CN109901301A - A kind of laser beam merging apparatus - Google Patents
A kind of laser beam merging apparatus Download PDFInfo
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- CN109901301A CN109901301A CN201910247793.XA CN201910247793A CN109901301A CN 109901301 A CN109901301 A CN 109901301A CN 201910247793 A CN201910247793 A CN 201910247793A CN 109901301 A CN109901301 A CN 109901301A
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Abstract
The embodiment of the present invention provides a kind of laser beam merging apparatus, including laser light combination mirror, laser acquisition module, conjunction beam control module and light combination mirror drive module；Wherein, laser acquisition module is set in the transmission direction of laser light combination mirror, and in multi-path laser Shu Yici transmission laser light combination mirror, hot spot corresponding with every road laser beam is sequentially formed in laser acquisition module, facula position corresponding to the laser beam of the road Bing Jiangmei, which is successively sent to, closes beam control module；Multiple facula positions that beam control module successively receives the transmission of laser acquisition module are closed, and for each facula position in addition to first facula position received, sends control signal to light combination mirror drive module respectively；Light combination mirror drive module receives control signal, and is deflected according to control signal control laser light combination mirror, so that targeted facula position is Chong Die with first facula position.The embodiment of the present invention improves synthesis beam quality.
Description
Technical field
The present embodiments relate to technical field of laser processing more particularly to a kind of laser beam merging apparatus.
Background technique
Nowadays with the development of the industrial applications such as laser processing, the power of separate unit laser output has been unable to meet growing
Urgent need.And currently in order to improving the output general power of laser, usually used high power bundling device swashs multi beam high power
Light geometry is spliced into a branch of, such as the space of optical fiber laser closes the timing of beam and solid state laser and close Shu Jun and can be realized Gao Gong
The conjunction Shu Jiguang of rate is exported.
But above-mentioned conjunction beam mode is all made of plane mirror control direction of beam propagation, to realize the conjunction beam of laser beam,
There is shake since fast mirror closes beam at this time, cause the quality of light beam after synthesis lower, cannot achieve and precise and stable swash
Combiner.
Summary of the invention
The embodiment of the present invention provides a kind of laser beam merging apparatus, to solve in the prior art when swashing combiner due to quick
There is shake in reflecting mirror, lead to the problem that beam quality is lower after synthesizing.
The embodiment of the present invention provides a kind of laser beam merging apparatus, and the laser beam merging apparatus includes:
Laser light combination mirror, laser acquisition module, the conjunction beam control module being electrically connected with the laser acquisition module and with
The light combination mirror drive module for closing the electrical connection of beam control module；Wherein,
The laser acquisition module is set in the transmission direction of the laser light combination mirror, and saturating in multi-path laser Shu Yici
When penetrating the laser light combination mirror, hot spot corresponding with every road laser beam is sequentially formed in the laser acquisition module, and will be every
Facula position corresponding to the laser beam of road is successively sent to the conjunction beam control module；
The beam control module of closing successively receives multiple facula positions that the laser acquisition module is sent, and connects for removing
Each facula position except first facula position received sends control signal to the light combination mirror drive module respectively；
The light combination mirror drive module receives the control signal, and controls the sharp combiner according to the control signal
Mirror is deflected, so that targeted facula position is Chong Die with first facula position.
Optionally, the laser light combination mirror includes diaphotoscope, mirror body support plate and two flexible hinges；The mirror body support
Plate is rectangular plate-like structure, and the diaphotoscope is attached in the first plate face of the mirror body support plate, described two flexible hinges
It is respectively arranged in the second plate face opposite with first plate face in the mirror body support plate, and the light combination mirror drive module
Quantity be two, each light combination mirror drive module is connect with a flexible hinge respectively；Wherein,
When the light combination mirror drive module receives the control signal, according to the control signal, and by with its
The flexible hinge of connection, the deflection of mirror body support plate described in drive control.
Optionally, the light combination mirror drive module is pressure ceramic driver or voice coil motor；Wherein,
When the light combination mirror drive module is pressure ceramic driver, and the pressure ceramic driver receives the control
When signal processed, the pressure ceramic driver controls the stroke of itself according to the control signal, and by connected to it
Flexible hinge drives the mirror body support plate to deflect；
When the light combination mirror drive module is voice coil motor, and the voice coil motor receives the control signal, institute
It states voice coil motor and itself rotation is controlled according to the control signal, and by flexible hinge connected to it, drive the mirror body
Support plate deflection.
