CN203330878U - Test piece sample fixture for ultrasonic vibration auxiliary grinding / polishing - Google Patents
Test piece sample fixture for ultrasonic vibration auxiliary grinding / polishing Download PDFInfo
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- CN203330878U CN203330878U CN2013202427464U CN201320242746U CN203330878U CN 203330878 U CN203330878 U CN 203330878U CN 2013202427464 U CN2013202427464 U CN 2013202427464U CN 201320242746 U CN201320242746 U CN 201320242746U CN 203330878 U CN203330878 U CN 203330878U
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- piezoelectric ceramic
- polishing
- ceramic transducer
- test specimen
- ultrasonic vibration
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Abstract
The utility model relates to a test piece sample fixture for ultrasonic vibration auxiliary grinding / polishing, and belongs to the field of precision and ultraprecision machining. The test piece sample fixture comprises an ultrasonic generator, a piezoelectric ceramic transducer, a cone-shaped amplitude transformer, a workpiece clamping system and a finishing ring, wherein the ultrasonic generator converts alternating currents into ultrasonic frequency electric oscillation signals, and the ultrasonic frequency electric oscillation signals are transmitted to the piezoelectric ceramic transducer through an electric collecting ring. The piezoelectric ceramic transducer converts the ultrasonic frequency electric oscillation signals into ultrasonic frequency mechanical vibration. The cone-shaped amplitude transformer amplifies the small amplitude outputted by an energy converter and then transmits the small amplitude to the workpiece clamping system, and therefore ultrasonic vibration of workpieces in the ultraprecision grinding / polishing process. The test piece sample fixture has the advantages of that the structure is compact, operation are simple, and efficiency and applicability are high; machining precision and surface quality of the workpieces can be significantly improved; grinding / polishing conditions can also be improved, for instance, cutting force and cutting heat are reduced and vibration is eliminated or restrained; durability of a grinding disc and polishing cloth is improved.
Description
Technical field
The utility model relates to precision, ultraprecise manufacture field, particularly a kind of test specimen sample clamp of ultrasonic vibration assisted milling/polishing.Can be used for processing and the manufacture of the products such as optical element, microelectronic chip and semiconductor devices.
Background technology
Along with scientific and technical development, people are harsher to demand and the requirement of properties of product, not only from the quality aspect, also to consider from aspects such as efficiency, especially in fields such as national defense industry, microelectric technique, Aero-Space, precision instrumentations, more and more higher to precision, the requirement of quality aspect of device.Particularly the develop rapidly of computer technology these years, IC technology, optical technology etc., constantly increase demands such as optical element, semiconductor devices, electronic circuit chips, and higher to the requirement of the aspects such as its quality, precision and working (machining) efficiency.Therefore, for adapting to superhigh precision, low surface roughness, not damaged, the high efficiency processing of special material, the grinding/polishing technology of new principle constantly comes out.Because ultrasonic vibration assisted milling/polishing technology has that working (machining) efficiency is high, good processing accuracy, heating less, the advantage such as the range of work is wide, be specially adapted to the processing of the hard brittle materials such as pottery, glass, semiconductor, so ultrasonic vibration assisted milling/polishing technology more and more is applied in the processing and manufacturing of semiconductor devices and microelectronic chip.The shortcomings such as that the test specimen sample clamp of ultrasonic vibration assisted milling/polishing in the past often exists that structure is single, workpiece is installed is complicated, non-rotatable, clamping quantity is few, the workpiece geomery is limited, working (machining) efficiency is low.Therefore, a kind ofly can improve working (machining) efficiency, improve machining accuracy, and clamp structure is various, simple to operate, the workpiece geomery is variable, clamp more than quantity and the test specimen sample clamp of the ultrasonic vibration assisted milling/polishing that can rotate with abrasive disk/polishing disk is necessary.
Summary of the invention
The purpose of this utility model is to provide a kind of test specimen sample clamp of ultrasonic vibration assisted milling/polishing, has solved the problems referred to above that prior art exists.Have that clamp structure is various, simple to operate, many, the workpiece geomery capable of regulating of clamping quantity, can be with abrasive disk/polishing characteristics such as spiral, can realize supersonic frequency vibration axial in workpiece grinding/polishing process, can improve working (machining) efficiency, improve machining accuracy, but and with the finishing ring of uniform distribution lapping liquid/polishing fluid.
