CN105277755A - Cantilever type probe system - Google Patents

Cantilever type probe system Download PDF

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Publication number
CN105277755A
CN105277755A CN201510821440.8A CN201510821440A CN105277755A CN 105277755 A CN105277755 A CN 105277755A CN 201510821440 A CN201510821440 A CN 201510821440A CN 105277755 A CN105277755 A CN 105277755A
Authority
CN
China
Prior art keywords
probe
fuse
current
cantalever type
fusing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510821440.8A
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Chinese (zh)
Inventor
岳小兵
张志勇
祁建华
施瑾
王锦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sino IC Technology Co Ltd
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Sino IC Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sino IC Technology Co Ltd filed Critical Sino IC Technology Co Ltd
Priority to CN201510821440.8A priority Critical patent/CN105277755A/en
Publication of CN105277755A publication Critical patent/CN105277755A/en
Pending legal-status Critical Current

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

The present invention provides a cantilever type probe system. The cantilever type probe system comprises a probe, a probe card board and a protection device preventing the point of the probe from fusing. One end of the probe far away from the point of the probe is welded with one end of the protection device, and the other end of the protection device is welded on the probe card board. According to the invention, the protection device (such as a fuse) is added at the welding position of the probe of the probe card and a substrate, and a circuit may be cut off when the breakover current of the point of the probe is close to a limited current, so that the point of the probe is protected and the problem of fusing the point of the probe is effectively solved. The fusion of the point of the probe is improved to be the fusion of the fuse, the problem that the time of changing a probe in the fusion of the point of the probe exceeds 24 hours and even the probe cannot be changed is solved, and it is improved that the fuse is only needed and changing a probe may need a few minutes, therefore the cost is reduced and the time is saved.

