CN105320369B - The manufacture method and its construction of touch-control conductive electrode - Google Patents

The manufacture method and its construction of touch-control conductive electrode Download PDF

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Publication number
CN105320369B
CN105320369B CN201410338419.8A CN201410338419A CN105320369B CN 105320369 B CN105320369 B CN 105320369B CN 201410338419 A CN201410338419 A CN 201410338419A CN 105320369 B CN105320369 B CN 105320369B
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layer
touch
conductive electrode
control conductive
conducting electrodes
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CN105320369A (en
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赖玉豪
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Mianyang Maoyuan New Energy Technology Co ltd
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HSIN YUNG LI ENTERPRISE Co Ltd
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Abstract

The present invention relates to a kind of manufacture method and its construction of touch-control conductive electrode, comprising:A selected default base material, a substrate layer is formed by base material;In forming an at least adhesion layer in base material layer surface;Forming one in attachment layer surface has the shielding layer of grooved lines;An at least metal conducting electrodes are formed in the grooved lines of masking layer surface;Shielding layer is removed to form a metal conducting electrodes with line pattern and remove the adhesion layer between metal conducting electrodes with etching mode, and form an at least weathering layer on metal conducting electrodes surface, accordingly, manufacture method of the present invention can reach the production yield that touch-control conductive electrode electrode circuit is substantially improved, the weatherability for strengthening touch-control conductive electrode electrode circuit, the accurate line footpath width for controlling touch-control conductive electrode electrode circuit and the touch-control conductive electrode electrode circuit that superfine line footpath is made.

Description

The manufacture method and its construction of touch-control conductive electrode
Technical field
It is espespecially a kind of related using shielding layer the present invention relates to a kind of manufacture method and its construction of touch-control conductive electrode Step is made metal conducting electrodes and provides construction and method that metal conducting electrodes layer surface completely coats protection, lifting gold at the same time Belong to the production yield of conductive electrode circuit and the purpose of useful life longevity.
Background technology
Direction with electronics and IT products towards light and shortization is developed, semiconductor making method also towards high density and from The direction of dynamic metaplasia production is advanced, and the known electronic product or equipment with touch-control sensing face, with its touch-control sensing face or The size of contact panel product is gradually increased by small, and material is made by the tin indium oxide that generally uses originally in conductive electrode (ITO) be transformed into metallic conductor electrode, and in its design in order to make the conductive electrode person of being not used of composition panel substrate with Eyes significantly perceive its presence, that is, do not allow conductive electrode by user depending on recognizing, and cause grinding in the industry at present Hair personnel are superfine as its target towards the line footpath width of metal conducting electrodes is made.
The actually structure of common metal conductive electrode 10 is with being made, refering to Figure 1, usually step (1) passes through At least metal conducting electrodes 10 are attached on base material 12 by an adhesion layer 11 (also referred to as following layer), make metal conducting electrodes 10 not Easily by coming off on base material 12, step (2) then will an at least weathering layer 13 (resist layer) it is laminating in the metal conducting electrodes 10 On, step (3) then recycles etching liquid to be etched program (wet etching) and forms 10 electrode wires of metal conducting electrodes Road 14, just completes the manufacture of preliminary 10 electrode circuit 14 of metal conducting electrodes, in addition, subsequently in final sensing electrode product After the completion of, additionally it is possible to spread again with all surfaces for protecting glued membrane 16 (OCA) to carry out 10 electrode circuit 14 of metal conducting electrodes If.
Refer to shown in Fig. 2, the adhesion layer 11 is designed as two layers, is respectively an intermediary layer combined with the base material 12 17 and the conductive basal layer 18 combined with the metal conducting electrodes 10.
However, Wet-type etching is iso (Isotropic), and because being an etch resistant material in the weathering layer 13 Material, cause the weathering layer 13 and the metal conducting electrodes 10 between the two for etching liquid etch-rate gap very Greatly, also, the distribution of the weathering layer 13 formed for step (2) is often a pattern in uneven thickness, therefore, etching is worked as When solution does longitudinal direction etching, probably a serious side etching phenomenon 15 occurs for the metal conducting electrodes 10 among etching process.
Also it is the left and right side part of the metal conducting electrodes 10, especially in other words referring again to shown in Fig. 1 Refer to 10 line footpath of the metal conducting electrodes that width design is less than 5 μm and thickness design is more than 0.3 μ m, it is easier to send out A raw side etching phenomenon 15, causes the etching total area ratio of the metal conducting electrodes 10 is excessive, etches local inequality to make Impedance value into 10 electrode circuit of metal conducting electrodes, 14 line footpath is too big, makes the electricity of metal conducting electrodes 10 what is more The generation of polar curve road 14 one is breaking as a result, the yield and quality of the metal conducting electrodes 10 for being produced manufacturer be not easily-controllable Pipe, actually superfine conductive electrode processs hand root problem on development makes at present.
Furthermore still further, known 10 electrode circuit 14 of metal conducting electrodes generally used in industrial circle In the case that line footpath width is superfine, if without further design protection measure, user is for a long time using plus in ambient oxygen So that 10 electrode circuit of metal conducting electrodes 14 possibly can not reach original predetermined task performance again under change, probably there is contracting The quality such as short sawn timber service life, the yield for influencing the final contact panel finished product that manufacturer is produced and environment durability A variety of situations such as performance.
