CN105204452B - A kind of polycrystalline silicon reducing furnace interlock system - Google Patents

A kind of polycrystalline silicon reducing furnace interlock system Download PDF

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Publication number
CN105204452B
CN105204452B CN201410295303.0A CN201410295303A CN105204452B CN 105204452 B CN105204452 B CN 105204452B CN 201410295303 A CN201410295303 A CN 201410295303A CN 105204452 B CN105204452 B CN 105204452B
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water
stop valve
interlocking
value
temperature
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CN105204452A (en
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王文
邹分红
刘方旭
郑安
其他发明人请求不公开姓名
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Xinte Energy Co Ltd
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Xinte Energy Co Ltd
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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Abstract

The present invention provides a kind of polycrystalline silicon reducing furnace interlock system, and controller can be when electrical control cubicles be in halted state, and triggering electrical control cubicles stop interlocking; close and locked trichlorosilane stop valve; so that when electrical control cubicles are powered off and shut down, trichlorosilane charging is blocked in time, it is ensured that the quality of polysilicon product；And, controller can be in halted state in electrical control cubicles, and detect hydrogeneous waste gas stop valve, not hydrogeneous waste gas stop valve, tail gas stop valve and vacuumize stop valve when any of valve be in opening when, control is closed and remaining locked 3 valve, so as to avoid security incident and the property losses such as the quick-fried, device damage of sudden strain of a muscle that the waste gas anti-channeling in hydrogeneous waste line, not hydrogeneous waste line, high-temperature tail gas pipeline and vacuum lines brings, the security of production of polysilicon is improved, extends the service life of tail gas treatment device.

Description

A kind of polycrystalline silicon reducing furnace interlock system
Technical field
The present invention relates to technical field of polysilicon production, and in particular to a kind of polycrystalline silicon reducing furnace interlock system.
Background technology
Polysilicon is produced using Siemens Method, is that high-purity trichlorosilane and hydrogen are passed through in reduction furnace, in temperature 950-1200 DEG C, under pressure 0.4-0.6MPaG, carry out the deposition reaction of polysilicon.And reducing furnace system consersion unit and pipeline Have temperature, pressure, a tolerance range of flow, overtemperature, superpressure, cooling water flow be too low can cause equipment and pipeline breaking, Burnt, deformed by high temperature, the trichlorosilane and hydrogen of leakage can set off an explosion, this is that considerable safety in production of polysilicon is hidden Suffer from.
Because the understanding to potential safety hazard in polysilicon production process is not comprehensive, and to powering off, cutting off the water supply, die, instrument The security implication that the urgent emergency case of failure etc. is brought considers incomplete, and there is presently no a set of effective reduction furnace interlocking machine System, but the related production equipment of artificial control is relied on, to temporarily cease production.For example, reduction furnace suddenly fall rod or suddenly , it is necessary to which operator's hand off trichlorosilane is fed in the case of power failure.If operator fails to cut off trichlorosilane charging in time, Polysilicon surface may be caused to turn blue, polysilicon product quality is had a strong impact on.In addition, if trichlorosilane and air, oxygen Gas etc. is contacted, in some instances it may even be possible to cause Fire explosion.However, relying solely on the operation level and the urgent burst feelings of experience reply of personnel Condition, can bring very big hidden danger to production safety.
In addition, reduction furnace, which is normally produced, contains a large amount of trichlorosilanes and hydrogen etc. in the tail gas of generation, and the displacement of reduction furnace Waste gas is divided into not hydrogeneous (oxygen-containing) and hydrogeneous two kinds, and waste gas etc. is vacuumized in addition, also having.Typically various waste gas are returned respectively Receive, if hydrogeneous waste gas, oxygen-containing waste gas, reaction end gas, vacuumizing gas anti-channeling between waste gas, hydrogen can be caused to be mixed with air Close, or, tail gas is largely leaked, and causes to dodge security incident and the property losses such as quick-fried, device damage, and there is presently no a kind of energy Enough avoid different waste gas and the mutual anti-channeling of reaction end gas automatically controls mechanism.
Therefore, a kind of polycrystalline silicon reducing furnace crosslinking lock scheme is needed badly, to solve above-mentioned technical problem.
The content of the invention
The present invention, there is provided a kind of polycrystalline silicon reducing furnace interlock system, is used to for above shortcomings in the prior art Solve the problems, such as the production safety that a variety of waste gas and the mutual anti-channeling of reaction end gas are brought, and power off in reduction furnace, cut off the water supply, break suddenly Gas etc. is in emergency circumstances, it is impossible to the problem of eliminating danger in time.
The present invention is in order to solve the above technical problems, adopt the following technical scheme that：
The present invention provides a kind of polycrystalline silicon reducing furnace interlock system, including：Controller, electrical control cubicles, for controlling trichlorine hydrogen Trichlorosilane stop valve that silicon feeding line is turned on or off, the hydrogeneous waste gas for controlling hydrogeneous waste line to be turned on or off Stop valve, for controlling not hydrogeneous waste gas stop valve that not hydrogeneous waste line is turned on or off, for controlling exhaust pipe to lead Tail gas stop valve that on-off is opened and for controlling what vacuum lines were turned on or off to vacuumize stop valve, controller is used for, The status signal of reduction furnace is obtained according to default controlling cycle, when getting the halted state signal of reduction furnace, to trichlorine Hydrogen silicon stop valve sends closing control signal, and locked trichlorosilane stop valve, and interlocking is stopped triggering electrical control cubicles, and, inspection Hydrogeneous waste gas stop valve, not hydrogeneous waste gas stop valve, tail gas stop valve and the state for vacuumizing stop valve are surveyed, with the exhaust valve that comes into operation Interlocking interlocking；When detecting hydrogeneous waste gas stop valve, not hydrogeneous waste gas stop valve, tail gas stop valve and vacuumize among stop valve When any one valve is in opening, closing control signal is sent and locked to remaining 3 valve, it is mutual to trigger exhaust valve Lock interlocking；Wherein, remaining described 3 valve refer to the hydrogeneous waste gas stop valve, not hydrogeneous waste gas stop valve, tail gas cut-out Valve and vacuumize 3 valves in stop valve in addition to the valve in opening.
Further, the controller is additionally operable to, when detecting hydrogeneous waste gas stop valve, not hydrogeneous waste gas stop valve, tail When gas stop valve is closure state with stop valve is vacuumized, cut to hydrogeneous waste gas stop valve, not hydrogeneous waste gas stop valve, tail gas Disconnected valve sends unlocking control signal with stop valve is vacuumized, to release exhaust valve interlocking interlocking.
Further, the controller is additionally operable to, when getting the operating state signal of reduction furnace, or, work as acquisition To the halted state signal of reduction furnace, and when receiving the exhaust valve interlocking deactivation control signal of user's transmission, stop detection and contain Hydrogen waste gas stop valve, not hydrogeneous waste gas stop valve, tail gas stop valve and the state for vacuumizing stop valve, and cut off to hydrogeneous waste gas Valve, not hydrogeneous waste gas stop valve, tail gas stop valve and vacuumize locked valve in stop valve and send unlocking control signal, to stop Only come into operation and release exhaust valve interlocking and interlock.
Further, the controller is additionally operable to, when getting the operating state signal of reduction furnace, or, work as acquisition To the halted state signal of reduction furnace, and when receiving the electrical control cubicles stopping interlocking releasing control signal of user's transmission, to trichlorine Hydrogen silicon stop valve sends unlocking control signal, and interlocking is stopped releasing electrical control cubicles.
Further, the system also includes：For control hydrogen stop valve that hydrogen feed line is turned on or off and Scram button on the controller is set；
The controller is additionally operable to, when getting the operating state signal of reduction furnace, scram button is enabled, with the urgency that comes into operation Stop interlocking；When getting the halted state signal of reduction furnace, scram button is made to fail, with the jerk interlocking that stops coming into operation；When connecing When receiving reduction furnace jerk control signal, reduction furnace jerk control signal out of service can be made by being sent to electrical control cubicles, and to three Chlorine hydrogen silicon stop valve and hydrogen stop valve send closing control signal, to trigger jerk interlocking；Wherein, the reduction furnace jerk control When signal processed is that scram button is pressed, sent to controller.
Further, the system also includes：Hang-up button on the controller is set；
The controller is additionally operable to, when getting the operating state signal of reduction furnace, is enabled and is hung up button, with the extension that comes into operation Play interlocking；When receiving reduction furnace hang-up control signal, closing control is sent to trichlorosilane stop valve and hydrogen stop valve Signal, and locked trichlorosilane stop valve and hydrogen stop valve, interlocking is hung up to trigger, wherein, the reduction furnace hangs up control Signal is when hanging up after button is enabled and being pressed, to be sent to controller；When getting the halted state signal of reduction furnace, Button useless is hung up in order, and sends unlocking control signal to trichlorosilane stop valve and hydrogen stop valve, is come into operation and is solved to stop Interlocked except hanging up；When getting the operating state signal of reduction furnace, and receive reduction furnace and hang up control signal, and trichlorosilane Stop valve and hydrogen stop valve, which are in, closes and during locked state, sends and unlocks to trichlorosilane stop valve and hydrogen stop valve Control signal, interlocking is hung up to release.
