CN105271146A - Purification device and preparation method of high-purity krypton/xenon gas and getter preparation method - Google Patents
Purification device and preparation method of high-purity krypton/xenon gas and getter preparation method Download PDFInfo
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- CN105271146A CN105271146A CN201510671353.9A CN201510671353A CN105271146A CN 105271146 A CN105271146 A CN 105271146A CN 201510671353 A CN201510671353 A CN 201510671353A CN 105271146 A CN105271146 A CN 105271146A
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Abstract
The invention discloses a purification device of high-purity krypton/xenon gas. The purification device comprises reaction tubes, a hydrogen adsorber, a cooler, a precision filter and product storage equipment which are sequentially connected, wherein the reaction tubes are located in heaters, gas reaction sections are arranged in the reaction tubes, stainless steel screen layers are arranged at two ends of each gas reaction section, space between the stainless steel screen layers is filled with a getter, and the getter is a hollow cylinder with one closed end. The invention further provides a method for preparing the high-purity krypton/xenon gas by adopting the purification device and a preparation method of the getter applied to the purification device of the high-purity krypton/xenon gas.
Description
Technical field
The present invention relates to gas purification technique field, be specifically related to a kind of high-purity krypton/xenon-133 gas refining plant and utilize this refining plant to manufacture the method for high-purity krypton/xenon-133 gas, also relate to a kind of manufacture method of the getter for high-purity krypton/xenon gas purification device.
Background technology
Cannot meet the problem of high-end photovoltaic market and development of modern scientific technology for 1995 editions kryptons, xenon national standard, industry is revised national standard " Krypton " (GB/T5829-2006) and " xenon " (GB/T5828-2006).Compared with 2006 editions kryptons, xenon new national standards are marked with 1995 editions kryptons, xenon former capital, more strict to the specification of quality of product, increase the control criterion to impurity such as hydrocarbon polymer, carbon monoxide, carbonic acid gas and fluorocarbons newly, and improve the control criterion to the impurity such as oxynitrides, moisture.New national standard requires to be strict in and is better than the product standard of the external colleague of the overwhelming majority, and in industrial gasses field, first time achieves Chinese gas products quality standard higher than American-European standard, improves the total quality level of Chinese rare gas.
Although the krypton/xenon-133 gas quality product using original krypton/xenon refining plant to produce can reach 1995 editions Standard, the purity requirement of 2006 editions high-purity krypton/xenons (99.999%) of new national standard can not be reached.Simultaneously, over nearly 10 years, China's air environmental pollution increases the weight of, space division system unstripped gas Air quality declines, fluorocarbon, oxynitrides content is in raising gradually, in poor krypton xenon stock liquid required for high purity krypton/xenon products production, fluorocarbon content 20 ~ 50ppm in the past rises to 150 ~ 220ppm, this device has occurred that processing power is not enough, loss is large, easy blocking, the problems that life-span is short, life-span shortened to 3 ~ 6 months from original 1.5 ~ 2 years, and when the on the suction side high temperature reaction zone getter inefficacy blocking of U-tube, the getter of the sub-high temperature reaction zone of outlet side did not also lose efficacy, but U-shaped reaction tubes can only integral replacing, expensive getter utilizes very insufficient.
For above-mentioned shortcoming, enterprise drops into great effort and have developed new type purification device, although utilize this new type purification device to produce high purity krypton, xenon-133 gas product that purity reaches 99.999% of 2006 editions new national standard requirements, but, in actual moving process, above-mentioned new type purification device is in work after 6 months, and its reaction tubes just there occurs serious blocking, have to change reaction tubes, do not reach the predicted life of 1.5 years.
Summary of the invention
Embodiment of the present invention technical problem to be solved there are provided a kind of high-purity krypton/xenon-133 gas refining plant and utilizes this refining plant to manufacture the method for high-purity krypton/xenon-133 gas, additionally provide a kind of manufacture method of the getter for high-purity krypton/xenon gas purification device, effectively can extend the work-ing life of reaction tubes.
One provided by the present invention high-purity krypton/xenon-133 gas refining plant, comprise: reaction tubes, hydrogen adsorption device, water cooler, accurate filter, product storing device, described reaction tubes, hydrogen adsorption device, water cooler, accurate filter are connected successively with product storing device, described reaction tubes is positioned at well heater, gas reaction section is provided with in described reaction tubes, the two ends of described gas reaction section are equipped with stainless steel sift stratum reticulare, described stainless steel mesh interlayer is filled with getter, and described getter is the hollow circular cylinder that one end is closed.
