CN204602200U - For separating of the charcoal absorption regenerative system reclaiming polysilicon tail gas - Google Patents
For separating of the charcoal absorption regenerative system reclaiming polysilicon tail gas Download PDFInfo
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- CN204602200U CN204602200U CN201520174956.3U CN201520174956U CN204602200U CN 204602200 U CN204602200 U CN 204602200U CN 201520174956 U CN201520174956 U CN 201520174956U CN 204602200 U CN204602200 U CN 204602200U
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Abstract
The utility model discloses the charcoal absorption regenerative system for separating of reclaiming polysilicon tail gas, comprise: the first active carbon adsorption column, the second active carbon adsorption column, the 3rd active carbon adsorption column, polysilicon tail gas feedway, regeneration gas receiving device, cooling medium feedway, cooling medium receiving device, heat medium feedway, heat medium receiving device, hydrogen receiving device, hydrogen gas supplying apparatus.Utilizing the charcoal absorption regenerative system for separating of reclaiming polysilicon tail gas of the present utility model effectively can promote regenerating active carbon effect in adsorption column, reducing temperature when adsorption column adsorbs again, extend the time that when adsorption column adsorbs again, temperature rises.
Description
Technical field
The utility model relates to technical field of polysilicon production, is specifically related to a kind of charcoal absorption regenerative system for separating of reclaiming polysilicon tail gas.
Background technology
The a large amount of tail gas produced in improved Siemens production process, main component is hydrogen, chlorosilane, hydrogen chloride, and recycle benefit very high, tail gas recycle is exactly that the hydrogen in tail gas, chlorosilane, hydrogen chloride are carried out separation and recovery.Adsorption column in tail gas act as and is reclaimed by hydrogen cleaning, adsorption column adopts active carbon to adsorb, absorption terminates regeneration to be needed with hydrogen blowback to reach again the function of adsorption cleaning, the mode that the regeneration of current adsorption column mainly uses the air-blowing of high-temperature low-pressure repeated hydrogenation to sweep is carried out, along with the cumulative rises of absorption number of times, in adsorption column, active carbon there will be regeneration effect and is deteriorated, again during absorption adsorption temp high, from the shortcomings such as the time is short of absorption distance temperature rise.
Application number is 201210496431.2, discloses a kind of regeneration method of active carbon, comprise the following steps: mixed with regenerated solvent by active carbon in the patent of invention that name is called " regeneration method of active carbon "; Ultrasonic process is carried out to above-mentioned mixed system; Carry out Separation of Solid and Liquid after ultrasonic, regenerated solvent is recycled; Be separated the active carbon obtained to wash, after washing, suction filtration obtains active carbon; Above-mentioned active carbon is dried naturally and namely completes regeneration.The shortcoming that such scheme exists: carry out ultrasonic process after (1) this technology needs mix with regenerated solvent, washing is needed after being separated with regenerated solvent, and in the production of polysilicon of reality, the use of active carbon is larger, cannot mix with regenerated solvent timely, and can not contact with water in the production material of polysilicon, therefore this scheme is not suitable for the regeneration of tail gas recycle active carbon in production of polysilicon.
Application number 03151168.6, name is called in the patent of " New technique for regenerating active carbon " and discloses a kind of Regeneration active carbon production method, its step be the cylinder filling regenerated carbon is placed on high temperature flue gas stream in heat, the electric thermo-couple temperature placed in active carbon sends into by the water pipe being arranged on bottom of cylinder the regeneration that steam carries out active carbon after arriving 850-900 degree in drum.The shortcoming that such scheme exists: (1) system adopts cylinder splendid attire active carbon, and the amounts of activated carbon that can use is few, does not reach the tolerance of required purification in polysilicon production process.(2) this technique needs the cylinder that active carbon is housed to be placed in high-temperature flue gas stream to heat, and does not have the flue gas stream of high temperature like this in production of polysilicon.(3) regeneration that steam carries out active carbon sent into by the water pipe by being arranged on bottom of cylinder in regenerative process in drum, should avoid the existence of moisture in production of polysilicon.
Thus, have much room for improvement for separating of the charcoal absorption regenerative system reclaiming polysilicon tail gas.