Further, the system also includes：For detecting the tail gas pressure transmitter of exhaust pipe inner exhaust gas pressure, using In exhaust temperature transmitter, the electricity for electrode coolant-temperature gage in detecting electrode return piping of detection exhaust pipe inner exhaust gas temperature Pole coolant-temperature gage transmitter, for the electrode water ga(u)ge of electrode water-carrying capacity in detecting electrode return piping, for detecting that chassis is returned The chassis coolant-temperature gage transmitter of chassis coolant-temperature gage, the chassis water for detecting chassis water-carrying capacity in the return piping of chassis in water pipeline Flowmeter, the furnace tube coolant-temperature gage transmitter for detecting furnace tube coolant-temperature gage in furnace tube return piping, for detecting furnace tube return pipe The furnace tube water ga(u)ge of furnace tube water-carrying capacity, the chuck coolant-temperature gage change for detecting jacket water (J.W.) return piping internal jacket coolant-temperature gage in line Send device and the chuck water ga(u)ge for detecting jacket water (J.W.) return piping internal jacket water-carrying capacity；
The controller is additionally operable to, when getting the operating state signal of reduction furnace, performs following operate：By tail gas pressure The tail gas pressure value that power transmitter is detected is compared with default tail gas superpressure interlocking value, with the tail gas superpressure interlocking that comes into operation；Will Exhaust temperature transmitters sense to exhaust temperature value compared with default tail gas over temperature interlock value, with come into operation tail gas overtemperature connection Lock；The electrode water temperature value that electrode water temperature transmitter is detected compares with default electrode water over temperature interlock value, to throw Use electrode water over temperature interlock；The electrode water flow value that electrode water ga(u)ge is detected and the too low interlocking of default electrode water-carrying capacity Value compares, with the too low interlocking of the electrode water-carrying capacity that comes into operation；Chassis water temperature angle value that chassis coolant-temperature gage transmitters sense is arrived with it is pre- If chassis water over temperature interlock value compare, with the chassis water over temperature interlock that comes into operation；The chassis water that chassis water ga(u)ge is detected Flow value is compared with the default too low interlocking value of chassis water-carrying capacity, with the too low interlocking of the chassis water-carrying capacity that comes into operation；By furnace tube water temperature Spend transmitters sense to furnace tube water temperature angle value with default furnace tube water over temperature interlock value compared with, with come into operation furnace tube water overtemperature join Lock；The furnace tube water flow value that furnace tube water ga(u)ge is detected compares with the default too low interlocking value of furnace tube water-carrying capacity, to throw With the too low interlocking of furnace tube water-carrying capacity；The jacket water (J.W.) temperature value that jacket water (J.W.) temperature transmitter is detected and default jacket water (J.W.) overtemperature Interlocking value compares, with the jacket water (J.W.) over temperature interlock that comes into operation；The chuck water flow value that chuck water ga(u)ge is detected with it is default The too low interlocking value of chuck water-carrying capacity compares, with the too low interlocking of the chuck water-carrying capacity that comes into operation.
Further, the controller is additionally operable to, when getting the halted state signal of reduction furnace, or, work as acquisition To the operating state signal of reduction furnace, and when receiving the interlocking deactivation control signal of user's transmission, stop operating below execution, To stop the interlocking corresponding with the interlocking deactivation control signal that come into operation：The tail gas pressure that tail gas pressure transmitter is detected Value is compared with default tail gas superpressure interlocking value；The exhaust temperature value that exhaust temperature transmitters sense is arrived and default tail gas Over temperature interlock value compares；The electrode water temperature value that electrode water temperature transmitter is detected and default electrode water over temperature interlock Value compares；The electrode water flow value that electrode water ga(u)ge is detected is compared with the default too low interlocking value of electrode water-carrying capacity Compared with；By chassis coolant-temperature gage transmitters sense to chassis water temperature angle value compared with default chassis water over temperature interlock value；The bottom of by The chassis water flow value that disk water ga(u)ge is detected is compared with the default too low interlocking value of chassis water-carrying capacity；By furnace tube coolant-temperature gage Transmitters sense to furnace tube water temperature angle value compared with default furnace tube water over temperature interlock value；Furnace tube water ga(u)ge is detected Furnace tube water flow value compared with the default too low interlocking value of furnace tube water-carrying capacity；The folder that jacket water (J.W.) temperature transmitter is detected Water temperature angle value is covered compared with default jacket water (J.W.) over temperature interlock value；Chuck water flow value that chuck water ga(u)ge is detected with The default too low interlocking value of chuck water-carrying capacity compares.
Further, the controller is additionally operable to, when one of following trigger condition or any combination meet when, to the electricity Control cabinet, which is sent, can make reduction furnace jerk control signal out of service, and send pass to trichlorosilane stop valve and hydrogen stop valve Control signal is closed, to trigger the interlocking for meeting trigger condition：
When the tail gas pressure value that tail gas pressure transmitter is detected is more than or equal to tail gas superpressure interlocking value；
When the exhaust temperature value that exhaust temperature transmitters sense is arrived is more than or equal to tail gas over temperature interlock value；
When the electrode water temperature value that electrode water temperature transmitter is detected is more than or equal to electrode water over temperature interlock value；
When the electrode water flow value that electrode water ga(u)ge is detected interlocking value too low less than or equal to electrode water-carrying capacity；
When the chassis water temperature angle value that chassis coolant-temperature gage transmitters sense is arrived is more than or equal to chassis water over temperature interlock value；
When the chassis water flow value that chassis water ga(u)ge is detected interlocking value too low less than or equal to chassis water-carrying capacity；
When the furnace tube water temperature angle value that furnace tube coolant-temperature gage transmitters sense is arrived is more than or equal to furnace tube water over temperature interlock value；
When the furnace tube water flow value that furnace tube water ga(u)ge is detected interlocking value too low less than or equal to furnace tube water-carrying capacity；
When the jacket water (J.W.) temperature value that jacket water (J.W.) temperature transmitter is detected is more than or equal to jacket water (J.W.) over temperature interlock value；
When the chuck water flow value that chuck water ga(u)ge is detected interlocking value too low less than or equal to chuck water-carrying capacity.
It is preferred that, the first interlocking delay duration is preset with the controller, the first interlocking delay duration is more than the control Cycle processed；
The controller specifically for, when one of described trigger condition or any combination meet when, delay described first Lock delay duration and send the jerk control signal to electrical control cubicles, and closing is sent to trichlorosilane stop valve and hydrogen stop valve Control signal, to trigger the interlocking for meeting trigger condition.
The present invention is by the way that when electrical control cubicles are in halted state, triggering electrical control cubicles stop interlocking, close and locked trichlorine hydrogen Silicon stop valve, can block trichlorosilane charging in time, it is ensured that the quality of polysilicon product when electrical control cubicles are powered off and shut down；With And, electrical control cubicles be in halted state, and detect hydrogeneous waste gas stop valve, not hydrogeneous waste gas stop valve, tail gas stop valve and Vacuumize stop valve when any of valve be in opening when, close and remaining locked 3 valve, so as to avoid hydrogeneous Sudden strain of a muscle that waste gas anti-channeling in waste line, not hydrogeneous waste line, high-temperature tail gas pipeline and vacuum lines is brought is quick-fried, equipment is damaged Security incident and the property loss such as bad, improve the security of production of polysilicon, extend the service life of tail gas treatment device.
Brief description of the drawings
Fig. 1 is polycrystalline silicon reducing furnace interlock system structural representation provided in an embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the present invention, clear, complete description is carried out to the technical scheme in the present invention, is shown So, described embodiment is a part of embodiment of the present invention, rather than whole embodiments.Based on the implementation in the present invention Example, the every other embodiment that those of ordinary skill in the art are obtained on the premise of creative work is not made all belongs to In the scope of protection of the invention.
Fig. 1 is polycrystalline silicon reducing furnace interlock system structural representation provided in an embodiment of the present invention, as shown in figure 1, this is more Crystal silicon reduction furnace interlock system includes：Reduction furnace 1, tail gas heat exchanger 2, static mixer 3, tail gas heat exchanger 2 respectively with reduction Stove 1 is connected with static mixer 3, and furnace tube water pipeline waterborne and furnace tube water return piping, chassis water pipeline waterborne and chassis water are returned Water pipeline, electrode water water-line and electrode water return piping are connected with reduction furnace 1 respectively, preceding exhaust pipe and reduction furnace phase Even, the outside of exhaust pipe before jacket water (J.W.) water-line is coated on, jacket water (J.W.) return piping is connected with jacket water (J.W.) water-line, and three Chlorine hydrogen silicon feeding line and hydrogen feed line are connected with static mixer 3 respectively.The preceding exhaust pipe and vacuum lines, Hydrogeneous waste line and not hydrogeneous waste line and exhaust pipe (exhaust pipe after also known as) are respectively connected with, i.e., vacuum lines, Hydrogeneous waste line and not hydrogeneous waste line and exhaust pipe are connected in parallel.