Wherein, described conversion zone comprises one section of conversion zone and second-stage reaction section, utilizes steel pipe to carry out bite type connection between described one section of reaction tubes and second-stage reaction pipe.
Further, described high-purity krypton/xenon-133 gas refining plant also comprises water coolant water return tank and water coolant water inlet tank, and described water coolant water return tank and water coolant water inlet tank are all connected with water cooler.
Wherein, described well heater is semi-open type circular shape heater, and described semi-open type circular shape heater comprises two through the hinged semicircle cartridge heater with heater strip.
Wherein, the internal diameter of described hollow circular cylinder is set to R1, external diameter is set to R2, length is set to L, and wherein external diameter R2 equals length L, and internal diameter R1 is less than external diameter R2.
Present invention also offers a kind of method using above-mentioned refining plant to manufacture high-purity krypton/xenon-133 gas, comprising:
The getter in hollow circular cylinder made is filled with reaction tubes, and the entrance of described gas reaction section and outlet filling stainless steel sift stratum reticulare are with fixing getter;
Be filled with high-purity Krypton or argon gas, and vacuumize displacement;
In gas reaction section, high-purity Krypton or argon pressure are 0.1 ~ 0.2Mpa and under the state of gas flow, start semi-open type circular shape heater with to the heating of gas reaction section, progressively make gas reaction section heat up, and start to continue to vacuumize after reaching the first temperature; And gas reaction section is carried out being cooled to the second temperature, and pass into the Krypton or xenon that need purify gradually, with the Krypton after being purified or xenon.
Wherein, described first temperature is 980 degrees Celsius.
Wherein, described second temperature is 960 degrees Celsius.
Present invention also offers a kind of manufacture method of the getter for above-mentioned high-purity krypton/xenon-133 gas refining plant, comprising:
The polynary getter alloys particle of melting under vacuum condition is clayed into power; And to adopt metal jet powder for molding metallurgical method getter power to be made internal diameter be Φ 3.0mm ~ Φ 3.2mm, external diameter is Φ 5.0mm ~ Φ 5.2mm, and length is the hollow circular cylinder that one end of 5.0mm ~ 5.2mm is closed.
Wherein, fluidized bed jet mill is used to be clayed into power by the polynary getter alloys particle of melting under vacuum condition.
In the present invention, utilize space between the annulus internal voids of the getter in hollow circular cylinder shape and annulus can hold the advantage of ZRF4 crystalline particle, and the constructional feature that circular ring structure can break under stressed extruding ensure that reaction tubes internal circulation cross section is not blocked by ZRF4 crystalline particle, effectively extend the work-ing life of reaction tubes, at present through the data that life-cycle pilot experiment obtains, more than Theoretical Calculation reaction tubes life longer to two year.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings;
Fig. 1 is the plane structure chart of the better embodiment of a kind of high-purity krypton/xenon-133 gas refining plant of the present invention.
Fig. 2 is the structural representation of getter in Fig. 1.
Fig. 3 is the schema of the better embodiment of the manufacture method of getter in Fig. 1.
Fig. 4-Fig. 6 is the schema that in a kind of Fig. 1 of use of the present invention, refining plant manufactures the better embodiment of the method for high-purity krypton/xenon-133 gas.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
First, before embodiment is described, be necessary that some terms to occurring make an explanation herein.Such as:
Use the term such as " first ", " second " to describe various element if occur herein, but these elements should not limited by these terms.These terms are only used for differentiation element and another element.Therefore, " first " element also can be called as " second " element and not depart from instruction of the present invention.
In addition, should be understood that, when mentioning an element " connection " or " connection " to another element, it can directly connect or directly be connected to another element or also can there is intermediary element.On the contrary, when mentioning that an element " directly connection " or " directly connecting " are to another element, then there is not intermediary element.
The various terms occurred in this article are only not intended to as limitation of the invention for describing the object of concrete embodiment.Unless context is clearly pointed out in addition, then singulative intention also comprises plural form.
" comprise " when using term in this manual and/or " including " time, these terms specify the existence of described feature, entirety, step, operation, element and/or parts, but also do not get rid of more than one other features, entirety, step, operation, element, the existence of parts and/or its group and/or additional.
