CN105308839A - Linear motor and stage device - Google Patents
Linear motor and stage device Download PDFInfo
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- CN105308839A CN105308839A CN201380076945.5A CN201380076945A CN105308839A CN 105308839 A CN105308839 A CN 105308839A CN 201380076945 A CN201380076945 A CN 201380076945A CN 105308839 A CN105308839 A CN 105308839A
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- magnet
- armature coil
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- armature
- electric motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/18—Machines moving with multiple degrees of freedom
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- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Linear Motors (AREA)
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Abstract
To reduce the overall size and weight of a linear motor. A linear motor (1) is provided with a field system (10) and an armature (20). The field system (10) includes two yoke plates (11a, 11b) respectively having mutually opposing surfaces; and a first magnet array (64) wherein multiple magnets (14) for X-direction movement are disposed in the X-direction along the respective opposing surfaces of the two yoke plates (11a, 11b). The armature (20) has a first armature coil array (73) wherein multiple single-phase coils (23) for X-direction movement are disposed in the X-direction, said first armature coil array (73) facing the first magnet array (64) via a magnetic gap. In the first armature coil array (73) and the first magnet array (64), the single-phase coils (23) for X-direction movement are wound with the X-direction as an axial center, and the magnets (14) for X-direction movement are disposed such that the respective polarities alternate along the X-direction and such that the magnets (14) in each pair of two mutually opposing magnets (14) for X-direction movement have the same polarity.
Description
Technical field
The present invention relates to linear electric motors and table device.
Background technology
Patent documentation 1 discloses a kind of coreless linear motor, possesses excitation member and armature, and yoke matrix links between two flat yoke plates, and excitation member becomes roughly U-shaped thus.In these linear electric motors, be provided with permanent magnet array at the medial surface of each excitation member yoke plate.In this permanent magnet array, two permanent magnets opposed in same group magnetic pole is each other different, and two permanent magnets adjacent on the length direction of excitation member are also that magnetic pole is different each other.
Prior art document
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Publication 2013-27054 publication
Summary of the invention
The problem to be solved in the present invention
But in the structure that patent documentation 1 is recorded, two the opposed permanent magnets being located at two yoke plates are heteropole, therefore mutually produce attraction.In order to prevent the flexure of yoke plate that brings due to this attraction and the situation of yoke plate and armature contacts, need the rigidity improving yoke.Consequently, the gauge of yoke plate increases, the miniaturization and difficulty of linear electric motors entirety.
The present invention makes in view of such problem points, and its object is to provides a kind of linear electric motors realizing overall miniaturization and.
For the scheme of dealing with problems
In order to solve the problem, according to a viewpoint of the present invention, apply a kind of linear electric motors, using either party in armature and excitation member as mover and using the opposing party as stator, wherein, described excitation member has: two yoke plates possessing mutually opposing opposed faces respectively, and the magnet that multiple permanent magnet arranges in the prescribed direction along described two yoke plates described opposed faces is separately arranged, described armature has armature coil row, described armature coil row arrange across magnetic gap ground opposed with described magnet, and multiple armature coil is arranged in described prescribed direction, described linear electric motors possess following configuration: in described armature coil row and described magnet row, described armature coil is wound for axle center with described prescribed direction, and mutually opposing two described permanent magnets to becoming mutually homopolarity and making along described prescribed direction the alternating polarity of this permanent magnet ground different.
Invention effect
According to linear electric motors of the present invention, overall miniaturization and can be realized.
Accompanying drawing explanation
Stereogram that Fig. 1 is the linear electric motors of the execution mode representing principle, that represent the configuration of permanent magnet and armature coil, the structure of Fig. 1 (a) is the end view from X-direction unilateral observation, is the key diagram of the situation from Y-direction unilateral observation of the magnetic circuit being equivalent to linear electric motors.
Stereogram that Fig. 2 is the linear electric motors of comparative example, that represent the configuration of permanent magnet and armature coil, the structure of Fig. 2 (a) is the end view from X-direction unilateral observation, is the key diagram of the situation from Y-direction unilateral observation of the magnetic circuit being equivalent to linear electric motors.
Fig. 3 is the stereogram of the outward appearance of the entirety of the linear electric motors representing the first execution mode.
Fig. 4 is the stereogram by the excitation member of linear electric motors and armature discrete representation.
Fig. 5 is the stereogram of the excitation member representing linear electric motors.
Fig. 6 is the stereogram representing the state removed by a yoke plate of excitation member.
Fig. 7 represents that the X-direction eliminating a yoke plate again from excitation member moves the stereogram moving the state with magnet by magnet and Y-direction.
Fig. 8 is the stereogram represented by the fragmentary perspective of armature molding section.
Fig. 9 extracts the armature coil of the armature molding section in the structure shown in Fig. 8 out represent stereogram.
Figure 10 is the stereogram of the configuration of the armature coil of the expression armature molding section of the linear electric motors of comparative example.
Figure 11 is the stereogram of the coil configuration of the expression armature molding section of the linear electric motors of the second execution mode.
Figure 12 is the stereogram of the coil configuration of the expression armature molding section of the linear electric motors of the 3rd execution mode.
Embodiment
Below, about disclosed execution mode, be described with reference to accompanying drawing.
< represents the execution mode > of principle
Use Fig. 1 and Fig. 2, illustrate that the thrust with the linear electric motors of single-phase winding of present embodiment produces principle.In addition, in the following description, X-direction, Y-direction, Z-direction are equivalent to X-direction, Y direction, the Z-direction of three-dimensional rectangular coordinate, correspond to the direction of arrow suitably represented in each figure of Fig. 1 (a) etc.Such as in Fig. 1 (a), the direction corresponding with left front (being equivalent to first direction side) ~ right depths (being equivalent to first direction opposite side) direction is X-direction (being equivalent to first direction), the direction corresponding with right front (being equivalent to second direction side) ~ left depths (being equivalent to second direction opposite side) direction is Y-direction (being equivalent to second direction), and the direction corresponding with above-below direction is Z-direction (being equivalent to third direction).
< schematic configuration >
As shown in Fig. 1 (a) ~ Fig. 1 (c), linear electric motors 100 have: the excitation member 101 possessing multiple (being four in this example embodiment) permanent magnet 104; Possesses the armature 105 of multiple (being two in this example embodiment) armature coil 106.
Excitation member 101 possesses yoke matrix 102, and this yoke matrix 102 has along two opposed yoke plates 103a, 103b of Z-direction (suitable to " above-below direction ", " up and down " etc. below).In the opposed faces (medial surface) of these two yoke plates 103a, 103b, arrange in X direction in two permanent magnets 104,104 of a pair up and down multipair (be in this example embodiment two to) (being equivalent to magnet row).Between the respective upper and lower permanent magnet 104,104 that this is multipair, to separate magnetic gap with each permanent magnet 104, opposed mode arranges (being equivalent to armature coil arrange) multiple (being two in this example embodiment) armature coil 106 in X direction.
Now, the magnetic pole (N pole and S pole) of permanent magnet 104 becomes heteropole each other with permanent magnet 104,104 adjacent in X direction and the permanent magnet 104,104 the becoming a pair along the vertical direction mode that (magnetic pole of armature coil 106 side) becomes homopolarity each other configures.And, armature coil 106 with X-direction (being equivalent to prescribed direction) for axle center is to the winding that reels.
