CN105163873B - Wet process chamber and the wet process device for including it - Google Patents
Wet process chamber and the wet process device for including it Download PDFInfo
- Publication number
- CN105163873B CN105163873B CN201480015848.XA CN201480015848A CN105163873B CN 105163873 B CN105163873 B CN 105163873B CN 201480015848 A CN201480015848 A CN 201480015848A CN 105163873 B CN105163873 B CN 105163873B
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- China
- Prior art keywords
- wet process
- process chamber
- chamber according
- housing
- side part
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- 238000000034 method Methods 0.000 title claims abstract description 176
- 230000008569 process Effects 0.000 title claims abstract description 168
- 239000000463 material Substances 0.000 claims abstract description 106
- 230000000903 blocking effect Effects 0.000 claims abstract description 56
- 238000007747 plating Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims description 2
- 230000003749 cleanliness Effects 0.000 abstract description 3
- 230000008859 change Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000002657 fibrous material Substances 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/004—Sealing devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Weting (AREA)
- Braking Arrangements (AREA)
- Ink Jet (AREA)
Abstract
The present invention provides a kind of wet process chamber and includes its wet process device, and the wet process chamber is the wet process chamber for carrying out the wet process to the material that is processed, comprising：Housing, it possesses the more than one opening portion formed for the processed material by way of；And blocking unit, it is configured in a manner of corresponding with the opening portion, and possesses the slit formed for the processed material by way of；And the blocking unit has the size more than the opening portion, the slit of the blocking unit has the width less than the opening portion.Thus, it can easily keep the cleanliness factor of wet process chamber interior and critically control wet process.
Description
Technical field
The present invention relates to a kind of wet process chamber (chamber) and its wet process device is included, more specifically,
Be related to it is a kind of carry out to be processed material wet process when, prevent pollute wet process chamber inside and improve wet process
The wet process chamber of characteristic and the wet process device for including it.
Background technology
Wet process is used to manufacture various products, for example, wet process includes manufacturing process for cleaning, plating processing procedure or etch process
Deng, in addition, can also be use solution various processing procedures.
Particularly, when carrying out the accurate processing procedure of other machine components such as various electric products and electronic product, use
Wet process.
Fig. 1 is the figure for being diagrammatically denoted by the process comprising conventional wet process, and Fig. 2 is diagrammatically denoted by Fig. 1
The figure of one wet process chamber.
Reference picture 1 and Fig. 2, represent to move processed material 1 and by multiple chambers 11,12,13 along a direction, i.e. X1 directions
And to the situation about being handled of material 1 that is processed.
Processed material 1 can be that should carry out the various shapes such as object, the i.e. film (film), substrate, chip (wafer) of wet process
State.
Chamber 11 is the chamber for carrying out wet process, possesses the more than one opening portion 11a passed in and out for processed material 1.
In addition, although not shown, but processed material 1 can carry out other wet process before by chamber 11.
As shown in Fig. 2 in processed material 1 by the opening portion 11a of chamber 11 to put into the inside of chamber 11 when, with
The different solution of the solution used in wet process that is carried out in chamber 11, i.e. impure solution can by opening portion 11a and with
Processed material 1 is together flowed into chamber 11.
That is, as described above, processed material 1 can pass through more than one wet process before by chamber 11, and carrying out
The solution used during this wet process remains in processed material 1.In addition, other impure solution can be remained in processed material 1.
Also, the solution of this residual is flowed into chamber 11 by opening portion 11a.
Particularly, when making chamber 11, be difficult to because of the difficulty of making according to make opening portion 11a have with it is processed
The mode of microsize manufactures corresponding to the thickness of material 1.
Therefore, when processed material 1 flows into opening portion 11a, impure solution is flowed into chamber 11 by opening portion 11a
Portion and polluted inside chamber 11 by impure solution.As a result, wet process characteristic decline and wet process characteristic condition change and
Desirably critically control the situation of wet process limited.
The content of the invention
Invent the problem to be solved
The present invention can provide it is a kind of prevent pollute wet process chamber inside and improve the wet type system of wet process characteristic
Journey chamber and the wet process device for including it.
The means to solve the problem
The present invention discloses a kind of wet process chamber, and it is the wet process for carrying out the wet process to the material that is processed
Chamber, comprising：Housing (housing), it possesses the more than one opening formed for the processed material by way of
Portion；And blocking unit, it is configured in a manner of corresponding with the opening portion, and is possessed for processed material shape by way of
Into slit (slit)；And the blocking unit has the size more than the opening portion, the slit of the blocking unit, which has, to be less than
The width of the opening portion.
In the present invention, the blocking unit can possess：Outside portion, it is configured to the outside of the housing；Inside portion, its with
The outside portion is corresponding, and is configured to the inner side of the housing；And joint portion, it ties the outside portion and the inside portion
Close.
In the present invention, the blocking unit can be can be attached to the housing and from the shell by the joint portion
The mode of body removal is formed.
In the present invention, the outside portion and inside portion can possess the first side configured in a manner of opposite to one another respectively
Part and second side part.
In the present invention, the outside portion and inside portion can possess to be formed in the first side part and second side
Slit between face component.
