CN104044068A - Vacuum clamp for milling optical elements - Google Patents
Vacuum clamp for milling optical elements Download PDFInfo
- Publication number
- CN104044068A CN104044068A CN201410311667.3A CN201410311667A CN104044068A CN 104044068 A CN104044068 A CN 104044068A CN 201410311667 A CN201410311667 A CN 201410311667A CN 104044068 A CN104044068 A CN 104044068A
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- CN
- China
- Prior art keywords
- vacuum fixture
- optical element
- fixture body
- vacuum clamp
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/005—Blocking means, chucks or the like; Alignment devices
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention provides a vacuum clamp for milling optical elements, and belongs to the technical field of optical cold processing. The vacuum clamp aims to solve the problems that in the prior art, the requirement for diameter tolerance of a workpiece is strict, and thin optical elements are prone to deformation in the milling process. The vacuum clamp comprises a vacuum clamp body, a sealing ring, a protection layer, protection blocks and stop screws. The vacuum clamp body is of an integrated cylindrical structure, an air exhaust central hole is formed in the axis of the vacuum clamp body, a supporting face of the vacuum clamp body is the same as a contact face of an optical element in shape, an annular groove is formed in the supporting face, and the sealing ring is arranged in the annular groove. The supporting face of the vacuum clamp body makes contact with the optical element through the protection layer, a plurality of protection blocks are evenly distributed on the side face of the vacuum clamp body in the circumference direction, threaded holes II are formed in the upper portions of the protection blocks, and the stop screws are matched with the threaded holes II to push the side face of the optical element. The protection blocks evenly distributed on the side face of the vacuum clamp body in the circumference direction prevent the optical element from falling and being damaged in the milling process.
Description
Technical field
The invention belongs to optics cold processing technique field, be specifically related to a kind of optical element milling vacuum fixture.
Background technology
The optical element such as lens using in the high accuracy optical instruments such as light projection photoetching objective lens is in milling process, plane and sphere element generally adopt diamond cup wheel to process, non-spherical element adopts diamond dish emery wheel to process, the clamping of optical element adopts the fixture of vacuum suction conventionally, " contemporary optics manufacturing technology " book (Shu Chaolian chief editor) P119 page that National Defense Industry Press published in 2008 discloses a kind of technical scheme of vacuum adsorption fixture, referring to accompanying drawing 1, this vacuum adsorption fixture comprises vacuum fixture body 2 and rubber blanket 8, this fixture requires strict to optical element diameter tolerance, generally between-0.05～-0.10mm, diameter is excessive, put to enter, diameter is too small, easily produce eccentric, this vacuum fixture body lacks the support to center of optical element in addition, easily produces distortion in some thinner optical element milling processes.
Summary of the invention
The object of the invention is to propose a kind of optical element milling vacuum fixture, what solve prior art existence requires the easy problem that produces distortion in strict and thinner optical element milling process to optical element diameter tolerance.
For achieving the above object, a kind of optical element milling of the present invention comprises vacuum fixture body, sealing ring, protective layer, protection piece and stop screw with vacuum fixture;
Described vacuum fixture body is cylindrical integral structure, and described vacuum fixture body axis place has the centre bore of bleeding, and the supporting surface of this vacuum fixture body is identical with optical element contact-making surface shape, on described supporting surface, is provided with cannelure;
Described sealing ring is arranged in described cannelure, and the supporting surface of vacuum fixture body contacts with optical element by protective layer, and described protective layer is by being glued on the supporting surface of vacuum fixture body.Described vacuum fixture body side is uniform a plurality of protection pieces circumferentially, and described protection piece top is provided with screwed hole II, and described stop screw coordinates and withstands optical element side with described screwed hole II.
Uniform four the screwed hole I of described vacuum fixture body lower surface.
Described vacuum fixture body side circumferentially uniform a plurality of protection pieces is specially: described vacuum fixture body side is uniform a plurality of planes circumferentially; in described each plane, be provided with two screwed hole III; described protection piece and two screwed hole III relative positions are provided with groove, and screw coordinates realization protection piece fixing on vacuum fixture body through the groove on protection piece with the screwed hole III on vacuum fixture body.
In the middle of described groove, be square, two ends are semicircle.
Described a plurality of protection piece is specially three or four.
Described protective layer be 1～2mm thick without abrasive material polyurethane material.
Beneficial effect of the present invention is: a kind of optical element milling of the present invention is connected with the flange that vacuum fixture is used with milling machine tool working piece axle by four screwed hole I uniform below vacuum fixture body; vacuum fixture body contacts with optical element by protective layer; by sealing ring, realize sealing, circumferential uniform a plurality of protection pieces in vacuum fixture body side.The present invention is simple in structure, and convenient mounting and clamping is without any requirement to optical element diameter tolerance, can avoid optical element in milling process be out of shape and drop simultaneously.
