CN105318901A - Surface acoustic wave resonator type impedance sensor and surface acoustic wave resonator type impedance detection system - Google Patents
Surface acoustic wave resonator type impedance sensor and surface acoustic wave resonator type impedance detection system Download PDFInfo
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- CN105318901A CN105318901A CN201410376057.1A CN201410376057A CN105318901A CN 105318901 A CN105318901 A CN 105318901A CN 201410376057 A CN201410376057 A CN 201410376057A CN 105318901 A CN105318901 A CN 105318901A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/54—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using means specified in two or more of groups G01D5/02, G01D5/12, G01D5/26, G01D5/42, and G01D5/48
- G01D5/56—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using means specified in two or more of groups G01D5/02, G01D5/12, G01D5/26, G01D5/42, and G01D5/48 using electric or magnetic means
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/38—Impedance-matching networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/25—Constructional features of resonators using surface acoustic waves
Abstract
The present invention discloses a surface acoustic wave resonator type impedance sensor and a surface acoustic wave resonator type impedance detection system. The surface acoustic wave resonator type impedance sensor comprises a first antenna, a matching network, a reflecting grating and an interdigital transducer. At least the reflecting grating and the interdigital transducer are arranged on a piezoelectric substrate. The matching network includes an optimal matching network consisting at least one capacitor and at least one inductor, and is connected in parallel with an external sensor. The external sensor is a capacitive sensor or an inductive sensor. According to the surface acoustic wave resonator type impedance sensor, an external sensor is accessed into a matching network, and the structure and the arrangement of a piezoelectric substrate cannot be changed so that the perceived performance of the sensor may be not influenced and the complexity and processing steps such as adding arrangement of pins and the like may not be increased; and moreover, the external sensor is able to be integrated into the matching network and has high integration level so that the packaging structure may be further reduced and the whole size of the sensor may be decreased.
Description
Technical field
The present invention relates to a kind of impedance transducer, specifically, relate to a kind of SAW (Surface Acoustic Wave) resonator type impedance transducer and detection system.
Background technology
Current many special occasions, line between sensor and unit under test normally cannot realize, wireless senser must be adopted realize measurement, surface acoustic wave sensor utilizes extraneous factor (as temperature, pressure, magnetic field, electric field etc.) transport property of surface acoustic wave can be affected and realize a kind of device of sensing.
The principle of work of passive sonic surface wave sensor is: first, and RF interrogation unit sends high frequency challenge signal, and signal is received by the antenna be directly connected with the interdigital transducer (IDT) on surface acoustic wave chip, converts electric signal to.Interdigital transducer converts the electrical signal to the surface acoustic wave propagated at piezoelectric crystal surface, and part acoustic surface wave energy is reflected by the reflection strip on travel path, then converts acoustical signal to electric signal by interdigital transducer, is then sent by antenna.
Application publication number is the Chinese patent application file of CN102052986A, a kind of wireless passive sonic surface wave impedance load sensor is disclosed, shown in Figure 1, comprise antenna, I/O interdigital transducer 1, piezoelectric substrate 2, reference reflecting grating 3, measure the external sensor of reflecting grating 4 and impedance variation, the wireless signal that RF interrogation unit is launched receives through described antenna and is converted into surface acoustic wave by I/O interdigital transducer 1, described piezoelectric substrate 2 is propagated, arrive described reference reflecting grating 3 and produce reflection after measuring reflecting grating 4, due to reflecting grating 4 external sensor, when external sensor impedance variation, the external electrical conditions of reflecting grating 4 is changed, reflecting grating 4 reflecting properties also can change.The weak point of this technical scheme is: 1, reflecting grating 4 is connected with external sensor, because reflecting grating 4 is arranged on piezoelectric substrate, and piezoelectric substrate is as the perception part of passive sonic surface wave, generally to keep clean, totally, because surface acoustic wave is propagated on piezoelectric substrate surface, dust impurity can affect acoustic surface wave propagation performance, finally affect sensor senses performance, if by the words that reflecting grating 4 is connected with external sensor, ensure very much the cleanliness factor of piezoelectric substrate, cause affecting sensor senses precision, even if adopt shell to be encapsulated sensor piezoelectric substrate part, this just needs to be connected with pin by reflecting grating by spot welding metal lead wire, this pin is connected with external sensor again, add processing step and complexity.2, be connected external sensor by lead-in wire, pin with wire, be unfavorable for integrated.