Above-mentioned purpose of the present utility model is achieved through the following technical solutions:
The test specimen sample clamp of ultrasonic vibration assisted milling/polishing, comprise supersonic generator 18, piezoelectric ceramic transducer, taper ultrasonic transformer 4, workpiece clamping system and finishing ring 9, described supersonic generator 18 is by 220 V, the alternating current of 50 Hz converts supersonic frequency electric oscillation signal to, by collector ring, supersonic frequency electric oscillation signal is delivered to by piezoelectric ceramic transducer back shroud 1, stacking piezoelectric ceramic piece 2, the piezoelectric ceramic transducer that piezoelectric ceramic transducer front shroud 3 forms, piezoelectric ceramic transducer converts supersonic frequency electric oscillation signal to the supersonic frequency mechanical oscillation, described taper ultrasonic transformer 4 is by after the little Amplitude amplification of piezoelectric ceramic transducer output, effectively pass to the workpiece clamping system formed by test specimen haftplatte 5, lock-screw 6, trip bolt I 7, clamping substrate 8, make workpiece to be machined produce ultrasonic vibration, to realize ultrasonic vibration assisted milling/polishing.
Described collector ring is comprised of stator 16 and rotor 17, described rotor 17 is fixed by lock-screw and sleeve 14 upper ends, rotor 17 outlets are connected with described stacking piezoelectric ceramic piece 2, stator 16 is fixing by the fixed bar 20 on spline sheet and rocking arm 19, stator 16 outlets are connected with supersonic generator 18, for the piezoelectric ceramic transducer in rotary course provides supersonic frequency electric oscillation signal.
Described test specimen haftplatte 5 is clamped on clamping substrate 8 by lock-screw 6, described clamping substrate 8 is connected with taper ultrasonic transformer 4 by trip bolt I 7, clamping substrate 8 can clamp 6 test specimen haftplattes 5 simultaneously, and the shape of described test specimen haftplatte 5 and size can be adjusted.
Described finishing ring 9 can be repaired abrasive disk or polishing disk, guarantees the flatness of abrasive disk or polishing disk, and then guarantees the flatness on institute's processing work surface.Described finishing ring 9 is arranged on the outside of clamping substrate 8, and the surface uniform contacted with abrasive disk is distributed with 12 grooves, guarantees that the lapping liquid/polishing fluid be supplied on abrasive disk/polishing disk is uniformly dispersed, thereby guarantees that institute's processing work can access removal equably.
Described piezoelectric ceramic transducer back shroud 1, stacking piezoelectric ceramic piece 2, piezoelectric ceramic transducer front shroud 3 are connected with taper ultrasonic transformer 4 by trip bolt III 15, described taper ultrasonic transformer 4, sleeve 14 and gripper shoe 10 connect by trip bolt II 11, and gripper shoe 10 is provided with support bar 13 and the attaching nut 12 who cooperatively interacts.
The beneficial effects of the utility model are: compare the utility model compact conformation, easy and simple to handle with the test specimen sample clamp of existing ultrasonic vibration assisted milling/polishing; Have that clamp structure is various, many, the workpiece geomery capable of regulating of clamping quantity, rotatable characteristics, and there is function; Can be applied to the plane machining of optical element, semiconductor devices, electronic circuit chip, can improve significantly working (machining) efficiency, improve machining accuracy, reduce surface; Can greatly improve the driving precision of generic drive simultaneously, reduce complexity and the size of structure, and have that cost is low, small investment, instant effect, benefit advantages of higher, have broad application prospects.Practical.
The accompanying drawing explanation
Accompanying drawing described herein is used to provide further understanding of the present utility model, forms the application's a part, and illustrative example of the present utility model and explanation thereof, for explaining the utility model, do not form improper restriction of the present utility model.
Fig. 1 is axle sectional view of the present utility model;
Fig. 2 is elevational schematic view of the present utility model;
Fig. 3 is the assembling schematic diagram of the utility model on lapping and buffing machine.
In figure: 1. piezoelectric ceramic transducer back shroud; 2. stacking piezoelectric ceramic piece; 3. piezoelectric ceramic transducer front shroud; 4. taper ultrasonic transformer; 5. test specimen haftplatte; 6. lock-screw; 7, the trip bolt I; 8. clamping substrate; 9. finishing encircles; 10. gripper shoe; 11. trip bolt II; 12. attaching nut; 13. support bar; 14. sleeve; 15. trip bolt III; 16. stator; 17. rotor; 18. supersonic generator; 19. rocking arm; 20. fixed bar; 21. abrasive disk; 22. lapping and buffing machine support.
