CN203743156U - Foot-pad bolt for balance adjustment of DNS equipment - Google Patents

Foot-pad bolt for balance adjustment of DNS equipment Download PDF

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Publication number
CN203743156U
CN203743156U CN201420000222.9U CN201420000222U CN203743156U CN 203743156 U CN203743156 U CN 203743156U CN 201420000222 U CN201420000222 U CN 201420000222U CN 203743156 U CN203743156 U CN 203743156U
Authority
CN
China
Prior art keywords
screw rod
nut
bolt
dns
foot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201420000222.9U
Other languages
Chinese (zh)
Inventor
邓丹
张菊
魏伟
汪已琳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHANGSHA INNOVATION SEMICONDUCTOR CORP
Original Assignee
CHANGSHA INNOVATION SEMICONDUCTOR CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHANGSHA INNOVATION SEMICONDUCTOR CORP filed Critical CHANGSHA INNOVATION SEMICONDUCTOR CORP
Priority to CN201420000222.9U priority Critical patent/CN203743156U/en
Application granted granted Critical
Publication of CN203743156U publication Critical patent/CN203743156U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model relates to the technical field of foot-pad bolts, and discloses a foot-pad bolt for balance adjustment of DNS equipment. The foot-pad bolt comprises a screw, a bolt head arranged at one end of the screw and a nut sleeving the screw, and a limiting mechanism limiting the nut to move along the length direction of the screw is further arranged on the screw. By the aid of the limiting mechanism, when the DNS equipment is mounted, nuts of multiple foot-pad bolts can be ensured to be equal in height, mounting precision is improved, and deviation of mounting is reduced.

Description

A kind of feet bolt regulating for DNS balance of plant
Technical field
The utility model relates to feet bolt technical field, more particularly, and particularly a kind of feet bolt regulating for DNS balance of plant.
Background technique
Carrying out DNS equipment, (DNS equipment is the rotary coating system that is applicable to 6 inches and 8 inches semiconductor crystal wafers of the DAINIPPON SCREEN of Dainippon Screen Manufacturing Co company exploitation.) while installing, need to ensure the balance of equipment, traditional method is: one, first the screw rod with feet bolt is screwed in to equipment, re-use the assistant tools such as tape measure the nut of each feet bolt is adjusted to sustained height; Two, first the nut of each stone bolt is threaded to sustained height, then screw rod is screwed in to equipment.First method, due to the limited space of device bottom, is not easy to carry out highly measure accurately and regulate, and accuracy error is larger; And second method can drive nut motion in the time of rotary screw, cause the height tolerance between each stone bolt, often use again the assistant tools such as tape measure repeatedly to adjust.Therefore, be necessary to design a kind of feet bolt of new structure.
Model utility content
The purpose of this utility model is to provide the feet bolt regulating for DNS balance of plant that a kind of precision is high, deviation is little.
In order to solve problem set forth above, the technical solution adopted in the utility model is: a kind of feet bolt regulating for DNS balance of plant, comprise screw rod, be located at the bolt head of screw rod one end, and be sheathed on the nut on screw rod, on described screw rod, be also provided with the position-limit mechanism that the described nut of restriction moves along spiro rod length direction.
According to a preferred embodiment of the present utility model: described position-limit mechanism comprises multiple pin holes of being located in spiro rod length direction, and the positioning dowel matching with multiple pin holes.
According to a preferred embodiment of the present utility model: described position-limit mechanism comprises multiple ring-type draw-in grooves of being located in spiro rod length direction, and the ring-type fixture block matching with multiple ring-type draw-in grooves.
According to a preferred embodiment of the present utility model: the head diameter of described positioning dowel is greater than the diameter of pin hole.
Compared with prior art, the beneficial effects of the utility model are: the utility model adopts position-limit mechanism, can ensure DNS equipment when mounted, ensures that the height of nut of multiple feet bolts is consistent, have improved installation precision and have reduced the deviation of installing.
Brief description of the drawings
Fig. 1 is the feet bolt embodiment's one who regulates for DNS balance of plant of the present utility model structural representation.
Fig. 2 is the feet bolt embodiment's two who regulates for DNS balance of plant of the present utility model structural representation.
Description of reference numerals: 1, bolt head, 2, screw rod, 3, nut, 4, pin hole, 5, positioning dowel, 6, ring-type draw-in groove, 7, ring-type fixture block.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the utility model is described in further detail, but mode of execution of the present utility model is not limited to this.
Embodiment one:
Consult shown in Fig. 1, the present embodiment provides a kind of feet bolt regulating for DNS balance of plant, comprises screw rod 2, is located at the bolt head 1 of screw rod 2 one end, and be sheathed on the nut 3 on screw rod 2, on described screw rod 2, be also provided with the position-limit mechanism that the described nut 3 of restriction moves along screw rod 2 length directions.
In the present embodiment, position-limit mechanism comprises multiple pin holes 4 of being located on screw rod 2 length directions, and the positioning dowel 5 matching with multiple pin holes 4.
As preferably, on above-mentioned screw rod 2, there is screw thread, nut 3 is outer-hexagonal with bolt head 1.
As preferably, the present embodiment is distributed with 4 pin holes 4 on screw rod 2, and diameter is 2mm, can be used for stoping nut 3 to bolt head 1 turn, to determine the distance of nut 3 and bolt head 1, can adjust as required the height of four pin holes 4.
As preferably, the head diameter of positioning dowel 5 need to be slightly larger than the diameter of pin hole 4, to guarantee that positioning dowel 5 is being fit into stable after pin hole 4.
The installation method of the feet bolt of the present embodiment is as follows: first determine that feet height h(is generally slightly larger than the height of device bottom wheel), next determines that (the distance > of nut 3 and bolt head 1 h) for the position of the pin hole 4 under this height, then the nut of each feet bolt 3 is threaded to corresponding pin hole more than 4 away from bolt head 1, and plug positioning dowel 5, again nut 3 is rotated gently to positioning dowel 5 directions, after nut 3 is touched positioning dowel 5, stop the rotation, finally screw rod 2 is screwed in to the bottom of machine.
The present embodiment simple to operate, installation efficiency is high, has saved the process of repeated measurement and adjusting bolt height; Validity is installed simultaneously high, same pin hole 4 is identical with the distance of bolt head 1, and positioning dowel 5 is located back nut 3 and fixed with the distance of bolt head 1.
Embodiment two:
Consult shown in Fig. 2, other are identical with embodiment one for the present embodiment, and difference is: the position-limit mechanism that the present embodiment adopts comprises multiple ring-type draw-in grooves 6 of being located on screw rod 2 length directions, and the ring-type fixture block 7 matching with multiple ring-type draw-in grooves 6.In use, ring-type fixture block 7 need to be snapped in the ring-type draw-in groove 6 of relevant position, can ensure that nut 3 screws in the height of position consistent.
Above-described embodiment is preferably mode of execution of the utility model; but mode of execution of the present utility model is not restricted to the described embodiments; other any do not deviate from change, the modification done under Spirit Essence of the present utility model and principle, substitutes, combination, simplify; all should be equivalent substitute mode, within being included in protection domain of the present utility model.

