CN105158509A - Flexoelectric effect-based three-dimensional flow rate-of-change sensor and measuring method - Google Patents
Flexoelectric effect-based three-dimensional flow rate-of-change sensor and measuring method Download PDFInfo
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- CN105158509A CN105158509A CN201510524103.2A CN201510524103A CN105158509A CN 105158509 A CN105158509 A CN 105158509A CN 201510524103 A CN201510524103 A CN 201510524103A CN 105158509 A CN105158509 A CN 105158509A
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Abstract
The invention provides a flexoelectric effect-based three-dimensional flow rate-of-change sensor and a measuring method. The sensor comprises an L-shaped three-dimensional body element and a ball-shaped insulating material. The L-shaped three-dimensional body element comprises an insulating layer, an electrode layer and a flexoelectric material layer, wherein the layers are stacked up and the empty part of the L-shaped three-dimensional body element is filled with an insulating adhesive material. The electrode layer is connected with a charge amplifier. The output end of the charge amplifier is connected with a signal processing, display and storage module. During the measurement of the flow change rate, the fluid in a three-dimensional flow field impacts with the ball-shaped insulating material, so that the layers of the L-shaped three-dimensional body element are deformed. The flexoelectric material layer is provided with a strain gradient along the deflection direction thereof to generate four groups of polarization charges. The polarization charges are transferred to the charge amplifier via the electrode layer and then are processed, so that the three-dimensional flow rate of change can be displayed in real time. The sensor has the advantages of small size, little influence on the flow field, no power supply for the flexoelectric material layer, no extra mass block, wide measuring range, good real-time performance, direct measurement, high precision, simple structure and the like.
Description
Technical field
The present invention relates to sensor technical field, be specifically related to a kind of three-dimensional flow rate of change sensor based on flexoelectric effect and measuring method.
Background technology
In existing flow, fluid-velocity survey technology, mostly adopt Techniques in Electromagnetic Measurement, laser measuring technique.And except fluid-velocity survey, the Real-Time Monitoring of change in flow rate also has important application in military affairs, life, as: aircraft skin is in aircraft flight, and speed of incoming flow changes, and the power that covering is subject to changes, and aircraft flight is affected; During by petroleum pipe line transfer oil, oil flow changes, and oil is different to the impulsive force of pipeline, and the injury caused to pipeline is different; During galloping, crosswind wind speed rate of change has a serious impact running car.Existing change in flow rate measurement means mainly based on flow measurement, fluid-velocity survey, by carrying out the steps such as digitizing-difference-calculating calculate change in flow rate to flow, fluid-velocity survey result.The method has the shortcomings such as calculating is loaded down with trivial details, complex structure, precision are lower, and can not realize Real-Time Monitoring.
The existing piezoelectric acceleration transducer based on piezoelectric is widely used in the device of acceleration measurement.But piezoelectric acceleration transducer need place a mass on piezoelectric crystal, and get in order to any strain isolating test specimen is sent to piezoelectric element, generally to add strong back or select the material by rigidity is larger to manufacture, the weight difference of housing and pedestal seldom accounts for the half of sensor weight, shared by actual effective member, weight is less, and piezoelectric contains heavy metal material as one, its material itself also has potential threat to environment.
In order to solve above-mentioned prior art Problems existing, the object of the present invention is to provide a kind of sensing arrangement and measuring method of the change in flow rate based on flexoelectric effect.
Flexure electricity is present in all dielectrics, and its principle has just been suggested as far back as the sixties in last century and has obtained great development within the specific limits, and the simplified characterization equation containing the material electrodes of piezoelectric effect is:
Wherein P
i, e
ijk, σ
jk, ε
jk, μ
ijkl, x
lbe respectively degree of polarization, piezoelectric constant, stress, strain, flexure electric constant and gradient direction, on the right of equation, Section 1 is the piezoelectric effect that stress causes, Section 2 is the flexoelectric effect of the gradient direction caused because of strain gradient, owing to there is not piezoelectric effect in centrosymmetrical crystal, therefore Section 2 is only had to exist, namely
As can be seen from (1) (2), when the condition such as material, test specimen is certain, the polarization charge of molecular symmetry crystal exports and is directly proportional to its strain gradient, and there is certain relation in polarization charge and voltage, therefore, present invention employs the principle being realized electric charge output by strain gradient, measure the voltage produced by polarization charge, thus change in flow situation in flow measurement field for the treatment of carries out Real-Time Monitoring.
