CN105143495B - The method and apparatus that heat chemistry for workpiece is hardened - Google Patents

The method and apparatus that heat chemistry for workpiece is hardened Download PDF

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Publication number
CN105143495B
CN105143495B CN201480021323.7A CN201480021323A CN105143495B CN 105143495 B CN105143495 B CN 105143495B CN 201480021323 A CN201480021323 A CN 201480021323A CN 105143495 B CN105143495 B CN 105143495B
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gas
workpiece
pressure
low
millibars
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CN105143495A (en
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V·赫乌尔
K·罗瑟
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ALD Vacuum Technologies GmbH
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ALD Vacuum Technologies GmbH
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    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0062—Heat-treating apparatus with a cooling or quenching zone
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/28—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases more than one element being applied in one step
    • C23C8/30—Carbo-nitriding
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/06—Surface hardening
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/34—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases more than one element being applied in more than one step
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32899—Multiple chambers, e.g. cluster tools
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Heat Treatment Of Articles (AREA)

Abstract

The present invention relates to the methods and apparatus of the heat chemistry hardening for workpiece, wherein including with variable sequence：One or more carburization steps are implemented in carbon containing gas atmosphere of the pressure less than 50 millibars, wherein the workpiece is maintained at 900 DEG C to 1050 DEG C of temperature；Optionally one or more diffusing steps, implement in gas atmosphere of the pressure less than 100 millibars；With one or more nitridation steps, implement in nitrogenous discharge plasma of the pressure less than 50 millibars, wherein the workpiece is maintained at 800 DEG C to 1050 DEG C of temperature.

Description

The method and apparatus that heat chemistry for workpiece is hardened
Invention field
The present invention relates to the methods and apparatus of the heat chemistry hardening for workpiece.
Background technology
The method and apparatus that heat chemistry for workpiece is hardened is well known in the prior art.
US2002/0166607A1 is related to the method for carrying out carbo-nitriding to steel part comprising step：(i) by steel part It introduces in process chamber；(ii) process chamber is evacuated to less than 500mbar and process chamber is heated to 780 DEG C to 1050 DEG C Temperature；(iii) gas for discharging carbon is sent into process chamber and under the pressure less than 500mbar by component carburizing；(iv) The gas of release nitrogen comprising ammonia is sent under the partial pressure less than 1000mbar in process chamber；(v) by component at 780 DEG C To nitriding at a temperature of 950 DEG C.
US5722825A then discloses a kind of equipment for vacuum heat metal works comprising rotating vacuum furnace, The rotating vacuum furnace has shifts lock for workpiece batch of material to be introduced to the entrance of the rotating vacuum furnace, for moving workpiece batch of material The outlet transfer lock gone out and the cyclic annular turntable for workpiece batch of material to be transported to transfer lock in outlet from entrance transfer lock.The equipment packet At least one carburizer for carrying out Carburization Treatment to workpiece batch of material is included, is shifted between lock and outlet transfer lock in entrance It is connect with rotating vacuum furnace in peripheral position.The ring-type rotating disc structure is that workpiece batch of material is transported at least one carburizer.
Invention content
The present invention relates to the methods and apparatus of the heat chemistry hardening for workpiece, include with variable sequence：
One or more carburization steps, implement in carbon containing gas atmosphere of the pressure less than 50 millibars, wherein institute Workpiece is stated to be maintained at a temperature of 900 DEG C to 1050 DEG C；
Optionally one or more diffusing steps, implement in gas atmosphere of the pressure less than 100 millibars；With
One or more nitridation steps, implement in nitrogenous gas atmosphere of the pressure less than 50 millibars, wherein institute Workpiece is stated to be maintained at a temperature of 800 DEG C to 1050 DEG C.
The object of the present invention is to provide for the method for workpiece heat chemistry hardening and set by means of carburizing and nitriding Standby, they have the following advantages：
Carbon distribution and nitrogen distribution are accurately adjusted in the fringe region of workpiece；
High production rate and flexible charging；And
The energy expenditure and carrying capacity of environment reduced.
The purpose with the sequence method comprising the following steps that can be changed by being realized：
One or more carburization steps, implement in carbon containing gas atmosphere of the pressure less than 50 millibars, wherein institute Workpiece is stated to be maintained at a temperature of 900 DEG C to 1050 DEG C；
Optionally one or more diffusing steps, implement in gas atmosphere of the pressure less than 100 millibars；With
One or more nitridation steps, implement in nitrogenous gas atmosphere of the pressure less than 50 millibars, wherein institute It states at a temperature of workpiece is maintained at 800 DEG C to 1050 DEG C, the nitrogenous gas atmosphere includes dinitrogen (N2) it is used as donor gas It body and is excited by discharge plasma；Wherein
The method is implemented as follows：That is the time interval between two successive method and steps is less than 15 minutes, and The workpiece is maintained in the time interval in gas atmosphere of the pressure less than 300 millibars.
Favourable improvement scheme according to the method for the present invention is characterized in that：
Time interval between-two successive method and steps is less than 10 minutes, preferably smaller than 5 minutes and especially small In 1 minute；
In time interval between two successive method and steps, the workpiece is maintained at pressure and is less than 200 millibars, In preferably smaller than 100 millibars of gas atmosphere；
In time interval between two successive method and steps, the temperature of the workpiece is more than 600 DEG C, preferably greatly In 700 DEG C and particularly greater than 800 DEG C；
The method includes the following steps in sequence：
Carburizing/nitriding；
Carburizing/diffusion/nitriding；
Nitriding/carburizing/nitriding；
Nitriding/carburizing/nitriding/carburizing；Or
Nitriding/carburizing/diffusion/nitriding；
The discharge plasma is in the DC voltage of the optional pulse of 200V to 1000V, the direct current of 10A to 200A It is operated under the continuous power of stream and 2kVA to 200kVA；
In one or more nitridation steps, the nitrogenous gas atmosphere by pulsed direct current-electric discharge etc. from Daughter is excited preferably in combination with firing pulse；
In one or more nitridation steps, the discharge plasma is generated by means of active gate；
The workpiece be maintained at for active gate bear potential (bias) under, the potential be 10 volts extremely 400 volts, preferably 10 volts to 200 volts；
The workpiece is maintained under the potential (bias) born for active gate, wherein negative on the workpiece Potential value is 2 times to 12 times of the negative potential value of the active gate；
In one or more nitridation steps, plasma immersion and ion implantation process is used；
The workpiece is maintained at during nitridation steps at a temperature of 820 DEG C to 1000 DEG C, preferably 920 DEG C to 980 DEG C；
At a temperature of the workpiece is maintained at 940 DEG C to 1050 DEG C during carburization step；
In the nitridation steps, the nitrogenous gas atmosphere is by N2Optionally one or more such as H2With argon Carrier gas is constituted；
In the nitridation steps, the nitrogenous gas atmosphere is by N2With one or more such as CO2Or CH4It is carbon containing Gas and optionally one or more such as H2It is constituted with the carrier gas of argon；
The ratio of carbonaceous gas is with N described in the nitridation steps22 volume % are calculated as to 20 volume %, preferably 4 bodies Product % to 15 volume % and especially 4 volume % to 10 volume %；
In the nitridation steps, the pressure of the nitrogenous gas atmosphere is less than 40 millibars, preferably smaller than 30 millibars Especially less than 20 millibars；
In the carburization step, the carbon containing gas atmosphere is by one or more such as C2H2、CO2And CH4It is carbon containing Donor gas and optionally one or more such as H2It is constituted with the carrier gas of argon；
In the carburization step, the pressure of the carbon containing gas atmosphere is less than 40 millibars, preferably smaller than 30 millibars Especially less than 20 millibars；
The N that the method includes being 0.9 bar to 2 bars in pressure2High pressure diffusing step in atmosphere；And/or
The method includes the following steps in sequence：
Nitriding/carburizing/high pressure diffusion.
