CN105185733B - A kind of microwave annealing device - Google Patents
A kind of microwave annealing device Download PDFInfo
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- CN105185733B CN105185733B CN201510529534.8A CN201510529534A CN105185733B CN 105185733 B CN105185733 B CN 105185733B CN 201510529534 A CN201510529534 A CN 201510529534A CN 105185733 B CN105185733 B CN 105185733B
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- microwave annealing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L21/67098—Apparatus for thermal treatment
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Abstract
The invention discloses a kind of microwave annealing devices, which includes: shell；It is placed on the intracorporal microwave annealing pond of the shell；Top cover at the top of the shell and microwave annealing pond is set, for closing microwave annealing pond；Wherein, which is the container comprising a hollow portion, and the bottom of the container is provided with silica crucible, for placing annealing specimen.Microwave annealing device low manufacture cost provided by the invention, good heat insulating, thermometric is convenient, flexibly can realize microwave annealing and sintering by the substance to differing dielectric constant；Moreover, parallel microwave annealing may be implemented in the device of the invention, Muffle furnace annealing is compared, can be saved a large amount of time.
Description
Technical field
The invention belongs to semiconductor fields, are related to a kind of annealing technology；In particular to a kind of microwave annealing device,
It is sintered for multiphase mixing material.
Background technique
Microwave annealing technology is a kind of newer annealing technology, oneself is through being applied to grinding for several semiconductor fields now
Study carefully.But this current technology is not applied in industrial production by mature also, and dedicated annealing device is existing mostly by each research unit
It is voluntarily assembled with each colleges and universities by actual requirement.It is bad that existing microwave annealing device has been primarily present thermal insulation property, annealing heating
Mode is single, and sample loads the problems such as inconvenient with thermometric, causes big inconvenience to research microwave annealing.
Summary of the invention
The technical problem to be solved by the present invention is to thermal insulation property during microwave annealing is bad, heating mode list of annealing
One, sample loads the problem with thermometric inconvenience.
In order to achieve the above objectives, the present invention provides a kind of microwave annealing device, which includes:
Shell,
It is placed on the intracorporal microwave annealing pond of the shell；
Top cover at the top of the shell and microwave annealing pond is set, for closing microwave annealing pond；
Wherein, the microwave annealing pond is the container comprising a hollow portion, and the bottom of the container is provided with silica crucible,
For placing annealing specimen.
Above-mentioned microwave annealing device, wherein the shell is made with microwave annealing pond of high-temperature explosion-proof glass.
Above-mentioned microwave annealing device, wherein the shell and microwave annealing pond is by high-purity Si O resistant to high temperature2Glass
Glass is made, and has good microwave effect.
Above-mentioned microwave annealing device, wherein also indwelling has space part between the shell and microwave annealing pond, is used for
Fill functional stuffing.The functional stuffing refer to wave transparent, heat preservation, it is heat-insulated in any one or more than one function material
Material.Preferably, which is to select SiO2.Using not inhaling microwave, SiO resistant to high temperature2It is particles filled, by saturating in gap
Microwave, the good air of heat-proof quality realize heat preservation, finally can be inexpensive, and microwave is realized while simple, is kept the temperature, high temperature resistant
Function.
Above-mentioned microwave annealing device, wherein the top cover is made of several layers heatproof glassy layer, is protected keeping good
While warm nature energy, and very easily it can open and cover, and infrared light thermometric can be used.
Above-mentioned microwave annealing device, wherein the diameter of the outermost layer heatproof glassy layer of the top cover is greater than shell
Outer diameter.
Above-mentioned microwave annealing device, wherein fill SiC particulate in the hollow portion.
Above-mentioned microwave annealing device, wherein also doping is filled with other function material in the hollow portion, to realize
Microwave annealing and sintering to differing dielectric constant substance.
Above-mentioned microwave annealing device, wherein SiC lid is additionally provided on the microwave annealing pond.
Microwave annealing device low manufacture cost provided by the invention, good heat insulating pass through functional material in hollow portion
Doping flexibly can realize microwave annealing and sintering by the substance to differing dielectric constant；Using heatproof glassy layer, in the prior art
Under level, microwave annealing pond internal temperature accurately directly can be measured using infrared radiation thermometer, thermometric is convenient；Moreover, of the invention
Device parallel microwave annealing may be implemented, compare Muffle furnace annealing, can save a large amount of time.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of microwave annealing device of the invention.
Fig. 2 is the microwave annealing pool capacity device inner heat source of microwave annealing device of the invention to flow diagram.
Fig. 3 is the schematic cross-section of microwave annealing device of the invention.
Specific embodiment
Below in conjunction with attached drawing, by specific embodiment, the invention will be further described, these embodiments are merely to illustrate
The present invention is not limiting the scope of the invention.
