CN105180800A - High optical subdivision structure of auto-collimation grating interferometer - Google Patents
High optical subdivision structure of auto-collimation grating interferometer Download PDFInfo
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- CN105180800A CN105180800A CN201510216014.1A CN201510216014A CN105180800A CN 105180800 A CN105180800 A CN 105180800A CN 201510216014 A CN201510216014 A CN 201510216014A CN 105180800 A CN105180800 A CN 105180800A
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Abstract
The invention relates to a high optical subdivision structure of an auto-collimation grating interferometer. The structure comprises a scale grating, a first reflector and a second reflector. A measuring light beam is input to the scale grating in an angle close to the Littrow angle, and diffracted by the scale grating; diffracted light of the diffraction order -1 is placed in a first plane, input to the first reflector, reflected by the first reflector, placed in the first plane again, and then input to the scale grating also in the angle close to the Littrow angle; the measuring light beam is reflected between the scale grating and the first reflector in a reciprocating manner, input to the second reflector vertically, and returned along the original light path; and thus, an auto-collimation structure is formed. The optical subdivision time is increased to N, light is input in the angle close to the Littrow angle, design of the scale grating is simpler, and the times that the light beam is diffracted by the scale grating is increased, namely, the optical subdivision times of the grating interferometer is increased.
Description
Technical field
The present invention relates to a kind of grating interferometer, particularly a kind of high optical fine structure of autocollimation grating interferometer, this structure can increase substantially the optical fine multiple of grating interferometer.
Background technology
At present two kinds are mainly comprised to the instrument that micro-nano accurate displacement is measured: laser interferometer and grating interferometer.Laser interferometer take wavelength as benchmark, can obtain very high resolution, but is easily subject to the impact of the factor such as environment, light source due to wavelength, and its application is restricted.And grating interferometer just compensate for the shortcoming of laser interferometer, it is using screen periods as benchmark, and measurement result is not subject to the impact of environment and wavelength substantially, has been widely used in the fields such as machining tool, robot, biologic medical.
No matter be laser interferometer or grating interferometer, its resolution sizes all depends on optical fine multiple and electronic fine-grained multiple.Be limited to optical fine signal due to electronic fine-grained, when electronic fine-grained identical, optical fine multiple is higher, and its Measurement Resolution is higher.Typical grating interference instrument system at present, as the patent US5574558 of Heidenhain company, the patent US5442172 etc. of the patent US5038032 of CANON, American I BM company, its optical fine multiple is not high, is generally 2 or 4 times.Have great significance so improve optical fine multiple.The present invention can ad infinitum improve optical fine multiple in theory in the sufficiently high situation of grating efficiency, solves the problem that current grating interferometer segmentation multiple is low.
Summary of the invention
The object of the invention is to solve the low problem of current grating interferometer optical fine multiple, a kind of high optical fine structure for autocollimation grating interferometer is proposed, this structure can make measuring beam repeatedly by grating scale diffraction, thus increases substantially the optical fine multiple of grating interference instrument system.
Principle of the present invention is as follows:
The principle of grating interferometer is the displacement utilizing Grating Doppler Effect frequency displacement to calculate grating scale, described Grating Doppler Effect frequency displacement or interfere the number forming move of stripe to obtain by measuring beam and reference beam, or interfere the numbers forming move of stripes to obtain by two bundle measuring beams.Described measuring beam is the light beam through grating scale diffraction, and described reference beam is the light beam without grating scale diffraction.
The high optical fine structure of autocollimation grating interferometer of the present invention makes the measuring beam of grating interferometer with the incident grating scale of nearly Littrow angle, and Littrow angle obtains by following formula,
In formula, λ is the wavelength of measuring beam, and d is screen periods.
