CN105334028B - A kind of scaling method that dual-beam synthesis precision and pointing accuracy are improved using simple detector synthesis far field - Google Patents
A kind of scaling method that dual-beam synthesis precision and pointing accuracy are improved using simple detector synthesis far field Download PDFInfo
- Publication number
- CN105334028B CN105334028B CN201510924996.XA CN201510924996A CN105334028B CN 105334028 B CN105334028 B CN 105334028B CN 201510924996 A CN201510924996 A CN 201510924996A CN 105334028 B CN105334028 B CN 105334028B
- Authority
- CN
- China
- Prior art keywords
- spectroscope
- detector
- synthesis
- light
- target surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
Abstract
The invention discloses a kind of scaling method that dual-beam synthesis precision and pointing accuracy are improved using simple detector synthesis far field, the scaling method carries out region division to same detector detection target surface, four tunnel metrical informations are adjusted in four different regions respectively, four regions correspond to the real time status information of combined beam light pupil, combined beam light axle, A roads laser beam axis and B roads laser beam axis respectively.Using A roads and B roads laser difference light extraction during demarcation, first with combined beam light axle A1 ' and B1 ' respectively closed loop in this region the heart certainly to zero point at, then calculate A2 ' respectively and B2 ' laser beam axis coordinate is made, after again with A2 ' and B2 ' for zero point Closed loop operation.Calibration cost can be greatly lowered in the present invention, simplify calibration structure and error that effective abatement apparatus environment temperature, vibrations etc. are brought, synthesis precision and lasting accuracy of the dual-beam in detector target surface are ensure that, so as to improve the synthesis precision and pointing accuracy of output laser beam.
Description
Technical field
The invention belongs to optical engineering technical field, and in particular to one kind improves dual-beam using simple detector synthesis far field
Synthesize the scaling method of precision and pointing accuracy.
Background technology
After the non-coherent bundle synthesis of N roads different wave length, although beam energy density maximum can only achieve original N
Times, but because it to every road light beam without carrying out phase controlling, it is only necessary to the regulation and control of general direction are carried out to every road light,
Therefore we usually synthesize to the non-coherent bundle of N roads different wave length in engineering, its technical difficulty is small, is easy at work
Realize.In Patent No. ZL201210152113.4 (the common aperture power combing systems of the laser beam based on beamstability closed-loop control
System) in propose principle using beamstability closed-loop control, utilize light beam synthesis sensor extract real-time optical axis error, use
High-speed handler handles optical axis error in real time, then feeds back tilting mirror to participating in closing beam by high-voltage drive output photoelectric signal
Single channel light beam implements beamstability control, to eliminate the light beam error in pointing of each road light beam in real time, realizes the high-precision of each road light beam
Degree synthesis.
The present invention proposes the non-coherent power synthesis for two-way light beam, by certain method, beamstability control
Detector target surface in system processed is divided into four regions, makes single detector simultaneously to single channel far field (during as closed-loop control
Light beam error in pointing is extracted), close beam far field (criterion as optical axis synthesis), close beam near field (criterion as pupil synthesis) and enter
Row detection, and single channel far field, conjunction beam far field are demarcated respectively.According to geometric optical theory, measuring beam focal imaging picture
Point is conjugated each other with main beam focus emission to focal beam spot during target point, therefore when the imaging of two measuring beam line focus microscope groups
When picture point overlaps, the hot spot that the emitted focusing system of main beam acts on target point also overlaps.
Detector work before we each single channel far field light is demarcated respectively first, in the past we using
Standard sources standardization, by correcting single channel far field light and standard optical position deviation, conjunction beam far field light is set to be overlapped with standard light.Its
Shortcoming is must to do all very high optical system of a machining accuracy and adjustment accuracy as standard sources, per task before all
Need detector being transported to standard sources advance rower and determine, because detector appearance and size is bigger, demarcation will each time
It is very unpractical that it, which is transported to before the special optical system before standard sources, it is therefore necessary to invents a kind of new light beam and closes
Into precision and the scaling method of pointing accuracy.
The content of the invention
The technical problem to be solved in the present invention is：In the different wave length pulsed laser light beam power of beamstability closed-loop control
Existing deficiency is overcome in the error in pointing of synthesis system, there is provided one kind improves dual-beam synthesis using simple detector synthesis far field
The scaling method of precision and pointing accuracy, it is to be visited for the common aperture of laser beam of two-way different wave length, the conjunction beam of power combing
The method that pairing beam optical position is demarcated in device is surveyed, by the particular design to light path, makes simple detector even more more single to two-way
Road far field beam, closes beam far field and conjunction beam near field is imaged simultaneously, by adjusting the optical axis error of single channel far field beam, so as to realize
Improve the synthesis precision pointing accuracy of the different wave length pulsed laser power synthesis system of beamstability closed-loop control.