As shown in Figure 1, being a kind of microwave annealing device provided by the invention, which includes:
Shell 10,
It is placed on the microwave annealing pond 20 in the shell 10；
The top cover 30 of the shell 10 with 20 top of microwave annealing pond is set, for sealing microwave annealing pond 20；
Wherein, the microwave annealing pond 20 is the container comprising a hollow portion 21, and the bottom of the container is provided with quartz
Crucible 22, for placing annealing specimen 1.
In some embodiments, SiC lid 23 is additionally provided on the microwave annealing pond.
The shell is made with microwave annealing pond of high-temperature explosion-proof glass.More preferably in embodiment, the shell
High-purity Si O resistant to high temperature is selected with microwave annealing pond2Glass is made, and has good microwave effect.As inside subject
Microwave annealing pond 20 be a hollow container, wherein SiC particulate filling can be used in hollow portion 21, is absorbing extraneous microwave
After energy (microwave annealing device being placed in micro-wave oven, open micro-wave oven, energy is provided), it can be rapidly heated, can be used as heat source.
Because thus heat source can realize the free convection in microwave annealing pond in outside, if the arrow of Fig. 2 is illustrated, so that in annealing pond
Temperature homo genizing annelaing is more uniform, efficiently.Wherein, the SiC filler in the hollow portion 21 in microwave annealing pond is wanted according to actual experiment
Ask can with some other materials of mixing and doping (such as: do not absorb the SiO of microwave2Thus particle can adjust entire microwave annealing
Saturating microwave rate inside pond；Another example is: impermeable microwave when low temperature, when high temperature saturating microwave substance, may be implemented thoroughly micro- when low temperature
Wave rate is low, saturating microwave rate high annealing and sintering when high temperature), this design can flexibly the substance to differing dielectric constant be realized
Microwave annealing and sintering realize the diversification of annealing heating mode, and solving prior art annealing, heating mode is single asks
Topic.It is provided in microwave annealing pond with silica crucible, sample to be annealed is just placed on silica crucible.
In some preferably embodiments, also indwelling has space part 40 between the shell and microwave annealing pond, is used for
Fill functional stuffing.The functional stuffing refer to wave transparent, heat preservation, it is heat-insulated in any one or more than one function material
Material.Preferably, which is to select SiO2.On the one hand, SiO2Particle can saturating microwave well, it is on the other hand, empty between particle
The not moving air of gap can saturating microwave well, while being very excellent heat-barrier material again, therefore pass through filling cost phase
To lower SiO2Particle can obtain excellent wave transparent and heat insulation function simultaneously.The present invention, which uses, does not inhale microwave, resistant to high temperature
SiO2Particles filled space part 40, by microwave saturating in gap, the good air of heat-proof quality realizes heat preservation, finally can it is low at
This, realizes microwave while simple, keep the temperature, function resistant to high temperature.
In some preferably embodiments, the top cover 30 on microwave annealing pond is made of multilayer pyroceram lid, and most
The diameter of glass outer should be slightly bigger than the outer diameter (see figure 3) of microwave annealing pond insulating layer, and this design can guarantee keeping good
While good thermal insulation property, and very easily it can open and cover, simultaneously because top is made of glass, be moved back to internal temperature
After fiery temperature is higher than 300 DEG C, in the state of the art, directly can accurately it be measured in microwave annealing pond using infrared radiation thermometer
Portion's temperature, it is inconvenient with thermometric that this design solves the problems, such as that prior art sample is loaded.
Further, since material cost needed for whole device is relatively low, the cost of whole device will not surpass according to a preliminary estimate
2000 yuan are crossed, therefore multiple microwave annealing ponds can be made in actual use, parallel microwave annealing may be implemented.Compare horse
Not furnace annealing, parallel microwave annealing can save a large amount of time.Such as: it is annealed to cooling from heating using Muffle furnace annealing,
No less than 4h is usually required, and with microwave annealing, the time usually annealed in microwave (is directly added in 40min by microwave enough
The functional stuffing of heat filling, this heating method can directly heat functional material itself, than Muffle furnace by way of heat transfer
It heats highly efficient；And have part microwave that can act directly on sample surfaces through top cover, directly sample is heated up, from
And annealing time can be shortened), the microwave annealing device after annealing, which may also be placed in cool-bag, realizes that delay annealing (passes through
The good heat insulation of moist closet is realized in microwave annealing pond and keeps required temperature of annealing for a long time, when covert extension is annealed
Between).This means that the microwave annealing actually required time only has the 1/6 of Muffle furnace annealing in batch samples annealing.