In addition, foregoing known contact panel can carry out a series of environment measuring experiment of strict regulations, such as:It will touch Control panel carry out 1 it is small when, 85 DEG C, carry out high-temperature heating test experience under 90% humidity, or boiled with 100 DEG C Boiling carries out one long term high temperature hyperbaric environment of simulation for 100 minutes.
In foregoing two kinds of test experiences instantly, hydrone is penetrated into the protection glued membrane 16, and then touches the gold Belong to conductive electrode 10, most probably make the metal conducting electrodes 10 that an oxidative phenomena occur, if it follows that user makes for a long time Produced contact panel is made to foregoing, it forms the impedance value pole of the capacitive sensing of Touch Screen or electronic product can It can be significantly increased, until one normal operating condition of user can not be supplied.
Have and release bright a variety of known contact panel deficiencies that the metal conducting electrodes 10 produced are made according in foregoing Lack, actually the purpose of the invention to be improved.
The content of the invention
It is a primary object of the present invention to provide a kind of correlation step of the shielding layer using one with scheduled circuit pattern The production process of touch-control conductive electrode is made, substitutes known the step of metal conducting electrodes are made with etching technique, reduces and practises The serious lateral etch phenomenon that the metal conducting electrodes known are occurred in ten program process causes the production of metal conducting electrodes The extremely low phenomenon of the yields of product.
Another object of the present invention is to carry out complete weathering layer through in the metal conducting electrodes for forming line pattern The design of protection is coated, user further is greatly reduced in use, conductive electrode is chronically at what aqueous vapor in air was penetrated into Oxidizing process, strengthens corrosion-resistant effect of conductive electrode, extends the service life of the products of touch-control conductive electrode.
Another object of the present invention is touch-control is made using the correlation step of a shielding layer with scheduled circuit pattern With the production process of conductive electrode, it can achieve the purpose that management and control and maintain the line footpath width of each touch-control conductive electrode.
A further object of the present invention is that the design of touch-control conductive electrode structure of the present invention and superfine line footpath can be kept away Exempt from the interference fringe phenomenon (Moire) that human viewable sees to produce, and the light transmittance of increase contact panel light source, raising color Color saturation degree, reduce color offset phenomenon and other effects, there is provided the comfortable human viewable's touch control operation interface of user one.
For up to the purpose, the manufacture method of touch-control conductive electrode of the present invention, (A) selectes a default base material, by institute State base material and form a substrate layer, the substrate layer is that have flexible or do not have flexible (rigid);(B) in the base An at least adhesion layer is formed in material layer surface;(C) forming one in the attachment layer surface has the shielding layer of grooved lines;(D) An at least metal conducting electrodes are formed in the grooved lines of the masking layer surface;(E) remove the shielding layer and form a tool There are the metal conducting electrodes of line pattern and the institute between the metal conducting electrodes line pattern is removed with etching mode Adhesion layer is stated, and an at least weathering layer is formed on the metal conducting electrodes surface.
Wherein, a weathering layer, institute are formed in the outer circumferential surface of metal conducting electrodes in a preferred embodiment, the step (E) Stating weathering layer coordinates the adhesion layer that the metal conducting electrodes with line pattern are isolated from the outside sealing, moreover, The weathering layer, which can be set to one, has the melanism property that can be used in covering the metal conducting electrodes.
In a preferred embodiment, it is weather-proof that the step (D) further forms one first in the upper surface of metal conducting electrodes Layer.
In a preferred embodiment, the step (E) forms one second weathering layer on the surface of metal conducting electrodes.
Furthermore in a preferred embodiment, the step (B) further forms an intermediary in the base material layer surface Layer, form a conductive basal layer in intermediary's layer surface and form an anti oxidation layer in the conductive substrates layer surface with altogether With the composition adhesion layer.
In another preferred embodiment, the step (B) further forms a blackening layer in the base material layer surface, The melanism layer surface forms an intermediary layer and to form a conductive basal layer in intermediary's layer surface described to collectively form Adhesion layer.
In another preferred embodiment, the step (B) further forms a blackening layer in the base material layer surface, The melanism layer surface forms an intermediary layer, forms a conductive basal layer and in the conductive substrates in intermediary's layer surface Layer surface forms an anti oxidation layer to collectively form the adhesion layer.
Moreover, the adhesion layer can be selected from vacuum splashing and plating, chemical plating either macromolecule coating one of which or its Combination is made.
The shielding layer is made with printing either photoresistance exposure developing technique one of which or its combination.
The metal conducting electrodes can be selected from vacuum splashing and plating, evaporation, chemical plating, plating either conducting polymer and apply Cloth one of which or its combination are made.
The weathering layer can be selected from chemical plating, plating either conducting polymer coating one of which or its combination side Formula is made.
Furthermore touch-control conductive electrode of the present invention, includes a substrate layer;An at least adhesion layer, forms a line pattern cloth Arranged on the base material layer surface;One metal conducting electrodes, are connected to the attachment layer surface, and the corresponding line pattern is formed One conducting wire;And a weathering layer, connection are coated on the outer circumferential surface of the metal conducting electrodes, make the conducting wire with it is outer Portion's isolation sealing.
The weathering layer include one first weathering layer be formed at the metal conducting electrodes line pattern upper surface and One second weathering layer, which is further coated on the line pattern outer circumferential surface of the metal conducting electrodes and connects, is coated on the attachment The line pattern outer circumferential surface of layer.