The present invention solves solution used by its technical problem：One kind improves double light using simple detector synthesis far field
The scaling method of Shu Hecheng precision and pointing accuracy, the caliberating device of use include laser incident beam, beam Propagation synthesis
System and beamstability control system.So that two-way synthesizes as an example beam Propagation synthesis system it include：First adjustable mirror 1-1,
Second adjustable mirror 1-5, the first transmission mirror 1-2, the second transmission mirror 1-3, the 3rd transmission mirror 1-6, synthesis light splitting combined lens 1-4, gathers
Burnt system 1-7, target 1-8, first laser device 1-9, second laser 1-10.The light beam that first laser device 1-9 is sent is by the
The transmission mirrors of two adjustable mirror 1-5 and first 1-2, the second transmission mirror 1-3 are divided combined lens 1-4 to synthesis.Second laser 1-10 is sent out
The light beam gone out enters synthesis light splitting combined lens 1-4 by the 3rd transmission mirror 1-6, the first adjustable mirror 1-1.First laser device 1-9 is sent out
The light beam major part energy gone out reflects away as main beam by synthesis light splitting combined lens 1-4, and small part energy is as survey
Amount light beam is transmitted into synthesis sensor 1-11 by synthesis light splitting combined lens 1-4；The light beam that second laser 1-10 is sent is big
Portion of energy transmits away as main beam by synthesis light splitting combined lens 1-4, and small part energy passes through as measuring beam
Synthesis light splitting combined lens 1-4 is reflected into synthesis sensor 1-11；Described synthesis sensor 1-11 is using simple detector
Beam system is closed, it includes：Light path shrink beam module 2-1, the first spectroscope 2-2, the second spectroscope 2-3, the 3rd spectroscope 2-4 altogether,
4th spectroscope 2-5, the 5th spectroscope 2-6, the first speculum 2-7, image-forming module 2-8, the second speculum 2-9, focus module
2-10, the 6th spectroscope 2-11, the 3rd speculum 2-12, detector 2-13 and the 4th speculum 2-14.First laser device 1-9 and
After the dual wavelength light beam A and B that second laser 1-10 is sent are by shared light path shrink beam module 2-1 shrink beams, first is reached
Spectroscope 2-2, now share four kinds of different transmission paths.The first transmission path is the dual wavelength light beam A of part energy
With B by the first spectroscope 2-2 transmissions, the 4th spectroscope 2-5 reflections, the 5th spectroscope 2-6 transmissions, focus module 2-10 transmissions
And focus on, after the 6th spectroscope 2-11 reflections, detector 2-13 is reached, and focus on detector target surface 2-16 position, it is
Close Shu Yihou optical axis image；Second of transmission path passes through the first spectroscope 2- for the dual wavelength light beam A and B of part energy
2 transmissions, the 4th spectroscope 2-5 are transmitted, the first speculum 2-7 reflects, image-forming module 2-8 is transmitted, the second speculum 2-9 reflects,
After 6th spectroscope 2-11 transmissions, detector 2-13 is reached, and images in detector target surface 2-17 position, to close Shu Yihou's
Pupil image；The third transmission path for its medium wavelength A of part energy light beam by the first spectroscope 2-2 reflections, the
Two spectroscope 2-3 transmissions, the 4th speculum 2-14 and the 3rd reflective mirror 2-12 reflections, the 3rd spectroscope 2-4 and the 5th 2-6 are anti-
Penetrate, focus module 2-10 is transmitted and focused on, after the 6th spectroscope 2-11 reflections, reach detector 2-13, and focus on detector
Target surface 2-18 position, it is A roads optical axis information；4th kind of transmission path is that the wavelength of part energy is that B light beams pass through light splitting
After mirror 1-2 and 1-3 reflection, spectroscope 1-4 transmissions, spectroscope 1-6 reflections, spectroscope 1-11 reflections, detector 1-13 is reached, and
Detector target surface 1-15 position is focused on, is B roads optical axis information.
The described scaling method that dual-beam synthesis precision and pointing accuracy are improved using simple detector synthesis far field, is utilized
Spectroscope and speculum carry out the deflection and restructuring of beam direction, realize detector target surface subregion domain imaging.Demarcate the first step：Beat
First laser device 1-9 is opened, its light beam wavelength sent is A, closes second laser 1-10；The light that first laser device 1-9 is sent
Beam major part energy reflects away as main beam by synthesis light splitting combined lens 1-4, and small part energy is as measuring beam
Synthesis sensor 1-11 is transmitted into by synthesis light splitting combined lens 1-4；A part of light beam of this portion of energy passes through the first
Transmission path：First spectroscope 2-2 transmissions, the 4th spectroscope 2-5 reflections, the 5th spectroscope 2-6 transmissions, focus module 2-10 are saturating
Penetrate and focus on, after the 6th spectroscope 2-11 reflections, reach detector 2-13, and focus on detector target surface 2-16 position A1
Point；Another part energy beam passes through the third transmission path：First spectroscope 2-2 reflections, the second spectroscope 2-3 transmissions, the
Four speculum 2-14 and the 3rd reflective mirror 2-12 reflections, the 3rd spectroscope 2-4 and the 5th 2-6 reflections, focus module 2-10 transmissions
And focus on, after the 6th spectroscope 2-11 reflections, detector 2-13 is reached, and focus on detector target surface 2-18 A2 positions.
Now the optical axis barycenter A1 points of light beam A are not focused on detector target surface 2-16 demarcation dead-center position, and computer uses
Error is transmitted to high-voltage amplifier by pid algorithm, and high-voltage amplifier amplifies error signal and drives tilting mirror 1-1 small to error
Direction rotates, and most barycenter A1 closed loop of the light beam A on target surface 2-16 to demarcating on zero point A1` positions, at the same time focuses at last
Also there is individual relative movement in detector target surface 2-18 optical axis barycenter A2, barycenter of the light beam A in target surface 2-18 has been moved to A2` by A2
Position on, A2` just as light beam A detector target surface 2-18 demarcation zero point.
Demarcate second step：Second laser 1-10 is opened, its light beam wavelength sent is B, closes first laser device 1-9；
The light beam major part energy that second laser 1-10 is sent transmits away as main beam by synthesis light splitting combined lens 1-4, pole
Fraction energy is reflected into synthesis sensor 1-11 as measuring beam by synthesis light splitting combined lens 1-4；This portion of energy
A part of light beam pass through the first transmission path：First spectroscope 2-2 transmissions, the 4th spectroscope 2-5 reflections, the 5th spectroscope
After 2-6 transmissions, focus module 2-10 are transmitted and focused on, the 6th spectroscope 2-11 reflects, detector 2-13 is reached, and focuses on spy
Survey device target surface 2-16 position B1 points.Wavelength is that B another part energy beam passes through the 4th kind of transmission path：First spectroscope
2-2 and the second spectroscope 2-3 reflections, the 3rd spectroscope 2-4 transmissions, the 5th spectroscope 2-6 reflections, the 6th spectroscope 2-11 reflections
Afterwards, detector 2-13 is reached, and is focused on detector target surface 2-15 B2 positions.Now light beam B optical axis barycenter B1 points are simultaneously
Do not focus on detector target surface 2-18 demarcation dead-center position, error is transmitted to high voltage amplifier by computer with pid algorithm
Device, high-voltage amplifier amplify error signal and drive tilting mirror 1-5 to be rotated to the small direction of error, and most at last light beam B is in target
At the same time barycenter B1 closed loops on the 2-16 of face focus on detector target surface 2-15 optical axis to demarcating on the B1` positions of zero point
Barycenter B2 also has a relative movement, and barycenter of the light beam B in target surface 2-15 is had been moved on B2` position by B2, and B2` is just used as light
Demarcation zero points of the beam B in detector target surface 2-15.
