CN105185733A - Microwave annealing apparatus - Google Patents
Microwave annealing apparatus Download PDFInfo
- Publication number
- CN105185733A CN105185733A CN201510529534.8A CN201510529534A CN105185733A CN 105185733 A CN105185733 A CN 105185733A CN 201510529534 A CN201510529534 A CN 201510529534A CN 105185733 A CN105185733 A CN 105185733A
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- Prior art keywords
- microwave annealing
- microwave
- pond
- annealing
- housing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
Abstract
Disclosed in the invention is a microwave annealing apparatus comprising a housing, a microwave annealing pool arranged in the housing in a sleeving mode, and a top cover arranged at the tops of the housing and the microwave annealing pool. The top cover is used for sealing the microwave annealing pool. The microwave annealing pool is a container containing a hollow part; and a quartz crucible is arranged at the bottom of the container and is used for placing an annealing sample. According to the invention, the apparatus has advantages of low manufacturing cost, good thermal insulation performance, and convenient temperature measurement; and microwave annealing and sintering of objects with different dielectric constants can be realized flexibly. Moreover, with the apparatus, parallel microwave annealing can be realized; and compared with muffle furnace annealing, the microwave annealing way enables lots of time to be saved.
Description
Technical field
The invention belongs to semiconductor applications, relate to a kind of annealing technology; Specifically, relate to a kind of microwave annealing device, sinter for heterogeneous composite material.
Background technology
Microwave annealing technology is a kind of newer annealing technology, and oneself is through being applied to the research of some semiconductor applications now.But this technology applies in industrial production also not by maturation at present, special annealing device is now many to be assembled by actual requirement voluntarily by each research unit and each colleges and universities.It is not good that existing microwave annealing device mainly has heat-insulating property, and annealing heating mode is single, and the problems such as sample loading and thermometric inconvenience, cause very large inconvenience to research microwave annealing.
Summary of the invention
Technical problem to be solved by this invention is that in microwave annealing process, heat-insulating property is not good, and annealing heating mode is single, and sample loads the problem with thermometric inconvenience.
For achieving the above object, the invention provides a kind of microwave annealing device, this device comprises:
Housing,
Be placed on the microwave annealing pond in described housing;
Be arranged on the top cover at described housing and top, microwave annealing pond, for closed microwave annealing pond;
Wherein, described microwave annealing pond is the container comprising a hollow bulb, and the bottom of this container is provided with silica crucible, for placing annealing specimen.
Above-mentioned microwave annealing device, wherein, described housing and microwave annealing pond are made by high-temperature explosion-proof glass.
Above-mentioned microwave annealing device, wherein, described housing and microwave annealing pond are by resistant to elevated temperatures high-purity Si O
2glass is made, and has good saturating microwave effect.
Above-mentioned microwave annealing device, wherein, between described housing and microwave annealing pond, also indwelling has space part, for filling functional stuffing.Described functional stuffing refer to have wave transparent, insulation, heat insulation in the material of any one or more than one function.Preferably, this functional stuffing selects SiO
2.Adopt and do not inhale microwave, resistant to elevated temperatures SiO
2particles filled, to rely in space microwave thoroughly, the good air of heat-proof quality realizes insulation, finally can low cost, realizes microwave, insulation, resistant to elevated temperatures function simply simultaneously.
Above-mentioned microwave annealing device, wherein, described top cover is made up of some layers of heatproof glassy layer, while maintenance good thermal insulation property, can open very easily and cover again, and can use Infrared thermometric.
Above-mentioned microwave annealing device, wherein, the diameter of the outermost layer heatproof glassy layer of described top cover is greater than the external diameter of housing.
Above-mentioned microwave annealing device, wherein, fills SiC particle in described hollow bulb.
Above-mentioned microwave annealing device, wherein, in described hollow bulb, also doping is filled with other functional materials, to realize microwave annealing to differing dielectric constant material and sintering.
Above-mentioned microwave annealing device, wherein, described microwave annealing pond is also provided with SiC lid.
Microwave annealing device cost of manufacture provided by the invention is low, good heat insulating, by the doping of functional material in hollow bulb, can realize microwave annealing and sintering flexibly to the material of differing dielectric constant; Adopt heatproof glassy layer, in the state of the art, directly can use infrared radiation thermometer Measurement accuracy microwave annealing pond internal temperature, thermometric is convenient; And device of the present invention can realize parallel microwave annealing, compare Muffle furnace annealing, can a large amount of time be saved.
Accompanying drawing explanation
Fig. 1 is the structural representation of microwave annealing device of the present invention.
Fig. 2 is that the microwave annealing pond container endogenous pyrogen of microwave annealing device of the present invention is to flow diagram.
Fig. 3 is the schematic cross-section of microwave annealing device of the present invention.
Embodiment
Below in conjunction with accompanying drawing, by specific embodiment, the invention will be further described, and these embodiments, only for illustration of the present invention, are not limiting the scope of the invention.