In addition, the adhesion layer can be designed as three kinds of different structure patterns, chat bright as follows:
The adhesion layer of the first include one positioned at the base material layer surface intermediary layer, one be formed at the intermediary layer The conductive basal layer on surface and one be located at the conductive substrates layer surface anti oxidation layer.
Second of the adhesion layer is formed at the blackening layer of the base material layer surface comprising one, one is formed at the melanism The intermediary layer of layer surface and a conductive basal layer for being formed at intermediary's layer surface.
And the third the adhesion layer is formed at the blackening layer of the base material layer surface comprising one, one is formed at institute The intermediary layer of melanism layer surface is stated, one the conductive basal layer of intermediary's layer surface is formed at and one is located at the conductive substrates The anti oxidation layer of layer surface.
And the touch-control further includes the protection adhesive film of the transparent pattern of a formation, the protection glued membrane with conductive electrode Layer is laid in the outer circumferential surface of the substrate layer and the weathering layer.Also, the protection adhesive film be by (poly-) resene or Person is made by acrylic resin one of which.
In addition, a fenestral fabric is presented in the conducting wire, and a ㄇ font structures are presented in the weathering layer.
Wherein, the substrate layer can be made of flexible material either glass plate, and the flexible material is by poly- pair Ethylene terephthalate, polymethyl methacrylate, makrolon, polyphenylene sulphone resin, polyethyleneimine are either poly- Made by acid imide one of which.
The adhesion layer is made by metal, metal oxide, high molecular material either its composite material one of which Into moreover, the metal is to be selected from tungsten, nickel, chromium, copper, vanadium, molybdenum, tin, zinc, cobalt, iron, titanium, aluminium, niobium or its alloy wherein one Made by kind, the metal oxide is by tungsten, nickel, chromium, copper, vanadium, molybdenum, tin, zinc, cobalt, iron, titanium, aluminium, niobium or its alloy respectively Made by one of which oxidation.
The metal conducting electrodes are by the metals such as gold, copper, silver, zinc, aluminium, nickel, tin or its alloy or are by conduction Made by high molecular material one of which.
The weathering layer be by carbon, graphite, metal, metal oxide, be capable of conductive high molecular material either its answer Made by condensation material one of which, moreover, the metal be selected from tungsten, nickel, chromium, copper, aluminium, silver, titanium, molybdenum, tin, zinc, cobalt, Made by iron, niobium or its alloy one of which, the metal oxide be respectively by tungsten, nickel, chromium, copper, aluminium, silver, titanium, molybdenum, tin, Made by zinc, cobalt, iron, niobium or the oxidation of its alloy one of which.
Finally, the thickness of the adhesion layer is between 0.01 μm~1 μm, and the thickness of the metal conducting electrodes is between 0.1 μm ~6 μm and the thickness of the weathering layer are between 0.01 μm~1 μm, and the width of each touch-control conductive electrode is between 0.1 μm ~10 μm.
From preceding description, the method have the characteristics that:Reached using related process such as shielding layers and metal is substantially improved The production yield of conductive electrode electrode circuit and further stably produce each touch-control conductive electrode line footpath width effect Fruit;In addition, carrying out complete cladding protection through the metal conducting electrodes for each formation line pattern, touch-control is thereby lifted With the useful life longevity of conductive electrode electrode circuit product.
Brief description of the drawings
Fig. 1 is the manufacture method flow chart of known metal conducting electrodes;
Fig. 2 is the structure diagram of known adhesion layer;
Fig. 3 A to Fig. 3 B are the manufacture method flow chart of the first preferred embodiment of the invention;
Fig. 4 is the structure diagram of the first preferred embodiment of adhesion layer of the present invention;
Fig. 5 is the structure diagram of the second preferred embodiment of adhesion layer of the present invention
Fig. 6 is the structure diagram of the 3rd preferred embodiment of adhesion layer of the present invention;
Fig. 7 A to Fig. 7 B are the manufacture method flow chart of the second preferred embodiment of the invention;
Fig. 8 A to Fig. 8 B are the manufacture method flow chart of the 3rd preferred embodiment of the invention;
Fig. 9 A to Fig. 9 B are another manufacture method flow chart of the 4th preferred embodiment of the invention;
Figure 10 A to Figure 10 B are the manufacture method flow chart of the 5th preferred embodiment of the invention;
Figure 11 is the first preferred embodiment structure diagram of touch-control conductive electrode of the present invention;
Figure 12 is the second preferred embodiment structure diagram of touch-control conductive electrode of the present invention;
Figure 13 is the 3rd preferred embodiment structure diagram of touch-control conductive electrode of the present invention.
Description of reference numerals:10--- metal conducting electrodes;11--- adhesion layers;12--- base materials;13--- weathering layers; 14--- electrode circuits;15--- side etching phenomenons;16--- protects glued membrane;17--- intermediary layers;18--- conductive basal layers;2--- bases Material;3--- adhesion layers;30--- blackening layers;31--- intermediary layers;32--- conductive basal layers;33--- anti oxidation layers;4--- grooves Circuit;5--- shielding layers;6--- metal conducting electrodes;60--- upper surfaces;61--- outer circumferential surfaces;7--- weathering layers;70--- first Weathering layer;The second weathering layers of 71---;8--- protects adhesive film.
