CN105195846A - Multi-scale combined method for improving strength of soldered joint made of conductive ceramic base materials - Google Patents

Multi-scale combined method for improving strength of soldered joint made of conductive ceramic base materials Download PDF

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CN105195846A
CN105195846A CN201510702499.5A CN201510702499A CN105195846A CN 105195846 A CN105195846 A CN 105195846A CN 201510702499 A CN201510702499 A CN 201510702499A CN 105195846 A CN105195846 A CN 105195846A
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conductive ceramic
base material
ceramic base
brazing
joint
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CN105195846B (en
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林铁松
何鹏
冯青华
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Harbin Institute of Technology Shenzhen
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/008Soldering within a furnace
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/19Soldering, e.g. brazing, or unsoldering taking account of the properties of the materials to be soldered
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/20Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K33/00Specially-profiled edge portions of workpieces for making soldering or welding connections; Filling the seams formed thereby

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Ceramic Products (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)

Abstract

一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法,本发明涉及一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法。本发明是要解决现有导电陶瓷基材料钎焊方法连接的接头强度低、陶瓷基材料与金属的热膨胀系数差异所导致的残余应力大、可靠性低的问题,方法为:一、导电陶瓷基母材连接面表面处理;二、配制钎料;三、钎料放置;四、真空钎焊连接,即完成。本发明通过宏观尺度和微观尺度的联合作用,最大程度上缓解了接头应力,提高接头的强度可靠性。本方法获得的导电陶瓷基材料钎焊接头的抗压剪强度为155~265MPa,比采用常规平直界面和无增强相的钎焊接头强度提高了165%~345%。本发明应用于钎焊领域。

A multi-scale joint method for improving the strength of a conductive ceramic-based material brazing joint, the invention relates to a multi-scale joint method for improving the strength of a conductive ceramic-based material brazed joint. The present invention aims to solve the problems of low joint strength, large residual stress and low reliability caused by the difference in thermal expansion coefficient between the ceramic base material and the metal in the existing conductive ceramic base material brazing method. The method is as follows: 1. Conductive ceramic base material The surface treatment of the connecting surface of the base metal; 2. Preparation of brazing material; 3. Placement of the brazing material; 4. Vacuum brazing connection, which is completed. The present invention relieves the stress of the joint to the greatest extent and improves the strength and reliability of the joint through the joint action of the macro scale and the micro scale. The compressive shear strength of the conductive ceramic base material brazing joint obtained by the method is 155-265 MPa, which is 165%-345% higher than that of the conventional flat interface and no reinforcing phase brazing joint. The invention is applied to the field of brazing.

Description

一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法A Multi-Scale Combined Method for Improving the Strength of Conductive Ceramic-Based Materials Brazed Joints

技术领域technical field

本发明涉及一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法。The invention relates to a multi-scale combined method for improving the strength of a brazing joint of a conductive ceramic base material.

背景技术Background technique

陶瓷材料以其优异的高温综合性能在航空、航天等许多极端严苛环境都具有广泛的应用前景,是当今热端部件的首选材料。但陶瓷材料脆性较大,难以获得大尺寸和复杂形状的结构件,大大限制了陶瓷材料的工程应用,因此,实现陶瓷材料自身或者与金属材料的可靠连接已成为陶瓷材料应用的关键技术之一。一般采用活性钎焊方法实现陶瓷-陶瓷和陶瓷-金属的连接,该方法工艺简单、重复性好、对连接件尺寸和形状适应性强。传统活性钎焊方法通过在钎料中添加活性金属元素(如Ti、Zr、Hf等),利用其与陶瓷表面发生化学反应形成化学键而形成可靠连接。但是,由于陶瓷与金属(金属母材或者钎料)的热膨胀性能存在巨大差异,接头冷却过程中的热失配在连接界面产生残余热应力,降低接头强度和可靠性。With its excellent high-temperature comprehensive performance, ceramic materials have broad application prospects in many extremely harsh environments such as aviation and aerospace, and are the preferred materials for hot-end components today. However, ceramic materials are brittle, and it is difficult to obtain large-sized and complex-shaped structural parts, which greatly limits the engineering application of ceramic materials. Therefore, realizing reliable connections between ceramic materials themselves or metal materials has become one of the key technologies for the application of ceramic materials. . Generally, the active brazing method is used to realize the connection of ceramic-ceramic and ceramic-metal. This method has simple process, good repeatability, and strong adaptability to the size and shape of the connecting parts. The traditional active brazing method forms a reliable connection by adding active metal elements (such as Ti, Zr, Hf, etc.) to the solder and using them to chemically react with the ceramic surface to form chemical bonds. However, due to the huge difference in the thermal expansion properties of ceramics and metals (metal base material or solder), thermal mismatch during joint cooling produces residual thermal stress at the joint interface, reducing joint strength and reliability.

发明内容Contents of the invention

本发明是要解决现有导电陶瓷基材料钎焊方法连接的接头强度低、陶瓷基材料与金属的热膨胀系数差异所导致的残余应力大、可靠性低的问题,提供一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法。The present invention aims to solve the problems of low joint strength, large residual stress and low reliability caused by the difference in thermal expansion coefficient between the ceramic base material and the metal in the existing conductive ceramic base material brazing method, and provides a multi-scale joint improvement of electrical conductivity. A method for brazing joint strength of ceramic-based materials.

本发明一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法,是按以下步骤进行:The present invention is a multi-scale joint method for improving the strength of conductive ceramic-based material brazed joints, which is carried out according to the following steps:

一、导电陶瓷基母材连接面表面处理:1. Surface treatment of the connection surface of the conductive ceramic base material:

a、利用精密线切割技术将导电陶瓷基母材以及对应连接件相连接面加工成圆弧面,其中若导电陶瓷基母材的热膨胀系数小于对应连接件的热膨胀系数,则导电陶瓷基母材表面为凸面,对应连接件的表面为凹面,且弧度相等;若导电陶瓷基母材的热膨胀系数大于对应连接件的热膨胀系数,则导电陶瓷基母材表面为凹面,对应连接件为凸面,弧度相等;a. Use precision wire cutting technology to process the connecting surface of the conductive ceramic base material and the corresponding connector into a circular arc surface. If the thermal expansion coefficient of the conductive ceramic base material is smaller than the thermal expansion coefficient of the corresponding connector, the conductive ceramic base material The surface is convex, and the surface of the corresponding connector is concave, and the radians are equal; if the thermal expansion coefficient of the conductive ceramic base material is greater than the thermal expansion coefficient of the corresponding connector, the surface of the conductive ceramic base material is concave, and the corresponding connector is convex. equal;

b、通过线切割将步骤a处理后的导电陶瓷基母材连接面加工成齿形槽状结构,其中槽深为0.3~3mm,槽宽为0.3~3mm,两个槽的间距为0.3~2mm,槽深度方向与待连接面切线方向的夹角为90~150°;b. Process the connecting surface of the conductive ceramic base material treated in step a into a tooth-shaped groove structure by wire cutting, wherein the groove depth is 0.3-3mm, the groove width is 0.3-3mm, and the distance between the two grooves is 0.3-2mm , the angle between the groove depth direction and the tangent direction of the surface to be connected is 90-150°;

c、将步骤b表面处理后的导电陶瓷基母材和步骤a表面处理后的对应连接件打磨清理,再用丙酮清洗并烘干,得到清洗后的导电陶瓷基母材和对应连接件;c. Grinding and cleaning the conductive ceramic base material after the surface treatment in step b and the corresponding connector after the surface treatment in step a, then cleaning and drying with acetone to obtain the cleaned conductive ceramic base material and corresponding connector;

二、配制钎料:复合钎料包含B源和含Ti共晶合金系,其中Ti元素和B元素的摩尔比为(10~1):1;B源为B、TiB2、ZrB2、HfB2、HfB、BN和B4C中的任意一种或几种按任意比组成的混合物,含Ti共晶合金系为Ti-Ni、Ti-Cu、Ag-Cu-Ti或Ti-Si;若导电陶瓷基母材或对应连接件中含有B源,则不加B源或降低B源加入量;终产物的钎焊接头中TiB晶须的体积含量不低于5%;2. Preparation of brazing filler metal: Composite brazing filler metal includes B source and Ti-containing eutectic alloy system, in which the molar ratio of Ti element to B element is (10~1):1; B source is B, TiB 2 , ZrB 2 , HfB 2. A mixture of any one or several of HfB, BN and B 4 C in any ratio, and the Ti-containing eutectic alloy system is Ti-Ni, Ti-Cu, Ag-Cu-Ti or Ti-Si; if If the B source is contained in the conductive ceramic base material or the corresponding connector, the B source is not added or the amount of B source is reduced; the volume content of TiB whiskers in the brazed joint of the final product is not less than 5%;

三、钎料放置3. Placement of solder

将步骤二配制的复合钎料、松油醇和乙基纤维素均匀搅拌成膏体,得到复合钎料膏,其中复合钎料、松油醇和乙基纤维素的质量比为10:(0.2~2):(0.4~3),将复合钎料膏涂覆于步骤一清洗后的导电陶瓷基母材和对应连接件的连接面之间,即得待焊组件;或将制备的复合钎料膏通过甩带或挤压成箔后置于对应连接体之间,得到待焊组件;The composite solder, terpineol and ethyl cellulose prepared in step 2 are uniformly stirred into a paste to obtain a composite solder paste, wherein the mass ratio of the composite solder, terpineol and ethyl cellulose is 10:(0.2~2 ): (0.4~3), apply the composite solder paste between the conductive ceramic base material and the connecting surface of the corresponding connector after cleaning in step 1, to obtain the assembly to be welded; or prepare the composite solder paste The component to be welded is obtained by throwing the tape or extruding it into a foil and placing it between the corresponding connectors;