The specific embodiment
Further illustrate detailed content of the present utility model and the specific embodiment thereof below in conjunction with accompanying drawing.
Referring to shown in Fig. 1 to Fig. 3, the test specimen sample clamp of ultrasonic vibration assisted milling/polishing that the utility model is related, according to BNi62 type ultraprecision grinding/polisher design, the overall dimensions of this jig main body part is 210mmX 210mmX170mm, grip size is that the abrasive disk/polishing disk that is 500mm according to diameter is designed, according to the size of this fixture of difference of abrasive disk/polishing disk diameter dimension, can adjust accordingly, but must guarantee that the finishing ring diameter is greater than and the abrasive disk contact length, thereby guarantee that the finishing ring can be repaired whole abrasive disk, guarantee the flatness of abrasive disk.This fixture can be installed on lapping and buffing machine easily, and the abrasive disk 21 on lapping and buffing machine support 22 plays induced effect while rotating, under the supporting role of rocking arm 19, and the passive rotation of fixture, thus the workpiece on fixture is carried out to ultrasonic vibration assisted milling/polishing.
The test specimen sample clamp of ultrasonic vibration assisted milling/polishing of the present utility model comprises supersonic generator, piezoelectric ceramic transducer, axially taper vibration ultrasonic transformer, workpiece clamping system and finishing encircle, described supersonic generator 18 converts the alternating current of 220 V, 50 Hz to supersonic frequency electric oscillation signal, by collector ring, supersonic frequency electric oscillation signal is delivered to described piezoelectric ceramic transducer.Piezoelectric ceramic transducer converts supersonic frequency electric oscillation signal to the supersonic frequency mechanical oscillation.Described taper ultrasonic transformer 4 will pass to described workpiece clamping system after the little Amplitude amplification of piezoelectric ceramic transducer output effectively, thereby realizes the ultrasonic vibration of workpiece in ultraprecision grinding/polishing process.
Described collector ring is comprised of stator 16 and rotor 17, described rotor 17 is fixed by lock-screw and sleeve 14 upper ends, rotor 17 outlets are connected with described stacking piezoelectric ceramic piece 2, stator 16 is fixing by the fixed bar 20 on spline sheet and rocking arm 19, stator 16 outlets are connected with supersonic generator 18, for the piezoelectric ceramic transducer in rotary course provides supersonic frequency electric oscillation signal.
Described test specimen haftplatte 5 is clamped on clamping substrate 8 by lock-screw 6, described clamping substrate 8 is connected with taper ultrasonic transformer 4 by trip bolt I 7, clamping substrate 8 can clamp 6 test specimen haftplattes 5 simultaneously, and the shape of described test specimen haftplatte 5 and size can be adjusted.
Described finishing ring 9 can be repaired abrasive disk or polishing disk, guarantees the flatness of abrasive disk or polishing disk, and then guarantees the flatness on institute's processing work surface.Described finishing ring 9 is arranged on the outside of clamping substrate 8, and the surface uniform contacted with abrasive disk is distributed with 12 grooves, guarantees that the lapping liquid/polishing fluid be supplied on abrasive disk/polishing disk is uniformly dispersed, thereby guarantees that institute's processing work can access removal equably.
Described piezoelectric ceramic transducer back shroud 1, stacking piezoelectric ceramic piece 2, piezoelectric ceramic transducer front shroud 3 are connected with taper ultrasonic transformer 4 by trip bolt III 15, described taper ultrasonic transformer 4, sleeve 14 and gripper shoe 10 connect by trip bolt II 11, and gripper shoe 10 is provided with support bar 13 and the attaching nut 12 who cooperatively interacts.
The foregoing is only preferred embodiment of the present utility model, be not limited to the utility model, for a person skilled in the art, the utility model can have various modifications and variations.All any modifications that the utility model is done, be equal to replacement, improvement etc., within all should being included in protection domain of the present utility model.