Embodiment
Hereby for ease of further to the present invention construction, use and its feature have deeper one layer of clear and definite, full and accurate understanding With understanding, preferred embodiment is hence enumerated, coordinates diagram to describe in detail as follows:
It refer to shown in Fig. 3 A to Fig. 3 B, the manufacture method of touch-control conductive electrode of the present invention is in the first preferred embodiment In, manufacturing step is chatted bright as follows:
(A) a default base material is selected, a substrate layer 2 is formed by the base material, the substrate layer 2 can be by flexible material Either glass plate is formed, and the flexible material is by polyethylene terephthalate (PET), polymethyl methacrylate (PMMA), makrolon (PC), polyphenylene sulphone resin (PPSU), polyethyleneimine (PEI) or polyimides (PI) its Made by middle one kind;
(B) at least one conductive adhesion layer 3 is formed on 2 surface of substrate layer, wherein, the adhesion layer 3 Vacuum splashing and plating, chemical plating either macromolecule coating one of which or its combination can be selected to be made, and it is described Adhesion layer 3 is as metal, metal oxide, high molecular material either made by its composite material one of which, wherein, it is described The metal of adhesion layer 3 is selected from tungsten (W), nickel (Ni), chromium (Cr), copper (Cu), vanadium (V), molybdenum (Mo), tin (Sn), zinc (Zn), made by cobalt (Co), iron (Fe), titanium (Ti), aluminium (Al), niobium (Nb) or its alloy one of which, the institute of the adhesion layer 3 It is by tungsten (W), nickel (Ni), chromium (Cr), copper (Cu), vanadium (V), molybdenum (Mo), tin (Sn), zinc (Zn), cobalt respectively to state metal oxide (Co), made by iron (Fe), titanium (Ti), aluminium (Al), niobium (Nb) or the oxidation of its alloy one of which.
Refer to shown in Fig. 4, relative to known adhesion layer 11 formed by two layers still further, the present invention in In one first preferred embodiment, the adhesion layer 3 can utilize sputter process respectively sequentially by an intermediary layer 31, a conductive substrates 32 and one anti oxidation layer 33 of layer is made for three layers totally jointly, prior to forming an intermediary layer 31 on 2 surface of substrate layer, in institute 31 surface of intermediary layer is stated to form a conductive basal layer 32 and form an anti oxidation layer 33 on 32 surface of conductive basal layer.
It refer to shown in Fig. 5, in the second preferred embodiment, the adhesion layer 3 can utilize sputter process difference sequentially It is made jointly for totally three layers of a blackening layer 30, an intermediary layer 31 and a conductive basal layer 32, prior to 2 surface of substrate layer One blackening layer 30 of upper formation, forms an intermediary layer 31 on 30 surface of blackening layer and forms one on 31 surface of intermediary layer Conductive basal layer 32.
It refer to shown in Fig. 6, in the 3rd preferred embodiment, the adhesion layer 3 can utilize sputter process difference sequentially It is made jointly for totally four layers of a blackening layer 30, an intermediary layer 31, a conductive basal layer 32 and an anti oxidation layer 33, prior to institute State and a blackening layer 30 is formed on 2 surface of substrate layer, an intermediary layer 31 is formed, in the intermediary layer then at 30 surface of blackening layer 31 surfaces form a conductive basal layer 32 and form an anti oxidation layer 33 on 32 surface of conductive basal layer.
And due in second and third described preferred embodiment the possessed adhesion layer 3 towards 2 side of substrate layer There is a blackening layer 30 to another, the blackening layer 30 is the metal oxide with conductive characteristic either with characteristic against corrosion Made by metallic compound one of which, and 30 thickness of the blackening layer is between the μ m of 5nm~0.1, in other words, by In the material property made by the blackening layer 30 for intrinsic colour blueness, green, purple, brown or black etc. partially more Dark color, helps to absorb reflection light either refracted light on product, therefore, causes the metallic conduction electricity indirectly Pole 6 is not easy substantially to be perceived by product user, effectively reduces the generation of interference fringe phenomenon (moire), is regarded in user with eyes A comfortable effect is supplied when seeing product surface.
The intermediary layer 31 (also referred to as Tie-coat) is to reference to the blackening layer 30 and the conductive basal layer 32, the conductive basal layer 32 (also referred to as Seed layer) has oxidizable characteristic, and following three kinds of sides are utilized relative to known Method avoids the oxidation states of the conductive basal layer 32 from occurring:Method (1) with acid solution remove oxidation conductive basal layer 32, Method (2) temporarily first freeze-drying either low temperature and low humidity preserve and when 12 to 24 is small it is interior using the conductive basal layer 32, Method (3) is preserved with vacuum and in use the conductive basal layer 32 in three to six months, however, described in present invention system is designed at 32 surface of conductive basal layer forms an anti oxidation layer 33, avoids the oxidation of the conductive basal layer 32.
Referring again to the step (B) that shown in Fig. 3 A to Fig. 3 B, continues, (C) forms one on 3 surface of adhesion layer to be had The shielding layer 5 of grooved lines 4, wherein, and the shielding layer 5 is to coordinate photosensitive resist either using photoresistance exposure developing technique Mode of printing, which coordinates, to be used made by either its combination of high molecular material one of which, hereby it is possible to be appreciated that the present invention's is recessed The width on line of rabbet joint road 4 can by it is foregoing chat it is bright in a manner of accurately controlled;
(D) an at least metal conducting electrodes 6, the metal are formed in the grooved lines 4 between 5 surface of shielding layer Conductive electrode 6 is restricted in the grooved lines 4, thereby it is ensured that the line footpath of the metal conducting electrodes 6 produced Width, wherein, the metal conducting electrodes 6 can be selected from vacuum splashing and plating, evaporation, chemical plating, plating either conductive polymer Son coating one of which or its combination are made, the metal conducting electrodes 6 be by golden (Au), copper (Cu), silver-colored (Ag), Metal or its alloy such as zinc (Zn), aluminium (Al), nickel (Ni), tin (Sn) or be made by conducting polymer composite one of which Into.