Description

A kind of cantalever type probe system
Technical field
The invention belongs to semiconductor testing apparatus area of maintenance, relate to a kind of cantalever type probe system.
Background technology
In prior art, the probe of cantalever type probe system is formed by a probe looper from probe tip to probe tails solder joint, and by probe needle arm partial fixing on asphalt mixtures modified by epoxy resin alicyclic ring, probe tails directly and probe clamp link together.But when integrated circuit On-Wafer Measurement, cantalever type probe system encounters the conduction foreign matters such as such as pin aluminium bits, contamination due to needle point, or all may enable when test defect chip power supply, or other pin probe conductings exceed the electric current of probe On current itself, thus cause probe tip to fuse.
For the problem of above-mentioned cantalever type probe system probe needle point fusing, in prior art, main employing two kinds of methods solve, and a kind of scheme directly changes probe after the fusing of generation probe tip, cut open by resin ring cutter, fusing probe is therefrom extracted out, more renews probe.But this scheme deposits two problems: when the closeer particularly multilayer probe of probe, can adjacent probe be damaged while cutting resin ring open; This scheme needs to cut open resin ring and then again adds new resin and fix, and probe needle pressure can be made so unstable, thus make probe integrated testability hydraulic performance decline, cause test result unstable.
Another scheme adopted in prior art avoids probe tip to fuse by the mode of test procedure restriction general supply electric current.But this scheme exists two problems equally: test procedure controls source current and there is the Microsecond grade mistiming, although it is normal that power supply total current often occurs, the phenomenon that individual probe needle point still fuses; When chip operation electric current is larger, usually power supply, and pin on distribute many probes, the mode of test procedure restriction general supply electric current cannot play a role, because although power source integral electric current is within the scope of current limit, but because electric current is not mean allocation on each probe, so always occur individual probe needle point electric current excessive and the problem of probe tip fusing.
Summary of the invention
The object of the present invention is to provide a kind of cantalever type probe system, overcome the problem of cantalever type probe system probe needle point fusing in prior art.
For solving the problems of the technologies described above, technical scheme provided by the invention is as follows:
The invention provides a kind of cantalever type probe system; the protective device comprising probe, probe clamp and prevent the needle point of described probe from fusing; described probe welds with described protective device one end away from one end of needle point, and the described protective device other end is welded on described probe clamp.
Further, described protective device is fuse, and the fusing current of described fuse is less than the maximal value of the theoretical On current of the needle point of described probe.
Preferably, described fuse is current insurance silk.
Preferably, described fuse is self-mending fuse.
Further, the fusing current of described fuse is 80% of the maximal value of the theoretical On current of described probe tip.
Further, described probe bending is divided into two parts, is respectively probe tip and probe needle arm.
Further, the bending angle between described probe needle arm and described probe tip is obtuse angle.
Further, described probe clamp has annular distance, described cantalever type probe system also comprises dead ring, and described dead ring is fixed on described annular distance, and described probe needle arm is fixed on described dead ring by fixing glue.
Further, described dead ring is ceramic ring.
Further, described fixing glue is epoxy resin.
Compared with prior art, advantage of the present invention is:
The present invention increases protective device (such as fuse) by the welding position of the probe and substrate that are arranged on probe; can at needle point On current close to disconnecting circuit during current limit; protect probe tip; effectively solve the problem of probe tip fusing; probe tip fusing is improved to fuse blows; thus make probe tip fusing replacing probe even cannot change probe more than more than 24 hours; be improved to and only need more fuse; can be disposed in a few minutes, so both reduce cost and also save the time.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the cantalever type probe system that the embodiment of the present invention provides.
Wherein, 1-probe; 2-probe clamp; 3-protective device; 4-dead ring; 11-probe tip; 12-probe needle arm; 21-annular distance.
Embodiment
Below in conjunction with the drawings and specific embodiments, a kind of cantalever type probe system that the present invention proposes is described in further detail.According to the following describes and claims, advantages and features of the invention will be clearer.It should be noted that, accompanying drawing all adopts the form that simplifies very much and all uses non-ratio accurately, only in order to object that is convenient, the aid illustration embodiment of the present invention lucidly.
A kind of cantalever type probe system; the protective device 3 comprising probe 1, probe clamp 2 and prevent the needle point of described probe from fusing; described probe 1 welds with described protective device 3 one end away from one end of needle point, and described protective device 3 other end is welded on described probe clamp 2.Probe clamp 2 is generally circuit board, and probe of the present invention is by welding a protective device 3 at probe 1 afterbody, and when the electric current of the needle point conducting of probe 1 exceedes current limit, protective device 3 can make circuit breaker, and the needle point of protection probe 1 is not fused.
Further, described protective device 3 is fuse, and the fusing current of described fuse is less than the maximal value of the theoretical On current of the needle point of described probe.When the electric current of the needle point conducting of probe 1 to exceed the fusing current of fuse close to current limit; at this moment the needle point of probe 1 not yet fuses; and the fuse reaching fusing current can fuse; make circuit breaker; the needle point of protection probe 1 is not fused; probe 1 only need make circuit recover to make probe again normally work by replacing fuse or other modes, and does not need to change probe.
Preferably, described fuse is current insurance silk.When adopting current insurance silk as fuse; the needle point On current of probe 1 exceedes the fusing current of current insurance silk during close to limit value; current insurance silk can directly fuse; protection needle point prevents it from fusing; at this moment only probe just can need be made to resume work by changing current insurance silk, the operation that avoiding in prior art needs by changing the loaded down with trivial details high costs such as probe solves the problem of probe tip fusing.
In another embodiment of the invention, described fuse is self-mending fuse.Adopt self-mending fuse; on the one hand when the needle point On current of probe 1 to exceed the fusing current of current insurance silk close to limit value; self-mending fuse makes circuit breaker by fusing; thus the needle point of protection probe 1 is not fused, on the other hand, after self-mending fuse fusing open circuit; can recover rapidly at short notice again; make circuit conducting again, any part can be changed like this, probe can be made again to recover normal work.
Preferably, the fusing current of described fuse is 80% of the maximal value of the theoretical On current of described probe tip.
Further, described probe 1 bending is divided into two parts, is respectively probe tip 11 and probe needle arm 12.Probe in the present embodiment is cantalever type probe system, is divided into probe needle arm 12 and probe tip 11 two sections.
Further, the bending angle between described probe needle arm 12 and described probe tip 11 is obtuse angle.
Further, described probe clamp 2 has annular distance 21, described cantalever type probe system also comprises dead ring 4, and described dead ring 4 is fixed on described annular distance 21, and described probe needle arm 12 is fixed on described dead ring 4 by fixing glue.The probe 1 of cantalever type probe system is fixed on dead ring 4 by fixing glue, in prior art when needle point 1 fuses, need to cut fixing glue and change probe, very loaded down with trivial details, and adopt the structure of the present embodiment, then effectively can solve the problem of probe tip fusing.
Further, described dead ring 4 is ceramic ring.
Further, described fixing glue is epoxy resin.The surface of epoxy resin to metal and nonmetallic materials has excellent bonding strength, and dielectric properties are good, have stronger advantage as the bonding probe of fixing glue.
Just need in the probe card designs stage problem considering probe tip fusing, for power supply, and other pin of conducting big current may need assessment correspondent probe On current in abnormal cases when designing.When finding that probe needs the electric current of conducting close to when even reaching probe theory On current maximal value in abnormal cases; can adopt technical solution of the present invention, selection is no more than the protective devices such as the fuse of the theoretical On current maximal value 80% of probe and is welded between probe tails solder joint and probe clamp solder joint.When integrated circuit On-Wafer Measurement, cantalever type probe system encounters the conduction foreign matters such as such as pin aluminium bits, contamination due to needle point, or can make when test defect chip to cause power supply, or other pin probe On currents exceed fuse blows electric current and do not reach probe theoretical On current maximal value time, fuse blows, and probe tip is normal, at this moment test data can show that corresponding fuse is abnormal, directly changes fuse and can continue to use probe test.
The present invention increases protective device (such as fuse) by the welding position of the probe and substrate that are arranged on probe; can at needle point On current close to disconnecting circuit during current limit; protect probe tip; effectively solve the problem of probe tip fusing; probe tip fusing is improved to fuse blows; thus make probe tip fusing replacing probe even cannot change probe more than more than 24 hours; be improved to and only need more fuse; can be disposed in a few minutes, so both reduce cost and also save the time.
Foregoing description is only the description to present pre-ferred embodiments, any restriction not to the scope of the invention, and any change that the those of ordinary skill in field of the present invention does according to above-mentioned disclosure, modification, all belong to the protection domain of claims.