Another object of the present invention is to provide a kind of equipment, and edge of work area can be accurately adjusted using the equipment Carbon distribution in domain and nitrogen distribution, and can realize high production in the energy expenditure of reduction and without carrying capacity of environment under conditions of Rate and flexible charging.
The purpose is by including being realized with the equipment of lower part：
- m low-pressure heating rooms, and m=2,3,4,5,6,7,8,9 or 10；
The feeder being connected with the low-pressure heating room, be arranged the feeder for be the low-pressure heating room One or more of gases are provided, the gas is selected from N2, such as C2H2、CO2And CH4Carbon containing donor gas, and such as H2 With the carrier gas of argon；
Transfer chamber, it is connected with each low-pressure heating room and lock chamber and quenching chamber or difunctional lock-quenching chamber； Or
Lock chamber and quenching chamber, they distinguish movable and can be connected with each low-pressure heating room；Or
Difunctional lock-quenching chamber, it is movable and can be connected with each low-pressure heating room；Wherein：
One or more low-pressure heating rooms are connected with for electric installation, and it is arranged and is used for N2As donor gas Nitrogenous gas atmosphere in, generate discharge plasma at 800 DEG C or more of temperature and pressure less than 100 millibars.
The favourable improvement scheme of equipment according to the present invention is characterized in that：
Be arranged it is described for electric installation be used for the DC voltage of 200V to 1000V, 10A to 200A DC current and The continuous power of 2kVA to 200kVA operates discharge plasma；
It is arranged and described is used to operate with pulsed dc voltage (being preferably combined with firing pulse) for electric installation； And/or
One or more low-pressure heatings room is equipped with active gate.
Preferably include the following steps in order according to the method for the present invention：
Charging/emptying/carburizing/nitriding/quenching/discharging；
Charging/emptying/carburizing/diffusion/nitriding/quenching/discharging；
Charging/emptying/nitriding/carburizing/nitriding/quenching/discharging；
Charging/emptying/nitriding/carburizing/nitriding/carburizing/quenching/discharging；
Or
Charging/emptying/nitriding/carburizing/diffusion/nitriding/quenching/discharging.
The emptying is completed in lock chamber or difunctional lock-quenching chamber.In addition, for the purpose simplified on language, only Describe the method and step with the relevant emptying of lock chamber.Also further include always quenching in difunctional lock-herein according to the present invention The alternative solution of emptying in fiery room.
Pending workpiece is directly placed on the charging carrier of preferred plate or lattice-shaped and/or is arranged in charging frame The interior and described charging frame is optionally on charging carrier.Elongated workpiece, as transmission shaft is preferably arranged in charging carrier in suspension Or in charging frame.
Equipment according to the present invention includes the charging Transmission system by one or more module constructions, wherein each module point Dispensing transfer chamber and/or one or more lock chambers, quenching chamber and low-pressure heating room.Feed Transmission system each module equipped with Regulating and controlling mechanism, it via cable and equipment central control unit, such as can store programming controller (SPS) connection.
The preferred implementing form of equipment according to the present invention includes difunctional lock-quenching chamber of static state, and m vertical folded The low-pressure heating room (m=2,3,4,5,6,7,8,9 or 10) set and transfer chamber, wherein difunctional lock-quenching chamber and low pressure Heating room is connected in transfer chamber.Each low-pressure heating room utilizes the vacuum valve or vacuum equipped with vacuum valve or Vacuum door The inner space of goalkeeper's low-pressure heating room and the inner space of transfer chamber airtightly separate.Difunctional lock-quenching chamber equipment There are two the vacuum valves or Vacuum door of arrangement in opposition to each other.
In all equipment according to the present invention, selectively use can horizontal or vertical movement vacuum valve and/or can The Vacuum door of swing.Vacuum valve and Vacuum door can be commercially-available with various structures shape and size.
Another preferred implementing form of equipment according to the present invention includes that the lock chamber, static quenching chamber, m of static state are a vertical Stacked low-pressure heating room (m=2,3,4,5,6,7,8,9 or 10) and transfer chamber, mid-gate chamber, quenching chamber and low-pressure heating Room is connected in transfer chamber.It each low-pressure heating room, can using the vacuum valve or Vacuum door equipped with vacuum valve or Vacuum door The inner space of the inner space of low-pressure heating room and transfer chamber airtightly to be separated.Lock chamber and quenching chamber are respectively equipped with The vacuum valve or Vacuum door of two arrangements in opposition to each other.
In two kinds of above-mentioned equipment, charging Transmission system is arranged substantially in transfer chamber, and includes having vertically Stroke, the elevator that is connected with telescoping mechanism, the telescoping mechanism are used to accommodate and move horizontally the charging with workpiece and carry Body and/or charging frame.
Another preferred implementing form of equipment according to the present invention includes the lock chamber, static quenching chamber, m level of static state The low-pressure heating room (m=2,3,4,5,6,7,8,9 or 10) and transfer chamber being adjacently positioned with ring-type, mid-gate chamber, quenching chamber It is connected in transfer chamber with low-pressure heating room.Each low-pressure heating room utilizes the vacuum valve equipped with vacuum valve or Vacuum door Or Vacuum door can airtightly separate the inner space of the inner space of low-pressure heating room and transfer chamber.Lock chamber and quenching chamber It is equipped with the vacuum valve or Vacuum door of two arrangements in opposition to each other.In the equipment constructed in this way, it is arranged in transfer chamber Charging Transmission system includes the rotating disk driven being connected with telescoping mechanism, and the telescoping mechanism is for accommodating and moving horizontally Charging carrier with workpiece and/or charging frame.