(E) remove the shielding layer 5 and form the metal conducting electrodes 6 with line pattern, and with etching mode Remove the adhesion layer 3 between the metal conducting electrodes 6, and in the outer circumferential surface 61 of the metal conducting electrodes 6 and described 3 surface of adhesion layer formed a ㄇ font patterns weathering layer 7, the weathering layer 7 by it is described have line pattern the gold Belong to conductive electrode 6 and be isolated from the outside sealing, wherein, the weathering layer 7 can be selected from chemical plating, plating either conductive polymer Son coating one of which or its combination are made, and the weathering layer 7 is by carbon (C), graphite (graphite), gold Category, metal oxide, be capable of made by high molecular material either its composite material one of which of conduction.
The preliminary production of the touch-control conductive electrode of the present invention is collectively forming by the step (A), (B), (C), (D), (E) Product, and each touch-control can be accurately adjusted between 0.1 μm~10 μm with the width of conductive electrode.
Wherein, the metal of the weathering layer 7 be selected from tungsten (W), nickel (Ni), chromium (Cr), copper (Cu), aluminium (Al), Silver-colored (Ag), titanium (Ti), molybdenum (Mo), tin (Sn), zinc (Zn), cobalt (Co), iron (Fe), niobium (Nb) or its alloy one of which are made Into the metal oxide of the weathering layer 7 is by tungsten (W), nickel (Ni), chromium (Cr), copper (Cu), aluminium (Al), silver respectively (Ag), titanium (Ti), molybdenum (Mo), tin (Sn), zinc (Zn), cobalt (Co), iron (Fe), niobium (Nb) or the oxidation of its alloy one of which are made Into.
Again into for a more step, the weathering layer 7, which can be set to one, has the melanism property of darker color, therefore, Connect and cause the metal conducting electrodes 6 to be not easy substantially to be perceived by product user, effectively reduce the hair of interference fringe phenomenon (moire) It is raw, in user with eyes depending on seeing product surface when supply a comfortable effect.
(F) after the present invention is sent to the other processing programs that continue of other destinations progress, coating can be utilized either Sealing is completely covered into a transparent protection adhesive film 8 (Optically clear adhesive) is about in the mode of direct pad pasting In the conductive electrode, make a step of protection present invention constructs, wherein, the protection adhesive film 8 is by (poly-) resene (Silicone) or made by acrylic resin (Acrylic) one of which.
Designed relative to the protection adhesive film 8 of the present invention, be that conductive electrode is coated on to the protection adhesive film 8 completely In, and the protection adhesive film 8 forms the surface pattern of an almost flat relative to the substrate layer 2, can't be in line The touch-control of road pattern is with leaving gap between conductive electrode.
The present invention electrode circuit can structure in the substrate layer 2 wherein one side (single side) (not shown), or Person is positioned at two-sided, multiple surfaces even positioned at the substrate layer 2 of the substrate layer 2.
Refer to shown in Fig. 7 A to Fig. 7 B, in the second preferred embodiment, manufacturing step (A), step (B), step (C) and Step (D) is all identical with first embodiment, only has otherness in step (E) and step (F):(E) 5 shape of shielding layer is removed The metal conducting electrodes 6 that there is line pattern into one, and it is described attached between the etching mode removal metal conducting electrodes 6 Layer 3, and the weathering layer 7 of the one ㄇ font patterns of formation of line pattern outer circumferential surface 61 in the metal conducting electrodes 6.
(F) a transparent protection adhesive film 8 (Optically clear adhesive) is completely covered described in being sealed in The surface of substrate layer 2, the adhesion layer 3 and the weathering layer 7 forms a sealing pattern.
The weathering layer 7, which is further illustrated, can be set to be formed at the metallic conduction comprising one first weathering layer 70 60 and 1 second weathering layer 71 of line pattern upper surface of electrode 6 is coated on outside the line pattern of the metal conducting electrodes 6 Side face 61, accordingly, there is following three, the 4th and the 5th embodiment then:
Refer to shown in Fig. 8 A to Fig. 8 B, in the 3rd preferred embodiment, manufacturing step (A), step (B), step (C) and Step (F) is all identical with first embodiment, only has otherness in step (D), step (E):Step (D) is in the shielding layer 5 An at least metal conducting electrodes 6 are formed in the grooved lines 4 on surface, and further in the upper surface of the metal conducting electrodes 6 60 form one first weathering layer 70.
Furthermore step (E) removal one metal conducting electrodes 6 with line pattern of the formation of shielding layer 5, and with Etching mode removes the adhesion layer 3 between the metal conducting electrodes 6, and in the outer circumferential surface of the metal conducting electrodes 6 61st, 70 outer circumferential surface of the first weathering layer and together with 3 outer circumferential surface of adhesion layer formed one second weathering layer 71, described second Weathering layer 71 coordinates the adhesion layer 3 that the metal conducting electrodes 6 are isolated from the outside sealing.
