CN105312176A - Nozzle adjusting mechanism - Google Patents
Nozzle adjusting mechanism Download PDFInfo
- Publication number
- CN105312176A CN105312176A CN201410365766.XA CN201410365766A CN105312176A CN 105312176 A CN105312176 A CN 105312176A CN 201410365766 A CN201410365766 A CN 201410365766A CN 105312176 A CN105312176 A CN 105312176A
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- China
- Prior art keywords
- shower nozzle
- regulating shaft
- clamp
- fixed block
- nozzle
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Abstract
The invention discloses a nozzle adjusting mechanism. The nozzle adjusting mechanism comprises a base, an adjusting shaft, a nozzle fixing block and a nozzle, wherein a clamping block is arranged at one end of the base and arranged in an X direction; the adjusting shaft is mounted on the clamping block, can rotate around a Z-direction axis relative to the clamping block and can move along the Z-direction axis relative to the clamping block; the nozzle fixing block is rotationally mounted at the bottom end of the adjusting shaft and can rotate around a Y-direction axis relative to the adjusting shaft; the nozzle is mounted on the nozzle fixing block, a nozzle body of the nozzle is located on a first side of the nozzle fixing block, and a connector of the nozzle is located on a second side of the nozzle fixing block. The nozzle adjusting mechanism is simple and reliable in structure, compact and applicable to semiconductor devices, occupies small space and can rotate in three-dimensional space.
Description
Technical field
The present invention relates to semi-conductor device technology field, more particularly, relate to the three-dimensional adjusting mechanism of shower nozzle in semiconductor equipment.
Background technology
Various chemical liquid and chemical solvent is used to be requisite technical process in semiconducter process process.So, multiple shower nozzle for spraying liquid or solvent can be set in semiconductor equipment.For the requirement of processing technology, consider the factor of the location of workpiece, the uniformity etc., require that shower nozzle can rotate freely in three dimensions.Although the structure that rotates freely in three dimensions is not difficult to realize, for semiconductor equipment, its difficulty is the cost of compactedness and realization.The space of semiconductor equipment inside is very limited, therefore requires that three-dimensional rotational structure can occupy as far as possible little space.And wish that this rotational structure has and lower realize cost and good reliability.
Summary of the invention
The present invention is intended to propose a kind ofly have cramped construction and the lower shower nozzle governor motion realizing cost, can realize rotation in three dimensions.
According to one embodiment of the invention, propose a kind of shower nozzle governor motion, comprising: pedestal, regulating shaft, shower nozzle fixed block and shower nozzle.One end of pedestal has clamp, and pedestal is along X to setting.Regulating shaft is arranged on clamp, and regulating shaft can rotate around Z-direction axle relative to clamp, and regulating shaft can also move along Z-direction axle relative to clamp.Shower nozzle fixed block is rotatably installed in the bottom of regulating shaft, and shower nozzle fixed block can rotate around Y-direction axle relative to regulating shaft.Shower nozzle is arranged on shower nozzle fixed block, and the nozzle of shower nozzle is positioned at the first side of shower nozzle fixed block, and the joint of shower nozzle is positioned at the second side of shower nozzle fixed block.
In one embodiment, be formed centrally columniform groove in clamp, the side sidewall of clamp has adjustment gap, one group of adjusting bolt is through regulating gap.
In one embodiment, regulating shaft is cylindrical, and bottom forms plane, and regulating shaft is arranged in columniform groove, screws adjusting bolt, and clamp clamping regulating shaft, loosen adjusting bolt, clamp loosens, and regulating shaft can move along Z-direction axle relative to clamp.
In one embodiment, shower nozzle fixed block is arranged in the plane of regulating shaft bottom by rotating shaft, and rotating shaft is Y-direction axle.
In one embodiment, the first end of shower nozzle fixed block is arranged on by rotating shaft in the plane of regulating shaft bottom, and shower nozzle runs through the second end of shower nozzle fixed block.
Shower nozzle governor motion of the present invention is simple and reliable for structure, duty space is little, compact, and can be provided in the spinfunction in three dimensions, is suitable for using in semiconductor equipment.
Accompanying drawing explanation
The above and other feature of the present invention, character and advantage are by more obvious by what become below in conjunction with the description of drawings and Examples, and Reference numeral identical in the accompanying drawings represents identical feature all the time, wherein:
Fig. 1 discloses the structure chart of the shower nozzle governor motion according to one embodiment of the invention.