As shown in Figure 1, be a kind of microwave annealing device provided by the invention, this device comprises:
Housing 10,
Be placed on the microwave annealing pond 20 in described housing 10;
Be arranged on the top cover 30 at described housing 10 and top, microwave annealing pond 20, for sealing microwave annealing pond 20;
Wherein, described microwave annealing pond 20 is for comprising the container of a hollow bulb 21, and the bottom of this container is provided with silica crucible 22, for placing annealing specimen 1.
In some embodiments, described microwave annealing pond is also provided with SiC lid 23.
Described housing and microwave annealing pond are made by high-temperature explosion-proof glass.In more excellent embodiment, resistant to elevated temperatures high-purity Si O is all selected in described housing and microwave annealing pond
2glass is made, and has good saturating microwave effect.Microwave annealing pond 20 as inside subject is a hollow container, and wherein, hollow bulb 21 can use SiC particles filled, it is after the extraneous microwave energy of absorption (microwave annealing device is placed in microwave oven, opens microwave oven, provide energy), can be rapidly heated, can be used as thermal source.Can to realize the free convection in microwave annealing pond thus in outside due to thermal source, the arrow as Fig. 2 is illustrated, makes homogeneous temperature annealing in annealing pond more even, efficiently.Wherein, the SiC filler in the hollow bulb 21 in microwave annealing pond according to actual experiment require can some other materials of mixing and doping (such as: the SiO not absorbing microwave
2particle, can regulate the saturating microwave rate of inside, whole microwave annealing pond thus; Again such as: not saturating microwave during low temperature, the material of saturating microwave during high temperature, when can realize low temperature, saturating microwave rate is low, the annealing that during high temperature, saturating microwave rate is high and sintering), this design can realize microwave annealing and sintering to the material of differing dielectric constant flexibly, achieve the variation of annealing heating mode, solve the problem that prior art annealing heating mode is single.Be provided with in microwave annealing pond with silica crucible, sample to be annealed is just placed on silica crucible.
In some preferably embodiment, between described housing and microwave annealing pond, also indwelling has space part 40, for filling functional stuffing.Described functional stuffing refer to have wave transparent, insulation, heat insulation in the material of any one or more than one function.Preferably, this functional stuffing selects SiO
2.On the one hand, SiO
2particle can good saturating microwave, and on the other hand, the not moving air of intergranular space can good microwave thoroughly, is again very excellent heat-barrier material, therefore by filling the SiO of advantage of lower cost simultaneously
2particle, can obtain excellent wave transparent and heat insulation function simultaneously.The present invention adopts and does not inhale microwave, resistant to elevated temperatures SiO
2particles filled space part 40, to rely in space microwave thoroughly, and the good air of heat-proof quality realizes insulation, finally can low cost, realizes microwave, insulation, resistant to elevated temperatures function simply simultaneously.
In some preferably embodiment, top cover 30 on microwave annealing pond is made up of multilayer pyroceram lid, and the diameter of outermost layer glass should slightly larger than the external diameter (see figure 3) of microwave annealing pond heat-insulation layer, this design can ensure while maintenance good thermal insulation property, can open very easily and cover again, simultaneously because top is made up of glass, after internal temperature annealing temperature is higher than 300 DEG C, in the state of the art, directly can use infrared radiation thermometer Measurement accuracy microwave annealing pond internal temperature, this design solves prior art sample and loads the problem with thermometric inconvenience.
In addition, the material cost needed for whole device is relatively low, and the cost of whole device more than 2000 yuan, therefore can not can make multiple microwave annealing pond, can realize parallel microwave annealing in actual use according to a preliminary estimate.Compare Muffle furnace annealing, parallel microwave annealing can save a large amount of time.Such as: utilize Muffle furnace to anneal, from intensification, be annealed to cooling, usually need to be no less than 4h, and with microwave annealing, the time of usually annealing in microwave, enough (directly heated the functional stuffing of filling by microwave, this mode of heating energy directly heating function material itself, heated more efficient than Muffle furnace by heat conducting mode at 40min; And, there is part microwave can act directly on sample surfaces through top cover, sample is directly made to heat up, thus can annealing time be shortened), microwave annealing device after annealing also can be placed in cool-bag and realize postponing to anneal (namely passing through the good effect of heat insulation of moist closet, realize in microwave annealing pond, keeping the temperature needed for annealing for a long time, in a disguised form extend annealing time).This means when batch samples is annealed, the actual required time of microwave annealing only have Muffle furnace to anneal 1/6.
Operation using method:
First according to the actual requirement of experiment, use the hybrid particles of SiC particle or SiC and other materials to fill the hollow bulb in inner microwave annealing pond, and housing is put in inner microwave annealing pond, in the middle of both, use SiO
2particle is filled.Silica crucible is placed in microwave annealing pond bottom centre position subsequently, will the sample of microwave annealing be treated extremely thereon.Finally cover the top cover of compound glass.
Afterwards, just whole microwave annealing pool device can be put into microwave generator, carry out relevant microwave annealing research.As the actual annealing temperature in microwave annealing pond need be detected, infrared optical fiber then can be used to aim at compound glass top cover, infrared ray directly can measure the actual temperature of inside, microwave annealing pond through glass roof, the thermal loss general temperature sensing means can being avoided like this to need switch microwave annealing pond top cover cause.