< magnetic circuit >
By said structure, as shown in Fig. 1 (c), from (the left side Fig. 1 (c), X-direction side at a yoke plate (being suitably called " yoke plate of top ") 103a.Below, being suitably called in " left side ") the N pole magnetic flux out of permanent magnet 104 that arranges forms the magnetic circuit Qa in following a series of path: towards the X-direction opposite side (right side in Fig. 1 (c).Below, suitably be called on " right side ") after, enter the S pole of the permanent magnet 104 on the right side that yoke plate 103a is up arranged, and then cross the permanent magnet 104 on above-mentioned right side from bottom to top, the N pole of the permanent magnet 104 on the right side of this enter the yoke plate 103a of top after towards left side, the S pole of the permanent magnet 104 that the left side returning yoke plate 103a is up arranged.
Equally, the magnetic circuit Qb in following a series of path is formed: after right side from the N pole magnetic flux out of the permanent magnet 104 arranged in the left side of another yoke plate (being suitably called " yoke plate of below ") 103b, the S pole of the permanent magnet 104 that the right side entering the yoke plate 103b in below is arranged, and then the permanent magnet 104 crossed from the top down on the right side of this, the N pole of the permanent magnet 104 on the right side of this enter the yoke plate 103b of below after towards left side, return to the S pole of the permanent magnet 104 in the left side of the yoke plate 103b of below.
In addition, an above-mentioned magnetic circuit Qa and another magnetic circuit Qb is that line is symmetrical relative to the line of X-direction, produces relative to one another.
< is to the effect > of armature coil
Relative to magnetic circuit Qa, Qb of forming as mentioned above, the winding of the upside of the armature coil 106 in left side configures in the mode of crossing along Y-direction in the downward magnetic field of magnetic circuit Qa, and the winding of the downside of the armature coil 106 in left side configures in the mode of crossing along Y-direction in the magnetic field upwards of magnetic circuit Qb.Equally, the winding of the upside of the armature coil 106 on right side configures in the mode of crossing along Y-direction in the magnetic field upwards of magnetic circuit Qa, and the winding of the downside of the armature coil 106 on right side configures in the mode of crossing along Y-direction in the downward magnetic field of magnetic circuit Qb.
Further, in the present embodiment, relative to the armature coil 106,106 of left and right, current i be each contrary towards mode flow.
Namely, in the armature coil 106 on right side, in the winding of upside, current i is such as flowing from Y-direction side (right side Fig. 1 (a) in side, right front, Fig. 1 (b), the side, front in Fig. 1 (c)) to the direction of Y-direction opposite side (left side in Fig. 1 (a) in side, left depths, Fig. 1 (b), the side, depths in Fig. 1 (c)).Consequently, by the magnetic field upwards of magnetic circuit Qa and the interaction of electric current, according to Fleming's Left Hand Rule, the winding effect on the upside of this has the power from X-direction side (Fig. 1 (a) side, front in side, left front, Fig. 1 (b), the left side in Fig. 1 (c)) towards X-direction opposite side (in Fig. 1 (a) side, depths in side, right depths, Fig. 1 (b), the right side in Fig. 1 (c)).On the other hand, in the winding of the downside of the armature coil 106 on right side, in the above cases, current i is flowing from Y-direction opposite side to the direction of Y-direction side on the contrary.Consequently, by the downward magnetic field of magnetic circuit Qb and the interaction of electric current, according to Fleming's Left Hand Rule, the winding effect on the downside of this has towards the power of X-direction opposite side.By the above, induce towards the power of X-direction opposite side (the white arrow with reference in Fig. 1 (a)) at the armature coil 106 in left side.
And in the armature coil 106 in left side, in the winding of upside, current i is flowing from Y-direction opposite side to the direction of Y-direction side.Consequently, by the downward magnetic field of magnetic circuit Qa and the interaction of electric current, according to Fleming's Left Hand Rule, the winding effect on the upside of this has towards the power of X-direction opposite side.On the other hand, in the winding of the downside of the armature coil 106 in left side, in the above cases, on the contrary current i flowing from Y-direction side to the direction of Y-direction opposite side.Consequently, by the magnetic field upwards of magnetic circuit Qb and the interaction of electric current, according to Fleming's Left Hand Rule, the winding effect on the downside of this has towards the power of X-direction opposite side.By the above, also induce towards the power of X-direction opposite side (the white arrow with reference in Fig. 1 (a)) at the armature coil 106 in left side.
Above as a result, produce the thrust (the white arrow with reference in Fig. 1 (c)) to X-direction opposite side at the armature 105 of the armature coil 106,106 possessing the left and right sides.And, when the current i of flowing in the armature coil 106,106 in left and right is set to direction contrary to the above, by above-mentioned principle, produce the thrust of the X-direction side to direction contrary to the above at armature 105.Thus, armature 105 is relative to yoke plate 103a, 103b of the upper and lower of excitation member 101, and the energising direction according to current i can X-shift.Consequently, the driven part being installed on the such as not shown table device of the armature matrix 107 of armature 105 can drive to X-direction side and opposite side by linear electric motors 100.
The comparative example > of < present embodiment
Next, by Fig. 2 (a) ~ (c), the comparative example relative with the above-mentioned execution mode representing principle is described.Same Reference numeral is marked for the part equal with the above-mentioned execution mode representing principle, suitably omits or simplified illustration.
As shown in Fig. 2 (a) ~ Fig. 2 (c), in the linear electric motors 100 ' of this comparative example, permanent magnet 104 ' arranges along the X direction multipair (be in this example embodiment two to) in mode paired up and down in the opposed faces of yoke plate 103a, 103b of the upper and lower of the yoke matrix 102 of excitation member 101.In this multiple permanent magnet 104 ', be each heteropole with permanent magnet 104 ', 104 ' adjacent in X direction and permanent magnet 104 ', the 104 ' paired in the vertical direction mode that (magnetic pole of armature coil 106 ' side) becomes heteropole each other configures.And an armature coil 106 ' of armature 105 is configured between above-mentioned upper and lower permanent magnet 104 ', 104 ' in (with each permanent magnet 104 ' across magnetic gap) opposed mode.In addition, in this armature coil 106 ', be that axle center is to the winding that reels with Z-direction.
< magnetic circuit >
By said structure, form the magnetic circuit Q ' shown in Fig. 2 (c).Namely, in this magnetic circuit Q ', from the N pole magnetic flux out of permanent magnet 104 ' in the left side that yoke plate 103a is up arranged enter top yoke 103a and towards after right side, the S pole of the permanent magnet 104 ' that the right side entering yoke 103a is up arranged, at the permanent magnet 104 ' crossed from the top down on the right side of this afterwards, the S pole of the permanent magnet 104 ' that the right side that the N pole of the permanent magnet 104 ' on the right side of this out enters the yoke plate 103b in below is arranged.Then, magnetic flux becomes the permanent magnet 104 ' crossed from the top down on the right side of this, the N pole of the permanent magnet 104 ' on the right side of this enter the yoke plate 103b of below after towards left side, after the S pole of the permanent magnet 104 ' that the left side entering the yoke plate 103b in below is arranged, cross the permanent magnet 104 ' on the left of this from bottom to top and from N pole out, return to this series of path, S pole of the permanent magnet 104 ' of the left side setting of yoke 103a up.