Demarcate the 3rd step：First laser device 1-9, second laser 1-10 are opened simultaneously, wavelength is A and wavelength is B's
Light beam is released simultaneously, and the light beam major part energy that first laser device 1-9 is sent is as main beam by synthesis light splitting combined lens 1-4
Reflect away, small part energy is transmitted into synthesis sensor 1-11 as measuring beam by synthesis light splitting combined lens 1-4；
The light beam major part energy that second laser 1-10 is sent transmits away as main beam by synthesis light splitting combined lens 1-4, pole
Fraction energy is reflected into synthesis sensor 1-11 as measuring beam by synthesis light splitting combined lens 1-4；Wavelength is A and B
The part energy light beam of dual wavelength light beam pass through the first transmission path：First spectroscope 2-2 transmissions, the 4th spectroscope 2-
After 5 reflections, the 5th spectroscope 2-6 are transmitted, focus module 2-10 is transmitted and focused on, the 6th spectroscope 2-11 reflects, reach detection
Device 2-13, and focus on detector target surface 2-16 position A1 points and B1 points.Another part energy beam that wavelength is A is by the
Three kinds of transmission paths：First spectroscope 2-2 reflections, the second spectroscope 2-3 transmissions, the 4th speculum 2-14 and the 3rd reflective mirror 2-
12 reflections, the 3rd spectroscope 2-4 and the 5th 2-6 reflections, focus module 2-10 are transmitted and focused on, the 6th spectroscope 2-11 reflections
Afterwards, detector 2-13 is reached, and is focused on detector target surface 2-18 A2 positions.Wavelength is B another part energy beam
By the 4th kind of transmission path：First spectroscope 2-2 and the second spectroscope 2-3 reflections, the 3rd spectroscope 2-4 transmit, the 5th point
After light microscopic 2-6 reflections, the 6th spectroscope 2-11 reflections, detector 2-13 is reached, and focus on detector target surface 2-15 B2 positions
Put.By driving tilting mirror to adjust light beam A barycenter A2 and light beam B barycenter B2, by the A2 on detector target surface 2-18 and detection
The B2 on 2-15 on device target surface pulls to A2` and B2`, and the A1 points and B1 points on corresponding target surface 2-16 position must overlap, and
Do not drift about, the method in detector target surface 2-18, improve pointing accuracy on 2-15, eliminate laser beam error in pointing,
It ensure that synthesis of the dual-beam in detector target surface 2-16 is stable.
The principle of the present invention is：
A kind of scaling method that dual-beam synthesis precision and pointing accuracy are improved using simple detector synthesis far field, use
Caliberating device includes laser incident beam, beam Propagation synthesis system and beamstability control system；Beam Propagation synthesizes
System includes：First adjustable mirror, the first transmission mirror, the second transmission mirror, synthesis light splitting combined lens, the second adjustable mirror, the 3rd transmission
Mirror, focusing system, target, first laser device, second laser；The laser beam that first laser device is sent passes through the first adjustable mirror
With the first transmission mirror, the second transmission mirror to synthesis is divided combined lens, and the laser beam that second laser is sent is adjustable by second
Mirror and the 3rd transmission mirror enter synthesis light splitting combined lens, the most of energy conduct for the first laser light beam that first laser device is sent
Main beam reflects away by synthesis light splitting combined lens, and small part energy is saturating by synthesis light splitting combined lens as measuring beam
Inject into synthesis sensor；The most of energy for the second laser light beam that second laser is sent is as main beam by synthesis point
Light combined lens transmit away, and small part energy is reflected into synthesis sensing as measuring beam by synthesis light splitting combined lens
Device；Beamstability control system performs the detection of light beam directional information, processing and control function, and it includes synthesis sensor, calculated
Machine, high-voltage drive, the first adjustable mirror, the second adjustable mirror.In sensor is synthesized using simple detector to pupil optical axis simultaneously
The conjunction beam detection device of imaging, improve the scaling method of multiple-beam synthesis pointing accuracy.Described is improved using simple detector
Dual-beam synthesizes the demarcation of precision and pointing accuracy it may first have to detects target surface administrative division to detector.We are spy
Survey device detection target surface and be divided into four regions, four tunnel measurement signals are adjusted in four different regions respectively at work.Such as
The full target surface effective coverage of detector is n × n-pixel, then needs to mark off two cross from the position that n/2 rows and n/2 are arranged respectively
Intersecting region segmentation line, four regions divided correspond to combined beam light pupil, combined beam light axle, A roads optical axis and B roads optical axis respectively
The real-time status of four road signals.
By taking the synthesis of two-way light beam as an example, simple detector closes beam system, and it includes：Light path shrink beam module altogether, the first spectroscope,
Second spectroscope, the 3rd spectroscope, the 4th spectroscope, the 5th spectroscope, the first speculum, image-forming module, the second speculum, gather
Burnt module, the 6th spectroscope, the 3rd speculum, detector and the 4th speculum.Distinguished by first laser device and second laser
After the dual wavelength light beam A and B sent is by shared light path shrink beam module shrink beam, the first spectroscope is reached, now shares four kinds
Different transmission paths.The first transmission path for part energy dual wavelength light beam A and B by the first spectroscope transmission,
4th dichroic mirror, the transmission of the 5th spectroscope, focus module are transmitted and focused on, after the 6th dichroic mirror, reach detector,
And the upper-right position of detector target surface is focused on, to close Shu Yihou optical axis image；Second of transmission path is part energy
Dual wavelength light beam by the transmission of the first spectroscope, the transmission of the 4th spectroscope, the reflection of the first speculum, image-forming module transmission, the
After two-mirror reflection, the transmission of the 6th spectroscope, detector is reached, and images in the top-left position of detector target surface, to close beam
Later pupil image；The third transmission path is that the light beam that part energy wavelength is A passes through the first dichroic mirror, second
Spectroscope transmission, the 4th speculum and the reflection of the 3rd speculum, the 3rd spectroscope and the 5th dichroic mirror, focus module transmission
And focus on, after the 6th dichroic mirror, detector is reached, and the lower left position of detector target surface is focused on, believe for A roads optical axis
Breath；4th kind of transmission path be the part energy wavelength that second laser is sent be B light beam by the first spectroscope and the
Two dichroic mirrors, the transmission of the 3rd spectroscope, the 5th dichroic mirror, focus module are transmitted and focused on, the 6th dichroic mirror
Afterwards, detector is reached, and focuses on the bottom-right location of detector target surface, is B roads optical axis information.
