CN105158509B - A kind of three-dimensional flow change rate sensor and measuring method based on flexoelectric effect - Google Patents
A kind of three-dimensional flow change rate sensor and measuring method based on flexoelectric effect Download PDFInfo
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Abstract
A kind of three-dimensional flow change rate sensor and measuring method based on flexoelectric effect, the sensor includes L shape three-dimensional body elements and spherical insulating materials, the L shapes three-dimensional body element includes insulating layer, electrode layer, flexure material layer, multiple-layer stacked, rest is filled with insulation sticky stuff, electrode layer is connected with charge amplifier, and the output terminal of charge amplifier is connected with signal processing, display, memory module；When measuring flow rate-of-change, the spherical insulating materials of fluid impact in three-dimensional flow field, so that each layer of L shape three-dimensional body elements deforms upon, flexure material layer generates strain gradient in its amount of deflection direction, produce four groups of polarization charges, charge amplifier is transferred to through electrode layer, through handling display three-dimensional flow change rate in real time；Inventive sensor volume is small, and stream field influences minimum, and without to flexure material layer power supply, having the characteristics that without additional mass block, broad quantum, real-time is good, directly measure, precision is high, simple in structure.
Description
Technical field
The present invention relates to sensor technical field, and in particular to a kind of three-dimensional flow change rate based on flexoelectric effect passes
Sensor and measuring method.
Background technology
In existing flow, flow velocity e measurement technology, mostly using Techniques in Electromagnetic Measurement, laser measuring technique.And except stream
Speed measurement, the real-time monitoring of flow rate-of-change also have important application in military, life, such as：Aircraft skin flies in aircraft
In row, speed of incoming flow changes, and the power that covering is subject to changes, and aircraft flight is affected；Conveyed by petroleum pipeline
During oil, oil flow change, oil is different to the impact force of pipeline, different to being injured caused by pipeline；Galloping
When, crosswind wind speed change rate has a serious impact running car.Existing flow rate-of-change measurement means are based primarily upon stream
Measurement, flow velocity measurement, by flow, flow velocity measurement result are digitized-difference-calculating and etc. come be calculated stream
Fast change rate.This method has the shortcomings that calculating is cumbersome, complicated, precision is relatively low, and can not achieve real-time monitoring.
It is existing to have been obtained extensively in the device of measurement acceleration based on the piezoelectric acceleration transducer of piezoelectric
Application.But piezoelectric acceleration transducer need to place a mass block on piezo-electric crystal, and in order to isolate appointing for test specimen
What strain is transmitted to piezoelectric element up, generally to thicken pedestal or selection is manufactured by the larger material of rigidity, housing and base
The weight of seat almost accounts for the half of sensor weight, and weight shared by actually active component is smaller, and piezoelectric is as a kind of
Containing heavy metal material, its material also has potential threat to environment in itself.
In order to solve the above-mentioned problems of the prior art, it is an object of the invention to provide one kind to be based on flexoelectric effect
Flow rate-of-change sensing arrangement and measuring method.
Flexure electricity is present in all dielectrics, its principle has just been suggested early in the sixties in last century and in a certain range
Great development is inside obtained, the simplification descriptive equation of the material electrodes containing piezoelectric effect is：
Wherein Pi,eijk,σjk,εjk,μijkl,xlRespectively degree of polarization, piezoelectric constant, stress, strain, flexure electric constant
And gradient direction, equation the right Section 1 is piezoelectric effect caused by stress, and Section 2 is the gradient caused by strain gradient
The flexoelectric effect in direction, since piezoelectric effect being not present in centrosymmetrical crystal, only Section 2 exists, i.e.,
It can be seen from (1) (2) in the case where the conditions such as material, test specimen are certain, the polarization charge of molecular symmetry crystal
Output is directly proportional to its strain gradient, and polarization charge and voltage is there are certain relation, and therefore, present invention employs by answering
Become the principle that gradient realizes electric charge output, the voltage produced by polarization charge is measured, so as to treat change in flow feelings in flow measurement field
Condition is monitored in real time.
Typically, bend electrical phenomena and the order of magnitude of size is closely related, order of size is smaller, it bends electrical phenomena
More play a decisive role in polarization.
The content of the invention
In order to solve the above-mentioned problems of the prior art, it is an object of the invention to provide one kind to be based on flexoelectric effect
Three-dimensional flow change rate sensor and measuring method, have the broad quantum, fast response time, real-time good, light-weight, direct
Measurement, the features such as precision is high, simple in structure.