It is preferably designed for the low-pressure heating room of the heat chemistry hardening of workpiece so that it is arranged in 1 to 10 level Layer, in the charging stacked body (Chargenstapel) of especially one, two, three, four or five level course, wherein Multiple workpiece plane distribution and are preferably arranged in level course at each interval adjacent to each other in each case.Correspondingly, low The size of pressure heating room freely to feed volume width and be 400mm to 1000mm, preferably with its independent length 400mm to 800mm is highly 100mm to 300mm, preferably 100mm to 200mm；Feed volume and low-pressure heating room inner wall with And the clear spacing between heating element is 20mm to 40mm.
Be arranged at least one low-pressure heating room for by discharge plasma carry out nitriding, and with for electric installation phase Even.In order to apply negative potential on the charging carrier with workpiece, the low-pressure heating room is preferably equipped with plane structure The electrical contacts made.The electrical contacts are connected with electric conductor, inside of the electric conductor from contact site or from low-pressure heating room It sets out and by the wall of low-pressure heating room and is connected to outward on electric installation.
Negative potential need not be applied on workpiece in principle.More precisely, workpiece is relative in low-pressure heating room Wall and can be electrical isolation relative to quality potential (Massepotential), or may be in discharge plasma The potential of the floating of self-regulation.
Nevertheless, being designed in scope, apply negative potential on workpiece.In a preferred form of implementation In, charging carrier includes that there are four the carrier boards for adjusting foot for tool.Carrier board and at least one adjusting foot by conductive material such as metal, The graphite (CFC) of metal alloy, graphite or fibre reinforced is made.The conductive adjusting foot of design is used for fixed in low-pressure heating room On position to the electrical contacts of planar configuration.
The replacement form of implementation of equipment according to the present invention includes the charging Transmission system for having module, the module arrangement In lock chamber, quenching chamber, low-pressure heating room and optionally in transfer chamber.Charging carrier for such charging Transmission system is set There is the first connection (Kupplungs-) element and optional roller in bottom section.The charging Transmission system or its be arranged in lock Equipped with the second coupling element, it couples with first for room, quenching chamber, low-pressure heating room and disparate modules optionally in transfer chamber Element is matchingly constructed and can be removably coupled.The module of construction charging Transmission system in this way so that there is work The charging carrier of part can be transferred to adjacent room by the regulating and controlling mechanism of such as electronic linear driving element from a room.Specific use It is structured to conduction in the second coupling element of the charging Transmission system of the low-pressure heating room of nitriding.Second coupling element is for example Be constructed from a material that be electrically conducting, for example, metal, metal alloy, graphite or fibre reinforced graphite (CFC).Alternatively, second Element is connect to be used to feed carrier or for the on the carrier that feeds equipped with cable and the electrical contacts that are connected with cable One coupling element.Electrical contacts are preferably configured as spring contact, sliding contact or brush contact.
In meeting the improvement project of purpose at one of equipment according to the present invention, it is designed for the low-pressure heating room of nitriding Equipped with rotating driver.The charging carrier that rotating driver may be implemented to have workpiece is during nitriding in discharge plasma Middle continuous rotation, the workpiece (on average from the nitriding duration) so that guarantee is uniformly fed with discharge plasma.Work as use Active gate generates discharge plasma, and active gate is only along three or two side walls and/or along low-pressure heating room Top plate extend when, rotate with workpiece charging carrier it is verified particularly advantageous.Charging for the low-pressure heating room of nitriding And discharging, in accordance with destination using tool there are one or optional two openings opposite one another active gate.Alternatively, in the present invention Movable or folding active gate is provided in range, is located and adjusts for the charging and discharging of low-pressure heating room, So that avoiding the collision of charging carrier and workpiece.
In the first charging procedure, the charging carrier with workpiece is introduced into lock chamber (or difunctional lock-quenching chamber). Quenching chamber vacuum-tight is closed and is emptied by pump.The pressure of the gas atmosphere around workpiece be decreased to less than 300 millibars, After preferably smaller than 200 millibars and especially less than 100 millibars of value, the workpiece is independent of equipment according to the present invention It is transferred to transfer chamber from quenching chamber and is transferred to low-pressure heating room from transfer chamber to various configurations, or lock chamber is located in and is had been drained off Low-pressure heating room before and vacuum-tight be connected on low-pressure heating room.
In order to which movable lock chamber to be connect with low-pressure heating room vacuum-tight, lock chamber and optional low-pressure heating room are matched Have the coupling element for being configured to a part or two-part vacuum connection unit.Vacuum connection unit includes two in accordance with destination A flange with the sealing surface to match each other, the sealing surface of one of flange, which is equipped with one of o-ring and flange, to be had The protrusion that ring-type surrounds, the residual gas of radiation and heat of the isolation of its shield gasket face from low-pressure heating room.
Once the charging carrier with workpiece is located in low-pressure heating room, then its vacuum-tight is closed and empty to pressure Power is less than 50 millibars, is less than 40 millibars, is less than 30 millibars, preferably smaller than 20 millibars.Low-pressure heating room is electrically heated, and With more than 600 DEG C, preferably greater than 700 DEG C and particularly greater than 800 DEG C when charging carrier with workpiece moves into Temperature.When the first batch of material of production run moves into, the temperature of low-pressure heater might be less that 600 DEG C.It is carried according to charging Start temperature when body moves into, the electric energy (kWh) of fixed amount is introduced by special time period in low-pressure heater, thus by work The temperature of part is adjusted to 800 DEG C to 1050 DEG C for nitriding, until 900 DEG C to 1050 DEG C are used for carburizing or to 800 DEG C to 1050 DEG C For spreading.Each low-pressure heating room preferably includes pyrometer, bolometer or thermocouple, the temperature for measuring workpiece Degree.After workpiece reaches desired operating temperature and is kept for the scheduled residence time, into low-pressure heating room with the side of control Formula is continually introduced into one or more of process gas, such as N2、C2H2、CH4、CO2、H2, argon, so as to generate be suitable for nitriding, carburizing or The gas atmosphere of diffusion.Meanwhile constantly low-pressure heating room is emptied by one or more vacuum pumps, so that pressure is kept It is scheduled be less than 50 millibars, less than 40 millibars, less than 30 millibars, be preferably limited to 20 millibars of value.Technique in low-pressure heating room The volume flow in short-term of gas is maximum 1500l/h (l/h), preferably 150l/h to 800l/h.Maximum process gas in nitriding room Volume flow be 1000l/h, preferably 20l/h to 600l/h, 20l/h to 400l/h and especially 20l/h to 300l/h.
