CN105150034B - Grinding head capable of achieving end face ultrasound-assisted grinding and polishing - Google Patents
Grinding head capable of achieving end face ultrasound-assisted grinding and polishing Download PDFInfo
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- CN105150034B CN105150034B CN201510492706.9A CN201510492706A CN105150034B CN 105150034 B CN105150034 B CN 105150034B CN 201510492706 A CN201510492706 A CN 201510492706A CN 105150034 B CN105150034 B CN 105150034B
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- grinding
- ultrasonic
- face
- polishing
- block
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention discloses a grinding head capable of achieving end face ultrasound-assisted grinding and polishing. The grinding head is characterized by comprising a flange, a base, a magnetic bearing seat, an amplitude-change pole supporting seat and an ultrasound vibration block; the ultrasound vibration block is composed of an ultrasound transducer, an amplitude-change pole, magnetic poles and an abrasive block; the flange and the base are fixed; one end of the ultrasound vibration block is fixed to the base through the zero amplitude position of the amplitude-change pole; the other end of the ultrasound vibration block is used for supporting the magnetic poles at the tail end of the ultrasound vibration block through magnetic force via the magnetic supporting seat installed on the base; and the flange is installed on a motor in a connected manner, and the motor drives the abrasive block to rotate to grind an art product. The grinding head capable of achieving end face ultrasound-assisted grinding and polishing can be used for ultrasound-assisted end face grinding, lapping and polishing, and the machining efficiency and the machining accuracy of parts are greatly improved.
Description
Technical field
The present invention relates to a millstone device, more particularly to a kind of bistrique for realizing the grinding of end face ultrasonic wave added and polishing.
Background technology
In recent years, to the precision of the hard brittle materials such as function ceramics, quartz wafer, plane or polygonal crystal and optics
Processing proposes very high request, and these materials are not required nothing more than minimum flatness, minimum surface roughness, ultra-smooth table
Face, also require material both ends of the surface perfect parallelism, without crystal orientation error, surface without metamorphic layer etc., even requiring of having reaches nanoscale
Or machining accuracy higher and undamaged suface processing quality.Grinding is a kind of finishing and polishing processing method.It is to utilize
The free abrasive abrasive particle for adhering to and being press-fitted on lap tool surface, by means of lap tool and workpiece relative motion under a certain pressure,
Minimum chip is removed from workpiece surface, so that workpiece obtains dimensional accuracy and geometrical precision and extremely low table higher
The surface of surface roughness value.Polish and grind similar, be using flexible polishing instrument and abrasive grain or other polishing mediums pair
The modification processing that workpiece surface is carried out.Grinding, polishing technology add as one of important technology in mechanical manufacturing technology in machinery
Using more and more extensive in work.But traditional grinding, polishing exist low processing efficiency, high processing costs, machining accuracy it is low and
The shortcomings of crudy is unstable, this causes that tradition grinding, the application of polishing receive a definite limitation.
Ultrasonic vibration assisted milling and polishing are a kind of new processing method of recent decades development and application, substantial amounts of reason
Show by with experimental study, ultrasonic vibration assisted milling and polishing process hard fragility difficult-to-machine material when have common grinding,
The incomparable technological effect of polishing, with high in machining efficiency, machining damage is small, the advantages of surface quality of workpieces is good.Therefore, will
Ultrasonic wave added grinds and polishing technology is used for hard brittle material end surface grinding, polishing, to reduce part machining damage,
Improve processing efficiency and suface processing quality is significant.
The content of the invention
Invention the deficiency for aiming to overcome that prior art, there is provided it is a kind of realize end face ultrasonic wave added grinding and polishing
Bistrique, can realize that the grinding of end face ultrasonic wave added and the bistrique of polishing can be used for ultrasonic wave added cross grinding, grinding and polish, greatly
The big processing efficiency and machining accuracy for improving part.
The technical solution adopted for the present invention to solve the technical problems is:There is provided one kind realize end face ultrasonic wave added grinding and
The bistrique of polishing, including:Flange, pedestal, magnetic supporting seat, ultrasonic transformer support base and ultrasonic vibration block;
The ultrasonic vibration block is made up of ultrasonic transducer, ultrasonic transformer, magnetic rod and abrading block;The flange is mutually solid with pedestal
It is fixed;By being fixed on pedestal at ultrasonic transformer zero amplitude, the other end is then by pedestal for described ultrasonic vibration block one end
Magnetic support seat the magnetic rod of ultrasonic vibration block end is supported by magnetic force;The flange is secured on motor, is led to
Cross motor and drive the abrading block rotation with grinding process product;Ultrasonic signal passes to ultrasonic amplitude transformer by brush and coil,
End face ultrasonic vibration is realized by the axial vibration band dynamic grinding block of ultrasonic amplitude transformer, so as to realize that ultrasonic wave added cross grinding adds
Work.
