CN109901301B - Laser beam combining device - Google Patents
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- CN109901301B CN109901301B CN201910247793.XA CN201910247793A CN109901301B CN 109901301 B CN109901301 B CN 109901301B CN 201910247793 A CN201910247793 A CN 201910247793A CN 109901301 B CN109901301 B CN 109901301B
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Abstract
The embodiment of the invention provides a laser beam combining device, which comprises a laser beam combining mirror, a laser detection module, a beam combining control module and a beam combining mirror driving module, wherein the laser beam combining mirror is arranged on the laser detection module; the laser detection module is arranged in the transmission direction of the laser beam combining mirror, and when multiple paths of laser beams sequentially transmit the laser beam combining mirror, light spots corresponding to each path of laser beams are sequentially formed on the laser detection module, and the light spot positions corresponding to each path of laser beams are sequentially sent to the beam combining control module; the beam combination control module sequentially receives a plurality of light spot positions sent by the laser detection module, and respectively sends control signals to the beam combination mirror driving module aiming at each light spot position except the received first light spot position; and the beam combining mirror driving module receives the control signal and controls the laser beam combining mirror to deflect according to the control signal so as to enable the corresponding light spot position to be overlapped with the first light spot position. The embodiment of the invention improves the quality of the synthesized light beam.
Description
Technical Field
The embodiment of the invention relates to the technical field of laser processing, in particular to a laser beam combining device.
Background
With the development of industrial applications such as laser processing, the power output by a single laser cannot meet the increasing urgent demand. At present, in order to increase the total output power of laser, a high-power beam combiner is generally used to geometrically combine multiple beams of high-power laser into one beam, for example, spatial beam combining of a fiber laser and time sequence beam combining of a solid laser can both achieve high-power combined laser output.
However, the beam combining method adopts the plane mirror to control the propagation direction of the light beam so as to realize beam combining of the laser beams, and at this time, the quality of the combined light beam is low due to the jitter of the combined beam of the fast mirror, so that accurate and stable laser beam combining cannot be realized.
Disclosure of Invention
The embodiment of the invention provides a laser beam combining device, which aims to solve the problem that the quality of a combined light beam is low due to the fact that a quick reflecting mirror shakes during laser beam combining in the prior art.
The embodiment of the invention provides a laser beam combining device, which comprises:
the laser beam combining device comprises a laser beam combining mirror, a laser detection module, a beam combining control module electrically connected with the laser detection module and a beam combining mirror driving module electrically connected with the beam combining control module; wherein the content of the first and second substances,
the laser detection module is arranged in the transmission direction of the laser beam combining mirror, and when multiple paths of laser beams sequentially transmit the laser beam combining mirror, light spots corresponding to each path of laser beams are sequentially formed on the laser detection module, and the light spot positions corresponding to each path of laser beams are sequentially sent to the beam combining control module;
the beam combination control module sequentially receives a plurality of light spot positions sent by the laser detection module, and respectively sends control signals to the beam combination mirror driving module aiming at each light spot position except the received first light spot position;
and the beam combining mirror driving module receives the control signal and controls the laser beam combining mirror to deflect according to the control signal so as to enable the corresponding light spot position to be overlapped with the first light spot position.
Optionally, the laser beam combiner includes a transmission mirror, a mirror support plate, and two flexible hinges; the mirror body supporting plate is of a rectangular plate-shaped structure, the transmission mirror is attached to a first plate surface of the mirror body supporting plate, the two flexible hinges are respectively arranged on a second plate surface, opposite to the first plate surface, of the mirror body supporting plate, the number of the beam combining mirror driving modules is two, and each beam combining mirror driving module is respectively connected with one flexible hinge; wherein the content of the first and second substances,
when the beam combining mirror driving module receives the control signal, the deflection of the mirror body supporting plate is driven and controlled through the flexible hinge connected with the beam combining mirror driving module according to the control signal.
Optionally, the beam combiner driving module is a pressure ceramic driver or a voice coil motor; wherein the content of the first and second substances,
when the beam combiner driving module is a pressure ceramic driver and the pressure ceramic driver receives the control signal, the pressure ceramic driver controls the self expansion amount according to the control signal and drives the mirror body supporting plate to deflect through a flexible hinge connected with the pressure ceramic driver;
when the beam combining mirror driving module is a voice coil motor, and the voice coil motor receives the control signal, the voice coil motor controls the self-rotation according to the control signal, and drives the mirror body supporting plate to deflect through a flexible hinge connected with the voice coil motor.