The duration of nitridation steps, carburization step or diffusing step is between 5 minutes and 150 minutes.If be designed with Subsequent nitridation steps, carburization step or diffusing step can then carry out in identical or other low-pressure heating room.According to this Invention is preferably, and nitridation steps and carburization step are implemented in low-pressure heating room different from each other so that low-pressure heating room is only For nitriding or it is only used for carburizing and optionally for diffusion.By implementing nitridation steps in separated low-pressure heating room and oozing Carbon step avoids the cross contamination the problem of bringing for for example forming hydrogen cyanide (HCN) to the maximum extent.Furthermore, it is possible to avoid Nitriding plasma is polluted by carbon.
For it is other, setting for these method and steps low-pressure heating rooms in carry out subsequent nitridation steps, Carburization step or diffusing step, send the charging carrier with workpiece back to transfer chamber or be sent into movable lock chamber and from its into Enter the low-pressure heating room.Alternatively, such equipment has also been devised within the scope of the present invention, two of which low-pressure heating Room is disposed adjacent to and can be connected with each other via opening and vacuum valve or Vacuum door.In the equipment constructed in this way, example is designed Such as it is used for the first low-pressure heating room of carburizing and/or diffusion, and for spreading and/or the second low-pressure heating room of nitriding.
After implementing all nitridation steps, carburization step and diffusing step, the charging carrier with workpiece is with aforementioned Mode is transferred to quenching chamber (or difunctional lock-quenching chamber), and is quenched in known manner preferably by gas.As by means of The alternative solution of the quenching of gas is helped, the quenching by oil or polymer is also provided within the scope of the present invention.
Equipment according to the present invention can electricity including two, three, four, five, six, seven, eight, nine or ten The low-pressure heating room of heating, they are connected to respectively via gas pipeline on the feeder of separation or the feeder at center. The feeder includes the container of multiple process gas, and the process gas is selected from N2, such as C2H2、CO2And CH4Carbon containing donor Gas, and such as H2With the carrier gas of argon.Mass flow controller (Mass-Flow- is arranged in gas pipeline Controller), this makes it possible to adjust the gas flow that per time unit imports low-pressure heating room.Mass flow controller via The central control unit of cable and equipment, for example, can store programming controller (SPS) be connected.Each low-pressure heating room equipped with One or more heating elements are preferably made of by graphite or the graphite (CFC) of fibre reinforced and are electrically driven (operated).Often A low-pressure heating room is connected with one or more vacuum pumps or with central pumping plant.
Lock chamber and quenching chamber and low-pressure heating room and optionally transfer chamber is respectively equipped with pressure sensing in line with the purpose Device, the controller (SPS) that it can such as store programming via cable with the central control unit of equipment are connected.
Each low-pressure heating room has one or two opening and one or two vacuum valve or Vacuum door, they are arranged On one or two end face relative to each other of low-pressure heating room.
In the improvement project of a replacement of equipment according to the present invention, low-pressure heating room is on two opposite end faces Equipped with the first and second openings and the first and second vacuum valves or the first and second Vacuum doors.Here, adding with workpiece Material carrier is charged to by the first opening in low-pressure heating room, and after terminating nitridation steps, carburization step or diffusing step Pass through the second opening discharging opposed with the first opening.The embodiment for meeting purpose of equipment according to the present invention includes one Or multiple static or movable lock chambers and one or more static or movable quenching chambers, they are arranged in low-pressure heating room Opposed side on can either move over.In such devices, the charging carrier with workpiece is only at one Moved on direction in space, that is to say, that be charged to low-pressure heating room from lock chamber by the first opening, and terminate nitridation steps, After carburization step or diffusing step quenching chamber is delivered to from low-pressure heating room by the second opening.With unidirectional material flow In the equipment constructed in this way, the charging of low-pressure heating room and discharge process break off relations (entkoppelt) each other, and actually can It is enough to be optimized in terms of the productivity of the method for the present invention or processing capacity independently of each other.
Low-pressure heating room includes one or more outer chamber walls and chamber wall in accordance with purpose, and is arranged in outer chamber walls and interior room Heat insulator between wall.Outer chamber walls are made of metal material, are especially made of steel plate and are optionally equipped with water cooling plant. Chamber wall is made of heat proof material, for example, graphite or fibre reinforced graphite (CFC).Heat insulator is preferably by graphite felt structure At.Each low-pressure heating room is equipped with one or more heating elements, they are preferably by graphite or the graphite of fibre reinforced (CFC) it constitutes and is electrically operated.Heating element is preferably placed in the upper area close to the low-pressure heating room of the wall of interior room It is interior.
Low-pressure heating room is optionally equipped with the regulating and controlling mechanism of modular charging Transmission system, such as electronic linear driver Part.In order to avoid due in low-pressure heating room heat radiation cause the overheat of regulating and controlling mechanism, regulating and controlling mechanism is arranged in low-pressure heating Heat shielding part in the bottom section of room, preferably in the shielded segment of water cooling.It is loaded with the plate with workpiece in low-pressure heating room After the charging carrier of columnar structure, charging carrier plays additional shielding action.In the favourable improvement of equipment according to the present invention In scheme, the driving for the Transmission system that feeds is arranged in the outside of low-pressure heating room, and via axis and vacuum passage and low pressure Heat the mechanical regulation mechanism connection in room.
At least one low-pressure heating room is set for nitriding, and it is made to be connected with for electric installation.Include straight for electric installation Galvanic electricity potential source, its anode are electrically connected with the conductive inner wall of low-pressure heating room or with the anode for being arranged in low-pressure heating chamber interior. The cathode of direct voltage source preferably with setting for the carrier that feeds electrical contacts, be arranged in the active of low-pressure heating chamber interior Grid is electrically connected with tool there are two the divider of terminal, connects active gate on the terminal in this way and for the carrier that feeds Electrical contacts so that charging carrier and workpiece have negative potential relative to active gate when direct voltage source is connected.
