CN105195900A - Laser scribing method for thin-film solar cell with ultrathin glass as substrate - Google Patents
Laser scribing method for thin-film solar cell with ultrathin glass as substrate Download PDFInfo
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- CN105195900A CN105195900A CN201510567098.3A CN201510567098A CN105195900A CN 105195900 A CN105195900 A CN 105195900A CN 201510567098 A CN201510567098 A CN 201510567098A CN 105195900 A CN105195900 A CN 105195900A
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- 239000011521 glass Substances 0.000 title claims abstract description 87
- 239000010409 thin film Substances 0.000 title claims abstract description 25
- 238000000034 method Methods 0.000 title claims abstract description 23
- 239000000758 substrate Substances 0.000 title claims abstract description 19
- 239000007788 liquid Substances 0.000 claims abstract description 22
- 239000002390 adhesive tape Substances 0.000 claims abstract description 9
- 239000005357 flat glass Substances 0.000 claims description 25
- 239000010408 film Substances 0.000 claims description 7
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 claims description 6
- 239000011780 sodium chloride Substances 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 238000012986 modification Methods 0.000 abstract 1
- 230000004048 modification Effects 0.000 abstract 1
- 238000005096 rolling process Methods 0.000 abstract 1
- 239000000243 solution Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000012047 saturated solution Substances 0.000 description 2
- 241000931526 Acer campestre Species 0.000 description 1
- 244000089409 Erythrina poeppigiana Species 0.000 description 1
- 235000009776 Rathbunia alamosensis Nutrition 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- XSOKHXFFCGXDJZ-UHFFFAOYSA-N telluride(2-) Chemical compound [Te-2] XSOKHXFFCGXDJZ-UHFFFAOYSA-N 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a laser scribing method for a thin-film solar cell with ultrathin glass as a substrate. A liquid with a refraction rate similar or identical to that of glass is selected, the selected liquid is uniformly spread on the surface of a thick glass slide, the ultrathin glass requiring scribing is put on the thick glass slide, so that the refraction angle of laser in the glass is smaller or does not exist, mixed bubbles and the extra liquid are squeezed out in a rolling manner, and laser scribing is performed after the edge of the ultrathin glass and the thick glass slide are fixed together through an adhesive tape. With adoption of the method, on one hand, the size of light spots of laser can keep consistent, and the widths of scribed lines are also consistent; on the other hand, the situation that the energy density of laser is reduced due to the fact that the light spots of laser is excessively enlarged cannot occur, that is, the phenomena of non-uniform line widths and residues of a part of the thin film (incomplete removal) are eliminated; besides, laser equipment designed for a thick glass substrate traditionally is used, and accordingly, equipment purchasing or modification expenses are reduced.
Description
Technical field
The present invention relates to a kind of solar cell scribble method, specifically a kind of take ultra-thin glass as the laser scribe method of the thin-film solar cells of substrate.
Background technology
The thin film solar cell technologies of current relative maturity has the thin film battery technology based on three kinds of different systems such as silica-base film, Cadimium telluride thin film, CIGS thin-films.All laser scribe process is be unable to do without in the manufacturing process of these thin-film solar cells, as patent EP2083445A1 and US6324195B1, large-area film can be divided into the sub-battery unit of multiple strip by laser scribing, and then by connection in series-parallel, above-mentioned sub-battery unit is linked together, make the realistic application requirement of the output voltage electric current of this battery component.In laser scribe process, laser is incident from the bottom of glass, near the film focusing on glass top surface through glass, the region of Laser Focusing forms the high-energy-density of local, the energy of the thin-film material absorbing laser of above-mentioned zone is melting evaporation instantaneously, thus realizes the effect of partial thin film material removal.
These above-mentioned thin-film solar cells greatly mainly with the glass of 3 millimeter thickness as plated film substrate, so laser scribing device supporting with it is also according to the Glass Design of 3 millimeter thickness.But along with membrane photovoltaic component lightweight and particular application, as the demand of flexible photovoltaic battery, the thin film solar being substrate with ultra-thin (thickness is less than 1 millimeter) glass becomes the new growing point in market.When thickness of glass drops to below 1 millimeter, the rigidity variation flexible reinforced of glass, its mechanical strength also greatly reduces simultaneously, and existing laser equipment is difficult to directly clamp ultra-thin glass, transmit and process.Because glass itself has higher transmitance to Ultra-Violet Laser and visible laser, usually traditional heavy sheet glass laser scribing device can be utilized, using 3 mm of thickness glass as slide glass, the fixing ultra thin glass substrates needing processing in surface thereon, focal position and the laser energy of suitable adjustment laser carry out laser scribing.Adopt aforesaid way to carry out laser scribing, find that the line live width so formed is uneven, easily cause line defect, as regional area film cannot be removed completely, have a strong impact on the electric property of battery and the outward appearance of product.
