CN105300321B - A kind of Small-deep Hole coaxiality detecting method and device - Google Patents
A kind of Small-deep Hole coaxiality detecting method and device Download PDFInfo
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- CN105300321B CN105300321B CN201510630006.1A CN201510630006A CN105300321B CN 105300321 B CN105300321 B CN 105300321B CN 201510630006 A CN201510630006 A CN 201510630006A CN 105300321 B CN105300321 B CN 105300321B
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- deep hole
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Abstract
The invention discloses a kind of Small-deep Hole coaxiality detecting method, sets target co-ordinates collecting device in deep hole one end, detection device is set in deep hole, some targets are provided with the detection device;The detection device is pushed to different depth position stopping in deep hole, the target co-ordinates collecting device gathers the coordinate value of the target in the stop position of detection device, measurement obtains deep hole central coordinate of circle value at this, pass through the central coordinate of circle value of different depth stop position, measurement obtains changing value of the deep hole axis in radial direction, by the target co-ordinates value of different depth stop position, measurement obtains deep hole diameter increm ent.The target co-ordinates collecting device uses photogrammetric camera, the target is disposed on the same plane by the one side of photogrammetric camera calibration, that is target plane, the detection device is after different depth position stops in deep hole, the target plane and deep hole axis automatic vertical.
Description
Technical field
The present invention relates to a kind of Small-deep Hole coaxiality detecting method, and in particular to the diverse location in Small-deep Hole
The method of measure center and the method for measuring diameter.The invention further relates to a kind of Small-deep Hole axiality detection device.
Background technology
500m bore spherical radio telescopes FAST(Five-hundred-meter Aperture Spherical
radio Telescope)It will be maximum, most sensitive radio astronomical telescope in the world.By the use of the hollow hole of Karst Area of Guizhou as
Platform location, interior laying spherical crown shape reflecting surface is cheated in low-lying area, parabola is formed by active control to converge electromagnetic wave, using light-duty cable wire
Dragging feed platform realizes the direction tracking of telescope.
FAST Active Reflector datum levels are a bore 500m, the sphere of radius 300m, by body support structure, are actuated
Device, reflecting surface unit composition.Active Reflector body support structure by collar tie beam and lattice column and lattice column foundation, main rope net,
Downhaul forms.Main rope net is geodesic triangular mesh, and triangle reflecting surface unit is installed in main rope net, and the length of side is about
10.4m~12.4m, about 4300 pieces of quantity.
When telescope is observed, reflecting surface unit face shape is changed using actuator driving downhaul mode, to track celestial body.
Actuator is mechanical, electrical, liquid integrated unit, is worked in the humidity depression of Guizhou the south of Guizhou Province, bears maximum 7~15 tons of pulling force all the time and becomes
Load acts on, average speed about 0.2mm/s, and quantity is 2225 sets.
Hydraulic cylinder is provided with actuator, piston rod therein connects reflecting surface unit, hydraulic cylinder works by downhaul
During need monitor piston rod operating position, be provided with magnetostrictive displacement sensor for this, specific set-up mode is:
Axial Small-deep Hole is set in piston club shaft, and structure is as shown in Figure 1 and Figure 2.The waveguide of magnetostrictive displacement sensor
Stretch into Small-deep Hole 1-1.The reference dimension of the Small-deep Hole is:Diameter of phi 14mm, hole depth 1320mm.
Small-deep Hole is processed in piston rod, since hole depth is longer, cutter shake can be more and more obvious in process,
Deep hole axis direction can produce deviation, and diameter can also produce deviation, inclined hole and taper hole phenomenon occur, and mismachining tolerance is larger with regard to nothing
Method meets design requirement, so concentricity detection must be carried out.Also there is the detection method of detection deep hole concentricity in the prior art
And device, but the deep hole diameter range detected is larger, usual more than 50mm, structure of the detecting device is more complicated, it is not easy to passes through
Minification realizes miniaturization to adapt to Small-deep Hole, and detection device is needed to draw and advanced, it is impossible to be used in blind hole detects,
It is only used for open-work detection.
The content of the invention
For problems of the prior art, it is an object of the invention to provide a kind of detection of Small-deep Hole concentricity
Method, can in Small-deep Hole diverse location measure center and measurement diameter.It is adapted to less diameter, is also applied for
Blind hole detects.