Electric installation is designed for for the DC voltage of 200V to 1000V, the DC current and 2kVA of 10A to 200A to be extremely The continuous power of 200kVA is operated.For electric installation be preferably designed for generate with ranging from hundreds of hertz to 1 megahertz, Especially 200 hertz to the pulse DC voltage for changing adjustable pulse frequency of 5 kHz and in 1.0 to 0.001 models Enclose the interior adjustable duty ratio of variation (tv)Duty ratio (tv) is according to tv=tp/'s (tp+to) Relationship indicates the ratio of pulse duration (tp) and period, that is to say, that with pulse duration (tp) and cut-out DC voltage Dead time (to) summation ratio.Pulse duration (tp) preferably smaller than/be equal to 100 μ s, and the dead time preferably greater than/ Equal to 100 μ s.In a particularly preferred form of implementation, ignition pulse generator is also comprised for electric installation, it there are rule The firing pulse with several megawatts of high-peak power and the of short duration duration of a few microseconds is generated when the pulse of rule starts.In this way Firing pulse support the formation of pulsed discharge plasma in low-pressure heating room.Aforementioned type for electric installation be it is known and It is commercially available.It is such to typically comprise electric control system based on microcontroller, storage and quickly for electric installation High efficiency switch, preferably IGBT (igbt).Include also that protection switchs in accordance with destination for electric installation, its basis Voltage drop and current strength on discharge plasma identify electric arc, and are closed in the short time of usual 100 microsecond to 1 millisecond Close power input.
Low-pressure heating room of the one or more setting for nitriding preferably includes active grid, active gate by conductive and The material that temperature for being up to 1200 DEG C is stablized is made, especially by the stone of metal, metal alloy, graphite or fibre reinforced Black (CFC) is made.The active gate is constructed, so that it is substantially or entirely surrounded the charging with workpiece at operating position and carries Body.At operating position, active gate has the shape of such as spherical shell, hemispherical Shell, cubical part surface or whole surface. Active gate be preferably designed to tunnel-like and have rectangle or semi-circular profile, while have there are two opposite one another side grid and The head cover grid (Deckengitter) of connecting side grid.
In one of equipment according to the present invention other forms of implementation, low-pressure heating room of the setting for nitriding is to be used for Plasma immersion and ion implantation.For this purpose, nitriding heating room is connected with electric pulse generator, can be applied on workpiece using it Add the amplitude with 1kV to 300KV and the negative voltage pulse of variable pulse duration.In addition, nitriding heating room with it is equal from Daughter generator is connected.Plasma generator is in 10MHz to 100MHz (radio frequency) or about 1GHz to 4GHz (microwave) range Frequency operation.For generate plasma needed for energy condenser type, inductance type or via waveguide be attached to nitriding heat room in Gas in.It is known to be used for the various equipment of plasma immersion and ion implantation in the prior art.
Description of the drawings
It is further illustrated the present invention below according to attached drawing.Wherein：
Fig. 1 shows the equipment with the transfer chamber for being arranged in center；
Fig. 2 shows the equipment of difunctional lock-quenching chamber of low-pressure heating room, transfer chamber and static state with vertically stacked；
Fig. 3 shows setting for the low-pressure heating room with horizontally adjacent arrangement and the lock chamber being horizontally movable respectively and quenching chamber It is standby；
Fig. 4 shows setting with connected in couples low-pressure heating room and the lock chamber being vertically movable respectively and quenching chamber It is standby；
Fig. 5 shows the sectional view of the low-pressure heating room for nitriding；With
Fig. 6 shows the perspective view of active gate.
Specific implementation mode
Fig. 1 shows the vertical view of the first equipment 100 according to the present invention, it have be arranged in center transfer chamber, one For carburizing and optionally, diffusion, two low-pressure heating rooms 30 are used for nitriding and one to 10, two low-pressure heating rooms 20 of lock chamber Quenching chamber 50.Each room 10,20,30 and 50 is fixedly connected with transfer chamber 70.The inner space of room 10,20,30 and 50 is via true Empty valve or Vacuum door 12,21,31 and 51 and the inner space of transfer chamber 70 can hermetic separate.Opposed with transfer chamber 70 Side on, be equipped with lock chamber 10 and quenching chamber 50, be respectively provided with vacuum valve or Vacuum door 11 and 52.In open vacuum valve Or in the case of the Vacuum door 12 of the Vacuum door 11 opened and the vacuum valve or closing closed, feeding in lock chamber 10 has workpiece Charging carrier, and herein do not interfere with less than 300 millibars, be less than 200 millibars, be less than 100 millibars and especially less than Vacuum degree in the transfer chamber 70 of 50 millibars of pressure.After will there is the charging carrier of workpiece to be charged in lock chamber 10, close Close vacuum valve or Vacuum door 11 and by lock chamber 10 empty to pressure less than 300 millibars, be less than 200 millibars, be less than 100 millibars and special It is not less than 50 millibars.Then, open vacuum valve or Vacuum door 12, and by means of charge transfer system by with workpiece plus Material carrier is transferred to transfer chamber 70.After this charging carrier with workpiece from transfer chamber 70 feed into low-pressure heating room 20 or 30 into Row carburizing or nitriding.Vacuum valve or Vacuum door 21 and 31 preferably only from transfer chamber 70 to each low-pressure heating room 20 or 30 (or Person is opposite) charging and discharging during open, and close in other cases so that due to come from low-pressure heating room 20, The pollution of low-pressure heating room 20,30 caused by 30 heat radiation and heat loss and the thermic load of transfer chamber 70 minimize. One or more carburization steps and nitridation steps are implemented respectively and optionally after diffusing step, the charging with workpiece carries Body empties to pressure and is less than 300 millibars, is less than 200 before entering in the case of Vacuum door 51 of open vacuum valve or opening In millibar, the quenching chamber 50 less than 100 millibars and especially less than 50 millibars.Vacuum valve or Vacuum door 51 are closed, and to work Part utilizes fluid, such as with through filtering and being compressed to until the room air of 20 bar pressures is quenched.In addition, in order to quench Fire provides and is such as compressed to the fluid until the nitrogen of 20 bar pressures, helium or oil.There is workpiece in order to be taken out from equipment 100 Charging carrier, open vacuum valve or Vacuum door 52 in the case where closing vacuum valve or closing Vacuum door 51, and not shadow herein Ring the vacuum degree in transfer chamber 70.
In Fig. 1 by Motion arrow 101 show material flow or with workpiece charging carrier movement.
At one in the replacement form of implementation of equipment 100 according to the present invention not shown in the figure, room 10 is configured to double Lock-quenching chamber of function and room 50 are configured to for carburizing, nitriding or the low-pressure heating room optionally spread.It is constructing in this way Equipment in, workpiece feeds in a device via lock-quenching chamber and discharging.
