CN105174200A - 一种新型谐振式薄膜热电变换器的结构及制作方法 - Google Patents
一种新型谐振式薄膜热电变换器的结构及制作方法 Download PDFInfo
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- CN105174200A CN105174200A CN201510538523.6A CN201510538523A CN105174200A CN 105174200 A CN105174200 A CN 105174200A CN 201510538523 A CN201510538523 A CN 201510538523A CN 105174200 A CN105174200 A CN 105174200A
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CN201510538523.6A CN105174200B (zh) | 2015-08-28 | 2015-08-28 | 一种新型谐振式薄膜热电变换器的结构及制作方法 |
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CN201510538523.6A CN105174200B (zh) | 2015-08-28 | 2015-08-28 | 一种新型谐振式薄膜热电变换器的结构及制作方法 |
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CN105174200A true CN105174200A (zh) | 2015-12-23 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106449960A (zh) * | 2016-07-01 | 2017-02-22 | 中国计量大学 | 一种基于静电激励/电容检测微桥谐振器的薄膜热电变换器的结构与制作方法 |
CN108828297A (zh) * | 2018-08-27 | 2018-11-16 | 中国计量大学 | 一种基于谐振式薄膜热电变换器的高精度电压/电流表 |
CN109987570A (zh) * | 2019-03-29 | 2019-07-09 | 中国计量大学 | 基于电磁激励单晶硅谐振梁的热电变换器结构及制造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US4346291A (en) * | 1977-10-17 | 1982-08-24 | John Fluke Mfg. Co., Inc. | Thermally isolated monolithic semiconductor die |
SU1629860A1 (ru) * | 1988-07-29 | 1991-02-23 | Мгту Им.Н.Э.Баумана | Преобразователь ток-частота |
CN101566643B (zh) * | 2008-04-22 | 2012-05-09 | 中国计量学院 | 一种基于双材料微悬臂梁的薄膜热电变换器的结构及制作方法 |
CN101566506B (zh) * | 2008-04-22 | 2013-07-03 | 中国计量学院 | 一种基于微型桥谐振器的薄膜热电变换器的结构及制作方法 |
CN101872797A (zh) * | 2010-04-13 | 2010-10-27 | 中国计量学院 | 一种基于微桥谐振器的新型红外探测器结构及制作方法 |
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- 2015-08-28 CN CN201510538523.6A patent/CN105174200B/zh not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106449960A (zh) * | 2016-07-01 | 2017-02-22 | 中国计量大学 | 一种基于静电激励/电容检测微桥谐振器的薄膜热电变换器的结构与制作方法 |
CN106449960B (zh) * | 2016-07-01 | 2018-12-25 | 中国计量大学 | 一种基于静电激励/电容检测微桥谐振器的薄膜热电变换器的结构与制作方法 |
CN108828297A (zh) * | 2018-08-27 | 2018-11-16 | 中国计量大学 | 一种基于谐振式薄膜热电变换器的高精度电压/电流表 |
CN108828297B (zh) * | 2018-08-27 | 2021-02-02 | 中国计量大学 | 一种基于谐振式薄膜热电变换器的高精度电压/电流表 |
CN109987570A (zh) * | 2019-03-29 | 2019-07-09 | 中国计量大学 | 基于电磁激励单晶硅谐振梁的热电变换器结构及制造方法 |
CN109987570B (zh) * | 2019-03-29 | 2022-11-25 | 中国计量大学 | 基于电磁激励单晶硅谐振梁的热电变换器结构及制造方法 |
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Inventor after: Wang Jian Inventor after: Li Yanxiang Inventor after: Wu Lei Inventor after: Xu Xidong Inventor after: Zhao Renxiu Inventor after: Wei Lirong Inventor after: Chen Shuai Inventor after: Wang Peng Inventor after: Gao Jiancheng Inventor before: Liu Lixia |
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