Claims (5)
1. the test specimen sample clamp of a ultrasonic vibration assisted milling/polishing, comprise supersonic generator (18), piezoelectric ceramic transducer, taper ultrasonic transformer (4), workpiece clamping system and finishing ring (9), it is characterized in that: described supersonic generator (18) converts alternating current to supersonic frequency electric oscillation signal, by collector ring, supersonic frequency electric oscillation signal is delivered to by piezoelectric ceramic transducer back shroud (1), stacking piezoelectric ceramic piece (2), the piezoelectric ceramic transducer that piezoelectric ceramic transducer front shroud (3) forms, piezoelectric ceramic transducer converts supersonic frequency electric oscillation signal to the supersonic frequency mechanical oscillation, described taper ultrasonic transformer (4) is by after the little Amplitude amplification of piezoelectric ceramic transducer output, pass to the workpiece clamping system formed by test specimen haftplatte (5) and clamping substrate (8), make workpiece to be machined produce ultrasonic vibration, to realize ultrasonic vibration assisted milling/polishing.
2. the test specimen sample clamp of ultrasonic vibration assisted milling/polishing according to claim 1, it is characterized in that: described collector ring is comprised of stator (16) and rotor (17), described rotor (17) is fixed by lock-screw and sleeve (14) upper end, rotor (17) outlet is connected with described stacking piezoelectric ceramic piece (2), stator (16) is fixing by the fixed bar (20) on spline sheet and rocking arm (19), stator (16) outlet is connected with supersonic generator (18), for the piezoelectric ceramic transducer in rotary course provides supersonic frequency electric oscillation signal.
3. the test specimen sample clamp of ultrasonic vibration assisted milling/polishing according to claim 1, it is characterized in that: described test specimen haftplatte (5) is clamped on clamping substrate (8) by lock-screw (6), described clamping substrate (8) is connected with taper ultrasonic transformer (4) by trip bolt I (7), clamping substrate (8) clamps 6 test specimen haftplattes (5) simultaneously, and the shape of described test specimen haftplatte (5) and size can be adjusted.
4. the test specimen sample clamp of ultrasonic vibration assisted milling/polishing according to claim 1 is characterized in that: described finishing ring (9) is arranged on the outside of clamping substrate (8), and the surface uniform contacted with abrasive disk is distributed with 12 grooves.
5. the test specimen sample clamp of ultrasonic vibration assisted milling/polishing according to claim 1, it is characterized in that: described piezoelectric ceramic transducer back shroud (1), stacking piezoelectric ceramic piece (2), piezoelectric ceramic transducer front shroud (3) are connected with taper ultrasonic transformer (4) by trip bolt III (15), described taper ultrasonic transformer (4), sleeve (14) and gripper shoe (10) connect by trip bolt II (11), and described gripper shoe (10) is provided with support bar (13) and the attaching nut (12) who cooperatively interacts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013202427464U CN203330878U (en) | 2013-05-08 | 2013-05-08 | Test piece sample fixture for ultrasonic vibration auxiliary grinding / polishing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013202427464U CN203330878U (en) | 2013-05-08 | 2013-05-08 | Test piece sample fixture for ultrasonic vibration auxiliary grinding / polishing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203330878U true CN203330878U (en) | 2013-12-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013202427464U Withdrawn - After Issue CN203330878U (en) | 2013-05-08 | 2013-05-08 | Test piece sample fixture for ultrasonic vibration auxiliary grinding / polishing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203330878U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103286682A (en) * | 2013-05-08 | 2013-09-11 | 吉林大学 | Test specimen fixture for ultrasonic vibration assisted grinding/polishing |
| CN104493709A (en) * | 2014-11-28 | 2015-04-08 | 无锡培基机械有限公司 | Tool clamp structure with grinding head trimming ring |
| WO2022134866A1 (en) * | 2020-12-25 | 2022-06-30 | 深圳市特力威科技有限公司 | Ultrasonic conduction grinding module |
-
2013
- 2013-05-08 CN CN2013202427464U patent/CN203330878U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103286682A (en) * | 2013-05-08 | 2013-09-11 | 吉林大学 | Test specimen fixture for ultrasonic vibration assisted grinding/polishing |
| CN103286682B (en) * | 2013-05-08 | 2015-10-21 | 吉林大学 | The Test specimen fixture of ultrasonic wave vibration assisted milling/polishing |
| CN104493709A (en) * | 2014-11-28 | 2015-04-08 | 无锡培基机械有限公司 | Tool clamp structure with grinding head trimming ring |
| WO2022134866A1 (en) * | 2020-12-25 | 2022-06-30 | 深圳市特力威科技有限公司 | Ultrasonic conduction grinding module |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20131211 Effective date of abandoning: 20151021 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |