CN105424978B - A kind of high shock acceleration sensor and measurement method based on flexoelectric effect - Google Patents
A kind of high shock acceleration sensor and measurement method based on flexoelectric effect Download PDFInfo
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- CN105424978B CN105424978B CN201511016756.6A CN201511016756A CN105424978B CN 105424978 B CN105424978 B CN 105424978B CN 201511016756 A CN201511016756 A CN 201511016756A CN 105424978 B CN105424978 B CN 105424978B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
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Abstract
A kind of high shock acceleration sensor and measurement method based on flexoelectric effect, the sensor includes the matrix being fixedly connected with and insulating stiff cylindrical shell, electric material round platform is opposite is placed in insulating stiff cylindrical shell for two flexures, its certain pretightning force is given by insulating stiff cylindrical shell upper cover, the upper and lower surface of flexure electric material round platform is coated with electrode, electrode is connected with charge amplifier input terminal, and charge amplifier output end is connected with signal processing, display, memory module；When measuring high-g level acceleration, there are the acceleration of high-g level for matrix, flexure electric material round platform is passed to by insulating stiff cylindrical shell, flexure electric material round platform is deformed by inertia force and generates strain gradient, generate polarization charge, through electrodes transfer to charge amplifier, through the acceleration change situation for handling display substrate motion high-g level in real time；The present invention is not necessarily to, to flexure electric material round platform power supply, have the characteristics that without additional mass block, broad quantum, applicable band is wide, real-time is good, directly measures, simple in structure.
Description
Technical field
The present invention relates to sensor technical fields, and in particular to a kind of high-g level acceleration sensing based on flexoelectric effect
Device and measurement method.
Background technology
In existing acceleration analysis technology, piezoelectric type, pressure resistance type, condenser type, servo-type are mostly used greatly.The reality of acceleration
When monitoring have important application in military, life, such as：According to the acceleration value of measurement, it is determined whether to enable safety in automobile
Air bag, the simulation of Elevated Gravity, seismic wave detection, satellite celestial body pose adjustment.
It is existing to have been obtained extensively in the device for measuring acceleration based on the piezoelectric acceleration transducer of piezoelectric material
Application.But piezoelectric acceleration transducer need to place a mass block on piezo-electric crystal, and in order to which appointing for test specimen is isolated
What strain is transmitted to piezoelectric element up, generally to thicken pedestal or selection is manufactured by the larger material of rigidity, shell and base
The weight of seat almost accounts for the half of sensor weight, and weight is smaller shared by actually active component, and piezoelectric material is as a kind of
Containing heavy metal material, material itself also has potential threat to environment, and piezoelectric acceleration transducer cannot measure zero-frequency
The signal of rate.And the sensitive core body of piezoresistance type acceleration sensor is semi-conducting material, is affected by temperature larger；Condenser type accelerates
Degree sensor is limited to being affected of cable capacitance, range.
Flexure electricity is present in all dielectrics, and principle has just been suggested early in the sixties in last century and in a certain range
Great development is inside obtained, the simplification descriptive equation of the material electrodes containing piezoelectric effect is：
Wherein Pi,eijk,σjk,εjk,μijkl,xlRespectively degree of polarization, piezoelectric constant, stress, strain, flexoelectric coefficient
And gradient direction, equation the right first item is piezoelectric effect caused by stress, and Section 2 is the gradient caused by strain gradient
The flexoelectric effect in direction, since piezoelectric effect being not present in centrosymmetrical crystal, only Section 2 exists, i.e.,
It can be seen from above-mentioned formula in the case where the conditions such as material, test specimen are certain, the polarization electricity of molecular symmetry crystal
Lotus output is directly proportional to its strain gradient, and polarization charge is with voltage that there are certain relationships, and therefore, present invention employs pass through
Strain gradient realizes the principle of charge output, measures the voltage generated by polarization charge, to matrix acceleration change situation
It is monitored in real time.
Typically, it bends electrical phenomena and the order of magnitude of size is closely related, order of size is smaller, bends electrical phenomena
More play a decisive role in polarization.
Invention content
In order to solve the above-mentioned problems of the prior art, the purpose of the present invention is to provide one kind being based on flexoelectric effect
High shock acceleration sensor and measurement method, without to flexure electric material round platform power supply, have without additional mass block, range
It is wide, applicable band is wide, real-time is good, it is light-weight, direct measure, the features such as precision is high, simple in structure.