The present invention also aims to provide a kind of Small-deep Hole axiality detection device.
To achieve the above object, the present invention uses following technical scheme:
A kind of Small-deep Hole coaxiality detecting method, sets target co-ordinates collecting device, in deep hole in deep hole one end
Detection device is set, some targets are provided with the detection device;The detection device is pushed to different depths in deep hole
Spend position to stop, the target co-ordinates collecting device gathers the coordinate value of the target, measurement in the stop position of detection device
Deep hole central coordinate of circle value at this is obtained, by the central coordinate of circle value of different depth stop position, measurement obtains deep hole axis in footpath
To the changing value in direction, by the target co-ordinates value of different depth stop position, measurement obtains deep hole diameter increm ent.
Further, 3 legs are provided with the detection device, 1 target is set on each leg, 3 targets are in three
Angular layout, according to the change of deep hole diameter, wherein 1 leg can be with respect to other two leg automatic telescopics so that the inspection
Survey device and adapt to the change of deep hole diameter automatically and be balanced support, telescopic leg drive the target of itself with respect to other two
A target automatically moves, and two legs of telescopic leg and other form isosceles triangular structure.
Further, the target co-ordinates collecting device uses photogrammetric camera, and the target is by photogrammetric phase machine examination
The one side of survey is disposed on the same plane, i.e. target plane, the detection device in deep hole different depth position stop after, institute
State target plane and deep hole axis automatic vertical.
Further, the camera lens of the photogrammetric camera is provided with coaxial light source, and the deep hole sets photogrammetric camera
One end as measurement initiating terminal, which is provided with measurement base object staff.
Further, stop position of the detection device in deep hole is more than 3 times, and the target co-ordinates collecting device is adopted
The coordinate value of 3 targets described above of collection;The detection device is elapsed in deep hole by T-shaped push rod, is carried on the push rod
Scale, demarcates depth of the detection device in deep hole;Or the detection device is measured in depth by laser ranging system
Depth in hole.
The detection device used in detection method described above, is provided with 3 legs, each leg in the detection device
1 target of upper setting, 3 target layouts triangular in shape, according to the change of deep hole diameter, wherein 1 leg can with respect to other two
A leg automatic telescopic so that the change that the detection device adapts to deep hole diameter automatically is balanced support, telescopic branch
Tape is moved the target of itself and is automatically moved with respect to other two targets, and two legs of telescopic leg and other form isosceles three
Angular structure.
Further, the leg is provided with installing handle, and installation handle outer end is provided with contact head, and contact head connects with deep hole wall point
Touch or line contacts;The target is attached on the installing handle.
Further, the contact head is hemispherical or arc tabular, arc tabular corner band fillet;The material of the leg
Using stainless steel or wolfram steel.
Further, stent is provided with the detection device, the leg is arranged on stent, and telescopic leg passes through
Spring legs are arranged on stent.
Further, the stent is in star-like to be provided with 3 supporting legs, and the leg is installed in the outer end of every supporting leg.
A kind of Small-deep Hole coaxiality detecting method set using the above structure, has the following advantages:
The present invention can in Small-deep Hole different depth position measure center and measurement diameter, such as diameter 10mm
The deep hole of left and right.The configuration of the present invention is simple, is adapted to the deep hole of small diameter, is also applied for blind hole detection.
Detection device in the present invention forms frictional force by spring legs and hole wall, so the present invention can both detect water
Square to deep hole, the deep hole of vertical direction can also be detected.
Measurement accuracy requirement is higher than product design tolerance 1/3, photogrammetric accuracy of the present invention(0.03mm)With piston
Bar designs concentricity(0.15 or 0.2mm)Compare, piston rod design concentricity 1/3 is above, so the present invention can meet
Accuracy of detection requirement.
Brief description of the drawings
Fig. 1 is the front view for needing to carry out the piston rod of deep hole concentricity detection;
Fig. 2 is the stereogram for needing to carry out the piston rod of deep hole concentricity detection;
Fig. 3 is the detection method schematic diagram of the present invention;
Fig. 4 is the detection method schematic diagram of the present invention;
Fig. 5 is the structure diagram of push rod used herein;
Fig. 6 is the structure diagram of the detection device of the present invention;
Fig. 7 is the structure three-view diagram of the leg of detection device;
Fig. 8 is the structure three-view diagram of the leg of detection device;
Fig. 9 is the structure three-view diagram of the leg of detection device.
