CN105345652A - Fixing ring with abrasion remaining thickness capable of being detected in real time - Google Patents
Fixing ring with abrasion remaining thickness capable of being detected in real time Download PDFInfo
- Publication number
- CN105345652A CN105345652A CN201510663129.5A CN201510663129A CN105345652A CN 105345652 A CN105345652 A CN 105345652A CN 201510663129 A CN201510663129 A CN 201510663129A CN 105345652 A CN105345652 A CN 105345652A
- Authority
- CN
- China
- Prior art keywords
- retainer ring
- ring body
- fixing ring
- real time
- wearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
- B24B37/32—Retaining rings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a fixing ring with the abrasion remaining thickness capable of being detected in real time. The fixing ring comprises a fixing ring body, wherein the whole fixing ring body is in a sheet-type circular ring shape, and a plurality of grooves are formed in the lower surface of the fixing ring body. A small hole is formed in the circular-ring-shaped side edge of the fixing ring body. The small hole penetrates through the upper surface and the lower surface of the fixing ring body. A distance detector is arranged at the beginning end, on the upper surface of the fixing ring body, of the small hole. The distance detector detects the distance between a probe of the distance detector and the lower surface of the fixing ring body and is electrically connected with a computer control terminal arranged outside. Alternatively, scale marks distributed at equal intervals are engraved in the circular-ring-shaped outer side wall of the fixing ring body. According to the technical scheme, the novel fixing ring is simple in structure, the thickness of the fixing ring body can be monitored in real time so that engineers can find problems more quickly, and potential risks and economic losses caused by anomaly of the thickness of the fixing ring are reduced.
Description
Technical field
The present invention relates to chemically mechanical polishing and wafer processing technical field, particularly relate to a kind of retainer ring that can detect wearing and tearing residual thickness in real time.
Background technology
Along with the development of semiconductor fabrication, while the critical size of integrated circuit is more and more less, the size of wafer is increasing, the value of single-wafer is also more and more higher, therefore, in the Chemical Mechanical Polishing (CMP) of the processing of wafer, retainer ring thickness has a significant impact grinding rate and stability.
Wherein, retainer ring is part of appliance conventional in wafer manufacturing, and its Main Function is: fixing wafer, prevents from occurring slide plate in the process of lapping of wafer; Make the pressure adjustable of crystal round fringes, adjustable to the amount of grinding of crystal round fringes; The bootable lapping liquid of groove of retainer ring flow to outflow, make lapping liquid evenly contact wafer.
And the thickness monitor of current retainer ring, the function in auto-real-time monitoring thickness or life-span can't be realized, cause sometimes because of retainer ring thickness occur abnormal time, can not Timeliness coverage and process, and larger impact is caused on production technology.
Therefore, in telecommunications industry production, demand is a kind of can realize the novel retainer ring thickness of retainer ring itself being realized to Real-Time Monitoring, to facilitate engineer to pinpoint the problems faster, reduces the potential risk because of the thickness abnormity of retainer ring and economic loss.
Summary of the invention
For the above-mentioned problems in the prior art, now provide a kind of retainer ring being intended to can to realize the thickness of retainer ring being realized to Real-Time Monitoring, in order to overcome above-mentioned technological deficiency.
Concrete technical scheme is as follows:
A retainer ring for wearing and tearing residual thickness can be detected in real time, comprise that overall circular and lower surface offers the retainer ring body of multiple groove in sheet type,
The circular side of described retainer ring body offers an aperture, described aperture runs through the upper and lower surface of described retainer ring body, and described aperture is provided with a range finder at the beginning end place of described retainer ring body upper surface, described range finder detects the distance between its probe to described retainer ring body lower surface, and is electrically connected mutually with the conputer controlled end of outer setting; Or
On the circular ring type lateral wall of described retainer ring body, scribing has equally spaced graduation mark.
Described retainer ring body is also provided with a scale line scanning device, described graduation mark scanning means scans described graduation mark and determines described retainer ring residual thickness.
Described graduation mark scanning means is installed on the circular ring type lateral wall of described retainer ring body, and is electrically connected mutually with described conputer controlled end.
Described retainer ring also comprises an alarm, and described alarm is electrically connected mutually with described range finder.
Preferably, described alarm is an audible alarm.
Preferably, the flushing with the lower surface of described retainer ring body bottom of described graduation mark.
Preferably, described scale scanning means real time scan detects described graduation mark.