< is to the effect > of armature coil
Relative to the magnetic circuit Q ' formed as described above, the winding in the left side of armature coil 106 ' configures in the mode of crossing along Y-direction in the magnetic field upwards of magnetic circuit Q ', and the winding on right side configures in the mode of crossing along Y-direction in the downward magnetic field of magnetic circuit Q '.
Further, in this comparative example, in armature coil 106 ', current i is with such as illustrated towards flowing.In this case, in the winding in the left side of armature coil 106 ', current i is flowing from Y-direction side (right side in Fig. 2 (a) in side, right front, Fig. 2 (b), the side, front in Fig. 1 (c)) to the direction of Y-direction opposite side (left side in Fig. 2 (a) in side, left depths, Fig. 2 (b), the side, depths in Fig. 2 (c)).Consequently, by the magnetic field upwards of magnetic circuit Q ' and the interaction of electric current, according to Fleming's Left Hand Rule, the winding effect on the left of this has the power from X-direction side (Fig. 2 (a) side, front in side, left front, Fig. 2 (b), the left side in Fig. 2 (c)) towards X-direction opposite side (in Fig. 2 (a) side, depths in side, right depths, Fig. 2 (b), the right side in Fig. 2 (c)).On the other hand, in the winding in the left side of armature coil 106 ', in the above cases, the result that current i similarly flows from Y-direction opposite side to Y-direction side is, by the downward magnetic field of magnetic circuit Q ' and the interaction of electric current, according to Fleming's Left Hand Rule, the power towards X-direction side works.By the above, induce towards the power of X-direction side at an armature coil 106 ', produce the thrust to X-direction side at the armature 105 possessing this armature coil 106 '.And, when be set in the current i of the middle flowing of armature coil 106 ' contrary to the above towards time, produce in armature 105 towards the thrust of the X-direction opposite side in direction contrary to the above.Thus, armature 105 can X-shift relative to yoke plate 103a, 103b of the upper and lower of excitation member 101.Consequently, the linear electric motors 100 ' of this comparative example are also same with the above-mentioned execution mode representing principle, and the such as not shown driven part that can be installed on the armature matrix 107 of armature 105 drives to X-direction side and opposite side.
The problem points > of < comparative example
As mentioned above, in the linear electric motors 100 ' of the comparative example shown in Fig. 2, armature 105 can X-shift relative to yoke plate 103a, 103b of the upper and lower of excitation member 101.But, in these linear electric motors 100 ', each right permanent magnet 104 ', 104 ' mutually opposing in two yoke plates 103a, 103b to becoming mutually heteropole (N pole and S pole or S pole and N pole).Therefore, each centering of permanent magnet 104 ', mutually attraction is produced.Therefore, in order to prevent the flexure of yoke plate 103a, 103b that brings due to this attraction and the contact of yoke plate 103a, 103b and armature 105, the rigidity improving excitation member 101 is needed.Consequently, have to make the gauge of yoke plate 103a, 103b larger, thus the miniaturization and of linear electric motors 100 ' entirety becomes difficulty.
The effect > of < present embodiment
In contrast, in the linear electric motors 100 of the present embodiment shown in Fig. 1, each right permanent magnet 104,104 mutually opposing in two yoke plates 103a, 103b becomes mutually homopolarity (N pole and N pole or S pole and S pole).Thus, in each right magnet 104,104, mutually repulsive force is produced.Consequently, different from the above-mentioned variation producing attraction as mentioned above, without the need to the rigidity in order to prevent the contact of yoke plate 103a, 103b and armature 105 from improving excitation member 101, such as, the gauge of yoke plate 103a, 103b can be made smaller.Consequently, the miniaturization and of linear electric motors 100 entirety can be realized.
< first execution mode >
Next, by Fig. 3 ~ Figure 10, the principle that application the is above-mentioned and diaxon linear electric motors of armature first execution mode of movement in X-direction and this two direction of principal axis of Y-direction can be made.
< schematic configuration >
As shown in Fig. 3 to Fig. 7, the linear electric motors 1 of present embodiment possess excitation member 10 and armature 20, are configured with armature 20 in the inner side of excitation member 10.
Excitation member 10 have along the vertical direction (Z-direction) two rectangular plate-like arranged opposite yoke plate 11a, 11b, in the respective opposed faces (medial surface) of two yoke plates 11a, 11b upper above lower be for a pair one group and multiple X-directions arranged opposite move with magnet 14 (being equivalent to the first permanent magnet) and lower be above for a pair one group and multiple Y-directions arranged opposite move with magnet 15 (being equivalent to the second permanent magnet).In this example embodiment, X-direction moves to move with magnet 14 and Y-direction and is formed as thin flat elongated rectangular-shaped with magnet 15, has roughly the same thickness all in the height direction.
Two yoke plates 11a, 11b are linked between the end of Y-direction opposite side (side, left depths) by yoke matrix 12, form the yoke 13 as cross section roughly U-shaped.Tripartite, i.e. the Y-direction side of the in-plane of yoke 13 except above-mentioned Y-direction opposite side, X-direction side and X-direction opposite side open wide.
Armature 20 has: the armature molding section 21 with the rectangular plate-like of the face parallel with above-mentioned yoke plate 11a, 11b; At the armature matrix 22 that an end of armature molding section 21 is arranged.The X-direction that armature molding section 21 is configured in a yoke plate 11a moves to move to move by the X-direction of magnet 15 and another yoke plate 11b with magnet 14 and Y-direction and moves with between magnet 15 with magnet 14 and Y-direction.
One end of armature molding section 21 is exposed from the peristome of the side (Y-direction side) contrary with yoke matrix 12, is fixed with above-mentioned armature matrix 22 in an above-mentioned end of exposing of armature molding section 21.Armature matrix 22 is the components not shown driven part driven by linear electric motors 1 combined, and is combined by linear electric motors 1, is used as the drive source of the straight-moving mechanism of table device via armature matrix 22 with such as table device.In this example embodiment, this armature matrix 22 is formed as the slab of the rectangular shape orthogonal with armature molding section 21.In addition, prevent armature matrix 22 under the object of the intrusion in yoke 13 in realization, armature matrix 22 is arranged with the height of magnet 15 to move throughout the X-direction of a yoke plate (being suitably called " yoke plate of top ") 11a to move to move to move with magnet 14 and Y-direction by the X-direction of magnet 15 and another yoke plate (being suitably called " yoke plate of below ") 11b with magnet 14 and Y-direction.
The X-direction of < excitation member moves uses magnet >
As shown in Figure 6, multiple (being four in this example embodiment) X-direction that yoke plate 11a above excitation member 10 is arranged moves with magnet 14 with its length direction and Y-direction attitude unanimous on the whole, the side (in Fig. 6 side, left front) of the X-direction of the opposed faces of yoke plate 11a upward and opposite side (in Fig. 6 side, right depths) dispersion, each configuration two respectively.And four X-directions of the yoke plate 11a of top move the mode that two X-directions outside by the X-direction in magnet 14 move with magnet 14,14 becomes neat face with the X-direction both ends of the surface of the yoke plate 11a with top and configure.Two X-directions inside remaining X-direction move to separate large interval (moving the configuration space with magnet 15 for the formation of Y-direction described later) with magnet 14,14 in the X-direction center side of yoke plate 11a and move with the X-direction in outside and separate the closely-spaced of regulation with magnet 14 and configure.Now, four X-directions of the yoke plate 11a of top move and arrange in the mutually different mode of magnetic pole of adjacent (side right with armature 20 side) each other NS with magnet 14.In this example embodiment, with become from X-direction side (in Fig. 6 side, left front) towards X-direction opposite side (side, right depths in Fig. 6) N pole, S pole, N pole, S pole the mode of order configure.