To achieve the above objectives, the present invention adopts the following technical scheme that：
A kind of three-dimensional flow change rate sensor based on flexoelectric effect, including L shape three-dimensional bodies element 1, the L shapes
1 one end of three-dimensional body element is consolidated on matrix, and the other end connects spherical insulating materials 2, and L shape three-dimensional bodies element 1 includes L shapes
Hollow cavity insulating layer 3, through the flexure material layer 3-1 being arranged on inside L shape hollow cavities insulating layer 3, wherein flexure electricity
Length, width and the height of material layer 3-1 are respectively less than length, width and the height of 3 hollow cavity of L shape hollow cavities insulating layer；
Close to one section of the inside of L shape hollow cavities insulating layer 3 of spherical 2 one end of insulating materials, L shape hollow cavities insulating layer 3 and flexure
Four faces in the gap between material layer 3-1 are provided with two pairs of electrodes layer, be respectively Z electrode layers opposing upper and lower to 3-2 and
The opposite Y electrode layer in left and right closely meets 3-3 and flexure material layer 3-1 on 3-2, Y electrode layer 3-3, the Z electrode layers
Touch, be mutually not connected between each electrode layer；Away from spherical 2 one end of insulating materials and with setting Z electrode layers to 3-2, Y electrode layer
Another section perpendicular to the L shape hollow cavity insulating layers 3 of 3-3, L shape hollow cavities insulating layer 3 and flexure material layer 3-1 it
Between four faces in gap be provided with two pairs of electrodes layer, be respectively the decoupling electrode layer opposing upper and lower X opposite to 4-1 and left and right
Electrode layer is in close contact 4-2 and flexure material layer 3-1 4-1 and X electrode layer 4-2, the decoupling electrode layer, Ge Ge electricity
Mutually it is not connected between the layer of pole；Gap inside the L shapes three-dimensional body element 1 is filled by insulation sticky stuff 3-4, the L shapes
1 outer surface of three-dimensional body element is fastened with heat-shrink tube；The Z electrode layers are connected 3-2 with the first passage of charge amplifier 5
Connect, Y electrode layer is connected 3-3 with the second channel of charge amplifier 5, X electrode layer to 4-2 and charge amplifier 5 the 3rd
Passage is connected, decoupling electrode layer be connected to 4-1 with the fourth lane of charge amplifier 5, the output terminal of charge amplifier 5 and
Signal processing, display, memory module 6 are connected.
When there is the different speed of incoming flow change rate demands of measurement, the L shapes hollow cavity insulating layer 3 and spherical insulating materials
2 insulating materials taken are different.
The spherical insulating materials 2 is used as main bearing member, and the size of three-dimensional flow change rate sensor is far small
It is minimum in dimension of flow field to be measured, the influence of stream field.
The flexure material layer 3-1 is the material that molecular structure of the dielectric constant more than 1 has centre symmetry.
It is PVDF, polytetrafluoroethylene (PTFE) or titanium that molecular structure of the dielectric constant more than 1, which has the material of centre symmetry,
Sour strontium barium.
There is stickiness when the insulation sticky stuff 3-4 is liquid, solid insulating materials can be switched to by liquid.
It is epoxy resin to have stickiness during the liquid, can switch to solid insulating materials by liquid.
The Z electrode layers are less than the thickness of 4-1 4-2 and decoupling electrode layer 3-3, X electrode layer on 3-2, Y electrode layer
Bend at least one order of magnitude of thickness of material layer 3-1.
The X electrode layer becomes 3-2 major functions for output all directions flow velocity 3-3, Z electrode layer on 4-2, Y electrode layer
Electric charge caused by rate, decoupling electrode layer is control group and decoupling to the major function of 4-1.