Detailed description of the invention
Shown in figure 1, disclose the shower nozzle governor motion according to one embodiment of the invention.This shower nozzle governor motion 100 comprises: pedestal 102, regulating shaft 104, shower nozzle fixed block 106 and shower nozzle 108.In FIG, with following standard configuration with reference to three-dimensional system of coordinate: using the bearing of trend of pedestal 102 as X to, using the direction of regulating shaft 104 as Z-direction, according to X to Z-direction definition Y-direction.
One end of pedestal 102 has clamp 121, and pedestal 102 is along X to setting.Be formed centrally columniform groove in clamp 121, the side sidewall of clamp 121 have and regulates 122, one group, gap adjusting bolt 123 through regulating gap 122.By rotating adjusting bolt 123, just can regulate the size in gap 122, making groove clamp regulating shaft 104 or loosen regulating shaft 104.
Regulating shaft 104 is cylindrical, and regulating shaft 104 is arranged on clamp 121, and in the illustrated embodiment in which, regulating shaft 104 is arranged in columniform groove.Regulating shaft 104 can rotate around Z-direction axle relative to clamp 121, and regulating shaft 104 can also move along Z-direction axle relative to clamp 121.In the embodiment shown in fig. 1, regulating shaft 104 self is exactly arrange along Z-direction, and loosen adjusting bolt 123, clamp 121 loosens, and now can rotate regulating shaft 104, and regulating shaft 104 is rotated around Z-direction axle in columniform groove.Under the state that clamp 121 loosens, regulating shaft 104 can also be made to move in columniform groove, move along Z-direction axle relative to clamp 121.After regulating shaft 104 rotates and moves into place, screw adjusting bolt 123, clamp 121 clamps regulating shaft 104.
Continue with reference to shown in figure 1, in the bottom of regulating shaft 104, cylindrically pruned one piece, form a plane 141, this plane 141 is for mounting spray head fixed block 106.
Shower nozzle fixed block 106 is rotatably installed in the bottom of regulating shaft 104, namely in plane 141.Shower nozzle fixed block 106 can rotate around Y-direction axle relative to regulating shaft 104.In the embodiment shown in fig. 1, shower nozzle fixed block 106 is arranged in the plane 141 of regulating shaft bottom by rotating shaft 161, and rotating shaft 161 is Y-direction axles.
Shower nozzle 108 is arranged on shower nozzle fixed block 106, and the nozzle 181 of shower nozzle is positioned at the first side of shower nozzle fixed block 161, and the first side is the downside being positioned at shower nozzle fixed block 161 in the embodiment shown in fig. 1.The joint 182 of shower nozzle is positioned at the second side of shower nozzle fixed block 106, and the second side is the upside being positioned at shower nozzle fixed block 161 in the embodiment shown in fig. 1.Continue with reference to shown in figure 1, the first end of shower nozzle fixed block 106 is arranged in the plane 141 of regulating shaft bottom by rotating shaft 161, and shower nozzle 108 runs through the second end of shower nozzle fixed block 106.
Shower nozzle governor motion 100 of the present invention, to be achieved in XY plane by regulating shaft 104 and rotating shaft 161 and rotation in ZY plane, and can move in Z-direction, can meet the three-dimensional rotation of shower nozzle and the requirement of location in semiconductor equipment.
Shower nozzle governor motion of the present invention is simple and reliable for structure, duty space is little, compact, and can be provided in the spinfunction in three dimensions, is suitable for using in semiconductor equipment.
Above-described embodiment is available to be familiar with person in the art to realize or to use of the present invention; those skilled in the art can be without departing from the present invention in the case of the inventive idea; various modifications or change are made to above-described embodiment; thus protection scope of the present invention not limit by above-described embodiment, and should be the maximum magnitude meeting the inventive features that claims are mentioned.
Claims (5)
1. a shower nozzle governor motion, is characterized in that, comprising:
Pedestal, one end of pedestal has clamp, and pedestal is along X to setting;
Regulating shaft, regulating shaft is arranged on clamp, and regulating shaft can rotate around Z-direction axle relative to clamp, and regulating shaft can also move along Z-direction axle relative to clamp;
Shower nozzle fixed block, is rotatably installed in the bottom of regulating shaft, and shower nozzle fixed block can rotate around Y-direction axle relative to regulating shaft;
Shower nozzle, is arranged on shower nozzle fixed block, and the nozzle of shower nozzle is positioned at the first side of shower nozzle fixed block, and the joint of shower nozzle is positioned at the second side of shower nozzle fixed block.
2. shower nozzle governor motion as claimed in claim 1, is characterized in that, be formed centrally columniform groove in described clamp that the side sidewall of described clamp has adjustment gap, and one group of adjusting bolt is through described adjustment gap.