The present invention has advantages below compared with prior art：
(1), the present invention is carried out the optical axis of two-way light, closes Shu Yihou optical axis and is closed Shu Yihou light using single detector
Pupil information detection, the homogeneity of benchmark is ensure that, avoid the thermal drift between different detectors；
(2), the present invention is in the case where two-beam individually implements real-time closed-loop control so as to ensure closed-loop precision, Ke Yishi
When observe the conjunction pencil state of two-beam, including pupil closes pencil state and optical axis and closes pencil state；
(3), the present invention carries out the optical axis of two-way light, the optical axis synthesis precision for closing Shu Yihou and sensing using single detector
The demarcation of precision, the manufacture difficulty of standard sources is instead of, optics debugging is complicated, and development cost is high, and can only be in constant temperature
The lower harsh conditions used；
(4), the present invention carries out the optical axis of two-way light using single detector, conjunction Shu Yihou optical axis synthesizes pointing accuracy
Demarcation, simplifies measurement structure, saves the coupling device between standard sources and detection sensor；
(5), the present invention is in the case where two-beam individually implements real-time closed-loop control so as to ensure closed-loop precision, using this
Scaling method, it can eliminate because of environmental change (optical system position caused by thermal drift caused by temperature, vibrations and impact
Move) and caused error.
Brief description of the drawings：
Fig. 1 is that the present invention is a kind of improves dual-beam synthesis precision and the caliberating device structure of pointing accuracy using simple detector
Figure；
Fig. 2 closes beam detection device optic path path profile for synthesis sensor；
Fig. 3 wavelength is the Zero calibration of A light beam barycenter on detector target surface；
Fig. 4 wavelength is the Zero calibration of B light beam barycenter on detector target surface；
Fig. 5 is that wavelength is A and the demarcation on detector target surface simultaneously of B dual wavelength light beam；
In figure：1-1 is the first adjustable mirror, and 1-2 is the first transmission mirror, and 1-3 is the second transmission mirror, and 1-4 is synthesis light splitting group
Mirror is closed, 1-5 be the second adjustable mirror, and 1-6 is the 3rd to transmit mirror, and 1-7 is focusing system, and 1-8 is target, and 1-9 is first laser, 1-
10 be second laser.
2-1 is common light path shrink beam module, and 2-2 is the first spectroscope, and 2-3 is the second spectroscope, and 2-4 is the 3rd spectroscope,
2-5 is the 4th spectroscope, and 2-6 is the 5th spectroscope, and 2-7 is the first speculum, and 2-8 is image-forming module, and 2-9 is the second reflection
Mirror, 2-10 are focus module, and 2-11 is the 6th spectroscope, and 2-12 is the 3rd speculum, and 2-13 is detector, and 2-14 the 4th reflects
Mirror, 2-15 are the position that the light beam that wavelength is B focuses on detector target surface, and the dual-beam that 2-16 is wavelength A and wavelength B focuses on
The position of detector target surface, 2-17 are the pupil image for closing Shu Yihou, and 2-18 is that wavelength is that A light beams focus on detector target surface
Position.
Embodiment
Below in conjunction with the accompanying drawings and embodiment the present invention is described in detail.
The light beam that first laser device 1-9 as shown in Figure 1 is sent transmits mirror 1-2 by the second adjustable mirror 1-5 and first,
Second transmission mirror 1-3 to synthesis light splitting combined lens 1-4.The second beam light that second laser 1-10 is sent is by the 3rd transmission mirror 1-
6th, the first adjustable mirror 1-1 enters synthesis light splitting combined lens 1-4.Most of energy of light beam is as main beam by synthesis point
Light combined lens 1-4 is reflected away, and small part energy is transmitted into synthesis as measuring beam by synthesis light splitting combined lens 1-4
Sensor 1-11；Most of energy of second beam light transmits away as main beam by synthesis light splitting combined lens 1-4, minimum portion
Energy is divided to be reflected into synthesis sensor 1-11 by synthesis light splitting combined lens 1-4 as measuring beam.Two-way main beam synthesizes
Docking reflection focusing system 1-7 is acted on target 1-8 afterwards.
