CN105150050A - Universal vacuum clamp for optical element polishing - Google Patents
Universal vacuum clamp for optical element polishing Download PDFInfo
- Publication number
- CN105150050A CN105150050A CN201510450081.XA CN201510450081A CN105150050A CN 105150050 A CN105150050 A CN 105150050A CN 201510450081 A CN201510450081 A CN 201510450081A CN 105150050 A CN105150050 A CN 105150050A
- Authority
- CN
- China
- Prior art keywords
- optical element
- support arm
- vacuum
- protection layer
- universal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/005—Blocking means, chucks or the like; Alignment devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention discloses a universal vacuum clamp for optical element polishing and belongs to the technical field of optical cold machining. The universal vacuum clamp aims to solve the problems that in the prior art, the structure is complicated, the universality is poor and machining cost is high. The universal vacuum clamp for optical element polishing comprises a vacuum clamp body and a sealing protective layer. The vacuum clamp body is of an integrated structure and comprises a hollow structure which is formed through a supporting arm. The upper end of the supporting arm makes contact with an optical element to be polished. The position where the upper end of the supporting arm makes contact with the optical element to be polished is sealed through the sealing protective layer. The hollow structure is communicated with the outside through an air suction hole. According to the universal vacuum clamp for optical element polishing, the upper end of the supporting arm makes contact with the optical element so that the clamp can be suitable for clamping planar, spherical and aspheric optical elements of different sizes and different shapes; the clamp is simple in structure and high in universality.
Description
Technical field
The invention belongs to optics cold processing technique field, be specifically related to a kind of universal optical element polishing vacuum fixture.
Background technology
When the optical element of the such as lens and so on used in the high-precision optical instruments such as polishing such as light projection photoetching objective lens, need to carry out clamping to optical element.See accompanying drawing 1; the clamping of optical element adopts vacuum fixture to adsorb at present; described vacuum fixture is made up of clamp body 2, flange shaft 4, screw 5, sealing ring 6 and protective layer 7 five part; this vacuum fixture structure is comparatively complicated; and for the optical element of different size and shape; need to make clamp body 2 corresponding with it and sealing ring 6; the optical element that often two curvature radius are different just needs making two clamp bodies 2; poor universality, adds process time and the processing cost of fixture.
Summary of the invention
The object of the invention is to propose a kind of universal optical element polishing vacuum fixture, solve the problem that the complex structure of prior art existence, poor universality and processing cost are high.
For achieving the above object, one of the present invention universal optical element polishing vacuum fixture comprises the concrete and seal protection layer of vacuum clip;
Described vacuum clip is specifically integral type structure; described vacuum clip specifically comprises a hollow structure formed by support arm; described support arm upper end contacts with polished optical element; support arm upper end and polished optical element contact position are sealed by seal protection layer, and described hollow structure is communicated with by aspirating hole with outside.
The concrete lower end of described vacuum clip is provided with connecting axle, and described aspirating hole is coaxial with described connecting axle.
Described support arm and described optical element contact trace are circular.
Described support arm upper end is arc structure, and described seal protection layer is U-shaped structure, and the seal protection layer of U-shaped structure and the arc structure of described support arm upper end bond.
Described seal protection layer adopts elastomeric material to make.
Described vacuum clip specifically adopts stainless steel material to make.
Beneficial effect of the present invention is: a kind of universal optical element polishing vacuum fixture of the present invention comprises a hollow structure formed by support arm, support arm upper end contacts with polished optical element, contact position is sealed by seal protection layer, hollow structure is made to form closed structure, this vacuum fixture is installed in the workpiece axis hole of burnishing machine by connecting axle, and by aspirating hole, above-mentioned hollow structure is vacuumized, realize the vacuum chuck to optical element, this fixture carries out the vacuum chuck of optical element when the optical element of polishing such as lens and so on, vacuum fixture of the present invention is contacted with optical element by support arm upper end, go for the plane of different size and shape, the clamping of sphere and aspherical optical element, this clamp structure is simple, highly versatile.
Accompanying drawing explanation
Fig. 1 is vacuum fixture structural representation in prior art;
Fig. 2 is one of the present invention universal optical element polishing vacuum fixture overall structure schematic diagram;
Fig. 3 is the schematic diagram of a kind of universal optical element polishing vacuum fixture clamping plane optical element of the present invention;
Fig. 4 is the schematic diagram of a kind of universal optical element polishing vacuum fixture clamping convex surface optical element of the present invention;
Wherein: 1, optical element, 2, vacuum clip is concrete, 201, connecting axle, 202, aspirating hole, 203, support arm, 3, seal protection layer, 4, flange shaft, 5, screw, 6, sealing ring, 7, protective layer.
Detailed description of the invention
Below in conjunction with accompanying drawing, embodiments of the present invention are described further.
See accompanying drawing 2, one of the present invention universal optical element polishing vacuum fixture comprises vacuum clip concrete 2 and seal protection layer 3;
Described vacuum clip concrete 2 is integral type structure; described vacuum clip concrete 2 comprises a hollow structure formed by support arm 203; described support arm 203 upper end contacts with polished optical element 1; support arm 203 upper end and polished optical element 1 contact position are sealed by seal protection layer 3, and described hollow structure is communicated with by aspirating hole 202 with outside.
Concrete 2 lower ends of described vacuum clip are provided with connecting axle 201, and described aspirating hole 202 is coaxial with described connecting axle 201.
Described support arm 203 and described optical element 1 contact trace are circular.
Described support arm 203 upper end is arc structure, and described seal protection layer 3 is U-shaped structure, and the seal protection layer 3 of U-shaped structure bonds with the arc structure of described support arm 203 upper end, supports the contact surface of polished optical element 1.