The measuring method of three-dimensional flow change rate sensor described above based on flexoelectric effect, in flow field to be measured,
When fluid impacts the spherical insulating materials 2 of three-dimensional flow change rate sensor along three directions at different flow rates, spherical insulation
The power being subject to is passed to L shape three-dimensional bodies element 1 by material 2, and the power being subject to is passed to electrode by L shape hollow cavities insulating layer 3
The power being subject to is passed to flexure material layer 3-1 by layer and insulation sticky stuff 3-4, electrode layer and insulation sticky stuff 3-4, is scratched
Bent material layer 3-1 is deformed upon, and produces deflection deformation, strain gradient is generated in its amount of deflection direction, due to bending electric principle,
The passive flexure material layer 3-1 surfaces common property gives birth to four groups of polarization charges, and four groups of polarization charges are transferred to electric charge through electrode layer
Amplifier 5 and be corresponding voltage signal by its linear transformation, wherein being due to three-dimensional to the 3-2 electric charges transmitted by Z electrode layers
Flow rate-of-change sensor is subject to the impact of Z-direction in flow field and produces, and Y electrode layer is due to three to the 3-3 electric charges transmitted
Dimension flow rate-of-change sensor is subject to the impact of Y-direction in flow field and produces, and X electrode layer is due to the 4-2 electric charges transmitted
Three-dimensional flow change rate sensor is subject to the impact of X-direction in flow field and produces, and the electric charge that decoupling electrode layer transmits 4-1 is made
To compare, and there is decoupling, corresponding output terminal of the voltage signal through charge amplifier 5 of four groups of electric charges is sent to signal
Reason, display, memory module 6, signal processing, display, memory module 6 record and show the three-dimensional flow change rate in flow field.
Wherein signal processing, display, the data processing inside memory module 6 are based primarily upon following methods：
Centrosymmetrical crystal bends in electric material and piezoelectric effect is not present, and material electrodes abbreviation list is described as：
Wherein Pi,εjk,μijkl,xlRespectively degree of polarization, strain, flexure electric constant and gradient direction.
And electric polarization can be described as the ratio of electric charge and distribution of charges area, i.e.,
Wherein Qi, A is the area that the quantity of electric charge and electric charge are distributed respectively.
And the quantity of electric charge and voltage is there are certain relation, i.e.,
Wherein Q, C, U are the quantity of electric charge, capacitance and potential respectively.
Due to X, Y, the presence of Z-direction flow rate-of-change, makes flexure material layer 3-1 produce deflection deformation, i.e. flow velocity becomes
There are certain relation with deflection deformation for rate：
Wherein x, V, εjk, μijkl, xlRespectively direction of flow, direction of flow speed, strain, flexure electric constant and gradient side
To.
Flexure material layer 3-1 produces polarization charge on each surface, respectively by X electrode layer to 4-2, Y electrode layer
3-3, Z electrode layer export 3-2, decoupling electrode layer as a control group, while plays the role of decoupling, when body coordinate to 4-1
System and earth coordinates there are during certain drift angle, it is necessary to which setting signal processing, display, memory module is to being respectively based on body coordinate
The flow rate-of-change of system carries out coordinate system transformation, the three-dimensional flow rate-of-change being converted under earth coordinates.
Compared to the prior art the present invention, has the following advantages that：
1), can without carrying out second differential to flow compared to electromagnetic flowmeter, the three-dimensional flow change rate sensor
Flow rate-of-change directly is measured, real-time is good.
2), can be direct without carrying out once differentiation to flow velocity compared to current meter, the three-dimensional flow change rate sensor
Flow rate-of-change is measured, real-time is good.
3) compared to piezoelectric acceleration transducer, the three-dimensional flow change rate sensor is without mass block, pedestal matter
Amount is simple in structure without too big, easy to use.
4) the three-dimensional flow change rate sensor is small, and the influence of stream field is minimum, and flow rate-of-change is carried out real
When measurement, suitable in a variety of flow fields, application range is big.
5) the three-dimensional flow change rate sensor reduces demand of the system to power supply without power supply.
6) the three-dimensional flow change rate sensor can measure the flow rate-of-change of three-dimensional at the same time.
In short, the present invention can avoid traditional measurement flow rate-of-change by carrying out differential to flow or flow velocity, measurement fills
The shortcomings of weight is big, precision is low, complicated, real-time is poor is put, there is broad quantum, fast response time, real-time well, again
Amount is light, directly measure, precision is high, advantages of simple structure and simple.
Brief description of the drawings
Fig. 1 is inventive sensor structure diagram.
Fig. 2 is inventive sensor schematic diagram.
Fig. 3 is inventive sensor sectional view.
Embodiment
Below in conjunction with drawings and the specific embodiments, the present invention is described in further detail.