Optionally, the laser acquisition module is photoelectric position detector PSD, charge coupled device CCD or complementary metal oxygen
Compound semiconductor CMOS camera.
Optionally, the conjunction beam control module is on-site programmable gate array FPGA, personal computer PC, complex programmable
Logic device (CPLD) or programmable logic controller (PLC) PLC.
Optionally, the multi-path laser beam is pulse laser beam or quasi-continuous lasing.
Laser beam merging apparatus provided in an embodiment of the present invention, including laser light combination mirror, laser acquisition module, conjunction beam control molding
Block and light combination mirror drive module are capable of forming and every road laser in laser beam transmission laser light combination mirror in laser acquisition module
The corresponding hot spot of beam, and facula position is sent to and closes beam control device, closing beam control module can drive according to facula position
Dynamic light combination mirror drive module, is deflected with drive control laser light combination mirror, so that multiple facula positions are overlapped, i.e.,
So that multi-path laser Shu Jinhang closes beam, in this way based on laser light combination mirror for transmittance light combination mirror, compared with the prior art in reflection
Mirror shake is smaller, improves the quality of synthesis light beam；In addition, laser beam merging apparatus, which is based on facula position, carries out conjunction beam, realization side
Just, it realizes and closes beam Miniaturization Design.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is this hair
Bright some embodiments for those of ordinary skill in the art without creative efforts, can be with root
Other attached drawings are obtained according to these attached drawings.
Fig. 1 is the module frame chart of laser beam merging apparatus in the embodiment of the present invention；
Fig. 2 is the structural schematic diagram of laser light combination mirror in the embodiment of the present invention；
Fig. 3 is the schematic diagram that laser light combination mirror close to laser beam beam in the embodiment of the present invention；
Fig. 4 is the specific schematic diagram of laser beam merging apparatus in the embodiment of the present invention.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
Every other embodiment obtained without creative efforts, shall fall within the protection scope of the present invention.
As shown in Figure 1, for the module diagram of laser beam merging apparatus in the embodiment of the present invention, the laser beam merging apparatus packet
It includes:
Laser light combination mirror 1, laser acquisition module 2, the conjunction beam control module 3 that is electrically connected with the laser acquisition module 2 with
And the light combination mirror drive module 4 being electrically connected with the conjunction beam control module 3；Wherein,
The laser acquisition module 2 is set in the transmission direction of the laser light combination mirror 1, and in multi-path laser Shu Yici
When transmiting the laser light combination mirror 1, hot spot corresponding with every road laser beam is sequentially formed in the laser acquisition module 2, and
Facula position corresponding to every road laser beam is successively sent to the conjunction beam control module 3；
The beam control module 3 of closing successively receives multiple facula positions that the laser acquisition module 2 is sent, and is directed to and removes
Each facula position except first facula position received sends control letter to the light combination mirror drive module 4 respectively
Number；
The light combination mirror drive module 4 receives the control signal, and controls the laser according to the control signal and close
Beam mirror 1 is deflected, so that targeted facula position is Chong Die with first facula position.
Specifically, the multi-path laser beam is pulse laser beam or quasi-continuous lasing.
Specifically, laser light combination mirror 1 is transmission-type light combination mirror, and laser acquisition module 2 is placed in the saturating of laser light combination mirror
It penetrates on direction, this makes when there is laser beam successively transmission laser light combination mirror 1, and different laser beams can be in laser acquisition module 2
Different hot spots are formed, and since facula position is related to the incident angle of laser beam, i.e. the incident angle of laser beam is different, is swashing
Facula position is formed by optical detection module 2 also can be different, when the incident angle of laser beam is identical, in laser acquisition module 2
The facula position of upper formation also can be identical, this enables the device in the present embodiment to determine entering for laser beam based on facula position
Direction is penetrated, and when controlling the overlapping of multiple facula positions, multi-path laser beam is enabled to close beam；In addition, laser acquisition module 2 with
It closes beam control module 3 to connect, this enables laser acquisition module 2 that each facula position of formation is sent to conjunction beam control molding
Block 3；It is connect in addition, closing beam control module 3 with light combination mirror drive module 4, and light combination mirror drive module 4 and laser light combination mirror 1 connect
It connects, this, which enables, closes beam control module 3 based on the facula position received, controls light combination mirror drive module 4 and laser is driven to close
Beam mirror 1 deflects, and is overlapped with the multiple facula positions achieved the purpose that in laser acquisition module 2, to realize and multiple light
The corresponding multi-path laser Shu Jinhang in spot position closes beam.