Summary of the invention
The present invention takies bulky technical matters to solve existing surface acoustic wave sensor, provides a kind of SAW (Surface Acoustic Wave) resonator type impedance transducer.
In order to solve the problems of the technologies described above, the present invention is achieved by the following technical solutions:
A kind of SAW (Surface Acoustic Wave) resonator type impedance transducer, comprise the first antenna, matching network, reflecting grating and interdigital transducer, described at least reflecting grating and interdigital transducer are arranged on piezoelectric substrate, described matching network comprises the optimum matching network be made up of at least one electric capacity and at least one inductance, described optimum matching network is also parallel with external sensor, and described external sensor is condenser type or inductance type transducer.
Further, described optimum matching network is in series by the first electric capacity (C1) and the first inductance (L1) and forms, and described external sensor is connected in parallel on the two ends of the series circuit of described optimum matching network composition.
Further, described optimum matching network is in series by the first electric capacity (C1) and the first inductance (L1) and forms, and described external sensor is connected in parallel on the two ends of described first electric capacity (C1).
Further, described optimum matching network is in series by the first electric capacity (C1) and the first inductance (L1) and forms, and described external sensor is connected in parallel on the two ends of described first inductance (L1).
Further again, described external sensor is integrated in matching network or by wire and accesses outward in matching network.
Based on above-mentioned a kind of SAW (Surface Acoustic Wave) resonator type impedance transducer, invention also provides a kind of SAW (Surface Acoustic Wave) resonator type impedance detection system, comprise reader, signal processing module, and impedance transducer, described reader is provided with the second antenna, described impedance transducer comprises the first antenna, matching network, reflecting grating, and interdigital transducer, described at least reflecting grating, and interdigital transducer is arranged on piezoelectric substrate, described matching network comprises the optimum matching network be made up of at least one electric capacity and at least one inductance, described optimum matching network is also parallel with external sensor, described external sensor is condenser type or inductance type transducer.
Compared with prior art, advantage of the present invention and good effect are: SAW (Surface Acoustic Wave) resonator type impedance transducer of the present invention, 1, by external sensor is accessed in matching network, do not change structure and the layout of piezoelectric substrate, therefore can not affect the perceptual performance of sensor, detect degree of accuracy also corresponding raising; 2, do not change structure and the layout of piezoelectric substrate, therefore can not bring and the processing step and complexity that pin etc. increases is set; 3, external sensor can be integrated in matching network, and integrated level is high, reduces encapsulating structure further, reduces sensor overall volume.
After reading the detailed description of embodiment of the present invention by reference to the accompanying drawings, the other features and advantages of the invention will become clearly.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is a kind of wireless passive sonic surface wave impedance load sensor construction schematic diagram of the prior art;
Fig. 2 is a kind of example structure schematic diagram of SAW (Surface Acoustic Wave) resonator type impedance transducer proposed by the invention;
Fig. 3 is the circuit block diagram of Fig. 2 middle impedance sensor;
Fig. 4 is the external structural drawing being connected in parallel on the matching network two ends that described first electric capacity and the first inductance are composed in series of external sensor;
Fig. 5 is the structural drawing that external sensor is integrated in matching network inside;
Fig. 6 is the external structural drawing being connected in parallel on described first inductance two ends of external sensor;
Fig. 7 is resonator equivalent-circuit model figure in embodiment three;
Fig. 8 is a kind of embodiment system block diagram of SAW (Surface Acoustic Wave) resonator type impedance detection system proposed by the invention.
embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Embodiment one, shown in Figure 2, present embodiments provide a kind of SAW (Surface Acoustic Wave) resonator type impedance transducer, comprise the first antenna 101, matching network 102, reflecting grating 103 and interdigital transducer 104, at least reflecting grating 103 and interdigital transducer 104 are arranged on piezoelectric substrate 105, shown in Figure 3, matching network 102 comprises the optimum matching network be made up of at least one electric capacity and at least one inductance, this optimum matching network is also parallel with external sensor, and described external sensor is condenser type or inductance type transducer.The principle of work of the SAW (Surface Acoustic Wave) resonator type impedance transducer of the present embodiment is: external sensor is condenser type or inductance type transducer, this condenser type or inductance type transducer are by tested mechanical quantity, as displacement, pressure etc. are converted to the sensor of electric capacity or inductance value change, in the technical program, by setting up external sensor on matching network, when the mechanical quantity of measurand is (as displacement, the conversions such as pressure) when changing, be presented as that capacitance or the inductance value of external sensor change, because external sensor is connected in parallel in matching network, therefore the impedance of matching network changes, therefore the first antenna 101 receives pumping signal when matching network transmits, corresponding change can be there is in centre frequency, therefore, the signal center frequency also corresponding change that signal is launched by interdigital transducer after reflecting grating reflection, the centre frequency of signal is sent by detecting impedance transducer, the changes values of the impedance of external sensor can be analyzed, the corresponding variable quantity calculating the mechanical quantity of measurand.The SAW (Surface Acoustic Wave) resonator type impedance transducer of the present embodiment, by being connected in matching network by external sensor, not changing structure and the layout of piezoelectric substrate, therefore can not affect the perceptual performance of sensor, detects degree of accuracy yet corresponding raising; And do not change structure and the layout of piezoelectric substrate, therefore can not bring and the processing step and complexity that pin etc. increases is set; In addition, external sensor can be integrated in matching network, and integrated level is high, reduces encapsulating structure further, reduces sensor overall volume.
It should be noted that, matching network 102 effect is in circuit, in the sensor passive and wireless of such as the present embodiment is measured, reflecting grating 103 and interdigital transducer 104 form resonator, resonator needs to carry out impedance matching with antenna 101, the pumping signal that antenna 101 receives is sent to resonator, otherwise great energy loss can be caused, have a strong impact on the quality of transfer efficiency and signal, therefore between antenna resonator, need matching network, matching network is generally made up of inductance and Capacitance parallel connection.Resonator receives the pumping signal through overmatching that matching network sends, and interdigital transducer carries out electricity-sound conversion, produces surface acoustic wave and propagates to both sides, produces reflection, and superposes, can form standing wave in resonator cavity when surface acoustic wave runs into reflecting grating.Resonator is stored energy when external signal encourages, and after external drive signal is withdrawn from, interdigital transducer carries out sound-electric conversion, is discharged by resonator response signal.The composition structure of resonator is simple, and only the both sides of an interdigital transducer and interdigital transducer need be adopted to arrange a reflecting grating respectively, the space taking piezoelectric substrate is little.
Embodiment two, this gives a kind of circuit theory diagrams of SAW (Surface Acoustic Wave) resonator type impedance transducer, shown in Figure 4, optimum matching network is in series by the first electric capacity C1 and the first inductance L 1 and forms, and external sensor is connected in parallel on the two ends of the series circuit of described optimum matching network composition.
Wherein, external sensor can be accessed outward in matching network by wire as shown in Figure 4, also can be integrated in matching network as shown in Figure 5, adopt external mode or in connect integrated mode and determine as the case may be, for the environment for use that the testing environments such as such as tire pressure monitoring are comparatively safe, be integrated in by external sensor in matching network, product integrated level is high, be conducive to reducing encapsulating structure, reduce sensor overall volume.For the hydraulic pressure conditions detecting a few thing machinery; or the gaseous tension situation that oxidisability is high; external sensor is needed to be arranged in liquid or in corrosive gas; now need external sensor external; without the need to SAW (Surface Acoustic Wave) resonator type impedance transducer entirety is placed in the disadvantageous environment for use of device; be conducive to protection SAW (Surface Acoustic Wave) resonator type impedance transducer, extend its serviceable life.
Embodiment three, this gives a kind of a kind of circuit theory diagrams of SAW (Surface Acoustic Wave) resonator type impedance transducer, because external sensor is condenser type or inductance type, no matter how it accesses in matching network, all can change the reactance value of matching network.This gives another and be incorporated to mode, shown in Figure 6, external sensor can also only be in parallel with the first inductance L 1, to change the reactance value of matching network.Certainly also have some other array mode, all belong to protection scope of the present invention, then this citing that differs.
The equivalent capacitive reactance of this matching network is C ', equivalent inductive reactance L ', and the computing method of the resistance value Zeq2 of matching network are:
（1）
（2）
The general near resonator equivalent-circuit model of resonator as shown in Figure 7, in Fig. 7, C and L is respectively dynamic capacity because piezoelectric substrate elasticity and inertia cause and inductance, R is the dynamic resistance that damping causes, and C0 is the direct capacitance of interdigital transducer, and R0 is lead resistance.The equivalent circuit parameter of resonator comprises R0, R, L, C, C0 five parameters.