In the present invention, the slit of the blocking unit can be overlapping with the respective slit in the outside portion and inside portion.
In the present invention, the first side part and the second side part are formed in each side opposite to one another
Groove, the groove can form the slit of the outside portion and the inside portion.
In the present invention, the first side part of the outside portion can be by the joint portion and with the inside portion
Side face component combines, and the second side part of the outside portion can be by the joint portion and the second side with the inside portion
Face component combines.
In the present invention, the outside portion can possess groove (groove) corresponding with the joint portion, the inside portion
Can possess through hole (through hole) corresponding with the joint portion.
In the present invention, the joint portion can be so that the outside portion to be combined with the inside portion, and is opened with described
Mode configures corresponding to oral area.
In the present invention, the outside portion can be formed as being thicker than the inside portion.
In the present invention, the length of the slit of the blocking unit can be with the length with the opening portion identical or less than institute
The mode for stating the length of opening portion is formed.
In the present invention, can also include friction portion, the friction portion with it is corresponding with the opening portion and with the blocking unit
Adjacent mode configures, and is formed in a manner of the surface with the processed material connects.
In the present invention, the friction portion can possess the first friction means configured in a manner of opposite to one another and second rub
Wipe part.
In the present invention, the friction portion can be configured in a manner of corresponding with the slit of blocking unit inside.
In the present invention, the friction portion can be configured to the inner side of the housing each other.
In the present invention, the friction portion can be in roller (roll) form.
In the present invention, the opening portion and the blocking unit can be formed as follows：The general of the processed material
Carry out the processed surface of wet process towards direction parallel to the ground or it is perpendicular to the ground to and the processed material leads to
Cross the slit of the opening portion and the blocking unit.
In the present invention, interior side body can be also included, the interior side body is configured in the housing, wet to provide execution
The mode in the space of formula processing procedure is formed, and has more than one opening portion, so that the processed material passes in and out.
In the present invention, the interior side body can be case (box) form.
In the present invention, the interior side body can be in the box-shaped state without bottom surface and connect with the bottom surface of the housing.
In the present invention, the friction portion formed as follows can also be included：It is corresponding with the opening portion of the interior side body,
The inner or outer side of the interior side body is configured to, and is connected with the surface of the processed material.
In the present invention, the friction portion can possess the first friction means configured in a manner of opposite to one another and second rub
Wipe part.
In the present invention, the friction portion can be in roller form.
In the present invention, the wet process can include cleaning, plating or etch process.
In the present invention, the processed material can include membrane material, chip or substrate.
According to another aspect of the present invention, a kind of wet process device for including the wet process chamber is disclosed.
In the present invention, the feature of the wet process device can be：Comprising multiple process chambers, the process chamber
In at least any chamber be the wet process chamber.
Invention effect
The present invention wet process chamber and be easily prevented from comprising its wet process device when carrying out wet process
The pollution for the wet process chamber that it is unexpected that solution together flow into and occur with processed material.
Thus, it can easily keep the cleanliness factor of wet process chamber interior and critically control wet process.
As a result, wet process characteristic can be greatly enhanced.
Brief description of the drawings
Fig. 1 is the figure for being diagrammatically denoted by the conventional process comprising wet process.
Fig. 2 is the stereogram for the wet process chamber for being diagrammatically denoted by Fig. 1.
Fig. 3 is the stereogram for the wet process chamber for being diagrammatically denoted by one embodiment of the invention.
Fig. 4 is the side view of the gained from Fig. 3 K directions.
Fig. 5 is Fig. 3 A enlarged drawing.
Fig. 6 is the figure for only representing opening portion in Figure 5.
Fig. 7 is the figure of the gained from Fig. 4 M directions.
Fig. 8 is the profile along Fig. 5 and Fig. 7 VIII-VIII line interception.
Fig. 9 is the profile for the wet process chamber for being diagrammatically denoted by another embodiment of the present invention.
Figure 10 is Fig. 9 A enlarged drawing.
Figure 11 is the stereogram for the wet process chamber for being diagrammatically denoted by another embodiment of the present invention.
Figure 12 is the top view of the gained from Figure 11 M directions.
Figure 13 is the stereogram for the wet process chamber for being diagrammatically denoted by another embodiment of the present invention
Figure 14 is the top view for the wet process chamber for being diagrammatically denoted by another embodiment of the present invention.
Figure 15 is the top view for the wet process chamber for being diagrammatically denoted by another embodiment of the present invention.
Figure 16 is the figure of the example for the wet process device for being diagrammatically denoted by the wet process chamber using the present invention.
Embodiment
Hereinafter, referring to the drawings shown embodiments of the invention, the composition and effect of the present invention are illustrated in detail.
In the following description, in order to be clearly understood that the present invention, omit to the known technology of the feature on the present invention
Explanation.Following examples are not the interest field for limiting the present invention certainly to help to understand detailed description of the invention
Embodiment.