On the other hand, as shown in Figure 7, multiple (being four in this example embodiment) X-direction that yoke plate 11b in the below of excitation member 10 is arranged moves with magnet 14 with its length direction and Y-direction attitude unanimous on the whole, the side (side, left front in Fig. 7) of the X-direction of the opposed faces of yoke plate 11b downwards and opposite side (side, right depths in Fig. 7) dispersion, each configuration two respectively.Now, as shown in Figure 6, four X-directions of the yoke plate 11b of below move and move with magnet 14 paired in the vertical direction respectively by magnet 14 and four X-directions of the yoke plate 11a of above-mentioned top.And four X-directions of the yoke plate 11b of below move the mode that two X-directions outside by the X-direction in magnet 14 move with magnet 14,14 becomes neat face with the X-direction both ends of the surface of the yoke plate 11b with below and configure.Two X-directions inside remaining X-direction move to separate large interval (moving the configuration space with magnet 15 for the formation of Y-direction described later) with magnet 14,14 in the X-direction center side of yoke plate 11b and move with the X-direction in outside and separate the closely-spaced of regulation with magnet 14 and configure.Further, four X-directions of the yoke plate 11b of below move to move by magnet 14 and above-mentioned X-direction and arrange by the same mutually different mode of magnetic pole with adjacent (side right with armature 20 side) each other NS of magnet 14.In this example embodiment, with become from X-direction side (side, left front in Fig. 7) towards X-direction opposite side (side, right depths in Fig. 7) N pole, S pole, N pole, S pole the mode of order configure.That is, the X-direction that yoke plate 11a is up arranged moves and arranges with magnet 14 and in the mode that the X-direction that the yoke plate 11b of below is arranged moves with the magnetic pole of magnet more than 14 times a pair (side right with armature 20 side) NS becomes mutual homopolarity.
In addition, move to move by four X-directions of the yoke plate 11b of magnet 14 and below by four X-directions of the yoke plate 11a of top arranged along the X direction as mentioned above and form the first magnet row 64 with magnet 14.
The Y-direction of < excitation member moves uses magnet >
Return Fig. 6, multiple (being five in this example embodiment) Y-direction that yoke plate 11a above excitation member is arranged moves with magnet 15 with its length direction and X-direction attitude unanimous on the whole, and the X-direction central portion of the opposed faces of yoke plate 11a is up configured to row along the Y direction.Five Y-directions configure with moving the small―gap suture mutually separating regulation with magnet 15 along Y-direction.The mode that the Y-direction of the Y-direction side (side, right front in Fig. 6) in them moves with magnet 15 becomes neat face with the end face of the Y-direction side of the yoke plate 11a with top configures.And the Y-direction of the Y-direction opposite side (side, left depths in Fig. 6) in them moves the configuration with gap separating regulation with magnet 15 and yoke matrix 12.Now, five Y-directions of the yoke plate 11a of top move and arrange in the mutually different mode of magnetic pole of adjacent (side right with armature 20 side) each other NS with magnet 15.In this example embodiment, with become from Y-direction side (side, right front in Fig. 6) towards Y-direction opposite side (side, left depths in Fig. 6) N pole, S pole, N pole, S pole, N pole the mode of order configure.
On the other hand, as shown in Figure 7, multiple (being five in this example embodiment) Y-direction that yoke plate 11b in the below of excitation member 10 is arranged moves with magnet 15 with its length direction and X-direction attitude unanimous on the whole, and the X-direction central portion of the opposed faces of the yoke plate 11b in below is configured to row along the Y direction.Multiple Y-directions of the yoke plate 11b of below configure with moving the small―gap suture mutually separating regulation with magnet 15 along Y-direction.The mode that the Y-direction of the Y-direction side (side, right front in Fig. 7) in them moves with magnet 15 becomes neat face with the end face of the Y-direction side of the yoke plate 11b with below configures.And the Y-direction of the Y-direction opposite side (side, left depths in Fig. 7) in them moves the configuration with gap separating regulation with magnet 15 and yoke matrix 12.Now, as shown in Figure 6, five Y-directions of the yoke plate 11b of below move and move with magnet 15 paired in the vertical direction respectively by magnet 15 and five Y-directions of the yoke plate 11a of above-mentioned top.And, as shown in Figure 7, five Y-directions of the yoke plate 11b of below move with magnet 15 different and arrange with the mode that the Y-direction of the yoke plate 11a of paired top moves with magnet 15 becomes heteropole with the magnetic pole of adjacent (side right with armature 20 side) each other NS.That is, in this example embodiment, with become from Y-direction side (side, right front in Fig. 7) towards Y-direction opposite side (side, left depths in Fig. 7) S pole, N pole, S pole, N pole, S pole the mode of order configure.
In addition, move to move by five Y-directions of the yoke plate 11b of magnet 15 and below by five Y-directions of yoke plate 11a of the top along Y-direction arrangement described above and form the second magnet row 65 with magnet 15.
The detailed construction > of < armature
As can be seen from figures 8 and 9, the armature molding section 21 of armature 20 has multiple X-direction and moves and move with three-phase coil 24 (being equivalent to the second armature coil) as armature coil with single phase winding 23 (being equivalent to the first armature coil) and multiple Y-direction.In this example embodiment, armature molding section 21 is undertaken resin molded by the entirety of three-phase coil 24 by moving this multiple X-direction to move with single phase winding 23 and Y-direction and is formed as rectangular plate-like.
In this example embodiment, X-direction moves that to become with single phase winding 23 with X-direction be the mode of the oval shape ring of laying across elongated in the Y direction that axle center is wound.Multiple (being four in this example embodiment) X-direction moves with single phase winding 23 with its length direction and Y-direction attitude unanimous on the whole, in this example embodiment, distinguishes each configuration two to the X-direction side of armature molding section 21 and the dispersion of X-direction opposite side.Four X-direction two X-directions moved outside by the X-direction in single phase winding 23 move and configure in the mode becoming the position close with the X-direction both ends of the surface of armature molding section 21 with single phase winding 23.Two X-directions inside remaining X-direction move to separate large interval (moving the configuration space with three-phase coil 24 for the formation of Y-direction described later) with single phase winding 23 at the X-direction central portion of armature molding section 21 and move with the X-direction in outside and separate the closely-spaced of regulation with single phase winding 23 and configure.And as shown in Figure 8, four X-directions move with single phase winding 23 all to make Y-direction opposite side close to the end face of the Y-direction opposite side of armature molding section 21 and the mode making Y-direction side and armature matrix 22 separate the gap of regulation configures.
In addition, four X-directions by arranging in X direction as mentioned above move and form the first armature coil row 73 with single phase winding 23.First armature coil row 73 are opposed across magnetic gap ground with the first upper and lower magnet row 64,64 of aforesaid excitation member 10.