Accompanying drawing explanation
Fig. 1 is optical element milling vacuum fixture cutaway view in prior art;
Fig. 2 is the overall structure cutaway view of vacuum fixture for a kind of optical element milling of the present invention;
Fig. 3 is the vacuum fixture body construction schematic diagram of vacuum fixture for a kind of optical element milling of the present invention;
Fig. 4 is that a kind of optical element milling of the present invention is with protecting block structure schematic diagram in vacuum fixture;
Wherein: 1, optical element, 2, vacuum fixture body, 201, the centre bore of bleeding; 202, supporting surface, 203, cannelure, 204, screwed hole I; 205, screwed hole III, 3, sealing ring, 4, protective layer; 5, protection piece; 501, groove, 502, screwed hole II, 6, screw; 7, stop screw, 8, rubber blanket.
The specific embodiment
Below in conjunction with accompanying drawing, embodiments of the present invention are described further.
Referring to accompanying drawing 2, accompanying drawing 3 and accompanying drawing 4, a kind of optical element 1 milling of the present invention comprises vacuum fixture body 2, sealing ring 3, protective layer 4, protection piece 5 and stop screw 7 with vacuum fixture;
Described vacuum fixture body 2 is cylindrical integral structure, the axis place of described vacuum fixture body 2 has the centre bore 201 of bleeding, the supporting surface 202 of this vacuum fixture body 2 is identical with optical element contact-making surface shape, on described supporting surface 202, is provided with cannelure 203;
Described sealing ring 3 is arranged in described cannelure 203; the supporting surface 202 of vacuum fixture body 2 contacts with optical element 1 by protective layer 4; described protective layer 4 is by being glued on the supporting surface 202 of vacuum fixture body 2; described vacuum fixture body 2 sides are uniform a plurality of protection pieces 5 circumferentially; described protection piece 5 tops are provided with screwed hole II 502, and described stop screw 7 coordinates and withstands optical element 1 side with described screwed hole II 502.
Uniform four the screwed hole I 204 of described vacuum fixture body 2 lower surfaces.
Described vacuum fixture body 2 sides circumferentially uniform a plurality of protection pieces 5 are specially: described vacuum fixture body 2 sides are uniform a plurality of planes circumferentially; in described each plane, be provided with two screwed hole III 205; described protection piece 5 and two screwed hole III 205 relative positions are provided with groove 501, and screw 6 coordinates realization protection piece 5 fixing on vacuum fixture body 2 through the groove 501 on protection piece 5 with the screwed hole III 205 on vacuum fixture body 2.
In the middle of described groove 501, be square, two ends are semicircle.
Described a plurality of protection piece 5 is specially three or four.
Described stop screw 7 adopts resin material to make, and described vacuum fixture body 2 and protection piece 5 adopt duralumin material to make, and described sealing ring 3 is made by elastomeric material, and described protective layer 4 is made without abrasive material polyurethane material by 1～2mm is thick.
The present invention can clamping optical element 1 have spherical mirror, level crossing and aspherical mirror etc.
Concrete using method of the present invention is: first this fixture is connected on the workpiece spindle of milling machine tool working, optical element 1 is positioned on this fixture, open vacuum system, force value is made as 1～3bar, optical element 1 is adsorbed on this fixture, then by playing table by optical element 1 centering, increase vacuum pressure value to 6～8bar optical element 1 is sucked, the last light stop screw 7 of adjusting withstands optical element 1 side.
Claims (6)
1. an optical element milling vacuum fixture, comprises vacuum fixture body (2), it is characterized in that, also comprises sealing ring (3), protective layer (4), protection piece (5) and stop screw (7);
Described vacuum fixture body (2) is cylindrical integral structure, the axis place of this vacuum fixture body (2) has the centre bore of bleeding (201), the supporting surface (202) of this vacuum fixture body (2) is identical with optical element (1) contact-making surface shape, is provided with cannelure (203) on described supporting surface (202);
Described sealing ring (3) is arranged in described cannelure (203); the supporting surface (202) of vacuum fixture body (2) contacts with optical element (1) by protective layer (4); described vacuum fixture body (2) side is uniform a plurality of protection pieces (5) circumferentially; described protection piece (5) top is provided with screwed hole II (502), and described stop screw (7) coordinates with described screwed hole II (502) and withstands optical element (1) side.
2. a kind of optical element milling vacuum fixture according to claim 1, is characterized in that uniform four the screwed hole I of described vacuum fixture body (2) lower surface (204).
3. a kind of optical element milling vacuum fixture according to claim 1, it is characterized in that, described vacuum fixture body (2) side circumferentially uniform a plurality of protection pieces (5) is specially: described vacuum fixture body (2) side is uniform a plurality of planes circumferentially, in described each plane, be provided with two screwed hole III (205), described protection piece (5) is provided with groove (501) with two screwed hole III (205) relative position, screw (6) coordinates realization protection piece (5) fixing on vacuum fixture body (2) through the groove (501) on protection piece (5) with the screwed hole III (205) on vacuum fixture body (2).
4. a kind of optical element milling vacuum fixture according to claim 3, is characterized in that, in the middle of described groove (501), is square, and two ends are semicircle.
5. according to a kind of optical element milling vacuum fixture described in claim 1 or 3, it is characterized in that, described a plurality of protection pieces (5) are specially three or four.
6. a kind of optical element milling vacuum fixture according to claim 1, described protective layer (4) be 1～2mm thick without abrasive material polyurethane material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410311667.3A CN104044068A (en) | 2014-07-01 | 2014-07-01 | Vacuum clamp for milling optical elements |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410311667.3A CN104044068A (en) | 2014-07-01 | 2014-07-01 | Vacuum clamp for milling optical elements |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104044068A true CN104044068A (en) | 2014-09-17 |
Family
ID=51497719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410311667.3A Pending CN104044068A (en) | 2014-07-01 | 2014-07-01 | Vacuum clamp for milling optical elements |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104044068A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104647199A (en) * | 2015-01-22 | 2015-05-27 | 燕山大学 | Concave embedding type single surface precise grinding disc |
| CN107471036A (en) * | 2017-06-20 | 2017-12-15 | 滁州恒通磁电科技有限公司 | It is a kind of to clamp feed arrangement for the polishing of magnetic shoe outer arc |
| CN112405054A (en) * | 2020-10-30 | 2021-02-26 | 中国工程物理研究院材料研究所 | Thin-wall shell part clamping device and method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007168025A (en) * | 2005-12-22 | 2007-07-05 | Lintec Corp | Holding table, processing device of held article and processing device of semiconductor wafer |
| CN101918176A (en) * | 2008-01-10 | 2010-12-15 | 株式会社纳米光学能量 | Be used to make the manufacture method of grinding attachment, optical element of optical element and the micrometric measurement device that the shape/size of the mould that is used to make optical element or optical element is carried out micrometric measurement |
| CN102240933A (en) * | 2011-07-07 | 2011-11-16 | 江铃汽车股份有限公司 | Special-shaped punching grind clamp |
| CN102501155A (en) * | 2011-10-31 | 2012-06-20 | 中国科学院长春光学精密机械与物理研究所 | High-accuracy fixture for polishing optical element |
| CN202317916U (en) * | 2011-10-29 | 2012-07-11 | 马玉山 | Multifunctional lens processing jig |
| CN203611371U (en) * | 2013-11-19 | 2014-05-28 | 北京国晶辉红外光学科技有限公司 | Novel universal tool used for processing spherical surface of infrared crystal material |
-
2014
- 2014-07-01 CN CN201410311667.3A patent/CN104044068A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007168025A (en) * | 2005-12-22 | 2007-07-05 | Lintec Corp | Holding table, processing device of held article and processing device of semiconductor wafer |
| CN101918176A (en) * | 2008-01-10 | 2010-12-15 | 株式会社纳米光学能量 | Be used to make the manufacture method of grinding attachment, optical element of optical element and the micrometric measurement device that the shape/size of the mould that is used to make optical element or optical element is carried out micrometric measurement |
| CN102240933A (en) * | 2011-07-07 | 2011-11-16 | 江铃汽车股份有限公司 | Special-shaped punching grind clamp |
| CN202317916U (en) * | 2011-10-29 | 2012-07-11 | 马玉山 | Multifunctional lens processing jig |
| CN102501155A (en) * | 2011-10-31 | 2012-06-20 | 中国科学院长春光学精密机械与物理研究所 | High-accuracy fixture for polishing optical element |
| CN203611371U (en) * | 2013-11-19 | 2014-05-28 | 北京国晶辉红外光学科技有限公司 | Novel universal tool used for processing spherical surface of infrared crystal material |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104647199A (en) * | 2015-01-22 | 2015-05-27 | 燕山大学 | Concave embedding type single surface precise grinding disc |
| CN107471036A (en) * | 2017-06-20 | 2017-12-15 | 滁州恒通磁电科技有限公司 | It is a kind of to clamp feed arrangement for the polishing of magnetic shoe outer arc |
| CN112405054A (en) * | 2020-10-30 | 2021-02-26 | 中国工程物理研究院材料研究所 | Thin-wall shell part clamping device and method |
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| PB01 | Publication | ||
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140917 |