Refer to shown in Fig. 9 A to Fig. 9 B, in the 4th preferred embodiment, manufacturing step (A), step (B), step (C) and Step (D) is all identical with the 3rd preferred embodiment, only has otherness in step (E) and step (F):Remove the shielding layer 5 Forming one has the metal conducting electrodes 6 of line pattern, and between the etching mode removal metal conducting electrodes 6 The adhesion layer 3, and form one second weathering layer 71 in the line pattern outer circumferential surface 61 of the metal conducting electrodes 6, described the Two weathering layers 71 coordinate the adhesion layer 3 and first weathering layer 70 that the metal conducting electrodes 6 are isolated from the outside sealing.
Step (F):It is completely covered with a transparent protection adhesive film 8 and is sealed in the substrate layer 2, the adhesion layer 3 The outer circumferential surface of outer circumferential surface, the outer circumferential surface of first weathering layer 70 and second weathering layer 71 forms a sealing pattern.
Consequently, it is possible to weathering layer 7 of the present invention is coated on 6 periphery of the metal conducting electrodes with line pattern completely The design in face 61 can reach prevents user under use different from known, extends the product of touch-control conductive electrode and makes With the purpose of the time limit.
Again still further, the shielding layer 5 with scheduled circuit pattern is utilized to manufacture the metal in processing procedure of the present invention The line pattern of conductive electrode 6, just can reduce the known serious side etching phenomenon 15 of appearance and cause the product of each conductive electrode The extremely low phenomenon of yield and the inconsistent situation of line footpath width, in other words, the present invention can reach the lifting metal The production yield of conductive electrode 6, and management and control maintains two projects of the line footpath width of each metal conducting electrodes 6.
In addition, refer to shown in Figure 10 A to Figure 10 B, in the 5th preferred embodiment, manufacturing step (A), step (B), step Suddenly (C) and step (D) are all identical with the 4th preferred embodiment, only have otherness in step (E) and step (F):Described in removal Shielding layer 5, which forms one, has the metal conducting electrodes 6 of line pattern, and removes the metal conducting electrodes with etching mode Adhesion layer 3 between 6.
Step (F):It is completely covered with a transparent protection adhesive film 8 and is sealed in the substrate layer 2, the adhesion layer 3 The outer circumferential surface of outer circumferential surface, the outer circumferential surface 61 of the metal conducting electrodes 6 and the weathering layer 7 forms a sealing pattern.
It refer to shown in Figure 11 to Figure 13, touch-control conductive electrode of the present invention is chatted in bright preferred embodiment in following, main Comprising:One substrate layer 2, at least an adhesion layer 3, at least a metal conducting electrodes 6, at least four parts such as weathering layer 7, institute One of glass, plastic plate and plastic foil etc. can be selected from by stating substrate layer 2, and the touch-control conductive electrode of the present invention can Made by wherein one side either at least one side in the substrate layer 2.
The present invention for one as the substrate layer 2 made by selected substrate layer 2, by least one conductive adhesion layer 3 go to form a line pattern and are laid in 2 surface of substrate layer, make one to be led by an at least metal through the adhesion layer 3 again Electrode 6 is connected to 2 surface of substrate layer.
When the touch-control of the present invention is actually manufactured with conductive electrode product, the width of each conductive electrode between Between 0.1 μm~10 μm, if moreover, from the point of view of with top view, correspond to the line pattern with the metal conducting electrodes 6 and formed One is presented the conducting wire of fenestral fabric, if from the point of view of with sectional view, a connection is coated on the outer of the metal conducting electrodes 6 Side face 61 and present ㄇ font structures weathering layer 7 and be coated with or fit in institute using the protection adhesive film 8 of a transparent pattern State the outer circumferential surface of substrate layer 2 and the weathering layer 7.
It refer to shown in Fig. 8, in the first preferred embodiment, the weathering layer 7 is electric together with the metallic conduction is formed at While outer circumferential surface 61 of pole 6, extended by the weathering layer 7 and connect the outer circumferential surface for being coated on the adhesion layer 3, the weathering layer 7 one ㄇ font structures of final presentation, the weathering layer 7 can also be set to have effects that one while have protection and cover deeper The melanism property of color color;
Either in the second preferred embodiment, it refer to shown in Fig. 9, the weathering layer 7 can be designed as being formed at institute State whole outer circumferential surfaces 61 of metal conducting electrodes 6 and a ㄇ font structures are presented;
And in the 3rd preferred embodiment, refer to shown in Figure 10, be in structure relative to first preferred embodiment, The first weathering layer 70 of a upper surface 60 for being located at the metal conducting electrodes 6 is initially formed in the metal conducting electrodes 6, with institute While the second weathering layer 71 is stated together with outer circumferential surface 61 for being formed at the metal conducting electrodes 6, by second weathering layer 71 Extension connection is coated on the outer circumferential surface of the adhesion layer 3, and therefore, first and second described weathering layer 70,71 just coordinates described attached Layer 3 can make each conducting wire be isolated from the outside sealing jointly, first and second final described weathering layer 70,71 is in jointly An existing ㄇ font structures;
It is in the described 3rd preferable implementation, only in described weather-proof with first in the 4th preferred embodiment (not shown) 6 outer circumferential surface 61 of the metal conducting electrodes of layer 70 re-forms second weathering layer 71, final first weathering layer 70 And a ㄇ font structures are presented in second weathering layer 71 jointly.
Furthermore the thickness of adhesion layer 3 of the invention is set between 0.01 μm~1 μ m;And the metallic conduction The thickness of electrode 6 is set between 0.1 μm~6 μ ms;And the thickness of the weathering layer 7 is set between 0.01 μm~1 Between μ m.