And, the region with single phase winding 23 is moved in the configuration X-direction of armature molding section 21, be that axis reels winding with X-direction because this X-direction moves with single phase winding 23, therefore utilize the hollow portion of this coil 23, fluid flowing path 28 (being equivalent to first fluid stream) through is in X direction set.By making cooling fluid circulate in fluid flowing path 28, easily and reliably can carry out X-direction and moving the cooling using single phase winding 23.
In this example embodiment, Y-direction moves that to become with three-phase coil 24 with Z-direction be the mode of the upright oval shape ring elongated in the X direction that axis is wound.Multiple (being three in this example embodiment) Y-direction to move with three-phase coil 24 with its length direction and X-direction attitude unanimous on the whole, in this example embodiment, is configured to row along the Y direction at the X-direction central portion of armature portion 21.These three Y-directions move with three-phase coil 24 mutually along the adjacent configuration of Y-direction, and the Y-direction of Y-direction opposite side (side, left depths in Fig. 8) wherein moves and configures in the mode of the end face of the Y-direction opposite side close to armature molding section 21 with three-phase coil 24.The Y-direction of Y-direction side (side, right front of Fig. 8) moves uses three-phase coil 24 relative to armature matrix 22, separates the configuration with gap of moving the regulation using single phase winding 23 same with X-direction.
In addition, move and form the second armature coil row 74 by three Y-directions along Y-direction arrangement described above with three-phase coil 24.Second armature coil row 74 are opposed across magnetic gap ground with the second upper and lower magnet row 65,65 of aforesaid excitation member 10.
< produces > based on the X-direction thrust of the energising of armature coil
In said structure, as used Fig. 1 (a) etc. illustrates in above-mentioned representing in the execution mode of principle, make current i with adjacent be each contrary towards mode move with flowing in single phase winding 23 four X-directions, X-direction thus by being located at yoke plate 11a, 11b moves the interaction of magnetic circuit (with the magnetic circuit that aforesaid magnetic circuit Qa, Qb are equal) and the current i formed with magnet 14, can produce thrust relative to yoke plate 11a, 11b X-shift in armature molding section 21.
Such as shown in Fig. 9, the X-direction of the side, front that keeps left most in the drawings moves in the winding with the upside of single phase winding 23, current i is flowing from Y-direction opposite side (side, left depths in Fig. 9) to the direction of Y-direction side (side, right front in Fig. 9), in the winding of downside, current i is flowing from Y-direction side to the direction of Y-direction opposite side.Thus, by the interaction of aforesaid magnetic circuit and electric current, there is () from X-direction side (side, left front Fig. 9) towards the power of X-direction opposite side (side, right depths in Fig. 9) in these both sides of winding effect of above-mentioned upside and downside in the execution mode representing principle as mentioned above.And, moving in the winding moving the upside using single phase winding 23 by the X-direction that the side, right depths of single phase winding 23 is adjacent with above-mentioned X-direction, current i is flowing from Y-direction side to the direction of Y-direction opposite side, in the winding of downside, current i is flowing from Y-direction opposite side to the direction of Y-direction side.Thus, there is () from X-direction side (side, left front Fig. 9) towards the power of X-direction opposite side (side, right depths in Fig. 9) in these both sides of winding effect of above-mentioned upside and downside in the execution mode representing principle as mentioned above.By the above, move in above-mentioned two X-directions and induce towards the power of X-direction opposite side (the white arrow with reference in Fig. 9) with this two side of single phase winding 23,23.
Equally, the X-direction of side, depths of keeping right most in fig .9 moves in the winding with the upside of single phase winding 23, current i is flowing from Y-direction side to the direction of Y-direction opposite side, and in the winding of downside, current i is flowing from Y-direction opposite side to the direction of Y-direction side.And, moving in the winding moving the upside using single phase winding 23 by the X-direction that the side, left front of single phase winding 23 is adjacent with this X-direction, current i is flowing from Y-direction opposite side to the direction of Y-direction side, in the winding of downside, current i is flowing from Y-direction side to the direction of Y-direction opposite side.Thus, as described above, move in above-mentioned two X-directions and to induce with this two side of single phase winding 23,23 towards the power of X-direction opposite side (the white arrow with reference in Fig. 9).
As previously discussed, by above-mentioned energising form, can move four X-directions and induce towards the power of X-direction opposite side with single phase winding 23, produce the thrust to X-direction opposite side at armature 20.And, by move four X-directions with the current i of flowing in single phase winding 23 be set to contrary to the above towards time, according to above-mentioned principle, the thrust of the X-direction side to direction contrary to the above can be produced at armature 20.Consequently, in linear electric motors 1, the above-mentioned driven part that the armature matrix 22 of armature 20 is installed can be driven to X-direction side and opposite side.
< produces > based on the Y-direction thrust of the energising of armature coil
When move to three Y-directions arranged along Y-direction connect three-phase alternating current with three-phase coil 24 time, by the interaction of magnetic circuit and electric current, can produce relative to yoke plate 11a, 11b thrust along Y-direction displacement in armature molding section 21.
The comparative example > of < present embodiment
Next, by Figure 10, the comparative example relative with above-mentioned first execution mode is described.Same Reference numeral is marked for the part equal with above-mentioned first execution mode, suitably omits or simplified illustration.
As shown in Figure 10, in this comparative example, four X-directions replacing the armature molding section 21 of the first execution mode shown in above-mentioned Fig. 9 move with single phase winding 23, will be that the reel X-direction of winding of axle center moves to move three Y-directions with single phase winding 25 and distinguishes each configuration one (adding up to two) with the X-direction both sides of three-phase coil 24 with Z-direction.
And, in this comparative example, although omit detailed diagram, but at two yoke plate 11a of excitation member 10, in the opposed faces of 11b, replace the first execution mode shown in above-mentioned Fig. 9 by X-direction move formed with magnet 14 the first magnet row 64 (with mutually opposing X-direction move with magnet 14 to mutually each other homopolarity and these X-directions move arrange by magnet 14 mode that alternately polarity is different in X direction), and use with mutually opposing X-direction move with magnet 14 to mutually heteropole (N pole and S pole each other, or S pole and N pole) and the magnet that these X-directions move with magnet 14 mode that alternately polarity is different in X direction arranges arrange.
In the structure shown in Figure 10, current i two X-directions move with become mutually respectively in single phase winding 25,25 flow in the same way time, as used Fig. 2 (a) etc. illustrates in above-mentioned representing in the comparative example of the execution mode of principle, moved the interaction of magnetic circuit (with the magnetic circuit that the magnetic circuit Q ' of Fig. 2 (c) is equal) and the current i formed with magnet 25 by the above-mentioned X-direction being located at yoke plate 11a, 11b, the thrust relative to yoke plate 11a, 11b X-shift can be produced in armature molding section 21.
The problem points > of < comparative example
As mentioned above, in the structure of the comparative example using Figure 10 to illustrate, can apply respectively in X direction for yoke plate 11a, 1b and the thrust of Y-direction displacement.But, in the structure shown here, X-direction mutually opposing in two yoke plates 11a, 11b move with magnet 14 to and Y-direction move with magnet 15 to becoming mutually heteropole (N pole and S pole or S pole and N pole).Consequently, X-direction move with magnet 14 each to and Y-direction move each centering with magnet 15, all mutually produce attraction.Therefore, in order to prevent the flexure of yoke plate 11a, 11b that brings due to this attraction and the contact of yoke plate 11a, 11b and armature 20, the rigidity improving yoke 13 is needed.Consequently, have to make the gauge of yoke plate 11a, 11b larger, the miniaturization and of linear electric motors entirety becomes difficulty.