Preferably, the ultrasonic transducer includes piezoelectric vibrator;The piezoelectric vibrator promote abrading block produce certain frequency and
The ultrasonic vibration of amplitude;The position of two first annular magnet and upper two the second annular magnets of magnetic support seat on the magnetic rod
Put and match and the polarity of junction is identical, magnetic rod is realized contactless supporting role on magnetic support seat.
Preferably, the abrading block includes vibrating mass and abrading block pedestal;The vibrating mass is with abrading block pedestal away from ultrasonic transformer
One end is wedge-like engagement, and the other end coordinates for right angle;The vibrating mass is fixed by elastic washer with abrading block pedestal with bolt.
Preferably, workpiece is pasted on vibrating mass surface by hot melt or paraffin mode, and is vibrated with vibrating mass;Workpiece
Partial replacement is then capable of achieving the single end face ultrasonic vibration aided grinding to workpiece, grinding and polishes into mill, abrasive sheet or polished silicon wafer.
Preferably, the flange bottom is distributed with circular coil, and ultrasonic-frequency power supply passes to ultrasonic transduction by circular coil
Piezoelectric vibrator in device.
Preferably, end face ultrasonic wave added grinding/rubbing head of the invention can be connected with existing all kinds of grinding/polishing machines and make
With, it is easy to use, and convenient disassembly.
A kind of method of the bistrique for realizing the grinding of end face ultrasonic wave added and polishing, comprises the following steps:
A1, by end face ultrasonic wave added grind and polishing bistrique be installed on motor, motor drives the end face ultrasonic wave added
The bistrique rotation of grinding and polishing;
A2, ultrasonic-frequency power supply pass to ultrasonic amplitude transformer by brush and coil, and ultrasonic amplitude transformer band dynamic grinding block produces certain
The ultrasonic vibration of frequency and amplitude.
The beneficial effects of the invention are as follows:
1st, workpiece can be pasted on vibrating mass surface by modes such as thermosol or paraffin, and with the starting of oscillation of vibrating mass one
It is dynamic;Or workpiece portion can also be substituted for mill, abrasive sheet or polished silicon wafer, then it is capable of achieving auxiliary to the single end face ultrasound of workpiece
Grinding aid is cut, grinds and is polished.Different schemes can be selected according to the need for user.
2nd, abrading block is made up of vibrating mass, abrading block pedestal, leads to and use screws clamp;Vibrating mass, abrading block pedestal are away from super
One end of sound ultrasonic transformer is wedge-like engagement, and the other end coordinates for right angle.This structure not only improves the transmission of ultrasonic vibration and subtracts
Few ultrasonic vibrational energy is conducive to the handling of abrasive material block replacing again in the loss in other directions.
3rd, abrading block promotes it to produce the ultrasonic vibration of certain frequency and amplitude by piezoelectric vibrator, while being shaken in ultrasonic transformer zero
Width position is connected with pedestal, and magnetic rod one end is spirally connected with abrading block, two first annular magnet of the other end and two the second rings
The effect that the shape magnet same sex is repelled each other makes it diametrically realize contactless supporting role with magnetic support seat, improves ultrasonic wave
The stability of vibrational system and the rigidity of bistrique, and then machining accuracy is improved, and do not interfere with the biography of its axial ultrasonic vibration wave
Pass, will not also cause loss and the system heat generation of ultrasonic energy.It is supported by magnetic force, to improve the rigidity of abrading block.
4th, the present invention can realize that the end face in grinding head or rubbing head applies the ultrasonic vibration parallel to end face, assisted milling
Or polishing, and vibration frequency and amplitude can design as needed.
5th, end face ultrasonic wave added grinding/rubbing head of the invention can be connected with existing all kinds of grinding/polishing machines and use, and make
With convenient, and convenient disassembly.
The present invention is described in further detail below in conjunction with drawings and Examples;But one kind of the invention realizes that end face surpasses
Sound assisted milling and the bistrique of polishing are not limited to embodiment.
Brief description of the drawings
Fig. 1 is the overall schematic of the bistrique of end face ultrasonic wave added grinding of the invention and polishing;
Fig. 2 is the grinding of end face ultrasonic wave added and the mill of polishing of the bistrique of end face ultrasonic wave added grinding of the invention and polishing
The overall explosive view of head;
Fig. 3 is the explosive view of the ultrasonic vibration block of the bistrique of end face ultrasonic wave added grinding of the invention and polishing;
Fig. 4 is the explosive view of the abrading block of the bistrique of end face ultrasonic wave added grinding of the invention and polishing;
Fig. 5 is the explosive view of the ultrasonic transducer of the bistrique of end face ultrasonic wave added grinding of the invention and polishing;
Fig. 6 is the explosive view of the magnetic rod of the bistrique of end face ultrasonic wave added grinding of the invention and polishing;
Fig. 7 is the explosive view of the magnetic supporting seat of the bistrique of end face ultrasonic wave added grinding of the invention and polishing;
Fig. 8 is the explosive view of the ultrasonic transformer support base of the bistrique of end face ultrasonic wave added grinding of the invention and polishing.