About embodiment:
In order to getter described in the invention is better described, will simply high-purity krypton, xenon-133 gas refining plant be described below:
Please refer to shown in Fig. 1, the better embodiment of the high-purity krypton of the present invention, xenon-133 gas refining plant comprises water coolant water return tank 1, water coolant water inlet tank 2, one section of reaction tubes 9, second-stage reaction pipe 10, hydrogen adsorption device 11, water cooler 12, accurate filter 13, product storing device 5.Unstripped gas gas cylinder 6 is connected with product storing device 5 by one section of reaction tubes 9, second-stage reaction pipe 10, hydrogen adsorption device 11, water cooler 12, accurate filter 13 successively, utilizes steel pipe 14 to carry out bite type connection between described one section of reaction tubes 9 and second-stage reaction pipe 10.Described water coolant water return tank 1 and water coolant water inlet tank 2 are all connected with water cooler 12.
Respectively be provided with a semi-open type circular shape heater 15 outside described one section of reaction tubes 9 and second-stage reaction pipe 10, described semi-open type circular shape heater 15 forms through the hinged semicircle cartridge heater 8 with heater strip by two.Be equipped with gas reaction section 16 in described one section of reaction tubes 9 and second-stage reaction pipe 10, the two ends of described gas reaction section 16 are equipped with stainless steel sift stratum reticulare 4, are filled with getter 20 therebetween.
In present embodiment, because steel pipe 14 is removable connection with one section of reaction tubes 9 and second-stage reaction pipe 10, therefore when wherein any one reaction tubes lost efficacy after can remove this reaction tubes, and then a new reaction tubes is installed as replacement, and without the need to two reaction tubess are abandoned together, thus reach and reuse object to greatest extent, reduce running cost.Meanwhile, the hinge between semicircle cartridge heater 8 can be untied after heater strip damages, change heater strip, convenient and swift.In addition, present embodiment is provided with stainless steel sift stratum reticulare 4 in the inlet and outlet of gas reaction section 16, thus under truly realizing not affecting the prerequisite of using function, increase the object of the permeability of getter, effectively can avoid the generation blocking etching problem, greatly improve the work-ing life of getter and conversion zone.
Please refer to shown in Fig. 2, the hollow circular cylinder that described getter 20 is closed in one end, it comprises space 26 between annulus internal voids 22 and annulus.The internal diameter of described hollow circular cylinder is set to R1, external diameter is set to R2, length is set to L.In present embodiment, the external diameter R2 of described hollow circular cylinder equals length L, and internal diameter R1 is less than external diameter R2.Concrete, internal diameter is Φ 3.0mm ~ Φ 3.2mm, and external diameter is Φ 5.0mm ~ Φ 5.2mm, and length is 5.0mm ~ 5.2mm.
In the present invention, utilize space 26 between the annulus internal voids 22 of getter 20 and annulus can hold the advantage of ZRF4 crystalline particle, and the constructional feature that circular ring structure can break under stressed extruding ensure that reaction tubes internal circulation cross section is not blocked by ZRF4 crystalline particle, effectively extend the work-ing life of reaction tubes, at present through the data that life-cycle pilot experiment obtains, more than Theoretical Calculation reaction tubes life longer to two year.
Shown in Fig. 3, in the present invention, the better embodiment of the manufacture method of getter 20 comprises the following steps:
Step S1: use fluidized bed jet mill that the polynary getter alloys particle (particle diameter 3 ~ 6mm) of melting under vacuum condition is clayed into power (particle diameter 10 ~ 20um).
Step S2: adopting metal jet powder for molding metallurgical method getter power to be made internal diameter is Φ 3.0mm ~ Φ 3.2mm, and external diameter is Φ 5.0mm ~ Φ 5.2mm, and length is the hollow ring of 5.0mm ~ 5.2mm.
The method that after manufacture completes above-mentioned getter, the present invention utilizes above-mentioned high-purity krypton, xenon-133 gas refining plant manufactures high-purity krypton/xenon-133 gas following (please refer to shown in Fig. 4):
Step S10: the one section of reaction tubes 9 and the second-stage reaction pipe 10 that the getter 20 in hollow circular cylinder made are filled with series connection, the entrance of described gas reaction section 16 and outlet filling stainless steel sift stratum reticulare 4 are with fixing getter 20.
Step S11: be fit in cartridge heater 8 by one section of reaction tubes 9 and second-stage reaction pipe 10, is connected with unstripped gas gas cylinder 6, hydrogen adsorption device 11, water cooler 12 and product storing device 5 by connecting sleeve.