In figure:01. center of circle;02. center of circle;03. center of circle;04. center of circle;05. center of circle;
1. piston rod;1-1. deep hole;
2. detection device;2-1. leg;2-1-1. contact head;2-1-2. installing handle;2-1-3. target;2-2. branch
Frame;2-3. spring legs.
Embodiment
Further to illustrate the present invention to reach the technological means and effect that predetermined goal of the invention is taken, below in conjunction with
Attached drawing and preferred embodiment, describe as after the structure, feature and effect of the present invention in detail.
Embodiment 1
It is as shown in Figure 3, Figure 4 one of embodiment of detection method, in this embodiment, a kind of Small-deep Hole
Coaxiality detecting method, sets target co-ordinates collecting device in deep hole one end, sets detection device in deep hole, in detection device
It is provided with some targets;Detection device is pushed to different depth position stopping in deep hole, and target co-ordinates collecting device is being examined
The coordinate value of the stop position collection target of device is surveyed, measurement obtains deep hole central coordinate of circle value at this, stops by different depth
The central coordinate of circle value of position, measurement obtain changing value of the deep hole axis in radial direction, pass through the target of different depth stop position
Coordinate value is marked, measurement obtains deep hole diameter increm ent.
3 legs are provided with detection device, 1 target, 3 target layouts triangular in shape, root are set on each leg
According to the change of deep hole diameter, wherein 1 leg can be with respect to other two leg automatic telescopics so that the detection device is fitted automatically
The change of deep hole diameter is answered to be balanced support, telescopic leg drives the target of itself to be moved automatically with respect to other two targets
Dynamic, two legs of telescopic leg and other form isosceles triangular structure.
Measuring principle is using 3 points of methods of geometry for determining the center of circle and radius, recycles the line in multiple centers of circle to measure
Deep hole axis.In order to realize that automation calculates, the present invention can realize calculating process using computer technology.
Target co-ordinates collecting device uses photogrammetric camera, and target is arranged on together by the one side of photogrammetric camera calibration
In one plane, i.e. target plane, for detection device after different depth position stops in deep hole, target plane and deep hole axis are automatic
Vertically, the normal plane of actual axis is formed.In order to improve accuracy of observation, the camera lens of photogrammetric camera is provided with coaxial light source,
Such as cast light source, the brightness that can be improved in deep hole is irradiated into deep hole.The tested part and photogrammetric in measurement process
Camera is fixed.
Deep hole sets one end of photogrammetric camera, and as measurement initiating terminal, the end is provided with measurement base object staff.Station meter
Effect be that length standard is provided in measurement process, its both ends is each to fix a target point, before measurement between known 2 target points
Distance.
Stop position of the detection device in deep hole is at 3, and target co-ordinates collecting device gathers the coordinate value of 3 targets.
According to the difference of hole depth, times of collection can be more than 3 times, and times of collection is more, and measurement result is more accurate.
Shown in Fig. 3, the target of stop position is respectively A3, B3, C3 at 3;A4、B4、C4;A5、B5、C5.Measurement obtains
The center of circle be " 03,04,05 " respectively.Measured first in Fig. 3 piston rod both ends central coordinate of circle " 01,02 ", be to be set to demarcate
Count desired axis direction.
Measurement result as shown in Figure 4, is measured the axis and design load 2 × δ of deviation max of deep hole.
A kind of Small-deep Hole axiality detection device used in above-mentioned detection method, structure is as shown in fig. 6, detection
1 target 2-1-3 of setting, 3 target 2-1-3 cloth triangular in shape on 3 legs 2-1, each leg 2-1 are provided with device 2
Office, according to the change of deep hole diameter, wherein 1 leg can be with respect to other two leg automatic telescopics so that the detection device 2
The automatic change for adapting to deep hole diameter is balanced support, and telescopic leg drives the target of itself with respect to other two targets
Automatically move, two legs of telescopic leg and other form isosceles triangular structure.
The instrument that detection device 2 moves forward is promoted to use the T-type structure of " disk adds push rod ".From photogrammetric camera one
End promotes detection device 2 to be moved towards the other end.As shown in figure 5, carrying scale on push rod, calibration detection device is in deep hole
Depth;Or depth of the detection device in deep hole is measured by laser ranging system.