Utility model content
The utility model is intended to solve one of technical problem in correlation technique at least to a certain extent.The utility model to reach with the difference of low-pressure state equilibrium adsorption capacity in Gas Phase Adsorption mesohigh state based on material and is separated object, under high pressure reach the saturated active carbon adsorbate when low-pressure state of absorption and just desorption occurs, active carbon obtains regeneration through heating, pressure release, purging, absorption four steps, thus proposes a kind of charcoal absorption regenerative system for separating of reclaiming polysilicon tail gas.The charcoal absorption regenerative system for separating of recovery polysilicon tail gas novel provided according to this is provided, regenerating active carbon effect in adsorption column can be promoted, reduce temperature when adsorption column adsorbs again, extend the time that when adsorption column adsorbs again, temperature rises.
According to first aspect of the present utility model, propose a kind of charcoal absorption regenerative system for separating of reclaiming polysilicon tail gas.Comprising for separating of the charcoal absorption regenerative system reclaiming polysilicon tail gas according to the utility model embodiment: the first active carbon adsorption column, the second active carbon adsorption column, the 3rd active carbon adsorption column, described first active carbon adsorption column, the second active carbon adsorption column, the 3rd active carbon adsorption column separately have polysilicon tail gas entrance, regeneration gas outlet, cooling medium entrance, cooling medium outlet, heating medium inlet, Crude product input, hydrogen outlet and hydrogen inlet; Polysilicon tail gas feedway, described polysilicon tail gas feedway is separately connected with the polysilicon tail gas entrance of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column; Regeneration gas receiving device, described regeneration gas receiving device separately exports with the regeneration gas of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column and is connected; Cooling medium feedway, described cooling medium feedway is separately connected with the cooling medium entrance of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column; Cooling medium receiving device, described cooling medium receiving device separately exports with the cooling medium of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column and is connected; Heat medium feedway, described heat medium feedway is separately connected with the heating medium inlet of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column; Heat medium receiving device, described heat medium receiving device is separately connected with the Crude product input of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column; Hydrogen receiving device, described hydrogen receiving device is separately connected with the hydrogen outlet of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column; Hydrogen gas supplying apparatus, described hydrogen gas supplying apparatus is separately connected with the hydrogen inlet of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column.The charcoal absorption regenerative system for separating of recovery polysilicon tail gas novel provided according to this is provided, regenerating active carbon effect in adsorption column can be promoted, reduce temperature when adsorption column adsorbs again, extend the time that when adsorption column adsorbs again, temperature rises.
According to embodiment of the present utility model, described regeneration gas receiving device comprises hydrogen chloride receiving device and/or chlorosilane receiving device.
According to embodiment of the present utility model, described heat medium feedway comprises water feeder and/or conduction oil feedway.
According to embodiment of the present utility model, the described charcoal absorption regenerative system for separating of reclaiming polysilicon tail gas comprises hydrogen electrolyzer further, and described hydrogen electrolyzer is connected with hydrogen gas supplying apparatus with described hydrogen receiving device respectively.
According to embodiment of the present utility model, the pipeline that described polysilicon tail gas feedway is connected with the polysilicon tail gas entrance of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column is respectively arranged with the first polysilicon tail gas inlet valve, the second polysilicon tail gas inlet valve and the 3rd polysilicon tail gas inlet valve successively.
According to embodiment of the present utility model, described regeneration gas receiving device and the regeneration gas of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column export on the pipeline that is connected and are respectively arranged with the first regeneration gas outlet valve, the second regeneration gas outlet valve and the 3rd regeneration gas outlet valve successively.
According to embodiment of the present utility model, the pipeline that described cooling medium feedway is connected with the cooling medium entrance of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column is respectively arranged with the first cooling medium inlet valve, the second cooling medium inlet valve and the 3rd cooling medium inlet valve successively; Described cooling medium receiving system and the cooling medium of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column export on the pipeline that is connected and are respectively arranged with the first cooling medium outlet valve, the second cooling medium outlet valve and the 3rd cooling medium outlet valve successively.