The impedance of resonator is the computing method of Zeq1:
（3）
Zeq is the equiva lent impedance that resonator Zeq1 and matching network Zeq2 form structure, is the total resistance of total, therefore,
（4）
Generally, the characteristic impedance of conventional transmission line is 50 Ω, the centre frequency of the corresponding S11 of match point, the frequency that namely amplitude is minimum, and reflection coefficient is:
（5）
The graph of a relation of S11 and frequency f can be obtained, the centre frequency of the corresponding S11 of frequency f 0 that amplitude is minimum by formula (1 ~ 5).In matching network, electric capacity in external sensor or inductance be incorporated to network, the equivalence value of C1 or L1 can be caused to change, affect the value of Zeq2, the final curve map affecting S11, can be there is corresponding change in the centre frequency that the minimum frequency f 0 of amplitude is whole resonator structure, by the change of measuring center frequency, can calculate the change of tested mechanical quantity according to the characteristic of external sensor.
Embodiment four, the present embodiment is based on a kind of SAW (Surface Acoustic Wave) resonator type vibration transducer in embodiment three, provide a kind of SAW (Surface Acoustic Wave) resonator type vibration detecting system, shown in Figure 8, comprise reader, signal processing module, and impedance transducer, described reader is provided with the second antenna 201, impedance transducer is provided with the first antenna 101, both are communicated by two antennas, shown in Figure 2, vibration transducer also comprises matching network 102, reflecting grating 103, and interdigital transducer 104, at least reflecting grating 103, and interdigital transducer 104 is arranged on piezoelectric substrate 105, shown in Figure 3, matching network 102 comprises the optimum matching network be made up of at least one electric capacity and at least one inductance, this optimum matching network is also parallel with acceleration detection circuit, acceleration detection circuit comprises several branch roads be in parallel, the branch road number being incorporated to described optimum matching network under different acceleration is different.The principle of work of the SAW (Surface Acoustic Wave) resonator type vibration detecting system of the present embodiment is: reader sends pumping signal by the second antenna 201 to impedance transducer, impedance transducer receives pumping signal by the first antenna 101, impedance transducer sets up external sensor on matching network, when the mechanical quantity of the object that external sensor detects changes, the capacitance of this external sensor or inductance value can be caused to change, therefore the reactance value of matching network changes, and then change the centre frequency that matching network accesses to interdigital transducer signal, therefore, the corresponding change of signal center frequency that signal is launched by interdigital transducer after reflecting grating reflection, signal after resonance is sent to reader by interdigital transducer 104, by reader, this signal is sent to signal transacting center processing, detect the centre frequency of current feedback signal, according to the knots modification of centre frequency, the reactance change of matching network can be calculated, utilize the characteristic of external sensor, the change of mechanical quantity can be calculated.
In order to realize monitoring the mechanical quantity change of measurand, also comprise the monitor supervision platform for monitoring impedance transducer feedback signal, the information that shown monitor supervision platform Received signal strength processing module sends.In addition, the warning device be connected with shown monitor supervision platform is also comprised.When the acceleration of vibration transducer exceedes setting threshold value, carry out alarm.
When the mechanical quantity change of measurand reaches setting threshold value, the corresponding reactance value of external sensor, the maximum variable quantity of centre frequency can be calculated according to the structure of matching network and store, signal transacting center is according to the resonance frequency change recorded, process is compared with the frequency values information stored, result is fed back to monitoring platform, the mechanical quantity change of monitoring platform to feedback result measurand is monitored, when exceeding threshold value, then warning device can send alarm response, type of alarm takes conventional warning, such as, can by adopting sound and light alarm.
Certainly; above-mentioned explanation is not limitation of the present invention; the present invention is also not limited in above-mentioned citing, the change that those skilled in the art make in essential scope of the present invention, remodeling, interpolation or replacement, also should belong to protection scope of the present invention.
Claims (10)
1. a SAW (Surface Acoustic Wave) resonator type impedance transducer, it is characterized in that, comprise the first antenna, matching network, reflecting grating and interdigital transducer, described at least reflecting grating and interdigital transducer are arranged on piezoelectric substrate, described matching network comprises the optimum matching network be made up of at least one electric capacity and at least one inductance, described optimum matching network is also parallel with external sensor, and described external sensor is condenser type or inductance type transducer.