四、真空钎焊连接4. Vacuum brazing connection

将待焊组件置于真空炉中,将真空钎焊炉抽真空至5×10-4~1×10-3Pa,然后将真空钎焊炉以15℃/min的速度升温至温度T1,并保温5min~10min,再以10℃/min的速度升温至钎焊温度T2,并保温10min~20min,然后以5~10℃/min的速度降温至400℃,最后随炉冷却,即完成导电陶瓷基材料的钎焊连接;其中T1=T2-(100℃~200℃),T2高于钎料液相线温度10%~30%。Place the components to be welded in a vacuum furnace, evacuate the vacuum brazing furnace to 5×10 -4 ~ 1×10 -3 Pa, and then raise the temperature of the vacuum brazing furnace to T 1 at a rate of 15°C/min. And keep it warm for 5min~10min, then raise the temperature to the brazing temperature T2 at a speed of 10 ℃/min, and keep it warm for 10min~20min, then cool down to 400℃ at a speed of 5~10℃/min, and finally cool with the furnace to complete Brazing connection of conductive ceramic-based materials; wherein T 1 =T 2 -(100°C-200°C), and T 2 is 10%-30% higher than the liquidus temperature of the solder.

本发明一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法是按以下步骤进行:A multi-scale joint method of the present invention for improving the strength of conductive ceramic-based material brazed joints is carried out according to the following steps:

一、导电陶瓷基母材连接面表面处理:1. Surface treatment of the connection surface of the conductive ceramic base material:

通过线切割将导电陶瓷基母材连接面加工成齿形槽状结构,得到表面处理过的导电陶瓷基母材,其中槽深为0.3~3mm,槽宽为0.3~3mm,两个槽的间距为0.3~2mm,槽深度方向与待连接面切线方向的夹角为90~150°;将对应连接件和表面处理过的导电陶瓷基母材打磨清理,再用丙酮清洗并烘干,得到清洗后的导电陶瓷基母材和对应连接件;Process the connecting surface of the conductive ceramic base material into a tooth-shaped groove structure by wire cutting to obtain a surface-treated conductive ceramic base material. The groove depth is 0.3-3mm, the groove width is 0.3-3mm, and the distance between the two grooves The angle between the groove depth direction and the tangent direction of the surface to be connected is 90-150°; the corresponding connector and the surface-treated conductive ceramic base material are polished and cleaned, then cleaned with acetone and dried to obtain a clean The final conductive ceramic base material and corresponding connectors;

二、配制钎料:复合钎料包含B源和含Ti共晶合金系,其中Ti元素和B元素的摩尔比为(10~1):1;B源为B、TiB2、ZrB2、HfB2、HfB、BN和B4C中的任意一种或几种按任意比组成的混合物,含Ti共晶合金系为Ti-Ni、Ti-Cu、Ag-Cu-Ti或Ti-Si;若导电陶瓷基母材或对应连接件中含有B源,则不加B源或降低B源加入量;终产物的钎焊接头中TiB晶须的体积含量不低于5%;2. Preparation of brazing filler metal: Composite brazing filler metal includes B source and Ti-containing eutectic alloy system, in which the molar ratio of Ti element to B element is (10~1):1; B source is B, TiB 2 , ZrB 2 , HfB 2. A mixture of any one or several of HfB, BN and B 4 C in any ratio, and the Ti-containing eutectic alloy system is Ti-Ni, Ti-Cu, Ag-Cu-Ti or Ti-Si; if If the B source is contained in the conductive ceramic base material or the corresponding connector, the B source is not added or the amount of B source is reduced; the volume content of TiB whiskers in the brazed joint of the final product is not less than 5%;

三、钎料放置3. Placement of solder

将步骤二配制的复合钎料、松油醇和乙基纤维素均匀搅拌成膏体,得到复合钎料膏,其中复合钎料、松油醇和乙基纤维素的质量比为10:(0.2~2):(0.4~3),将复合钎料膏涂覆于步骤一清洗后的导电陶瓷基母材和对应连接件的连接面之间,即得待焊组件;或将制备的复合钎料膏通过甩带或挤压成箔后置于对应连接体之间,得到待焊组件;The composite solder, terpineol and ethyl cellulose prepared in step 2 are uniformly stirred into a paste to obtain a composite solder paste, wherein the mass ratio of the composite solder, terpineol and ethyl cellulose is 10:(0.2~2 ): (0.4~3), apply the composite solder paste between the conductive ceramic base material and the connecting surface of the corresponding connector after cleaning in step 1, to obtain the assembly to be welded; or prepare the composite solder paste The component to be welded is obtained by throwing the tape or extruding it into a foil and placing it between the corresponding connectors;

四、真空钎焊连接4. Vacuum brazing connection

将待焊组件置于真空炉中,将真空钎焊炉抽真空至5×10-4~1×10-3Pa,然后将真空钎焊炉以15℃/min的速度升温至温度T1,并保温5min~10min,再以10℃/min的速度升温至钎焊温度T2,并保温10min~20min,然后以5~10℃/min的速度降温至400℃,最后随炉冷却,即完成导电陶瓷基材料的钎焊连接;其中T1=T2-(100℃~200℃),T2高于钎料液相线温度10%~30%;其中所述的导电陶瓷基母材与对应连接件的热膨胀系数相等。Place the components to be welded in a vacuum furnace, evacuate the vacuum brazing furnace to 5×10 -4 ~ 1×10 -3 Pa, and then raise the temperature of the vacuum brazing furnace to T 1 at a rate of 15°C/min. And keep it warm for 5min~10min, then raise the temperature to the brazing temperature T2 at a speed of 10 ℃/min, and keep it warm for 10min~20min, then cool down to 400℃ at a speed of 5~10℃/min, and finally cool with the furnace to complete Brazing connection of conductive ceramic-based materials; where T 1 =T 2 -(100°C-200°C), T 2 is 10%-30% higher than the liquidus temperature of the solder; wherein the conductive ceramic-based base material and The thermal expansion coefficients of the corresponding connectors are equal.

本发明所述的制备方法具有如下优点:The preparation method of the present invention has the following advantages:

(1)在宏观尺度充分利用导电陶瓷基材料的导电特性引入精密线切割技术对其连接面进行多种形式的表面结构的二次设计加工,可以有效减缓陶瓷/金属连接界面近陶瓷一侧的应力集中,而且该工艺简单易操作、成本低;(1) Make full use of the conductive properties of conductive ceramic-based materials at the macro scale and introduce precision wire cutting technology to carry out secondary design and processing of various forms of surface structures on the connection surface, which can effectively slow down the ceramic/metal connection interface near the ceramic side. Stress concentration, and the process is simple, easy to operate, and low in cost;

(2)微观尺度在钎焊界面附近和钎料层中可以同时原位生成TiB晶须,同时具有以下效果:(2) At the microscopic scale, TiB whiskers can be generated in situ near the brazing interface and in the brazing filler metal layer at the same time, and have the following effects at the same time:

a.对连接界面进行在微观层次进行界面的二次加工,分布在界面附近的TiB晶须可以在微观尺度增加了界面连接面积并有效减缓陶瓷/金属连接界面近陶瓷一侧的应力集中,还可以对残余应力进行方向扭转;a. Perform secondary processing on the connection interface at the microscopic level. The TiB whiskers distributed near the interface can increase the interface connection area at the microscopic scale and effectively slow down the stress concentration on the ceramic/metal connection interface near the ceramic side. The direction of residual stress can be reversed;

b.对钎料层材料进行改性,钎料层由原来的纯金属材质变为金属基TiB晶须强化复合材料,有效减小了钎料层热膨胀系数、降低了残余应力;b. The material of the solder layer is modified, and the solder layer is changed from the original pure metal material to a metal-based TiB whisker-reinforced composite material, which effectively reduces the thermal expansion coefficient of the solder layer and reduces the residual stress;

c.原位生成的TiB晶须可以有效扭转接头残余应力的方向,降低裂纹出现的几率。c. The TiB whiskers generated in situ can effectively reverse the direction of the residual stress of the joint and reduce the probability of cracks.

(3)通过宏观尺度和微观尺度的联合作用,最大程度上缓解了接头应力,提高接头的强度可靠性。本方法获得的导电陶瓷基材料钎焊接头的抗压剪强度为155~265MPa,比采用常规平直界面和无增强相的钎焊接头强度提高了165%~345%。(3) Through the combined effect of macroscale and microscale, the joint stress is relieved to the greatest extent, and the strength reliability of the joint is improved. The compressive shear strength of the conductive ceramic base material brazing joint obtained by the method is 155-265 MPa, which is 165%-345% higher than that of the conventional flat interface and no reinforcing phase brazing joint.