Herein, i) shape shown in the drawings, size, ratio, angle, number, action etc. be schematically, can somewhat to become
More.Ii) figure is represented with the sight of observer, thus the direction illustrated to figure or position can personnel according to the observation position
Put and be altered to various directions or position.Iii) even if figure number is different, can also identical symbol be used to identical part.iv)
In the case where using "comprising", " having ", " composition " etc., as long as be not used "~only ", then it can add other parts.V) with
In the case that odd number illustrates, majority also may be interpreted as.Vi) even if without using the logarithm such as " about ", " substantial ", " relative "
Value, shape, the comparison of size, position relationship etc. illustrate, and are also construed to include common error range.Vii) even with
"~rear ", "~preceding ", " secondly ", " and ", " herein ", the term such as " then ", be also not containing with limiting time position
Justice uses.Viii) in the case where illustrating the position relationship of two parts using "~on ", "~top " etc., as long as not
Use " just ", then can also be interposed more than one other parts between the two parts.Ix) using "~or ", " and/or " come
In the case of coupling part, be construed to not only individually include part, but also comprising combination, but use "~or~in
One " in the case of connecting, it is interpreted only as individually including part.
Fig. 3 is the stereogram for the wet process chamber for being diagrammatically denoted by one embodiment of the invention, and Fig. 4 is the K from Fig. 3
The side view of direction observation gained, Fig. 5 is Fig. 3 A enlarged drawing, and Fig. 6 is the figure for only representing opening portion in Figure 5, Fig. 7 be from
The figure of Fig. 4 M directions observation gained, Fig. 8 are the profiles along Fig. 5 VIII-VIII line interception.
Reference picture 3 to Fig. 8, wet process chamber 100 includes housing 101 and blocking unit 110.
Wet process chamber 100 can carry out the various wet process to the material 1 that is processed.That is, wet process chamber 100 is with can
Cleaned, etched, the mode of other various wet process such as plating is formed.
Processed material 1 can be other film forms such as substrate, chip.
Housing 101 can be in the box-shaped state similar to regular hexahedron, to carry out wet process inside it, and possess one
Opening portion 101a above.Housing 101 can possess two opening portion 101a, be flowed into by an opening portion 101a and processed material 1
Into housing 101, after wet process is carried out, flowed out by another opening portion 101a and processed material 1 from housing 101.However,
The present invention is not limited to this, can also possess certainly for housing 101 an opening portion 101a be processed material 1 pass through one opening
Portion 101a is passed in and out.
It is configured to carry out the processing procedure portion 190 of wet process in housing 101, as shown in figure 4, processing procedure portion 190 possesses this
Body component 191 and jet element 192.Body part 191 is configured to the inwall of housing 101 and stably fixed, to jet element 192
Convey the solution for carrying out wet process.This solution is ejected into processed material 1 and carries out wet type system by jet element 192
Journey.
Processing procedure portion 190 shown in Fig. 4 is one, and processing procedure portion 190 can be in various forms, such as can only have without body part
Standby jet element, and the number of jet element is also unrestricted.In addition, jet element can be configured in the various positions in housing 101.
In addition, solution can be housed in housing 101 in a manner of without jet element especially and carry out wet process.
Side of the blocking unit 110 in a manner of corresponding with the opening portion 101a of housing 101, i.e. at least overlapping with opening portion 101a
Formula configures.In addition, blocking unit 110 has the area more than opening portion 101a.
Blocking unit 110 possesses outside portion 120, inside portion 130 and joint portion 140.Outside portion 120 is configured to housing 101
Outside, it is overlapping with opening portion 101a.Inside portion 130 is configured to the inner side of housing 101, overlapping with opening portion 101a.In addition, inner side
Portion 130 is configured in a manner of corresponding with outside portion 120.Joint portion 140 is combined outside portion 120 with inside portion 130.
First, as shown in figure 5, outside portion 120 includes first side part 121, second side part 122 and slit 123.
First side part 121 forms the left side of outside portion 120, and second side part 122 forms the right side of outside portion 120
Side.Slit 123 is formed between first side part 121 and second side part 122.
Specifically, first side part 121 is in following form：In a manner of the length that length is longer than opening portion 101a compared with
Extend longly.In addition, the side of first side part 121 is in a manner of central positioned at opening portion 101a to configure, and now, first
Side members 121 have width more than specific dimensions, cross opening portion 101a so as to the opposite side of first side part 121 and
It is placed into housing 101.
Identically with first side part 121, second side part 122 is in following form：Opening portion is longer than with length
The mode of 101a length extends longlyer.In addition, the side of second side part 122 is with positioned at the central of opening portion 101a
Mode configures, and now, second side part 122 has width more than specific dimensions, another so as to second side part 122
Cross opening portion 101a and be placed into housing 101 in side.
As shown in figure 5, preferably first side part 121 and second side part 122 is in the form of being mutually symmetrical.
Slit 123 has specific length and width.That is, slit 123 has minimum width compared with the 101a of opening portion,
Preferably there is the width for the thickness for being slightly larger than processed material 1.Thus, the solution for suppressing to remain in processed material 1 is flowed into
Inside the housing 101 of wet process chamber 100.In addition, slit 123 be preferably have less than opening portion 101a or at least with opening
Length corresponding to portion 101a.
Slit 123 is formed by the configuration of first side part 121 and second side part 122.In order to form slit
123, form the groove with specific width in the side of first side part 121 and second side part 122.Then, by this
The groove of kind first side part 121 and second side part 122 is connected to each other and forms slit 123.