Accordingly, the structure pattern presented relative to known Fig. 1 metal conducting electrodes 10, touch-control conductive electrode of the present invention The position distribution design of first weathering layer 70 and second weathering layer 71 in first to fourth preferred embodiment will The metal conducting electrodes 6 and adhesion layer 3 are all coated in the weathering layer 7, in high-temperature, high humility or low temperature Under environment, product of the invention has the high weather-proof property of environment and yield high, also, for leading with thinner width The capacitance sensitivity of the touch-control sensing (Sensor) of the product of electrode also has stable benefit.
Moreover, the conductive electrode can utilize at least one protection adhesive film 8 that cladding, touch-control of the present invention is fully sealed Can be actually reached with conductive electrode prevents user under long-time service, is wrapped by inside the protection adhesive film 8 The conductive electrode be chronically at the oxidizing process that aqueous vapor in air is occurred, the present invention just can complete enhancing conductive electrode Resistance to oxidation effect, extend touch-control conductive electrode service life of the products purpose.
Finally, the structure pattern presented relative to known Fig. 1 metal conducting electrodes 10, touch-control conductive electrode of the present invention The weathering layer 7 that 6 surface of the metal conducting electrodes in foregoing preferred embodiment is formed also can be designed further To design a blackening layer 30 in the melanism property with dark color and the adhesion layer 3, positioned at 2 first face of substrate layer 7 position of the weathering layer and interlaced positioned at 30 position of the blackening layer in 2 second face of substrate layer, this structure is interlocked Design method coordinates the weathering layer 7 and the blackening layer 30 with melanism property, and can allow the eye gaze of user When touch-control conductive electrode of the present invention, human eye is first depending on seeing weathering layer 7 described in the first face, and it is described resistance to depending on seeing to work as human eye When waiting the gap between the weathering layer 7 of layer 7, transmitted light reaches blackening layer 30 described in the second face after entering the substrate layer 2, Therefore, during compared to known human eye depending on seeing the gap between the metal conducting electrodes 10 and the metal conducting electrodes 10, Conventional construction can allow human eye directly substantially to be felt and find the metal conducting electrodes 10 in the second face, and structure design of the present invention can be kept away Exempt from metal conducting electrodes 6 described in the second face by human eye depending on seeing it, form an effect completely covered, therefore, the present invention is again Strengthen avoiding the eyes of user from visually seeing the interference fringe phenomenon (Moire) of contact panel interface surface and inspect tactile with lifting The effect of controlling metal conducting electrodes 6 below panel interface.
It is described above to be merely exemplary for the purpose of the present invention, and it is nonrestrictive, and those of ordinary skill in the art understand, In the case where not departing from the spirit and scope that claim is limited, can many modifications may be made, change or equivalent, but will all fall Enter within protection scope of the present invention.

Claims (25)

1. a kind of manufacture method of touch-control conductive electrode, it is characterised in that include:
(A) a default base material is selected, a substrate layer is formed by the base material;
(B) an at least adhesion layer is formed in the base material layer surface;
(C) forming one in the attachment layer surface has the shielding layer of grooved lines;
(D) an at least metal conducting electrodes are formed in the grooved lines of the masking layer surface;And
(E) remove the shielding layer and form the metal conducting electrodes with line pattern and described in removing with etching mode The adhesion layer between metal conducting electrodes line pattern, and it is weather-proof in metal conducting electrodes surface formation at least one Layer.
2. the manufacture method of touch-control conductive electrode according to claim 1, it is characterised in that:In the step (E), The outer circumferential surface of the metal conducting electrodes forms the weathering layer, and the weathering layer coordinates the adhesion layer to have line by described in The metal conducting electrodes of road pattern are isolated from the outside sealing.
3. the manufacture method of touch-control conductive electrode according to claim 2, it is characterised in that:The weathering layer has energy It is enough in the melanism property for covering the metal conducting electrodes.
4. the manufacture method of touch-control conductive electrode according to claim 1, it is characterised in that:In the step (D), into One step forms one first weathering layer in the upper surface of the metal conducting electrodes.
5. the manufacture method of touch-control conductive electrode according to claim 1, it is characterised in that:In the step (E), also One second weathering layer is formed on the surface of the metal conducting electrodes.
6. the manufacture method of touch-control conductive electrode according to claim 1, it is characterised in that:The step (B) is into one Step forms an intermediary layer in the base material layer surface, forms a conductive basal layer in intermediary's layer surface and led described Electric substrate surface forms an anti oxidation layer, to collectively form the adhesion layer.
7. the manufacture method of touch-control conductive electrode according to claim 1, it is characterised in that:In the step (B), into One step forms a blackening layer in the base material layer surface, and an intermediary layer is formed and in the intermediary in the melanism layer surface Layer surface forms a conductive basal layer to collectively form the adhesion layer.
8. the manufacture method of touch-control conductive electrode according to claim 1, it is characterised in that:The step (B) is into one Step forms a blackening layer in the base material layer surface, and an intermediary layer is formed, in the intermediary layer table in the melanism layer surface Face forms a conductive basal layer and forms an anti oxidation layer in the conductive substrates layer surface, to collectively form the attachment Layer.
9. the manufacture method of touch-control conductive electrode according to claim 1, it is characterised in that:The adhesion layer is selected from Vacuum splashing and plating, chemical plating either macromolecule coating one of which or its combination are made.