The beneficial effect of technique scheme is:
(1) the present invention is under the prerequisite of polishing effect ensureing polishing machine, can realize realizing Real-Time Monitoring to the thickness of retainer ring, facilitate engineer to pinpoint the problems faster, can effectively reduce the potential risk because of the thickness abnormity of retainer ring and economic loss.
(2) described retainer ring of the present invention can be applied in the technology of all chemical-mechanical planarizations of semiconductor.
Accompanying drawing explanation
Fig. 1 a is the schematic perspective view of retainer ring under prior art;
Fig. 1 b is the side schematic view of retainer ring under prior art;
Fig. 2 a is that the retainer ring embodiment one that the present invention can detect wearing and tearing residual thickness in real time does not comprise the three-dimensional view of range finder 4;
Fig. 2 b is the retainer ring embodiment side TV structure schematic diagram that the present invention can detect wearing and tearing residual thickness in real time;
Fig. 3 is the side-looking structural representation that the present invention can detect the retainer ring embodiment two of wearing and tearing residual thickness in real time;
Fig. 4 is the side-looking structural representation that the present invention can detect the retainer ring embodiment three of wearing and tearing residual thickness in real time.
Detailed description of the invention
Below, embodiments of the present invention will be described with reference to the accompanying drawings.In embodiments, the part of same configuration uses identical Reference numeral and omits and describes.
Consult Fig. 1 a and Fig. 1 b is known, retainer ring entirety under prior art is circular in sheet type, and lower surface offers multiple groove 2, in order to fix wafer on the one hand, on the other hand the bootable lapping liquid of groove 2 flow to outflow, make lapping liquid evenly contact wafer.
Embodiment one:
Consult Fig. 2 a again, the retainer ring embodiment one that can detect wearing and tearing residual thickness for the present invention in real time does not comprise the three-dimensional view of range finder 4; And composition graphs 2b, for the present invention can detect the retainer ring embodiment side TV structure schematic diagram of wearing and tearing residual thickness in real time.
As shown in FIG., the present embodiment can detect the retainer ring of wearing and tearing residual thickness in real time compared with the retainer ring under prior art, comprise the retainer ring body 1 of structure function same as the prior art, namely retainer ring body 1 entirety is circular in sheet type, and lower surface offers multiple groove 2; Meanwhile, the ring-type side of retainer ring body 1 offers an aperture 3, and this aperture 3 runs through the upper and lower surface of retainer ring body 1 from top to bottom, and this aperture 3 be positioned at retainer ring body 1 upper surface beginning end place one range finder 4 is installed; Range finder 4 detect its probe to retainer ring body 1 lower surface between distance (namely detecting the thickness data of retainer ring body 1), and be electrically connected mutually with the conputer controlled end 5 of outer setting, in order to the wearing and tearing residual thickness real-time Transmission of retainer ring body 1 lower surface in running in conputer controlled end 5, thus realize the monitoring to the state of wear of retainer ring.
And it is worthy of note, conputer controlled end 5 controls the running status of polishing machine, and therefore conputer controlled end 5 adjusts polishing machine running status accordingly by the retainer ring state of wear information received.
In a preferred embodiment, specifically as shown in Figure 2 b, described retainer ring also comprises an alarm 6, and alarm 6 is electrically connected mutually with range finder 4, the distance detected when range finder 4 is not more than default minimum range alarm device 6 and gives a warning information, namely notify to make personnel's retainer ring wearing and tearing residual thickness not enough, need to change.Described alarm 6 is an audible alarm, alarm of sounding upon activation.But described warning message also can be flash lamp mode to be realized, and is not limited to this.And when arriving thickness abnormity after testing when described retainer ring breaks or be abnormal, give a warning information automatically.
In technique scheme, range finder 4 is when grinding head works, in real time the thickness data detected is passed to conputer controlled end 5, engineer can read the thickness of retainer ring at conputer controlled end 5, as the judgement of technological parameter, can judge to carry out control stopping or operation etc. to polishing machine by the data of conputer controlled end 5 simultaneously.Measured in real time by the thickness of range finder 4 to the retainer ring having aperture 3, can realize realizing Real-Time Monitoring to the thickness of retainer ring, facilitate that engineer is more fast and convenient to pinpoint the problems, the method can effectively reduce potential risk because of the thickness abnormity of retainer ring and economic loss.
Embodiment two:
Consult Fig. 3, the side-looking structural representation of the retainer ring embodiment two of wearing and tearing residual thickness can be detected for the present invention in real time.As shown in FIG., the structure of retainer ring described in the present embodiment is substantially identical with above-described embodiment one with content, on the circular ring type lateral wall that its difference is only the retainer ring body 1 of retainer ring described in the present embodiment, also scribing has equally spaced graduation mark 7, in order to indicate the wear condition described retainer ring body 1 with groove 2 side.
In a preferred embodiment, retainer ring body 1 is also provided with a scale line scanning device 8, described graduation mark scanning means 8 scanning scale line 7, and determines described retainer ring residual thickness.
In further preferred embodiment, graduation mark scanning means 8 is installed on the circular ring type lateral wall of retainer ring body 1.Graduation mark 7 flushes with retainer ring body 1 lower surface bottom.Graduation mark scanning means 8 and conputer controlled end are electrically connected (not shown) mutually, and real time scan detects graduation mark 7.
In a preferred embodiment, specifically as shown in Figure 2 b, described retainer ring also comprises an alarm 6, and alarm 6 is electrically connected mutually with range finder 4, and the distance detected when range finder 4 is not more than default minimum range alarm device 6 and gives a warning information.
Embodiment three:
Consult Fig. 4, the side-looking structural representation of the retainer ring embodiment three of wearing and tearing residual thickness can be detected for the present invention in real time.As shown in FIG., the structure of retainer ring described in the present embodiment is substantially identical with above-described embodiment two with content, and its difference is retainer ring body 1 does not offer aperture 3, also non-mounting distance detector 4.
Namely in the present embodiment, described retainer ring comprises that overall circular and lower surface offers the retainer ring body 1 of multiple groove 2 in sheet type, on the circular ring type lateral wall of retainer ring body 1, also scribing has equally spaced graduation mark 7, in order to indicate the wear condition described retainer ring body 1 with groove 2 side.
In a preferred embodiment, retainer ring body 1 is also provided with a scale line scanning device 8, described graduation mark scanning means 8 scanning scale line 7, and determines described retainer ring residual thickness.
In further preferred embodiment, graduation mark scanning means 8 is installed on the circular ring type lateral wall of retainer ring body 1.Graduation mark 7 flushes with retainer ring body 1 lower surface bottom.Scale scanning means real time scan detects graduation mark 7.
In technique scheme, when grinding head is when leaving grinding pad, the graduation mark 7 of graduation mark scanning means 8 pairs of retainer ring sidewalls scans, and sweep signal is transferred to the conputer controlled end 5 of polishing machine, conputer controlled end 5 calculates the thickness of retainer ring according to scanning result (the remaining quantity of graduation mark 7), and engineer can judge to carry out control stopping or operation etc. to polishing machine by the data of conputer controlled end 5.
It is worthy of note, above-described embodiment is originally under the prerequisite of polishing effect ensureing polishing machine, can realize realizing Real-Time Monitoring to the thickness of retainer ring, facilitate engineer to pinpoint the problems faster, the potential risk because of the thickness abnormity of retainer ring and economic loss can be effectively reduced.And described retainer ring of the present invention can be applied in the technology of all chemical-mechanical planarizations of semiconductor, such as 90/65/45nm logic, the chip production such as memory body.
The foregoing is only preferred embodiment of the present invention, is only illustrative for the purpose of the present invention, and nonrestrictive.Those skilled in the art is understood, and can carry out many changes in the spirit and scope that the claims in the present invention limit to it, amendment, even equivalence, but all will fall within the scope of protection of the present invention.
Claims (7)
1. can detect a retainer ring for wearing and tearing residual thickness in real time, comprise that overall circular and lower surface offers the retainer ring body of multiple groove in sheet type, it is characterized in that,
The circular side of described retainer ring body offers an aperture, described aperture runs through the upper and lower surface of described retainer ring body, and described aperture is provided with a range finder at the beginning end place of described retainer ring body upper surface, described range finder detects the distance between its probe to described retainer ring body lower surface, and is electrically connected mutually with the conputer controlled end of outer setting; Or
On the circular ring type lateral wall of described retainer ring body, scribing has equally spaced graduation mark.
2. can detect the retainer ring of wearing and tearing residual thickness as claimed in claim 1 in real time, it is characterized in that, described retainer ring body is also provided with a scale line scanning device, described graduation mark scanning means scans described graduation mark and determines described retainer ring residual thickness.