As shown in Figure 1, Figure 2 and Figure 3, a kind of three-dimensional flow change rate sensor based on flexoelectric effect of the present invention, bag
L shape three-dimensional bodies element 1 is included, described 1 one end of L shapes three-dimensional body element is consolidated on matrix, and the other end connects spherical insulation material
Material 2, L shape three-dimensional bodies element 1 includes L shape hollow cavities insulating layer 3, through being arranged on inside L shape hollow cavities insulating layer 3
Material layer 3-1 is bent, wherein the length of flexure material layer 3-1, width and height are respectively less than L shape hollow cavities insulating layer 3
Length, width and the height of hollow cavity；Close to the inside of L shape hollow cavities insulating layer 3 one of spherical 2 one end of insulating materials
Section, four faces in the gap between L shape hollow cavities insulating layer 3 and flexure material layer 3-1 are provided with two pairs of electrodes layer, respectively
It is the Z electrode layers opposing upper and lower Y electrode layer opposite to 3-2 and left and right to 3-3, the Z electrode layers are to 3-2, Y electrode layer to 3-
3 are in close contact with flexure material layer 3-1, are mutually not connected between each electrode layer；Away from spherical 2 one end of insulating materials and with
Another section that Z electrode layers are perpendicular to the L shape hollow cavity insulating layers 3 of 3-3 to 3-2, Y electrode layer is set, and L shape hollow cavities are exhausted
Four faces in the gap between edge layer 3 and flexure material layer 3-1 are provided with two pairs of electrodes layer, are respectively decoupling opposing upper and lower
The electrode layer X electrode layer opposite to 4-1 and left and right is to 4-2, and the decoupling electrode layer is to 4-1 and X electrode layer to 4-2 and flexure electricity
Material layer 3-1 is in close contact, and is mutually not connected between each electrode layer；Gap inside the L shapes three-dimensional body element 1 is by insulating
Sticky stuff 3-4 is filled, and 1 outer surface of L shapes three-dimensional body element is fastened with heat-shrink tube；The Z electrode layers are to 3-2 and electric charge
The first passage of amplifier 5 is connected, and Y electrode layer is connected 3-3 with the second channel of charge amplifier 5, and X electrode layer is to 4-
2 are connected with the third channel of charge amplifier 5, and decoupling electrode layer is connected 4-1 with the fourth lane of charge amplifier 5,
The output terminal of charge amplifier 5 is connected with signal processing, display, memory module 6.
As the preferred embodiment of the present invention, when there is the different speed of incoming flow change rate demands of measurement, the L shapes are hollow
The insulating materials that cavity insulating layer 3 and spherical insulating materials 2 are taken is different, such as：Silicon, PVC plastic flitch etc..
As the preferred embodiment of the present invention, the spherical insulating materials 2 is used as main bearing member, is designed as spherical
The influence of sensor stream field can be reduced, and the size of three-dimensional flow change rate sensor is much smaller than dimension of flow field to be measured,
The influence of stream field is minimum.
As the preferred embodiment of the present invention, the flexure material layer 3-1 in the three-dimensional flow change rate sensor
There is the material of centre symmetry for molecular structure of the dielectric constant more than 1, such as：PVDF, polytetrafluoroethylene (PTFE) or barium strontium titanate etc..
As the preferred embodiment of the present invention, the insulation sticky stuff 3-4 in the three-dimensional flow change rate sensor
For there is stickiness during liquid, solid insulating materials can be switched to by liquid, such as：Epoxy resin etc., has good insulation characterisitic
With stronger adhesive force.
As the preferred embodiment of the present invention, the Z electrode layers in the three-dimensional flow change rate sensor are to 3-2, Y electricity
Pole layer is less than the thickness of 4-1 4-2 and decoupling electrode layer the thickness at least one of flexure material layer 3-1 to 3-3, X electrode layer
A order of magnitude.
As the preferred embodiment of the present invention, the X electrode layer in the three-dimensional flow change rate sensor is to 4-2, Y electricity
Pole layer is to 3-3, Z electrode layer to 3-2 major functions for electric charge, decoupling are electric caused by output X, Y, Z-direction flow rate-of-change respectively
Pole layer is control group and decoupling to the major function of 4-1.
As shown in Figure 1, Figure 2 and Figure 3, measuring method of the invention is：It is consistent with earth coordinates in body coordinate system
In the case of, in flow field to be measured, fluid impacts the spherical of three-dimensional flow change rate sensor at different flow rates along three directions
During insulating materials 2, the power being subject to is passed to L shape three-dimensional bodies element 1, L shape hollow cavities insulating layer 3 by spherical insulating materials 2
The power being subject to is passed into electrode layer and insulation sticky stuff 3-4, the power transmission that electrode layer and insulation sticky stuff 3-4 will be subject to
Flexure material layer 3-1, flexure material layer 3-1 is given to deform upon, produce deflection deformation, strain is generated in its amount of deflection direction
Gradient, due to the electric principle of flexure, which gives birth to four groups of polarization charges, four groups of polarization electricity
Lotus is transferred to charge amplifier 5 through electrode layer and is corresponding voltage signal by its linear transformation, wherein by Z electrode layers to 3-2
The electric charge of transmission is due to that three-dimensional flow change rate sensor is subject to the impact of Z-direction in flow field and produces, and Y electrode layer is to 3-
3 electric charges transmitted are due to that three-dimensional flow change rate sensor is subject to the impact of Y-direction in flow field and produces, X electrode layer pair
The electric charge that 4-2 is transmitted is due to that three-dimensional flow change rate sensor is subject to the impact of X-direction in flow field and produces, and decouples electrode
Layer is used as control to the electric charge that 4-1 is transmitted, and plays the role of decoupling, and the corresponding voltage signal of four groups of electric charges is through charge amplifier
5 output terminal send to signal processing, display, memory module 6, signal processing, display, memory module 6 and records and show in flow field
Three-dimensional flow change rate.
Wherein signal processing, display, the data processing inside memory module 6 are based primarily upon following methods：
Be not present piezoelectric effect in centrosymmetrical crystal (bending electric material), material electrodes be briefly described for：
Wherein Pi,εjk,μijkl,xlRespectively degree of polarization, strain, flexure electric constant and gradient direction.
And electric polarization can be described as the ratio of electric charge and distribution of charges area, i.e.,
Wherein Qi, A is the area that the quantity of electric charge and electric charge are distributed respectively.
And the quantity of electric charge and voltage is there are certain relation, i.e.,
Wherein Q, C, U are the quantity of electric charge, capacitance and potential respectively.
Due to X, Y, the presence of Z-direction flow rate-of-change, makes flexure material layer 3-1 produce deflection deformation, i.e. flow velocity becomes
There are certain relation with deflection deformation for rate：
Wherein x, V, εjk, μijkl, xlRespectively direction of flow, direction of flow speed, strain, flexure electric constant and gradient side
To.
Flexure material layer 3-1 produces polarization charge on each surface, respectively by X electrode layer to 4-2, Y electrode layer
3-3, Z electrode layer export 3-2, decoupling electrode layer as a control group, while plays the role of decoupling to 4-1.Present embodiment
Body coordinate system it is consistent with earth coordinates, without carrying out coordinate system transformation.
Claims (10)
- A kind of 1. three-dimensional flow change rate sensor based on flexoelectric effect, it is characterised in that：Including L shape three-dimensional body elements (1), described L shapes three-dimensional body element (1) one end is consolidated on matrix, and the other end connects spherical insulating materials (2), and L shapes are three-dimensional Body element (1) includes L shape hollow cavity insulating layers (3), through the flexure for being arranged on L shape hollow cavity insulating layers (3) inside Material layer (3-1), wherein the length of flexure material layer (3-1), width and height are respectively less than L shape hollow cavity insulating layers (3) length of hollow cavity, width and height；In the L shape hollow cavity insulating layers (3) close to spherical insulating materials (2) one end One section internal, four faces in the gap between L shape hollow cavity insulating layers (3) and flexure material layer (3-1) are provided with two pairs Electrode layer is respectively the Z electrode layers opposing upper and lower Y electrode layer opposite to (3-2) and left and right to (3-3), the Z electrode layers pair (3-2), Y electrode layer are in close contact (3-3) and flexure material layer (3-1), are mutually not connected between each electrode layer；Remote Spherical insulating materials (2) one end and with setting Z electrode layers to (3-2), Y electrode layer to the L shape hollow cavity insulating layers of (3-3) (3) perpendicular another section, four faces in the gap between L shape hollow cavity insulating layers (3) and flexure material layer (3-1) are set Two pairs of electrodes layer is equipped with, the decoupling electrode layer respectively opposing upper and lower X electrode layer opposite to (4-1) and left and right is to (4-2), institute State decoupling electrode layer to be in close contact (4-2) and flexure material layer (3-1) (4-1) and X electrode layer, between each electrode layer Mutually it is not connected to；The internal gap of the L shapes three-dimensional body element (1) is filled by insulation sticky stuff (3-4), and the L shapes are three-dimensional Body element (1) outer surface is fastened with heat-shrink tube；The Z electrode layers are connected (3-2) with the first passage of charge amplifier (5) Connect, Y electrode layer is connected (3-3) with the second channel of charge amplifier (5), and X electrode layer is to (4-2) and charge amplifier (5) third channel is connected, and decoupling electrode layer is connected (4-1) with the fourth lane of charge amplifier (5), electric charge amplification The output terminal of device (5) is connected with signal processing, display, memory module (6).