附图说明Description of drawings

图1为实施例一中表面处理过的ZrC导电陶瓷基母材的正视图;Fig. 1 is the front view of the surface-treated ZrC conductive ceramic base material in embodiment one;

图2为图1的的剖面图;Fig. 2 is the sectional view of Fig. 1;

图3为实施例一导电陶瓷基材料的钎焊连接后ZrC导电陶瓷基母材/Nb金属母材接头装配示意图;其中a为对应连接件Nb母材,b为复合钎料,c为齿形槽状结构,d为ZrC导电陶瓷基母材;Fig. 3 is the ZrC conductive ceramic base material/Nb metal base material joint assembly schematic diagram after the brazing connection of embodiment one conductive ceramic base material; Wherein a is the corresponding connector Nb base material, b is the composite solder, and c is the tooth shape Groove structure, d is ZrC conductive ceramic base material;

图4为实施例一对比的常规平直界面和无增强相的钎焊接头装配示意图,其中a为对应连接件Nb母材,b为复合钎料,d为ZrC导电陶瓷基母材。Fig. 4 is a schematic diagram of the assembly of the brazed joint with a conventional flat interface and no reinforcing phase compared with Example 1, where a is the Nb base material of the corresponding connector, b is the composite solder, and d is the ZrC conductive ceramic base material.

具体实施方式Detailed ways

具体实施方式一:本实施方式一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法,是按以下步骤进行:Specific implementation mode 1: In this implementation mode, a multi-scale joint method for improving the strength of a conductive ceramic-based material brazed joint is carried out according to the following steps:

一、导电陶瓷基母材连接面表面处理:1. Surface treatment of the connection surface of the conductive ceramic base material:

a、利用精密线切割技术将导电陶瓷基母材以及对应连接件相连接面加工成圆弧面,其中若导电陶瓷基母材的热膨胀系数小于对应连接件的热膨胀系数,则导电陶瓷基母材表面为凸面,对应连接件的表面为凹面,且弧度相等;若导电陶瓷基母材的热膨胀系数大于对应连接件的热膨胀系数,则导电陶瓷基母材表面为凹面,对应连接件为凸面,弧度相等;a. Use precision wire cutting technology to process the connecting surface of the conductive ceramic base material and the corresponding connector into a circular arc surface. If the thermal expansion coefficient of the conductive ceramic base material is smaller than the thermal expansion coefficient of the corresponding connector, the conductive ceramic base material The surface is convex, and the surface of the corresponding connector is concave, and the radians are equal; if the thermal expansion coefficient of the conductive ceramic base material is greater than the thermal expansion coefficient of the corresponding connector, the surface of the conductive ceramic base material is concave, and the corresponding connector is convex. equal;

b、通过线切割将步骤a处理后的导电陶瓷基母材连接面加工成齿形槽状结构,其中槽深为0.3~3mm,槽宽为0.3~3mm,两个槽的间距为0.3~2mm,槽深度方向与待连接面切线方向的夹角为90~150°;b. Process the connecting surface of the conductive ceramic base material treated in step a into a tooth-shaped groove structure by wire cutting, wherein the groove depth is 0.3-3mm, the groove width is 0.3-3mm, and the distance between the two grooves is 0.3-2mm , the angle between the groove depth direction and the tangent direction of the surface to be connected is 90-150°;

c、将步骤b表面处理后的导电陶瓷基母材和步骤a表面处理后的对应连接件打磨清理,再用丙酮清洗并烘干,得到清洗后的导电陶瓷基母材和对应连接件;c. Grinding and cleaning the conductive ceramic base material after the surface treatment in step b and the corresponding connector after the surface treatment in step a, then cleaning and drying with acetone to obtain the cleaned conductive ceramic base material and corresponding connector;

二、配制钎料:复合钎料包含B源和含Ti共晶合金系,其中Ti元素和B元素的摩尔比为(10~1):1;B源为B、TiB2、ZrB2、HfB2、HfB、BN和B4C中的任意一种或几种按任意比组成的混合物,含Ti共晶合金系为Ti-Ni、Ti-Cu、Ag-Cu-Ti或Ti-Si;若导电陶瓷基母材或对应连接件中含有B源,则不加B源或降低B源加入量;终产物的钎焊接头中TiB晶须的体积含量不低于5%;2. Preparation of brazing filler metal: Composite brazing filler metal includes B source and Ti-containing eutectic alloy system, in which the molar ratio of Ti element to B element is (10~1):1; B source is B, TiB 2 , ZrB 2 , HfB 2. A mixture of any one or several of HfB, BN and B 4 C in any ratio, and the Ti-containing eutectic alloy system is Ti-Ni, Ti-Cu, Ag-Cu-Ti or Ti-Si; if If the B source is contained in the conductive ceramic base material or the corresponding connector, the B source is not added or the amount of B source is reduced; the volume content of TiB whiskers in the brazed joint of the final product is not less than 5%;

三、钎料放置3. Placement of solder

将步骤二配制的复合钎料、松油醇和乙基纤维素均匀搅拌成膏体,得到复合钎料膏,其中复合钎料、松油醇和乙基纤维素的质量比为10:(0.2~2):(0.4~3),将复合钎料膏涂覆于步骤一清洗后的导电陶瓷基母材和对应连接件的连接面之间,即得待焊组件;或将制备的复合钎料膏通过甩带或挤压成箔后置于对应连接体之间,得到待焊组件;The composite solder, terpineol and ethyl cellulose prepared in step 2 are uniformly stirred into a paste to obtain a composite solder paste, wherein the mass ratio of the composite solder, terpineol and ethyl cellulose is 10:(0.2~2 ): (0.4~3), apply the composite solder paste between the conductive ceramic base material and the connecting surface of the corresponding connector after cleaning in step 1, to obtain the assembly to be welded; or prepare the composite solder paste The component to be welded is obtained by throwing the tape or extruding it into a foil and placing it between the corresponding connectors;

四、真空钎焊连接4. Vacuum brazing connection

将待焊组件置于真空炉中,将真空钎焊炉抽真空至5×10-4~1×10-3Pa,然后将真空钎焊炉以15℃/min的速度升温至温度T1,并保温5min~10min,再以10℃/min的速度升温至钎焊温度T2,并保温10min~20min,然后以5~10℃/min的速度降温至400℃,最后随炉冷却,即完成导电陶瓷基材料的钎焊连接;其中T1=T2-(100℃~200℃),T2高于钎料液相线温度10%~30%。Place the components to be welded in a vacuum furnace, evacuate the vacuum brazing furnace to 5×10 -4 ~ 1×10 -3 Pa, and then raise the temperature of the vacuum brazing furnace to T 1 at a rate of 15°C/min. And keep it warm for 5min~10min, then raise the temperature to the brazing temperature T2 at a speed of 10 ℃/min, and keep it warm for 10min~20min, then cool down to 400℃ at a speed of 5~10℃/min, and finally cool with the furnace to complete Brazing connection of conductive ceramic-based materials; wherein T 1 =T 2 -(100°C-200°C), and T 2 is 10%-30% higher than the liquidus temperature of the solder.

本实施方式所述的制备方法具有如下优点:The preparation method described in this embodiment has the following advantages:

(1)在宏观尺度充分利用导电陶瓷基材料的导电特性引入精密线切割技术对其连接面进行多种形式的表面结构的二次设计加工,可以有效减缓陶瓷/金属连接界面近陶瓷一侧的应力集中,而且该工艺简单易操作、成本低;(1) Make full use of the conductive properties of conductive ceramic-based materials at the macro scale and introduce precision wire cutting technology to carry out secondary design and processing of various forms of surface structures on the connection surface, which can effectively slow down the ceramic/metal connection interface near the ceramic side. Stress concentration, and the process is simple, easy to operate, and low in cost;

(2)微观尺度在钎焊界面附近和钎料层中可以同时原位生成TiB晶须,同时具有以下效果:(2) At the microscopic scale, TiB whiskers can be generated in situ near the brazing interface and in the brazing filler metal layer at the same time, and have the following effects at the same time:

a.对连接界面进行在微观层次进行界面的二次加工,分布在界面附近的TiB晶须可以在微观尺度增加了界面连接面积并有效减缓陶瓷/金属连接界面近陶瓷一侧的应力集中,还可以对残余应力进行方向扭转;a. Perform secondary processing on the connection interface at the microscopic level. The TiB whiskers distributed near the interface can increase the interface connection area at the microscopic scale and effectively slow down the stress concentration on the ceramic/metal connection interface near the ceramic side. The direction of residual stress can be reversed;

b.对钎料层材料进行改性,钎料层由原来的纯金属材质变为金属基TiB晶须强化复合材料,有效减小了钎料层热膨胀系数、降低了残余应力;b. The material of the solder layer is modified, and the solder layer is changed from the original pure metal material to a metal-based TiB whisker-reinforced composite material, which effectively reduces the thermal expansion coefficient of the solder layer and reduces the residual stress;

c.原位生成的TiB晶须可以有效扭转接头残余应力的方向,降低裂纹出现的几率。c. The TiB whiskers generated in situ can effectively reverse the direction of the residual stress of the joint and reduce the probability of cracks.

(3)通过宏观尺度和微观尺度的联合作用,最大程度上缓解了接头应力,提高接头的强度可靠性。本方法获得的导电陶瓷基材料钎焊接头的抗压剪强度为155~265MPa,比采用常规平直界面和无增强相的钎焊接头强度提高了165%~345%。(3) Through the combined effect of macroscale and microscale, the joint stress is relieved to the greatest extent, and the strength reliability of the joint is improved. The compressive shear strength of the conductive ceramic base material brazing joint obtained by the method is 155-265 MPa, which is 165%-345% higher than that of the conventional flat interface and no reinforcing phase brazing joint.