Typically, the order of magnitude of flexure electrical phenomena and size is closely related, and order of size is less, and its flexure electrical phenomena more plays a decisive role in polarization.
Summary of the invention
In order to solve above-mentioned prior art Problems existing, the object of the present invention is to provide a kind of three-dimensional flow rate of change sensor based on flexoelectric effect and measuring method, the feature such as there is broad quantum, fast response time, good, lightweight, the direct measurement of real-time, precision is high, structure is simple.
For reaching above object, the present invention adopts following technical scheme:
A kind of three-dimensional flow rate of change sensor based on flexoelectric effect, comprise L shape three-dimensional body element 1, described L shape three-dimensional body element 1 one end is consolidated on matrix, the other end connects spherical insulating material 2, L shape three-dimensional body element 1 comprises L shape hollow cavity insulation course 3, run through the flexure material layer 3-1 being arranged on L shape hollow cavity insulation course 3 inside, wherein bend the length of material layer 3-1, width and be highly all less than the length of L shape hollow cavity insulation course 3 hollow cavity, width and height; Inner one section of the L shape hollow cavity insulation course 3 near spherical insulating material 2 one end, four faces in the gap between L shape hollow cavity insulation course 3 and flexure material layer 3-1 are provided with two pairs of electrode layers, be respectively Z electrode layer opposing upper and lower to the 3-2 Y electrode layer relative with left and right to 3-3, described Z electrode layer, does not connect between each electrode layer 3-3 and flexure material layer 3-1 close contact mutually to 3-2, Y electrode layer; Away from spherical insulating material 2 one end and with Z electrode layer is set to 3-2, Y electrode layer to perpendicular another section of the L shape hollow cavity insulation course 3 of 3-3, four faces in the gap between L shape hollow cavity insulation course 3 and flexure material layer 3-1 are provided with two pairs of electrode layers, be respectively decoupling electrode layer opposing upper and lower to the 4-1 X electrode layer relative with left and right to 4-2, described decoupling electrode layer, does not connect between each electrode layer 4-2 and flexure material layer 3-1 close contact mutually to 4-1 and X electrode layer; The gap of described L shape three-dimensional body element 1 inside is filled by the sticky stuff 3-4 that insulate, and described L shape three-dimensional body element 1 outside surface heat-shrink tube is fastening; Described Z electrode layer is connected with the first passage of charge amplifier 5 to 3-2, Y electrode layer is connected with the second channel of charge amplifier 5 to 3-3, X electrode layer is connected with the third channel of charge amplifier 5 to 4-2, decoupling electrode layer is connected with the four-way of charge amplifier 5 to 4-1, and the output terminal of charge amplifier 5 is connected with signal transacting, display, memory module 6.
When there being the different speed of incoming flow rate of change demand of measurement, described L shape hollow cavity insulation course 3 is different with the insulating material that spherical insulating material 2 is taked.
Described spherical insulating material 2 is as main bearing member, and the size of three-dimensional flow rate of change sensor is much smaller than dimension of flow field to be measured, and the impact of stream field is minimum.
Described flexure material layer 3-1 is the material that molecular structure that specific inductive capacity is greater than 1 has centre symmetry.
The material that the molecular structure that described specific inductive capacity is greater than 1 has centre symmetry is PVDF, teflon or barium strontium titanate.
Described insulation sticky stuff 3-4 has stickiness, can transfer solid-state insulating material to by liquid state when being liquid state.
Having stickiness, can transfer solid-state insulating material to by liquid state during described liquid state is epoxy resin.
To 3-2, Y electrode layer, to 3-3, X electrode layer, to 4-2 and decoupling electrode layer, the thickness to 4-1 is less than at least one order of magnitude of thickness of flexure material layer 3-1 to described Z electrode layer.
Described X electrode layer is export electric charge that all directions change in flow rate cause to 3-3, Z electrode layer to 3-2 major function to 4-2, Y electrode layer, and decoupling electrode layer is control group and decoupling to the major function of 4-1.