The effect > of < first execution mode
Relative to this, in the linear electric motors 1 of the present embodiment shown in Fig. 3 ~ Fig. 9, as previously mentioned, in the first magnet row 64, mutually opposing X-direction moves becoming mutually homopolarity (N pole and N pole or S pole and S pole) (especially with reference to Fig. 6 etc.) (X-direction moves the magnetic pole with single phase winding 23 side) with magnet 14, each centering, mutually produce repulsive force.Thus, though Y-direction move with magnet 15 to (same with above-mentioned comparative example) mutually heteropole each other, by these Y-directions move with magnet 15 to the attraction that also can relax two yoke plate 11a, 11b generations.Consequently, without the need to improving the rigidity of yoke 13 and the gauge of yoke plate 11a, 11b can being reduced, therefore, it is possible to realize the miniaturization and of linear electric motors 1 entirety.
And in the present embodiment, especially yoke 13 is configured to the U-shaped that two yoke plates 11a, 11b are linked by yoke matrix 12.When yoke 13 of such U-shaped, opposed X-direction move with magnet 14 to or Y-direction move with magnet 15 to mutually each other heteropole time, the flexure that above-mentioned attraction causes especially easily produces.Therefore, make X-direction move as mentioned above and use the effective especially to the flexure preventing effectiveness of homopolarity generation each other mutually of magnet 14.
And, in the present embodiment, especially move to the Y-direction being arranged in row and configure X-direction dispersedly with the X-direction side of magnet 15 and these both sides of opposite side and move with magnet 14.Thus, moved by the Y-direction of heteropole and relax with the right repulsive force of magnet 14 with moving the attraction produced near the second magnet row 65 of yoke plate 11a, 11b X-direction that is homopolarity by the both sides at these the second magnet row 65 of magnet 15, thus can deflection be there is no and obtain the flexure preventing effectiveness of yoke 13 more equably.Consequently, the contact of yoke plate 11a, 11b and armature 20 can reliably be prevented.
And in the present embodiment, especially in armature molding section 21, utilizing X-direction to move with single phase winding 23 is that axis reels the situation of winding with X-direction, arranges fluid flowing path 28 through in X direction in the mode in the hollow portion effectively utilizing this coil 23.Thereby, it is possible to easily and reliably carry out X-direction and move cooling with single phase winding 23.In addition, form a series of magnetic circuit by inserting magnetic to the hollow portion of coil 23, the characteristic that can realize motor improves.
< second execution mode >
In the above-described first embodiment, situation about applying in X direction the above-mentioned propulsive force representing the principle illustrated in the execution mode (with reference to Fig. 1) of principle to be produced structure is illustrated.This second execution mode is the example this propulsive force being produced the situation that structure is applied along Y-direction.For the part equal with above-mentioned first execution mode, mark same Reference numeral, omit or simplify suitably explanation.
That is, in this embodiment, as shown in figure 11, the armature molding section 21 of armature 20 possesses the first armature coil row 75 of single-phase winding and the second armature coil row 76 of three-phase windings.
Same with the situation shown in the Figure 10 as aforesaid comparative example, the first armature coil row 75 arrange in the mode multiple (being two in this example embodiment) X-direction moved with single phase winding 25,25 is separated along the X direction mutually dispersedly.Moving with in single phase winding 25 in each X-direction, is that axle center reels winding with Z-direction.And, now, although omit detailed diagram, but in the first magnet row of excitation member 10, with mutually opposing two X-directions move with magnet 14 heteropole is become mutually to the magnetic pole of (side right from armature 20 side) NS and in X direction and this X-direction moves and configures by magnet 14 mode that alternately polarity is different.
In the second armature coil row 76, move with between single phase winding 25,25 in X-direction, multiple (being six in this example embodiment) Y-direction moves and is arranged in row along the Y direction with three-phase coil 26.Moving with in three-phase coil 26 in each Y-direction, is that axle center reels winding with Y-direction.And, now, although omit detailed diagram, but in the second magnet row of excitation member 10, with mutually opposing two Y-directions move with magnet 15 homopolarity is become mutually to the magnetic pole of (side right from armature 20 side) NS and along Y-direction, this Y-direction moves and configures by magnet 15 mode that alternately polarity is different.
And, the region with three-phase coil 26 is moved in the configuration Y-direction of armature molding section 21, utilizing this Y-direction to move with coil 26 is that axis reels the hollow portion of winding with Y-direction, arranges along the through fluid flowing path 29 (being equivalent to second fluid stream) of Y-direction.By making cooling fluid circulate in fluid flowing path 29, easily and reliably can carry out Y-direction and moving the cooling using coil 26.
In said structure, to six Y-directions arranged along Y-direction move connect three-phase alternating current with three-phase coil 26 time, by the interaction of magnetic circuit and electric current, can produce relative to yoke plate 11a, 11b thrust along Y-direction displacement in armature molding section 21.Consequently, in the linear electric motors of present embodiment, the above-mentioned drive division that the armature matrix 22 of armature 20 is installed can be driven to Y-direction side and opposite side.
And, move with in single phase winding 25 in two X-directions arranged in X direction, as used Fig. 2 (a) etc. illustrates in above-mentioned representing in the comparative example of the execution mode of principle, current i moves two X-directions and flows in the same way with becoming mutually respectively in single phase winding 25, X-direction thus by being located at yoke plate 11a, 11b moves the interaction of magnetic circuit (with the magnetic circuit that aforesaid magnetic circuit Q ' is equal) and the current i formed with magnet 14, can produce thrust relative to yoke plate 11a, 11b X-shift in armature molding section 21.Consequently, in the linear electric motors of present embodiment, the above-mentioned driven part that the armature matrix 22 of armature 20 is installed can be driven to X-direction side and opposite side.
The effect > of < second execution mode
In the linear electric motors of present embodiment, as previously mentioned, in the second magnet row of excitation member 10, mutually opposing Y-direction moves and becomes mutually homopolarity (N pole and N pole or S pole and S pole) with magnet 15 to (Y-direction moves the magnetic pole with coil 26 side), each centering, mutually produce repulsive force.Thereby, it is possible to relax X-direction move with magnet 14 to mutually each other heteropole and by above-mentioned X-direction move with magnet 14 to the attraction two yoke plate 11a, 11b generations.Consequently, without the need to improving the rigidity of yoke 13 and the gauge of yoke plate 11a, 11b can being reduced, therefore, it is possible to realize the miniaturization and of linear electric motors entirety.
And in the present embodiment, especially yoke 13 is configured to the U-shaped that two yoke plates 11a, 11b are linked by yoke matrix 12.When yoke 13 of such U-shaped, opposed X-direction move with magnet 14 to or Y-direction move with magnet 15 to mutually each other heteropole time, the flexure that above-mentioned attraction causes especially easily produces.Therefore, make Y-direction move as mentioned above and use the effective especially to the flexure preventing effectiveness of homopolarity generation each other mutually of magnet 15.
And in the present embodiment, especially in armature molding section 21, utilizing Y-direction to move with three-phase coil 26 is that axis reels the situation of winding with Y-direction, arranges along the through fluid flowing path 29 of Y-direction in the mode in the hollow portion effectively utilizing this coil 26.Thereby, it is possible to easily and reliably carry out Y-direction and move cooling with three-phase coil 26.In addition, form a series of magnetic circuit by inserting magnetic to the hollow portion of coil 26, the characteristic that can realize motor improves.
In addition, in the structure of the second execution mode shown in above-mentioned Figure 11, move to the Y-direction being arranged in row and configure X-direction dispersedly with the X-direction side of magnet 15 and these both sides of opposite side and move with magnet 14.Also can replace, (diagram omit) moves to the Y-direction being arranged in row and configures X-direction dispersedly with the Y-direction side of magnet 15 and these both sides of opposite side and move use magnet 14.In this case, by the X-direction of heteropole move with magnet 14 to and near the first magnet row of yoke plate 11a, 11b the attraction of the generation Y-direction that is homopolarity by the both sides arranged at this first magnet move and relax with the right repulsive force of magnet 15, can not deflection and obtain the flexure preventing effectiveness of yoke 13 more equably.Consequently, the contact of yoke plate 11a, 11b and armature 20 can reliably be prevented.
< the 3rd execution mode >
In the above-described 2nd embodiment, situation about applying along Y-direction the above-mentioned propulsive force representing the principle illustrated in the execution mode (with reference to Fig. 1) of principle to be produced structure is illustrated.3rd execution mode this propulsive force is produced structure in X direction and the example of situation of Y-direction application.For the part equal with first and second execution mode above-mentioned, mark same Reference numeral, suitably omit or simplified illustration.
That is, in this embodiment, as shown in figure 12, the first armature coil row 73 same with above-mentioned first execution mode and the second armature coil row 76 same with above-mentioned second execution mode are possessed in the armature molding section 21 of armature 20.
In the second armature coil row 76, with aforesaid situation is same in this second embodiment, multiple (being six in this example embodiment) Y-direction moves and is arranged in row with three-phase coil 26 along Y-direction, moves with in coil 26 in each Y-direction, is that axle center reels winding with Y-direction.And, although omission detailed icon, but in the second magnet row of excitation member 10, with mutually opposing two Y-directions move with magnet 15 homopolarity is become mutually to the magnetic pole of (side right from armature 20 side) NS and along Y-direction, this Y-direction moves and configures by magnet 15 mode that alternately polarity is different.
In the first armature coil row 73, same with aforesaid in the first embodiment situation, multiple (being four in this example embodiment) X-direction moves and respectively arranges two with single phase winding 26 dispersedly to the X-direction side of the second armature coil row 76 and opposite side.Moving with in single phase winding 23 in each X-direction, is that axle center reels winding with X-direction.And, although omit detailed diagram, but in the first magnet row of excitation member 10, with mutually opposing two X-directions move with magnet 14 homopolarity is become mutually to the magnetic pole of (side right from armature 20 side) NS and in X direction and the mode that this X-direction moves with magnet 14 alternately becomes polarity different configures.
In said structure, same with aforementioned, to six Y-directions arranged along Y-direction move connect three-phase alternating current with three-phase coil 26 time, by the interaction of magnetic circuit and electric current, can produce relative to yoke plate 11a, 11b thrust along Y-direction displacement in armature molding section 21.And, equally, current i moves with flowing in single phase winding 23 in the adjacent mode being each contrary direction four X-directions, X-direction thus by being located at yoke plate 11a, 11b moves the interaction of magnetic circuit (with the magnetic circuit that aforesaid magnetic circuit Qa, Qb are equal) and the current i formed with magnet 14, can produce the thrust relative to yoke plate 11a, 11b X-shift in armature molding section 21.Above-mentioned as a result, in the linear electric motors of present embodiment, the above-mentioned driven part that the armature matrix 22 of armature 20 is installed can be driven respectively to Y-direction side and opposite side, X-direction side and opposite side.
The effect > of < the 3rd execution mode
In the linear electric motors of present embodiment, the effect of above-mentioned first execution mode and the second execution mode can be obtained in the lump.Namely, as previously mentioned, in the first magnet row of excitation member 10, mutually opposing X-direction moves and becomes mutually homopolarity (N pole and N pole or S pole and S pole) with magnet 14 to (X-direction moves the magnetic pole with single phase winding 23 side), each centering, mutually produce repulsive force.And, in the second magnet row of excitation member 10, also be that mutually opposing Y-direction moves and becomes mutually homopolarity (N pole and N pole or S pole and S pole) with magnet 15 to (Y-direction moves the magnetic pole with coil 26 side), each centering, mutually produce repulsive force.Like this, being the result moved with the centering of magnet 14 or the centering of movement magnet 15 are in the Y direction all the effects of (attraction does not act on) repulsive force in X-direction is, the gauge of yoke plate 11a, 11b can be reduced more reliably, therefore, it is possible to realize the miniaturization and of linear electric motors entirety more reliably.
And, except above situation about having described, also can utilize appropriately combined for the gimmick of above-mentioned execution mode and variation.
In addition, although do not illustrate one by one, above-mentioned execution mode and variation can apply various change in the scope not departing from its purport are implemented.
Description of reference numerals
1 linear electric motors
10 excitation member
11a, b yoke plate
12 yoke matrixes
13 yokes
14X moves in direction with magnet (the first permanent magnet)
15Y moves in direction with magnet (the second permanent magnet)
20 armatures
21 armature molding section
23X moves in direction with single phase winding (the first armature coil)
24Y moves in direction with three-phase coil (the second armature coil)
25X moves in direction with single phase winding (the first armature coil)
26Y moves in direction with three-phase coil (the second armature coil)
28 fluid flowing paths (first fluid stream)
29 fluid flowing paths (second fluid stream)
64 first magnet row
65 second magnet row
73 first armature coil row
74 second armature coil row
75 first armature coil row
76 second armature coil row
I electric current
Qa, Qb magnetic circuit
Claims (11)
1. linear electric motors, using either party in armature and excitation member as mover and using the opposing party as stator, is characterized in that,
Described excitation member has:
Possess two yoke plates of mutually opposing opposed faces respectively; And
By the magnet row that multiple permanent magnet arranges in the prescribed direction along described two yoke plates described opposed faces separately,
Described armature has armature coil row, and described armature coil arranges and arranges opposed across magnetic gap with described magnet, and is arranged in described prescribed direction by multiple armature coil,
Described linear electric motors possess following configuration: in described armature coil row and the first magnet row, described armature coil with described prescribed direction for axle center and being wound, and mutually opposing two described permanent magnets to becoming mutually homopolarity and making along described prescribed direction the alternating polarity ground of this permanent magnet different.