3. can detect the retainer ring of wearing and tearing residual thickness as claimed in claim 2 in real time, it is characterized in that, described graduation mark scanning means is installed on the circular ring type lateral wall of described retainer ring body, and is electrically connected mutually with described conputer controlled end.
4. can detect the retainer ring of wearing and tearing residual thickness as claimed in claim 1 in real time, it is characterized in that, described retainer ring also comprises an alarm, and described alarm is electrically connected mutually with described range finder.
5. can detect the retainer ring of wearing and tearing residual thickness as claimed in claim 4 in real time, it is characterized in that, described alarm is an audible alarm.
6. can detect the retainer ring of wearing and tearing residual thickness as claimed in claim 3 in real time, it is characterized in that, flushing with the lower surface of described retainer ring body bottom of described graduation mark.
7. can detect the retainer ring of wearing and tearing residual thickness as claimed in claim 6 in real time, it is characterized in that, described scale scanning means real time scan detects described graduation mark.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510663129.5A CN105345652A (en) | 2015-10-14 | 2015-10-14 | Fixing ring with abrasion remaining thickness capable of being detected in real time |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510663129.5A CN105345652A (en) | 2015-10-14 | 2015-10-14 | Fixing ring with abrasion remaining thickness capable of being detected in real time |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105345652A true CN105345652A (en) | 2016-02-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510663129.5A Pending CN105345652A (en) | 2015-10-14 | 2015-10-14 | Fixing ring with abrasion remaining thickness capable of being detected in real time |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105345652A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110103143A (en) * | 2019-05-10 | 2019-08-09 | 李联辉 | A kind of pressure gauge with bottom connection stainless steel rolling ring finishing processing equipment |
| WO2023234973A1 (en) * | 2022-06-03 | 2023-12-07 | Applied Materials, Inc. | Acoustic monitoring of cmp retaining ring |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1065030A2 (en) * | 1999-07-01 | 2001-01-03 | Applied Materials, Inc. | Determining when to replace a retaining ring used in substrate polishing operations |
| JP2010120101A (en) * | 2008-11-18 | 2010-06-03 | Fujitsu Ltd | Apparatus and method for polishing work |
| CN102441841A (en) * | 2011-08-29 | 2012-05-09 | 上海华力微电子有限公司 | Method for improving grinding uniformity of chemical mechanical planarization (CMP) |
| CN103419125A (en) * | 2013-08-14 | 2013-12-04 | 上海华力微电子有限公司 | Fixing ring |
| CN104471685A (en) * | 2012-07-25 | 2015-03-25 | 应用材料公司 | Monitoring retaining ring thickness and pressure control |
| JP5691796B2 (en) * | 2011-04-26 | 2015-04-01 | 株式会社Sumco | Polishing apparatus and polishing method |
-
2015
- 2015-10-14 CN CN201510663129.5A patent/CN105345652A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1065030A2 (en) * | 1999-07-01 | 2001-01-03 | Applied Materials, Inc. | Determining when to replace a retaining ring used in substrate polishing operations |
| JP2010120101A (en) * | 2008-11-18 | 2010-06-03 | Fujitsu Ltd | Apparatus and method for polishing work |
| JP5691796B2 (en) * | 2011-04-26 | 2015-04-01 | 株式会社Sumco | Polishing apparatus and polishing method |
| CN102441841A (en) * | 2011-08-29 | 2012-05-09 | 上海华力微电子有限公司 | Method for improving grinding uniformity of chemical mechanical planarization (CMP) |
| CN104471685A (en) * | 2012-07-25 | 2015-03-25 | 应用材料公司 | Monitoring retaining ring thickness and pressure control |
| CN103419125A (en) * | 2013-08-14 | 2013-12-04 | 上海华力微电子有限公司 | Fixing ring |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110103143A (en) * | 2019-05-10 | 2019-08-09 | 李联辉 | A kind of pressure gauge with bottom connection stainless steel rolling ring finishing processing equipment |
| CN110103143B (en) * | 2019-05-10 | 2020-04-07 | 北方民族大学 | Stainless steel rolling ring finish machining equipment for radial pressure gauge |
| WO2023234973A1 (en) * | 2022-06-03 | 2023-12-07 | Applied Materials, Inc. | Acoustic monitoring of cmp retaining ring |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160224 |
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| RJ01 | Rejection of invention patent application after publication |