Optionally, the laser detection module is a photoelectric position detector PSD, a charge coupled device CCD, or a complementary metal oxide semiconductor CMOS camera.
Optionally, the beam combination control module is a field programmable gate array FPGA, a personal computer PC, a complex programmable logic device CPLD, or a programmable logic controller PLC.
Optionally, the multiple laser beams are pulsed laser beams or quasi-continuous laser beams.
The laser beam combining device comprises a laser beam combining mirror, a laser detection module, a beam combining control module and a beam combining mirror driving module, wherein when a laser beam penetrates through the laser beam combining mirror, a light spot corresponding to each path of laser beam can be formed on the laser detection module, the position of the light spot is sent to the beam combining control device, and the beam combining control module can drive the beam combining mirror driving module according to the position of the light spot to drive and control the laser beam combining mirror to deflect, so that a plurality of light spot positions are overlapped, namely the plurality of paths of laser beams are combined, and therefore the laser beam combining mirror is a transmissive beam combining mirror, compared with a reflecting mirror in the prior art, the laser beam combining device is small in jitter, and the quality of a combined light beam is improved; in addition, the laser beam combining device combines beams based on the position of a light spot, so that the realization is convenient, and the beam combining miniaturization design is realized.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.
FIG. 1 is a block diagram of a laser beam combining apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a laser beam combiner according to an embodiment of the present disclosure;
FIG. 3 is a schematic diagram of a laser beam combining mirror for combining laser beams according to an embodiment of the present disclosure;
fig. 4 is a detailed schematic diagram of a laser beam combining device in an embodiment of the invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1, which is a schematic block diagram of a laser beam combining apparatus according to an embodiment of the present invention, the laser beam combining apparatus includes:
the device comprises a laser beam combining mirror 1, a laser detection module 2, a beam combining control module 3 electrically connected with the laser detection module 2 and a beam combining mirror driving module 4 electrically connected with the beam combining control module 3; wherein the content of the first and second substances,
the laser detection module 2 is arranged in the transmission direction of the laser beam combiner 1, and when multiple paths of laser beams sequentially transmit through the laser beam combiner 1, light spots corresponding to each path of laser beams are sequentially formed on the laser detection module 2, and the light spot positions corresponding to each path of laser beams are sequentially sent to the beam combining control module 3;
the beam combination control module 3 sequentially receives the plurality of light spot positions sent by the laser detection module 2, and respectively sends control signals to the beam combination mirror driving module 4 aiming at each light spot position except the received first light spot position;
and the beam combining mirror driving module 4 receives the control signal and controls the laser beam combining mirror 1 to deflect according to the control signal so as to enable the corresponding light spot position to be overlapped with the first light spot position.
Specifically, the multi-path laser beam is a pulse laser beam or a quasi-continuous laser.
Specifically, the laser beam combining mirror 1 is a transmissive beam combining mirror, and the laser detection module 2 is placed in the transmission direction of the laser beam combining mirror, so that when a laser beam sequentially transmits through the laser beam combining mirror 1, different laser beams can form different light spots on the laser detection module 2, and since the light spot positions are related to the incident angles of the laser beams, that is, the incident angles of the laser beams are different, the light spot positions formed on the laser detection module 2 are also different, and the incident angles of the laser beams are the same, the light spot positions formed on the laser detection module 2 are also the same, so that the device in this embodiment can determine the incident direction of the laser beam based on the light spot positions, and can combine multiple paths of laser beams when controlling the light spot positions to overlap; in addition, the laser detection module 2 is connected with the beam combination control module 3, so that the laser detection module 2 can send each formed light spot position to the beam combination control module 3; in addition, the beam combination control module 3 is connected with the beam combination mirror driving module 4, and the beam combination mirror driving module 4 is connected with the laser beam combination mirror 1, so that the beam combination control module 3 can control the beam combination mirror driving module 4 to drive the laser beam combination mirror 1 to deflect based on the received light spot positions, the purpose of overlapping the plurality of light spot positions on the laser detection module 2 is achieved, and the multi-path laser beams corresponding to the plurality of light spot positions are combined.
Next, the operation principle of the laser beam combining device in the present embodiment will be described by taking the above principle as an example.