Leg 2-1 is provided with installing handle 2-1-2, and installing handle 2-1-2 outer ends are provided with contact head 2-1-1, contact head 2-1-1
Contacted with deep hole wall point contact or line;Target 2-1-3 is attached on installing handle 2-1-2.
As shown in fig. 7, contact head 2-1-1 is hemispherical, contact head 2-1-1 can use stainless steel.Contact head 2- in Fig. 6
1-1 and deep hole wall are point contact state.
Here so-called point contact and line contact, are to be contacted with approaching geometric point contact and line as purpose of design,
But due to the microphysics structure of actual object, it is impossible to reach the point contact and line contact relation on geometric theory, simply
One kind is close, and contact area is as small as possible.
Stent 2-2 is provided with detection device 2, leg 2-1 is arranged on stent 2-2, and telescopic leg passes through spring
Supporting leg 2-3 is arranged on stent 2-2.Detection device in the present invention forms frictional force by spring legs 2-3 and hole wall, so
The present invention with the deep hole in detection level direction, can also both detect the deep hole of vertical direction.
Stent 2-2 is in star-like, is provided with 3 supporting legs, the outer end mounting leg 2-1 of every supporting leg.
The invention has the characteristics that:
1st, easily occurs the taper hole phenomenon of varying aperture for elongated hole, adaptive diameter adjusting mechanism can be mended very well
Repay;
2nd, the axis bending phenomenon easily occurred for elongated hole, using force balance principle, adaptive regulating mechanism can be unique
Determine the plane vertical with axis of bending, i.e. normal plane;
3rd, the detection of current coaxiality of inner hole is general requires internal diameter the photogrammetric target of the present invention is most at least above more than 50mm
Minor diameter 3mm, sets multiple targets in detection device, after the devices such as supporting leg, leg, the size of detection device can be less than
Similar product of the prior art, can break through small diameter bore bottleneck;
4th, photogrammetric accuracy(0.03mm)Concentricity is designed with piston rod(0.15 or 0.2mm)Compare, higher than piston rod
Concentricity 1/3 is designed, meets accuracy of detection requirement.
Embodiment 2
It is the embodiment of the present invention 2 as shown in Figure 8, Figure 9, in this embodiment, the arc-shaped tabulars of contact head 2-1-1, arc
Tabular corner band fillet;The material of leg 2-1 uses wolfram steel.
Contact head 2-1-1 and deep hole wall are still point contact state in Fig. 8.
Contact head 2-1-1 and deep hole wall are then line contact condition in Fig. 9.Detection dress can be improved by being designed as line contact condition
Put the stability in deep hole.For accuracy of detection, using point contact state to be optimal.
It is described above simply to illustrate that of the invention, it is understood that the invention is not limited in above example, meets
The various variants of inventive concept are within protection scope of the present invention.
Claims (8)
- A kind of 1. Small-deep Hole coaxiality detecting method, it is characterised in that in deep hole one end, target co-ordinates collecting device is set, Detection device is set in deep hole, 3 targets are provided with the detection device;The detection device is passed in deep hole Stop to different depth position, the target co-ordinates collecting device gathers the coordinate of the target in the stop position of detection device Value, measurement obtain deep hole central coordinate of circle value at this, and by the central coordinate of circle value of different depth stop position, measurement obtains deep hole axis Line is in the changing value of radial direction, and by the target co-ordinates value of different depth stop position, measurement obtains deep hole diameter increm ent;3 legs are provided with the detection device, 1 target, 3 target layouts triangular in shape, root are set on each leg According to the change of deep hole diameter, wherein 1 leg can be with respect to other two leg automatic telescopics so that the detection device is fitted automatically The change of deep hole diameter is answered to be balanced support, telescopic leg drives the target of itself to be moved automatically with respect to other two targets Dynamic, two legs of telescopic leg and other form isosceles triangular structure.
- 2. detection method as claimed in claim 1, it is characterised in that the target co-ordinates collecting device uses photogrammetric phase Machine, the target are disposed on the same plane by the one side of photogrammetric camera calibration, i.e. target plane, and the detection device exists After different depth position stops in deep hole, the target plane and deep hole axis automatic vertical.
- 3. detection method as claimed in claim 2, it is characterised in that the camera lens of the photogrammetric camera is provided with axis light Source, the deep hole sets one end of photogrammetric camera, and as measurement initiating terminal, the end is provided with measurement base object staff.