Process if ultra-thin glass is directly placed on heavy sheet glass slide glass, the air layer of one deck became uneven can be remained between ultra-thin glass and heavy sheet glass, (air refraction is 1 to the refractive index of air and glass comparatively greatly, glass refraction is 1.5), the air layer of this thickness inequality result in laser, and to reflect the laser facula of rear formation therein not of uniform size, as Fig. 1, wherein t2 is air layer thickness, t3 is the thickness of thin glass, angle a and b is laser, and in the incidence angle of air/glass interface and the angle of emergence, (wherein the relation of a and b has 1*sina=1.5*sinb according to the law of refraction, 1 is air refraction, 1.5 is glass refraction), d1 is the spot diameter that laser is formed at thin glass surface, for in same system of processing, t3 thickness of glass and angle a, b is definite value, air layer thickness t2 is only had to be uncontrollable, the change of regional area t2 directly can have influence on the size of spot diameter d1, and then cause the live width thickness marked uneven, another problem of thin glass and heavy sheet glass therebetween one layer of air is, laser reflects in glass/air interface, and refraction causes dispersing of laser beam spot, causes the energy density of local to decline, when energy density low to a certain extent time, film just cannot be removed completely.
Summary of the invention
The technical problem that the present invention will connect solution is to provide a kind of conventional needle that not only can utilize to the laser equipment of heavy sheet glass substrate design, reduce the expense of equipment purchasing or transformation, what effectively can also reduce that the bad problem of line occurs take ultra-thin glass as the laser scribe method of the thin-film solar cells of substrate.
In order to solve the problems of the technologies described above, of the present invention take ultra-thin glass as the laser scribe method of the thin-film solar cells of substrate, choose the liquid that refractive index is close or identical with glass, the uniform liquid chosen is covered with at heavy sheet glass slide surface, by the top needing the ultra-thin glass of line to be placed on heavy sheet glass slide glass, make laser therein refraction angle diminish or do not reflect, extruded the bubble and unnecessary liquid that are mixed into by the mode of roll-in, after being fixed together in ultra-thin glass edge and heavy sheet glass slide glass with adhesive tape, carry out laser scribing.
Described liquid is organic solution or inorganic solution.
Preferably, described liquid is the sodium chloride saturated solution under room temperature.
Above-mentioned take ultra-thin glass as the laser scribe method of the thin-film solar cells of substrate, specifically comprises the following steps:
Steps A: at room temperature preparing refractive index is the solution of 1.3-1.5;
Step B: by the mode of spray, the solution prepared is covered with the upper surface at heavy sheet glass slide glass;
Step C: the ultra-thin glass side being coated with solar energy film is first contacted the heavy sheet glass slide surface being covered with solution, then transfer ultra-thin glass, makes to fill full solution between layer glass sheet, reduces the residual of bubble;
Step D: carry out roll-in between the rubber roller two sheet glass fit together being put into two constant spacings, discharge unnecessary solution and residual bubble; The varied in thickness of two sheet glass zoness of different after roll-in is within 50 microns;
Step e: with the solution of air knife drying heavy sheet glass slide glass excess surface, at ultra-thin glass edge adhesive tape, itself and heavy sheet glass slide glass are fixed together;
Step F: two sheet glass be connected as a single entity are sent into laser scribing device and carries out laser scribing.
After step F, removing the adhesive tape at ultra-thin glass edge, be blown into by compressed air between layer glass sheet, two sheet glass can be separated.
After adopting said method, uniform and the liquid that refractive index is close or identical with glass of a layer thickness is filled between layer glass, make laser therein refraction angle diminish or do not reflect, ultra-thin glass and heavy sheet glass slide glass are fixed together, ultra-thin glass can be processed together along with heavy sheet glass slide glass in the laser scribing device of processing heavy sheet glass, and because of with the addition of between layer glass with glass refraction close to or identical liquid, laser therein refraction angle diminishes or without refraction; The large I of laser facula is consistent on the one hand, and the live width marked is also consistent, and laser facula can not be reduced laser energy density by excessive enlargement on the other hand, namely eliminates the phenomenon of live width inequality and local thin film residue (removing not exclusively); Make use of the laser equipment of conventional needle to heavy sheet glass substrate design completely simultaneously, reduce the expense of equipment purchasing or transformation.