According to embodiment of the present utility model, the pipeline that described heat medium feedway is connected with the heating medium inlet of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column is respectively arranged with the first heating medium inlet valve, the second heating medium inlet valve and the 3rd heating medium inlet valve successively; The pipeline that described heat medium receiving device is connected with the Crude product input of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column is respectively arranged with the first Crude product input valve, the second Crude product input valve and the 3rd Crude product input valve successively.
According to embodiment of the present utility model, the pipeline that described hydrogen receiving device is connected with the hydrogen outlet of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column is respectively arranged with the first hydrogen outlet valve, the second hydrogen outlet valve and the 3rd hydrogen outlet valve successively; The pipeline that described hydrogen gas supplying apparatus is connected with the hydrogen inlet of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column is respectively arranged with the first hydrogen inlet valve, the second hydrogen inlet valve and the 3rd hydrogen inlet valve successively.Thus, effectively can be separated from polysilicon tail gas and obtain hydrogen, and the hydrogen recycling separation acquisition purges, promote that being adsorbed on hydrogen chloride and chlorosilane in active carbon comes off, not only recycle hydrogen, and improve regenerating active carbon effect in adsorption column further.
The described charcoal absorption regenerative system for separating of reclaiming polysilicon tail gas provided by the utility model is utilized to have following advantage:
The total amount of the active carbon that 1, can process is large, can process the active carbon of more than 8 tons;
2, in implementation process without the need to special installations and facilities, just can implement in common adsorption column, the scope of application is large;
3, technological temperature pressure is not harsh, and process conditions are conventional, system is simple, are easy to operation.
Accompanying drawing explanation
Fig. 1 is the charcoal absorption regenerative system schematic diagram for separating of recovery polysilicon tail gas according to the utility model embodiment.
Reference numeral: 1000: the first active carbon adsorption columns; 2000: the second active carbon adsorption columns; 3000: the three active carbon adsorption columns; 100: polysilicon tail gas feedway; 101: the first polysilicon tail gas inlet valves; 102: the second polysilicon tail gas inlet valves; 103: the three polysilicon tail gas inlet valves; 200: regeneration gas receiving device; 201: the first regeneration gas outlet valves; 202: the second regeneration gas outlet valves; 203: the three regeneration gas outlet valves; 300: cooling medium feedway; 301: the first cooling medium inlet valves; 302: the second cooling medium inlet valves; 303: the three cooling medium inlet valves; 400: cooling medium receiving system; 401: the first cooling medium outlet valves; 402: the second cooling medium outlet valves; 403: the three cooling medium outlet valves; 500: heat medium feedway; 501: the first heating medium inlet valves; 502: the second heating medium inlet valves; 503: the three heating medium inlet valves; 600: heat medium receiving device; 601: the first Crude product input valves; 602: the second Crude product input valves; 603: the three Crude product input valves; 700: hydrogen receiving device; 701: the first hydrogen outlet valves; 702: the second hydrogen outlet valves; 703: the three hydrogen outlet valves; 800: hydrogen gas supplying apparatus; 801: the first hydrogen inlet valves; 802: the second hydrogen inlet valves; 803: the three hydrogen inlet valves; 900: hydrogen electrolyzer.
Detailed description of the invention
Be described below in detail embodiment of the present utility model, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Be exemplary below by the embodiment be described with reference to the drawings, be intended to for explaining the utility model, and can not be interpreted as restriction of the present utility model.
In description of the present utility model, it will be appreciated that, term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width ", " thickness ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " outward ", " clockwise ", " counterclockwise ", " axis ", " radial direction ", orientation or the position relationship of the instruction such as " circumference " are based on orientation shown in the drawings or position relationship, only the utility model and simplified characterization for convenience of description, instead of indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as restriction of the present utility model.
In addition, term " first ", " second " only for describing object, and can not be interpreted as instruction or hint relative importance or imply the quantity indicating indicated technical characteristic.Thus, be limited with " first ", the feature of " second " can express or impliedly comprise at least one this feature.In description of the present utility model, the implication of " multiple " is at least two, such as two, three etc., unless otherwise expressly limited specifically.
In the utility model, unless otherwise clearly defined and limited, the term such as term " installation ", " being connected ", " connection ", " fixing " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or integral; Can be mechanical connection, also can be electrical connection; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals or the interaction relationship of two elements, unless otherwise clear and definite restriction.For the ordinary skill in the art, the concrete meaning of above-mentioned term in the utility model can be understood as the case may be.
In the utility model, unless otherwise clearly defined and limited, fisrt feature second feature " on " or D score can be that the first and second features directly contact, or the first and second features are by intermediary mediate contact.And, fisrt feature second feature " on ", " top " and " above " but fisrt feature directly over second feature or oblique upper, or only represent that fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " below " and " below " can be fisrt feature immediately below second feature or tiltedly below, or only represent that fisrt feature level height is less than second feature.
First with reference to Fig. 1, the charcoal absorption regenerative system for separating of recovery polysilicon tail gas according to the utility model embodiment is described below.
According to a kind of charcoal absorption regenerative system for separating of reclaiming polysilicon tail gas of the utility model embodiment, comprising: the first active carbon adsorption column 1000, second active carbon adsorption column 2000, the 3rd active carbon adsorption column 3000, polysilicon tail gas feedway 100, regeneration gas receiving device 200, cooling medium feedway 300, cooling medium receiving device 400, heat medium feedway 500, heat medium receiving device 600, hydrogen receiving device 700 and hydrogen gas supplying apparatus 800.
Wherein, the first active carbon adsorption column 1000, second active carbon adsorption column 2000, the 3rd active carbon adsorption column 3000 separately have polysilicon tail gas entrance, regeneration gas outlet, cooling medium entrance, cooling medium outlet, heating medium inlet, Crude product input, hydrogen outlet and hydrogen inlet; Polysilicon tail gas feedway 100 is separately connected with the polysilicon tail gas entrance of described first active carbon adsorption column 1000, described second active carbon adsorption column 2000, described 3rd active carbon adsorption column 3000; Regeneration gas receiving device separately exports with the regeneration gas of described first active carbon adsorption column 1000, described second active carbon adsorption column 2000, described 3rd active carbon adsorption column 3000 and is connected; Cooling medium feedway 300 is separately connected with the cooling medium entrance of described first active carbon adsorption column 1000, described second active carbon adsorption column 2000, described 3rd active carbon adsorption column 3000; Cooling medium receiving device separately exports with the cooling medium of described first active carbon adsorption column 1000, described second active carbon adsorption column 2000, described 3rd active carbon adsorption column 3000 and is connected; Heat medium feedway 500 is separately connected with the heating medium inlet of described first active carbon adsorption column 1000, described second active carbon adsorption column 2000, described 3rd active carbon adsorption column 3000; Heat medium receiving device 600 is separately connected with the Crude product input of described first active carbon adsorption column 1000, described second active carbon adsorption column 2000, described 3rd active carbon adsorption column 3000; Hydrogen receiving device is separately connected with the hydrogen outlet of described first active carbon adsorption column 1000, described second active carbon adsorption column 2000, described 3rd active carbon adsorption column 3000; Hydrogen gas supplying apparatus is separately connected with the hydrogen inlet of described first active carbon adsorption column 1000, described second active carbon adsorption column 2000, described 3rd active carbon adsorption column 3000.
According to specific embodiment of the utility model, above-mentioned regeneration gas receiving device 200 can comprise hydrogen chloride receiving device and/or chlorosilane receiving device.
According to specific embodiment of the utility model, above-mentioned heat medium feedway 500 can comprise water feeder and/or conduction oil feedway.
According to specific embodiment of the utility model, the described charcoal absorption regenerative system for separating of reclaiming polysilicon tail gas, comprise hydrogen electrolyzer 900 further, described hydrogen electrolyzer 900 is connected with hydrogen gas supplying apparatus 800 with described hydrogen receiving device 700 respectively.
According to embodiment of the present utility model, the pipeline that described polysilicon tail gas feedway 100 is connected with the polysilicon tail gas entrance of described first active carbon adsorption column 1000, described second active carbon adsorption column 2000, described 3rd active carbon adsorption column 3000 is respectively arranged with the first polysilicon tail gas inlet valve 101, second polysilicon tail gas inlet valve 102 and the 3rd polysilicon tail gas inlet valve 103 successively.
According to embodiment of the present utility model, described regeneration gas receiving device 200 and the regeneration gas of described first active carbon adsorption column 1000, described second active carbon adsorption column 2000, described 3rd active carbon adsorption column 3000 export on the pipeline that is connected and are respectively arranged with the first regeneration gas outlet valve 201, second regeneration gas outlet valve 202 and the 3rd regeneration gas outlet valve 203 successively.
According to embodiment of the present utility model, the pipeline that described cooling medium feedway 300 is connected with the cooling medium entrance of described first active carbon adsorption column 1000, described second active carbon adsorption column 2000, described 3rd active carbon adsorption column 3000 is respectively arranged with the first cooling medium inlet valve 301, second cooling medium inlet valve 302 and the 3rd cooling medium inlet valve 303 successively; Described cooling medium receiving system 400 and the cooling medium of described first active carbon adsorption column 1000, described second active carbon adsorption column 2000, described 3rd active carbon adsorption column 3000 export on the pipeline that is connected and are respectively arranged with the first cooling medium outlet valve 401, second cooling medium outlet valve 402 and the 3rd cooling medium outlet valve 403 successively.
According to embodiment of the present utility model, the pipeline that described heat medium feedway 500 is connected with the heating medium inlet of described first active carbon adsorption column 1000, described second active carbon adsorption column 2000, described 3rd active carbon adsorption column 3000 is respectively arranged with the first heating medium inlet valve 501, second heating medium inlet valve 502 and the 3rd heating medium inlet valve 503 successively; The pipeline that described heat medium receiving device 600 is connected with the Crude product input of described first active carbon adsorption column 1000, described second active carbon adsorption column 2000, described 3rd active carbon adsorption column 3000 is respectively arranged with the first Crude product input valve 601, second Crude product input valve 602 and the 3rd Crude product input valve 603 successively.
According to embodiment of the present utility model, the pipeline that described hydrogen receiving device 700 is connected with the hydrogen outlet of described first active carbon adsorption column 1000, described second active carbon adsorption column 2000, described 3rd active carbon adsorption column 3000 is respectively arranged with the first hydrogen outlet valve 701, second hydrogen outlet valve 702 and the 3rd hydrogen outlet valve 703 successively; The pipeline that described hydrogen gas supplying apparatus 800 is connected with the hydrogen inlet of described first active carbon adsorption column 1000, described second active carbon adsorption column 2000, described 3rd active carbon adsorption column 3000 is respectively arranged with the first hydrogen inlet valve 801, second hydrogen inlet valve 802 and the 3rd hydrogen inlet valve 803 successively.
The know-why of the charcoal absorption regenerative system for separating of recovery polysilicon tail gas of the utility model above-described embodiment is described below:
Utilize material to reach with the difference of low-pressure state equilibrium adsorption capacity in Gas Phase Adsorption mesohigh state and be separated object, under high pressure reach the saturated active carbon adsorbate when low-pressure state of absorption and just desorption occurs, active carbon obtains regeneration.The regeneration of active carbon by heating, pressure release, purging adsorb four steps and form.
The technological process of the charcoal absorption regenerative system for separating of recovery polysilicon tail gas of the utility model above-described embodiment and concrete operating parameter are described below in detail.
According to specific embodiment of the utility model, the heat medium of active carbon can be water or conduction oil, heating and temperature control is at 150 DEG C ~ 180 DEG C, hydrogen chloride in active carbon is adsorbed on and chlorosilane molecule is overflowed from active carbon in heating process, when heating temperatures rises to 100 DEG C, pass into electrolysis hydrogen from adsorption column top, promote the disengaging being adsorbed on hydrogen chloride and chlorosilane in active carbon, hydrogen intake is 250-300Nm3/h, and passing into duration is 390min.
According to another specific embodiment of the present utility model, after adsorption column absorption is saturated, pass into heat medium, promote the temperature of whole adsorption column, by the heating of nearly 200min, while heating, steady pressure release, lets out adsorption column to 0.5Bar from adsorptive pressure.Adsorption column is heated to 80-100 DEG C, and the pure hydrogen now passing into 250-300Nm3/h from adsorption column top purges, and sweep gas is discharged by bottom adsorption column, continuous purging 390min, purge terminates rear shut-down purge hydrogen, and adsorption column is slowly pressurized to adsorptive pressure, starts adsorption process again.
Operating parameter
Heating-up temperature: 150 DEG C-180 DEG C
Purge hydrogen flowrate: 250-300Nm3
Purge pressure: 0.05MPa
Below according to above-described know-why and technological parameter and by reference to the accompanying drawings 1 set forth the utility model specific embodiment for separating of the concrete control operation step of charcoal absorption regenerative system reclaiming polysilicon tail gas:
Adsorb saturated adsorption column heat medium when being heated to 80-100 DEG C, the pure hydrogen passing into 250-300Nm3/h purges, purging duration is 390min, when after regeneration ending, adsorption column adsorbs the adsorbate of same traffic again, temperature is 25-35 DEG C, the time that adsorption column temperature of lower rises is 100min, and the upper temp rise time is about 300min.
Control operation step
Described in the utility model for separating of reclaim polysilicon tail gas charcoal absorption regenerative system compared with other adsorption column regenerating active carbon systems, purge time shifts to an earlier date 80min, thermal purging time lengthening 80min, the amounts of activated carbon adopting heating and blowing mode to activate is large, can be applicable to the regeneration process of active carbon in continuous seepage in enormous quantities.Three active carbon loadings are the technique tolerance that the adsorption column of 8 tons can process 11000Nm3/h continuously.And the adsorption cycle of adsorption column is long, the adsorption time of single adsorption column can reach 10h.
In the description of this description, specific features, structure, material or feature that the description of reference term " embodiment ", " some embodiments ", " example ", " concrete example " or " some examples " etc. means to describe in conjunction with this embodiment or example are contained at least one embodiment of the present utility model or example.In this manual, to the schematic representation of above-mentioned term not must for be identical embodiment or example.And the specific features of description, structure, material or feature can combine in one or more embodiment in office or example in an appropriate manner.In addition, when not conflicting, the feature of the different embodiment described in this description or example and different embodiment or example can carry out combining and combining by those skilled in the art.
Although illustrate and described embodiment of the present utility model above, be understandable that, above-described embodiment is exemplary, can not be interpreted as restriction of the present utility model, those of ordinary skill in the art can change above-described embodiment, revises, replace and modification in scope of the present utility model.
Claims (9)
1., for separating of the charcoal absorption regenerative system reclaiming polysilicon tail gas, it is characterized in that, comprising:
First active carbon adsorption column, the second active carbon adsorption column, the 3rd active carbon adsorption column, described first active carbon adsorption column, the second active carbon adsorption column, the 3rd active carbon adsorption column separately have polysilicon tail gas entrance, regeneration gas outlet, cooling medium entrance, cooling medium outlet, heating medium inlet, Crude product input, hydrogen outlet and hydrogen inlet;
Polysilicon tail gas feedway, described polysilicon tail gas feedway is separately connected with the polysilicon tail gas entrance of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column;
Regeneration gas receiving device, described regeneration gas receiving device separately exports with the regeneration gas of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column and is connected;
Cooling medium feedway, described cooling medium feedway is separately connected with the cooling medium entrance of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column;
Cooling medium receiving device, described cooling medium receiving device separately exports with the cooling medium of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column and is connected;
Heat medium feedway, described heat medium feedway is separately connected with the heating medium inlet of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column;
Heat medium receiving device, described heat medium receiving device is separately connected with the Crude product input of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column;
Hydrogen receiving device, described hydrogen receiving device is separately connected with the hydrogen outlet of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column;
Hydrogen gas supplying apparatus, described hydrogen gas supplying apparatus is separately connected with the hydrogen inlet of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column.
2., according to claim 1 for separating of the charcoal absorption regenerative system reclaiming polysilicon tail gas, it is characterized in that, described regeneration gas receiving device comprises hydrogen chloride receiving device and/or chlorosilane receiving device.
3., according to claim 1 for separating of the charcoal absorption regenerative system reclaiming polysilicon tail gas, it is characterized in that, described heat medium feedway comprises water feeder and/or conduction oil feedway.
4. according to claim 1 for separating of the charcoal absorption regenerative system reclaiming polysilicon tail gas, it is characterized in that, comprise further: hydrogen electrolyzer, described hydrogen electrolyzer is connected with described hydrogen gas supplying apparatus with described hydrogen receiving device respectively.
5. according to claim 1 for separating of the charcoal absorption regenerative system reclaiming polysilicon tail gas, it is characterized in that, the pipeline that described polysilicon tail gas feedway is connected with the polysilicon tail gas entrance of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column is respectively arranged with the first polysilicon tail gas inlet valve, the second polysilicon tail gas inlet valve and the 3rd polysilicon tail gas inlet valve successively.
6. according to claim 1 for separating of the charcoal absorption regenerative system reclaiming polysilicon tail gas, it is characterized in that, described regeneration gas receiving device and the regeneration gas of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column export on the pipeline that is connected and are respectively arranged with the first regeneration gas outlet valve, the second regeneration gas outlet valve and the 3rd regeneration gas outlet valve successively.
7. according to claim 1 for separating of the charcoal absorption regenerative system reclaiming polysilicon tail gas, it is characterized in that, the pipeline that described cooling medium feedway is connected with the cooling medium entrance of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column is respectively arranged with the first cooling medium inlet valve, the second cooling medium inlet valve and the 3rd cooling medium inlet valve successively;
Described cooling medium receiving system and the cooling medium of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column export on the pipeline that is connected and are respectively arranged with the first cooling medium outlet valve, the second cooling medium outlet valve and the 3rd cooling medium outlet valve successively.
8. according to claim 1 for separating of the charcoal absorption regenerative system reclaiming polysilicon tail gas, it is characterized in that, the pipeline that described heat medium feedway is connected with the heating medium inlet of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column is respectively arranged with the first heating medium inlet valve, the second heating medium inlet valve and the 3rd heating medium inlet valve successively;
The pipeline that described heat medium receiving device is connected with the Crude product input of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column is respectively arranged with the first Crude product input valve, the second Crude product input valve and the 3rd Crude product input valve successively.
9. according to claim 1 for separating of the charcoal absorption regenerative system reclaiming polysilicon tail gas, it is characterized in that, the pipeline that described hydrogen receiving device is connected with the hydrogen outlet of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column is respectively arranged with the first hydrogen outlet valve, the second hydrogen outlet valve and the 3rd hydrogen outlet valve successively;
The pipeline that described hydrogen gas supplying apparatus is connected with the hydrogen inlet of described first active carbon adsorption column, described second active carbon adsorption column, described 3rd active carbon adsorption column is respectively arranged with the first hydrogen inlet valve, the second hydrogen inlet valve and the 3rd hydrogen inlet valve successively.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107311108A (en) * | 2016-04-26 | 2017-11-03 | 内蒙古盾安光伏科技有限公司 | One kind avoids absorption column regeneration delay production technology |
| CN108726481A (en) * | 2017-04-13 | 2018-11-02 | 新特能源股份有限公司 | A kind of processing unit of polycrystalline silicon reduction exhaust |
| CN112619357A (en) * | 2019-10-09 | 2021-04-09 | 新疆新特晶体硅高科技有限公司 | Method and device for improving efficiency of hydrogen adsorption column and hydrogen recovery system |
-
2015
- 2015-03-26 CN CN201520174956.3U patent/CN204602200U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107311108A (en) * | 2016-04-26 | 2017-11-03 | 内蒙古盾安光伏科技有限公司 | One kind avoids absorption column regeneration delay production technology |
| CN108726481A (en) * | 2017-04-13 | 2018-11-02 | 新特能源股份有限公司 | A kind of processing unit of polycrystalline silicon reduction exhaust |
| CN108726481B (en) * | 2017-04-13 | 2020-04-28 | 新特能源股份有限公司 | Treatment device for polycrystalline silicon reduction tail gas |
| CN112619357A (en) * | 2019-10-09 | 2021-04-09 | 新疆新特晶体硅高科技有限公司 | Method and device for improving efficiency of hydrogen adsorption column and hydrogen recovery system |
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