Described synthesis sensor 1-11 closes beam system using simple detector as shown in Figure 2, first laser device 1-9 and
After the dual wavelength light beam A and B that second laser 1-10 is sent are by shared light path shrink beam module 2-1 shrink beams, first is reached
Spectroscope 2-2, now share four kinds of different transmission paths.The first transmission path is the dual wavelength light beam A of part energy
With B by the first spectroscope 2-2 transmissions, the 4th spectroscope 2-5 reflections, the 5th spectroscope 2-6 transmissions, focus module 2-10 transmissions
And focus on, after the 6th spectroscope 2-11 reflections, detector 2-13 is reached, and focus on detector target surface 2-16 position, it is
Close Shu Yihou optical axis image；Second of transmission path passes through the first spectroscope 2- for the dual wavelength light beam A and B of part energy
2 transmissions, the 4th spectroscope 2-5 are transmitted, the first speculum 2-7 reflects, image-forming module 2-8 is transmitted, the second speculum 2-9 reflects,
After 6th spectroscope 2-11 transmissions, detector 2-13 is reached, and images in detector target surface 2-17 position, to close Shu Yihou's
Pupil image；The third transmission path for its medium wavelength A of part energy light beam by the first spectroscope 2-2 reflections, the
Two spectroscope 2-3 transmissions, the 4th speculum 2-14 and the 3rd reflective mirror 2-12 reflections, the 3rd spectroscope 2-4 and the 5th 2-6 are anti-
Penetrate, focus module 2-10 is transmitted and focused on, after the 6th spectroscope 2-11 reflections, reach detector 2-13, and focus on detector
Target surface 2-18 position, it is A roads optical axis information；4th kind of transmission path is that the wavelength of part energy is that B light beams pass through light splitting
After mirror 1-2 and 1-3 reflection, spectroscope 1-4 transmissions, spectroscope 1-6 reflections, spectroscope 1-11 reflections, detector 1-13 is reached, and
Detector target surface 1-15 position is focused on, is B roads optical axis information.
First laser device 1-9 is opened as shown in Figure 3, and its light beam wavelength sent is A, closes second laser 1-10；The
The light beam major part energy that one laser 1-9 is sent synthesizes light splitting combined lens 1-4 as main beam and reflected away, small part energy
Amount is transmitted into synthesis sensor 1-11 as measuring beam by synthesis light splitting combined lens 1-4；A part for this portion of energy
Light beam passes through the first transmission path：First spectroscope 2-2 transmissions, the 4th spectroscope 2-5 are reflected, the 5th spectroscope 2-6 is transmitted,
After focus module 2-10 is transmitted and focused on, the 6th spectroscope 2-11 reflects, detector 2-13 is reached, and focuses on detector target surface
2-16 position A1 points；Another part energy beam passes through the third transmission path：First spectroscope 2-2 reflections, the second light splitting
Mirror 2-3 transmissions, the 4th speculum 2-14 and the 3rd reflective mirror 2-12 reflections, the 3rd spectroscope 2-4 and the 5th 2-6 reflections, focus on
Module 2-10 is transmitted and focused on, after the 6th spectroscope 2-11 reflections, reaches detector 2-13, and focus on detector target surface 2-18
A2 positions on.Now the optical axis barycenter A1 points of light beam A are not focused on detector target surface 2-16 demarcation dead-center position,
Error is transmitted to high-voltage amplifier by computer with pid algorithm, and high-voltage amplifier amplifies error signal and drives tilting mirror 1-1
The direction small to error rotates, most at last barycenter A1 closed loop of the light beam A on target surface 2-16 on demarcation zero point A1` positions, with
This optical axis barycenter A2 for focusing on detector target surface 2-18 simultaneously also has an individual relative movement, light beam A target surface 2-18 barycenter by
A2 is had been moved on A2` position, A2` just as light beam A detector target surface 2-18 demarcation zero point.
Second laser 1-10 is opened as shown in Figure 4, and its light beam wavelength sent is B, closes first laser device 1-9；The
The light beam major part energy that dual-laser device 1-10 is sent transmits away as main beam by synthesis light splitting combined lens 1-4, minimum
Portion of energy is reflected into synthesis sensor 1-11 as measuring beam by synthesis light splitting combined lens 1-4；This portion of energy
A part of light beam passes through the first transmission path：First spectroscope 2-2 transmissions, the 4th spectroscope 2-5 reflections, the 5th spectroscope 2-
After 6 transmissions, focus module 2-10 are transmitted and focused on, the 6th spectroscope 2-11 reflects, detector 2-13 is reached, and focuses on detection
Device target surface 2-16 position B1 points.Wavelength is that B another part energy beam passes through the 4th kind of transmission path：First spectroscope 2-
2 and second spectroscope 2-3 reflection, the 3rd spectroscope 2-4 transmission, the 5th spectroscope 2-6 reflection, the 6th spectroscope 2-11 reflection
Afterwards, detector 2-13 is reached, and is focused on detector target surface 2-15 B2 positions.Now light beam B optical axis barycenter B1 points are simultaneously
Do not focus on detector target surface 2-18 demarcation dead-center position, error is transmitted to high voltage amplifier by computer with pid algorithm
Device, high-voltage amplifier amplify error signal and drive tilting mirror 1-5 to be rotated to the small direction of error, and most at last light beam B is in target
At the same time barycenter B1 closed loops on the 2-16 of face focus on detector target surface 2-15 optical axis to demarcating on the B1` positions of zero point
Barycenter B2 also has a relative movement, and barycenter of the light beam B in target surface 2-15 is had been moved on B2` position by B2, and B2` is just used as light
Demarcation zero points of the beam B in detector target surface 2-15.
First laser device 1-9, second laser 1-10 are opened simultaneously as shown in Figure 5, the light that wavelength is A and wavelength is B
Beam is released simultaneously, and the light beam major part energy that first laser device 1-9 is sent synthesizes light splitting combined lens 1-4 reflection marks as main beam
Fixed 3rd step：First laser device 1-9, second laser 1-10 are opened simultaneously, the light beam that wavelength is A and wavelength is B while put
Go out, the light beam major part energy that first laser device 1-9 is sent synthesizes light splitting combined lens 1-4 as main beam and reflected away, minimum
Portion of energy is transmitted into synthesis sensor 1-11 as measuring beam by synthesis light splitting combined lens 1-4；Second laser 1-
The 10 light beam major part energy sent transmit away as main beam by synthesis light splitting combined lens 1-4, and small part energy is made
For measuring beam synthesis sensor 1-11 is reflected into by synthesis light splitting combined lens 1-4；Wavelength is A and B dual wavelength light beam
Part energy light beam pass through the first transmission path：First spectroscope 2-2 transmissions, the 4th spectroscope 2-5 are reflected, the 5th point
After light microscopic 2-6 transmissions, focus module 2-10 are transmitted and focused on, the 6th spectroscope 2-11 reflects, detector 2-13 is reached, and is focused on
In detector target surface 2-16 position A1 points and B1 points.Wavelength is that A another part energy beam passes through the third transmission path：
First spectroscope 2-2 reflections, the second spectroscope 2-3 transmissions, the 4th speculum 2-14 and the 3rd reflective mirror 2-12 reflect, the 3rd point
Light microscopic 2-4 and the 5th 2-6 reflections, focus module 2-10 are transmitted and focused on, after the 6th spectroscope 2-11 reflections, reach detector 2-
13, and focus on detector target surface 2-18 A2 positions.Another part energy beam that wavelength is B is by the 4th kind of transmission road
Footpath：First spectroscope 2-2 and the second spectroscope 2-3 reflections, the 3rd spectroscope 2-4 transmissions, the 5th spectroscope 2-6 reflections, the 6th
After spectroscope 2-11 reflections, detector 2-13 is reached, and focus on detector target surface 2-15 B2 positions.Tilted by driving
Mirror adjusts light beam A barycenter A2 and light beam B barycenter B2, by the 2-15 on the A2 and detector target surface on detector target surface 2-18
B2 pulls to A2` and B2`, and the A1 points and B1 points on corresponding target surface 2-16 position must be overlapped, and not drift about, and the method is being visited
Survey device target surface 2-18, improve pointing accuracy on 2-15, eliminate laser beam error in pointing, ensure that dual-beam is detecting
Device target surface 2-16 synthesis is stable.