Technical solution of the present invention is as follows:
A high optical fine structure for autocollimation grating interferometer, feature is that its formation comprises: scale grating, the first catoptron and the second catoptron;
If the plane that the first plane is formed for measuring beam and scale grating grid, the plane that second plane is formed for scale grating normal and scale grating grid, the angle of the first described plane and the second described plane is Littrow angle, and the 3rd plane is the plane that scale grating normal and grating vector are formed;
The reflecting surface of the first described catoptron is perpendicular to the first described plane, and the reflecting surface of the second described catoptron is perpendicular to the diffraction light direction through scale grating the N time diffraction, and wherein 2N is that measuring beam is by total diffraction number of times of scale optical grating diffraction;
Described measuring beam incides described scale grating first with nearly Littrow angle, through scale optical grating diffraction, the order of diffraction time is that the diffraction light of-1 is in the first plane, the first described catoptron should be incided by-1 grade diffraction light, after the first catoptron reflection still in the first plane, and again incide on scale grating with nearly Littrow angle, measuring beam is so made to come and go reflection between scale grating and the first catoptron, after finally impinging perpendicularly on the second catoptron, measuring beam returns along original optical path, and total forms autocollimation structure.
Described nearly Littrow angle refers to that the measuring beam be in the first plane departs from the 3rd plane angle.
Further, the present invention also comprises: the 3rd catoptron and the 4th catoptron;
The 3rd described catoptron and the first described catoptron with the perpendicular plane of described scale grating for axle specular, the 4th described catoptron and the second described catoptron with the perpendicular plane of described scale grating for axle specular;
Two bundle measuring beams with the perpendicular plane of described scale grating for axle specular, and incide described scale grating first with nearly Littrow angle respectively, through scale optical grating diffraction, the order of diffraction time is that the diffraction light of-1 is in the first plane, the first described catoptron and the 3rd catoptron should be incided respectively by-1 grade diffraction light, through the first catoptron, after 3rd catoptron reflection still in the first plane, and again incide on scale grating with nearly Littrow angle, so make measuring beam at scale grating and the first catoptron, reflection is come and gone between scale grating and the 3rd catoptron, after finally vertically inciding the second catoptron and the 4th catoptron respectively, measuring beam returns along original optical path respectively, total forms autocollimation structure.
Especially, it is the autocollimation grating interferometer that two bundles measure light formation that the present invention is applicable to interference fringe, as long as increase the 3rd catoptron and the 4th catoptron, the situation that the 3rd catoptron is placed with the 4th catoptron is identical with the situation that the second catoptron is placed with the first catoptron.First measuring beam comes and goes reflection and finally impinges perpendicularly on the second catoptron and return along original optical path between scale grating and the first catoptron, and the second measuring beam is then that roundtrip finally impinging perpendicularly on the 4th catoptron returns along original optical path between scale grating and the 3rd catoptron.
Especially, when each nearly Littrow angle is incident measuring beam depart from the 3rd plane low-angle can equal can also be unequal.
Especially, what the present invention adopted is incident with nearly Littrow angle, and nearly repeatedly Bragg angle also can be adopted incident.M time Bragg angle is,
In formula, m is the order of diffraction time.
Compared with prior art, technique effect of the present invention:
The present invention makes measuring beam incide on scale grating with nearly Littrow angle, makes measuring beam by scale grating repeatedly diffraction, thus reach the effect of high optical fine by catoptron.From Grating Doppler Effect frequency shift effect, incident beam through N time-1 grade time diffraction, then produces N times of Doppler shift to measuring beam on scale grating, and optical fine multiple can be made to be increased to N doubly.Especially, the present invention adopts nearly Littrow angle incident, scale Grating Design can be made to make more easy, because grating easily obtains high-diffraction efficiency when Littrow angle is incident, mean and can increase the number of times of measuring beam through scale optical grating diffraction, namely increase the multiple of grating interferometer optical fine.Especially, the present invention only adopts two mirror design height optical fine structures, and structure is simple, economical and practical.