- A kind of 2. three-dimensional flow change rate sensor based on flexoelectric effect according to claim 1, it is characterised in that： When there is the different speed of incoming flow change rate demands of measurement, the L shapes hollow cavity insulating layer (3) and spherical insulating materials (2) are adopted The insulating materials taken is different.
- A kind of 3. three-dimensional flow change rate sensor based on flexoelectric effect according to claim 1, it is characterised in that： The spherical insulating materials (2) is used as main bearing member, and the size of three-dimensional flow change rate sensor is much smaller than to be measured Dimension of flow field, the influence of stream field are minimum.
- A kind of 4. three-dimensional flow change rate sensor based on flexoelectric effect according to claim 1, it is characterised in that： It is described flexure material layer (3-1) be dielectric constant more than 1, molecular structure have centre symmetry material.
- A kind of 5. three-dimensional flow change rate sensor based on flexoelectric effect according to claim 4, it is characterised in that： The dielectric constant more than 1, molecular structure have centre symmetry material be PVDF, polytetrafluoroethylene (PTFE) or barium strontium titanate.
- A kind of 6. three-dimensional flow change rate sensor based on flexoelectric effect according to claim 1, it is characterised in that： The insulation sticky stuff (3-4) has stickiness, can switch to solid insulating materials by liquid when being liquid.
- A kind of 7. three-dimensional flow change rate sensor based on flexoelectric effect according to claim 6, it is characterised in that： It is epoxy resin to have stickiness during the liquid, can switch to solid insulating materials by liquid.
- A kind of 8. three-dimensional flow change rate sensor based on flexoelectric effect according to claim 1, it is characterised in that： The Z electrode layers are less than the thickness of (4-1) (4-2) and decoupling electrode layer (3-3), X electrode layer on (3-2), Y electrode layer Bend at least one order of magnitude of thickness of material layer (3-1).
- A kind of 9. three-dimensional flow change rate sensor based on flexoelectric effect according to claim 1, it is characterised in that： The X electrode layer is output all directions change in flow to (3-2) major function to (3-3), Z electrode layers to (4-2), Y electrode layer Electric charge caused by rate, decoupling electrode layer is used as control to the major function of (4-1) for the electric charge transmitted, and has the work of decoupling With.
- 10. a kind of measuring method of three-dimensional flow change rate sensor based on flexoelectric effect according to claim 1, It is characterized in that：In flow field to be measured, fluid impacts three-dimensional flow change rate sensor at different flow rates along three directions During spherical insulating materials (2), the power being subject to is passed to L shape three-dimensional body elements (1), L shape hollow cavities by spherical insulating materials (2) The power being subject to is passed to electrode layer and insulation sticky stuff (3-4), electrode layer and insulation sticky stuff (3- by body insulating layer (3) 4) power being subject to being passed into flexure material layer (3-1), flexure material layer (3-1) deforms upon, and produces deflection deformation, Its amount of deflection direction generates strain gradient, due to the electric principle of flexure, passive flexure material layer (3-1) surface common property life four Group polarization charge, four groups of polarization charges are transferred to charge amplifier (5) through electrode layer and are corresponding voltage by its linear transformation Signal, wherein being due to that three-dimensional flow change rate sensor is subject to Z-direction in flow field to (3-2) electric charge transmitted by Z electrode layers Impact and produce, Y electrode layer is due to that three-dimensional flow change rate sensor is subject to Y in flow field to (3-3) electric charge transmitted The impact in direction and produce, X electrode layer is due to that three-dimensional flow change rate sensor is subject to flow field to (4-2) electric charge transmitted The impact of interior X-direction and produce, the electric charge that is transmitted to (4-1) of decoupling electrode layer plays the role of decoupling as compareing, four Corresponding output terminal of the voltage signal through charge amplifier (5) of group electric charge is sent to signal processing, display, memory module (6), signal Processing, display, memory module (6) record and show the three-dimensional flow change rate in flow field.
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| CN108680766B (en) * | 2018-05-21 | 2019-07-26 | 江西师范大学 | A kind of ball-type laser fluid environmental sensor |
| CN110872190A (en) * | 2018-08-30 | 2020-03-10 | 中国科学技术大学 | Method for adjusting dielectric material apparent flexoelectric effect |
| CN111006722B (en) * | 2019-12-23 | 2021-07-02 | 西安工业大学 | Anti-thrust anti-torsion sensing actuator based on piezoelectric and flexoelectric materials |
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