That is, the width of slit 123 is determined by the width and length of first side part 121 and the groove of second side part 122
Degree and length.In addition, the width of slit 123 can according to the distance between first side part 121 and second side part 122 without
Together.As shown in figure 5, first side part 121 and second side part 122 are preferably in a manner of close to greatest extent, i.e.
Configured in a manner of being adjoined one another in side.
First side part 121 and second side part 122 possess multiple groove 121a, 122a respectively.Groove 121a,
122a configures joint portion 140, in Figure 5, is expressed as being each configured with first side part 121 and second side part 122
Four grooves 121a, 122a, but groove 121a, 122a number can be according to opening portion 101a, first side parts 121 and second
The form of side members 122 and be altered to various numbers.
In addition, groove 121a, 122a have specific depth, the depth is set to according to the length of joint portion 140
Various depth.
As shown in fig. 6, opening portion 101a forms the side of housing 101 in a manner of with specific width and length,
As described above, the size of blocking unit 110 is more than opening portion 101a size.
Reference picture 7, the inside portion 130 of blocking unit 110 is illustrated.
Inside portion 130 includes first side part 131, second side part 132 and slit 133.
First side part 131 forms the right side of inside portion 130, and second side part 132 forms a left side for inside portion 130
Side.Slit 133 is formed between first side part 131 and second side part 132.
Inside portion 130 is corresponding with outside portion 120 and is combined with outside portion 120, specifically, the first side of inside portion 130
Face component 131 it is corresponding with the first side part 121 of outside portion 120 and combine, the second side part 132 of inside portion 130 with
The second side part 122 of outside portion 120 is corresponding and combines.
Specifically, the first side part 131 of inside portion 130 is in following form：It is longer than opening portion 101a's with length
The mode of length extends longlyer.In addition, the side of first side part 131 in a manner of central positioned at opening portion 101a to match somebody with somebody
Put, now, first side part 131 has width more than specific dimensions, so that the opposite side of first side part 131 is crossed
Opening portion 101a and be placed into housing 101.
Identically with first side part 131, second side part 132 is in following form：Opening portion is longer than with length
The mode of 101a length extends longlyer.In addition, the side of second side part 132 is with positioned at the central of opening portion 101a
Mode configures, and now, second side part 132 has width more than specific dimensions, another so as to second side part 132
Cross opening portion 101a and be placed into housing 101 in side.
As shown in fig. 7, first side part 131 is preferably in the form of being mutually symmetrical with second side part 132.
Slit 133 has specific length and width.That is, slit 133 has minimum width compared with the 101a of opening portion,
Preferably there is the width for the thickness for being slightly larger than processed material 1.Thus, the solution for suppressing to remain in processed material 1 is flowed into
Inside the housing 101 of wet process chamber 100.In addition, slit 133 be preferably have less than opening portion 101a or at least with opening
Length corresponding to portion 101a.
In addition, the slit 133 of inside portion 130 is corresponding with the slit 123 of outside portion 120.In addition, more preferably inside portion
130 slit 133 has the identical form of slit 123 and size with outside portion 120 and overlapped each other.
The slit 133 of inside portion 130 and 123 slit 113 that is overlapping and forming blocking unit 110 of slit of outside portion 120.
The slit 133 of inside portion 130 is formed by the configuration of first side part 131 and second side part 132.For
Formation slit 133, the groove with specific width is formed in the side of first side part 131 and second side part 132.
Then, the groove of this first side part 131 and second side part 132 is connected to each other and forms slit 133.
That is, the width of slit 133 is determined by the width and length of first side part 131 and the groove of second side part 132
Degree and length.In addition, the width of slit 133 can according to the distance between first side part 131 and second side part 132 without
Together.As shown in fig. 7, first side part 131 and second side part 132 are preferably in a manner of close to greatest extent, i.e.
Configured in a manner of being adjoined one another in side.
First side part 131 and second side part 132 possess multiple through hole 131a, 132a respectively.Through hole 131a,
132a configures joint portion 140, in the figure 7, is expressed as being each configured with first side part 131 and second side part 132
Four through holes 131a, 132a, but through hole 131a, 132a number can be according to opening portion 101a, first side parts 131 and second
The form of side members 132 and be changed to various numbers.
Through hole 131a, 132a are formed as follows：With specific width, so that joint portion 140 penetrates, and and groove
121a, 122a are corresponding.
Reference picture 8, blocking unit 110 is illustrated in further detail.
As shown in figure 8, the outside portion 120 and inside portion 130 of blocking unit 110 are combined by joint portion 140.Joint portion 140
It can be various fastening units, such as can be other various forms such as screw rod, pin (pin).In addition, corresponding with joint portion 140
Groove 121a, 122a of outside portion 120 and through hole 131a, 132a of inside portion 130 inner peripheral surface, can formed with joint portion
Flank corresponding to 140.
In addition, make joint portion 140 corresponding with opening portion 101a without overlapping with housing 101.
The first side part 121 of outside portion 120 and the first side part 131 of inside portion 130 with each other with housing 101
Side connect, and mode corresponding with opening portion 101a configures each other.Thus, the first side part 121 of outside portion 120
And the first side part 131 of inside portion 130 is separated by with specific interval each other in the 101a of opening portion, to penetrate this be separated by and
Into the mode in region configure joint portion 140.