具体实施方式二:本实施方式与具体实施方式一不同的是:所述的对应连接件为金属或导电陶瓷基母材。其它与具体实施方式一相同。Embodiment 2: The difference between this embodiment and Embodiment 1 is that the corresponding connector is metal or conductive ceramic base material. Others are the same as in the first embodiment.

具体实施方式三:本实施方式与具体实施方式一或二不同的是:所述的导电陶瓷基母材是指要与自身或金属基材料连接的具有导电特性的陶瓷基材料。其它与具体实施方式一或二相同。本实施方式中导电陶瓷基母材为硼化物基陶瓷、碳化物基陶瓷、导电的氧化物基陶瓷或导电的氮化物基陶瓷。Embodiment 3: This embodiment differs from Embodiment 1 or Embodiment 2 in that: the conductive ceramic-based base material refers to a ceramic-based material with conductive properties to be connected to itself or a metal-based material. Others are the same as in the first or second embodiment. In this embodiment, the conductive ceramic-based base material is boride-based ceramics, carbide-based ceramics, conductive oxide-based ceramics or conductive nitride-based ceramics.

具体实施方式四:本实施方式与具体实施方式一至三之一不同的是:所述的金属为钛合金、铌合金或钼合金。其它与具体实施方式一至三之一相同。Embodiment 4: This embodiment is different from Embodiment 1 to Embodiment 3 in that: the metal is titanium alloy, niobium alloy or molybdenum alloy. Others are the same as those in the first to third specific embodiments.

具体实施方式五:本实施方式与具体实施方式一至四之一不同的是:步骤一中所述的齿形槽状结构中任意两个槽为互相平行或相互交错。其它与具体实施方式一至四之一相同。Embodiment 5: This embodiment is different from Embodiment 1 to Embodiment 4 in that any two grooves in the tooth-shaped groove structure described in step 1 are parallel to each other or interlaced with each other. Others are the same as one of the specific embodiments 1 to 4.

具体实施方式六:本实施方式与具体实施方式一至五之一不同的是:所述的复合钎料的形态是粉状、箔状或片状。其它与具体实施方式一至五之一相同。Embodiment 6: This embodiment is different from Embodiment 1 to Embodiment 5 in that: the shape of the composite solder is powder, foil or sheet. Others are the same as one of the specific embodiments 1 to 5.

具体实施方式七:本实施方式与具体实施方式一至六之一不同的是:步骤二中所述的复合钎料中的B源以粉体球磨混合的方式引入到活性共晶钎料中,或通过多次熔炼的方式引入到活性共晶钎料中,或者通过电镀、磁控溅射或电子蒸镀引入到活性共晶钎料的外表面上。其它与具体实施方式一至六之一相同。Embodiment 7: The difference between this embodiment and one of Embodiments 1 to 6 is that the B source in the composite solder described in step 2 is introduced into the active eutectic solder in the form of powder ball milling, or It is introduced into the active eutectic solder by means of multiple smelting, or introduced on the outer surface of the active eutectic solder by electroplating, magnetron sputtering or electron evaporation. Others are the same as one of the specific embodiments 1 to 6.

具体实施方式八:本实施方式一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法,是按以下步骤进行:Embodiment 8: In this embodiment, a multi-scale joint method for improving the strength of a conductive ceramic-based material brazed joint is carried out according to the following steps:

一、导电陶瓷基母材连接面表面处理:1. Surface treatment of the connection surface of the conductive ceramic base material:

通过线切割将导电陶瓷基母材连接面加工成齿形槽状结构,得到表面处理过的导电陶瓷基母材,其中槽深为0.3~3mm,槽宽为0.3~3mm,两个槽的间距为0.3~2mm,槽深度方向与待连接面切线方向的夹角为90~150°;将对应连接件和表面处理过的导电陶瓷基母材打磨清理,再用丙酮清洗并烘干,得到清洗后的导电陶瓷基母材和对应连接件;Process the connecting surface of the conductive ceramic base material into a tooth-shaped groove structure by wire cutting to obtain a surface-treated conductive ceramic base material. The groove depth is 0.3-3mm, the groove width is 0.3-3mm, and the distance between the two grooves The angle between the groove depth direction and the tangent direction of the surface to be connected is 90-150°; the corresponding connector and the surface-treated conductive ceramic base material are polished and cleaned, then cleaned with acetone and dried to obtain a clean The final conductive ceramic base material and corresponding connectors;

二、配制钎料:复合钎料包含B源和含Ti共晶合金系,其中Ti元素和B元素的摩尔比为(10~1):1;B源为B、TiB2、ZrB2、HfB2、HfB、BN和B4C中的任意一种或几种按任意比组成的混合物,含Ti共晶合金系为Ti-Ni、Ti-Cu、Ag-Cu-Ti或Ti-Si;若导电陶瓷基母材或对应连接件中含有B源,则不加B源或降低B源加入量;终产物的钎焊接头中TiB晶须的体积含量不低于5%;2. Preparation of brazing filler metal: Composite brazing filler metal includes B source and Ti-containing eutectic alloy system, in which the molar ratio of Ti element to B element is (10~1):1; B source is B, TiB 2 , ZrB 2 , HfB 2. A mixture of any one or several of HfB, BN and B 4 C in any ratio, and the Ti-containing eutectic alloy system is Ti-Ni, Ti-Cu, Ag-Cu-Ti or Ti-Si; if If the B source is contained in the conductive ceramic base material or the corresponding connector, the B source is not added or the amount of B source is reduced; the volume content of TiB whiskers in the brazed joint of the final product is not less than 5%;

三、钎料放置3. Placement of solder

将步骤二配制的复合钎料、松油醇和乙基纤维素均匀搅拌成膏体,得到复合钎料膏,其中复合钎料、松油醇和乙基纤维素的质量比为10:(0.2~2):(0.4~3),将复合钎料膏涂覆于步骤一清洗后的导电陶瓷基母材和对应连接件的连接面之间,即得待焊组件;或将制备的复合钎料膏通过甩带或挤压成箔后置于对应连接体之间,得到待焊组件;The composite solder, terpineol and ethyl cellulose prepared in step 2 are uniformly stirred into a paste to obtain a composite solder paste, wherein the mass ratio of the composite solder, terpineol and ethyl cellulose is 10:(0.2~2 ): (0.4~3), apply the composite solder paste between the conductive ceramic base material and the connecting surface of the corresponding connector after cleaning in step 1, to obtain the assembly to be welded; or prepare the composite solder paste The component to be welded is obtained by throwing the tape or extruding it into a foil and placing it between the corresponding connectors;

四、真空钎焊连接4. Vacuum brazing connection

将待焊组件置于真空炉中,将真空钎焊炉抽真空至5×10-4~1×10-3Pa,然后将真空钎焊炉以15℃/min的速度升温至温度T1,并保温5min~10min,再以10℃/min的速度升温至钎焊温度T2,并保温10min~20min,然后以5~10℃/min的速度降温至400℃,最后随炉冷却,即完成导电陶瓷基材料的钎焊连接;其中T1=T2-(100℃~200℃),T2高于钎料液相线温度10%~30%;其中所述的导电陶瓷基母材与对应连接件的热膨胀系数相等。Place the components to be welded in a vacuum furnace, evacuate the vacuum brazing furnace to 5×10 -4 ~ 1×10 -3 Pa, and then raise the temperature of the vacuum brazing furnace to T 1 at a rate of 15°C/min. And keep it warm for 5min~10min, then raise the temperature to the brazing temperature T2 at a speed of 10 ℃/min, and keep it warm for 10min~20min, then cool down to 400℃ at a speed of 5~10℃/min, and finally cool with the furnace to complete Brazing connection of conductive ceramic-based materials; where T 1 =T 2 -(100°C-200°C), T 2 is 10%-30% higher than the liquidus temperature of the solder; wherein the conductive ceramic-based base material and The thermal expansion coefficients of the corresponding connectors are equal.

具体实施方式九:本实施方式与具体实施方式八不同的是:所述的对应连接件为金属或导电陶瓷基母材。其它与具体实施方式八相同。Embodiment 9: This embodiment is different from Embodiment 8 in that: the corresponding connector is metal or conductive ceramic base material. Others are the same as the eighth embodiment.

具体实施方式十:本实施方式与具体实施方式八或九不同的是:所述的导电陶瓷基母材是指要与自身或金属基材料连接的具有导电特性的陶瓷基材料。其它与具体实施方式八或九相同。本实施方式中导电陶瓷基母材为硼化物基陶瓷、碳化物基陶瓷、导电的氧化物基陶瓷或导电的氮化物基陶瓷。Embodiment 10: This embodiment differs from Embodiment 8 or Embodiment 9 in that: the conductive ceramic-based base material refers to a ceramic-based material with conductive properties to be connected to itself or a metal-based material. Others are the same as the eighth or ninth embodiment. In this embodiment, the conductive ceramic-based base material is boride-based ceramics, carbide-based ceramics, conductive oxide-based ceramics or conductive nitride-based ceramics.

具体实施方式十一:本实施方式与具体实施方式八至十之一不同的是:所述的金属为钛合金、铌合金或钼合金。其它与具体实施方式八至十之一相同。Embodiment 11: This embodiment is different from Embodiments 8 to 10 in that: the metal is titanium alloy, niobium alloy or molybdenum alloy. Others are the same as those in the eighth to tenth specific embodiments.