The polycrystalline silicon reducing furnace interlock system also includes：It is trichlorosilane stop valve 4, hydrogeneous waste gas stop valve 5, not hydrogeneous useless Gas stop valve 6, tail gas stop valve 7 and stop valve 8, controller (not illustrated in figure) and electrical control cubicles (not illustrated in figure) are vacuumized, Electrical control cubicles, trichlorosilane stop valve 4, hydrogeneous waste gas stop valve 5, not hydrogeneous waste gas stop valve 6, tail gas stop valve 7 and vacuumize Stop valve 8 is connected with controller respectively.Electrical control cubicles are used to control reduction furnace 1 to start or blowing out according to the control instruction of controller. Trichlorosilane stop valve 4 is arranged on trichlorosilane feeding line, for controlling trichlorosilane feeding line to be turned on or off；Contain Hydrogen waste gas stop valve 5 is arranged on hydrogeneous waste line, for controlling hydrogeneous waste line to be turned on or off；Not hydrogeneous waste gas is cut Disconnected valve 6 is arranged on not hydrogeneous waste line, for controlling not hydrogeneous waste line to be turned on or off；Tail gas stop valve 7 is set In on exhaust pipe, for controlling exhaust pipe to be turned on or off；Vacuumize stop valve 8 to be arranged in vacuum lines, be used for Control vacuum lines are turned on or off.
In embodiments of the present invention, controller can be from DCS (Distributed Control System, distribution Control system) realize.
Comprising a large amount of trichlorosilanes, hydrogen and waste gas etc. in the reaction end gas produced in polysilicon production process, in order to Production safety is, it is necessary to reaction end gas and waste gas be handled respectively, reaction end gas is conveyed by exhaust pipe.
Due to air and hydrogen mixing explosive, therefore to be utilized respectively different pipelines and discharge both waste gas, when not When hydrogeneous exhaust gas valve 6 is opened and (opened), not hydrogeneous waste gas is discharged into not hydrogeneous waste line, when hydrogeneous exhaust gas valve 5 is opened, contains Hydrogen waste gas is discharged into hydrogeneous waste line.Meanwhile, not hydrogeneous waste gas can also be discharged into vacuum lines and (now, vacuumize stop valve 8 dozens Open), still, not hydrogeneous waste gas can not be discharged into not hydrogeneous waste line and vacuum lines simultaneously, i.e., not hydrogeneous waste gas stop valve 6 Can not be while opening with stop valve 8 is vacuumized.
Specifically, carrying out when overhaul of the equipments open stove displacement, it is necessary to replace the waste gas in reduction furnace and pipeline, specifically It is the gaseous mixture (i.e. not hydrogeneous waste gas) that nitrogen and air are obtained first with the air in nitrogen displacement reduction furnace, it is not hydrogeneous useless Gas can be discharged into not hydrogeneous waste gas header after not hydrogeneous waste gas stop valve 6 is opened, the not hydrogeneous waste gas discharged with other reduction furnaces Converged, be then discharged into after elution device and be vented.Not hydrogeneous waste gas (is now free of after can also being opened vacuumizing stop valve 8 Hydrogen waste gas stop valve 6 is closed), it is discharged into and vacuumizes house steward, the not hydrogeneous waste gas discharged with other reduction furnaces is converged, Ran Houpai Emptying is postponed toward vacuum means；The nitrogen in hydrogen displacement reduction furnace is recycled, the gaseous mixture for obtaining hydrogen and nitrogen is (i.e. hydrogeneous Waste gas), hydrogeneous waste gas can be discharged into hydrogeneous waste gas header after hydrogeneous waste gas stop valve 5 opening, with containing that other reduction furnaces are discharged Hydrogen waste gas is converged, and is then discharged into after elution device and is vented.
Hydrogeneous waste gas stop valve and not hydrogeneous waste gas stop valve can not be opened simultaneously, and otherwise air and hydrogen mixing is also easy to produce Blast.
Vacuum lines are set to be only used for vacuumize not hydrogeneous waste gas.Vacuum lines connection is vacuumized Equipment, vaccum-pumping equipment produces negative pressure by hydraulic jet pump, drives gas flowing emptying in pipeline.And if vacuumizing cut-out Valve 8 is opened simultaneously with hydrogeneous waste gas stop valve 5 or not hydrogeneous waste gas stop valve 6, may be caused hydrogeneous waste gas header line or is free of Large quantity of exhaust gas in hydrogen waste gas header line falls to be evacuated to vacuum lines, causes vaccum-pumping equipment to block in damage, hydrogeneous waste gas There is also the potential safety hazard for making vaccum-pumping equipment produce blast for hydrogen etc..
Pressure in the gas such as the trichlorosilane of reaction end gas in exhaust pipe comprising high temperature and hydrogen, exhaust pipe compared with Greatly, vaccum-pumping equipment produces negative pressure by hydraulic jet pump, can if tail gas stop valve 7 and vacuumize stop valve 8 and open simultaneously It can cause to fall to be evacuated in vaccum-pumping equipment by the reaction end gas in exhaust pipe, the trichlorosilane and hydrogen of high temperature are set with vacuumizing Liquid in standby reacts, explosive.
Therefore, in order to ensure production safety, it is to be ensured that hydrogeneous waste gas stop valve 5, not hydrogeneous waste gas stop valve 6, tail gas are cut Disconnected valve 7 and vacuumize in stop valve 8 that any 2 valves can not be while open.
The running status and halted state of reduction furnace are distinguished by the status signal of electrical control cubicles, because the shape of electrical control cubicles State and the state of reduction furnace are always consistent, and electrical control cubicles are connected with controller.When reduction furnace is in running status, accordingly , electrical control cubicles are in running status, and electrical control cubicles can continue to send operating state signal to controller, for example, being sent to controller High level signal；When reduction furnace is in halted state, accordingly, electrical control cubicles are in halted state, and electrical control cubicles can continue to control Device processed sends halted state signal, for example, sending low level signal to controller.Controller is believed by obtaining the state of electrical control cubicles Number i.e. would know that the state that reduction furnace is presently in is running status or halted state.
Controlling cycle is preset with controller, it is preferred that controlling cycle could be arranged to 1s.
Specifically, controller is used for, the status signal of electrical control cubicles is obtained according to default controlling cycle, it is automatically controlled when getting During the halted state signal of cabinet, illustrate that reduction furnace is currently at halted state, therefore, send and close to trichlorosilane stop valve 4 Control signal, and locked trichlorosilane stop valve 4, interlocking is stopped triggering electrical control cubicles.
It may cause Fire explosion because trichlorosilane and air, oxygen etc. are contacted, therefore, in the displacement of start and stop stove, tear stove open It is not allow to be passed through trichlorosilane into it under the conditions of oxygen-containing when out of service of reduction furnace.Therefore, the present invention is by setting Put electrical control cubicles and stop interlocking, when reduction furnace is out of service, immediately by the way that the trichlorosilane on trichlorosilane feeding line is cut Disconnected valve 4 closes to cut off the connection of reduction furnace and trichlorosilane feeding line, so as to ensure safety and reduce loss.
Once controller gets reduction furnace and is in halted state, just automatic triggering electrical control cubicles stop interlocking, so as to Automatically, potential potential safety hazard is excluded in time, improves automaticity.When electrical control cubicles stop interlocking triggering, controller Close and locked trichlorosilane stop valve 4, can not only avoid continuing continuing to convey trichlorosilane into reduction furnace, it is to avoid polycrystalline Silicon face is turned blue, it is ensured that the quality of polysilicon product, but also artificial open by mistake manually can be avoided to open trichlorosilane cut-out Valve 4, it is to avoid trichlorosilane and air, oxygen etc. are contacted, improves production security and reliability.
Controller is additionally operable to, when getting the halted state signal of electrical control cubicles, is detected hydrogeneous waste gas stop valve 5, is free of Hydrogen waste gas stop valve 6, tail gas stop valve 7 and the state for vacuumizing stop valve 8, with the exhaust valve interlocking interlocking that comes into operation.When detecting Hydrogeneous waste gas stop valve 5, not hydrogeneous waste gas stop valve 6, tail gas stop valve 7 and vacuumize stop valve 8 and any of work as at valve When opening, closing control signal is sent and locked to remaining 3 valve, to trigger exhaust valve interlocking interlocking.Wherein, Remaining described 3 valve refer to the hydrogeneous waste gas stop valve 5, not hydrogeneous waste gas stop valve 6, tail gas stop valve 7 and take out true 3 valves in empty stop valve 8 in addition to 1 valve in opening.
When reduction furnace is in halted state, the exhaust valve that comes into operation interlocking interlocking, to ensure security when opening stove displacement.One 1 valve that denier is detected in above-mentioned 4 valves is in opening, then closes and remaining locked 3 valve, can avoid Hydrogeneous waste gas stop valve 5, not hydrogeneous waste gas stop valve 6, tail gas stop valve 7, vacuumize between stop valve 8 at least two-by-two while opening Open, it is to avoid hydrogen that thus mutual anti-channeling is brought between caused hydrogeneous waste gas, not hydrogeneous waste gas, reaction end gas and air it is mixed Close, cause to dodge security incident and the property losses such as quick-fried, device damage, improve the security of production of polysilicon, extend vent gas treatment The service life of equipment.
Due to requiring that reaction end gas removes tail gas dry process retracting device by exhaust pipe under reduction furnace operating state, now Only tail gas stop valve 7 is that (i.e. tail gas stop valve 7 is in opening to opening, so that exhaust pipe and preceding exhaust pipe Connection), hydrogeneous waste gas stop valve 5, not hydrogeneous waste gas stop valve 6 and vacuumize stop valve 8 all be close (i.e. it is now hydrogeneous give up Gas pipeline, not hydrogeneous waste line and vacuum lines are not all connected with preceding exhaust pipe), and in reduction furnace whole service All it is not present to other 3 valves (i.e. hydrogeneous waste gas stop valve 5, not hydrogeneous waste gas stop valve 6 and vacuumize stop valve 8) in journey Any operation.Therefore, under reduction furnace operating state, without the exhaust valve interlocking interlocking that comes into operation.
Further, controller is additionally operable to, when detecting hydrogeneous waste gas stop valve 5, not hydrogeneous waste gas stop valve 6, tail gas Stop valve 7 and when to vacuumize stop valve 8 be closure state (i.e. closed mode), respectively to hydrogeneous waste gas stop valve 5, not hydrogeneous Waste gas stop valve 6, tail gas stop valve 7 and vacuumize stop valve 8 and send unlocking control signal, so that hydrogeneous waste gas stop valve 5, no Hydrogeneous waste gas stop valve 6, tail gas stop valve 7 and vacuumize stop valve 8 and unlock, to release exhaust valve interlocking interlocking.
Specifically, when reduction furnace be in halted state, and when controller detect hydrogeneous waste gas stop valve 5, it is not hydrogeneous give up Gas stop valve 6, tail gas stop valve 7 and when to vacuumize stop valve 8 be closure state, exhaust valve interlocking interlocking is released, exhaust valve After interlocking interlocking is released, above-mentioned 4 valves are unlocked, i.e., above-mentioned 4 valves are in enabled state (i.e. in effective status), solution Valve after lock can be steered.
Refer to it should be noted that the interlocking mentioned in the embodiment of the present invention is released, only valve unblock (is released locked State), the state without changing current valve, that is, the state for keeping valve to be presently in.
Exhaust valve interlocking interlocking stopping comes into operation and released including two kinds of situations：It is automatically stopped and comes into operation and release and be (other manually Road) stop coming into operation and releasing.
The controller is additionally operable to, when getting the operating state signal of electrical control cubicles, stops the hydrogeneous waste gas cut-out of detection Valve 5, not hydrogeneous waste gas stop valve 6, tail gas stop valve 7 and the state for vacuumizing stop valve 8, and to hydrogeneous waste gas stop valve 5, no Hydrogeneous waste gas stop valve 6, tail gas stop valve 7 and vacuumize locked valve in stop valve 8 and send unlocking control signal, to stop Come into operation and release exhaust valve interlocking and interlock.
Exhaust valve interlocking interlocking is automatically stopped when reduction furnace is in running status to be come into operation and releases, and therefore, works as reduction furnace When being changed into running status from halted state, controller no longer detects the state of above-mentioned 4 valves, and unlocks above-mentioned 4 valves.Need It is noted that controller sends unlocking control signal to above-mentioned 4 valves respectively, if had in 4 valves in locked shape The valve of state, then the valve in locking state can be unlocked according to the unlocking control signal received in above-mentioned 4 valves. If above-mentioned 4 valves are in released state, when receiving unlocking control signal, without any operation, unblock is kept State.
The controller is additionally operable to, when getting the halted state signal of electrical control cubicles, and receives the tail gas of user's transmission When valve interlocking disables control signal (user can be by the signal of the key-press input on the control panel of controller), stop detection and contain Hydrogen waste gas stop valve 5, not hydrogeneous waste gas stop valve 6, tail gas stop valve 7 and the state for vacuumizing stop valve 8, and to hydrogeneous waste gas Stop valve 5, not hydrogeneous waste gas stop valve 6, tail gas stop valve 7 and vacuumize locked valve in stop valve 8 and send solution lock control Signal, is interlocked with stopping coming into operation and releasing exhaust valve interlocking.
Carrying out hydrogeneous waste gas stop valve 5, not hydrogeneous waste gas stop valve 6, tail gas stop valve 7 and vacuumizing stop valve 8 and examine Repair in the case of operation or other special displacements, can stop coming into operation and releasing exhaust valve interlocking interlocking manually.It is i.e. mutual in exhaust valve In the case that lock interlocking has come into operation, send exhaust valve interlocking to controller from user and disable control signal, controller is no longer detected The state of above-mentioned 4 valves, is come into operation with stopping exhaust valve interlocking interlocking, and above-mentioned 4 valves are unlocked, mutual to release exhaust valve Lock interlocking.
Electrical control cubicles, which stop interlocking releasing, includes two kinds of situations：Automatically terminate and (bypass) releases manually.
Controller is additionally operable to, when getting the operating state signal of electrical control cubicles, is sent and is unlocked to trichlorosilane stop valve 4 Control signal, interlocking is stopped automatically terminating electrical control cubicles.
Electrical control cubicles stop interlocking and automatically terminated when reduction furnace is in running status, therefore, when reduction furnace is by halted state When being changed into running status, controller unblock trichlorosilane stop valve 4.
Controller is additionally operable to, when getting the halted state signal of electrical control cubicles, and is received the electrical control cubicles of user's transmission and stopped When only interlocking releases control signal, unlocking control signal is sent to trichlorosilane stop valve 4, connection is stopped releasing electrical control cubicles manually Lock.
Under maintenance or special operating requirements, electrical control cubicles can be released manually and stop interlocking, i.e., temporarily electrical control cubicles are stopped Interlocking bypass, after the completion of maintenance or operation, then releases bypass.I.e. electrical control cubicles stop interlocking having triggered in the case of, by with Family sends electrical control cubicles to controller and stops interlocking releasing control signal, the no longer locked trichlorosilane stop valve 4 of controller, to release Electrical control cubicles stop interlocking.
In order to tackle emergency, the embodiment of the present invention is also provided with jerk interlocking.Referring to Fig. 1, the system can be with Including：The scram button (not illustrated in figure) of hydrogen stop valve 9 and setting on the controller, hydrogen stop valve 9 and controller phase Even, for controlling hydrogen feed line to be turned on or off.Scram button can be used under reduction furnace operating state, i.e., in enable shape State, it is unavailable under reduction furnace halted state, i.e., in failure state.
The controller is additionally operable to, when getting the operating state signal of electrical control cubicles, scram button is enabled, with the urgency that comes into operation Stop interlocking；When getting the halted state signal of electrical control cubicles, scram button is made to fail, with the jerk interlocking that stops coming into operation.
When reduction furnace is in running status, jerk interlocking comes into operation automatically, when reduction furnace is in halted state, jerk connection Lock, which is automatically stopped, to come into operation, and now, even if pressing scram button, controller is also not carried out any operation.
The controller is additionally operable to, when receiving reduction furnace jerk control signal, and sending jerk control to electrical control cubicles believes Number (control signal can make electrical control cubicles out of service, and then make it that reduction furnace is out of service), and to the He of trichlorosilane stop valve 4 Hydrogen stop valve 9 sends closing control signal, to trigger jerk interlocking.Wherein, reduction furnace jerk control signal is scram button When being pressed, sent to controller.After jerk, which is interlocked, to be triggered, reduction furnace is to switch to halted state, therefore, closes trichlorine hydrogen Silicon stop valve 4 and hydrogen stop valve 9, need not locked trichlorosilane stop valve 4 and hydrogen stop valve 9.
Jerk interlocking is under running status in reduction furnace, and in the reduction furnace jerk control signal for receiving user's transmission It is triggered when (i.e. user is manually pressed by scram button), after jerk interlocking triggering, controller control electrical control cubicles are out of service, and close Close trichlorosilane stop valve 4 and hydrogen stop valve 9.
After jerk interlocking is triggered, controller sends jerk control signal, to trichlorosilane stop valve 4 and hydrogen to electrical control cubicles The operation that gas stop valve 9 sends closing control signal can perform also graded sequence execution simultaneously.For example, according to being initially switched off electrical control cubicles Power supply, turns off trichlorosilane stop valve 4, and the order for finally turning off hydrogen stop valve 9 is performed.
The production of reduction furnace be unable to do without electricity, water, and upstream and downstream process support, in case of emergency, such as full factory stops Electricity, cut off the water, the parking of upstream and downstream process disturbances, device are caught fire etc. under abnormal conditions, and operating personnel are connected to after dispatch command, it is necessary to control Reduction furnace parking processed.By setting scram button, it is ensured that reduction furnace emergency within the shortest time.
It should be noted that due to jerk interlocking triggering after simply turn off trichlorosilane stop valve and hydrogen stop valve without Can by it is locked, therefore, situation about releasing is interlocked in the absence of jerk, only exists jerk interlocking and stop situation about coming into operation.
In polycrystalline reduction reaction, the short duration failures such as steam interruption, instrument fault can be also run into, in this case can be with Do not control reduction furnace to stop, but hang up reduction furnace, hang up reduction furnace and refer to, quickly and safely temporarily stop trichlorosilane and hydrogen Gas is fed, but reduction furnace not blowing out, rapidly to be resumed production after failture evacuation again.Therefore, the embodiment of the present invention is also There is provided hanging up interlocking, accordingly, the system can also include：Hang-up button on the controller is set (not painted in figure Show).
The controller is additionally operable to, when getting the operating state signal of electrical control cubicles, is enabled and is hung up button, with the extension that comes into operation Play interlocking.I.e. when reduction furnace is in running status, hang up interlocking and come into operation automatically.
The controller is additionally operable to, when receiving reduction furnace hang-up control signal, to trichlorosilane stop valve 4 and hydrogen Stop valve 9 sends closing control signal, and locked trichlorosilane stop valve 4 and hydrogen stop valve 9, and interlocking is hung up to trigger, its In, it is when hanging up after button is enabled and being pressed, to be sent to controller that the reduction furnace, which hangs up control signal,.
Hang up interlocking to be under running status in electrical control cubicles, and control signal is hung up in the reduction furnace for receiving user's transmission It is triggered, is hung up after interlocking triggering when (i.e. user is manually pressed by hanging up button), controller control is closed and locked trichlorosilane Stop valve 4 and hydrogen stop valve 9.
Hanging up interlocking and releasing includes two kinds of situations：Automatically terminate and (bypass) releases manually.
The controller is additionally operable to, when getting the halted state signal of electrical control cubicles, and button useless is hung up in order, and to three Chlorine hydrogen silicon stop valve 4 and hydrogen stop valve 9 send unlocking control signal, are interlocked with stopping coming into operation and releasing hang-up.
When reduction furnace is in halted state, hang-up interlocking, which is automatically stopped, to be come into operation and releases, i.e. controller unblock trichlorine hydrogen Silicon stop valve 4 and hydrogen stop valve 9, now, even if pressing hang-up button, controller is also not carried out any operation.
When reduction furnace is changed into halted state from running status (for example, when reduction furnace is in running status, scram button It is pressed), hang up interlocking stopping and come into operation and release.When reduction furnace is changed into halted state from suspended state (for example, working as reduction furnace During in suspended state, scram button is pressed), hang up interlocking stopping and come into operation and release.
The controller is additionally operable to, when getting the operating state signal of electrical control cubicles, and is received reduction furnace and hung up control Signal, and trichlorosilane stop valve 4 and hydrogen stop valve 9 be in and close and during locked state, to the He of trichlorosilane stop valve 4 Hydrogen stop valve 9 sends unlocking control signal, and interlocking is hung up to release.
Hang up button to be pressed, triggering is hung up after interlocking, and reduction furnace is still in running status, trichlorosilane stop valve 4 and hydrogen stop valve 9 be in close and locked state, now, if user press again hang-up button (that is, controller Reduction furnace is received again hangs up control signal), then controller unlocks trichlorosilane stop valve 4 and hydrogen stop valve 9, so that hand Dynamic release hangs up interlocking.Controller is cut off according to the state, the state of trichlorosilane stop valve 4 and hydrogen of current reduction furnace The state of valve 9 recognizes that it is now to press or press for the second time for the first time to hang up button.
There is presently no a set of effective reduction furnace interlock mechanism, in the prior art, the temperature of controller only to each pipeline The processing parameters such as degree, pressure, flow are monitored, and when judging that said temperature, pressure and/or flow parameter are abnormal, are entered Row alarm, to notify operator to in-situ processing, or the safety attachment such as safety valve, rupture disk dependent on equipment ensures to set Standby safety.However, by the safety attachments such as the safety valve of equipment, rupture disk, the level of skill and response speed of operating personnel To ensure safety clearly far from being enough, it is necessary to set various interlockings for the purpose of ensureing production safety and reduce loss, Under processing parameter abnormal conditions, eliminated danger in time with correct step.
Therefore, in order to be further ensured that the safety and reliability of production of polysilicon, the present invention is according to the production of reduction furnace Process, it is determined that several important control points of interlocking：Exhaust temperature, tail gas pressure, electrode coolant-temperature gage, electrode water-carrying capacity, bottom Disk coolant-temperature gage, chassis water-carrying capacity, chuck coolant-temperature gage, chuck water-carrying capacity.Accordingly, the embodiment of the present invention is also provided with tail gas overtemperature Interlocking, the interlocking of tail gas superpressure, the too low interlocking of electrode water over temperature interlock, electrode water-carrying capacity, chassis water over temperature interlock, chassis water-carrying capacity Too low interlocking, the too low interlocking of furnace tube water over temperature interlock, furnace tube water-carrying capacity, jacket water (J.W.) over temperature interlock and chuck water-carrying capacity are too low Lock, and come into operation simultaneously in polysilicon course of reaction, to monitor exhaust temperature and pressure, electrode coolant-temperature gage and flow, chassis water The processing parameter such as temperature and flow, furnace tube coolant-temperature gage and flow, when above-mentioned processing parameter is abnormal, triggering is corresponding Interlocking, timely blowing out.
Accordingly, tail gas superpressure interlocking value, tail gas over temperature interlock value, electrode water overtemperature connection can be preset with controller Drop lock, the too low interlocking value of electrode water-carrying capacity, chassis water over temperature interlock value, the too low interlocking value of chassis water-carrying capacity, furnace tube water overtemperature connection Drop lock, the too low interlocking value of furnace tube water-carrying capacity, jacket water (J.W.) over temperature interlock value and the too low interlocking value of chuck water-carrying capacity.
In polysilicon production process, reaction end gas pressure must not be higher than 0.75MPaG, and reaction end gas safety valve Release pressure is also 0.75MPaG, and reduction furnace is run only under this pressure, just can guarantee that the safe and reliable of equipment.Due to The moment of high temperature inflammable gas largely discharges and can cause to catch fire, dodge the potential safety hazard such as quick-fried after safety valve jumping up, therefore, it can tail Gas over temperature interlock value is set to 0.75MPa and following, is preferably arranged to 0.60-0.73MPaG, to reduce security risk.
In polysilicon production process, reaction end gas temperature must not be higher than 500 DEG C, otherwise the Steel material used in exhaust pipe After temperature resistant range, it may occur however that the security incident such as deformation, rupture.The cooling effect of tail gas chuck is bad, and tail gas amount is excessive, Or may all cause exhaust temperature to raise under other abnormal conditions, accordingly, it would be desirable to set tail gas over temperature interlock, it is preferred that tail gas Over temperature interlock value could be arranged to 300-600 DEG C.
Electrode water is that the material of electrode is usually red copper for cooling down electrode for reduction furnace, is produced in electrode galvanization Raw heat can not such as be taken away in time, can cause electrode high temperature melt, moreover, the heatproof temperature of tetrafluoro insulation sleeve of surrounding them etc. Degree is only at 180 DEG C or so, if the cooling without electrode water to electrode, will melt the insulation sleeve of surrounding them to cause absolutely Accident that edge declines, leakage is caught fire etc..The size of electrode water-carrying capacity can directly affect the temperature of electrode water, and electrode water-carrying capacity is got over Greatly, then the temperature of electrode water is lower.Electrode water over temperature interlock value and electrode water-carrying capacity specifically can be set according to the condition of production Too low interlocking value.It is preferred that, electrode water over temperature interlock value could be arranged to 40-70 DEG C, and the too low interlocking value of electrode water-carrying capacity can be with It is set to 3-15m3/h。
Chassis water, furnace tube water and jacket water (J.W.) also play the cooling and protective effect of no less important.If cooling is insufficient, meeting Chassis is caused to deform, tetrafluoro set burns, deformation of steel, the lighter's pipeline breaking, pad are disengaged, material from leakage, severe one Fire explosion. In addition, cooling water does not lead to, it is also breakneck one kind in all potential safety hazards of reduction furnace.Due to not leading to cooling water, cause height Pressure expansion after the lower water vapor of temperature, directly bursts pipeline, the accident that set off an explosion also has generation, accordingly, it would be desirable to which emphasis is to these The protection situation of cooling water is monitored, and not only to monitor flow, it is ensured that cooling water has led to, and also to monitor the temperature of cooling water, To ensure cooling effect.Chassis water over temperature interlock value, the too low interlocking of chassis water-carrying capacity specifically can be set according to the condition of production Value, furnace tube water over temperature interlock value, the too low interlocking value of furnace tube water-carrying capacity, jacket water (J.W.) over temperature interlock value and the too low interlocking of chuck water-carrying capacity Value.It is preferred that, chassis water over temperature interlock value could be arranged to 70-180 DEG C；Water-carrying capacity too low interlocking value in chassis could be arranged to 3- 15m3/h；Furnace tube water over temperature interlock value could be arranged to 150-180 DEG C；The too low interlocking value of furnace tube water-carrying capacity could be arranged to 3- 15m3/h；Jacket water (J.W.) over temperature interlock value could be arranged to 150-180 DEG C；The too low interlocking value of chuck water-carrying capacity could be arranged to 3- 15m3/h。
As shown in figure 1, the system can also include：Tail gas pressure inverting for detecting exhaust pipe inner exhaust gas pressure Device 10, the exhaust temperature transmitter 11 for detecting exhaust pipe inner exhaust gas temperature, for electrode in detecting electrode return piping The electrode water temperature transmitter 12 of coolant-temperature gage, for the electrode water ga(u)ge 13 of electrode water-carrying capacity in detecting electrode return piping, For detecting the chassis coolant-temperature gage transmitter 14 of chassis coolant-temperature gage in the return piping of chassis, for detecting bottom in the return piping of chassis The chassis water ga(u)ge 15 of disk water-carrying capacity, the furnace tube coolant-temperature gage transmitter for detecting furnace tube coolant-temperature gage in furnace tube return piping 16th, for detecting the furnace tube water ga(u)ge 17 of furnace tube water-carrying capacity in furnace tube return piping, for detecting in jacket water (J.W.) return piping The jacket water (J.W.) temperature transmitter 18 of chuck coolant-temperature gage and the chuck current for detecting jacket water (J.W.) return piping internal jacket water-carrying capacity Gauge 19.