Specifically, it is assumed that the multiple laser beams include a first laser beam and a second laser beam, which sequentially transmit through the laser beam combiner 1. Firstly, after a first laser beam penetrates through a laser beam combining mirror 1, a light spot corresponding to the first laser beam is formed on a laser detection module 2, the position of the light spot corresponding to the first laser beam is sent to a beam combining control module 3, and at the moment, the beam combining control module 3 receives the position of the light spot corresponding to the first laser beam sent by the laser detection module 2; then, after the second laser beam penetrates through the laser beam combiner 1, a light spot corresponding to the second laser beam is formed on the laser detection module 2, and a light spot position corresponding to the second laser beam is sent to the beam combining control module 3, at this time, the beam combining control module 3 receives the light spot position corresponding to the second laser beam sent by the laser detection module 2, and sends a control signal to the beam combining mirror driving module 4 when detecting that the light spot position corresponding to the second laser beam is not overlapped with the light spot position corresponding to the first laser beam; and finally, the beam combiner driving module 4 controls the laser beam combiner 1 to deflect according to the control signal, so that the spot position corresponding to the second laser beam is overlapped with the spot position corresponding to the first laser beam, namely the second laser beam and the first laser beam are combined.
Therefore, the device can transmit laser beams based on the laser beam combiner, and is a transmission type beam combiner, so that compared with a quick reflector in the prior art, the device has small jitter, and the quality of the combined light beam is improved; in addition, the device controls the deflection of the laser beam combining mirror based on the position of the light spot corresponding to the laser beam detected by the laser detection module, so that all the light spots are overlapped, all the laser beams can be combined, the accurate combination of a plurality of laser beams is realized, and the precision in beam combination is improved; in addition, the device has fewer devices and a simple structure, and realizes the beam combination miniaturization design.
Furthermore, as shown in fig. 2, the laser beam combining mirror 1 includes a transmission mirror 11, a mirror body support plate 12, and two flexible hinges 13; the mirror body supporting plate 12 is of a rectangular plate-shaped structure, the transmission mirror 11 is attached to a first plate surface of the mirror body supporting plate 12, the two flexible hinges 13 are respectively arranged on a second plate surface, opposite to the first plate surface, of the mirror body supporting plate 12, the number of the beam combining mirror driving modules 4 is two, and each beam combining mirror driving module 4 is respectively connected with one flexible hinge 13; wherein the content of the first and second substances,
when the beam combiner driving module 4 receives the control signal, the mirror body supporting plate 12 is driven and controlled to deflect through the flexible hinge 13 connected with the beam combiner driving module according to the control signal, and then the transmission mirror 11 is controlled to deflect.
Specifically, it should be noted herein that the refractive index of the transmission mirror 11 may be greater than a preset value, so as to ensure the beam combining accuracy of the laser.
Specifically, the beam combining control module 3 may send a control signal to each beam combining mirror driving module 4 of the two beam combining mirror driving modules, respectively, for each light spot position except for the received first light spot position, so that each beam combining mirror driving module 4 drives the control mirror body supporting plate 12 to deflect together through the flexible hinge connected thereto according to the control signal received by itself.
It is specific, transmission mirror 11 can locate on the first face of mirror body backup pad 12 through ultraviolet bonding, two flexible hinges 13 can set up respectively in the both ends on the second face of mirror body backup pad 12 in addition, the transmission of laser beam has been sheltered from in the setting of having avoided flexible hinge like this, and through the flexible hinge rather than being connected respectively at two beam combining mirror drive module 4, when driving mirror body backup pad 12 and deflecting, can make the steady deflection of mirror body backup pad 12, thereby reduce the shake when transmission mirror 11 deflects, and then improve the quality of synthetic light beam.