Accompanying drawing explanation
Fig. 1 is the structural representation that in laser scribing, air layer affects laser facula size;
Fig. 2 is the structural representation with or without air layer, laser beam spot being dispersed to impact in laser scribing;
Fig. 3 is the schematic diagram of laser scribing sample production method of the present invention.
Detailed description of the invention
Below in conjunction with detailed description of the invention, to of the present invention be that the laser scribe method of the thin-film solar cells of substrate is described in further detail with ultra-thin glass.
Of the present invention take ultra-thin glass as the laser scribe method of the thin-film solar cells of substrate, its method is as follows: first choose the liquid 2 that refractive index is close or identical with glass, again the liquid 2 chosen evenly is covered with on heavy sheet glass slide glass 3 surface, the top will the ultra-thin glass 1 of line being needed to be placed on heavy sheet glass slide glass 3 again, make laser therein refraction angle diminish or do not reflect, the bubble and unnecessary liquid 2 that are mixed into is extruded by the mode of roll-in, it is even that roll-in (upper pressure roller 4 and lower compression roller 5) can allow the liquid be clipped in the middle of layer glass become thickness simultaneously, require that the varied in thickness of two sheet glass zoness of different after roll-in is within 50 microns, with adhesive tape, ultra-thin glass edge and heavy sheet glass slide glass are fixed together, adhesive tape while fixing ultra-thin glass, also can prevent bubble from entering or liquid oozes out, without cull after the tape stripping that requirement uses, then put into laser scribing device to rule, after completing laser scribing, remove adhesive tape, and be slowly blown between layer glass with compressed air, ultra-thin glass can be taken off, ultra-thin glass can carry out other techniques after cleaning.
Wherein, because the refractive index of glass is about 1.5, require that selected liquid refractivity is close to 1.5, require that this liquid and glass and thin-film material all physical and chemical reaction do not occur, and it does not absorb the optical maser wavelength selected by processing, therefore said liquid is organic solution or the inorganic solution of refractive index 1.3 ~ 1.5, preferably has low volatility, is preferably the sodium chloride saturated solution under room temperature.
Its final effect as shown in Figure 2, d1 is the spot diameter that after clipping air between layer glass, laser is formed through refraction, d2 simulates the situation that there is not air in the middle of layer glass, namely it is identical with glass refraction that to clip thickness but refractive index identical with air between layer glass be 1.5() liquid after the spot diameter that formed of laser, visible d1 > d2, under same laser projectile energy, the energy density in d1 region will lower than the energy density in d2 region.
Of the present inventionly specifically to comprise the following steps:
Steps A: at room temperature preparing refractive index is the solution of 1.3-1.5; Be at room temperature prepare the sodium chloride solution that mass concentration is 26% in the present embodiment, its refractive index is 1.38, this be a kind of that comparatively easily obtain with glass refraction close to and to the solution of general solar energy film without physical and chemical effect;
Step B: by the mode of spray, the solution prepared is covered with the upper surface at 3 millimeters thick glass slides;
Step C: the ultra-thin glass side 0.5 millimeters thick being coated with solar energy film first contacts the heavy sheet glass slide surface being covered with solution, then slowly transfers ultra-thin glass, makes to fill full solution between layer glass sheet, reduces the residual of bubble;
Step D: carry out roll-in between the rubber roller two sheet glass fit together being put into two constant spacings, discharge unnecessary solution and residual bubble; The varied in thickness of two sheet glass zoness of different after roll-in within 50 microns, also just ensure that large area varied in thickness is in 50 micrometer ranges;
Step e: with the solution of air knife drying heavy sheet glass slide glass excess surface, at ultra-thin glass edge adhesive tape, itself and heavy sheet glass slide glass are fixed together; This process can prevent solution between layer glass from oozing out while fixing ultra-thin glass position;
Step F: two sheet glass be connected as a single entity (as 3 millimeters thick glass) are sent into laser scribing device and carries out laser scribing, for the effect of this scheme is described, what this example carried out is the delineation of printing opacity line laser;
After step F, removing the adhesive tape at ultra-thin glass edge, be slowly blown into by compressed air between layer glass sheet, two sheet glass can be separated.
Finally, heavy sheet glass slide glass can repeatedly utilize after cleaning, and ultra-thin glass can carry out residue technique after cleaning.
Claims (5)
1. one kind take ultra-thin glass as the laser scribe method of the thin-film solar cells of substrate, it is characterized in that: choose the liquid that refractive index is close or identical with glass, the uniform liquid chosen is covered with at heavy sheet glass slide surface, by the top needing the ultra-thin glass of line to be placed on heavy sheet glass slide glass, make laser therein refraction angle diminish or do not reflect, extruded the bubble and unnecessary liquid that are mixed into by the mode of roll-in, after being fixed together in ultra-thin glass edge and heavy sheet glass slide glass with adhesive tape, carry out laser scribing.
2. according to according to claim 1 take ultra-thin glass as the laser scribe method of the thin-film solar cells of substrate, it is characterized in that: described liquid is organic solution or inorganic solution.
3. according to according to claim 2 take ultra-thin glass as the laser scribe method of the thin-film solar cells of substrate, it is characterized in that: described liquid is sodium chloride solution.
4., according to taking ultra-thin glass as the laser scribe method of the thin-film solar cells of substrate described in claim 1 or 3, it is characterized in that: specifically comprise the following steps:
Steps A: at room temperature preparing refractive index is the solution of 1.3-1.5;
Step B: by the mode of spray, the solution prepared is covered with the upper surface at heavy sheet glass slide glass;
Step C: the ultra-thin glass side being coated with solar energy film is first contacted the heavy sheet glass slide surface being covered with solution, then transfer ultra-thin glass, makes to fill full solution between layer glass sheet, reduces the residual of bubble;
Step D: carry out roll-in between the rubber roller two sheet glass fit together being put into two constant spacings, discharge unnecessary solution and residual bubble; The varied in thickness of two sheet glass zoness of different after roll-in is within 50 microns;
Step e: with the solution of air knife drying heavy sheet glass slide glass excess surface, at ultra-thin glass edge adhesive tape, itself and heavy sheet glass slide glass are fixed together;
Step F: two sheet glass be connected as a single entity are sent into laser scribing device and carries out laser scribing.
5. according to according to claim 4 take ultra-thin glass as the laser scribe method of the thin-film solar cells of substrate, it is characterized in that: after step F, removing the adhesive tape at ultra-thin glass edge, be blown into by compressed air between layer glass sheet, two sheet glass can be separated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510567098.3A CN105195900A (en) | 2015-09-09 | 2015-09-09 | Laser scribing method for thin-film solar cell with ultrathin glass as substrate |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510567098.3A CN105195900A (en) | 2015-09-09 | 2015-09-09 | Laser scribing method for thin-film solar cell with ultrathin glass as substrate |
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| Publication Number | Publication Date |
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| CN105195900A true CN105195900A (en) | 2015-12-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510567098.3A Pending CN105195900A (en) | 2015-09-09 | 2015-09-09 | Laser scribing method for thin-film solar cell with ultrathin glass as substrate |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114799539A (en) * | 2022-06-27 | 2022-07-29 | 中国华能集团清洁能源技术研究院有限公司 | Laser scribing method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102756212A (en) * | 2011-04-26 | 2012-10-31 | 竑腾科技股份有限公司 | High-precision solar glass laser scribing method |
| CN103407166A (en) * | 2013-05-28 | 2013-11-27 | 常熟市金亿复合材料有限公司 | Manufacturing method of polystyrene foam plate |
| JP2014033024A (en) * | 2012-08-01 | 2014-02-20 | Tokyo Seimitsu Co Ltd | Laser dicing device and method and wafer processing method |
| CN103681966A (en) * | 2013-12-04 | 2014-03-26 | 中国科学院上海硅酸盐研究所 | Laser scribing method for Mo back electrodes of CIGS film solar modules |
| CN204122934U (en) * | 2014-05-23 | 2015-01-28 | 广东工业大学 | A kind of processing unit (plant) of laser forming cutting sapphire substrate |
-
2015
- 2015-09-09 CN CN201510567098.3A patent/CN105195900A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102756212A (en) * | 2011-04-26 | 2012-10-31 | 竑腾科技股份有限公司 | High-precision solar glass laser scribing method |
| JP2014033024A (en) * | 2012-08-01 | 2014-02-20 | Tokyo Seimitsu Co Ltd | Laser dicing device and method and wafer processing method |
| CN103407166A (en) * | 2013-05-28 | 2013-11-27 | 常熟市金亿复合材料有限公司 | Manufacturing method of polystyrene foam plate |
| CN103681966A (en) * | 2013-12-04 | 2014-03-26 | 中国科学院上海硅酸盐研究所 | Laser scribing method for Mo back electrodes of CIGS film solar modules |
| CN204122934U (en) * | 2014-05-23 | 2015-01-28 | 广东工业大学 | A kind of processing unit (plant) of laser forming cutting sapphire substrate |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114799539A (en) * | 2022-06-27 | 2022-07-29 | 中国华能集团清洁能源技术研究院有限公司 | Laser scribing method |
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Application publication date: 20151230 |