In addition, the second side part 122 of outside portion 120 and the second side part 132 of inside portion 130 with housing
101 side adjoins one another, and mode corresponding with opening portion 101a configures each other.Thus, the second side of outside portion 120
Part 122 and the second side part 132 of inside portion 130 are separated by with specific interval each other in the 101a of opening portion, to penetrate this
The mode in the region that kind is separated by configures joint portion 140.
Joint portion 140 is configured in a manner of corresponding with opening portion 101a, therefore when configuring blocking unit 110, without in shell
Body 101 sets part especially etc..That is, joint portion 140 need not change housing only in conjunction with outside portion 120 and inside portion 130
101 design.Without forming the additional through hole for joint portion 140 in housing 101, therefore the manufacture of housing 101 is more
Easily, the issuable leak caused by through hole when housing 101 forms additional through hole is being prevented on source.In addition,
Joint portion 140 can be easily removed and from the removal blocking unit 110 of housing 101.Thus, can not design for change and by blocking unit 110
Use the housing 101 in various forms.
Consider the length of joint portion 140 and set groove 121a, 122a of outside portion 120 depth.Preferably joint portion
140 do not penetrate outside portion 120 when being attached to outside portion 120, to prevent solution from the area leakage of configuration joint portion 140.
Therefore, outside portion 120 has specific thickness, be preferably formed as thicker compared with inside portion 130 as shown in Fig. 8.
The wet process chamber 100 of the present embodiment configures blocking unit 110 in a manner of corresponding with opening portion 101a.Blocking unit
110 possess the slit 113 formed by the slit 123 of outside portion 120 and the slit 133 of inside portion 130.Also, by this narrow
Seam 113 and processed material 1 are flowed into the inside of housing 101, and wet process is carried out in housing 101.With with being not easy according to fixation
Mode corresponding to the opening portion 101a smaller formed below size, which configures, possesses the thickness that width is slightly larger than processed material 1
The blocking unit 110 of slit 113 and residual is effectively blocked to the inside stream of housing 101 is fashionable by slit 113 in processed material 1
Solution together flows into processed material 1.
Thus, prevent wet process chamber 100 from being polluted by unexpected solution, as a result can easily improve in wet process
The uniformity for the wet process that chamber 100 is carried out, realizes the accurate control of wet process.
Particularly, can easily be adhered to by that will not be impacted to the form of housing 101 and removal in a manner of form resistance
Portion 110 break to increase the efficiency of wet process chamber 100.
Fig. 9 is the profile for the wet process chamber for being diagrammatically denoted by another embodiment of the present invention, and Figure 10 is Fig. 9
A enlarged drawing.For convenience of description, illustrated, identical reference notation centered on aspect unlike the embodiments above
Number mean identical part.
Wet process chamber includes housing 101, blocking unit 110' and friction portion 150.Friction portion 150 possesses the first friction portion
The friction means 152 of part 151 and second.Friction portion 150 is corresponding with blocking unit 110' slit 113', in addition, not depart from slit
113' mode is configured to inside slit 113'.
Specifically, friction portion 150 is configured between blocking unit 110' outside portion 120' and inside portion 130'.In addition,
First friction means 151 are configured to outside portion 120' first side part 121' and inside portion 130' first side part
Between 131', the second friction means 152 are configured to the second of outside portion 120' second side part 122' and inside portion 130'
Between side members 132'.
First friction means 151 and the second friction means 152 processed material 1 by blocking unit 110' into housing 101
With the mantle friction of processed material 1 during inflow, it will not be blocked portion 110 so as to remove and remove and be likely to remain at processed material 1
Impure solution.In addition, it is with flexibility in the case where the ductility of processed material 1 is higher, such as in processed material 1
In the case of film type, friction portion 150 supports processed material 1 and processed material 1 is stably flowed into housing 101.In addition,
After wet process is carried out, processed material 1 is set stably to be flowed out from housing 101.
Therefore, friction portion 150 can be excellent by frictional force and the various materials of damage will not be caused to be formed the material 1 that is processed.
For example, friction portion 150 can be formed in a manner of the Fiber Materials containing such as synthetic resin or suede.In addition, friction portion 150 can be
Roller form.
Other inscapes are same as the previously described embodiments, therefore omit specific description.
Figure 11 is the stereogram for the wet process chamber for being diagrammatically denoted by another embodiment of the present invention, and Figure 12 is from figure
The top view of 10 M directions observation gained.
Reference picture 11 and Figure 12, wet process chamber 200 include housing 201, blocking unit 210 and friction portion 250.In order to just
In explanation, illustrated centered on aspect unlike the embodiments above.
Housing 201 and blocking unit 210 are same as the previously described embodiments, therefore omit specific description.
Friction portion 250 configures in a manner of corresponding with opening portion (not shown) and with blocking unit 210 inside portion 230 is adjacent
To the inner side of housing 201, specifically, possess the first friction means 251 and the second friction means 252.