具体实施方式十二:本实施方式与具体实施方式八至十一之一不同的是:步骤一中所述的齿形槽状结构中任意两个槽为互相平行或相互交错。其它与具体实施方式八至十一之一相同。Embodiment 12: This embodiment is different from Embodiment 8 to Embodiment 11 in that: any two grooves in the tooth-shaped groove-shaped structure described in step 1 are parallel to or interlaced with each other. Others are the same as one of the eighth to eleventh specific embodiments.

具体实施方式十三:本实施方式与具体实施方式八至十二不同的是:所述的复合钎料的形态是粉状、箔状或片状。其它与具体实施方式八至十二相同。Embodiment 13: This embodiment is different from Embodiments 8 to 12 in that: the form of the composite solder is powder, foil or sheet. Others are the same as Embodiments 8 to 12.

具体实施方式十四:本实施方式与具体实施方式八至十三不同的是:步骤二中所述的复合钎料中的B源以粉体球磨混合的方式引入到活性共晶钎料中,或通过多次熔炼的方式引入到活性共晶钎料中,或者通过电镀、磁控溅射或电子蒸镀引入到活性共晶钎料的外表面上。其它与具体实施方式八至十三相同。Embodiment 14: The difference between this embodiment and Embodiments 8 to 13 is that the B source in the composite solder described in step 2 is introduced into the active eutectic solder by powder ball milling, Or it is introduced into the active eutectic solder by means of multiple smelting, or it is introduced on the outer surface of the active eutectic solder by electroplating, magnetron sputtering or electron evaporation. Others are the same as Embodiments 8 to 13.

下面的实施例将对本发明予以进一步的说明,但并不因此而限制本发明。The following examples will further illustrate the present invention, but do not limit the present invention thereby.

实施例1:本实施例一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法,是按以下步骤进行:Embodiment 1: In this embodiment, a multi-scale joint method for improving the strength of a conductive ceramic-based material brazed joint is carried out according to the following steps:

一、导电陶瓷基母材连接面表面处理:1. Surface treatment of the connection surface of the conductive ceramic base material:

a、利用精密线切割技术将ZrC导电陶瓷基母材以及对应连接件Nb母材相连接面加工成圆弧面,其中ZrC母材表面为凸面,对应连接件Nb母材的表面为凹面,且弧度相等圆弧半径均为20mm;a. Using precision wire cutting technology to process the connecting surface of the ZrC conductive ceramic base material and the corresponding connector Nb base material into a circular arc surface, wherein the surface of the ZrC base material is convex, and the surface of the corresponding connector Nb base material is concave, and The arc radius is equal to 20mm;

b、通过线切割将步骤a处理后的ZrC导电陶瓷基母材连接面加工成齿形槽状结构,其中槽深为1.5mm,槽宽为0.4mm,两个槽的间距为0.8mm,槽深度方向与待连接面切线方向的夹角为90°;b. Process the connecting surface of the ZrC conductive ceramic base material processed in step a into a toothed groove structure by wire cutting, wherein the groove depth is 1.5mm, the groove width is 0.4mm, and the distance between the two grooves is 0.8mm. The angle between the depth direction and the tangent direction of the surface to be connected is 90°;

c、将步骤b表面处理后的ZrC导电陶瓷基母材和步骤a表面处理后的对应连接件Nb母材打磨清理,再用丙酮清洗并烘干,得到清洗后的导电陶瓷基母材和对应连接件;c. Grinding and cleaning the ZrC conductive ceramic base material after surface treatment in step b and the corresponding connector Nb base material after surface treatment in step a, then cleaning and drying with acetone to obtain the cleaned conductive ceramic base material and corresponding Connector;

二、配制钎料:复合钎料包含TiB2和Ag-Cu-Ti共晶合金系,具体配制方法为:分别称取Ag、Cu、TiB2、TiH2粉末,其质量百分比分别为:67%、24%、1.5%、7.5%,将各种钎料粉使用球磨机进行充分混合,得到复合钎料;2. Preparation of brazing filler metal: the composite brazing filler metal contains TiB 2 and Ag-Cu-Ti eutectic alloy system. The specific preparation method is: respectively weigh Ag, Cu, TiB 2 and TiH 2 powders, and their mass percentages are respectively: 67% , 24%, 1.5%, 7.5%, using a ball mill to fully mix various solder powders to obtain a composite solder;

三、钎料放置3. Placement of solder

将步骤二配制的复合钎料、松油醇和乙基纤维素均匀搅拌成膏体,得到复合钎料膏,其中复合钎料、松油醇和乙基纤维素的质量比为10:0.35:1,将复合钎料膏涂覆于步骤一清洗后的导电陶瓷基母材和对应连接件的连接面之间,涂覆厚度为200μm,即得待焊组件;The composite solder, terpineol and ethyl cellulose prepared in step 2 are evenly stirred into a paste to obtain a composite solder paste, wherein the mass ratio of composite solder, terpineol and ethyl cellulose is 10:0.35:1, Coating the composite solder paste between the conductive ceramic base material cleaned in step 1 and the connecting surface of the corresponding connecting piece, the coating thickness is 200 μm, and the component to be welded is obtained;

四、真空钎焊连接4. Vacuum brazing connection

将待焊组件置于真空炉中,将真空钎焊炉抽真空至5×10-4Pa,然后将真空钎焊炉以15℃/min的速度升温至温度750℃,并保温10min,再以10℃/min的速度升温至钎焊温度900℃,并保温20min,然后以5℃/min的速度降温至400℃,最后随炉冷却,即完成导电陶瓷基材料的钎焊连接。Put the components to be welded in a vacuum furnace, evacuate the vacuum brazing furnace to 5×10 -4 Pa, then raise the temperature of the vacuum brazing furnace to 750°C at a rate of 15°C/min, and keep it warm for 10min, and then Raise the temperature at a rate of 10°C/min to a brazing temperature of 900°C, keep it warm for 20 minutes, then cool down to 400°C at a rate of 5°C/min, and finally cool down with the furnace to complete the brazing connection of the conductive ceramic base material.

其中步骤一表面处理过的陶瓷基ZrC母材的正视图如图1所示,剖面图如图2所示。The front view of the surface-treated ceramic-based ZrC base material in step 1 is shown in FIG. 1 , and the cross-sectional view is shown in FIG. 2 .

本实施例导电陶瓷基材料的钎焊连接后ZrC导电陶瓷基母材/Nb金属母材接头装配示意图如图3所示。The assembly schematic diagram of the ZrC conductive ceramic base material/Nb metal base material joint after the brazing connection of the conductive ceramic base material in this embodiment is shown in FIG. 3 .

作为对比的常规平直界面和无增强相的钎焊步骤如下:As a comparison, the brazing steps of the conventional flat interface and no reinforcing phase are as follows:

一、将ZrC导电陶瓷基母材和Nb母材平直连接面打磨清理后,用丙酮彻底清洗并烘干,得到清洗后的陶瓷基母材和对应连接件;1. After grinding and cleaning the straight connection surfaces of the ZrC conductive ceramic base material and the Nb base material, thoroughly clean and dry them with acetone, and obtain the cleaned ceramic base material and corresponding connectors;

二、分别称取Ag、Cu、TiH2粉末,其质量百分比分别为:69.3%、26.4%、4.3%,将各种钎料粉使用球磨机进行充分混合,得到复合钎料;将复合钎料膏涂覆于步骤一清洗后的导电陶瓷基母材和对应连接件的连接面之间,涂覆厚度为200μm,即得待焊组件;Two, take Ag, Cu, TiH 2 powders by weighing respectively, and its mass percentage is respectively: 69.3%, 26.4%, 4.3%, use ball mill to carry out thorough mixing with various solder powders, obtain composite solder; Composite solder paste Coating between the conductive ceramic base material cleaned in step 1 and the connection surface of the corresponding connector, the coating thickness is 200 μm, and the component to be welded is obtained;

三、将步骤三所得的待焊件置于真空炉中,然后将真空钎焊炉以15℃/min的速度升温至750℃,并保温10min,再以10℃/min的速度升温至钎焊温度900℃,并保温20min,然后以5℃/min的速度降温至400℃,最后随炉冷却,即完成导电陶瓷基材料的钎焊连接;钎焊接头装配示意图如图4所示。3. Put the parts to be welded in step 3 in a vacuum furnace, then raise the temperature of the vacuum brazing furnace to 750°C at a rate of 15°C/min, keep it warm for 10 minutes, and then heat up to brazing at a rate of 10°C/min The temperature is 900°C, and it is kept for 20 minutes, then the temperature is lowered to 400°C at a rate of 5°C/min, and finally cooled with the furnace, that is, the brazing connection of the conductive ceramic-based material is completed; the schematic diagram of the brazing joint assembly is shown in Figure 4.

采用多尺度联合提高导电陶瓷基材料钎焊接头强度的方法获得的接头,通过常温静载压剪实验(加载速率为0.5mm/s),测得剪切强度为221MPa,而作为对比的常规平直界面和无增强相的钎焊接头,同样测试条件下的剪切强度仅为58MPa,即采用本发明方法获得的钎焊接头剪切强度提高了283%。The joint obtained by using the multi-scale joint method to improve the strength of the conductive ceramic-based material brazed joint, through the normal temperature static load compression shear test (loading rate is 0.5mm/s), the measured shear strength is 221MPa, while the conventional flat as a comparison The shear strength of the brazed joint with straight interface and no reinforcing phase is only 58MPa under the same test conditions, that is, the shear strength of the brazed joint obtained by the method of the present invention is increased by 283%.