In the following, based on the above principles, concrete example is illustrated the working principle of laser beam merging apparatus in the present embodiment.
Specifically, assume that multi-path laser beam includes first laser beam and second laser beam, first laser beam and second laser
Shu Yici transmission laser light combination mirror 1.Firstly, after first laser beam transmission laser light combination mirror 1, it can shape in laser acquisition module 2
At hot spot corresponding with first laser beam, and facula position corresponding to first laser beam is sent to and closes beam control module 3,
Beam control module 3 is closed at this time receives facula position corresponding to the first laser beam that laser acquisition module 2 is sent；Then,
After dual-laser beam transmission laser light combination mirror 1, hot spot corresponding with second laser beam will form in laser acquisition module 2, and will
Facula position corresponding to second laser beam, which is sent to, closes beam control module 3, closes beam control module 3 at this time and receives laser acquisition mould
Facula position corresponding to the second laser beam that block 2 is sent, and for facula position corresponding to second laser beam, when detecting
When facula position corresponding to facula position corresponding to second laser beam and first laser beam is underlapped, mould is driven to light combination mirror
Block 4 sends control signal；Finally, light combination mirror drive module 4, according to control signal, control laser light combination mirror 1 is deflected, so that
Facula position corresponding to facula position corresponding to second laser beam and first laser beam overlaps, i.e., so that second laser beam
Beam is closed with first laser beam.
In this way, the device, which is based on laser light combination mirror, is transmissive to laser beam, it is transmission-type light combination mirror, this makes compared to existing
There is the fast mirror in technology, shakes quality that is smaller, and then improving synthesized light beam；In addition, the device is based on laser
The facula position corresponding with laser beam that detecting module is detected, control laser light combination mirror deflection, so that all hot spot weights
It is folded, so that all laser beams can close beam, the accurate conjunction beam of multiple laser beam is realized, is improved accurate when closing beam
Degree；In addition, the device includes that device is less, and structure is simple, realizes and close beam Miniaturization Design.
In addition, further, as shown in Fig. 2, the laser light combination mirror 1 includes diaphotoscope 11, mirror body support plate 12 and two
A flexible hinge 13；The mirror body support plate 12 is rectangular plate-like structure, and the diaphotoscope 11 is attached at the mirror body support plate
In 12 the first plate face, described two flexible hinges 13 are respectively arranged in the mirror body support plate 12 and the first plate face phase
Pair the second plate face on, and the quantity of the light combination mirror drive module 4 is two, and each light combination mirror drive module 4 is respectively with one
Flexible hinge 13 connects；Wherein,
When the light combination mirror drive module 4 receives the control signal, according to the control signal, and by with its
The flexible hinge 13 of connection, mirror body support plate 12 described in drive control deflect, and then control diaphotoscope 11 and deflect.
Specifically, it should be noted that the refractive index of diaphotoscope 11 can be greater than preset value, to guarantee to swash combiner
Accuracy.
Specifically, each facula position that beam control module 3 is directed in addition to first facula position received is closed, it can
A control signal is sent with each light combination mirror drive module 4 respectively into two light combination mirror drive modules, so that each conjunction beam
The control signal that mirror drive module 4 is received according to itself, by flexible hinge connected to it, common drive control mirror body branch
Fagging 12 deflects.
Specifically, diaphotoscope 11 can be set in the first plate face of mirror body support plate 12 by ultraviolet gluing, furthermore two
Flexible hinge 13 can be respectively arranged at the both ends in 12 second plate face of mirror body support plate, and this avoid the settings of flexible hinge
The transmission of laser beam is blocked, and drives mirror body respectively by flexible hinge connected to it in two light combination mirror drive modules 4
When support plate 12 deflects, mirror body support plate 12 is enabled to smoothly to deflect, thus reduce shake when diaphotoscope 11 deflects, into
And improve the quality of synthesis light beam.
For example, as shown in figure 3, being schematic diagram when laser light combination mirror 1 carries out conjunction beam by deflecting to laser beam.Wherein,
Assuming that laser light combination mirror 1 shown in solid is first state in Fig. 3, laser light combination mirror 1 shown in dotted line is the second state,
And there are first laser beam and second laser beam successively transmission laser light combination mirror 1 respectively.Specifically, being in first laser beam transmission
When the laser light combination mirror 1 of first state, since first laser beam is vertical with laser light combination mirror 1, first laser beam it is straight-through transmitted through
Laser light combination mirror 1, optical path does not change；In addition, when second laser beam transmission is in the laser light combination mirror 1 of the second state,
The laser light combination mirror of second state is the state deflected after certain angle by conjunction beam drive module 4, makes second laser at this time
Beam forms an angle with 1 shape of laser light combination mirror, is based on refraction principle, and when second laser beam transmission laser light combination mirror 1 reflects
Phenomenon, thus when transmiting laser light combination mirror 1 in one-dimensional one offset of upper generation, so that second laser beam transmission second
Output position after the laser light combination mirror 1 of state, can with first laser beam transmit first state laser light combination mirror 1 after
Output position coincide, to realize the sharp combiner of space timing.
In addition, specifically, the light combination mirror drive module 4 is pressure ceramic driver or voice coil motor.Wherein, work as institute
Stating light combination mirror drive module 4 is pressure ceramic driver, and when the pressure ceramic driver receives the control signal, institute
The stroke that pressure ceramic driver controls itself according to the control signal is stated, and by flexible hinge connected to it, is driven
Move the mirror body support plate deflection；
When the light combination mirror drive module 4 is voice coil motor, and the voice coil motor receives the control signal, institute
It states voice coil motor and itself rotation is controlled according to the control signal, and by flexible hinge connected to it, drive the mirror body
Support plate deflection.
Specifically, pressure ceramic driver receives when the light combination mirror drive module 4 is pressure ceramic driver
Controlling signal can be voltage signal, and each pressure ceramic driver can be stretched according to the voltage signal received at this time
Contracting, and the voltage signal received is different, the stroke of pressure ceramic driver is not also identical, at this time two pressure ceramic drivings
Device can drive the deflection of mirror body support plate, to drive by coupled flexible hinge according to the stroke of itself jointly
Dynamic diaphotoscope deflection, to realize that laser light combination mirror is to the conjunction beam process of laser beam in Fig. 3.In addition, pressure ceramic driver passes through
Flexible connection is connect with mirror body support plate, ensure that the anti-shear ability of pressure ceramic driver.
In addition, further, laser acquisition module 2 can be photoelectric position detector (abbreviation PSD), charge coupled device
(abbreviation CCD) or complementary metal oxide semiconductor (abbreviation CMOS) camera.In addition, closing beam control module 3 can be that scene can
Program gate array (abbreviation FPGA), personal computer (abbreviation PC), Complex Programmable Logic Devices (abbreviation CPLD) or programmable
Logic controller (abbreviation PLC).
Certainly, it should be noted that laser acquisition module 2 can be preferably PSD；Closing beam control module 3 can be excellent
It is selected as FPGA.
It is below PSD with laser acquisition module 2, conjunction beam control module 3 is FPGA, and the quantity of light combination mirror drive module 4 is
Two, and to be illustrated to the working principle of the laser beam merging apparatus in the present embodiment for pressure ceramic driver.
For example, as shown in figure 4, laser light combination mirror includes diaphotoscope 11, mirror body support plate 12 and two flexible hinges 13,
PSD2 is set in the transmission direction of laser light combination mirror, and FPGA3 is connect with PSD2 and two pressure ceramic driver 4 respectively, and
Two pressure ceramic drivers 4 are connect with two flexible hinges 13 respectively.Wherein, when laser beam merging apparatus works, in conjunction with figure
3, when first laser beam inputs, since the laser light combination mirror and first laser beam that are in first state are perpendicular, first laser beam
Do not change direction after transmission, forms hot spot on PSD2, and facula position is sent to FPGA3 by PSD2；Second laser beam is defeated
It is fashionable, hot spot is formed after transmission laser light combination mirror on PSD2, and facula position is sent to FPGA3, FPGA3 is before at this time
Latter two facula position controls two pressure ceramic drivers 4 respectively and stretches, and then controls laser light combination mirror and deflect small angle
Degree, at this time due to refraction principle, second laser beam is incident to laser light combination mirror at low-angle, then refractive deflection, closes from laser
Beam mirror other side output, so that the offset in an one-dimensional square is generated, so that hot spot position caused by second laser beam
It sets the facula position generated with first laser beam to overlap, realizes that the timing of two-way laser beam closes beam.
Certainly, it should be noted that the laser light combination mirror in the present embodiment can be one-dimensional laser light combination mirror, may be used also
Think two-dimensional laser light combination mirror, the conjunction beam process of laser beam is the sharp combiner principle of above-mentioned elaboration.
The apparatus embodiments described above are merely exemplary, wherein described, unit can as illustrated by the separation member
It is physically separated with being or may not be, component shown as a unit may or may not be physics list
Member, it can it is in one place, or may be distributed over multiple network units.It can be selected according to the actual needs
In some or all of the modules achieve the purpose of the solution of this embodiment.Those of ordinary skill in the art are not paying creativeness
Labour in the case where, it can understand and implement.
Through the above description of the embodiments, those skilled in the art can be understood that each embodiment can
It realizes by means of software and necessary general hardware platform, naturally it is also possible to pass through hardware.Based on this understanding, on
Stating technical solution, substantially the part that contributes to existing technology can be embodied in the form of software products in other words, should
Computer software product may be stored in a computer readable storage medium, such as ROM/RAM, magnetic disk, CD, including several fingers
It enables and using so that a computer equipment (can be personal computer, server or the network equipment etc.) executes each implementation
Method described in certain parts of example or embodiment.
Finally, it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although
Present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: it still may be used
To modify the technical solutions described in the foregoing embodiments or equivalent replacement of some of the technical features；
And these are modified or replaceed, technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution spirit and
Range.
Claims (6)
1. a kind of laser beam merging apparatus, which is characterized in that the laser beam merging apparatus includes:
Laser light combination mirror, laser acquisition module, the conjunction beam control module being electrically connected with the laser acquisition module and with it is described
Close the light combination mirror drive module of beam control module electrical connection；Wherein,
The laser acquisition module is set in the transmission direction of the laser light combination mirror, and transmits institute in multi-path laser Shu Yici
When stating laser light combination mirror, hot spot corresponding with every road laser beam is sequentially formed in the laser acquisition module, the road Bing Jiangmei is swashed
Facula position corresponding to light beam is successively sent to the conjunction beam control module；
The beam control module of closing successively receives multiple facula positions that the laser acquisition module is sent, and receives for removing
First facula position except each facula position, respectively to the light combination mirror drive module send control signal；
The light combination mirror drive module receives the control signal, and according to the control signal control laser light combination mirror into
Horizontal deflection, so that targeted facula position is Chong Die with first facula position.
2. laser beam merging apparatus according to claim 1, which is characterized in that the laser light combination mirror includes diaphotoscope, mirror
Body support plate and two flexible hinges；The mirror body support plate is rectangular plate-like structure, and the diaphotoscope is attached at the mirror body
In first plate face of support plate, described two flexible hinges are respectively arranged in the mirror body support plate and the first plate face phase
Pair the second plate face on, and the quantity of the light combination mirror drive module be two, each light combination mirror drive module is soft with one respectively
Property hinge connection；Wherein,
When the light combination mirror drive module receives the control signal, according to the control signal, and by being connected thereto
Flexible hinge, the deflection of mirror body support plate described in drive control.
3. laser beam merging apparatus according to claim 2, which is characterized in that the light combination mirror drive module is pressure ceramic
Driver or voice coil motor；Wherein,
When the light combination mirror drive module is pressure ceramic driver, and the pressure ceramic driver receives the control and believes
Number when, the pressure ceramic driver controls the stroke of itself according to the control signal, and passes through flexibility connected to it
Hinge drives the mirror body support plate to deflect；
When the light combination mirror drive module is voice coil motor, and the voice coil motor receives the control signal, the sound
Circle motor controls itself rotation according to the control signal, and by flexible hinge connected to it, the mirror body is driven to support
Plate deflection.
4. laser beam merging apparatus according to claim 1, which is characterized in that the laser acquisition module is optoelectronic position spy
Survey device PSD, charge coupled device CCD or complementary metal oxide semiconductor CMOS camera.
5. laser beam merging apparatus according to claim 1, which is characterized in that the conjunction beam control module is field-programmable
Gate array FPGA, personal computer PC, complex programmable logic device (CPLD) or programmable logic controller (PLC) PLC.
6. laser beam merging apparatus according to claim 1, which is characterized in that the laser beam is that pulse laser beam or standard connect
Continuous laser.
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| CN112202047A (en) * | 2020-09-23 | 2021-01-08 | 广东粤港澳大湾区硬科技创新研究院 | Laser device |
| CN114063379A (en) * | 2021-11-22 | 2022-02-18 | 四川长虹电器股份有限公司 | Light source device and projection system |
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