First friction means 251 and the second friction means 252 are in processed material 1 by blocking unit 210 and into housing 201
With the mantle friction of processed material 1 during inflow, it will not be blocked portion 210 so as to remove and remove and be likely to remain at processed material 1
Impure solution.In addition, it is with flexibility in the case where the ductility of processed material 1 is higher, such as in processed material 1
In the case of film type, friction portion 250 supports processed material 1 and processed material 1 is stably flowed into housing 201.In addition,
After wet process is carried out, processed material 1 is set stably to be flowed out from housing 201.
Therefore, friction portion 250 can be excellent by frictional force and the various materials of damage will not be caused to be formed the material 1 that is processed.
For example, friction portion 250 can be formed in a manner of the Fiber Materials containing such as synthetic resin or suede.In addition, friction portion 250 can be
Roller form.
The wet process chamber 200 of the present embodiment additionally configures friction portion 250, so as to block unexpected solution
It is flowed into housing 201, stably supports processed material 1 and processed material 1 is flowed into housing 201 and is flowed from housing 201
Go out.
Figure 13 is the stereogram for the wet process chamber for being diagrammatically denoted by another embodiment of the present invention.
Reference picture 13, wet process chamber 300 include housing 301 and blocking unit 310.For convenience of description, with it is above-mentioned
Illustrated centered on the different aspect of embodiment.
In the above-described embodiments, material 1 is processed so that vertically, i.e. wet process will be carried out along processed material 1
Processed surface it is perpendicular to the ground direction configuration state to housing 101,201 flow into.However, the present invention is not limited to
This.
I.e., as shown in figure 13, the material 1 that is processed can configure in the horizontal direction, i.e. can be with the processed of the material 1 that is processed
Face mode parallel to the ground configures processed material 1.Correspondingly, the opening portion (not shown) of housing 301 and blocking unit 310
Formed in a manner of corresponding with processed material 1.That is, when compared with above-described embodiment, opening portion (not shown) and block
Portion 310 is in the form of being rotated by 90 °.
Housing 301 and the particular content of blocking unit 310 are same as the previously described embodiments, therefore omit and illustrate.
Figure 14 is the top view for the wet process chamber for being diagrammatically denoted by another embodiment of the present invention.
Reference picture 14, wet process chamber 400 include housing 401, blocking unit 410 and interior side body 402.For the ease of saying
It is bright, illustrated centered on aspect unlike the embodiments above.
In the above-described embodiments, after the material 1 that is processed is flowed into housing 101,201,301, enter in housing 101,201,301
Row wet process.
However, in the present embodiment, as shown in figure 12, carried out in configuration in the interior side body 402 in housing 401 to quilt
Handle the wet process of material (not shown).That is, the processed material (not shown) flowed into housing 401 passes through interior side body 402
Opening portion 402a and flow into, wet process is carried out in the interior side body 402.Blocked not on source by interior side body 402
Desired foreign matter, particularly unexpected impure solution are together flowed into what is defined by interior side body with processed material (not shown)
Wet process space and wet process is impacted.
Therefore, interior side body 402 can be in the form of similar to housing 401, i.e. similar to regular hexahedron box-shaped state.So
And the present invention is not limited to this, interior side body 402 also can be in the box-shaped state without bottom surface and touch with the bottom surface of housing 401.Separately
Outside, interior side body 402 can also be in the form of similar to partition wall, to form specific wet process space.
Housing 401 and the particular content of blocking unit 410 are same as the previously described embodiments, therefore omit specific description.
Figure 15 is the top view for the wet process chamber for being diagrammatically denoted by another embodiment of the present invention.
Reference picture 15, wet process chamber 500 include housing 501, blocking unit 510, interior side body 502, the first friction portion
550 and the second friction portion 560.For convenience of description, illustrated centered on aspect unlike the embodiments above.
In the present embodiment, carried out in the interior side body 502 configured in housing 501 to the material (not shown) that is processed
Wet process.That is, flow into and flowed into the processed material (not shown) of housing 401 by the opening portion 502a of interior side body 502,
Wet process is carried out in interior side body 502.Unexpected foreign matter is blocked on source, is particularly by interior side body 502
Unexpected impure solution and processed material (not shown) be together flowed into by wet process space that interior side body 502 defines and
Wet process is impacted.
Therefore, interior side body 502 can be in the form of similar to housing 501, i.e. similar to regular hexahedron box-shaped state.So
And the present invention is not limited to this, interior side body 502 also can be in the box-shaped state without bottom surface and touch with the bottom surface of housing 501.Separately
Outside, interior side body 502 can also be simpler form, i.e. partition wall form.
In addition, the first friction portion 550 is with the correspondence of inside portion 530 corresponding with opening portion (not shown) and with blocking unit 510
Mode be configured to the inner side of housing 501, specifically, possess the first friction means 551 and the second friction means 552.
First friction means 551 and the second friction means 552 when processed material 1 is by blocking unit 510 with processed material 1
Mantle friction, will not be blocked portion 510 so as to remove and remove and be likely to remain at the solution of processed material 1.In addition, located
Manage material 1 ductility it is higher in the case of, i.e. in the case of for film type, support processed material 1 and make processed material 1 steady
Surely it is flowed into housing 501.In addition, after wet process is carried out, processed material 1 is set stably to be flowed out from housing 501.