Claims (10)

1. a cantalever type probe system; it is characterized in that; the protective device comprising probe, probe clamp and prevent the needle point of described probe from fusing, described probe welds with described protective device one end away from one end of needle point, and the described protective device other end is welded on described probe clamp.
2. cantalever type probe system according to claim 1, is characterized in that, described protective device is fuse, and the fusing current of described fuse is less than the maximal value of the theoretical On current of the needle point of described probe.
3. cantalever type probe system according to claim 2, is characterized in that, described fuse is current insurance silk.
4. cantalever type probe system according to claim 2, is characterized in that, described fuse is self-mending fuse.
5. cantalever type probe system according to claim 2, is characterized in that, the fusing current of described fuse is 80% of the maximal value of the theoretical On current of described probe tip.
6. cantalever type probe system according to claim 1, is characterized in that, described probe bending is divided into two parts, is respectively probe tip and probe needle arm.
7. cantalever type probe system according to claim 6, is characterized in that, the bending angle between described probe needle arm and described probe tip is obtuse angle.
8. cantalever type probe system according to claim 6, it is characterized in that described probe clamp has annular distance, described cantalever type probe system also comprises dead ring, described dead ring is fixed on described annular distance, and described probe needle arm is fixed on described dead ring by fixing glue.
9. cantalever type probe system according to claim 8, is characterized in that, described dead ring is ceramic ring.
10. cantalever type probe system according to claim 8, is characterized in that, described fixing glue is epoxy resin.
CN201510821440.8A 2015-11-23 2015-11-23 Cantilever type probe system Pending CN105277755A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510821440.8A CN105277755A (en) 2015-11-23 2015-11-23 Cantilever type probe system