Specific embodiment
Embodiment 1
Referring to shown in Fig. 1 and Fig. 2, a kind of bistrique for realizing the grinding of end face ultrasonic wave added and polishing of the invention, including:Method
Blue 1, pedestal 4, magnetic supporting seat 9, ultrasonic transformer support base 7 and ultrasonic vibration block 8;
The ultrasonic vibration block 8 is made up of ultrasonic transducer 12, ultrasonic transformer 13, magnetic rod 10 and abrading block 11;The flange 1
Mutually fixed with pedestal 4;By being fixed on pedestal 4 at the zero amplitude of ultrasonic transformer 13, the other end then leads to for described one end of ultrasonic vibration block 8
The magnetic rod 10 of the 9 pairs of ends of ultrasonic vibration block 8 of magnetic support seat crossed on pedestal is supported by magnetic force;The method
Blue 1 is secured on motor, drives the abrading block 11 to rotate with grinding process product by motor;Ultrasonic signal passes through brush and line
Circle passes to ultrasonic amplitude transformer 13, and end face ultrasonic vibration is realized by the axial vibration band dynamic grinding block 11 of ultrasonic amplitude transformer 13, from
And realize ultrasonic wave added cross grinding and process.
Preferably, the ultrasonic transducer 12 includes piezoelectric vibrator 21;The piezoelectric vibrator 21 promotes abrading block 11 to produce one
Determine the ultrasonic vibration of frequency and amplitude;On the magnetic rod 10 two the on two first annular magnet 27 and magnetic support seat 9
The position of second ring magnet 32 matches and the polarity of junction is identical, magnetic rod 10 is realized that nothing connects on magnetic supporting seat 9
Tactile supporting role, improves the stability of ultrasonic vibration system and the rigidity of mill, and then improves machining accuracy, and will not
The transmission of its axial ultrasonic vibration wave is influenceed, will not also cause loss and the system heat generation of ultrasonic energy.
Preferably, the abrading block 11 includes vibrating mass 18 and abrading block pedestal 19;The vibrating mass 18 is remote with abrading block pedestal 19
It is wedge-like engagement from one end of ultrasonic transformer 13, the other end coordinates for right angle;The vibrating mass 18 is with abrading block pedestal 19 by elasticity
Packing ring is fixed with bolt.This structure not only improves the transmission of ultrasonic vibration and reduces damage of the ultrasonic vibrational energy in other directions
Lose, the handling for being conducive to vibrating mass to change again.
Preferably, workpiece is pasted on the surface of vibrating mass 18 by hot melt or paraffin mode, and is vibrated with vibrating mass 18;
Workpiece portion is substituted for mill, abrasive sheet or polished silicon wafer, then be capable of achieving the single end face ultrasonic vibration aided grinding to workpiece, grinding and throw
Light..
Preferably, the bottom of the flange 1 is distributed with circular coil, and ultrasonic-frequency power supply passes to ultrasonic transduction by circular coil
Piezoelectric vibrator 21 in device 12.
Preferably, end face ultrasonic wave added grinding/rubbing head of the invention can be connected with existing all kinds of grinding/polishing machines and make
With, it is easy to use, and convenient disassembly.
A kind of method of the bistrique for realizing the grinding of end face ultrasonic wave added and polishing, comprises the following steps:
A1, by end face ultrasonic wave added grind and polishing bistrique be installed on motor, motor drives the end face ultrasonic wave added
The bistrique rotation of grinding and polishing;
A2, ultrasonic-frequency power supply pass to ultrasonic amplitude transformer 13 by brush and coil, and ultrasonic amplitude transformer 13 is produced with dynamic grinding block 11
The ultrasonic vibration of raw certain frequency and amplitude.
Above-described embodiment is only used for further illustrating a kind of mill for realizing the grinding of end face ultrasonic wave added and polishing of the invention
Head, but the invention is not limited in embodiment, every any letter made to above example according to technical spirit of the invention
Single modification, equivalent variations and modification, each fall within the protection domain of technical solution of the present invention.