Described seal protection layer 3 adopts elastomeric material to make.
Described vacuum clip concrete 2 adopts stainless steel material to make.
See accompanying drawing 3 and accompanying drawing 4, vacuum fixture of the present invention goes for the clamping of the plane of different size and shape, sphere and aspherical optical element 1.
Concrete using method of the present invention is: be first installed in the workpiece axis hole of burnishing machine by this fixture connecting axle 201; then optical element 1 is positioned on described seal protection layer 3; open vacuum system; force value is set to 1 ~ 3bar; the contact surface of absorption optical element 1; then by playing table, optical element 1 being felt relieved, increasing vacuum pressure value and to 6 ~ 8bar, optical element 1 being sucked.
Claims (6)
1. a universal optical element polishing vacuum fixture, comprise vacuum clip concrete (2) and seal protection layer (3), it is characterized in that, described vacuum clip concrete (2) is integral type structure, described vacuum clip concrete (2) comprises a hollow structure formed by support arm (203), described support arm (203) upper end contacts with polished optical element (1), support arm (203) upper end and polished optical element (1) contact position are sealed by seal protection layer (3), described hollow structure is communicated with by aspirating hole (202) with outside.
2. one according to claim 1 universal optical element polishing vacuum fixture, it is characterized in that, concrete (2) lower end of described vacuum clip is provided with connecting axle (201), and described aspirating hole (202) is coaxial with described connecting axle (201).
3. one according to claim 1 and 2 universal optical element polishing vacuum fixture, is characterized in that, described support arm (203) and described optical element (1) contact trace are circular.
4. one according to claim 1 universal optical element polishing vacuum fixture; it is characterized in that; described support arm (203) upper end is arc structure; described seal protection layer (3) is U-shaped structure, and the seal protection layer (3) of U-shaped structure and the arc structure of described support arm (203) upper end bond.
5. the one universal optical element polishing vacuum fixture according to claim 1,2 or 4, is characterized in that, described seal protection layer (3) adopts elastomeric material to make.
6. one according to claim 1 universal optical element polishing vacuum fixture, is characterized in that, described vacuum clip concrete (2) adopts stainless steel material to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510450081.XA CN105150050A (en) | 2015-07-28 | 2015-07-28 | Universal vacuum clamp for optical element polishing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510450081.XA CN105150050A (en) | 2015-07-28 | 2015-07-28 | Universal vacuum clamp for optical element polishing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105150050A true CN105150050A (en) | 2015-12-16 |
Family
ID=54791246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510450081.XA Pending CN105150050A (en) | 2015-07-28 | 2015-07-28 | Universal vacuum clamp for optical element polishing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105150050A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111002493A (en) * | 2019-11-26 | 2020-04-14 | 天津津航技术物理研究所 | Diamond turning method for large-caliber germanium single crystal lens |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3874127A (en) * | 1973-01-03 | 1975-04-01 | Coburn Optical Ind | Vacuum chuck with sealable cavity |
| JPH08216006A (en) * | 1995-02-09 | 1996-08-27 | Fuji Photo Optical Co Ltd | Lens wiping device |
| JP2002086327A (en) * | 2000-01-27 | 2002-03-26 | Seiko Epson Corp | Jig for machining |
| US6419570B1 (en) * | 1999-05-03 | 2002-07-16 | Wernicke & Co. Gmbh | Holding device for a spectacle glass |
| US6622599B1 (en) * | 1998-05-21 | 2003-09-23 | Ophir Optronics Ltd. | Precision double-sided aspheric element |
| US6855036B1 (en) * | 2003-08-05 | 2005-02-15 | Corning Incorporated | Part-holding fixture for grinding wedged optical flats |
| JP2005279827A (en) * | 2004-03-29 | 2005-10-13 | Seiko Epson Corp | Fixing method and fixing device |
| CN104139326A (en) * | 2014-07-29 | 2014-11-12 | 中国科学院长春光学精密机械与物理研究所 | Vacuum clamp for centering optical element in machining process |
-
2015
- 2015-07-28 CN CN201510450081.XA patent/CN105150050A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3874127A (en) * | 1973-01-03 | 1975-04-01 | Coburn Optical Ind | Vacuum chuck with sealable cavity |
| JPH08216006A (en) * | 1995-02-09 | 1996-08-27 | Fuji Photo Optical Co Ltd | Lens wiping device |
| US6622599B1 (en) * | 1998-05-21 | 2003-09-23 | Ophir Optronics Ltd. | Precision double-sided aspheric element |
| US6419570B1 (en) * | 1999-05-03 | 2002-07-16 | Wernicke & Co. Gmbh | Holding device for a spectacle glass |
| JP2002086327A (en) * | 2000-01-27 | 2002-03-26 | Seiko Epson Corp | Jig for machining |
| US6855036B1 (en) * | 2003-08-05 | 2005-02-15 | Corning Incorporated | Part-holding fixture for grinding wedged optical flats |
| JP2005279827A (en) * | 2004-03-29 | 2005-10-13 | Seiko Epson Corp | Fixing method and fixing device |
| CN104139326A (en) * | 2014-07-29 | 2014-11-12 | 中国科学院长春光学精密机械与物理研究所 | Vacuum clamp for centering optical element in machining process |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111002493A (en) * | 2019-11-26 | 2020-04-14 | 天津津航技术物理研究所 | Diamond turning method for large-caliber germanium single crystal lens |
| CN111002493B (en) * | 2019-11-26 | 2022-03-29 | 天津津航技术物理研究所 | Diamond turning method for large-caliber germanium single crystal lens |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20151216 |