实施例2、本实施例一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法,是按以下步骤进行:Embodiment 2. In this embodiment, a multi-scale joint method for improving the strength of a conductive ceramic-based material brazed joint is carried out according to the following steps:

一、导电陶瓷基母材连接面表面处理:1. Surface treatment of the connection surface of the conductive ceramic base material:

a、利用精密线切割技术将导电陶瓷基ZrC母材以及对应连接件Nb母材相连接面加工成圆弧面,其中ZrC母材表面为凸面,对应连接件Nb母材的表面为凹面,且弧度相等,圆弧半径均为15mm;a. Using precision wire cutting technology to process the connecting surface of the conductive ceramic base ZrC base material and the corresponding connector Nb base material into a circular arc surface, wherein the surface of the ZrC base material is convex, and the surface of the corresponding connector Nb base material is concave, and The radians are equal, and the arc radius is 15mm;

b、通过线切割将步骤a处理后的导电陶瓷基ZrC母材连接面加工成齿形槽状结构,其中槽深为1.5mm,槽宽为0.4mm,两个槽的间距为0.8mm,槽深度方向与待连接面切线方向的夹角为90°;b. Process the connecting surface of the conductive ceramic base ZrC base material processed in step a into a toothed groove structure by wire cutting, wherein the groove depth is 1.5mm, the groove width is 0.4mm, and the distance between the two grooves is 0.8mm. The angle between the depth direction and the tangent direction of the surface to be connected is 90°;

c、将步骤b表面处理后的ZrC导电陶瓷基母材和步骤a表面处理后的对应连接件Nb母材打磨清理,再用丙酮清洗并烘干,得到清洗后的导电陶瓷基母材和对应连接件;c. Grinding and cleaning the ZrC conductive ceramic base material after surface treatment in step b and the corresponding connector Nb base material after surface treatment in step a, then cleaning and drying with acetone to obtain the cleaned conductive ceramic base material and corresponding Connector;

二、配制钎料:复合钎料包含TiB2和Ag-Cu-Ti共晶合金系,具体配制方法为:分别称取Ag、Cu、TiB2、TiH2粉末,其质量百分比分别为:64.5%、20%、7.2%、8.3%,将各种钎料粉使用球磨机进行充分混合,得到复合钎料;2. Preparation of solder: The composite solder contains TiB 2 and Ag-Cu-Ti eutectic alloy system. The specific preparation method is: respectively weigh Ag, Cu, TiB 2 and TiH 2 powders, and their mass percentages are: 64.5% , 20%, 7.2%, 8.3%, using a ball mill to fully mix various solder powders to obtain a composite solder;

三、钎料放置3. Placement of solder

将步骤二配制的复合钎料、松油醇和乙基纤维素均匀搅拌成膏体,得到复合钎料膏,其中复合钎料、松油醇和乙基纤维素的质量比为10:0.35:1,将复合钎料膏涂覆于步骤一清洗后的导电陶瓷基母材和对应连接件的连接面之间,涂覆厚度为200μm,即得待焊组件;The composite solder, terpineol and ethyl cellulose prepared in step 2 are evenly stirred into a paste to obtain a composite solder paste, wherein the mass ratio of composite solder, terpineol and ethyl cellulose is 10:0.35:1, Coating the composite solder paste between the conductive ceramic base material cleaned in step 1 and the connecting surface of the corresponding connecting piece, the coating thickness is 200 μm, and the component to be welded is obtained;

四、真空钎焊连接4. Vacuum brazing connection

将待焊组件置于真空炉中,将真空钎焊炉抽真空至5×10-4Pa,然后将真空钎焊炉以15℃/min的速度升温至温度750℃,并保温10min,再以10℃/min的速度升温至钎焊温度900℃,并保温20min,然后以5℃/min的速度降温至400℃,最后随炉冷却,即完成导电陶瓷基材料的钎焊连接。Put the components to be welded in a vacuum furnace, evacuate the vacuum brazing furnace to 5×10 -4 Pa, then raise the temperature of the vacuum brazing furnace to 750°C at a rate of 15°C/min, and keep it warm for 10min, and then Raise the temperature at a rate of 10°C/min to a brazing temperature of 900°C, keep it warm for 20 minutes, then cool down to 400°C at a rate of 5°C/min, and finally cool down with the furnace to complete the brazing connection of the conductive ceramic base material.

作为对比的常规平直界面和无增强相的钎焊步骤如下:As a comparison, the brazing steps of the conventional flat interface and no reinforcing phase are as follows:

一、将ZrC导电陶瓷基母材和Nb母材平直连接面打磨清理后,用丙酮彻底清洗并烘干,得到清洗后的导电陶瓷基母材和对应连接件;1. After grinding and cleaning the straight connecting surfaces of the ZrC conductive ceramic base material and the Nb base material, thoroughly clean and dry them with acetone, and obtain the cleaned conductive ceramic base material and corresponding connectors;

二、分别称取Ag、Cu、TiH2粉末,其质量百分比分别为:69.3%、26.4%、4.3%,将各种钎料粉使用球磨机进行充分混合,得到复合钎料;将复合钎料膏涂覆于步骤一清洗后的导电陶瓷基母材和对应连接件的连接面之间,涂覆厚度为200μm,即得待焊组件;Two, take Ag, Cu, TiH 2 powders by weighing respectively, and its mass percentage is respectively: 69.3%, 26.4%, 4.3%, use ball mill to carry out thorough mixing with various solder powders, obtain composite solder; Composite solder paste Coating between the conductive ceramic base material cleaned in step 1 and the connection surface of the corresponding connector, the coating thickness is 200 μm, and the component to be welded is obtained;

三、将步骤三所得的待焊件置于真空炉中,然后将真空钎焊炉以15℃/min的速度升温至750℃,并保温10min,再以10℃/min的速度升温至钎焊温度900℃,并保温20min,然后以5℃/min的速度降温至400℃,最后随炉冷却,即完成导电陶瓷基材料的钎焊连接;3. Put the parts to be welded in step 3 in a vacuum furnace, then raise the temperature of the vacuum brazing furnace to 750°C at a rate of 15°C/min, keep it warm for 10 minutes, and then heat up to brazing at a rate of 10°C/min The temperature is 900°C, and it is kept for 20 minutes, then the temperature is lowered to 400°C at a rate of 5°C/min, and finally cooled with the furnace, that is, the brazing connection of the conductive ceramic base material is completed;

采用多尺度联合提高导电陶瓷基材料钎焊接头强度的方法获得的接头,通过常温静载压剪实验(加载速率为0.5mm/s),测得剪切强度为258MPa,而作为对比的常规平直界面和无增强相的钎焊接头,同样测试条件下的剪切强度仅为58MPa,即采用本发明方法获得的钎焊接头剪切强度提高了345%。The joint obtained by using multi-scale combined method to improve the strength of the brazed joint of conductive ceramic-based materials has a shear strength of 258 MPa through the normal temperature static load compression shear test (loading rate is 0.5mm/s), while the conventional flat joint used as a comparison The shear strength of the brazed joint with straight interface and no reinforcing phase is only 58MPa under the same test conditions, that is, the shear strength of the brazed joint obtained by the method of the present invention is increased by 345%.

实施例3:本实施例一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法,是按以下步骤进行:Embodiment 3: In this embodiment, a multi-scale joint method for improving the strength of a conductive ceramic-based material brazed joint is carried out according to the following steps:

一、导电陶瓷基母材连接面表面处理:1. Surface treatment of the connection surface of the conductive ceramic base material:

通过线切割将导电陶瓷基ZrC母材连接面加工成齿形槽状结构,得到表面处理过的导电陶瓷基母材,其中槽深为1.5mm,槽宽为0.4mm,两个槽的间距为0.8mm,槽深度方向与待连接面切线方向的夹角为90°;将对应连接件和表面处理过的导电陶瓷基母材打磨清理,再用丙酮清洗并烘干,得到清洗后的导电陶瓷基母材和对应连接件;The connecting surface of the conductive ceramic-based ZrC base material is processed into a tooth-shaped groove structure by wire cutting, and the surface-treated conductive ceramic-based base material is obtained. The groove depth is 1.5mm, the groove width is 0.4mm, and the distance between the two grooves is 0.8mm, the angle between the depth direction of the groove and the tangent direction of the surface to be connected is 90°; the corresponding connector and the surface-treated conductive ceramic base material are polished and cleaned, then cleaned with acetone and dried to obtain the cleaned conductive ceramic Base material and corresponding connectors;

二、配制钎料:复合钎料包含TiB2和Ag-Cu-Ti共晶合金系,具体配制方法为:分别称取Ag、Cu、TiB2、TiH2粉末,其质量百分比分别为:67%、24%、1.5%、7.5%,将各种钎料粉使用球磨机进行充分混合,得到复合钎料;2. Preparation of brazing filler metal: the composite brazing filler metal contains TiB 2 and Ag-Cu-Ti eutectic alloy system. The specific preparation method is: respectively weigh Ag, Cu, TiB 2 and TiH 2 powders, and their mass percentages are respectively: 67% , 24%, 1.5%, 7.5%, using a ball mill to fully mix various solder powders to obtain a composite solder;