Fig. 2 shows the schematic side elevation of another equipment 200 according to the present invention, equipment 200 has difference two (total Four) the low-pressure heating room 20 and 30 of vertically stacked is respectively used to carburizing and optionally spreads and be used for nitriding, the low pressure Heating room is connected in transfer chamber 71 and their inner space respectively can be with by vacuum valve or Vacuum door 21 or 31 The inner space of transfer chamber 71 airtightly separates.In addition, the equipment is difunctional in transfer chamber 71 comprising being again connected to Lock-quenching chamber 15, it has, and there are two the vacuum valves or Vacuum door 11 and 12 being arranged on opposite end face.Difunctional lock- The inner space of quenching chamber 15 can airtightly be separated by means of vacuum valve or Vacuum door 12 and the inner space of transfer chamber 71.
Unshowned charging Transmission system in Fig. 2 is disposed in transfer chamber 71, it includes the elevator being vertically movable, Telescoping mechanism is installed on it.Telescoping mechanism setting for accommodate and move horizontally charging carrier with workpiece and/ Or charging frame.By charging Transmission system, charging carrier and/or charging frame with workpiece can be from difunctional lock-quenching chambers 15 are selectively entered low-pressure heating room 20,30.In addition, according to technological order by with workpiece charging carrier and/or charging Frame is transported from low-pressure heating room 20, one of 30 to another low-pressure heating room 20,30.
In order to by the charging carrier with workpiece and/or charging it is rack-mounted expect in equipment 200, by they closing vacuum It is placed into difunctional lock-quenching in the case of the Vacuum door 11 of valve or the Vacuum door of closing 12 and the vacuum valve or opening opened In room 15.Vacuum valve or Vacuum door 11 are closed and the internal chamber of difunctional lock-quenching chamber 15 is emptied by pump.Then Carburizing, optionally diffusion and nitriding method step implement with the mode of equipment 100 and Fig. 1 associated descriptions similar to front. In order to quench with discharging have workpiece charging carrier and/or charging frame, by they from low-pressure heating room 20, one of 30 transport to Difunctional lock-quenching chamber 15.
Fig. 3 shows that the vertical view of another equipment 300 according to the present invention, equipment 300 have each three horizontally adjacent cloth The low-pressure heating room 20 and 30 set is respectively used to carburizing and optionally spreads or be used for nitriding.Each low-pressure heating room 20 and 30 It is equipped with the first vacuum valve or the first Vacuum door 21 or 31 in first end face, and is equipped with second in opposed second end face Vacuum valve or the second Vacuum door 22 or 32.In addition, equipment 300 includes can be horizontal along the first end face of low-pressure heating room 20,30 The lock chamber 10A of movement, and the quenching chamber 50A that is horizontally movable of second end face along low-pressure heating room 20,30.For lock chamber The movement of 10A and quenching chamber 50A construct the linear guide apparatus 17 or 57 of such as rail-like, and unshowned drive in figure 3 Dynamic device.
The movement of lock chamber 10A and quenching chamber 50A are shown by Motion arrow 107 or 507 in figure 3.Lock chamber 10A and quenching Room 50A is equipped with the first vacuum valve or the first Vacuum door 11 or 51 in first end face, and is equipped in opposite second end face There are the second vacuum valve or the second Vacuum door 12 or 52.In the case where opening the first vacuum valve or opening Vacuum door 11, will have The charging carrier of workpiece is charged to lock chamber 10A.Vacuum valve or Vacuum door 11 and 12 are closed, and lock chamber 10A is emptied to pressure and is less than 300 millibars, less than 200 millibars, especially less than 50 millibars and determined less than 100 millibars and in order to carry out carburizing or nitriding Position rests in before not placing the low-pressure heating room 20 of workpiece and airtightly on low-pressure heating room 20.By the vacuum of lock chamber 10A The vacuum valve or Vacuum door 21 or 31 of valve or Vacuum door 12 and the low-pressure heating room 20,30 stopped are opened, adding with workpiece Material carrier is transferred to from lock chamber 10A in stopped low pressure lock chamber 20,30 by charging Transmission system.Vacuum valve or Vacuum door 21, it 31 closes, workpiece carries out one or more carburization steps by previously given sequence, optionally one or more diffusing steps With one or more nitridation steps.Such as workpiece is subjected to carburizing in low-pressure heating room 20 first and is optionally spread, this it It is transferred in low-pressure heating room 30 by lock chamber 10A afterwards and carries out nitriding wherein.Implementing scheduled carburization step, diffusion After step and nitridation steps, workpiece is for example filtered by fluid in quenching chamber 50A and is compressed to the pressure until 20 bars The room air of power is quenched.Quenching chamber 50A is located in before corresponding low-pressure heating room 20 or 30 thus and airtightly It stops on it.Then, by the vacuum valve of the vacuum valve of low-pressure heating room 20 or 30 or Vacuum door 22 or 32 and quenching chamber 50A or Vacuum door 51 is opened, and the charging carrier with workpiece is transferred to quenching chamber 50A from low pressure lock chamber 20 or 30.By vacuum valve or vacuum Door 51 is closed, and implements quenching Step.Then vacuum valve or Vacuum door 52 are closed, and taken out with workpiece from equipment 300 Charging carrier.
In one drawing in the replacement form of implementation of unshowned equipment according to the present invention 300, room 10A is configured to double work( Energy, movable lock-quenching chamber, wherein saving quenching chamber 50A.In the equipment constructed in this way, workpiece is via lock-quenching Room feeds in a device and discharging.
Fig. 4 shows that the side cross-sectional view of another equipment 400 according to the present invention, equipment 400 have pairs of, horizontally adjacent cloth The low-pressure heating room 20 and 30 set and interconnected.The two of a low-pressure heating room 20 and a low-pressure heating room 30 will be all had To, three pairs, four pairs or more to vertically stacked.Have respectively alternatively, provide in scope and arrange wherein horizontally adjacently There are one each pair of constructions of low-pressure heating room 20 and a low-pressure heating room 30.Between the pair of low-pressure heating room 20 and 30 It arranges vacuum valve or Vacuum door 230, the inner space of low-pressure heating room 20 and 30 is mutually separated and is only transmission workpiece Just open.Each low-pressure heating room 20 is equipped with vacuum valve or Vacuum door on the end face opposite with vacuum valve or Vacuum door 230 21.Each low-pressure heating room 30 is equipped with vacuum valve in a similar way on the end face opposite with vacuum valve or Vacuum door 230 Or Vacuum door 32.