Accompanying drawing explanation
Fig. 1 is the high optical fine block diagram of autocollimation grating interferometer
Fig. 2 is the high optical fine block diagram of another kind of autocollimation grating interferometer
Fig. 3 is the schematic diagram of the high optical fine unit embodiment 1 of application autocollimation grating interferometer
Fig. 4 is the schematic diagram of the high optical fine unit embodiment 2 of application autocollimation grating interferometer
Fig. 5 is the schematic diagram of the high optical fine unit embodiment 3 of application autocollimation grating interferometer
Embodiment
The high optical fine structure of autocollimation grating interferometer of the present invention can be used in the structure of all autocollimation grating interferometers, LASER Light Source can adopt single-frequency laser light source, also dual-frequency laser source can be adopted, interference signal can be that two bundles measure light formation, also can be that measuring beam and reference beam interfere formation.Below in conjunction with embodiment and accompanying drawing, the invention will be further described, but should not limit the scope of the invention with this.
A kind of high optical fine structure 30 of autocollimation grating interferometer as shown in Figure 1, is mainly used in the grating interferometer of measuring beam and reference beam formation interference fringe.This structure comprises: grating scale 1, first catoptron 2, second catoptron 3.After the incident beam 41 of measuring beam incides described scale grating 1 first, through scale grating 1 diffraction, diffraction light through first catoptron 2 reflect after still in the first plane, again incide on scale grating 1 with nearly Littrow angle, so make measuring beam come and go reflection between scale grating 1 and the first catoptron 2, finally impinge perpendicularly on the second catoptron 3, measuring beam will return along original optical path and form outgoing beam 42, light beam 42 and light beam 41 conllinear, but the direction of propagation is contrary.Total forms autocollimation structure.Especially, when each nearly Littrow angle is incident measuring beam depart from the 3rd plane low-angle can equal can also be unequal.The outgoing beam 42 of measuring beam merges together formation interference fringe with reference beam after the structure of follow-up grating interference, can calculate Doppler shift, thus obtain the displacement of grating by interference fringe.The feature of this structure is, only has a branch of measuring beam, and this fully can alleviate the burden that Grating Design makes, and only needs the diffraction light high-diffraction efficiency of the light beam of an optimization polarization direction.
The high optical fine structure 31 of another kind of autocollimation grating interferometer as shown in Figure 2, is mainly used in two bundles and measures in the grating interferometer of light formation interference fringe.This structure comprises: grating scale 1, first catoptron 2, second catoptron the 3, three catoptron the 4, four catoptron 5.After the incident beam 41 of the first measuring beam incides described scale grating 1 first, through scale grating 1 diffraction, diffraction light is after the first catoptron 2 reflects, again incide on scale grating 1 with nearly Littrow angle, measuring beam is so made to come and go reflection between scale grating 1 and the first catoptron 2, finally impinge perpendicularly on the second catoptron 3, first measuring beam will return the outgoing beam 42 of formation first measuring beam along original optical path, the outgoing beam 42 of the first measuring beam and incident beam 41 conllinear of the first measuring beam, but the direction of propagation is contrary.After the incident beam 43 of the second measuring beam incides described scale grating 1 first, through scale grating 1 diffraction, diffraction light is after the 3rd catoptron 4 reflects, again incide on scale grating 1 with nearly Littrow angle, measuring beam is so made to come and go reflection between scale grating 1 and the 3rd catoptron 4, finally impinge perpendicularly on the 4th catoptron 5, second measuring beam will return the outgoing beam 44 of formation second measuring beam along original optical path, the outgoing beam 44 of the second measuring beam and incident beam 43 conllinear of the second measuring beam, but the direction of propagation is contrary.Total forms autocollimation structure.Especially, when each nearly Littrow angle is incident measuring beam depart from the 3rd plane low-angle can equal can also be unequal.The outgoing beam 42 of the first measuring beam and the outgoing beam 44 of the second measuring beam merge together formation interference fringe after the subsequent structural of grating interferometer, can calculate Doppler shift, thus obtain the displacement of grating by interference fringe.The feature of this structure is, can make full use of two bundles and measure the direction of light Doppler shift after scale optical grating diffraction on the contrary, make optical fine multiple add one times.