Claims (1)
1. a kind of scaling method that dual-beam synthesis precision and pointing accuracy are improved using simple detector synthesis far field, the mark of use
Determining device includes laser incident beam, beam Propagation synthesis system and beamstability control system；Beam Propagation synthesis system
System includes：First adjustable mirror (1-1), the first transmission mirror (1-2), the second transmission mirror (1-3), synthesis light splitting combined lens (1-4), the
Two adjustable mirrors (1-5), the 3rd transmission mirror (1-6), focusing system (1-7), target (1-8), first laser device (1-9), second swashs
Light device (1-10)；The laser beam that first laser device (1-9) is sent by the second adjustable mirror (1-5), first transmission mirror (1-2),
To synthesis light splitting combined lens (1-4), the laser beam that second laser (1-10) is sent passes second transmission mirror (1-3) by the 3rd
Defeated mirror (1-6), the first adjustable mirror (1-1) enter synthesis light splitting combined lens (1-4), first laser device (1-9) send first swash
Light light beam, most of energy of first laser light beam reflects away as main beam by synthesis light splitting combined lens (1-4), minimum
Portion of energy is transmitted into the synthesis sensing of beamstability control system as measuring beam by synthesis light splitting combined lens (1-4)
Device (1-11)；The most of energy for the second laser light beam that second laser (1-10) is sent is divided as main beam by synthesis
Combined lens (1-4) transmit away, and small part energy is reflected into conjunction as measuring beam by synthesis light splitting combined lens (1-4)
Into sensor (1-11)；Beamstability control system performs the detection of light beam directional information, processing and control function, and it includes synthesis
Sensor, computer, high-voltage drive, the first adjustable mirror and the second adjustable mirror；Simple detector pair is utilized in sensor is synthesized
The conjunction beam detection device that pupil optical axis is imaged simultaneously, improves multiple-beam synthesis pointing accuracy, and described is carried using simple detector
The demarcation of high dual-beam synthesis precision and pointing accuracy it may first have to target surface administrative division is detected to detector, detection
Device detection target surface is divided into four regions, four tunnel measurement signals is adjusted in four different regions respectively at work, specifically
, the full target surface effective coverage of detector is n × n-pixel, then needs to mark off two ten from the position that n/2 rows and n/2 are arranged respectively
The intersecting region segmentation line of font, four regions divided correspond to combined beam light pupil, combined beam light axle, A roads optical axis and B roads respectively
The real-time status of the road signal of optical axis four；Described synthesis sensor (1-11) closes beam system using simple detector, and it includes：
Light path shrink beam module (2-1) altogether, the first spectroscope (2-2), the second spectroscope (2-3), the 3rd spectroscope (2-4), the 4th light splitting
Mirror (2-5), the 5th spectroscope (2-6), the first speculum (2-7), image-forming module (2-8), the second speculum (2-9), focus on mould
Block (2-10), the 6th spectroscope (2-11), the 3rd speculum (2-12), detector (2-13) and the 4th speculum (2-14), the
The dual wavelength light beam A and B that one laser (1-9) and second laser (1-10) are sent pass through shared light path shrink beam module
After (2-1) shrink beam, the first spectroscope (2-2) is reached, now shares four kinds of different transmission paths, the first transmission path is one
The dual wavelength light beam A and B of portion of energy are by the first spectroscope (2-2) transmission, the reflection of the 4th spectroscope (2-5), the 5th light splitting
Mirror (2-6) transmission, focus module (2-10) are transmitted and focused on, after the reflection of the 6th spectroscope (2-11), reach detector (2-13),
And focus on detector target surface (2-16) position, to close Shu Yihou optical axis image；Second of transmission path is a part
The dual wavelength light beam A and B of energy are by the first spectroscope (2-2) transmission, the transmission of the 4th spectroscope (2-5), the first speculum (2-
7) after reflection, image-forming module (2-8) transmission, the second speculum (2-9) reflection, the transmission of the 6th spectroscope (2-11), detection is reached
Device (2-13), and detector target surface (2-17) position is imaged in, to close Shu Yihou pupil image；The third transmission path is
Its medium wavelength A of part energy light beam is by the first spectroscope (2-2) reflection, the second spectroscope (2-3) transmission, the 4th anti-
Penetrate mirror (2-14) and the 3rd reflective mirror (2-12) reflection, the 3rd spectroscope (2-4) and the 5th spectroscope (2-6) reflection, focus on mould
Block (2-10) is transmitted and focused on, after the reflection of the 6th spectroscope (2-11), reaches detector (2-13), and focus on detector target surface
The position of (2-18), it is A roads optical axis information；4th kind of transmission path is that the wavelength of part energy is that B light beams pass through spectroscope
After (1-2) and (1-3) reflection, spectroscope (1-4) transmission, spectroscope (1-6) reflection, spectroscope (1-11) reflection, detection is reached
Device (1-13), and detector target surface (1-15) position is focused on, it is B roads optical axis information；
It is characterized in that：The scaling method step is as follows：
Step 1, first laser device (1-9) is opened, its light beam wavelength sent is A, closes second laser (1-10)；First swashs
The light beam major part energy that light device (1-9) is sent synthesizes light splitting combined lens (1-4) as main beam and reflected away, small part energy
Amount is transmitted into synthesis sensor (1-11) as measuring beam by synthesis light splitting combined lens (1-4)；The one of this portion of energy