Step S12: water coolant water return tank 1 and water coolant water inlet tank 2 are connected with water cooler 12 by pipe connecting.
Step S13: system vacuumizes displacement.Specifically please refer to shown in Fig. 5, comprise the following steps:
Step S20: be filled with working gas (Krypton) or high-purity argon gas to 0.1 ~ 0.2MPa, vacuumize displacement, repeats 2 ~ 3 times, inner complete totally replaced to whole device.
Step S21: be filled with high-purity argon gas to 0.1 ~ 0.2MPa in whole device, prepares to carry out activation manipulation.
Step S14: system heats up and activates.Specifically please refer to shown in Fig. 6, comprise the following steps:
Step S30: high purity inert gas (argon gas) pressure is 0.1 ~ 0.2Mpa and under the state of gas flow in gas reaction section 16, start semi-open type circular shape heater 15 to run, to gas reaction section 16 heat activation, gas reaction section 16 is progressively made to be warming up to 100 DEG C, 300 DEG C, 500 DEG C, 700 DEG C, 980 DEG C.
Step S31: start vacuum pump and start to vacuumize after temperature-stable to 980 DEG C, continues more than 6 ~ 8 hours, activates complete.
Step S32: what need low discharge in activation process passes into high purity inert gas, the gas that sucking-off separated by guarantee getter 20 is carried out gas reaction section 16.
Step S15: pass into the krypton/xenon-133 gas needing purifying.
Step S16: gas reaction section 16 is down to 960 DEG C, passes into working gas (Krypton/xenon) gradually, and refining plant drops into commencement of commercial operation.
Step S17: analyze the krypton/xenon of refining plant outlet in operational process, after purity qualified, fills at subsequent technique Krypton/xenon gas product and bottle stand carries out high-purity krypton/xenon-133 gas product is freezing fills bottle operation.
Use the present invention the refining plant including the getter in hollow circular cylinder shape that describes, preparation is containing the Krypton of 200ppmCF4 impurity, pilot plant is utilized to carry out life-cycle experiment, temperature of reaction controls at 850 ~ 950 DEG C, until in the Krypton that records of exit containing CF4 more than 1ppm, prove the saturated inefficacy of getter.Monitor the resistance drop of air-flow through reaction tubes in experimentation, do not find obvious rising, experiment terminates rear cutting one section of reaction tubes and second-stage reaction pipe, does not find the situation that flow area blocks.The refining plant including the getter of hollow circular cylinder shape that this patent is developed efficiently solves the problem that reaction tubes internal circulation cross section is blocked by ZRF4 crystalline particle, through the data that life-cycle pilot experiment obtains, more than Theoretical Calculation reaction tubes life longer to two year, will effectively extend the work-ing life of reaction tubes.
These are only embodiments of the present invention; not thereby the scope of the claims of the present invention is limited; every utilize specification sheets of the present invention and accompanying drawing content to do equivalent structure or equivalent flow process conversion; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present invention.
Claims (10)
1. high-purity krypton/xenon-133 gas refining plant, it is characterized in that, comprise: reaction tubes, hydrogen adsorption device, water cooler, accurate filter, product storing device, described reaction tubes, hydrogen adsorption device, water cooler, accurate filter are connected successively with product storing device, described reaction tubes is positioned at well heater, gas reaction section is provided with in described reaction tubes, the two ends of described gas reaction section are equipped with stainless steel sift stratum reticulare, described stainless steel mesh interlayer is filled with getter, and described getter is the hollow circular cylinder that one end is closed.
2. high-purity krypton/xenon-133 gas refining plant as claimed in claim 1, is characterized in that: described conversion zone comprises one section of conversion zone and second-stage reaction section, carries out bite type connection between described one section of reaction tubes and second-stage reaction pipe by steel pipe.
3. high-purity krypton/xenon-133 gas refining plant as claimed in claim 1, is characterized in that: also comprise water coolant water return tank and water coolant water inlet tank, and described water coolant water return tank and water coolant water inlet tank are all connected with water cooler.
4. high-purity krypton/xenon-133 gas refining plant as claimed in claim 1, is characterized in that: described well heater is semi-open type circular shape heater, and described semi-open type circular shape heater comprises two through the hinged semicircle cartridge heater with heater strip.
5. high-purity krypton/xenon-133 gas refining plant as claimed in claim 1, it is characterized in that: the internal diameter of described hollow circular cylinder is set to R1, external diameter is set to R2, length is set to L, wherein external diameter R2 equals length L, and internal diameter R1 is less than external diameter R2.