Operate with method:
First, in accordance with the actual requirement of experiment, filled using the hybrid particles of SiC particulate or SiC and other materials internal micro-
The hollow portion in wave annealing pond, and internal microwave annealing pond is put into shell, SiO is used among the two2Particle is filled.With
Silica crucible is placed in microwave annealing bottom of pond portion center afterwards, by the sample of microwave annealing to thereon.It finally covers more
The top cover of layer glass.
Later, entire microwave annealing pool device can be put into microwave generator, carries out related microwave annealing research.Such as
The practical annealing temperature in microwave annealing pond need to be detected, then infrared optical fiber alignment compound glass top cover can be used, infrared ray can
The actual temperature being directed through inside glass roof measurement microwave annealing pond, can need to switch micro- to avoid general temperature sensing means in this way
Thermal loss caused by wave annealing pond top cover.
It is discussed in detail although the contents of the present invention have passed through above preferred embodiment, but it should be appreciated that above-mentioned
Description is not considered as limitation of the present invention.After those skilled in the art have read above content, for of the invention
A variety of modifications and substitutions all will be apparent.Therefore, protection scope of the present invention should be limited to the appended claims.
Claims (5)
1. a kind of microwave annealing device, which is characterized in that the device includes:
Shell (10),
It is placed on the microwave annealing pond (20) in the shell (10)；
It is arranged at the top of the shell (10) and microwave annealing pond (20) for closing the top cover (30) of microwave annealing pond (20)；
Wherein, the microwave annealing pond (20) is the container comprising a hollow portion (21), and the bottom of the container is provided with quartz
Crucible (22), for placing annealing specimen (1)；Filling SiC particulate and other functional materials in the hollow portion (21), with reality
The now microwave annealing to differing dielectric constant substance and sintering；SiC lid (23) is additionally provided on the microwave annealing pond (20)；
The top cover (30) is made of several layers heatproof glassy layer；The outermost layer heatproof glassy layer of the top cover (30) it is straight
Diameter is greater than the outer diameter of shell (10).
2. microwave annealing device as described in claim 1, which is characterized in that the shell (10) and microwave annealing pond (20)
It is made of high-temperature explosion-proof glass.
3. microwave annealing device as claimed in claim 2, which is characterized in that the shell (10) and microwave annealing pond (20)
By high-purity Si O resistant to high temperature2Glass is made.
4. microwave annealing device as described in claim 1, which is characterized in that in the shell (10) and microwave annealing pond (20)
Between also indwelling have space part (40), for filling functional stuffing；The functional stuffing refer to wave transparent, heat preservation, it is heat-insulated in appoint
The material for one or more kinds of functions of anticipating.
5. microwave annealing device as claimed in claim 4, it is characterised in that the functional stuffing selects SiO2Or quartz sand.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510529534.8A CN105185733B (en) | 2015-08-26 | 2015-08-26 | A kind of microwave annealing device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510529534.8A CN105185733B (en) | 2015-08-26 | 2015-08-26 | A kind of microwave annealing device |
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| CN105185733A CN105185733A (en) | 2015-12-23 |
| CN105185733B true CN105185733B (en) | 2019-07-05 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101323536A (en) * | 2008-07-11 | 2008-12-17 | 中国科学院上海硅酸盐研究所 | Boron nitride porous ceramic thermal insulation material, preparation and use thereof |
| CN201586527U (en) * | 2009-06-30 | 2010-09-22 | 南京信息工程大学 | Holding device of microwave sample sintering furnace |
| CN203893678U (en) * | 2014-05-27 | 2014-10-22 | 华北电力大学 | Microwave sintering assist container |
| CN104812115A (en) * | 2015-04-20 | 2015-07-29 | 石河子大学 | Microwave heating device and method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI547999B (en) * | 2007-09-17 | 2016-09-01 | Ｄｓｇｉ公司 | System for and method of microwave annealing semiconductor material |
| JP5820661B2 (en) * | 2010-09-14 | 2015-11-24 | 東京エレクトロン株式会社 | Microwave irradiation device |
| JP2013069602A (en) * | 2011-09-26 | 2013-04-18 | Tokyo Electron Ltd | Microwave processor and workpiece processing method |
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- 2015-08-26 CN CN201510529534.8A patent/CN105185733B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101323536A (en) * | 2008-07-11 | 2008-12-17 | 中国科学院上海硅酸盐研究所 | Boron nitride porous ceramic thermal insulation material, preparation and use thereof |
| CN201586527U (en) * | 2009-06-30 | 2010-09-22 | 南京信息工程大学 | Holding device of microwave sample sintering furnace |
| CN203893678U (en) * | 2014-05-27 | 2014-10-22 | 华北电力大学 | Microwave sintering assist container |
| CN104812115A (en) * | 2015-04-20 | 2015-07-29 | 石河子大学 | Microwave heating device and method |
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| CN105185733A (en) | 2015-12-23 |
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