Claims (4)

1. the feet bolt regulating for DNS balance of plant, comprise screw rod (2), be located at the bolt head (1) of screw rod (2) one end, and be sheathed on the nut (3) on screw rod (2), it is characterized in that: on described screw rod (2), be also provided with the position-limit mechanism that the described nut of restriction (3) moves along screw rod (2) length direction.
2. the feet bolt regulating for DNS balance of plant according to claim 1, it is characterized in that: described position-limit mechanism comprises multiple pin holes (4) of being located on screw rod (2) length direction, and the positioning dowel (5) matching with multiple pin holes (4).
3. the feet bolt regulating for DNS balance of plant according to claim 1, it is characterized in that: described position-limit mechanism comprises multiple ring-type draw-in grooves (6) of being located on screw rod (2) length direction, and the ring-type fixture block (7) matching with multiple ring-type draw-in grooves (6).
4. the feet bolt regulating for DNS balance of plant according to claim 2, is characterized in that: the head diameter of described positioning dowel (5) is greater than the diameter of pin hole (4).
CN201420000222.9U 2014-01-01 2014-01-01 Foot-pad bolt for balance adjustment of DNS equipment Expired - Fee Related CN203743156U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420000222.9U CN203743156U (en) 2014-01-01 2014-01-01 Foot-pad bolt for balance adjustment of DNS equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420000222.9U CN203743156U (en) 2014-01-01 2014-01-01 Foot-pad bolt for balance adjustment of DNS equipment

Publications (1)

Publication Number Publication Date
CN203743156U true CN203743156U (en) 2014-07-30

Family

ID=51342960

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201420000222.9U Expired - Fee Related CN203743156U (en) 2014-01-01 2014-01-01 Foot-pad bolt for balance adjustment of DNS equipment

Country Status (1)

Country Link
CN (1) CN203743156U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106015845A (en) * 2015-03-26 2016-10-12 卡西欧计算机株式会社 Regulator and electronic equipment
CN108007498A (en) * 2017-11-10 2018-05-08 安徽徽远成电气科技股份有限公司 Compound sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106015845A (en) * 2015-03-26 2016-10-12 卡西欧计算机株式会社 Regulator and electronic equipment
CN108007498A (en) * 2017-11-10 2018-05-08 安徽徽远成电气科技股份有限公司 Compound sensor
CN108007498B (en) * 2017-11-10 2020-02-14 安徽徽远成电气科技股份有限公司 Composite sensor

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Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
EXPY Termination of patent right or utility model
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20140730

Termination date: 20160101