6. use the refining plant as described in claim arbitrary in claim 1-5 to manufacture a method for high-purity krypton/xenon-133 gas, it is characterized in that, comprising:
The getter in hollow circular cylinder made is filled with reaction tubes, and the entrance of described gas reaction section and outlet filling stainless steel sift stratum reticulare are with fixing getter;
Be filled with high-purity Krypton or argon gas, and vacuumize displacement;
In gas reaction section, high-purity Krypton or argon pressure are 0.1 ~ 0.2Mpa and under the state of gas flow, start semi-open type circular shape heater with to the heating of gas reaction section, progressively make gas reaction section heat up, and start to continue to vacuumize after reaching the first temperature; And gas reaction section is carried out being cooled to the second temperature, and pass into the Krypton or xenon that need purify gradually, with the Krypton after being purified or xenon.
7. the method manufacturing high-purity krypton/xenon-133 gas as claimed in claim 6, is characterized in that: described first temperature is 980 degrees Celsius.
8. the method manufacturing high-purity krypton, xenon-133 gas as claimed in claim 6, is characterized in that: described second temperature is 960 degrees Celsius.
9., for a manufacture method for the getter of high-purity krypton/xenon-133 gas refining plant as claimed in claim 1, it is characterized in that, comprising:
The polynary getter alloys particle of melting under vacuum condition is clayed into power; And to adopt metal jet powder for molding metallurgical method getter power to be made internal diameter be φ 3.0mm ~ φ 3.2mm, external diameter is φ 5.0mm ~ φ 5.2mm, and length is the hollow circular cylinder that one end of 5.0mm ~ 5.2mm is closed.
10. manufacture method as claimed in claim 9, is characterized in that: use fluidized bed jet mill to be clayed into power by the polynary getter alloys particle of melting under vacuum condition.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106672926A (en) * | 2016-12-22 | 2017-05-17 | 南京华东电子真空材料有限公司 | Inert gas purifier with evaporable getter |
| CN108408701A (en) * | 2018-04-18 | 2018-08-17 | 衢州杭氧特种气体有限公司 | A kind of krypton, the xenon technological process of production and its production line |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03247503A (en) * | 1990-02-27 | 1991-11-05 | Mitsubishi Heavy Ind Ltd | Production of sulfuric acid |
| EP1052018A1 (en) * | 1997-10-14 | 2000-11-15 | Japan Energy Corporation | Catalyst support, catalyst, reactor for hydrogenation reaction, and catalytic reaction method |
| CN104310325A (en) * | 2014-10-24 | 2015-01-28 | 武汉钢铁(集团)公司 | Krypton-xenon gas purification method and device |
| CN104718017A (en) * | 2012-10-08 | 2015-06-17 | 国际壳牌研究有限公司 | Biomass conversion systems and methods for use thereof |
| CN104755593A (en) * | 2012-10-08 | 2015-07-01 | 国际壳牌研究有限公司 | Lignocellulosic biomass conversion |
-
2015
- 2015-10-15 CN CN201510671353.9A patent/CN105271146B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03247503A (en) * | 1990-02-27 | 1991-11-05 | Mitsubishi Heavy Ind Ltd | Production of sulfuric acid |
| EP1052018A1 (en) * | 1997-10-14 | 2000-11-15 | Japan Energy Corporation | Catalyst support, catalyst, reactor for hydrogenation reaction, and catalytic reaction method |
| CN104718017A (en) * | 2012-10-08 | 2015-06-17 | 国际壳牌研究有限公司 | Biomass conversion systems and methods for use thereof |
| CN104755593A (en) * | 2012-10-08 | 2015-07-01 | 国际壳牌研究有限公司 | Lignocellulosic biomass conversion |
| CN104310325A (en) * | 2014-10-24 | 2015-01-28 | 武汉钢铁(集团)公司 | Krypton-xenon gas purification method and device |
Non-Patent Citations (1)
| Title |
|---|
| 李玉海等: "《粉体工程学》", 31 December 2013 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106672926A (en) * | 2016-12-22 | 2017-05-17 | 南京华东电子真空材料有限公司 | Inert gas purifier with evaporable getter |
| CN108408701A (en) * | 2018-04-18 | 2018-08-17 | 衢州杭氧特种气体有限公司 | A kind of krypton, the xenon technological process of production and its production line |
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| CN105271146B (en) | 2018-01-23 |
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