CN105264338A - 超声波传感器微阵列和其制造方法 - Google Patents

超声波传感器微阵列和其制造方法 Download PDF

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Publication number
CN105264338A
CN105264338A CN201480015015.3A CN201480015015A CN105264338A CN 105264338 A CN105264338 A CN 105264338A CN 201480015015 A CN201480015015 A CN 201480015015A CN 105264338 A CN105264338 A CN 105264338A
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CN
China
Prior art keywords
bcb
wafer
layer
transducer
depression
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201480015015.3A
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English (en)
Chinese (zh)
Inventor
萨扎杜尔·乔杜雷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Windsor
Original Assignee
University of Windsor
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US13/804,279 external-priority patent/US9035532B2/en
Application filed by University of Windsor filed Critical University of Windsor
Publication of CN105264338A publication Critical patent/CN105264338A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Micromachines (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
CN201480015015.3A 2013-03-14 2014-03-12 超声波传感器微阵列和其制造方法 Pending CN105264338A (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US13/804,279 US9035532B2 (en) 2012-11-02 2013-03-14 Ultrasonic sensor microarray and method of manufacturing same
US13/804,279 2013-03-14
PCT/CA2013/000937 WO2014066991A1 (en) 2012-11-02 2013-11-01 Ultrasonic sensor microarray and method of manufacturing same
CAPCT/CA2013/000937 2013-11-01
PCT/CA2014/000217 WO2014138889A1 (en) 2012-11-02 2014-03-12 Ultrasonic sensor microarray and its method of manufacture

Publications (1)

Publication Number Publication Date
CN105264338A true CN105264338A (zh) 2016-01-20

Family

ID=54849055

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480015015.3A Pending CN105264338A (zh) 2013-03-14 2014-03-12 超声波传感器微阵列和其制造方法

Country Status (3)

Country Link
EP (1) EP2972112A1 (ja)
JP (1) JP2016516184A (ja)
CN (1) CN105264338A (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107643228A (zh) * 2017-08-31 2018-01-30 中国船舶重工集团公司第七〇九研究所 测量汞蒸气的芯片及其制备方法、传感器及其使用方法
CN109426268A (zh) * 2017-08-30 2019-03-05 苏州宝时得电动工具有限公司 自移动设备
CN109752722A (zh) * 2017-11-02 2019-05-14 弗兰克公司 多模态声学成像工具
CN110749343A (zh) * 2019-09-29 2020-02-04 杭州电子科技大学 基于六边形网格布局的多频带mems超声换能器阵列
TWI740658B (zh) * 2020-09-22 2021-09-21 國立高雄科技大學 多頻率超音波換能器輸入裝置及其製法
CN110275170B (zh) * 2018-03-15 2021-12-03 郑州宇通客车股份有限公司 一种车辆的雷达探测控制方法及车辆

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109426268A (zh) * 2017-08-30 2019-03-05 苏州宝时得电动工具有限公司 自移动设备
CN109426268B (zh) * 2017-08-30 2024-04-16 苏州宝时得电动工具有限公司 自移动设备
CN107643228A (zh) * 2017-08-31 2018-01-30 中国船舶重工集团公司第七〇九研究所 测量汞蒸气的芯片及其制备方法、传感器及其使用方法
CN109752722A (zh) * 2017-11-02 2019-05-14 弗兰克公司 多模态声学成像工具
CN109752722B (zh) * 2017-11-02 2024-04-02 弗兰克公司 多模态声学成像工具
CN110275170B (zh) * 2018-03-15 2021-12-03 郑州宇通客车股份有限公司 一种车辆的雷达探测控制方法及车辆
CN110749343A (zh) * 2019-09-29 2020-02-04 杭州电子科技大学 基于六边形网格布局的多频带mems超声换能器阵列
TWI740658B (zh) * 2020-09-22 2021-09-21 國立高雄科技大學 多頻率超音波換能器輸入裝置及其製法

Also Published As

Publication number Publication date
JP2016516184A (ja) 2016-06-02
EP2972112A1 (en) 2016-01-20

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Application publication date: 20160120