2. SAW (Surface Acoustic Wave) resonator type impedance transducer according to claim 1, it is characterized in that, described optimum matching network is in series by the first electric capacity (C1) and the first inductance (L1) and forms, and described external sensor is connected in parallel on the two ends of the series circuit of described optimum matching network composition.
3. SAW (Surface Acoustic Wave) resonator type impedance transducer according to claim 1, it is characterized in that, described optimum matching network is in series by the first electric capacity (C1) and the first inductance (L1) and forms, and described external sensor is connected in parallel on the two ends of described first electric capacity (C1).
4. SAW (Surface Acoustic Wave) resonator type impedance transducer according to claim 1, it is characterized in that, described optimum matching network is in series by the first electric capacity (C1) and the first inductance (L1) and forms, and described external sensor is connected in parallel on the two ends of described first inductance (L1).
5. the SAW (Surface Acoustic Wave) resonator type impedance transducer according to any one of claim 1-4, is characterized in that, described external sensor is integrated in matching network or by wire and accesses in matching network outward.
6. a SAW (Surface Acoustic Wave) resonator type impedance detection system, it is characterized in that, comprise reader, signal processing module, and impedance transducer, described reader is provided with the second antenna, described impedance transducer comprises the first antenna, matching network, reflecting grating, and interdigital transducer, described at least reflecting grating, and interdigital transducer is arranged on piezoelectric substrate, described matching network comprises the optimum matching network be made up of at least one electric capacity and at least one inductance, described optimum matching network is also parallel with external sensor, described external sensor is condenser type or inductance type transducer.
7. SAW (Surface Acoustic Wave) resonator type impedance detection system according to claim 6, it is characterized in that, described optimum matching network is in series by the first electric capacity (C1) and the first inductance (L1) and forms, and described external sensor is connected in parallel on the two ends of the series circuit of described optimum matching network composition.
8. SAW (Surface Acoustic Wave) resonator type impedance detection system according to claim 6, it is characterized in that, described optimum matching network is in series by the first electric capacity (C1) and the first inductance (L1) and forms, and described external sensor is connected in parallel on the two ends of described first electric capacity (C1).
9. SAW (Surface Acoustic Wave) resonator type impedance detection system according to claim 6, it is characterized in that, described optimum matching network is in series by the first electric capacity (C1) and the first inductance (L1) and forms, and described external sensor is connected in parallel on the two ends of described first inductance (L1).
10. the SAW (Surface Acoustic Wave) resonator type impedance detection system according to any one of claim 6-9, it is characterized in that, described external sensor is integrated in matching network or by wire and accesses outward in matching network.
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| CN201410376057.1A CN105318901A (en) | 2014-08-02 | 2014-08-02 | Surface acoustic wave resonator type impedance sensor and surface acoustic wave resonator type impedance detection system |
| PCT/CN2015/081116 WO2016019754A1 (en) | 2014-08-02 | 2015-06-10 | Surface-acoustic wave resonator type impedance sensor and impedance detection system |
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| CN201410376057.1A CN105318901A (en) | 2014-08-02 | 2014-08-02 | Surface acoustic wave resonator type impedance sensor and surface acoustic wave resonator type impedance detection system |
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| CN106569000A (en) * | 2016-10-08 | 2017-04-19 | 中国电力科学研究院 | System and method of carrying out wireless and passive detection on current |
| CN106841383A (en) * | 2016-12-27 | 2017-06-13 | 华中科技大学 | A kind of integrated form impedance load sonic surface wave gas sensors |
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| FR3066591B1 (en) | 2017-05-19 | 2020-10-16 | Senseor | DESIGN OPTIMIZATION PROCESS OF A DEVICE INCLUDING INTERROGATION MEANS AND A REMOTE INTERROGEABLE PASSIVE SENSOR |
| CN109405887A (en) * | 2018-12-07 | 2019-03-01 | 黑龙江东方学院 | A kind of surface acoustic wave sensor and detection method measuring torque and temperature |
| CN111749682A (en) * | 2019-03-28 | 2020-10-09 | 中国石油天然气股份有限公司 | Temperature sensor |
| CN113029582B (en) * | 2021-03-10 | 2022-04-05 | 南京航空航天大学 | Aero-engine torque detection system and detection method based on surface acoustic wave label |
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| Publication number | Publication date |
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| WO2016019754A1 (en) | 2016-02-11 |
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