Fig. 3 is the principle schematic of the high optical fine examples of components 1 of application autocollimation grating interferometer, and light source is dual-frequency laser source, and interference signal is that measuring beam and reference beam are formed.Two-frequency laser 51 sends orthogonal double frequency linearly polarized light, two-beam is divided equally into through non-polarizing beamsplitter 52, interference signal is formed after a branch of the first analyzer 59 by placing with orthogonal double frequency linearly polarized light 45 degree, and received, as the reference signal of double frequency difference interference art by the first photodetector 61; Another bundle is divided into transmission P light and reflection S light by polarization beam apparatus 52, P light is as measuring beam, S light is as reference light beam, measuring beam incides the high optical fine structure 30 of autocollimation grating interferometer as shown in Figure 1 by the 5th catoptron 56, and the incident beam 41 of measuring beam becomes the outgoing beam 42 of measuring beam after high optical fine structure.Reference beam returns through impinging perpendicularly on the 6th former road of catoptron 57, and with the high optical fine structure outgoing through autocollimation grating interferometer successively through light beam 42 co-incident of the 5th catoptron 56, polarization splitting prism 53 to unpolarized spectroscope 52, measuring beam and the light of reference beam through unpolarized spectroscope 52 reflecting part form interference signal after 45 degree of second analyzers 58 placed, and received, as the measuring-signal of double frequency difference interference art by the second photodetector 60; Above-mentioned reference signal and measuring-signal can obtain the transversal displacement amount of scale diffraction grating via data acquisition and processing (DAP) and control module 62 process.
Fig. 4 is the principle schematic of the high optical fine examples of components 2 of application autocollimation grating interferometer, and light source is dual-frequency laser source, and interference signal is that two bundles measure light formation.Two-frequency laser 51 sends orthogonal double frequency linearly polarized light, two-beam is divided equally into through non-polarizing beamsplitter 52, interference signal is formed after a branch of the first analyzer 59 by placing with orthogonal double frequency linearly polarized light 45 degree, and received, as the reference signal of double frequency difference interference art by the first photodetector 61, another bundle is divided into transmission P light and reflection S light by polarization beam apparatus 53, circularly polarized light is transformed to respectively by the first quarter-wave plate 54 and the second quarter-wave plate 55, the high optical fine structure 31 of autocollimation grating interferometer is as shown in Figure 2 incided again by the 5th catoptron 56 and the 6th catoptron 57, the incident beam 41 of the first measuring beam and the incident beam 43 of the second measuring beam become the outgoing beam 42 of the first measuring beam and the outgoing beam 44 of the second measuring beam after high optical fine structure, two outgoing beams are again through the first catoptron 56 and the second catoptron 57, first quarter-wave plate 54 and the second quarter-wave plate 55 are transformed to the linearly polarized light orthogonal with former polarization state, after 45 degree of second analyzers 58 placed, interference signal is formed through polarization splitting prism 53 co-incident, and received by the second photodetector 60, as the measuring-signal of double frequency difference interference art, above-mentioned reference signal and measuring-signal can obtain the transversal displacement amount of scale diffraction grating via data acquisition and processing (DAP) and control module 62 process.