3. shower nozzle governor motion as claimed in claim 2, it is characterized in that, described regulating shaft is cylindrical, bottom forms plane, and described regulating shaft is arranged in described columniform groove, screws adjusting bolt, clamp clamping regulating shaft, loosen adjusting bolt, clamp loosens, and regulating shaft can move along Z-direction axle relative to clamp.
4. shower nozzle governor motion as claimed in claim 3, it is characterized in that, described shower nozzle fixed block is arranged in the plane of described regulating shaft bottom by rotating shaft, and described rotating shaft is Y-direction axle.
5. shower nozzle governor motion as claimed in claim 4, it is characterized in that, the first end of described shower nozzle fixed block is arranged on by rotating shaft in the plane of regulating shaft bottom, and described shower nozzle runs through the second end of shower nozzle fixed block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410365766.XA CN105312176A (en) | 2014-07-29 | 2014-07-29 | Nozzle adjusting mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410365766.XA CN105312176A (en) | 2014-07-29 | 2014-07-29 | Nozzle adjusting mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105312176A true CN105312176A (en) | 2016-02-10 |
Family
ID=55241079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410365766.XA Pending CN105312176A (en) | 2014-07-29 | 2014-07-29 | Nozzle adjusting mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105312176A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106420106A (en) * | 2016-09-14 | 2017-02-22 | 四川蓝光英诺生物科技股份有限公司 | Sprayer component, 3D printing equipment, and nozzle position adjusting method of sprayer component |
| CN106944286A (en) * | 2017-05-03 | 2017-07-14 | 慈溪市鑫昶工业产品设计有限公司 | A kind of auto parts paint spraying apparatus |
| CN113118099A (en) * | 2019-12-31 | 2021-07-16 | 盛美半导体设备(上海)股份有限公司 | Rotary spray head, cleaning equipment and cleaning method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1750888A (en) * | 2003-02-21 | 2006-03-22 | 本田技研工业株式会社 | Coating system for forming protective layer |
| CN201049324Y (en) * | 2007-06-18 | 2008-04-23 | 董学军 | Adjustable bidirectional atomizer nozzle |
| CN201940302U (en) * | 2011-01-31 | 2011-08-24 | 广东达华节水科技股份有限公司 | Rotary type micro-sprayer |
| CN202087467U (en) * | 2011-05-10 | 2011-12-28 | 苏州互友工业设备有限公司 | Spray coating clamp |
| AU2013205835B1 (en) * | 2013-05-13 | 2013-11-14 | Ma, Xia Khanh MR | Advance panel stand ( a.p.s ) |
-
2014
- 2014-07-29 CN CN201410365766.XA patent/CN105312176A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1750888A (en) * | 2003-02-21 | 2006-03-22 | 本田技研工业株式会社 | Coating system for forming protective layer |
| CN201049324Y (en) * | 2007-06-18 | 2008-04-23 | 董学军 | Adjustable bidirectional atomizer nozzle |
| CN201940302U (en) * | 2011-01-31 | 2011-08-24 | 广东达华节水科技股份有限公司 | Rotary type micro-sprayer |
| CN202087467U (en) * | 2011-05-10 | 2011-12-28 | 苏州互友工业设备有限公司 | Spray coating clamp |
| AU2013205835B1 (en) * | 2013-05-13 | 2013-11-14 | Ma, Xia Khanh MR | Advance panel stand ( a.p.s ) |
Non-Patent Citations (1)
| Title |
|---|
| 薛胜雄等: "《高压水射流技术工程》", 30 November 2006, 合肥工业大学出版社 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106420106A (en) * | 2016-09-14 | 2017-02-22 | 四川蓝光英诺生物科技股份有限公司 | Sprayer component, 3D printing equipment, and nozzle position adjusting method of sprayer component |
| CN106420106B (en) * | 2016-09-14 | 2018-06-29 | 四川蓝光英诺生物科技股份有限公司 | The nozzle exit area adjusting method of nozzle component, 3D printing equipment and nozzle component |
| CN106944286A (en) * | 2017-05-03 | 2017-07-14 | 慈溪市鑫昶工业产品设计有限公司 | A kind of auto parts paint spraying apparatus |
| CN113118099A (en) * | 2019-12-31 | 2021-07-16 | 盛美半导体设备(上海)股份有限公司 | Rotary spray head, cleaning equipment and cleaning method |
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Legal Events
| Date | Code | Title | Description |
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| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: 201203 building 4, No. 1690, Cailun Road, free trade zone, Pudong New Area, Shanghai Applicant after: Shengmei semiconductor equipment (Shanghai) Co., Ltd Address before: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Cailun Road No. fourth 1690 Applicant before: ACM (SHANGHAI) Inc. |
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| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160210 |