Therefore, the first friction portion 550 can various material shapes excellent by frictional force and that damage will not be caused to the material 1 that is processed
Into.In addition, the first friction portion 550 can be roller form.
In addition, the second friction portion 560 is configured to the inner side of interior side body 502 in a manner of corresponding with opening portion 502a, tool
For body, possess the first friction means 561 and the second friction means 562.
First friction means 561 and the second friction means 562 remove the solution for being likely to remain at processed material 1.In addition,
In the case that the ductility of processed material 1 is higher, i.e., in the case of for film type, supports processed material 1 and make processed material 1
Stably it is flowed into interior side body 502.In addition, after wet process is carried out, make processed material 1 stably from interior side body
502 outflows.
Therefore, the second friction portion 560 can be to the first similar material in friction portion 550 and similar form, and can be roller
Form.
In addition, although not shown, but the second friction portion 560 is not only configured into the inner side of interior side body 502, and certainly
Outside can be configured to according to the condition of wet process.
The wet process chamber 500 of the present embodiment can additionally configure the first friction portion and the second friction portion 550,560,
So as to block unexpected solution to be flowed into housing 501 and interior side body 502, support processed material 1 and flow processed material 1
Enter into housing 501 and interior side body 502 and flowed out from housing 501 and interior side body 502.It is in addition, additional in housing 501
Property interior side body 502 is set, so as to improve the cleanliness factor in wet process space and critically control wet process and improve wet
Formula process characteristics.
Housing 501 and the particular content of blocking unit 510 are same as the previously described embodiments, therefore omit specific description.
Figure 16 is the figure of the example for the wet process device for being diagrammatically denoted by the wet process chamber using the present invention.
Specifically, Figure 16 represents possess the wet process chamber 100,200,300,400,500 comprising above-described embodiment
In any wet process chamber multiple chambers wet process system 1000.
Processed material 1 is mobile to X1 directions and passes sequentially through multiple chamber 100-1,100-2,100-3 and is consecutively carried out
Multiple wet process.At least any chamber, such as chamber 100-2 in multiple chamber 100-1,100-2,100-3 can be applied upper
State the composition of the wet process chamber 100,200,300,400,500 of embodiment and any chamber in Fig. 9 structure.
Thus, in the case where being flowed into after processed material 1 is by chamber 100-1 to chamber 100-2, residual is effectively blocked
Solution in processed material 1, the solution specifically used when chamber 100-1 carries out wet process are flowed into chamber 100-2.
Figure 16 is that although not shown, but the present invention is also applicable in only and possesses a wet process using one of the present invention
The wet process chamber of chamber.That is, the present invention be also applicable in only with the present embodiment wet process chamber 100,200,
300th, the wet process device of the single-chamber cell structure of any chamber in 400,500.
With reference to shown embodiment, the present invention is described, but the embodiment is merely illustrative, in this technology
Commonsense personnel should be understood that the other embodiment that various modifications and equalization can be realized from the embodiment in field.Therefore,
The real technical protection scope of the present invention should determine according to the technological thought of appended claims.
Claims (27)
1. a kind of wet process chamber, it is used to carry out the wet process to the material that is processed, and the wet process chamber includes：
Housing, it possesses the more than one opening portion formed for the processed material by way of；And
Blocking unit, it is configured in a manner of corresponding with the opening portion, and is possessed for processed material shape by way of
Into slit, be configured to the housing outside outside portion, inner side corresponding with the outside portion and being configured to the housing
Inside portion and the joint portion that is combined the outside portion with the inside portion；And
The blocking unit has the size more than the opening portion, and the slit of the blocking unit has the width less than the opening portion
Degree.
2. wet process chamber according to claim 1, wherein：
The blocking unit by the housing can be attached to by the joint portion and from the housing removal in a manner of formed.
3. wet process chamber according to claim 1, wherein：
The outside portion and the inside portion possess the first side part configured in a manner of opposite to one another and the second side respectively
Face component.
4. wet process chamber according to claim 3, wherein：
The outside portion and the inside portion possess to be formed between the first side part and the second side part
Slit.
5. wet process chamber according to claim 4, wherein：
The slit of the blocking unit is overlapping with the respective slit in the outside portion and the inside portion.
6. wet process chamber according to claim 4, wherein：
The first side part and the second side part form groove in each side opposite to one another, and the groove forms described
Outside portion and the slit of the inside portion.
7. wet process chamber according to claim 3, wherein：
The first side part of the outside portion is combined by the joint portion and the first side part with the inside portion,
The second side part of the outside portion is combined by the joint portion and the second side part with the inside portion.
8. wet process chamber according to claim 1, wherein：
The outside portion possesses groove corresponding with the joint portion,
The inside portion possesses through hole corresponding with the joint portion.
9. wet process chamber according to claim 1, wherein：
The joint portion is so that the outside portion to be combined with the inside portion, and mode corresponding with the opening portion configures.
10. wet process chamber according to claim 1, wherein：
It is thicker that the outside portion is formed as the inside portion.
11. wet process chamber according to claim 1, wherein：
The length of the slit of the blocking unit is with side of the length with the opening portion identical or less than the length of the opening portion
Formula is formed.