Claims (5)
1. it is a kind of to realize the bistrique that end face ultrasonic wave added grinds and polishes, it is characterised in that including:Flange, pedestal, magnetic supporting
Seat, ultrasonic transformer support base and ultrasonic vibration block;
The ultrasonic vibration block is made up of ultrasonic transducer, ultrasonic transformer, magnetic rod and abrading block;The flange is mutually fixed with pedestal;
By being fixed on pedestal at ultrasonic transformer zero amplitude, the other end is then by the magnetic on pedestal for described ultrasonic vibration block one end
Power support base is supported to the magnetic rod of ultrasonic vibration block end by magnetic force;The flange is secured on motor, by electricity
Machine drives the abrading block rotation with grinding process product;Ultrasonic signal passes to ultrasonic transformer by brush and coil, by luffing
The axial vibration band dynamic grinding block of bar realizes end face ultrasonic vibration, so as to realize that ultrasonic wave added cross grinding is processed.
2. it is according to claim 1 it is a kind of realize end face ultrasonic wave added grinding and polishing bistrique, it is characterised in that:It is described
Ultrasonic transducer includes piezoelectric vibrator;The piezoelectric vibrator promotes abrading block to produce the ultrasonic vibration of certain frequency and amplitude;It is described
Two first annular magnet match with the position of magnetic support upper two the second annular magnets of seat and junction on magnetic rod
Polarity is identical, magnetic rod is realized contactless supporting role on magnetic support seat.
3. it is according to claim 1 it is a kind of realize end face ultrasonic wave added grinding and polishing bistrique, it is characterised in that:It is described
Abrading block includes vibrating mass and abrading block pedestal;The vibrating mass is wedge-like engagement away from one end of ultrasonic transformer with abrading block pedestal, another
Hold as right angle coordinates;The vibrating mass is fixed by elastic washer with abrading block pedestal with bolt.
4. it is according to claim 3 it is a kind of realize end face ultrasonic wave added grinding and polishing bistrique, it is characterised in that:Workpiece
Pasted on vibrating mass surface by hot melt or paraffin mode, and vibrated with vibrating mass;Workpiece portion is substituted for mill, grinding
Piece or polished silicon wafer, then be capable of achieving the single end face ultrasonic vibration aided grinding to workpiece, grinding and polish.
5. it is according to claim 1 it is a kind of realize end face ultrasonic wave added grinding and polishing bistrique, it is characterised in that:It is described
Flange bottom is distributed with circular coil, and ultrasonic-frequency power supply passes to the piezoelectricity in ultrasonic transducer and shakes by brush and circular coil
Son.
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CN201510492706.9A CN105150034B (en) | 2015-08-12 | 2015-08-12 | Grinding head capable of achieving end face ultrasound-assisted grinding and polishing |
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CN201510492706.9A CN105150034B (en) | 2015-08-12 | 2015-08-12 | Grinding head capable of achieving end face ultrasound-assisted grinding and polishing |
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CN105150034A CN105150034A (en) | 2015-12-16 |
CN105150034B true CN105150034B (en) | 2017-05-24 |
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CN106239274B (en) * | 2016-08-22 | 2018-06-05 | 天津理工大学 | A kind of multidimensional variable element vibrating machine burnishing device and its fuzzy PID control method |
CN113484180A (en) * | 2021-06-21 | 2021-10-08 | 杭州电子科技大学 | Non-contact ultrasonic cutting force loading experimental device and experimental method |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009291929A (en) * | 2008-06-02 | 2009-12-17 | Kazumasa Onishi | Disk-like blade and cutter |
CN102873594A (en) * | 2012-09-27 | 2013-01-16 | 厦门大学 | Height-adjustable inclination type ultrasonic vibration machining device |
CN104002205A (en) * | 2014-05-20 | 2014-08-27 | 张增英 | Non-contact energy transmission type ultrasonic machining device |
CN205111465U (en) * | 2015-08-12 | 2016-03-30 | 华侨大学 | Realize supplementary bistrique that grinds and polish of terminal surface supersound |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5301321B2 (en) * | 2009-03-06 | 2013-09-25 | 株式会社ディスコ | Grinding wheel |
JP2011062801A (en) * | 2009-09-18 | 2011-03-31 | Kazumasa Onishi | Polishing tool |
JP2011110693A (en) * | 2009-11-25 | 2011-06-09 | Kazumasa Onishi | Grinding tool |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009291929A (en) * | 2008-06-02 | 2009-12-17 | Kazumasa Onishi | Disk-like blade and cutter |
CN102873594A (en) * | 2012-09-27 | 2013-01-16 | 厦门大学 | Height-adjustable inclination type ultrasonic vibration machining device |
CN104002205A (en) * | 2014-05-20 | 2014-08-27 | 张增英 | Non-contact energy transmission type ultrasonic machining device |
CN205111465U (en) * | 2015-08-12 | 2016-03-30 | 华侨大学 | Realize supplementary bistrique that grinds and polish of terminal surface supersound |
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