2. linear electric motors according to claim 1, is characterized in that,
The described magnet row of described excitation member comprise:
By the first magnet row that multiple first permanent magnet arranges in a first direction along described two yoke plates described opposed faces separately; And
The second magnet that multiple second permanent magnet arranges in the second direction orthogonal with described first direction along the respective described opposed faces of described two yoke plates is arranged,
The described armature coil row of described armature comprise:
Arrange opposed across magnetic gap and described first magnet and the first armature coil that multiple first armature coil arranges in said first direction is arranged; And
Arrange opposed across magnetic gap and described second magnet and the second armature coil that multiple second armature coil arranges in this second direction arranged,
Described linear electric motors possess at least one party in the configuration of following (i), (ii):
I () is in described first armature coil row and described first magnet row, described first armature coil with described first direction for axle center and being wound, and mutually opposing two described first permanent magnets to becoming mutually homopolarity and making along described first direction the alternating polarity ground of this first permanent magnet different;
(ii) in described second armature coil row and described second magnet row, described second armature coil with described second direction for axle center and being wound, and mutually opposing two described second permanent magnets to becoming mutually homopolarity and making along described second direction the alternating polarity ground of this second permanent magnet different.
3. linear electric motors according to claim 2, is characterized in that,
Described excitation member has the yoke that shape of cross section is U-shaped,
This yoke possesses:
Described two yoke plates; And
By the yoke matrix that the end of the end of the described first direction side of these two yoke plates or described second direction side links.
4. linear electric motors according to claim 3, is characterized in that,
In described first armature coil row and described first magnet row, be configured to described first armature coil be wound for axle center with described first direction, and mutually opposing two described first permanent magnets to becoming mutually homopolarity and making along described first direction the alternating polarity of this first permanent magnet ground different
In described second armature coil row and described second magnet row, be configured to described second armature coil with the third direction orthogonal with described first direction and described second direction for axle center and being wound, and mutually opposing two described second permanent magnets to becoming mutually heteropole and making along described second direction the alternating polarity ground of this second permanent magnet different.
5. linear electric motors according to claim 3, is characterized in that,
In described second armature coil row and described second magnet row, be configured to described second armature coil be wound for axle center with described second direction, and mutually opposing two described second permanent magnets to becoming mutually homopolarity and making along described second direction the alternating polarity of this second permanent magnet ground different
In described first armature coil row and described first magnet row, be configured to described first armature coil with the third direction orthogonal with described first direction and described second direction for axle center and being wound, and mutually opposing two described first permanent magnets to becoming mutually heteropole and making along described first direction the alternating polarity ground of this first permanent magnet different.
6. linear electric motors according to claim 3, is characterized in that,
In described first armature coil row and described first magnet row, be configured to described first armature coil be wound for axle center with described first direction, and mutually opposing two described first permanent magnets to becoming mutually homopolarity and making along described first direction the alternating polarity of this first permanent magnet ground different
In described second armature coil row and described second magnet row, be configured to described second armature coil with described second direction for axle center and being wound, and mutually opposing two described second permanent magnets to becoming mutually homopolarity and making along described second direction the alternating polarity ground of this second permanent magnet different.
7. the linear electric motors according to claim 4 or 6, is characterized in that,
In described first magnet row,
The side along described first direction that described multiple first permanent magnet is arranged in row described second magnet to the described second permanent magnetic along described second direction arranges and opposite side configure dispersedly,
In described first armature coil row,
The side along described first direction that described multiple first armature coil is arranged in row described second armature coil to described second armature coil along described second direction arranges and opposite side configure dispersedly.
8. the linear electric motors according to claim 5 or 6, is characterized in that,
In described second magnet row,
The side along described second direction that described multiple second permanent magnet is arranged in row described first magnet to described first permanent magnet along described first direction arranges and opposite side configure dispersedly,
In described second armature coil row,
The side along described second direction that described multiple second armature coil is arranged in row described first armature coil to described first armature coil along described first direction arranges and opposite side configure dispersedly.
9. the linear electric motors according to claim 4 or 6, is characterized in that,
Described armature possesses the first fluid stream arranged along through described first armature coil of described first direction.
10. the linear electric motors according to claim 5 or 6, is characterized in that,
Described armature possesses the second fluid stream arranged along through described second armature coil of described second direction.
11. 1 kinds of table devices, is characterized in that,
Use the linear electric motors according to any one of claim 1 ~ 10 as the drive source of straight-moving mechanism.
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| PCT/JP2013/064623 WO2014192058A1 (en) | 2013-05-27 | 2013-05-27 | Linear motor and stage device |
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| CN105308839A true CN105308839A (en) | 2016-02-03 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107872140A (en) * | 2016-09-26 | 2018-04-03 | 上海微电子装备（集团）股份有限公司 | A kind of voice coil motor and stage apparatus |
| CN107482872B (en) * | 2017-06-26 | 2024-04-12 | 浙江大学 | Two-dimensional electromagnetic exciter |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005237078A (en) * | 2004-02-18 | 2005-09-02 | Toshiba Mach Co Ltd | Linear synchronous motor |
| JP2010074976A (en) * | 2008-09-19 | 2010-04-02 | Yaskawa Electric Corp | Xy-axes coreless linear motor and stage apparatus using the same |
| CN101771323A (en) * | 2009-01-07 | 2010-07-07 | 山洋电气株式会社 | Linear motor |
| JP2011193553A (en) * | 2010-03-11 | 2011-09-29 | Yaskawa Electric Corp | Coreless linear motor of two-degrees-of-freedom |
| CN102246401A (en) * | 2008-12-10 | 2011-11-16 | 株式会社日立制作所 | Thrust generation mechanism, drive device, XY stage, and XYZ stage |
| JP2013027054A (en) * | 2011-07-14 | 2013-02-04 | Yaskawa Electric Corp | Coreless linear motor |
| CN102934337A (en) * | 2010-06-09 | 2013-02-13 | 株式会社日立制作所 | Electric generator and power-generation device using same |
-
2013
- 2013-05-27 JP JP2015519510A patent/JPWO2014192058A1/en active Pending
- 2013-05-27 WO PCT/JP2013/064623 patent/WO2014192058A1/en active Application Filing
- 2013-05-27 CN CN201380076945.5A patent/CN105308839A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005237078A (en) * | 2004-02-18 | 2005-09-02 | Toshiba Mach Co Ltd | Linear synchronous motor |
| JP2010074976A (en) * | 2008-09-19 | 2010-04-02 | Yaskawa Electric Corp | Xy-axes coreless linear motor and stage apparatus using the same |
| CN102246401A (en) * | 2008-12-10 | 2011-11-16 | 株式会社日立制作所 | Thrust generation mechanism, drive device, XY stage, and XYZ stage |
| CN101771323A (en) * | 2009-01-07 | 2010-07-07 | 山洋电气株式会社 | Linear motor |
| JP2011193553A (en) * | 2010-03-11 | 2011-09-29 | Yaskawa Electric Corp | Coreless linear motor of two-degrees-of-freedom |
| CN102934337A (en) * | 2010-06-09 | 2013-02-13 | 株式会社日立制作所 | Electric generator and power-generation device using same |
| JP2013027054A (en) * | 2011-07-14 | 2013-02-04 | Yaskawa Electric Corp | Coreless linear motor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107872140A (en) * | 2016-09-26 | 2018-04-03 | 上海微电子装备（集团）股份有限公司 | A kind of voice coil motor and stage apparatus |
| CN107482872B (en) * | 2017-06-26 | 2024-04-12 | 浙江大学 | Two-dimensional electromagnetic exciter |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2014192058A1 (en) | 2017-02-23 |
| WO2014192058A1 (en) | 2014-12-04 |
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