Segment beam passes through the first transmission path：First spectroscope (2-2) transmission, the reflection of the 4th spectroscope (2-5), the 5th spectroscope
After (2-6) transmission, focus module (2-10) are transmitted and focused on, the 6th spectroscope (2-11) reflects, detector (2-13) is reached, and
Focus on the position A1 points of detector target surface (2-16)；Another part energy beam passes through the third transmission path：First light splitting
Mirror (2-2) reflection, the second spectroscope (2-3) transmission, the 4th speculum (2-14) and the 3rd reflective mirror (2-12) reflect, the 3rd point
Light microscopic (2-4) and the reflection of the 5th spectroscope (2-6), focus module (2-10) are transmitted and focused on, the reflection of the 6th spectroscope (2-11)
Afterwards, detector (2-13) is reached, and is focused on the A2 positions of detector target surface (2-18), now the optical axis barycenter A1 of light beam A
Point is not focused on the demarcation dead-center position of detector target surface (2-16), and error is transmitted to height by computer with pid algorithm
Amplifier is pressed, high-voltage amplifier amplifies error signal and drive tilting mirror 1-1 to be rotated to the small direction of error, most light beam at last
At the same time barycenter A1 closed loops of the A on target surface (2-16) focuses on detector target surface (2-18) to demarcating on zero point A1 ' positions
Optical axis barycenter A2 also have individual relative movement, barycenter of the light beam A at target surface (2-18) is had been moved on A2 ' position by A2, and A2 ' is just
As light beam A detector target surface (2-18) demarcation zero point；
Step 2, second laser (1-10) is opened, its light beam wavelength sent is B, closes first laser device (1-9)；Second swashs
The light beam major part energy that light device (1-10) is sent transmits away as main beam by synthesis light splitting combined lens (1-4), minimum
Portion of energy is reflected into synthesis sensor (1-11) as measuring beam by synthesis light splitting combined lens (1-4)；This part energy
A part of light beam of amount passes through the first transmission path：First spectroscope (2-2) transmission, the reflection of the 4th spectroscope (2-5), the 5th
After spectroscope (2-6) transmission, focus module (2-10) are transmitted and focused on, the 6th spectroscope (2-11) reflects, reach detector (2-
13), and the position B1 points of detector target surface (2-16) are focused on, another part energy beam that wavelength is B is by the 4th kind of biography
Defeated path：First spectroscope (2-2) and the second spectroscope (2-3) reflection, the transmission of the 3rd spectroscope (2-4), the 5th spectroscope (2-
6) after reflection, the reflection of the 6th spectroscope (2-11), detector (2-13) is reached, and focus on the B2 positions of detector target surface (2-15)
Put, now light beam B optical axis barycenter B1 points are not focused on the demarcation dead-center position of detector target surface (2-18), are calculated
Error is transmitted to high-voltage amplifier by machine with pid algorithm, high-voltage amplifier error signal amplify and drive tilting mirror (1-5) to
The small direction of error rotates, in barycenter B1 closed loops of the most at last light beam B on target surface (2-16) to the B1` positions of demarcation zero point,
At the same time focusing on the optical axis barycenter B2 of detector target surface (2-15) also has a relative movement, and light beam B is at target surface (2-15)
Barycenter had been moved to by B2 on B2` position, B2` just as light beam B detector target surface (2-15) demarcation zero point；
Step 3, first laser device (1-9), second laser (1-10) opened simultaneously, the light beam that wavelength is A and wavelength is B is same
When release, the light beam major part energy that first laser device (1-9) is sent as main beam synthesize light splitting combined lens (1-4) reflect
Go, small part energy is transmitted into synthesis sensor (1-11) as measuring beam by synthesis light splitting combined lens (1-4)；The
The light beam major part energy that dual-laser device (1-10) is sent transmits away as main beam by synthesis light splitting combined lens (1-4),
Small part energy is reflected into synthesis sensor (1-11) as measuring beam by synthesis light splitting combined lens (1-4)；Wavelength
Part energy light beam for A and B dual wavelength light beam passes through the first transmission path：First spectroscope (2-2) transmission, the 4th
Spectroscope (2-5) reflection, the transmission of the 5th spectroscope (2-6), focus module (2-10) are transmitted and focused on, the 6th spectroscope (2-11)
After reflection, detector (2-13) is reached, and focuses on the position A1 points and B1 points of detector target surface (2-16), wavelength is the another of A
Part energy light beam passes through the third transmission path：First spectroscope (2-2) reflection, the second spectroscope (2-3) transmission, the 4th
Speculum (2-14) and the 3rd reflective mirror (2-12) reflection, the 3rd spectroscope (2-4) and the 5th (2-6) reflections, focus module (2-
10) transmit and focus on, after the reflection of the 6th spectroscope (2-11), reach detector (2-13), and focus on detector target surface (2-
18) on A2 positions, wavelength is that B another part energy beam passes through the 4th kind of transmission path：First spectroscope (2-2) and
Two spectroscopes (2-3) reflection, the transmission of the 3rd spectroscope (2-4), the reflection of the 5th spectroscope (2-6), the 6th spectroscope (2-11) are anti-
After penetrating, detector (2-13) is reached, and is focused on the B2 positions of detector target surface (2-15), by driving tilting mirror to adjust light
Beam A barycenter A2 and light beam B barycenter B2, the B2 on (2-15) on the A2 and detector target surface on detector target surface (2-18) is drawn