In addition, equipment 400 includes being vertically movable the lock chamber 10A of (or being optionally horizontally movable), lock chamber 10A can be located at Before each low-pressure heating room 20, and the quenching chamber 50A including being vertically movable (or being optionally horizontally movable), quenching chamber 50A can be located at before each low-pressure heating room 30.Lock chamber 10A is equipped with vacuum valve or Vacuum door 11 on two opposite end faces With 12.Quenching chamber 50A is equipped with vacuum valve or Vacuum door 51 and 52 equally on two opposite end faces.Lock chamber 10 and quenching chamber The motion path of vertical (or optionally horizontal) of 50A is shown by Motion arrow 107 or 507.For lock chamber 10A and quenching The linear guides and driver of such as rail-like being not shown in Fig. 4 are arranged in the operation of room 50A.
Equipment 400 the difference is that only with being operated with the similar fashion of equipment 300 and Fig. 3 associated descriptions before such as, Workpiece is done directly from low-pressure heating room 20 to the transfer in low-pressure heating room 30, and does not need movable lock chamber 20 thus.
Fig. 5 shows that schematic sectional view of the setting for the low-pressure heating room 30 of nitriding, low-pressure heating room 30 have interior room Wall 33, outer chamber walls 35 and the heat insulator 34 being arranged between chamber wall 33 and outer chamber walls 35, and one or more heating units Part 7.Outer chamber walls 35 are preferably made of metal material, and are especially formed from steel, and are optionally equipped with the water being not shown in Figure 5 Device for cooling.Thermal insulation 34 is preferably made of graphite felt.Inner wall 33 and thermal element 7 are preferably by graphite or the graphite of fibre reinforced (CFC) it is made.Low-pressure heating room 30 is preferably equipped with the bracket 3,3A for being useful for charging carrier, and wherein at least one bracket 3A has Electrical contacts are made of the graphite (CFC) of conductive material such as metal, metal alloy, graphite or fibre reinforced.
In addition, the charging carrier 2 for having pending workpiece 1 and optional active gate 5 is shown in FIG. 5.Charging carries Body 2 is preferably configured as plate or lattice-shaped, and in bottom side equipped with foot 4,4A is adjusted, it is to lead that wherein at least one, which adjusts foot 4A, Electricity.
Bracket 3,3A and adjusting foot 4,4A are arranged with matching each other, and are formed conduction will pass through bracket 3A and adjusting foot 4A and are connect Contact portion.Chamber wall 33 is connected via cable with the anode for electric installation 90.For electric installation 90 be preferably designed to can pulse direct current Voltage source, and be arranged for the DC voltage of 200V to 1000V, the DC current of 10A to 200A and 2kVA to 200kVA Continuous power operate plasma discharging.Include igniting for electric installation 90 in the present invention especially meets the form of implementation of purpose Impulse generator.
It is made of heat proof material to cable section for low-pressure heating room, such as tungsten or graphite.Alternatively, using having by making pottery The copper cable of heat shield made of ceramic material.
Feed carrier 2 or bracket 3A and/or optional active gate 5 via cable connection in the cathode for electric installation 90 On, and it is connected to cathode relative to chamber wall 33.
It may be advantageous that applying negative electricity to workpiece 1 relative to active gate 5 using active gate 5 Gesture (so-called bias).Correspondingly, there are two outlets or terminal to be used for workpiece 1 and active grid 5 for the setting of optional divider 91.
Fig. 6 shows the perspective view of the active gate 5 constructed in accordance with destination and the charging carrier 2 with workpiece 1.It is active Grid 5 is configured to tunnel-like, and there are two the header fields of two lateral parts in side and connection opposite one another for tool.
Optionally, the connection of charging carrier 2 has unshowned rotating driver in Fig. 6.Nitriding may be implemented in rotating driver Period continues rotary feeding carrier 2, to ensure to load workpiece 1 with discharge plasma as homogeneously as possible.Feed carrier 2 Rotation is shown by Motion arrow 2A in figure 6.
Reference numerals list
1 ... workpiece
2 ... charging carriers
2A ... Motion arrows
Brackets of the 3,3A ... for the carrier that feeds
The adjusting foot of 4,4A ... charging carriers
5 ... active gates
10 ... static lock chambers
Lock chamber movable 10A ...
15 ... locks-quenching chamber
17 ... running gears
20 ... are used for the low-pressure heating room of carburizing
30 ... are used for the low-pressure heating room of nitriding
The inner wall of 33 ... low-pressure heating rooms
The heat insulator of 34 ... low-pressure heating rooms
The outer wall of 35 ... low-pressure heating rooms
50 ... static quenching chambers
Quenching chamber movable 50A ...
57 ... running gears
70 ... transfer chambers (level)
71 ... transfer chambers (vertical)
90 ... for electric installation
11,12,21,22,31,32,51,52,230 ... vacuum valves or Vacuum door
90 ... for electric installation
100 ... the equipment for heat chemistry hardening
200 ... the equipment for heat chemistry hardening
300 ... the equipment for heat chemistry hardening
400 ... the equipment for heat chemistry hardening
101 ... Motion arrows
107 ... Motion arrows
507 ... Motion arrows

Claims (37)

1. the equipment that the heat chemistry for workpiece is hardened, it includes：
- m low-pressure heating rooms, and m=2,3,4,5,6,7,8,9 or 10；
The feeder is arranged for being provided for the low-pressure heating room in the feeder being connected with the low-pressure heating room One or more of gases, the gas are selected from N2, it is selected from C2H2、CO2And CH4Carbon containing donor gas, and be selected from H2With The carrier gas of argon；
Transfer chamber, it is connected with each low-pressure heating room and lock chamber and quenching chamber or difunctional lock-quenching chamber；Or
Lock chamber and quenching chamber, they distinguish movable and can be connected with each low-pressure heating room；Or
Difunctional lock-quenching chamber, it is movable and can be connected with each low-pressure heating room；
It is characterized in that,
One or more low-pressure heating rooms are connected with for electric installation, and it is arranged and is used for N2As containing for donor gas In nitrogen atmosphere, discharge plasma is generated at the temperature more than 800 DEG C and the pressure less than 100 millibars.
2. equipment according to claim 1, which is characterized in that setting is described to be used for for electric installation with the direct current of 200V to 1000V The continuous power of voltage, the DC current of 10A to 200A and 2kVA to 200kVA operates discharge plasma.
3. according to the equipment of claims 1 or 2, which is characterized in that setting is described to be used to be pressed into pulse direct current for electric installation Row operation.
4. equipment according to claim 3, which is characterized in that setting is described to be used for pulsed dc voltage and combine for electric installation Firing pulse is operated.
5. equipment according to claim 1 or 2, which is characterized in that one or more low-pressure heating rooms are equipped with active grid Pole.