It is preferred that, exhaust temperature transmitter 11 can be arranged at the preceding exhaust pipe between reduction furnace 1 and tail gas heat exchanger 2 On, tail gas pressure transmitter 10 can be arranged on the exhaust pipe in the downstream of tail gas heat exchanger 2.
The controller is additionally operable to, when getting the operating state signal of electrical control cubicles, performs following operate：By tail gas pressure The tail gas pressure value that power transmitter 10 is detected is compared with default tail gas superpressure interlocking value, with the tail gas superpressure interlocking that comes into operation； The exhaust temperature value that exhaust temperature transmitter 11 is detected compares with default tail gas over temperature interlock value, and to come into operation, tail gas surpasses Temperature interlocking；The electrode water temperature value that electrode water temperature transmitter 12 is detected is compared with default electrode water over temperature interlock value Compared with the electrode water over temperature interlock that comes into operation；The electrode water flow value that electrode water ga(u)ge 13 is detected and default electrode current Measure too low interlocking value to compare, with the too low interlocking of the electrode water-carrying capacity that comes into operation；The chassis that chassis coolant-temperature gage transmitter 14 is detected Water temperature angle value is compared with default chassis water over temperature interlock value, with the chassis water over temperature interlock that comes into operation；By chassis water ga(u)ge 15 The chassis water flow value detected is compared with the default too low interlocking value of chassis water-carrying capacity, and to come into operation, chassis water-carrying capacity is too low Lock；The furnace tube water temperature angle value that furnace tube coolant-temperature gage transmitter 16 is detected compares with default furnace tube water over temperature interlock value, with The furnace tube that comes into operation water over temperature interlock；The furnace tube water flow value that furnace tube water ga(u)ge 17 is detected and default furnace tube water-carrying capacity are too low Interlocking value compares, with the too low interlocking of the furnace tube water-carrying capacity that comes into operation；The chuck coolant-temperature gage that jacket water (J.W.) temperature transmitter 18 is detected Value is compared with default jacket water (J.W.) over temperature interlock value, with the jacket water (J.W.) over temperature interlock that comes into operation；Chuck water ga(u)ge 19 is detected Chuck water flow value compared with the default too low interlocking value of chuck water-carrying capacity, with the too low interlocking of the chuck water-carrying capacity that comes into operation.
When reduction furnace is in running status, the tail gas over temperature interlock that comes into operation, the interlocking of tail gas superpressure, electrode water over temperature interlock, The too low interlocking of electrode water-carrying capacity, the too low interlocking of chassis water over temperature interlock, chassis water-carrying capacity, furnace tube water over temperature interlock, furnace tube current The too low interlocking of amount, jacket water (J.W.) over temperature interlock and this 10 interlockings of too low interlocking of chuck water-carrying capacity.
The controller is additionally operable to, when one of following trigger condition or any combination meet when, to electrical control cubicles send jerk Control signal, and closing control signal is sent to trichlorosilane stop valve 4 and hydrogen stop valve 9, meet trigger condition to trigger Interlocking：
When the tail gas pressure value that tail gas pressure transmitter 10 is detected is more than or equal to tail gas superpressure interlocking value；
When the exhaust temperature value that exhaust temperature transmitter 11 is detected is more than or equal to tail gas over temperature interlock value；
When the electrode water temperature value that electrode water temperature transmitter 12 is detected is more than or equal to electrode water over temperature interlock value；
When the electrode water flow value that electrode water ga(u)ge 13 is detected interlocking value too low less than or equal to electrode water-carrying capacity；
When the chassis water temperature angle value that chassis coolant-temperature gage transmitter 14 is detected is more than or equal to chassis water over temperature interlock value；
When the chassis water flow value that chassis water ga(u)ge 15 is detected interlocking value too low less than or equal to chassis water-carrying capacity；
When the furnace tube water temperature angle value that furnace tube coolant-temperature gage transmitter 16 is detected is more than or equal to furnace tube water over temperature interlock value；
When the furnace tube water flow value that furnace tube water ga(u)ge 17 is detected interlocking value too low less than or equal to furnace tube water-carrying capacity；
When the jacket water (J.W.) temperature value that jacket water (J.W.) temperature transmitter 18 is detected is more than or equal to jacket water (J.W.) over temperature interlock value；
When the chuck water flow value that chuck water ga(u)ge 19 is detected interlocking value too low less than or equal to chuck water-carrying capacity.
When reduction furnace is in running status, above-mentioned 10 interlockings come into operation, when the interlock condition of wherein any one interlocking Meet, or, when the interlock condition of any number of interlockings is met, the interlocking that triggering interlock condition is met, i.e. controller close three Chlorine hydrogen silicon stop valve 4 and hydrogen stop valve 9.After above-mentioned 10 interlocking triggerings, reduction furnace is to switch to halted state, therefore, is closed Trichlorosilane stop valve 4 and hydrogen stop valve 9 are closed, need not locked trichlorosilane stop valve 4 and hydrogen stop valve 9.
It should be noted that in embodiments of the present invention, controller is according to default controlling cycle simultaneously to above-mentioned 10 The trigger condition of interlocking is judged that the controlling cycle of that is, preferably above-mentioned 10 interlockings is all identical.
Above-mentioned 10 interlockings stopping comes into operation including two kinds of situations：It is automatically stopped to come into operation and stops coming into operation with (bypass) manually.
The controller is additionally operable to, when getting electrical control cubicles halted state signal, stops performing following operation, to stop Come into operation the interlocking corresponding with the interlocking deactivation control signal：Tail gas pressure value that tail gas pressure transmitter 10 is detected with Default tail gas superpressure interlocking value compares；The exhaust temperature value that exhaust temperature transmitter 11 is detected surpasses with default tail gas Warm interlocking value compares；The electrode water temperature value that electrode water temperature transmitter 12 is detected and default electrode water over temperature interlock Value compares；The electrode water flow value that electrode water ga(u)ge 13 is detected is compared with the default too low interlocking value of electrode water-carrying capacity Compared with；The chassis water temperature angle value that chassis coolant-temperature gage transmitter 14 is detected compares with default chassis water over temperature interlock value；Will The chassis water flow value that chassis water ga(u)ge 15 is detected is compared with the default too low interlocking value of chassis water-carrying capacity；By furnace tube water The furnace tube water temperature angle value that temperature transmitter 16 is detected is compared with default furnace tube water over temperature interlock value；By furnace tube water ga(u)ge The 17 furnace tube water flow values detected are compared with the default too low interlocking value of furnace tube water-carrying capacity；By jacket water (J.W.) temperature transmitter 18 The jacket water (J.W.) temperature value detected is compared with default jacket water (J.W.) over temperature interlock value；The folder that chuck water ga(u)ge 19 is detected Water flow value is covered compared with the default too low interlocking value of chuck water-carrying capacity.
When reduction furnace is in halted state, above-mentioned 10 interlockings, which are automatically stopped, to come into operation, i.e., no longer by processing parameter Detected value be compared with corresponding interlocking value.Now, because reduction furnace is in halted state, even if above-mentioned 10 interlockings Trigger condition is met, and will not also be triggered corresponding interlocking, also not turned off trichlorosilane stop valve 4 and hydrogen stop valve 9.
It should be noted that when reduction furnace is in halted state, if the trigger condition of above-mentioned 10 interlockings is no longer met, For example, the detected value of processing parameter falls after rise and is less than interlocking value, then situation about coming into operation is automatically stopped with above-mentioned 10 interlockings It is identical, equally it is that the detected value of processing parameter is no longer compared by controller with corresponding interlocking value.