10. the manufacture method of touch-control conductive electrode according to claim 1, it is characterised in that:The shielding layer be with Printing either photoresistance exposure developing technique one of which or its combination are made.
11. the manufacture method of touch-control conductive electrode according to claim 1, it is characterised in that:The metallic conduction electricity Pole is carried out selected from vacuum splashing and plating, evaporation, chemical plating, plating either conducting polymer coating one of which or its combination It is made.
12. the manufacture method of touch-control conductive electrode according to claim 1, it is characterised in that:The weathering layer is selected from It is made in chemical plating, plating either conducting polymer coating one of which or its combination.
13. a kind of touch-control conductive electrode, it is characterised in that include:
One substrate layer;
An at least adhesion layer, forms a line pattern for being laid in the base material layer surface;
One metal conducting electrodes, are connected to the attachment layer surface, and the corresponding line pattern forms a conducting wire;And
One weathering layer, connection are coated on the outer circumferential surface of the metal conducting electrodes, the conducting wire is isolated from the outside sealing, The weathering layer be by carbon, graphite, metal, metal oxide, be capable of conductive high molecular material either its composite material its It is middle one kind made by, the metal be selected from tungsten, nickel, chromium, copper, aluminium, silver, titanium, molybdenum, tin, zinc, cobalt, iron, niobium or its alloy its It is middle one kind made by, the metal oxide be respectively by tungsten, nickel, chromium, copper, aluminium, silver, titanium, molybdenum, tin, zinc, cobalt, iron, niobium or its Made by the oxidation of alloy one of which.
14. touch-control conductive electrode according to claim 13, it is characterised in that:It is weather-proof that the weathering layer includes one first Layer and one second weathering layer, first weathering layer is formed at the line pattern upper surface of the metal conducting electrodes, described Second weathering layer, which is further coated on the line pattern outer circumferential surface of the metal conducting electrodes and connects, is coated on the adhesion layer Line pattern outer circumferential surface.
15. touch-control conductive electrode according to claim 13, it is characterised in that:The adhesion layer includes one positioned at described The intermediary layer of base material layer surface, one are formed at the conductive basal layer of intermediary's layer surface and one are located at the conductive basal layer The anti oxidation layer on surface.
16. touch-control conductive electrode according to claim 13, it is characterised in that:The adhesion layer is formed at institute comprising one The blackening layer of base material layer surface is stated, one the intermediary layer of the melanism layer surface is formed at and one is formed at intermediary's layer surface Conductive basal layer.
17. touch-control conductive electrode according to claim 13, it is characterised in that:The adhesion layer is formed at institute comprising one The blackening layer of base material layer surface is stated, one the intermediary layer of the melanism layer surface is formed at, one is formed at intermediary's layer surface Conductive basal layer and one be located at the conductive substrates layer surface anti oxidation layer.
18. touch-control conductive electrode according to claim 13, it is characterised in that:The touch-control conductive electrode is further Include a protection adhesive film for forming transparent pattern, the protection adhesive film is laid in the substrate layer and the weathering layer Outer circumferential surface.
19. touch-control conductive electrode according to claim 13, it is characterised in that:It is latticed that the conducting wire is presented one Structure, and a ㄇ font structures are presented in the weathering layer.
20. touch-control conductive electrode according to claim 13, it is characterised in that:The substrate layer by flexible material or It is that glass plate is formed, the flexible material is by polyethylene terephthalate, polymethyl methacrylate, poly- carbonic acid Made by ester, polyphenylene sulphone resin, polyethyleneimine either polyimides one of which.
21. touch-control conductive electrode according to claim 13, it is characterised in that:The adhesion layer is by metal, metal Made by oxide, high molecular material either its composite material one of which.
22. touch-control conductive electrode according to claim 21, it is characterised in that:The metal be selected from tungsten, nickel, Made by chromium, copper, vanadium, molybdenum, tin, zinc, cobalt, iron, titanium, aluminium, niobium or its alloy one of which, the metal oxide be respectively by Made by tungsten, nickel, chromium, copper, vanadium, molybdenum, tin, zinc, cobalt, iron, titanium, aluminium, niobium or the oxidation of its alloy one of which.
23. touch-control conductive electrode according to claim 13, it is characterised in that:The metal conducting electrodes be by gold, Copper, silver, zinc, aluminium, nickel, tin metal or its alloy or be as made by conducting polymer composite one of which.
24. touch-control conductive electrode according to claim 13, it is characterised in that:The thickness of the adhesion layer is between 0.01 μm~1 μm, the metal conducting electrodes thickness is between 0.1 μm~6 μm and the thickness of the weathering layer is between 0.01 μm~1 μ m。
25. touch-control conductive electrode according to claim 13, it is characterised in that:Each touch-control conductive electrode Width is between 0.1 μm~10 μm.
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CN110032285A (en) * 2018-01-11 2019-07-19 南昌欧菲显示科技有限公司 Touch module and its manufacturing method
CN110032284A (en) * 2018-01-11 2019-07-19 南昌欧菲显示科技有限公司 Touch module and its manufacturing method
CN109375815A (en) * 2018-11-16 2019-02-22 信利光电股份有限公司 A kind of the melanism method and metal grill touch screen of metal grill touch screen
CN111627595B (en) * 2019-02-28 2022-02-22 昆山工研院新型平板显示技术中心有限公司 Lead, preparation method of lead and flexible display device
CN113031798B (en) 2019-12-24 2022-04-08 宸美(厦门)光电有限公司 Touch panel and manufacturing method thereof

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