The measuring method of the three-dimensional flow rate of change sensor based on flexoelectric effect described above, in flow field to be measured, when fluid impacts the spherical insulating material 2 of three-dimensional flow rate of change sensor along three directions with different flow velocitys, the power be subject to is passed to L shape three-dimensional body element 1 by spherical insulating material 2, the power be subject to is passed to electrode layer and insulation sticky stuff 3-4 by L shape hollow cavity insulation course 3, the power be subject to is passed to flexure material layer 3-1 by electrode layer and insulation sticky stuff 3-4, there is deformation in flexure material layer 3-1, produce deflection deformation, strain gradient is created in its amount of deflection direction, owing to bending electric principle, the raw four groups of polarization charges of this passive flexure material layer 3-1 surface common property, four groups of polarization charges are passed to charge amplifier 5 through electrode layer and are corresponding voltage signal by its linear transformation, wherein by Z electrode layer, the electric charge that 3-2 transmits is produced because three-dimensional flow rate of change sensor is subject to the impact of Z-direction in flow field, Y electrode layer produces because three-dimensional flow rate of change sensor is subject to the impact of Y-direction in flow field the electric charge that 3-3 transmits, X electrode layer produces because three-dimensional flow rate of change sensor is subject to the impact of X-direction in flow field the electric charge that 4-2 transmits, the electric charge that decoupling electrode layer transmits 4-1 in contrast, and there is the effect of decoupling, the voltage signal that four groups of electric charges are corresponding delivers to signal transacting through the output terminal of charge amplifier 5, display, memory module 6, signal transacting, display, memory module 6 records and shows the three-dimensional flow rate of change in flow field.
Wherein the data processing of signal transacting, display, memory module 6 inside is mainly based on following methods:
Namely centrosymmetrical crystal bends in electric material does not exist piezoelectric effect, and material electrodes abbreviation list is described as:
Wherein P
i, ε
jk, μ
ijkl, x
lbe respectively degree of polarization, strain, flexure electric constant and gradient direction.
And electric polarization can be described as the ratio of electric charge and CHARGE DISTRIBUTION area, namely
Wherein Q
i, A is the area that the quantity of electric charge and electric charge distribute respectively.
And the quantity of electric charge and voltage exist certain relation, namely
Wherein Q, C, U are the quantity of electric charge, electric capacity and electromotive force respectively.
Due to X, Y, the existence of Z-direction change in flow rate, make flexure material layer 3-1 produce deflection deformation, namely there is certain relation in change in flow rate and deflection deformation:
Wherein x, V, ε
jk, μ
ijkl, x
lbe respectively flow path direction, carry out flow path direction speed, strain, flexure electric constant and gradient direction.
Flexure material layer 3-1 produces polarization charge on each surface, respectively through X electrode layer, 4-2, Y electrode layer is exported 3-2 3-3, Z electrode layer, decoupling electrode layer to 4-1 as a control group, there is the effect of decoupling simultaneously, when there is certain drift angle in body axis system and earth coordinates, need signalization process, display, memory module to carry out coordinate system transformation to each change in flow rate based on body axis system, be converted into the change in flow rate of the three-dimensional under earth coordinates.
Compared to the prior art, tool has the following advantages in the present invention:
1) compared to electromagnetic flowmeter, described three-dimensional flow rate of change sensor is without the need to carrying out second differential to flow, and can directly measure change in flow rate, real-time is good.
2) compared to velocimeter, described three-dimensional flow rate of change sensor is without the need to carrying out once differentiation to flow velocity, and can directly measure change in flow rate, real-time is good.
3) compared to piezoelectric acceleration transducer, described three-dimensional flow rate of change sensor is without the need to mass, and susceptor mass is without the need to too large, and structure is simple, easy to use.
4) described three-dimensional flow rate of change sensor is little, and the impact of stream field is minimum, and carries out real-time measurement to flow velocity rate of change, and be applicable in multiple flow field, range of application is large.
5) described three-dimensional flow rate of change sensor is without the need to power supply, decreases the demand of system to power supply.
6) described three-dimensional flow rate of change sensor can measure three-dimensional change in flow rate simultaneously.
In a word, the present invention can avoid traditional measurement change in flow rate by the shortcoming such as carry out differential to flow or flow velocity, measurement mechanism weight is large, precision is low, complex structure, real-time are poor, has that broad quantum, fast response time, good, lightweight, the direct measurement of real-time, precision are high, advantages of simple structure and simple.
Accompanying drawing explanation
Fig. 1 is sensor construction schematic diagram of the present invention.
Fig. 2 is Fundamentals of Sensors figure of the present invention.
Fig. 3 is sensor cut-open view of the present invention.