- 4. detection method as claimed in claim 1, it is characterised in that stop position of the detection device in deep hole is 3 More than secondary, the target co-ordinates collecting device gathers the coordinate value of 3 targets described above;The detection device is led in deep hole T-shaped push rod passage is crossed, scale is carried on the push rod, demarcates depth of the detection device in deep hole;Or pass through laser Range unit measures depth of the detection device in deep hole.
- 5. the detection device used in any one of the claim 1-4 detection methods, it is characterised in that the leg is provided with Installing handle, installation handle outer end are provided with contact head, and contact head is contacted with deep hole wall point contact or line;Institute is attached on the installing handle State target.
- 6. detection device as claimed in claim 5, it is characterised in that the contact head is hemispherical or arc tabular, arc Tabular corner band fillet;The material of the leg uses stainless steel or wolfram steel.
- 7. detection device as claimed in claim 5, it is characterised in that stent, the leg are provided with the detection device It is arranged on stent, telescopic leg is arranged on stent by spring legs.
- 8. detection device as claimed in claim 7, it is characterised in that the stent is provided with 3 supporting legs in star-like, every The outer end of supporting leg is installed by the leg.
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN105806264B (en) * | 2016-05-13 | 2018-05-25 | 中国科学院国家天文台 | A kind of method for measuring profound coaxiality of inner hole |
CN105910814B (en) * | 2016-07-01 | 2018-11-30 | 成都市龙泉通惠实业有限责任公司 | Piston body through-hole detection device |
CN107504922A (en) * | 2017-08-15 | 2017-12-22 | 广东工业大学 | A kind of coaxality measuring mechanism of circular aperture |
CN107490349A (en) * | 2017-08-15 | 2017-12-19 | 广东工业大学 | The method for measuring coaxiality and device of a kind of circular aperture |
CN112729170B (en) * | 2020-11-30 | 2022-04-08 | 成都飞机工业(集团)有限责任公司 | Hole axis measuring device and method based on photogrammetry |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2280890Y (en) * | 1996-10-02 | 1998-05-06 | 张发钧 | Instrument for detecting verticality of axis of cylinder and main bearing hole |
CN101105387A (en) * | 2007-08-09 | 2008-01-16 | 中国科学院武汉岩土力学研究所 | Mechanical type multiple-point displacement gage |
CN101482409A (en) * | 2009-02-09 | 2009-07-15 | 吴志刚 | Rock fissure direction and obliquity measuring method |
CN102645185A (en) * | 2011-02-22 | 2012-08-22 | 重庆望江工业有限公司 | Straightness detecting method of slender pipe type parts |
CN103175488A (en) * | 2013-03-25 | 2013-06-26 | 中北大学 | Device for carrying out laser detection on straightness of hole axis |
CN203488931U (en) * | 2013-09-27 | 2014-03-19 | 宁波更大集团有限公司 | Bearing detecting machine support |
JP6043623B2 (en) * | 2012-12-25 | 2016-12-14 | アイシン・エィ・ダブリュ株式会社 | Inner diameter measuring device |
-
2015
- 2015-09-29 CN CN201510630006.1A patent/CN105300321B/en not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2280890Y (en) * | 1996-10-02 | 1998-05-06 | 张发钧 | Instrument for detecting verticality of axis of cylinder and main bearing hole |
CN101105387A (en) * | 2007-08-09 | 2008-01-16 | 中国科学院武汉岩土力学研究所 | Mechanical type multiple-point displacement gage |
CN101482409A (en) * | 2009-02-09 | 2009-07-15 | 吴志刚 | Rock fissure direction and obliquity measuring method |
CN102645185A (en) * | 2011-02-22 | 2012-08-22 | 重庆望江工业有限公司 | Straightness detecting method of slender pipe type parts |
JP6043623B2 (en) * | 2012-12-25 | 2016-12-14 | アイシン・エィ・ダブリュ株式会社 | Inner diameter measuring device |
CN103175488A (en) * | 2013-03-25 | 2013-06-26 | 中北大学 | Device for carrying out laser detection on straightness of hole axis |
CN203488931U (en) * | 2013-09-27 | 2014-03-19 | 宁波更大集团有限公司 | Bearing detecting machine support |
Non-Patent Citations (1)
Title |
---|
超大距离孔系的同轴度检测;郑丽等;《一重技术》;19950331;第96-99页 * |
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