Although content of the present invention has done detailed introduction by above preferred embodiment, will be appreciated that above-mentioned description should not be considered to limitation of the present invention.After those skilled in the art have read foregoing, for multiple amendment of the present invention and substitute will be all apparent.Therefore, protection scope of the present invention should be limited to the appended claims.
Claims (10)
1. a microwave annealing device, is characterized in that, this device comprises:
Housing (10),
Be placed on the microwave annealing pond (20) in described housing (10);
Be arranged on described housing (10) with microwave annealing pond (20) top for closing the top cover (30) in microwave annealing pond (20);
Wherein, described microwave annealing pond (20) is for comprising the container of a hollow bulb (21), and the bottom of this container is provided with silica crucible (22), for placing annealing specimen (1).
2. microwave annealing device as claimed in claim 1, is characterized in that, described housing (10) and microwave annealing pond (20) are made by high-temperature explosion-proof glass.
3. microwave annealing device as claimed in claim 2, is characterized in that, described housing (10) and microwave annealing pond (20) are by resistant to elevated temperatures high-purity Si O
2glass is made.
4. microwave annealing device as claimed in claim 1, is characterized in that, between described housing (10) and microwave annealing pond (20), also indwelling has space part (40), for filling functional stuffing; This functional stuffing refer to have wave transparent, insulation, heat insulation in the material of any one or more than one function.
5. microwave annealing device as claimed in claim 4, is characterized in that described functional stuffing selects SiO
2or quartz sand.
6. microwave annealing device as claimed in claim 1, it is characterized in that, described top cover (30) is made up of some layers of heatproof glassy layer.
7. microwave annealing device as claimed in claim 6, it is characterized in that, the diameter of the outermost layer heatproof glassy layer of described top cover (30) is greater than the external diameter of housing (10).
8. microwave annealing device as claimed in claim 1, is characterized in that, fills SiC particle in described hollow bulb (21).
9. microwave annealing device as claimed in claim 8, is characterized in that, in described hollow bulb (21), also doping is filled with other functional materials, to realize microwave annealing to differing dielectric constant material and sintering.
10. microwave annealing device as claimed in claim 8, is characterized in that, described microwave annealing pond (20) is also provided with SiC lid (23).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510529534.8A CN105185733B (en) | 2015-08-26 | 2015-08-26 | A kind of microwave annealing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510529534.8A CN105185733B (en) | 2015-08-26 | 2015-08-26 | A kind of microwave annealing device |
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| CN105185733A true CN105185733A (en) | 2015-12-23 |
| CN105185733B CN105185733B (en) | 2019-07-05 |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101323536A (en) * | 2008-07-11 | 2008-12-17 | 中国科学院上海硅酸盐研究所 | Boron nitride porous ceramic thermal insulation material, preparation and use thereof |
| TW200937531A (en) * | 2007-09-17 | 2009-09-01 | Dsgi Inc | System for and method of microwave annealing semiconductor material |
| CN201586527U (en) * | 2009-06-30 | 2010-09-22 | 南京信息工程大学 | Holding device of microwave sample sintering furnace |
| CN102404891A (en) * | 2010-09-14 | 2012-04-04 | 东京毅力科创株式会社 | Microwave irradiation device and microwave irradiation method |
| CN103021907A (en) * | 2011-09-26 | 2013-04-03 | 东京毅力科创株式会社 | Microwave processing apparatus and method for processing object to be processed |
| CN203893678U (en) * | 2014-05-27 | 2014-10-22 | 华北电力大学 | Microwave sintering assist container |
| CN104812115A (en) * | 2015-04-20 | 2015-07-29 | 石河子大学 | Microwave heating device and method |
-
2015
- 2015-08-26 CN CN201510529534.8A patent/CN105185733B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200937531A (en) * | 2007-09-17 | 2009-09-01 | Dsgi Inc | System for and method of microwave annealing semiconductor material |
| CN101323536A (en) * | 2008-07-11 | 2008-12-17 | 中国科学院上海硅酸盐研究所 | Boron nitride porous ceramic thermal insulation material, preparation and use thereof |
| CN201586527U (en) * | 2009-06-30 | 2010-09-22 | 南京信息工程大学 | Holding device of microwave sample sintering furnace |
| CN102404891A (en) * | 2010-09-14 | 2012-04-04 | 东京毅力科创株式会社 | Microwave irradiation device and microwave irradiation method |
| CN103021907A (en) * | 2011-09-26 | 2013-04-03 | 东京毅力科创株式会社 | Microwave processing apparatus and method for processing object to be processed |
| CN203893678U (en) * | 2014-05-27 | 2014-10-22 | 华北电力大学 | Microwave sintering assist container |
| CN104812115A (en) * | 2015-04-20 | 2015-07-29 | 石河子大学 | Microwave heating device and method |
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| CN105185733B (en) | 2019-07-05 |
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