Fig. 5 is the principle schematic of the high optical fine examples of components 3 of application autocollimation grating interferometer, and light source is single-frequency laser light source, and interference signal is that two bundles measure light formation.Single-frequency laser 71 sends linearly polarized light, P light and S light is divided into through polarization beam apparatus 53, circularly polarized light is transformed to respectively by the first quarter-wave plate 54 and the second quarter-wave plate 55, the high optical fine structure 31 of the autocollimation grating interferometer shown in Fig. 2 is incided again by the 5th catoptron 56 and the 6th catoptron 57, the incident beam 41 of the first measuring beam and the incident beam 43 of the second measuring beam become the outgoing beam 42 of the first measuring beam and the outgoing beam 44 of the second measuring beam after high optical fine structure, two outgoing beams are again through the 5th catoptron 56 and the 6th catoptron 57, first quarter-wave plate 54 and the second quarter-wave plate 55 are transformed to the linearly polarized light orthogonal with former polarization state, through polarization splitting prism 53, jointly enter in dotted line frame by quarter-wave plate 72, non-polarizing beamsplitter 73, first polarization beam apparatus 75, second polarization beam apparatus 74 (45 degree rotate placement) and the first detector 76, second detector 78, 3rd detector 77, the polarization phase-shifting that 4th detector 79 forms interferes photoelectric detection unit, form the detectable signal of four tunnel phase shift 90 °.And then process the transversal displacement that can obtain scale grating by data acquisition and processing (DAP) and control module 80.
Claims (3)
1. a high optical fine structure for autocollimation grating interferometer, is characterised in that its formation comprises: scale grating (1), the first catoptron (2) and the second catoptron (3);
If the plane that the first plane (α) is formed for measuring beam and scale grating grid, the plane that second plane (β) is formed for scale grating normal and scale grating grid, the angle of the first described plane and the second described plane is Littrow angle (θ), the plane that the 3rd plane (γ) is formed for scale grating normal and grating vector;
The reflecting surface of described the first catoptron (2) is perpendicular to described the first plane (α), the reflecting surface of described the second catoptron (3) is perpendicular to the diffraction light direction through scale grating the N time diffraction, and wherein 2N is that measuring beam is by total diffraction number of times of scale optical grating diffraction;
Described measuring beam incides described scale grating (1) first with nearly Littrow angle, through scale grating (1) diffraction, the order of diffraction time is that the diffraction light of-1 is in the first plane, described the first catoptron (2) should be incided by-1 grade diffraction light, after the first catoptron reflection still in the first plane, and again incide on scale grating with nearly Littrow angle, measuring beam is so made to come and go reflection between scale grating and the first catoptron, after finally impinging perpendicularly on the second catoptron, measuring beam returns along original optical path, total forms autocollimation structure.
2. the high optical fine structure of autocollimation grating interferometer according to claim 1, is characterized in that, described nearly Littrow angle refers to that the measuring beam be in the first plane departs from the 3rd plane (γ) angle (ε).
3. the high optical fine structure of autocollimation grating interferometer according to claim 1 and 2, characterized by further comprising: the 3rd catoptron (4) and the 4th catoptron (5);
The 3rd described catoptron (4) and described the first catoptron (2) with the perpendicular plane of described scale grating for axle specular, the 4th described catoptron (5) and described the second catoptron (3) with the perpendicular plane of described scale grating for axle specular;
Two bundle measuring beams with the perpendicular plane of described scale grating for axle specular, and incide described scale grating (1) first with nearly Littrow angle respectively, through scale grating (1) diffraction, the order of diffraction time is that the diffraction light of-1 is in the first plane, described the first catoptron (2) and the 3rd catoptron (4) should be incided respectively by-1 grade diffraction light, through the first catoptron, after 3rd catoptron reflection still in the first plane, and again incide on scale grating with nearly Littrow angle, so make measuring beam at scale grating and the first catoptron, reflection is come and gone between scale grating and the 3rd catoptron, after finally vertically inciding the second catoptron and the 4th catoptron respectively, measuring beam returns along original optical path respectively, total forms autocollimation structure.
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| CN113865480A (en) * | 2021-09-18 | 2021-12-31 | 桂林电子科技大学 | Heterodyne grating interferometer reading head system signal analysis method based on ZEMAX simulation |
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