDFInfo
- Publication number
- CN105349969B CN105349969B CN201510936637.6A CN201510936637A CN105349969B CN 105349969 B CN105349969 B CN 105349969B CN 201510936637 A CN201510936637 A CN 201510936637A CN 105349969 B CN105349969 B CN 105349969B
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- CN
- China
- Prior art keywords
- support element
- heating furnace
- weight
- weighing device
- effective object
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201510936637.6A CN105349969B (zh) | 2015-12-15 | 2015-12-15 | 一种称重装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510936637.6A CN105349969B (zh) | 2015-12-15 | 2015-12-15 | 一种称重装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105349969A CN105349969A (zh) | 2016-02-24 |
CN105349969B true CN105349969B (zh) | 2018-08-28 |
Family
ID=55326026
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201510936637.6A Active CN105349969B (zh) | 2015-12-15 | 2015-12-15 | 一种称重装置 |
Country Status (1)
Country | Link |
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CN (1) | CN105349969B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109306473A (zh) * | 2018-11-27 | 2019-02-05 | 湖南顶立科技有限公司 | 一种气相沉积炉 |
CN111128847B (zh) * | 2019-12-24 | 2023-03-21 | 北京北方华创微电子装备有限公司 | 承载装置及半导体加工设备 |
CN112730140B (zh) * | 2020-12-22 | 2022-11-08 | 上海辰荣电炉有限公司 | 一种新型高真空高温质量监控装置及方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101235493A (zh) * | 2007-11-16 | 2008-08-06 | 南京航空航天大学 | 一种实时测量并控制增重速率的化学气相沉积装置及方法 |
CN103924222A (zh) * | 2014-04-25 | 2014-07-16 | 清远先导材料有限公司 | 一种测量化学气相沉积炉的原料蒸发量的方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20010011609A1 (en) * | 1998-10-23 | 2001-08-09 | James W. Rudolph | Method and apparatus for measurement of weight during cvi/cvd process |
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2015
- 2015-12-15 CN CN201510936637.6A patent/CN105349969B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101235493A (zh) * | 2007-11-16 | 2008-08-06 | 南京航空航天大学 | 一种实时测量并控制增重速率的化学气相沉积装置及方法 |
CN103924222A (zh) * | 2014-04-25 | 2014-07-16 | 清远先导材料有限公司 | 一种测量化学气相沉积炉的原料蒸发量的方法 |
Also Published As
Publication number | Publication date |
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CN105349969A (zh) | 2016-02-24 |
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CP02 | Change in the address of a patent holder |
Address after: 410118 Hunan Dingli Technology Co., Ltd., east of Lantian North Road, north of liangtang East Road and west of Shuangtang Road, Xingsha industrial base, Changsha Economic and Technological Development Zone, Changsha City, Hunan Province Patentee after: ADVANCED CORPORATION FOR MATERIALS & EQUIPMENTS Co.,Ltd. Address before: 410118 Hunan province Changsha Muyun Economic Development Zone top science and Technology Park Patentee before: ADVANCED CORPORATION FOR MATERIALS & EQUIPMENTS Co.,Ltd. |
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CP02 | Change in the address of a patent holder | ||
CP02 | Change in the address of a patent holder |
Address after: 410199 No. 1271, liangtang East Road, Xingsha industrial base (Changlong Street), Changsha area, China (Hunan) pilot Free Trade Zone, Changsha, Hunan Province Patentee after: ADVANCED CORPORATION FOR MATERIALS & EQUIPMENTS Co.,Ltd. Address before: 410118 Hunan Dingli Technology Co., Ltd., east of Lantian North Road, north of liangtang East Road and west of Shuangtang Road, Xingsha industrial base, Changsha Economic and Technological Development Zone, Changsha City, Hunan Province Patentee before: ADVANCED CORPORATION FOR MATERIALS & EQUIPMENTS Co.,Ltd. |
|
CP02 | Change in the address of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 410199 No. 1271, liangtang East Road, Xingsha industrial base (Changlong Street), Changsha area, China (Hunan) pilot Free Trade Zone, Changsha, Hunan Province Patentee after: Hunan Dingli Technology Co.,Ltd. Address before: 410199 No. 1271, liangtang East Road, Xingsha industrial base (Changlong Street), Changsha area, China (Hunan) pilot Free Trade Zone, Changsha, Hunan Province Patentee before: ADVANCED CORPORATION FOR MATERIALS & EQUIPMENTS Co.,Ltd. |
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CP01 | Change in the name or title of a patent holder |