Embodiment
Below in conjunction with drawings and the specific embodiments, the present invention is described in further detail.
As shown in Figure 1, Figure 2 and Figure 3, a kind of three-dimensional flow rate of change sensor based on flexoelectric effect of the present invention, comprise L shape three-dimensional body element 1, described L shape three-dimensional body element 1 one end is consolidated on matrix, the other end connects spherical insulating material 2, L shape three-dimensional body element 1 comprises L shape hollow cavity insulation course 3, run through the flexure material layer 3-1 being arranged on L shape hollow cavity insulation course 3 inside, wherein bend the length of material layer 3-1, width and be highly all less than the length of L shape hollow cavity insulation course 3 hollow cavity, width and height; Inner one section of the L shape hollow cavity insulation course 3 near spherical insulating material 2 one end, four faces in the gap between L shape hollow cavity insulation course 3 and flexure material layer 3-1 are provided with two pairs of electrode layers, be respectively Z electrode layer opposing upper and lower to the 3-2 Y electrode layer relative with left and right to 3-3, described Z electrode layer, does not connect between each electrode layer 3-3 and flexure material layer 3-1 close contact mutually to 3-2, Y electrode layer; Away from spherical insulating material 2 one end and with Z electrode layer is set to 3-2, Y electrode layer to perpendicular another section of the L shape hollow cavity insulation course 3 of 3-3, four faces in the gap between L shape hollow cavity insulation course 3 and flexure material layer 3-1 are provided with two pairs of electrode layers, be respectively decoupling electrode layer opposing upper and lower to the 4-1 X electrode layer relative with left and right to 4-2, described decoupling electrode layer, does not connect between each electrode layer 4-2 and flexure material layer 3-1 close contact mutually to 4-1 and X electrode layer; The gap of described L shape three-dimensional body element 1 inside is filled by the sticky stuff 3-4 that insulate, and described L shape three-dimensional body element 1 outside surface heat-shrink tube is fastening; Described Z electrode layer is connected with the first passage of charge amplifier 5 to 3-2, Y electrode layer is connected with the second channel of charge amplifier 5 to 3-3, X electrode layer is connected with the third channel of charge amplifier 5 to 4-2, decoupling electrode layer is connected with the four-way of charge amplifier 5 to 4-1, and the output terminal of charge amplifier 5 is connected with signal transacting, display, memory module 6.
As the preferred embodiment of the present invention, when there being the different speed of incoming flow rate of change demand of measurement, described L shape hollow cavity insulation course 3 is different with the insulating material that spherical insulating material 2 is taked, as: silicon, PVC plastic flitch etc.
As the preferred embodiment of the present invention, described spherical insulating material 2 is as main bearing member, be designed to the spherical impact that can reduce sensor stream field, and the size of three-dimensional flow rate of change sensor is much smaller than dimension of flow field to be measured, the impact of stream field is minimum.
As the preferred embodiment of the present invention, the flexure material layer 3-1 in described three-dimensional flow rate of change sensor is the material that molecular structure that specific inductive capacity is greater than 1 has centre symmetry, as: PVDF, teflon or barium strontium titanate etc.
As the preferred embodiment of the present invention, insulation sticky stuff 3-4 in described three-dimensional flow rate of change sensor is for having stickiness time liquid, solid-state insulating material can be transferred to by liquid state, as: epoxy resin etc., have good insulation characterisitic and stronger adhesion.
As the preferred embodiment of the present invention, to 3-2, Y electrode layer, to 3-3, X electrode layer, to 4-2 and decoupling electrode layer, the thickness to 4-1 is less than at least one order of magnitude of thickness of flexure material layer 3-1 to the Z electrode layer in described three-dimensional flow rate of change sensor.
As the preferred embodiment of the present invention, X electrode layer in described three-dimensional flow rate of change sensor to 4-2, Y electrode layer to 3-3, Z electrode layer to 3-2 major function be export X, Y respectively, electric charge that Z-direction change in flow rate causes, decoupling electrode layer is control group and decoupling to the major function of 4-1.