6. the method that the heat chemistry for workpiece is hardened, the method include with variable sequence：
One or more carburization steps, implement in carbon containing gas atmosphere of the pressure less than 50 millibars, wherein the work Part is maintained at 900 DEG C to 1050 DEG C of temperature；Or one or more carburization steps, it is carbon containing less than 50 millibars in pressure Implement in gas atmosphere, wherein the workpiece is maintained at 900 DEG C to 1050 DEG C of temperature, and one or more diffusing steps, Implement in gas atmosphere of the pressure less than 100 millibars；
One or more nitridation steps, implement in nitrogenous gas atmosphere of the pressure less than 50 millibars, wherein the work Part is maintained at 800 DEG C to 1050 DEG C of temperature, and the nitrogenous gas atmosphere includes dinitrogen (N2) as donor gas and It is excited by discharge plasma；And
In the nitridation steps, the nitrogenous gas atmosphere is by N2It constitutes, by N2It is selected from H with one or more2And argon Carrier gas constitute, by N2It is selected from CO with one or more2Or CH4Carbonaceous gas constitute or by N2With it is a kind of or more It is a variety of to be selected from CO2Or CH4Carbonaceous gas and one or more of be selected from H2It is constituted with the carrier gas of argon；Wherein
The method is implemented as follows in the equipment described in any one according to claim 1 to 5：I.e. two follow one another Method and step between time interval be less than 15 minutes, and the workpiece is maintained at pressure in the time interval and is less than In 300 millibars of gas atmosphere.
7. method according to claim 6, which is characterized in that the time interval between two method and steps to follow one another is less than 10 minutes.
8. method according to claim 7, which is characterized in that the time interval between two method and steps to follow one another is less than 5 minutes.
9. method according to claim 7, which is characterized in that the time interval between two method and steps to follow one another is less than 1 minute.
10. according to the method for any one of claim 6 to 9, which is characterized in that between the method and step that two follow one another In time interval, the workpiece is maintained in gas atmosphere of the pressure less than 200 millibars.
11. method according to claim 10, which is characterized in that the time interval between the method and step that two follow one another Interior, the workpiece is maintained in gas atmosphere of the pressure less than 100 millibars.
12. the method according to any one of claim 6 to 9, which is characterized in that in the method and step that two follow one another Between time interval in, the temperature of the workpiece is more than 600 DEG C.
13. according to the method for claim 12, which is characterized in that the time between the method and step that two follow one another In interval, the temperature of the workpiece is more than 700 DEG C.
14. according to the method for claim 12, which is characterized in that the time between the method and step that two follow one another In interval, the temperature of the workpiece is more than 800 DEG C.
15. the method according to any one of claim 6 to 9, which is characterized in that the method includes following in sequence Step：
Carburizing/nitriding；
Carburizing/diffusion/nitriding；
Nitriding/carburizing/nitriding；
Nitriding/carburizing/nitriding/carburizing；Or
Nitriding/carburizing/diffusion/nitriding.
16. the method according to any one of claim 6 to 9, which is characterized in that the discharge plasma with 200V extremely The continuous power of the DC voltage of 1000V or the DC voltage of pulse, the DC current of 10A to 200A and 2kVA to 200kVA is grasped Make.
17. the method according to any one of claim 6 to 9, which is characterized in that in one or more nitridation steps, The nitrogenous gas atmosphere is excited by DC current-discharge plasma of pulse.
18. according to the method for claim 17, which is characterized in that described nitrogenous in one or more nitridation steps Gas atmosphere by pulse DC current-discharge plasma and combine igniting pulse excitation.
19. the method according to any one of claim 6 to 9, which is characterized in that in one or more nitridation steps, The discharge plasma is generated by means of active gate.
20. method according to claim 19, which is characterized in that it is the potential born that the workpiece, which is maintained at relative to active gate, Under, the potential is 10 volts to 400 volts.
21. method according to claim 19, which is characterized in that it is the potential born that the workpiece, which is maintained at relative to active gate, Under, the potential is 10 volts to 200 volts.
22. the method according to any one of claim 6 to 9, which is characterized in that make in one or more nitridation steps Use plasm immersion ion implantation.
23. the method according to any one of claim 6 to 9, which is characterized in that the workpiece is protected during nitridation steps Hold the temperature at 820 DEG C to 1000 DEG C.
24. according to the method for claim 23, which is characterized in that the workpiece is maintained at 920 DEG C during nitridation steps To 980 DEG C of temperature.
25. the method according to any one of claim 6 to 9, which is characterized in that the workpiece is protected during carburization step Hold the temperature at 940 DEG C to 1050 DEG C.
26. the method according to any one of claim 6 to 9, which is characterized in that nitrogenous in the nitridation steps The ratio of carbonaceous gas described in gas is with N22 volume % are calculated as to 20 volume %.
27. according to the method for claim 26, which is characterized in that described in the nitrogenous gas in the nitridation steps The ratio of carbonaceous gas is with N24 volume % are calculated as to 15 volume %.
28. according to the method for claim 26, which is characterized in that described in the nitrogenous gas in the nitridation steps The ratio of carbonaceous gas is with N24 volume % are calculated as to 10 volume %.
29. the method according to any one of claim 6 to 9, which is characterized in that described to contain in the nitridation steps The pressure of the gas atmosphere of nitrogen is less than 40 millibars.
30. according to the method for claim 29, which is characterized in that in the nitridation steps, the nitrogenous gas gas The pressure of atmosphere is less than 30 millibars.
31. according to the method for claim 29, which is characterized in that in the nitridation steps, the nitrogenous gas gas The pressure of atmosphere is less than 20 millibars.
32. the method according to any one of claim 6 to 9, which is characterized in that described to contain in the carburization step The gas atmosphere of carbon is selected from C by one or more2H2、CO2And CH4Carbon containing donor gas constitute, or by a kind of or more It is a variety of to be selected from C2H2、CO2And CH4Carbon containing donor gas and one or more of be selected from H2It is constituted with the carrier gas of argon.
33. the method according to any one of claim 6 to 9, which is characterized in that described to contain in the carburization step The pressure of the gas atmosphere of carbon is less than 40 millibars.
34. according to the method for claim 33, which is characterized in that in the carburization step, the carbon containing gas gas The pressure of atmosphere is less than 30 millibars.
35. according to the method for claim 33, which is characterized in that in the carburization step, the carbon containing gas gas The pressure of atmosphere is less than 20 millibars.
36. the method according to any one of claim 6 to 9, which is characterized in that the method includes being 0.9 in pressure Bar to 2 bars of N2High pressure diffusing step under atmosphere.
37. according to the method for claim 36, which is characterized in that the method includes the following steps in sequence：
Nitriding/carburizing/high pressure diffusion.
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