三、钎料放置3. Placement of solder

将步骤二配制的复合钎料、松油醇和乙基纤维素均匀搅拌成膏体,得到复合钎料膏,其中复合钎料、松油醇和乙基纤维素的质量比为10:0.35:1,将复合钎料膏涂覆于步骤一清洗后的导电陶瓷基母材和对应连接件的连接面之间,涂覆厚度为200μm,即得待焊组件;The composite solder, terpineol and ethyl cellulose prepared in step 2 are evenly stirred into a paste to obtain a composite solder paste, wherein the mass ratio of composite solder, terpineol and ethyl cellulose is 10:0.35:1, Coating the composite solder paste between the conductive ceramic base material cleaned in step 1 and the connecting surface of the corresponding connecting piece, the coating thickness is 200 μm, and the component to be welded is obtained;

四、真空钎焊连接4. Vacuum brazing connection

将待焊组件置于真空炉中,将真空钎焊炉抽真空至5×10-4Pa,然后将真空钎焊炉以15℃/min的速度升温至温度750℃,并保温10min,再以10℃/min的速度升温至钎焊温度900℃,并保温20min,然后以5℃/min的速度降温至400℃,最后随炉冷却,即完成导电陶瓷基材料的钎焊连接。Put the components to be welded in a vacuum furnace, evacuate the vacuum brazing furnace to 5×10 -4 Pa, then raise the temperature of the vacuum brazing furnace to 750°C at a rate of 15°C/min, and keep it warm for 10min, and then Raise the temperature at a rate of 10°C/min to a brazing temperature of 900°C, keep it warm for 20 minutes, then cool down to 400°C at a rate of 5°C/min, and finally cool down with the furnace to complete the brazing connection of the conductive ceramic base material.

作为对比的常规平直界面和无增强相的钎焊步骤如下:As a comparison, the brazing steps of the conventional flat interface and no reinforcing phase are as follows:

一、将两块ZrC导电陶瓷基母材平直连接面打磨清理后,用丙酮彻底清洗并烘干,得到清洗后的导电陶瓷基母材;1. After polishing and cleaning the straight connecting surfaces of two ZrC conductive ceramic base materials, thoroughly clean them with acetone and dry them to obtain the cleaned conductive ceramic base materials;

二、分别称取Ag、Cu、TiH2粉末,其质量百分比分别为:69.3%、26.4%、4.3%,将各种钎料粉使用球磨机进行充分混合,得到复合钎料;将复合钎料膏涂覆于步骤一清洗后的两块导电陶瓷基母材连接面之间,涂覆厚度为200μm,即得待焊组件;Two, take Ag, Cu, TiH 2 powders by weighing respectively, and its mass percentage is respectively: 69.3%, 26.4%, 4.3%, use ball mill to carry out thorough mixing with various solder powders, obtain composite solder; Composite solder paste Coating between the connecting surfaces of two conductive ceramic-based base materials cleaned in step 1, the coating thickness is 200 μm, and the component to be welded is obtained;

三、将步骤三所得的待焊件置于真空炉中,然后将真空钎焊炉以15℃/min的速度升温至750℃,并保温10min,再以10℃/min的速度升温至钎焊温度900℃,并保温20min,然后以5℃/min的速度降温至400℃,最后随炉冷却,即完成导电陶瓷基材料的钎焊连接;3. Put the parts to be welded in step 3 in a vacuum furnace, then raise the temperature of the vacuum brazing furnace to 750°C at a rate of 15°C/min, keep it warm for 10 minutes, and then heat up to brazing at a rate of 10°C/min The temperature is 900°C, and it is kept for 20 minutes, then the temperature is lowered to 400°C at a rate of 5°C/min, and finally cooled with the furnace, that is, the brazing connection of the conductive ceramic base material is completed;

采用多尺度联合提高导电陶瓷基材料钎焊接头强度的方法获得的接头,通过常温静载压剪实验(加载速率为0.5mm/s),测得剪切强度为205MPa,而作为对比的常规平直界面和无增强相的钎焊接头,同样测试条件下的剪切强度仅为76MPa,即采用本发明方法获得的钎焊接头剪切强度提高了171%The joint obtained by multi-scale combined method of improving the strength of the brazed joint of conductive ceramic-based materials, through the normal temperature static load compression shear test (loading rate is 0.5mm/s), the measured shear strength is 205MPa, while the conventional flat as a comparison The shear strength of the brazed joint with straight interface and no reinforcing phase is only 76MPa under the same test conditions, that is, the shear strength of the brazed joint obtained by the method of the present invention has increased by 171%

通过以上实施例可知,本发明通过宏观尺度和微观尺度的联合作用,最大程度上缓解了接头应力,提高接头的强度可靠性。本方法获得的导电陶瓷基材料钎焊接头的抗压剪强度为165~265MPa,比采用常规平直界面和无增强相的钎焊接头强度提高了165%~345%。It can be seen from the above examples that the present invention alleviates the joint stress to the greatest extent and improves the strength and reliability of the joint through the joint action of the macro scale and the micro scale. The compressive shearing strength of the conductive ceramic base material brazing joint obtained by the method is 165-265 MPa, which is 165%-345% higher than that of the conventional flat interface and no reinforcing phase brazing joint.

Claims (10)