To achieve the above objectives, the present invention adopts the following technical scheme that：
A kind of high shock acceleration sensor based on flexoelectric effect, including matrix 1 and insulating stiff cylindrical shell 4, institute
It is movable body itself to state matrix 1, and matrix 1 is consolidated with rigid cylindrical shell 4, and the upper cover of insulating stiff cylindrical shell 4 can move
And locking, electric material round platform 2 is opposite is placed in insulating stiff cylindrical shell 4 for two flexures, passes through insulating stiff cylindrical shell
4 upper covers give two opposite flexure electric material round platforms 2 certain pretightning force, and the upper and lower surface of flexure electric material round platform 2 is coated with electricity
Pole 3, electrode 3 are connected with the input terminal of charge amplifier 5, output end and signal processing, display, the storage mould of charge amplifier 5
Block 6 is connected.
When measuring different acceleration, the size of the flexure electric material round platform 2 is different with the flexure electric material of use.
The flexure electric material round platform 2,4 size of insulating stiff cylindrical shell are smaller, are influenced very on 1 displacement of matrix
It is small.
Molecular structure of the flexure electric material round platform 2 for dielectric constant more than 1 has the material of centre symmetry.Such as
PVDF, polytetrafluoroethylene (PTFE) or barium strontium titanate.
The material stiffness that described matrix 1, insulating stiff cylindrical shell 4 use is very big.
3 thickness of the electrode is less than 2 at least one order of magnitude of height of flexure electric material round platform.
The measurement method of the above-mentioned high shock acceleration sensor based on flexoelectric effect, matrix 1 are shaken with high-g level acceleration
When dynamic, matrix 1 passes to flexure electric material round platform 2 by the insulating stiff cylindrical shell 4 consolidated with matrix 1, bends electric material
Round platform 2 is generated deflection deformation by inertia force, and flexure electric material round platform 2 generates strain gradient in its amount of deflection direction, due to flexure electricity
Principle, the passive flexure electric material round platform 2 its surface generate polarization charge, through electrode 3 be transferred to charge amplifier 5 and by
Its linear transformation be corresponding voltage signal, output end of the voltage signal through charge amplifier 5 be transferred to signal processing, display,
Memory module 6, signal processing, display, memory module 6 carry out data processing and show the acceleration of matrix high-g level.
Wherein signal processing, display, the data processing inside memory module 6 are based primarily upon following methods：
Centrosymmetrical crystal bends and piezoelectric effect is not present in electric material, and material electrodes abbreviation list is described as：
Wherein Pi,εjk,μijkl,xlRespectively degree of polarization, strain, flexoelectric coefficient and gradient direction；For known material
Expect, known to flexoelectric coefficient.
And electric polarization can be described as the ratio of charge and distribution of charges area, i.e.,
Wherein Qi, A is the quantity of electric charge and the corresponding area of electrode respectively；
Therefore the value of polarization charge and strain gradient are proportionate relationship, i.e., can know corresponding strain by polarization charge
Gradient.
Since there are acceleration for matrix 1, flexure electric material round platform 2 is passed to by insulating stiff cylindrical shell 4, makes flexure
Electric material round platform 2 generates deflection deformation, i.e., there are certain relationships with deflection deformation for acceleration：
Wherein a, k, εjk, μijkl, xlRespectively substrate motion acceleration, proportionality coefficient related with material, strain, flexure
Electrostrictive coefficient and gradient direction；
Flexure electric material round platform 2 generates polarization charge on the surface, is exported by electrode 3, matrix can be shown by calculating
The situation of change of acceleration.
Compared to the prior art the present invention, has the following advantages that：
1) high shock acceleration sensor based on flexoelectric effect is not necessarily to individually power to flexure electric material round platform, reduces
Demand of the system to power supply.
2) high shock acceleration sensor based on flexoelectric effect, real-time is good, broad quantum, bandwidth.
3) high shock acceleration sensor based on flexoelectric effect is not necessarily to mass block, simple in structure, easy to use.
4) high shock acceleration sensor based on flexoelectric effect is influenced very little by cable.
5) high shock acceleration sensor based on flexoelectric effect is influenced very little by temperature change.
In short, the present invention can avoid needing individually to power to measuring cell when traditional measurement acceleration, is easily long by cable
The shortcomings of spending, the influence of temperature change, needing additional mass block, the present invention are not necessarily to flexure electric material round platform power supply, with without outer
Add mass block, broad quantum, applicable band are wide, real-time is good, it is light-weight, direct measure, precision is high, advantages of simple structure and simple.
Description of the drawings
Attached drawing is inventive sensor structural schematic diagram.
Specific implementation mode
Below in conjunction with drawings and the specific embodiments, the present invention is described in further detail.
As shown in the picture, a kind of high shock acceleration sensor based on flexoelectric effect of the present invention, including matrix 1 and absolutely
Edge rigid cylindrical shell 4, described matrix 1 are movable body itself, and matrix 1 is consolidated with rigid cylindrical shell 4, insulating stiff cylindrical shell
The upper cover of body 4 is removable and locking, and electric material round platform 2 is opposite is placed in insulating stiff cylindrical shell 4 for two flexures, by exhausted
4 upper cover of edge rigid cylindrical shell gives two opposite flexure electric material round platforms 2 certain pretightning force, flexure electric material round platform 2
Upper and lower surface is coated with electrode 3, and electrode 3 is connected with the input terminal of charge amplifier 5, at the output end and signal of charge amplifier 5
Reason, display, memory module 6 are connected.
As the preferred embodiment of the present invention, when measuring different acceleration, the size of the flexure electric material round platform 2
It is different with the flexure electric material of use.
As the preferred embodiment of the present invention, the flexure electric material round platform 2,4 size of insulating stiff cylindrical shell compared with
It is small, very little is influenced on 1 displacement of matrix.
As the preferred embodiment of the present invention, the flexure electric material round platform 2 is more than 1 molecular structure for dielectric constant
Material with centre symmetry, such as PVDF, polytetrafluoroethylene (PTFE) or barium strontium titanate.
As the preferred embodiment of the present invention, the material stiffness that described matrix 1, insulating stiff cylindrical shell 4 use is very
Greatly.
As shown, the measurement method of the present invention is：When matrix 1 is vibrated with high-g level acceleration, matrix 1 by with matrix 1
The insulating stiff cylindrical shell 4 of consolidation passes to flexure electric material round platform 2, and flexure electric material round platform 2 is generated flexure by inertia force
Deformation, flexure electric material round platform 2 generate strain gradient in its amount of deflection direction, due to the electric principle of flexure, the passive flexure electricity material
Expect that round platform 2 generates polarization charge on its surface, is transferred to charge amplifier 5 through electrode 3 and is corresponding electricity by its linear transformation
Signal, output end of the voltage signal through charge amplifier 5 is pressed to be transferred to signal processing, display, memory module 6, signal processing is shown
Show, memory module 6 carries out data processing and shows the acceleration of matrix high-g level.
Wherein signal processing, display, the data processing inside memory module 6 are based primarily upon following methods：
In centrosymmetrical crystal (bending electric material) be not present piezoelectric effect, material electrodes be briefly described for：
Wherein Pi,εjk,μijkl,xlRespectively degree of polarization, strain, flexoelectric coefficient and gradient direction.For known material
Expect, known to flexoelectric coefficient.
And electric polarization can be described as the ratio of charge and distribution of charges area, i.e.,
Wherein Qi, A is the area of the quantity of electric charge and counter electrode respectively.
Therefore the value of polarization charge and strain gradient are proportionate relationship, i.e., can know corresponding strain by polarization charge
Gradient.
Since there are acceleration for matrix 1, flexure electric material round platform 2 is passed to by insulating stiff cylindrical shell 4, makes flexure
Electric material round platform 2 generates deflection deformation, i.e., there are certain relationships with deflection deformation for acceleration：
Wherein a, k, εjk, μijkl, xlRespectively substrate motion acceleration, proportionality coefficient related with material, strain, flexure
Electrostrictive coefficient and gradient direction.
Flexure electric material round platform 2 generates polarization charge on the surface, is exported by electrode 3, matrix can be shown by calculating
The situation of change of acceleration.
Claims (9)
1. a kind of high shock acceleration sensor based on flexoelectric effect, it is characterised in that：Including matrix (1) and insulating stiff
Cylindrical shell (4), described matrix (1) are movable body itself, and matrix (1) is consolidated with insulating stiff cylindrical shell (4), insulating stiff
The upper cover of cylindrical shell (4) can move and locking, two flexure electric material round platforms (2) it is opposite be placed in insulating stiff cylindrical shell
In body (4), give two opposite flexure electric material round platforms (2) certain pretightning force by insulating stiff cylindrical shell (4) upper cover,
The upper and lower surface of flexure electric material round platform (2) is coated with electrode (3), and electrode (3) is connected with the input terminal of charge amplifier (5), electricity
The output end of lotus amplifier (5) is connected with signal processing, display, memory module (6).
2. a kind of high shock acceleration sensor based on flexoelectric effect according to claim 1, it is characterised in that：
When measuring different acceleration, it is described flexure electric material round platform (2) size with take material different.
3. a kind of high shock acceleration sensor based on flexoelectric effect according to claim 1, it is characterised in that：Institute
It is small to state flexure electric material round platform (2), insulating stiff cylindrical shell (4) size, matrix (1) displacement is influenced small.
4. a kind of high shock acceleration sensor based on flexoelectric effect according to claim 1, it is characterised in that：Institute
Stating molecular structure of the material of flexure electric material round platform (2) using dielectric constant more than 1 has the material of centre symmetry.
5. a kind of high shock acceleration sensor based on flexoelectric effect according to claim 4, it is characterised in that：Institute
It is PVDF, polytetrafluoroethylene (PTFE) or barium strontium titanate to give an account of molecular structure of the electric constant more than 1 to have the material of centre symmetry.