For example, as shown in fig. 3, the laser beam combining mirror 1 is a schematic diagram when combining laser beams by deflection. In fig. 3, it is assumed that the laser beam combining mirror 1 shown by a solid line is in a first state, the laser beam combining mirror 1 shown by a dotted line is in a second state, and a first laser beam and a second laser beam respectively sequentially transmit through the laser beam combining mirror 1. Specifically, when the first laser beam transmits through the laser beam combining mirror 1 in the first state, the first laser beam is perpendicular to the laser beam combining mirror 1, and the first laser beam directly transmits through the laser beam combining mirror 1, so that the optical path is not changed; in addition, when the second laser beam transmits the laser beam combining mirror 1 in the second state, the laser beam combining mirror in the second state is in a state of deflecting by a certain angle through the beam combining driving module 4, at this time, a certain included angle is formed between the second laser beam and the laser beam combining mirror 1, and based on the refraction principle, a refraction phenomenon occurs when the second laser beam transmits the laser beam combining mirror 1, so that a shift is generated in one dimension when the laser beam combining mirror 1 transmits, so that the output position of the second laser beam after the second laser beam transmits the laser beam combining mirror 1 in the second state can be overlapped with the output position of the first laser beam after the first laser beam transmits the laser beam combining mirror 1 in the first state, and thus, the laser beam combining in the spatial time sequence is realized.
In addition, specifically, the beam combiner driving module 4 is a pressure ceramic driver or a voice coil motor. When the beam combiner driving module 4 is a pressure ceramic driver and the pressure ceramic driver receives the control signal, the pressure ceramic driver controls the self expansion amount according to the control signal and drives the mirror body supporting plate to deflect through a flexible hinge connected with the pressure ceramic driver;
when the beam combining mirror driving module 4 is a voice coil motor, and the voice coil motor receives the control signal, the voice coil motor controls the self-rotation according to the control signal, and drives the mirror body supporting plate to deflect through a flexible hinge connected with the voice coil motor.
Specifically, when beam combiner driver module 4 is the pressure ceramic driver, the control signal that the pressure ceramic driver received can be voltage signal, and every pressure ceramic driver all can stretch out and draw back according to the voltage signal that receives this moment, and the voltage signal that receives is different, and the flexible volume of pressure ceramic driver is also different, and two pressure ceramic drivers can be according to the flexible volume of self this moment, through the flexible hinge that is connected with it, drive the deflection of mirror body backup pad jointly to the drive transmission mirror, in order to realize 3 laser beam combiner to the beam combining process of laser beam. In addition, the pressure ceramic driver is connected with the mirror body supporting plate through flexible connection, and the shearing resistance of the pressure ceramic driver is guaranteed.
Furthermore, the laser detection module 2 may be a photoelectric position detector (PSD), a Charge Coupled Device (CCD), or a Complementary Metal Oxide Semiconductor (CMOS) camera. In addition, the beam combination control module 3 may be a field programmable gate array (FPGA for short), a personal computer (PC for short), a complex programmable logic device (CPLD for short), or a programmable logic controller (PLC for short).
Of course, it should be noted herein that the laser detection module 2 may preferably be a PSD; the beam combining control module 3 may preferably be an FPGA.
The working principle of the laser beam combining device in this embodiment is described below by taking the laser detection module 2 as a PSD, the beam combining control module 3 as an FPGA, and the beam combining mirror drive modules 4 as two, and as a pressure ceramic driver as an example.
For example, as shown in fig. 4, the laser beam combiner includes a transmission mirror 11, a mirror support plate 12 and two flexible hinges 13, a PSD2 is disposed in the transmission direction of the laser beam combiner, an FPGA3 is connected to the PSD2 and the two piezoceramic drivers 4, and the two piezoceramic drivers 4 are connected to the two flexible hinges 13. When the laser beam combining device works, with reference to fig. 3, when a first laser beam is input, because the laser beam combining mirror in the first state is perpendicular to the first laser beam, the direction of the first laser beam is not changed after the first laser beam is transmitted, a light spot is formed on the PSD2, and the PSD2 sends the position of the light spot to the FPGA 3; when a second laser beam is input, a light spot is formed on the PSD2 after the second laser beam penetrates through the laser beam combining mirror, the position of the light spot is sent to the FPGA3, at the moment, the FPGA3 respectively controls the two pressure ceramic drivers 4 to stretch and retract according to the positions of the front light spot and the rear light spot, and further controls the laser beam combining mirror to deflect by a small angle.
It should be noted that, the laser beam combining mirror in this embodiment may be a one-dimensional laser beam combining mirror or a two-dimensional laser beam combining mirror, and the combining processes of the laser beams are all the laser beam combining principles explained above.
The above-described embodiments of the apparatus are merely illustrative, and the units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment. One of ordinary skill in the art can understand and implement it without inventive effort.