1.一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法,其特征在于该方法按以下步骤进行:1. A multi-scale method for jointly improving the strength of conductive ceramic-based material brazed joints is characterized in that the method is carried out in the following steps: 一、导电陶瓷基母材连接面表面处理:1. Surface treatment of the connection surface of the conductive ceramic base material: a、利用精密线切割技术将导电陶瓷基母材以及对应连接件相连接面加工成圆弧面,其中若导电陶瓷基母材的热膨胀系数小于对应连接件的热膨胀系数,则导电陶瓷基母材表面为凸面,对应连接件的表面为凹面,且弧度相等;若导电陶瓷基母材的热膨胀系数大于对应连接件的热膨胀系数,则导电陶瓷基母材表面为凹面,对应连接件为凸面,弧度相等;a. Use precision wire cutting technology to process the connecting surface of the conductive ceramic base material and the corresponding connector into a circular arc surface. If the thermal expansion coefficient of the conductive ceramic base material is smaller than the thermal expansion coefficient of the corresponding connector, the conductive ceramic base material The surface is convex, and the surface of the corresponding connector is concave, and the radians are equal; if the thermal expansion coefficient of the conductive ceramic base material is greater than the thermal expansion coefficient of the corresponding connector, the surface of the conductive ceramic base material is concave, and the corresponding connector is convex. equal; b、通过线切割将步骤a处理后的导电陶瓷基母材连接面加工成齿形槽状结构,其中槽深为0.3~3mm,槽宽为0.3~3mm,两个槽的间距为0.3~2mm,槽深度方向与待连接面切线方向的夹角为90~150°;b. Process the connecting surface of the conductive ceramic base material treated in step a into a tooth-shaped groove structure by wire cutting, wherein the groove depth is 0.3-3mm, the groove width is 0.3-3mm, and the distance between the two grooves is 0.3-2mm , the angle between the groove depth direction and the tangent direction of the surface to be connected is 90-150°; c、将步骤b表面处理后的导电陶瓷基母材和步骤a表面处理后的对应连接件打磨清理,再用丙酮清洗并烘干,得到清洗后的导电陶瓷基母材和对应连接件;c. Grinding and cleaning the conductive ceramic base material after the surface treatment in step b and the corresponding connector after the surface treatment in step a, then cleaning and drying with acetone to obtain the cleaned conductive ceramic base material and corresponding connector; 二、配制钎料:复合钎料包含B源和含Ti共晶合金系,其中Ti元素和B元素的摩尔比为(10~1):1;B源为B、TiB2、ZrB2、HfB2、HfB、BN和B4C中的任意一种或几种按任意比组成的混合物,含Ti共晶合金系为Ti-Ni、Ti-Cu、Ag-Cu-Ti或Ti-Si;若导电陶瓷基母材或对应连接件中含有B源,则不加B源或降低B源加入量;终产物的钎焊接头中TiB晶须的体积含量不低于5%;2. Preparation of brazing filler metal: Composite brazing filler metal includes B source and Ti-containing eutectic alloy system, in which the molar ratio of Ti element to B element is (10~1):1; B source is B, TiB 2 , ZrB 2 , HfB 2. A mixture of any one or several of HfB, BN and B 4 C in any ratio, and the Ti-containing eutectic alloy system is Ti-Ni, Ti-Cu, Ag-Cu-Ti or Ti-Si; if If the B source is contained in the conductive ceramic base material or the corresponding connector, the B source is not added or the amount of B source is reduced; the volume content of TiB whiskers in the brazed joint of the final product is not less than 5%; 三、钎料放置3. Placement of solder 将步骤二配制的复合钎料、松油醇和乙基纤维素均匀搅拌成膏体,得到复合钎料膏,其中复合钎料、松油醇和乙基纤维素的质量比为10:(0.2~2):(0.4~3),将复合钎料膏涂覆于步骤一清洗后的导电陶瓷基母材和对应连接件的连接面之间,即得待焊组件;或将制备的复合钎料膏通过甩带或挤压成箔后置于对应连接体之间,得到待焊组件;The composite solder, terpineol and ethyl cellulose prepared in step 2 are uniformly stirred into a paste to obtain a composite solder paste, wherein the mass ratio of the composite solder, terpineol and ethyl cellulose is 10:(0.2~2 ): (0.4~3), apply the composite solder paste between the conductive ceramic base material and the connecting surface of the corresponding connector after cleaning in step 1, to obtain the assembly to be welded; or prepare the composite solder paste The component to be welded is obtained by throwing the tape or extruding it into a foil and placing it between the corresponding connectors; 四、真空钎焊连接4. Vacuum brazing connection 将待焊组件置于真空炉中,将真空钎焊炉抽真空至5×10-4~1×10-3Pa,然后将真空钎焊炉以15℃/min的速度升温至温度T1,并保温5min~10min,再以10℃/min的速度升温至钎焊温度T2,并保温10min~20min,然后以5~10℃/min的速度降温至400℃,最后随炉冷却,即完成导电陶瓷基材料的钎焊连接;其中T1=T2-(100℃~200℃),T2高于钎料液相线温度10%~30%。Place the components to be welded in a vacuum furnace, evacuate the vacuum brazing furnace to 5×10 -4 ~ 1×10 -3 Pa, and then raise the temperature of the vacuum brazing furnace to T 1 at a rate of 15°C/min. And keep it warm for 5min~10min, then raise the temperature to the brazing temperature T2 at a speed of 10 ℃/min, and keep it warm for 10min~20min, then cool down to 400℃ at a speed of 5~10℃/min, and finally cool with the furnace to complete Brazing connection of conductive ceramic-based materials; wherein T 1 =T 2 -(100°C-200°C), and T 2 is 10%-30% higher than the liquidus temperature of the solder. 2.根据权利要求1所述的一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法,其特征在于所述的对应连接件为金属或导电陶瓷基母材。2. A multi-scale joint method for improving the strength of conductive ceramic-based material brazed joints according to claim 1, characterized in that said corresponding connectors are metals or conductive ceramic-based base materials. 3.根据权利要求1或2所述的一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法,其特征在于所述的导电陶瓷基母材是指与自身或金属基材料连接的具有导电特性的陶瓷基材料。3. according to claim 1 or 2, a kind of multi-scale joint method for improving the strength of conductive ceramic-based material brazed joints is characterized in that said conductive ceramic-based base material refers to a metal-based material that is connected to itself or has a Ceramic-based materials with conductive properties. 4.根据权利要求2所述的一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法,其特征在于所述的金属为钛合金、铌合金或钼合金。4. A multi-scale joint method for improving the strength of conductive ceramic-based material brazed joints according to claim 2, characterized in that said metal is titanium alloy, niobium alloy or molybdenum alloy. 5.根据权利要求1所述的一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法,其特征在于步骤一中所述的齿形槽状结构中任意两个槽为互相平行或相互交错。5. A method of multi-scale joint improvement of the strength of conductive ceramic-based material brazed joints according to claim 1, characterized in that any two grooves in the tooth-shaped groove structure described in step 1 are parallel to each other or mutually staggered. 6.根据权利要求1所述的一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法,其特征在于所述的复合钎料的形态是粉状、箔状或片状。6. A multi-scale joint method for improving the strength of conductive ceramic-based material brazed joints according to claim 1, characterized in that the shape of the composite solder is powder, foil or flake. 7.根据权利要求1所述的一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法,其特征在于步骤二中所述的复合钎料中的B源以粉体球磨混合的方式引入到活性共晶钎料中,或通过多次熔炼的方式引入到活性共晶钎料中,或者通过电镀、磁控溅射或电子蒸镀引入到活性共晶钎料的外表面上。7. A kind of multi-scale joint method for improving the strength of conductive ceramic-based material brazed joints according to claim 1, characterized in that the B source in the composite solder described in step 2 is introduced in the form of powder ball milling into the active eutectic solder, or introduced into the active eutectic solder by multiple smelting, or introduced into the outer surface of the active eutectic solder by electroplating, magnetron sputtering or electronic evaporation. 8.一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法,其特征在于该方法按以下步骤进行:8. A method for multi-scale joint improvement of the strength of conductive ceramic-based material brazed joints, characterized in that the method is carried out in the following steps: 一、导电陶瓷基母材连接面表面处理:1. Surface treatment of the connection surface of the conductive ceramic base material: 通过线切割在导电陶瓷基母材连接面加工成齿形槽状结构,得到表面处理过的导电陶瓷基母材,其中槽深为0.3~3mm,槽宽为0.3~3mm,两个槽的间距为0.3~2mm,槽深度方向与待连接面切线方向的夹角为90~150°;将对应连接件和表面处理过的导电陶瓷基母材打磨清理,再用丙酮清洗并烘干,得到清洗后的导电陶瓷基母材和对应连接件;Process the tooth-shaped groove structure on the connecting surface of the conductive ceramic base material by wire cutting to obtain a surface-treated conductive ceramic base material, in which the groove depth is 0.3-3mm, the groove width is 0.3-3mm, and the distance between the two grooves The angle between the groove depth direction and the tangent direction of the surface to be connected is 90-150°; the corresponding connector and the surface-treated conductive ceramic base material are polished and cleaned, then cleaned with acetone and dried to obtain a clean The final conductive ceramic base material and corresponding connectors; 二、配制钎料:复合钎料包含B源和含Ti共晶合金系,其中Ti元素和B元素的摩尔比为(10~1):1;B源为B、TiB2、ZrB2、HfB2、HfB、BN和B4C中的任意一种或几种按任意比组成的混合物,含Ti共晶合金系为Ti-Ni、Ti-Cu、Ag-Cu-Ti或Ti-Si;若导电陶瓷基母材或对应连接件中含有B源,则不加B源或降低B源加入量;终产物的钎焊接头中TiB晶须的体积含量不低于5%;2. Preparation of brazing filler metal: Composite brazing filler metal includes B source and Ti-containing eutectic alloy system, in which the molar ratio of Ti element to B element is (10~1):1; B source is B, TiB 2 , ZrB 2 , HfB 2. A mixture of any one or several of HfB, BN and B 4 C in any ratio, and the Ti-containing eutectic alloy system is Ti-Ni, Ti-Cu, Ag-Cu-Ti or Ti-Si; if If the B source is contained in the conductive ceramic base material or the corresponding connector, the B source is not added or the amount of B source is reduced; the volume content of TiB whiskers in the brazed joint of the final product is not less than 5%; 三、钎料放置3. Placement of solder 将步骤二配制的复合钎料、松油醇和乙基纤维素均匀搅拌成膏体,得到复合钎料膏,其中复合钎料、松油醇和乙基纤维素的质量比为10:(0.2~2):(0.4~3),将复合钎料膏涂覆于步骤一清洗后的导电陶瓷基母材和对应连接件的连接面之间,即得待焊组件;或将制备的复合钎料膏通过甩带或挤压成箔后置于对应连接体之间,得到待焊组件;The composite solder, terpineol and ethyl cellulose prepared in step 2 are uniformly stirred into a paste to obtain a composite solder paste, wherein the mass ratio of the composite solder, terpineol and ethyl cellulose is 10:(0.2~2 ): (0.4~3), apply the composite solder paste between the conductive ceramic base material and the connecting surface of the corresponding connector after cleaning in step 1, to obtain the assembly to be welded; or prepare the composite solder paste The component to be welded is obtained by throwing the tape or extruding it into a foil and placing it between the corresponding connectors; 四、真空钎焊连接4. Vacuum brazing connection 将待焊组件置于真空炉中,将真空钎焊炉抽真空至5×10-4~1×10-3Pa,然后将真空钎焊炉以15℃/min的速度升温至温度T1,并保温5min~10min,再以10℃/min的速度升温至钎焊温度T2,并保温10min~20min,然后以5~10℃/min的速度降温至400℃,最后随炉冷却,即完成导电陶瓷基材料的钎焊连接;其中T1=T2-(100℃~200℃),T2高于钎料液相线温度10%~30%;其中所述的导电陶瓷基母材与对应连接件的热膨胀系数相等。Place the components to be welded in a vacuum furnace, evacuate the vacuum brazing furnace to 5×10 -4 ~ 1×10 -3 Pa, and then raise the temperature of the vacuum brazing furnace to T 1 at a rate of 15°C/min. And keep it warm for 5min~10min, then raise the temperature to the brazing temperature T2 at a speed of 10 ℃/min, and keep it warm for 10min~20min, then cool down to 400℃ at a speed of 5~10℃/min, and finally cool with the furnace to complete Brazing connection of conductive ceramic-based materials; where T 1 =T 2 -(100°C-200°C), T 2 is 10%-30% higher than the liquidus temperature of the solder; wherein the conductive ceramic-based base material and The thermal expansion coefficients of the corresponding connectors are equal. 9.根据权利要求8所述的一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法,其特征在于所述的对应连接件为金属或导电陶瓷基母材;其中导电陶瓷基母材是指与自身或金属基材料连接的具有导电特性的陶瓷基材料。9. A multi-scale joint method for improving the strength of conductive ceramic-based material brazed joints according to claim 8, wherein the corresponding connector is a metal or a conductive ceramic-based base material; wherein the conductive ceramic-based base material Refers to a ceramic-based material with conductive properties that is connected to itself or a metal-based material. 10.根据权利要求9所述的一种多尺度联合提高导电陶瓷基材料钎焊接头强度的方法,其特征在于所述的金属为钛合金、铌合金或钼合金。10. A multi-scale joint method for improving the strength of conductive ceramic-based material brazed joints according to claim 9, characterized in that said metal is titanium alloy, niobium alloy or molybdenum alloy.
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