The controller is additionally operable to, when getting the operating state signal of electrical control cubicles, and receives the interlocking of user's transmission When disabling control signal, stop the following operation of execution, to stop the interlocking corresponding with the interlocking deactivation control signal that come into operation： The tail gas pressure value that tail gas pressure transmitter is detected compares with default tail gas superpressure interlocking value；By exhaust temperature pick-up The exhaust temperature value that device is detected is compared with default tail gas over temperature interlock value；The electricity that electrode water temperature transmitter is detected Pole water temperature angle value is compared with default electrode water over temperature interlock value；Electrode water flow value that electrode water ga(u)ge is detected with The default too low interlocking value of electrode water-carrying capacity compares；The chassis water temperature angle value that chassis coolant-temperature gage transmitters sense is arrived is with presetting Chassis water over temperature interlock value compare；The chassis water flow value that chassis water ga(u)ge is detected and default chassis water-carrying capacity Too low interlocking value compares；The furnace tube water temperature angle value that furnace tube coolant-temperature gage transmitters sense is arrived and default furnace tube water over temperature interlock Value compares；The furnace tube water flow value that furnace tube water ga(u)ge is detected is compared with the default too low interlocking value of furnace tube water-carrying capacity Compared with；The jacket water (J.W.) temperature value that jacket water (J.W.) temperature transmitter is detected compares with default jacket water (J.W.) over temperature interlock value；Will folder The chuck water flow value that set water ga(u)ge is detected is compared with the default too low interlocking value of chuck water-carrying capacity.
In the case where the corresponding sensor of above-mentioned 10 interlockings is overhauled, above-mentioned 10 interlockings can be stopped manually and thrown With with Temporary bypass, above-mentioned 10 interlock, so that interlocking action is not performed, release bypass after the completion of Awaiting Overhaul operation again.Specifically , under the running status of reduction furnace, user sends corresponding interlocking to controller and disables control signal, and controller no longer will be raw The detected value of production. art parameter is compared with corresponding interlocking value.Now, although reduction furnace is in running status, even if above-mentioned The trigger condition of 10 interlockings is met, and will not also be triggered corresponding interlocking, also not turned off trichlorosilane stop valve 4 and hydrogen is cut Disconnected valve 9.
The interlocking false triggering that situations such as in order to avoid communication short interruption, current interference brings, can also be to above-mentioned 10 Interlocking carries out anti-fluctuation and set.
Accordingly, the first interlocking delay duration is preset with the controller, it is preferred that the first interlocking delay duration can be with It is set to 3s-10min.
The controller specifically for, when one of trigger conditions or any combination of above-mentioned 10 interlockings are met, delay First interlocking delay duration sends jerk control signal to electrical control cubicles, and is sent to trichlorosilane stop valve 4 and hydrogen stop valve 9 Closing control signal, to trigger the interlocking for meeting trigger condition.
Specifically, can be by setting timer to realize interlocking Time-delayed trigger in controller, timer is implemented Mode belongs to prior art, will not be repeated here.
When one of trigger condition of above-mentioned 10 interlockings or any combination are met, delay first is interlocked after delay duration Corresponding interlocking is just triggered, is otherwise considered as interference, corresponding interlocking is not triggered.Delay duration is interlocked by setting first, can be with The situation of interlocking false triggering is prevented effectively from, the reliability of polycrystalline silicon reducing furnace interlock system is improved.
It is preferred that, in order to further improve the reliability of polycrystalline silicon reducing furnace interlock system, also it is preset with controller Second interlocking delay duration so that when the trigger condition that exhaust valve interlocking interlocking and/or electrical control cubicles stop interlocking being met, delay one Section time triggered.It is preferred that, the second interlocking delay duration could be arranged to 3s-1min.
The controller is specifically for when getting the halted state signal of electrical control cubicles, during the interlocking delay of delay second After length, closing control signal, and locked trichlorosilane stop valve 4 are sent to trichlorosilane stop valve 4, to trigger electrical control cubicles stopping Interlocking；And/or, when detecting hydrogeneous waste gas stop valve 5, not hydrogeneous waste gas stop valve 6, tail gas stop valve 7 and vacuumize cut-out Valve 8 when any of valve be in opening when, delay second is interlocked after delay duration, is sent and is closed to remaining 3 valve Control signal is closed and locked, to trigger exhaust valve interlocking interlocking.
Specifically, controller can by set timer come to second interlocking delay duration timing, timer it is specific Implementation belongs to prior art, will not be repeated here.
It should be noted that the second interlocking delay duration and the first interlocking delay duration can also be set to identical.
In a preferred embodiment of the invention, reduction furnace stop phase (when i.e. reduction furnace is in halted state), come into operation Exhaust valve interlocking interlocking and electrical control cubicles stop interlocking, reduction furnace operation phase (when i.e. reduction furnace is in running status), come into operation Tail gas over temperature interlock, the interlocking of tail gas superpressure, the too low interlocking of electrode water over temperature interlock, electrode water-carrying capacity, chassis water over temperature interlock, bottom The too low interlocking of disk water-carrying capacity, the too low interlocking of furnace tube water over temperature interlock, furnace tube water-carrying capacity, jacket water (J.W.) over temperature interlock, chuck water-carrying capacity Too low interlocking, jerk interlocking and hang-up interlocking.
When controller receives the halted state signal of electrical control cubicles, the connection for reduction furnace operation phase of coming into operation is automatically stopped Lock, and the interlocking for the reduction furnace stop phase that comes into operation.When controller receives electrical control cubicles operating state signal, it is automatically stopped and comes into operation The interlocking of reduction furnace stop phase, and the interlocking for reduction furnace operation phase of coming into operation.
In embodiments of the present invention, exhaust valve interlocking interlocking, above-mentioned 10 interlockings, hang-up interlocking and electrical control cubicles stop chain It can stop coming into operation and/or releasing interlocking manually.After interlocking is manually stopped and comes into operation and/or releases, even if the triggering interlocked Condition is met, and is also not carried out interlocking action.
The operating personnel having permission can join according to different operating mode triggering exhaust valve interlocking interlockings, above-mentioned 10 interlockings, hang-up Lock and electrical control cubicles stop chain manual stopping and come into operation and/or release.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses Mode, but the invention is not limited in this.For those skilled in the art, the essence of the present invention is not being departed from In the case of refreshing and essence, various changes and modifications can be made therein, and these variations and modifications are also considered as protection scope of the present invention.

Claims (10)

1. a kind of polycrystalline silicon reducing furnace interlock system, including：Controller, electrical control cubicles, for controlling trichlorosilane feeding line to lead Trichlorosilane stop valve that on-off is opened, for controlling hydrogeneous waste gas stop valve that hydrogeneous waste line is turned on or off, being used for Not hydrogeneous waste gas stop valve, the tail for controlling exhaust pipe to be turned on or off that the not hydrogeneous waste line of control is turned on or off Gas stop valve and for controlling what vacuum lines were turned on or off to vacuumize stop valve, it is characterised in that
Controller is used for, and the status signal of reduction furnace is obtained according to default controlling cycle, when the stopping shape for getting reduction furnace During state signal, closing control signal, and locked trichlorosilane stop valve are sent to trichlorosilane stop valve, is stopped with triggering electrical control cubicles Only interlock, and, detect hydrogeneous waste gas stop valve, not hydrogeneous waste gas stop valve, tail gas stop valve and the shape for vacuumizing stop valve State, with the exhaust valve interlocking interlocking that comes into operation；When detect hydrogeneous waste gas stop valve, not hydrogeneous waste gas stop valve, tail gas stop valve and Vacuumize stop valve when any of valve be in opening when, send closing control signals to remaining 3 valve and lock Extremely, interlocked with triggering exhaust valve interlocking；Wherein, remaining described 3 valve refer to the hydrogeneous waste gas stop valve, it is not hydrogeneous useless Gas stop valve, tail gas stop valve and vacuumize 3 valves in stop valve in addition to the valve in opening.
2. the system as claimed in claim 1, it is characterised in that the controller is additionally operable to, cuts off when detecting hydrogeneous waste gas Valve, not hydrogeneous waste gas stop valve, tail gas stop valve and when to vacuumize stop valve be closure state, to hydrogeneous waste gas stop valve, Not hydrogeneous waste gas stop valve, tail gas stop valve and vacuumize stop valve send unlocking control signal, with release exhaust valve interlocking connection Lock.
3. the system as claimed in claim 1, it is characterised in that the controller is additionally operable to, when the operation for getting reduction furnace During status signal, or, when getting the halted state signal of reduction furnace, and receive the exhaust valve interlocking of user's transmission and disable During control signal, stop the hydrogeneous waste gas stop valve of detection, not hydrogeneous waste gas stop valve, tail gas stop valve and vacuumize stop valve State, and to hydrogeneous waste gas stop valve, not hydrogeneous waste gas stop valve, tail gas stop valve and vacuumize valve locked in stop valve Unlocking control signal is sent, is interlocked with stopping coming into operation and releasing exhaust valve interlocking.
4. the system as claimed in claim 1, it is characterised in that the controller is additionally operable to, when the operation for getting reduction furnace During status signal, or, when getting the halted state signal of reduction furnace, and receive the electrical control cubicles of user's transmission and stop interlocking When releasing control signal, unlocking control signal is sent to trichlorosilane stop valve, interlocking is stopped releasing electrical control cubicles.
5. the system as described in claim any one of 1-4, it is characterised in that the system also includes：For controlling hydrogen to enter The scram button of the hydrogen stop valve and setting that expects pipe line is turned on or off on the controller；
The controller is additionally operable to, when getting the operating state signal of reduction furnace, enables scram button, with the jerk connection that comes into operation Lock；When getting the halted state signal of reduction furnace, scram button is made to fail, with the jerk interlocking that stops coming into operation；When receiving During reduction furnace jerk control signal, reduction furnace jerk control signal out of service can be made by being sent to electrical control cubicles, and to trichlorine hydrogen Silicon stop valve and hydrogen stop valve send closing control signal, to trigger jerk interlocking；Wherein, the reduction furnace jerk control letter When number being that scram button is pressed, sent to controller.