As Fig. 1, shown in Fig. 2 and Fig. 3, measuring method of the present invention is: when body axis system is consistent with earth coordinates, in flow field to be measured, when fluid impacts the spherical insulating material 2 of three-dimensional flow rate of change sensor along three directions with different flow velocitys, the power be subject to is passed to L shape three-dimensional body element 1 by spherical insulating material 2, the power be subject to is passed to electrode layer and insulation sticky stuff 3-4 by L shape hollow cavity insulation course 3, the power be subject to is passed to flexure material layer 3-1 by electrode layer and insulation sticky stuff 3-4, there is deformation in flexure material layer 3-1, produce deflection deformation, strain gradient is created in its amount of deflection direction, owing to bending electric principle, the raw four groups of polarization charges of this passive flexure material layer 3-1 surface common property, four groups of polarization charges are passed to charge amplifier 5 through electrode layer and are corresponding voltage signal by its linear transformation, wherein by Z electrode layer, the electric charge that 3-2 transmits is produced because three-dimensional flow rate of change sensor is subject to the impact of Z-direction in flow field, Y electrode layer produces because three-dimensional flow rate of change sensor is subject to the impact of Y-direction in flow field the electric charge that 3-3 transmits, X electrode layer produces because three-dimensional flow rate of change sensor is subject to the impact of X-direction in flow field the electric charge that 4-2 transmits, the electric charge that decoupling electrode layer transmits 4-1 in contrast, and there is the effect of decoupling, the voltage signal that four groups of electric charges are corresponding delivers to signal transacting through the output terminal of charge amplifier 5, display, memory module 6, signal transacting, display, memory module 6 records and shows the three-dimensional flow rate of change in flow field.
Wherein the data processing of signal transacting, display, memory module 6 inside is mainly based on following methods:
Piezoelectric effect is there is not, being simply described as of material electrodes in centrosymmetrical crystal (namely bending electric material):
Wherein P
i, ε
jk, μ
ijkl, x
lbe respectively degree of polarization, strain, flexure electric constant and gradient direction.
And electric polarization can be described as the ratio of electric charge and CHARGE DISTRIBUTION area, namely
Wherein Q
i, A is the area that the quantity of electric charge and electric charge distribute respectively.
And the quantity of electric charge and voltage exist certain relation, namely
Wherein Q, C, U are the quantity of electric charge, electric capacity and electromotive force respectively.
Due to X, Y, the existence of Z-direction change in flow rate, make flexure material layer 3-1 produce deflection deformation, namely there is certain relation in change in flow rate and deflection deformation:
Wherein x, V, ε
jk, μ
ijkl, x
lbe respectively flow path direction, carry out flow path direction speed, strain, flexure electric constant and gradient direction.
Flexure material layer 3-1 produces polarization charge on each surface, and export 3-2 3-3, Z electrode layer 4-2, Y electrode layer respectively through X electrode layer, decoupling electrode layer to 4-1 as a control group, has the effect of decoupling simultaneously.The body axis system of present embodiment is consistent with earth coordinates, without the need to carrying out coordinate system transformation.
Claims (10)
1. the three-dimensional flow rate of change sensor based on flexoelectric effect, it is characterized in that: comprise L shape three-dimensional body element (1), described L shape three-dimensional body element (1) one end is consolidated on matrix, the other end connects spherical insulating material (2), L shape three-dimensional body element (1) comprises L shape hollow cavity insulation course (3), run through and be arranged on the inner flexure material layer (3-1) of L shape hollow cavity insulation course (3), wherein bend the length of material layer (3-1), width and be highly all less than the length of L shape hollow cavity insulation course (3) hollow cavity, width and height, inner one section of L shape hollow cavity insulation course (3) near spherical insulating material (2) one end, four faces in the gap between L shape hollow cavity insulation course (3) and flexure material layer (3-1) are provided with two pairs of electrode layers, be respectively Z electrode layer opposing upper and lower to (3-2) Y electrode layer relative with left and right to (3-3), described Z electrode layer, does not connect between each electrode layer (3-3) and flexure material layer (3-1) close contact mutually to (3-2), Y electrode layer, away from spherical insulating material (2) one end and with Z electrode layer is set to (3-2), Y electrode layer is to perpendicular another section of L shape hollow cavity insulation course (3) of (3-3), four faces in the gap between L shape hollow cavity insulation course (3) and flexure material layer (3-1) are provided with two pairs of electrode layers, be respectively decoupling electrode layer opposing upper and lower to (4-1) X electrode layer relative with left and right to (4-2), described decoupling electrode layer to (4-1) and X electrode layer to (4-2) and flexure material layer (3-1) close contact, do not connect mutually between each electrode layer, the gap that described L shape three-dimensional body element (1) is inner is filled by the sticky stuff that insulate (3-4), and described L shape three-dimensional body element (1) outside surface heat-shrink tube is fastening, described Z electrode layer is connected with the first passage of charge amplifier (5) to (3-2), Y electrode layer is connected with the second channel of charge amplifier (5) to (3-3), X electrode layer is connected with the third channel of charge amplifier (5) to (4-2), decoupling electrode layer is connected with the four-way of charge amplifier (5) to (4-1), and the output terminal of charge amplifier (5) is connected with signal transacting, display, memory module (6).