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Application Number Priority Date Filing Date Title
CN201510821440.8A CN105277755A (en) 2015-11-23 2015-11-23 Cantilever type probe system

Publications (1)

Publication Number Publication Date
CN105277755A true CN105277755A (en) 2016-01-27

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107368100A (en) * 2017-06-26 2017-11-21 上海华岭集成电路技术股份有限公司 The method for adjusting cantilever probe card needle tracking
CN108344887A (en) * 2017-01-25 2018-07-31 松翰有限公司 probe head structure of cantilever type probe card
CN108717159A (en) * 2018-05-25 2018-10-30 上海华岭集成电路技术股份有限公司 A kind of probe card for integrated circuit test and test system protection structure

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2901320Y (en) * 2006-05-08 2007-05-16 何毓宁 Safety switching connector with fuse
CN101149392A (en) * 2006-09-18 2008-03-26 中芯国际集成电路制造(上海)有限公司 Wafer test card over current protection method and related wafer test system
KR20080113882A (en) * 2007-06-26 2008-12-31 (주)마이크로컨텍솔루션 Memory module test socket for preventing over-current
US7521947B2 (en) * 2006-05-23 2009-04-21 Integrated Technology Corporation Probe needle protection method for high current probe testing of power devices
CN101907641A (en) * 2010-06-30 2010-12-08 上海华岭集成电路技术有限责任公司 Probe test circuit and design method thereof
CN201828582U (en) * 2010-08-16 2011-05-11 优利德科技(中国)有限公司 Novel test meter pen
CN202948042U (en) * 2012-09-20 2013-05-22 美特国际有限公司 Electronic universal meter and probe lead wire assemblies thereof
US20140159705A1 (en) * 2012-12-10 2014-06-12 Toyota Jidosha Kabushiki Kaisha Wafer examination device and wafer examiination method
CN104280906A (en) * 2014-09-30 2015-01-14 合肥鑫晟光电科技有限公司 Probe block and detector

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2901320Y (en) * 2006-05-08 2007-05-16 何毓宁 Safety switching connector with fuse
US7521947B2 (en) * 2006-05-23 2009-04-21 Integrated Technology Corporation Probe needle protection method for high current probe testing of power devices
CN101149392A (en) * 2006-09-18 2008-03-26 中芯国际集成电路制造(上海)有限公司 Wafer test card over current protection method and related wafer test system
KR20080113882A (en) * 2007-06-26 2008-12-31 (주)마이크로컨텍솔루션 Memory module test socket for preventing over-current
CN101907641A (en) * 2010-06-30 2010-12-08 上海华岭集成电路技术有限责任公司 Probe test circuit and design method thereof
CN201828582U (en) * 2010-08-16 2011-05-11 优利德科技(中国)有限公司 Novel test meter pen
CN202948042U (en) * 2012-09-20 2013-05-22 美特国际有限公司 Electronic universal meter and probe lead wire assemblies thereof
US20140159705A1 (en) * 2012-12-10 2014-06-12 Toyota Jidosha Kabushiki Kaisha Wafer examination device and wafer examiination method
CN104280906A (en) * 2014-09-30 2015-01-14 合肥鑫晟光电科技有限公司 Probe block and detector

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108344887A (en) * 2017-01-25 2018-07-31 松翰有限公司 probe head structure of cantilever type probe card
CN107368100A (en) * 2017-06-26 2017-11-21 上海华岭集成电路技术股份有限公司 The method for adjusting cantilever probe card needle tracking
CN108717159A (en) * 2018-05-25 2018-10-30 上海华岭集成电路技术股份有限公司 A kind of probe card for integrated circuit test and test system protection structure

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Application publication date: 20160127

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