6. system as claimed in claim 5, it is characterised in that the system also includes：Hang-up on the controller is set to press Button；
The controller is additionally operable to, when getting the operating state signal of reduction furnace, is enabled and is hung up button, and connection is hung up to come into operation Lock；When receiving reduction furnace hang-up control signal, closing control signal is sent to trichlorosilane stop valve and hydrogen stop valve, And locked trichlorosilane stop valve and hydrogen stop valve, interlocking is hung up to trigger, wherein, the reduction furnace, which hangs up control signal, is When hanging up after button is enabled and being pressed, sent to controller；When getting the halted state signal of reduction furnace, order is hung up Button useless, and unlocking control signal is sent to the hang-up interlocking of trichlorosilane stop valve and hydrogen stop valve, to stop coming into operation And release hang-up interlocking；When getting the operating state signal of reduction furnace, and receive reduction furnace and hang up control signal, and trichlorine Hydrogen silicon stop valve and hydrogen stop valve, which are in, closes and during locked state, hangs up interlocking if desired for releasing, then to trichlorosilane Stop valve and hydrogen stop valve send unlocking control signal, and interlocking is hung up to release.
7. system as claimed in claim 5, it is characterised in that the system also includes：For detecting exhaust pipe inner exhaust gas The tail gas pressure transmitter of pressure, the exhaust temperature transmitter for detecting exhaust pipe inner exhaust gas temperature, for detecting electrode The electrode water temperature transmitter of electrode coolant-temperature gage, the electrode for electrode water-carrying capacity in detecting electrode return piping in return piping Water ga(u)ge, the chassis coolant-temperature gage transmitter for detecting chassis coolant-temperature gage in the return piping of chassis, for detecting chassis backwater The chassis water ga(u)ge of chassis water-carrying capacity, the furnace tube coolant-temperature gage change for detecting furnace tube coolant-temperature gage in furnace tube return piping in pipeline Send device, the furnace tube water ga(u)ge for detecting furnace tube water-carrying capacity in furnace tube return piping, for detecting in jacket water (J.W.) return piping The jacket water (J.W.) temperature transmitter of chuck coolant-temperature gage and the chuck water-carrying capacity for detecting jacket water (J.W.) return piping internal jacket water-carrying capacity Meter；
The controller is additionally operable to, when getting the operating state signal of reduction furnace, performs following operate：Tail gas pressure is become The tail gas pressure value that device is detected is sent compared with default tail gas superpressure interlocking value, with the tail gas superpressure interlocking that comes into operation；By tail gas The exhaust temperature value that temperature transmitter is detected is compared with default tail gas over temperature interlock value, with the tail gas over temperature interlock that comes into operation； The electrode water temperature value that electrode water temperature transmitter is detected compares with default electrode water over temperature interlock value, with the electricity that comes into operation Pole water over temperature interlock；The electrode water flow value that electrode water ga(u)ge is detected and the too low interlocking value phase of default electrode water-carrying capacity Compare, with the too low interlocking of the electrode water-carrying capacity that comes into operation；The chassis water temperature angle value that chassis coolant-temperature gage transmitters sense is arrived with it is default Chassis water over temperature interlock value compares, with the chassis water over temperature interlock that comes into operation；The chassis water-carrying capacity that chassis water ga(u)ge is detected Value is compared with the default too low interlocking value of chassis water-carrying capacity, with the too low interlocking of the chassis water-carrying capacity that comes into operation；Furnace tube coolant-temperature gage is become The furnace tube water temperature angle value that device is detected is sent compared with default furnace tube water over temperature interlock value, with the furnace tube water over temperature interlock that comes into operation； The furnace tube water flow value that furnace tube water ga(u)ge is detected compares with the default too low interlocking value of furnace tube water-carrying capacity, with the stove that comes into operation The cylinder too low interlocking of water-carrying capacity；The jacket water (J.W.) temperature value that jacket water (J.W.) temperature transmitter is detected and default jacket water (J.W.) over temperature interlock Value compares, with the jacket water (J.W.) over temperature interlock that comes into operation；The chuck water flow value that chuck water ga(u)ge is detected and default chuck The too low interlocking value of water-carrying capacity compares, with the too low interlocking of the chuck water-carrying capacity that comes into operation.
8. system as claimed in claim 7, it is characterised in that the controller is additionally operable to, when the stopping for getting reduction furnace During status signal, or, when getting the operating state signal of reduction furnace, and receive the interlocking of user's transmission and disable control letter Number when, stop performing it is following operate, to stop coming into operation and the interlocking interlocking that to disable control signal corresponding：By tail gas pressure Transmitters sense to tail gas pressure value compared with default tail gas superpressure interlocking value；Exhaust temperature transmitters sense is arrived Exhaust temperature value is compared with default tail gas over temperature interlock value；The electrode water temperature value that electrode water temperature transmitter is detected Compared with default electrode water over temperature interlock value；The electrode water flow value that electrode water ga(u)ge is detected and default electrode The too low interlocking value of water-carrying capacity compares；By chassis coolant-temperature gage transmitters sense to chassis water temperature angle value surpass with default chassis water Warm interlocking value compares；The chassis water flow value that chassis water ga(u)ge is detected and the default too low interlocking value of chassis water-carrying capacity Compare；By furnace tube coolant-temperature gage transmitters sense to furnace tube water temperature angle value compared with default furnace tube water over temperature interlock value； The furnace tube water flow value that furnace tube water ga(u)ge is detected compares with the default too low interlocking value of furnace tube water-carrying capacity；By jacket water (J.W.) The jacket water (J.W.) temperature value that temperature transmitter is detected is compared with default jacket water (J.W.) over temperature interlock value；Chuck water ga(u)ge is examined The chuck water flow value measured is compared with the default too low interlocking value of chuck water-carrying capacity.
9. system as claimed in claim 7, it is characterised in that the controller is additionally operable to, when one of following trigger condition or Any combination is when meeting, and reduction furnace jerk control signal out of service can be made by being sent to the electrical control cubicles, and to trichlorosilane Stop valve and hydrogen stop valve send closing control signal, to trigger the interlocking for meeting trigger condition：
When the tail gas pressure value that tail gas pressure transmitter is detected is more than or equal to tail gas superpressure interlocking value；
When the exhaust temperature value that exhaust temperature transmitters sense is arrived is more than or equal to tail gas over temperature interlock value；
When the electrode water temperature value that electrode water temperature transmitter is detected is more than or equal to electrode water over temperature interlock value；
When the electrode water flow value that electrode water ga(u)ge is detected interlocking value too low less than or equal to electrode water-carrying capacity；
When the chassis water temperature angle value that chassis coolant-temperature gage transmitters sense is arrived is more than or equal to chassis water over temperature interlock value；
When the chassis water flow value that chassis water ga(u)ge is detected interlocking value too low less than or equal to chassis water-carrying capacity；
When the furnace tube water temperature angle value that furnace tube coolant-temperature gage transmitters sense is arrived is more than or equal to furnace tube water over temperature interlock value；
When the furnace tube water flow value that furnace tube water ga(u)ge is detected interlocking value too low less than or equal to furnace tube water-carrying capacity；
When the jacket water (J.W.) temperature value that jacket water (J.W.) temperature transmitter is detected is more than or equal to jacket water (J.W.) over temperature interlock value；
When the chuck water flow value that chuck water ga(u)ge is detected interlocking value too low less than or equal to chuck water-carrying capacity.
10. system as claimed in claim 9, it is characterised in that the first interlocking delay duration is preset with the controller, the One interlocking delay duration is more than the controlling cycle；
The controller specifically for, when one of described trigger condition or any combination meet when, be delayed it is described first interlocking prolongs Shi Shichang sends the jerk control signal to electrical control cubicles, and sends closing control to trichlorosilane stop valve and hydrogen stop valve Signal, to trigger the interlocking for meeting trigger condition.
CN201410295303.0A 2014-06-26 2014-06-26 A kind of polycrystalline silicon reducing furnace interlock system Active CN105204452B (en)

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JPH08211184A (en) * 1995-02-06 1996-08-20 Hitachi Ltd Reactor containment and its combustible gas concentration controlling method
CN201305651Y (en) * 2008-11-24 2009-09-09 四川永祥多晶硅有限公司 Device for mixing chlorsilane and hydrogen in polysilicon production
CN102662346B (en) * 2012-05-03 2014-04-30 新疆大全新能源有限公司 Method for sequentially controlling alarm interlocking
CN203114633U (en) * 2012-09-10 2013-08-07 中国石油化工集团公司 Device for preventing reverse rotation of screw compressor
CN102923711A (en) * 2012-11-30 2013-02-13 内蒙古神舟硅业有限责任公司 Automatic control starting method of polycrystalline silicon reduction furnace

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Application publication date: 20151230

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Denomination of invention: An Interlocking System for Polycrystalline Silicon Reduction Furnace

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