6. a kind of high shock acceleration sensor based on flexoelectric effect according to claim 1, it is characterised in that：Institute
It is big to state matrix (1), the material stiffness of insulating stiff cylindrical shell (4) use.
7. a kind of high shock acceleration sensor based on flexoelectric effect according to claim 1, it is characterised in that：Institute
It states electrode (3) thickness and is less than at least one order of magnitude of flexure electric material round platform (2) height.
8. a kind of measurement method of high shock acceleration sensor based on flexoelectric effect described in claim 1, feature exist
In：When matrix (1) is vibrated with high-g level acceleration, matrix (1) is passed by the insulating stiff cylindrical shell (4) consolidated with matrix (1)
Flexure electric material round platform (2) is passed, flexure electric material round platform (2) is generated deflection deformation, flexure electric material round platform (2) by inertia force
Strain gradient is generated in its amount of deflection direction, due to the electric principle of flexure, passive flexure electric material round platform (2) generates pole on its surface
Change charge, is transferred to charge amplifier (5) through electrode (3) and is corresponding voltage signal, voltage signal warp by its linear transformation
The output end of charge amplifier (5) is transferred to signal processing, display, memory module (6), signal processing, display, memory module
(6) it carries out data processing and shows the acceleration of matrix high-g level.
9. measurement method according to claim 8, it is characterised in that：The signal processing, display, memory module (6) into
The method of row data processing is as follows：
Centrosymmetrical crystal bends and piezoelectric effect is not present in electric material, and material electrodes abbreviation list is described as：
Wherein Pi,εjk,μijkl,xlRespectively degree of polarization, strain, flexoelectric coefficient and gradient direction；For known material,
Known to its flexoelectric coefficient；
And electric polarization can be described as the ratio of charge and distribution of charges area, i.e.,
Wherein Qi, A is the area of the quantity of electric charge and counter electrode respectively；
Therefore the value of polarization charge and strain gradient are proportionate relationship, i.e., can know corresponding strain ladder by polarization charge
Degree；
Since there are acceleration for matrix (1), flexure electric material round platform (2) is passed to by insulating stiff cylindrical shell (4), makes to scratch
Bent electric material round platform (2) generates deflection deformation, i.e., there are certain relationships with deflection deformation for acceleration：
Wherein a, k, εjk, μijkl, xlRespectively substrate motion acceleration, proportionality coefficient related with material, strain, flexure electricity system
Number and gradient direction；
Flexure electric material round platform (2) generates polarization charge on the surface, is exported by electrode (3), matrix can be shown by calculating
The situation of change of acceleration.
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| CN110872190A (en) * | 2018-08-30 | 2020-03-10 | 中国科学技术大学 | Method for adjusting dielectric material apparent flexoelectric effect |
| CN109212265B (en) * | 2018-10-18 | 2020-04-17 | 长安大学 | Up-down laminated bending type flexural electric acceleration sensor |
| CN109212263B (en) * | 2018-10-18 | 2021-01-26 | 长安大学 | Round platform array type flexural electric acceleration sensor |
| CN109212264B (en) * | 2018-10-18 | 2020-03-31 | 长安大学 | Annular shear type bending electric acceleration sensor and laminated structure acceleration sensor |
| CN109507450A (en) * | 2018-10-30 | 2019-03-22 | 西安交通大学 | A kind of beam type bends electric acceleration transducer and acceleration measurement method |
| CN113489367A (en) * | 2021-06-08 | 2021-10-08 | 江苏大学 | Hollow truncated cone array micro displacement driver based on flexoelectric principle |
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| CN103616098A (en) * | 2013-12-06 | 2014-03-05 | 西安交通大学 | High-precision deflection electric type pressure sensor based on metal elastic element |
| CN103913643A (en) * | 2014-03-25 | 2014-07-09 | 西安交通大学 | Device and method for directly measuring flexoelectric coefficient based on charge measurement |
| CN105136898A (en) * | 2015-09-30 | 2015-12-09 | 西安交通大学 | Flexoelectric-dynamic-effect direct detection device and method based on charge detection |
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| US8288922B2 (en) * | 2006-06-30 | 2012-10-16 | The Penn State Research Foundation | Flexoelectric—piezoelectric composite based on flexoelectric charge separation |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103616098A (en) * | 2013-12-06 | 2014-03-05 | 西安交通大学 | High-precision deflection electric type pressure sensor based on metal elastic element |
| CN103913643A (en) * | 2014-03-25 | 2014-07-09 | 西安交通大学 | Device and method for directly measuring flexoelectric coefficient based on charge measurement |
| CN105136898A (en) * | 2015-09-30 | 2015-12-09 | 西安交通大学 | Flexoelectric-dynamic-effect direct detection device and method based on charge detection |
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