12. wet process chamber according to claim 1, wherein：
Friction portion is also included, the friction portion is configured in a manner of corresponding with the opening portion and adjacent with the blocking unit, and
Formed in a manner of the surface with the processed material connects.
13. wet process chamber according to claim 12, wherein：
The friction portion possesses the first friction means and the second friction means configured in a manner of opposite to one another.
14. wet process chamber according to claim 12, wherein：
The friction portion is configured in a manner of corresponding inside the slit with the blocking unit.
15. wet process chamber according to claim 12, wherein：
The friction portion is configured to the inner side of the housing each other.
16. wet process chamber according to claim 12, wherein：
The friction portion is in roller form.
17. wet process chamber according to claim 1, wherein：
Hung down with the processed surface that will carry out wet process of the processed material towards direction parallel to the ground or with ground
Straight direction and the processed material are by way of the slit of the opening portion and the blocking unit, to form the opening portion
And the blocking unit.
18. wet process chamber according to claim 1, wherein：
Interior side body is also included, the interior side body is configured in the housing, to provide the side in the space for performing wet process
Formula is formed, and has more than one opening portion, so that the processed material passes in and out.
19. wet process chamber according to claim 18, wherein：
The interior side body is in box-shaped state.
20. wet process chamber according to claim 18, wherein：
The interior side body connects in the box-shaped state without bottom surface and with the bottom surface of the housing.
21. wet process chamber according to claim 18, wherein：
Friction portion is also included, the friction portion is corresponding with the opening portion of the interior side body, and is configured to the interior side body
Inner or outer side, and formed in a manner of the surface with the processed material connects.
22. wet process chamber according to claim 21, wherein：
The friction portion possesses the first friction means and the second friction means configured in a manner of opposite to one another.
23. wet process chamber according to claim 21, wherein：
The friction portion is in roller form.
24. wet process chamber according to claim 1, wherein：
The wet process includes cleaning, plating or etch process.
25. wet process chamber according to claim 1, wherein：
The processed material includes membrane material, chip or substrate.
26. a kind of wet process device, it includes the wet process chamber according to any one of claim 1 to 25.
27. wet process device according to claim 26, wherein：
The wet process device includes multiple process chambers,
At least any chamber in the process chamber is the wet process chamber according to any one of claim 1 to 25
Room.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2013-0005107 | 2013-01-16 | ||
| KR1020130005107A KR101654293B1 (en) | 2013-01-16 | 2013-01-16 | Wet process chamber and wet process apparatus having the same |
| PCT/KR2014/000495 WO2014112818A1 (en) | 2013-01-16 | 2014-01-16 | Wet processing chamber and apparatus for wet processing comprising same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105163873A CN105163873A (en) | 2015-12-16 |
| CN105163873B true CN105163873B (en) | 2018-03-06 |
Family
ID=51209849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480015848.XA Expired - Fee Related CN105163873B (en) | 2013-01-16 | 2014-01-16 | Wet process chamber and the wet process device for including it |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101654293B1 (en) |
| CN (1) | CN105163873B (en) |
| WO (1) | WO2014112818A1 (en) |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5746903A (en) * | 1980-09-05 | 1982-03-17 | Mitsubishi Chem Ind Ltd | Agricultural and gardening fungicide |
| KR100268448B1 (en) * | 1998-08-17 | 2000-10-16 | 윤종용 | Etching end point detector |
| KR100607414B1 (en) * | 2000-05-17 | 2006-08-01 | 삼성전자주식회사 | Etching apparatus |
| JP3778071B2 (en) * | 2001-11-30 | 2006-05-24 | 日立ハイテク電子エンジニアリング株式会社 | Substrate dipping type continuous liquid processing equipment |
| JP4022115B2 (en) * | 2002-09-06 | 2007-12-12 | 豊 佐藤 | Dam type continuous immersion treatment equipment |
| KR20070034887A (en) * | 2005-09-26 | 2007-03-29 | 세메스 주식회사 | Substrate Drying Equipment |
| JP4704181B2 (en) * | 2005-10-20 | 2011-06-15 | 上村工業株式会社 | Immersion processing equipment |
| KR100732519B1 (en) * | 2006-03-31 | 2007-06-28 | 세메스 주식회사 | Apparatus and method for treating substrates |
| JP4486146B2 (en) * | 2008-09-30 | 2010-06-23 | 積水化学工業株式会社 | Surface treatment equipment |
| JP5398223B2 (en) * | 2008-10-23 | 2014-01-29 | 上村工業株式会社 | Gate device for treatment tank |
| WO2010087435A1 (en) * | 2009-02-02 | 2010-08-05 | シャープ株式会社 | Substrate processing apparatus |
-
2013
- 2013-01-16 KR KR1020130005107A patent/KR101654293B1/en active IP Right Grant
-
2014
- 2014-01-16 CN CN201480015848.XA patent/CN105163873B/en not_active Expired - Fee Related
- 2014-01-16 WO PCT/KR2014/000495 patent/WO2014112818A1/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| KR101654293B1 (en) | 2016-09-06 |
| KR20140092708A (en) | 2014-07-24 |
| CN105163873A (en) | 2015-12-16 |
| WO2014112818A1 (en) | 2014-07-24 |
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