2. a kind of three-dimensional flow rate of change sensor based on flexoelectric effect according to claim 1, it is characterized in that: when there being the different speed of incoming flow rate of change demand of measurement, described L shape hollow cavity insulation course (3) is different with the insulating material that spherical insulating material (2) is taked.
3. a kind of three-dimensional flow rate of change sensor based on flexoelectric effect according to claim 1, it is characterized in that: described spherical insulating material (2) is as main bearing member, and the size of three-dimensional flow rate of change sensor is much smaller than dimension of flow field to be measured, and the impact of stream field is minimum.
4. a kind of three-dimensional flow rate of change sensor based on flexoelectric effect according to claim 1, is characterized in that: described flexure material layer (3-1) has the material of centre symmetry for molecular structure that specific inductive capacity is greater than 1.
5. a kind of three-dimensional flow rate of change sensor based on flexoelectric effect according to claim 4, is characterized in that: the material that the molecular structure that described specific inductive capacity is greater than 1 has centre symmetry is PVDF, teflon or barium strontium titanate.
6. a kind of three-dimensional flow rate of change sensor based on flexoelectric effect according to claim 1, is characterized in that: described insulation sticky stuff (3-4) is for having stickiness time liquid, can transferring solid-state insulating material to by liquid state.
7. a kind of three-dimensional flow rate of change sensor based on flexoelectric effect according to claim 6, is characterized in that: having stickiness, can transfer solid-state insulating material to by liquid state during described liquid state is epoxy resin.
8. a kind of three-dimensional flow rate of change sensor based on flexoelectric effect according to claim 1, it is characterized in that: described Z electrode layer is to (3-2), Y electrode layer to (3-3), and X electrode layer is less than at least one order of magnitude of thickness of flexure material layer (3-1) to (4-2) and the thickness of decoupling electrode layer to (4-1).
9. a kind of three-dimensional flow rate of change sensor based on flexoelectric effect according to claim 1, it is characterized in that: described X electrode layer is export electric charge that all directions change in flow rate cause to (3-3), Z electrode layer to (3-2) major function to (4-2), Y electrode layer, and decoupling electrode layer is control group and decoupling to the major function of (4-1).
10. the measuring method of a kind of three-dimensional flow rate of change sensor based on flexoelectric effect according to claim 1, it is characterized in that: in flow field to be measured, when fluid impacts spherical insulating material (2) of three-dimensional flow rate of change sensor along three directions with different flow velocitys, the power be subject to is passed to L shape three-dimensional body element (1) by spherical insulating material (2), the power be subject to is passed to electrode layer and insulation sticky stuff (3-4) by L shape hollow cavity insulation course (3), the power be subject to is passed to flexure material layer (3-1) by electrode layer and insulation sticky stuff (3-4), there is deformation in flexure material layer (3-1), produce deflection deformation, strain gradient is created in its amount of deflection direction, owing to bending electric principle, the raw four groups of polarization charges of the surperficial common property of this passive flexure material layer (3-1), four groups of polarization charges are passed to charge amplifier (5) through electrode layer and are corresponding voltage signal by its linear transformation, wherein by Z electrode layer, the electric charge that (3-2) transmits is produced because three-dimensional flow rate of change sensor is subject to the impact of Z-direction in flow field, Y electrode layer produces because three-dimensional flow rate of change sensor is subject to the impact of Y-direction in flow field the electric charge that (3-3) transmits, X electrode layer produces because three-dimensional flow rate of change sensor is subject to the impact of X-direction in flow field the electric charge that (4-2) transmits, the electric charge that decoupling electrode layer transmits (4-1) in contrast, and there is the effect of decoupling, the voltage signal that four groups of electric charges are corresponding delivers to signal transacting through the output terminal of charge amplifier (5), display, memory module (6), signal transacting, display, memory module (6) records and shows the three-dimensional flow rate of change in flow field.
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