Through the above description of the embodiments, those skilled in the art will clearly understand that each embodiment can be implemented by software plus a necessary general hardware platform, and certainly can also be implemented by hardware. With this understanding in mind, the above-described technical solutions may be embodied in the form of a software product, which can be stored in a computer-readable storage medium such as ROM/RAM, magnetic disk, optical disk, etc., and includes instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to execute the methods described in the embodiments or some parts of the embodiments.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (5)
1. A laser beam combining apparatus, comprising:
the laser beam combining device comprises a laser beam combining mirror, a laser detection module, a beam combining control module electrically connected with the laser detection module and a beam combining mirror driving module electrically connected with the beam combining control module; wherein the content of the first and second substances,
the laser detection module is arranged in the transmission direction of the laser beam combining mirror, and when multiple paths of laser beams sequentially transmit the laser beam combining mirror, light spots corresponding to each path of laser beams are sequentially formed on the laser detection module, and the light spot positions corresponding to each path of laser beams are sequentially sent to the beam combining control module;
the beam combination control module sequentially receives a plurality of light spot positions sent by the laser detection module, and respectively sends control signals to the beam combination mirror driving module aiming at each light spot position except the received first light spot position;
the beam combining mirror driving module receives the control signal and controls the laser beam combining mirror to deflect according to the control signal so as to enable the corresponding light spot position to be overlapped with the first light spot position;
the laser beam combining mirror comprises a transmission mirror, a mirror body supporting plate and two flexible hinges; the mirror body supporting plate is of a rectangular plate-shaped structure, the transmission mirror is attached to a first plate surface of the mirror body supporting plate, the two flexible hinges are respectively arranged on a second plate surface, opposite to the first plate surface, of the mirror body supporting plate, the number of the beam combining mirror driving modules is two, and each beam combining mirror driving module is respectively connected with one flexible hinge; wherein the content of the first and second substances,
when the beam combining mirror driving module receives the control signal, the deflection of the mirror body supporting plate is driven and controlled through the flexible hinge connected with the beam combining mirror driving module according to the control signal;
the multi-path laser beams comprise a first laser beam and a second laser beam, and the first laser beam and the second laser beam sequentially penetrate through the laser beam combiner;
the laser beam combining mirror comprises a first state and a second state, and the first laser beam is vertical to the laser beam combining mirror in the first state;
the second state is a state that the laser beam combining mirror deflects for a certain angle through the beam combining driving module, and a certain included angle is formed between the second laser beam and the laser beam combining mirror in the second state;
and the output position of the second laser beam after transmitting the laser beam combining mirror in the second state is superposed with the output position of the first laser beam after transmitting the laser beam combining mirror in the first state, so that the spatial time sequence combined beam of the multi-path laser beams is formed.
2. The laser beam combining device of claim 1, wherein the beam combining mirror driving module is a piezo ceramic driver or a voice coil motor; wherein the content of the first and second substances,
when the beam combiner driving module is a pressure ceramic driver and the pressure ceramic driver receives the control signal, the pressure ceramic driver controls the self expansion amount according to the control signal and drives the mirror body supporting plate to deflect through a flexible hinge connected with the pressure ceramic driver;
when the beam combining mirror driving module is a voice coil motor, and the voice coil motor receives the control signal, the voice coil motor controls the self-rotation according to the control signal, and drives the mirror body supporting plate to deflect through a flexible hinge connected with the voice coil motor.
3. The laser beam combining device of claim 1, wherein the laser detection module is a photoelectric position detector PSD, a charge coupled device CCD, or a complementary metal oxide semiconductor CMOS camera.
4. The laser beam combining device according to claim 1, wherein the beam combining control module is a Field Programmable Gate Array (FPGA), a Personal Computer (PC), a Complex Programmable Logic Device (CPLD) or a Programmable Logic Controller (PLC).
5. The laser beam combining device of claim 1, wherein the laser beam is a pulsed laser beam or a quasi-continuous laser.
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| CN114063379A (en) * | 2021-11-22 | 2022-02-18 | 四川长虹电器股份有限公司 | Light source device and projection system |
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| CN103712689B (en) * | 2014-01-02 | 2015-07-01 | 上海朗研光电科技有限公司 | Continuous laser device spectral line width measurement device based on optical frequency comb |
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| CN207719584U (en) * | 2017-12-29 | 2018-08-10 | 北京工业大学 | Intracavitary closes beam multiple wavelength output laser |
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