To A2 ' and B2 ', A1 points and B1 points on the position of corresponding target surface (2-16) must overlap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510924996.XA CN105334028B (en) | 2015-12-14 | 2015-12-14 | A kind of scaling method that dual-beam synthesis precision and pointing accuracy are improved using simple detector synthesis far field |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510924996.XA CN105334028B (en) | 2015-12-14 | 2015-12-14 | A kind of scaling method that dual-beam synthesis precision and pointing accuracy are improved using simple detector synthesis far field |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105334028A CN105334028A (en) | 2016-02-17 |
| CN105334028B true CN105334028B (en) | 2017-11-24 |
Family
ID=55284680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510924996.XA Active CN105334028B (en) | 2015-12-14 | 2015-12-14 | A kind of scaling method that dual-beam synthesis precision and pointing accuracy are improved using simple detector synthesis far field |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105334028B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109029929A (en) * | 2018-07-10 | 2018-12-18 | 中国科学院上海光学精密机械研究所 | Watt pinpoint method of grade high power laser system target surface focus of bat |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106324790B (en) * | 2016-08-12 | 2020-04-03 | 中国科学院光电技术研究所 | Coupling mirror automatic adjustment method based on monocular vision pose measurement |
| CN108919480B (en) * | 2018-06-25 | 2020-07-21 | 中国科学院长春光学精密机械与物理研究所 | Automatic alignment device for multi-channel laser beam combination in same wave band |
| CN109901301B (en) * | 2019-03-29 | 2021-10-29 | 中国科学院理化技术研究所 | Laser beam combining device |
| CN110231610B (en) * | 2019-05-24 | 2022-12-02 | 武汉大学 | Detection calibration platform and method for active light spot energy detector of satellite-borne laser altimeter |
| CN112033647B (en) * | 2020-08-27 | 2022-08-02 | 中国科学院光电技术研究所 | Multi-aperture system pupil detection and correction method |
| CN112648942B (en) * | 2021-01-07 | 2022-03-18 | 长春理工大学 | Catadioptric multi-optical-axis coaxiality dynamic detection device and detection method |
| CN112903254B (en) * | 2021-01-21 | 2022-04-05 | 中国科学院上海光学精密机械研究所 | Automatic monitoring device for non-collinear parametric amplification light path and automatic monitoring method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1904569A (en) * | 2006-08-07 | 2007-01-31 | 中国科学院光电技术研究所 | Preware measuring method based on linear phase position reversal development |
| CN101344434A (en) * | 2008-09-09 | 2009-01-14 | 中国科学院光电技术研究所 | Self-adapting calibration apparatus of Hartmann wave-front sensor based on four-quadrant detector |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1333260A3 (en) * | 2002-01-31 | 2004-02-25 | Canon Kabushiki Kaisha | Phase measuring method and apparatus |
| WO2005038885A1 (en) * | 2003-10-16 | 2005-04-28 | Nikon Corporation | Optical characteristics measuring device and optical characteristics measuring method, exposure system and exposure method, and device production method |
| US9778136B2 (en) * | 2012-05-11 | 2017-10-03 | Menicon Co., Ltd. | Lens power measurement device and measurement method |
-
2015
- 2015-12-14 CN CN201510924996.XA patent/CN105334028B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1904569A (en) * | 2006-08-07 | 2007-01-31 | 中国科学院光电技术研究所 | Preware measuring method based on linear phase position reversal development |
| CN101344434A (en) * | 2008-09-09 | 2009-01-14 | 中国科学院光电技术研究所 | Self-adapting calibration apparatus of Hartmann wave-front sensor based on four-quadrant detector |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109029929A (en) * | 2018-07-10 | 2018-12-18 | 中国科学院上海光学精密机械研究所 | Watt pinpoint method of grade high power laser system target surface focus of bat |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105334028A (en) | 2016-02-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105334028B (en) | A kind of scaling method that dual-beam synthesis precision and pointing accuracy are improved using simple detector synthesis far field | |
| CN104914445B (en) | For the combined type scanning system of laser radar | |
| US10245683B2 (en) | Apparatus and method for beam diagnosis on laser processing optics | |
| CN103033917B (en) | Non-linear laser scanning microscope flexibly for Noninvasive three-dimensional detection | |
| US7488070B2 (en) | Optical measuring system and optical measuring method | |
| US9354442B2 (en) | Optical scanning device and scanning inspection apparatus | |
| US8681344B2 (en) | Devices and methods for position determination and surface measurement | |
| KR102635962B1 (en) | LIDAR system with multi-mode waveguide photodetector | |
| KR101088479B1 (en) | Laser apparatus of monitoring processing status by using Optical Coherence Tomography | |
| FR2682778A1 (en) | MICROSCOPE FOR COMPUTER - AIDED STEREOTAXIC MICROCHIRURGY OPERATION AND METHOD FOR OPERATING THE SAME. | |
| US11146776B2 (en) | Device and method for three-dimensional laser imaging with longitudinal range | |
| CN107407798A (en) | Pass through the microscopic system of low coherence interference method autofocus adjustment | |
| US11880068B2 (en) | Space optical coupling apparatus | |
| CN105353516B (en) | Single detector synthesizes sensor to the dual-beam of pupil optical axis subregion domain imaging | |
| CN104154882A (en) | Double beam parallelism detection device and method based on differential defocus measurement | |
| RU2372628C1 (en) | Multifunctional optical-location system | |
| JP2022505967A (en) | Fiber tip reimaging method LIDAR system | |
| US11344970B2 (en) | Optical device and method for detecting the drift of a light beam | |
| KR102602118B1 (en) | Scan head device and method for reflecting or transmitting a beam for a scanner, scanning device having a scan head device, and scanner having a scan head device | |
| JP5513017B2 (en) | Angle measuring device | |
| CN103698898B (en) | Laser optical path autocollimation device | |
| JP7403328B2 (en) | surveying equipment | |
| JP2023017098A (en) | Distance measuring device | |
| Zhao et al. | Device for performance detection of optical scanner |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |