CN105142861B - The manufacture method of grinding grinding stone, the manufacture method of glass substrate for disc and disk - Google Patents
The manufacture method of grinding grinding stone, the manufacture method of glass substrate for disc and disk Download PDFInfo
- Publication number
- CN105142861B CN105142861B CN201480023650.6A CN201480023650A CN105142861B CN 105142861 B CN105142861 B CN 105142861B CN 201480023650 A CN201480023650 A CN 201480023650A CN 105142861 B CN105142861 B CN 105142861B
- Authority
- CN
- China
- Prior art keywords
- grinding
- glass substrate
- grinding stone
- face
- stone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
The present invention provide a kind of be capable of high-quality ground polished glass substrate end face, can carry out stay in grade grinding grinding grinding stone.The grinding grinding stone of the present invention is that the end face of the discoid glass substrate for having circular hole to center carries out the grinding grinding stone of accurate grinding, and this grinding grinding stone comprises grinding abrasive grains and the binding agent that this grinding abrasive grains is bonded to each other.For this grinding grinding stone, by nano indentation test method, the binding agent part on this grinding grinding stone surface is measured with the condition of the press-in load of 250mN using Bo Shi pressure head, obtained hardness is in the range of 0.4GPa～1.7GPa.
Description
Technical field
The present invention relates to disk in being equipped on the magnetic recording systems such as hard disk drive (hereinafter referred to as " HDD ")
In glass substrate manufacture be used for cross grinding grinding grinding stone, carried out using this grinding grinding stone substrate cross grinding magnetic
The manufacture method of disk glass substrate and make use of the glass substrate being obtained by this manufacture method disk manufacture method.
Background technology
Currently, for information record technology, particularly for Magnetographic Technology, with IT industry develop rapidly it is desirable to
Carry out tremendous technological innovation.In the disk as the recording medium being equipped in the magnetic recording systems such as HDD, due to Gao Rong
The requirement quantifying, needs each piece of disk to be capable of the technology of the information recording density of more than 750GB.
However, as substrate for information recording mediums such as disks, be widely used for aluminum series alloy substrate in the past, recently, make
For being suitable for the substrate for magnetic disc of high record density, the ratio shared by glass substrate raises.Glass substrate and aluminum series alloy base
Plate compare rigidity higher, thus suitable for the high-speed rotation of disk set, and smooth surface can be obtained, therefore easily drop
The suspension amount of low magnetic head, it is possible to increase the S/N ratio of tracer signal, thus be suitable.
In addition, for the high record density realizing disk, glass substrate be it is also desirable to have with the machining accuracy of height, this
Not only for the first type surface of glass substrate, it is also same to end surface shape.
Glass substrate for disc is typically by the grinding being shaped to discoid glass blanket and implementing successively end face
Grind, the grinding of first type surface is ground, the operation such as chemical enhanced and manufacture.
As the processing method of the end face of existing glass substrate, to being shaped to discoid glass blanket (glass
Substrate) end face part supply grinding fluid, make grinding grinding stone in the outer circumference side edge face of glass substrate and inner circumferential side end face
Contact rotates and carries out grinding, the chamfer machining of the outer circumference side edge face to glass substrate and inner circumferential side end face enforcement regulation
(patent documentation 1 etc.).In the case of being somebody's turn to do, grinding stone is also commonly referred to as molding grinding stone (shape whetslate), and it has for forming glass
The flute profile of the end surface shape of glass substrate, is processed with the end contact of glass substrate by making this grinding stone, thus will grind
The slotted shape of grinding stone is transferred to the end face of glass substrate.In addition, after this chamfer machining, in order to the end face of glass substrate is added
Work becomes minute surface, has carried out scratch brushing grinding.
Prior art literature
Patent documentation
Patent documentation 1：Japanese Unexamined Patent Publication 2000-185927 publication
Patent documentation 2：Japanese Unexamined Patent Publication 2006-294099 publication
Content of the invention
Invention problem to be solved
With the development of informationized society, the requirement to the high record density of disk also will improve.Glass in disk
The end surface shape aspect of glass substrate, also requires that raising further and the machining accuracy (form accuracy of surface quality (smoothing etc.)
Deng) raising further.
Its reason is intended to the high-quality of the realistic existing such as high precision int of inside/outside diameter size precision, outer-diameter end face, and this is interior
The high precision int of outside dimension precision is used for obtaining the positioning precision of magnetic head when being equipped in HDD, the Gao Pin of this outer-diameter end face
There is the requirement of the pollution causes such as corrosion based on reducing to medium first type surface in matter.
In the past, in the grinding of substrate end-face, carry out chamfer machining etc. first for forming the corase grind of end surface shape
Cut processing, then carry out except the essence of the roughness quality for also serving to ensure that surface in addition to guaranteeing end surface shape and dimensional accuracy
Close grinding (polishing grinding).The electro-deposition bonding agent grinding stones using hardness hard in above-mentioned thick grinding more
Deng.
On the other hand, in the processing of above-mentioned accurate grinding, in order to ensure the burnishing surface quality of substrate end-face, how using hardness
The resinoid bond grinding stone softer than the grinding grinding stone of thick grinding, but the grinding grinding stone of reality is in volume production processing
During use, grinding performance can produce deviation, thus leads to the generation of various problems it is impossible to stably obtain desired quality.
With regard to the hardness of grinding grinding stone, in the past known using greatly more the hardness test of formula testing machine, utilize Rockwell Hardness
The methods such as the hardness evaluation of meter.But, according to the research of the present inventor, in the grinding grinding stone evaluated using these methods
Hardness with using the actual grinding performance carrying out during substrate end-face grinding of this grinding grinding stone, (grinding speed, grinding surface are coarse
Degree, shape and size precision etc.) if between unconfirmed to clear and definite dependency relation as a result, the unactual trial being used; no
Method judges the quality of grinding grinding stone.
It should be noted that having recorded the description below in above-mentioned patent documentation 2：By using in diamond lap grain
Carbamate resins or carbamide resin etc. are used as the resinoid bond grinding stone of binding agent (binding agent), machined surface is thick
Rugosity Ra is polished to below 100nm, but illustrate only the constituent material of grinding stone composition, and undisclosed specific grinding stone rule
The hardness number of lattice, the particularly grinding stone of impact grinding performance.Even if the constituent material of grinding stone is identical, if hardness is different,
Then grinding speed, the quality of machined surface also can produce difference, be difficult to obtain stable quality in volume production processing.
As described above, from the aspects such as high record density, the size shape precision of the end face of glass substrate or chamfering
Polished surface quality of processing etc. is higher than ever for the quality requirements of glass substrate for disc, does not have to evaluate exactly
The index of grinding stone performance, if the unactual trial being used is looked at, cannot judge the performance of grinding stone, in this situation
Down it is difficult to stably tackle the quality requirements of glass substrate higher from now on.
Then, from the aspect of the reply task of top priority is to ensure that the requirement of disk high record density of reliability, this
Invention the 1st purpose be provide a kind of grinding grinding stone, its can efficiently and high-quality ground polish glass substrate for disc end
Face, also can obtain stable quality in volume production processing.In addition, the 2nd purpose is to provide a kind of manufacture of glass substrate for disc
Method, the method can carry out the also stable cross grinding processing of quality in volume production is processed using this grinding grinding stone.Additionally,
3rd purpose is to provide a kind of manufacture method of disk, and it is using the glass substrate being obtained by such manufacture method.
For solving the scheme of problem
In order to solve above-mentioned problem, present inventor has performed furtheing investigate, result completes the present invention.
That is, in order to solve above-mentioned problem, the present invention has following composition.
(constituting 1)
A kind of grinding grinding stone, it is that the end face of the discoid glass substrate for having circular hole to center carries out precision
The grinding grinding stone of grinding it is characterised in that above-mentioned grinding grinding stone comprise abrasive grains and by this abrasive grains be bonded to each other viscous
Knot agent, passes through nano indentation test method to above-mentioned grinding grinding stone table using Bo Shi pressure head with the condition of the press-in load of 250mN
The hardness that the binding agent part in face records is in the range of 0.4GPa～1.7GPa.
(constituting 2)
Constituted the grinding grinding stone as described in 1 it is characterised in that the mean diameter of above-mentioned abrasive grains is 2 μm～15 μm
In the range of.
(constituting 3)
Constituted the grinding grinding stone as described in 1 or 2 it is characterised in that above-mentioned grinding grinding stone is to make in the following cases
Spin finishing stone：In the shape making the rotary shaft of grinding stone tilt with respect to the axle orthogonal with the first type surface of above-mentioned glass substrate
Under state, so that this grinding stone and the end face of above-mentioned glass substrate is abutted, ground is carried out to the end face of this glass substrate.
Herein, above-mentioned " inclination " refers to, according to the side wall of glass substrate and two fillet surfaces all faces simultaneously with set
The mode being placed in the groove contact on the surface of grinding grinding stone enters line tilt.
(constituting 4)
A kind of manufacture method of glass substrate for disc is it is characterised in that include using any one of composition 1～3
Grinding grinding stone carry out above-mentioned glass substrate the ground of end face operation.
(constituting 5)
A kind of manufacture method of glass substrate for disc, it is the system of the glass substrate for disc including following ground
Make method, this ground is that the end face of the discoid glass substrate having circular hole to center using grinding grinding stone carries out essence
Close grinding, it is characterised in that above-mentioned grinding grinding stone comprises abrasive grains and the binding agent that this abrasive grains is bonded to each other, is asked in advance
Go out, using Bo Shi pressure head, nano indentation test method is passed through to above-mentioned grinding grinding stone surface with the condition of the press-in load of 250mN
Hardness that binding agent part records and under certain conditions ground is carried out to glass substrate end face using this grinding grinding stone
When grinding speed dependency relation, select based on calculated dependency relation to have to reach the hard of desired grinding speed
The grinding grinding stone of degree, the grinding grinding stone using this selection carries out above-mentioned ground.
(constituting 6)
Constitute the glass substrate for disc as described in 5 manufacture method it is characterised in that above-mentioned grinding grinding stone above-mentioned
Binding agent is made up of resin material, the scope being 0.4GPa～1.7GPa by the hardness that above-mentioned nano indentation test method records
Interior.
(constituting 7)
Constituted the manufacture method of the glass substrate for disc as described in 5 or 6 it is characterised in that using above-mentioned selected
Grinding grinding stone, tilts with respect to the axle orthogonal with the first type surface of above-mentioned glass substrate in the rotary shaft making this grinding grinding stone
Under state, so that this grinding grinding stone is abutted with the end face of above-mentioned glass substrate, ground is carried out to the end face of this glass substrate.
(constituting 8)
As constituted the manufacture method of the glass substrate for disc any one of 4～7 it is characterised in that according to above-mentioned
The mode that the surface roughness Ra of the end face of glass substrate reaches less than 0.1 μm carries out ground.
(constituting 9)
A kind of manufacture method of disk it is characterised in that by constitute 4～8 any one of disk glass
Magnetosphere is at least formed on the first type surface of the glass substrate for disc manufactured by the manufacture method of substrate.
The effect of invention
If using the present invention grinding grinding stone, can efficiently and high-quality ground polish glass substrate for disc end face,
Even if stable quality also can be obtained in volume production processing.It is to ensure that the disk of reliability is high therefore, it is possible to tackle the task of top priority
The requirement of packing density.
In addition, the manufacture method of the glass substrate for disc according to the present invention, it is possible to use this grinding grinding stone is carried out
The also stable cross grinding processing of quality in volume production processing, thus, its result being capable of high-quality ground polishing glass substrate for disc
End face.
Additionally, the magnetic of the glass substrate for disc according to manufactured by use is by the manufacture method of this glass substrate for disc
The manufacture method of disk, is capable of the end face of high-quality ground polishing substrate, is prevented from apparent condition or the machining accuracy of substrate end-face
The generation of the obstacle causing, using the teaching of the invention it is possible to provide can achieve the high disk of the reliability of higher packing density.
Brief description
Fig. 1 shows an embodiment of cross grinding processing method, and (a) is axonometric chart, and (b) is the direction with (a)
Different front views.
Fig. 2 shows another embodiment of cross grinding processing method, and (a) is axonometric chart, and (b) is the side with (a)
To different front views.
Fig. 3 is the sectional view of of the flute profile of grinding stone used in the embodiment being shown in above-mentioned Fig. 2.
Fig. 4 is the sectional view of of the end surface shape illustrating glass substrate.
Fig. 5 is the load figure related to displacement being measured according to nano indentation test method in grinding grinding stone.
Fig. 6 is to illustrate the hardness of grinding grinding stone measuring by nano indentation test method and utilize this grinding grinding stone
Under certain conditions glass substrate end face is carried out with the figure of of dependency relation of grinding speed during ground.
Fig. 7 shows the other embodiment of cross grinding processing method, and (a) is axonometric chart, and (b) is the direction with (a)
Different front views.
Specific embodiment
Below, this specific embodiment is described in detail.
Fig. 4 is the sectional view of the periphery side end of the glass substrate for disc 1 being suitable for the present invention.Although not shown in Fig. 4,
But this glass substrate 1 has being integrally formed into of circular hole 4 discoid (with reference to Fig. 1 etc.) in central part, has the master meter of its exterior and the interior
Face 1a, 1a and be formed at these first type surfaces 1a, the end face of the outer circumferential side between 1a and the end face of inner circumferential side.
The end face of the outer circumferential side of above-mentioned glass substrate 1 is formed as by the side wall 1b orthogonal with its first type surface 1a and difference
It is formed at the first type surface 1a of this side wall 1b and the exterior and the interior, 2 between 1a fillet surface (having carried out the face of chamfering) 1c, 1c are constituted
Shape.In addition, for above-mentioned glass substrate 1 inner circumferential side end face although not shown, but in the same manner as above-mentioned outer circumference side edge face
The first type surface 1a being formed as by the side wall orthogonal with its first type surface 1a and being respectively formed in this side wall and the exterior and the interior, between 1a
The shape that constituted of 2 fillet surfaces (having carried out the face of chamfering).
And, in the case of disk, such as 2.5 inch disk, the external diameter being polished glass substrate 1 is 65mm, interior
Footpath is 20mm.Herein, internal diameter refers to the internal diameter of the circular hole of the central part of glass substrate 1.
The first type surface 1a of glass substrate for disc 1, outer circumference side edge face and inner circumferential side end face are all ground (mirror ultrafinish) and throw
Light becomes finally to respectively reach the surface roughness of regulation.The outer circumference side edge face of glass substrate 1 and inner circumferential side end face are all polished
Above-mentioned end surface shape, and usually require that being polished to surface roughness is for example calculated as less than 0.1 μm, is calculated as with Ra with Rmax
Less than 0.01 μm of mirror status.
Herein, in the present invention, when referring to Ra, Rmax, it is according to Japanese Industrial Standards (JIS) B0601：1982 arithmetic is put down
All roughness, maximal roughness.In addition, in the present invention, the surface roughness of end face is will to observe multiplying power using laser microscope
It is set to 3000 times of values measured by the mensuration region of 50 μm of 50 μ m.
Glass substrate for disc 1 is typically by the discoid glass being shaped to specify using for example direct molding etc.
The grinding that end face implemented successively by substrate (glass plate) 1 grinds (mirror ultrafinish), the grinding mirror ultrafinish of first type surface, chemistry by force
Change etc. operation and manufacture.
First, the grinding grinding step of the end face of above-mentioned glass substrate 1 is illustrated.
It should be noted that in this specification, for convenience of description, from the plectane being shaped to specify using direct molding etc.
The glass plate of shape to this glass plate implement processing, process etc. made by end article glass substrate, referred to collectively as
Glass substrate or glass substrate for disc.
First, above-mentioned cross grinding manufacturing procedure is illustrated.Fig. 1 shows the one of above-mentioned cross grinding processing method
Individual embodiment, (a) is axonometric chart, and (b) is the front views different from the direction of (a).
Central part is implemented with perforation processing, for the glass substrate 1 with circular hole 4, using grinding stone 7 to its periphery side
Face is processed, and using grinding stone 8, inner circumferential side end face is processed.Grinding stone 7 is formed as given size as illustrated
Discoid, there is in its outer circumferential side the flute profile of the end surface shape for forming glass substrate, specifically, defining can be in glass
The outer circumference side edge face shape transfer side wall of glass substrate and the flute profile in this two faces of fillet surface.In addition, grinding stone 8 is as illustrated
Be formed as the cylindric of given size, there is the flute profile of the end surface shape for forming glass substrate in its outer circumferential side, specifically
Say, define the flute profile that can transfer side wall and this two faces of fillet surface in the inner circumferential side end surface shape of glass substrate.That is, on
State grinding stone 7 and grinding stone 8 all allows for the size shape of completion target in grinding face of glass substrate 1 and is formed as
The size shape of regulation.
As above-mentioned grinding stone 7 and grinding stone 8 used in the processing of above-mentioned cross grinding, so-called in thick grinding
Electro-deposition bonding agent grinding stone is suitable, and it is for example to tie the diamond lap grain electro-deposition as high rigidity grinding stone
Mixture bonding.In addition, in the accurate grinding processing of polishing, being suitably the binding agent example that abrasive grains are bonded to each other
As the resin-bonded for resin materials such as phenolic resin, carbamate resins, polyimide resin, polyester resin, fluororesin
Agent grinding stone；Binding agent is, for example, that the metallic bond of the metallic binding agents such as copper series alloy, casting iron-based alloy, titanium alloy grinds
Grinding stone；Binding agent is vitrified grinding stone of vitrified bond etc..Wherein, the adjustment of grinding stone hardness is relatively easy to tree
Fat bonding agent grinding stone is specially suitable.
In addition, as the particle diameter of abrasive grains, in order to tie up in the whole grinding stone life-span while maintaining roughness
Hold grinding performance, such as mean diameter is less than 30 μm of abrasive grains is suitable, particularly in accurate grinding processing, put down
Equal particle diameter is the abrasive grains in the range of 2 μm～15 μm is suitable.As abrasive grains, such as diamond lap grain is suitable
's.The particle diameter of abrasive grains for example can be measured by resistance test method.
The particle diameter of the abrasive grains in the present invention is the meansigma methodss (median particle diameter (D50)) being recorded by this resistance test method.
It should be noted that the surface roughness of the end face after thick grinding is preferably less than 1 μm in terms of Ra.In addition,
Surface roughness after accurate grinding is preferably less than 0.1 μm in terms of Ra.
In addition, in the present invention, it ve configured as above in 1 like that, for accurate grinding is carried out to the end face of glass substrate
State grinding grinding stone to be characterised by, it comprises abrasive grains and the binding agent that this abrasive grains is bonded to each other, using Bo Shi pressure head
With 250mN press-in load condition by nano indentation test method the binding agent part on grinding grinding stone surface is recorded hard
Spend in the range of for 0.4GPa～1.7GPa.
With regard to by existing hardness evaluation using the hardness test getting over greatly formula testing machine or using Rockwell Hardness meter etc.
The hardness of grinding grinding stone that method is evaluated and using the actual grindability carrying out during substrate end-face grinding of this grinding grinding stone
Can between (grinding speed, grinding surface roughness, shape and size precision etc.) unconfirmed to clear and definite dependency relation the reasons why, this
A person of good sense speculates as follows.
Hardness test with regard to existing grinding grinding stone is it is believed that pressure head can break during sinking to grinding stone when measuring
Grinding stone tissue around bad, and the structural state due to compression to be evaluated and be mingled with the factor of density, thus measure
The comprehensive intensity of grinding stone structure is it is impossible to evaluate the hardness of the grinding performance for playing grinding stone exactly, change speech
The directly related holding abrasive grains of the grinding performance with grinding stone binding agent each other mechanical strength.
The present inventor speculates：Even if the composition of grinding grinding stone is identical, according to the intensity of its structure, particularly abrasive grains
The difference of the intensity and between the binding agent (binding agent) that abrasive grains are bonded to each other, in other words the holding intensity of abrasive grains, grinding
Performance can be different, and this is likely to the reason become end face quality deviation.Then, present inventors have recognized that the hardness of grinding stone, spy
It is not that abrasive grains are of crucial importance as the performance of grinding stone or processing characteristics with the bond strength of binding agent, based on this understanding, make
Grind abrasive grains under stone manufacture state and the holding intensity of the bonding state between binding agent, in other words abrasive grains for accurate evaluation
Method, nano indentation test method is studied.And find, measured by nano indentation test method under prescribed conditions
Hardness with using the actual grinding performance carrying out during substrate end-face grinding of this grinding grinding stone, (grinding speed, grinding surface are coarse
Degree, shape and size precision etc.) between confirm clear and definite dependency relation.Specifically it was found that：By using being pressed using Bo Shi
Head is recorded to the binding agent part on grinding grinding stone surface by nano indentation test method with the condition of the press-in load of 250mN
Hardness is the grinding grinding stone in the range of 0.4GPa～1.7GPa, particularly can give play to good in the accurate grinding of polishing
Grinding performance, as a result, can efficiently and high-quality ground polishing glass substrate for disc end face, volume production processing in also may be used
Obtain stable quality.
Then, the assay method of the hardness of the grinding grinding stone using nano indentation test method is illustrated.
For the binding agent part on the grinding grinding stone surface as measure object, using front end for rectangular pyramid shape glass
Family name's pressure head, applies load with 1 nm/sec, boosts to 250mN, is kept after stipulated time (such as 10 seconds) with this state, according to
During boosting, equal discharge rate is reduced pressure, and the relation of load now and displacement is shown in Fig. 5.If it should be noted that
For this boosting condition, then can evaluate the mechanical strength of binding agent exactly.
Herein, as an example, corresponding 3 characteristic curves of the grinding grinding stones different from 3 are shown.This curve illustrates
Dynamic stiffness characteristic, with existing as the hardness evaluation of static hardness characteristic compared with, it illustrates and make closer to actual
The characteristic of used time.
The characteristic result of dynamic stiffness according to this Fig. 5, is obtained by nano indentation test method by following formula
The hardness of grinding grinding stone.
H=F/Ac
Herein, H is the hardness of grinding grinding stone, and F is load, and Ac is pocket area.
Above-mentioned pocket area Ac is represented by following relational expressions.
Ac=f (hc) ∝ 24.5 hc2
Hc=hmax- ε F/S
Herein, hc：Compression distance, hmax：The depth of busy hour, hs：Compression distance when unloading starts, ho：Unload
Compression distance after load, ε：Intrinsic form factor (the example of pressure head：In the case of Bo Shi pressure head=0.75), S：Load and displacement
Proportionality coefficient, m：Slope (dF/dh).
For the grinding grinding stone of the present invention, the hardness that recorded by above-mentioned nano indentation test method be 0.4GPa～
In the range of 1.7GPa, in the range of more preferably 1.2GPa～1.6GPa.
In the processing of above-mentioned cross grinding, as shown in figure 1, rotary shaft and grinding stone 7 or the grinding stone according to glass substrate 1
The parallel configuration relation of 8 rotary shaft is processed.With regard to grinding stone 7, in arrow 19 direction (cut-out direction) and the glass of in figure
The outer circumference side edge face contact of glass substrate 1；With regard to grinding stone 8, in arrow 20 direction (cut-out direction) of in figure and glass substrate 1
Inner circumferential side end contact.
In the case of being somebody's turn to do, grinding stone 7 or grinding stone 8 and glass substrate 1 is preferably made to rotate one in prescribed direction respectively
While being processed, with regard to the respective peripheral speed of grinding stone 7 or grinding stone 8 and glass substrate 1, peripheral speed ratio, according to
The mode being suitable for the grinding of interior outer circumference side edge face suitably sets.In Fig. 1, make glass substrate 1 along arrow 10 direction
Rotation, makes grinding stone 7 rotate along arrow 17 direction, so that grinding stone 8 is rotated along arrow 18 direction, but direction of rotation is not limited to
This.Grinding stone 7 or grinding stone 8 can be equidirectional (reverse), different directions with the direction of rotation of glass substrate 1 in processing department
(in the same direction) any one.
From the aspect of grindability or working (machining) efficiency, the peripheral speed of the such as processing department of grinding stone 7 is suitably 800m/
Minute～1700m/ minute.In addition, the peripheral speed of the processing department of grinding stone 8 is suitably 200m/ minute～700m/ minute.Separately
Outward, the peripheral speed of the processing department of glass substrate 1 is suitably 3m/ minute～10m/ minute.
In addition, in grinding, thrust grinding resistance is suitably 2N/mm～40N/mm.Thrust grinding resistance is and adds
The relevant parameter of work pressure.It should be noted that thrust grinding resistance for example can be measured using grinding ergometer.
In addition, as the grinding fluid (coolant) being used, being not particularly limited, but cooling effect be high, in workshop
Safe water miscible grinding fluid is especially suitable.
In addition, Fig. 2 shows another embodiment of above-mentioned cross grinding processing method, (a) is axonometric chart, and (b) is
The front view different from the direction of (a).
End-face processing method shown in Fig. 2 is following methods：Make the rotary shaft of grinding stone with respect to above-mentioned glass base
In the state of the orthogonal axle of the first type surface of plate tilts, this grinding stone and the end face of above-mentioned glass substrate is made to abut, to this glass base
The end face of plate carries out grinding.This grinding processing method can improve the processing qualities such as surface roughness and form accuracy,
Thus be particularly suitable for for example carrying out the processing of the accurate grinding after thick grinding using molding grinding stone.It should be noted that
Also can be used in thick grinding.
For example in interior outer circumference side edge face, side wall be form respectively for the thick grinding by using molding grinding stone
Face and the glass substrate in fillet surface both faces, are processed to its outer circumference side edge face using grinding stone 2, right using grinding stone 3
Inner circumferential side end face is processed.Grinding stone 2 is formed as the discoid of given size as illustrated, its outer circumferential side with glass
The face of the end contact of substrate has flute profile.For example as shown in figure 3, this flute profile is to inner side depression when carrying out cross-section
Spill 6.Certainly, the shape shown in Fig. 3 is only one, is not limited to this.In addition, grinding stone 3 is formed as advising as illustrated
Sizing cylindric, in the face with the end contact of glass substrate, there is flute profile in its outer circumferential side (recessed for example shown in Fig. 3
Shape).
In the case of this processing method, according to the dissimilar side in the track of the grinding stone abutting with the end face of glass substrate
Formula makes the end face of glass substrate contact with grinding stone, is processed.In this processing method, overall to end face (in this case, is side
Wall and this 3 faces of 2 adjacent around fillet surfaces) carry out grinding simultaneously.
For example, as shown in Fig. 2 grinding stone 2 with regard to being processed to substrate outer circumferential side, in the plane side making grinding stone 2
It is processed in the state of the only tilt angle alpha of the in-plane with respect to glass substrate 1.In addition, with regard to substrate inner circumferential side
The grinding stone 3 being processed, makes the in-plane of grinding stone 3 with respect to the in-plane only inclination angle beta of glass substrate 1
State, in other words make the rotary shaft of grinding stone 3 as spin finishing stone with respect to the side orthogonal with the first type surface of glass substrate
It is processed in the state of tilt.With regard to grinding stone 2, in arrow 13 direction (cut-out direction) of in figure and glass substrate 1
Outer circumference side edge face contacts, with regard to grinding stone 3, in the inner circumferential side in arrow 14 direction (cut-out direction) of in figure and glass substrate 1
Face contacts.In the case of being somebody's turn to do, it is also preferred that making grinding stone 2 or grinding stone 3 and glass substrate 1 rotate one in prescribed direction respectively
While being processed, with regard to respective peripheral speed, peripheral speed ratio, the mode according to the processing being suitable for interior outer circumference side edge face is fitted
When setting.In addition, in Fig. 2, making glass substrate 1 rotate along arrow 10 direction, grinding stone 2 is made to rotate along arrow 11 direction,
So that grinding stone 3 is rotated in arrow 12 direction, but direction of rotation is not limited to this.Grinding stone 2 or grinding stone 3 and glass substrate 1
Direction of rotation can for equidirectional (reverse), different directions (in the same direction) any one.
From the aspect of grindability or working (machining) efficiency, the peripheral speed of the such as processing department of grinding stone 2 is suitably
1200m/ minute～1700m/ minute.In addition, the peripheral speed of the processing department of grinding stone 3 is suitably 300m/ minute～700m/ dividing
Clock.In addition, the peripheral speed in the processing department of glass substrate 1 is suitably 3m/ minute～10m/ minute.In addition, in grinding
When, thrust grinding resistance is suitably 2N/mm～40N/mm.
In processing method shown in Fig. 2, according to the grinding stone 2 abutting with the end face of glass substrate 1 track not necessarily
Mode, the protuberance (abrasive grains) of grinding stone 2 abuts, acts on substrate end-face in random position, thus the infringement to substrate
Few, in the surface roughness in grinding face or its face, deviation also reduces, and can further smoothly polish grinding face.
Accordingly, as in this processing method making grinding stone carry out accurate grinding with respect to glass substrate in the state of tilting
Used in above-mentioned grinding stone 2 and grinding stone 3, be suitably suitable for the grinding grinding stone of the invention described above.
In addition, Fig. 7 shows the other embodiment of above-mentioned cross grinding processing method, (a) be axonometric chart, (b) be with
The different front view in the direction of (a).
With regard to the processing method of the inner circumferential side end face of glass substrate, identical with the embodiment shown in above-mentioned Fig. 2, but close
Following methods can also be suitable in outer circumference side edge face：As shown in fig. 7, using the cylinder being formed as the size that can include glass substrate
The grinding stone 5 of shape is processed.In the inner circumferential side of grinding stone 5, in the face of the end contact with glass substrate, there is flute profile.This groove
Shape for example defines the spill 6 shown in above-mentioned Fig. 3.
In present embodiment, following methods are also suitable：Rail according to the grinding stone 5 abutting with the end face of glass substrate 1
The dissimilar mode of mark, makes the shape with respect to the in-plane only tilt angle alpha of glass substrate 1 for the in-plane of grinding stone 5
Under state, the outer circumference side edge face of glass substrate 1 is made to be processed with the inner circumferential side contacts of grinding stone 5.Shown in Fig. 7
In processing method, according to the dissimilar mode in track of the grinding stone 5 abutting with the peripheral end face of glass substrate 1, grinding stone 5
Protuberance (abrasive grains) abuts, acts on substrate end-face in random position, thus the infringement to substrate is few, the table in grinding face
In surface roughness or its face, deviation also reduces, and can further smoothly polish grinding face.Accordingly, as shown in this Fig. 7
Processing method used in above-mentioned grinding stone 5, be suitably suitable for the grinding grinding stone of the invention described above.
It should be noted that as type of glass used in glass substrate for disc, being not particularly limited, as glass
The material of substrate, for example, can enumerate alumina silicate glass, soda-lime glass, sodium aluminum silicate glass, aluminium borosilicate glass, boron
Glass ceramics such as silicate glass, quartz glass, chain silicate glass or sintered glass ceramics etc..Wherein, unbodied aluminum silicon
Silicate glass is excellent and particularly preferred because of flatness, resistance to impact, vibration resistance.
In addition, the present invention also provides the invention of the preferably following embodiments related to above-mentioned embodiment.
That is, for the binding agent on the grinding grinding stone surface comprising abrasive grains and the binding agent that this abrasive grains is bonded to each other
Part, obtain in advance using Bo Shi pressure head with 250mN press-in load condition recorded by nano indentation test method hardness,
To the related pass that under certain conditions glass substrate end face is carried out with grinding speed during ground using this grinding grinding stone
System.And, the dependency relation obtained based on this selects the grinding grinding stone with the hardness reaching desired grinding speed.
Then, carry out ground, wherein, the grinding grinding stone using this selection carries out accurate grinding to the end face of glass substrate.
As described above, present inventors have recognized that the bond strength of the hardness of grinding stone, particularly abrasive grains and binding agent is made
Of crucial importance for the performance or processing characteristics of grinding stone, based on this understanding it was found that being tried by nano impress under prescribed conditions
The hardness that the method for testing records and the actual grinding carrying out during substrate end-face grinding under certain search condition using this grinding grinding stone
Clear and definite dependency relation is confirmed between performance (grinding speed, grinding surface roughness, shape and size precision etc.).Specifically,
It is found that：Obtain in advance and by nano indentation test method, grinding is ground with the condition of the press-in load of 250mN using Bo Shi pressure head
The hardness that the binding agent part of grinding face records is entered to glass substrate end face under prescribed conditions with using this grinding grinding stone
The dependency relation of grinding speed during row ground.And, the dependency relation obtained based on this is selected to have and reaches institute's phase
The grinding grinding stone of the hardness of grinding speed hoped, the grinding grinding stone using this selection grinds to the end face of glass substrate
Cut, thus particularly good grinding performance can have been given play in the accurate grinding of polishing, as a result, can efficiently and high-quality
The end face of ground polishing glass substrate for disc, also can obtain stable quality in volume production processing.
It should be noted that the assay method of the hardness with regard to the grinding grinding stone using nano indentation test method, as above
Described, thus omit the description herein.
With regard to multiple grinding grinding stones, by the hardness of the grinding grinding stone being recorded by above-mentioned nano indentation test method and profit
With this grinding grinding stone, under prescribed conditions glass substrate end face is carried out with the dependency relation of grinding speed during ground
One is illustrated in Fig. 6.It should be noted that Fig. 6 shows the result in aftermentioned embodiment, details is said in an embodiment
Bright.
Based on the dependency relation shown in this Fig. 6, it is up to desired grinding speed, the such as A of 0.5 μm/more than sec
Scope is as optimum range.And, select the grinding grinding stone with the hardness in the optimum range of this A, using this selection
Grinding grinding stone carries out accurate grinding to the end face of glass substrate, such that it is able to give play to good grinding performance.
On the other hand, the grinding in the region of the low B of grinding stone hardness compared with above-mentioned optimum range is being selected to grind
In the case of stone, the holding low intensity of abrasive grains, work in-process promotes coming off of abrasive grains, forms abrasive grains and bursts state,
Desired grinding speed therefore cannot be obtained, relaxation of shapes occurs, end face quality is also deteriorated.
In addition, selecting the grinding grinding stone in the region of the high C of grinding stone hardness compared with above-mentioned optimum range
In the case of, the holding intensity of abrasive grains is excessive, and the sharping by oneself affect that grinding abscission leads to cannot be carried out it may occur that grindstone dust is piled up
The dulling leading in the blocking on grinding stone surface or the obliterated of abrasive grains, thus desired mill cannot be obtained
Cut speed, machined surface also can occur quality deterioration because of friction burn.
The inventors discovered that：For example in the case of the resinoid bond grinding stone that binding agent is made up of resin material, lead to
Cross in the range of hardness preferably 0.4GPa～1.7GPa that above-mentioned nano indentation test method records, particularly in the precision of polishing
Can get the grinding speed of desired such as 1.0 μm/more than sec in grinding, good grinding performance can have been given play to, in amount
Produce in processing and also can obtain stable quality.In the case of resinoid bond grinding stone, above-mentioned hardness is particularly preferably
In the range of 1.2GPa～1.6GPa.
Carry out accurate mill as the grinding stone that makes shown in above-mentioned Fig. 2 or Fig. 7 with respect in the state of glass substrate inclination
Above-mentioned grinding stone 2 and grinding stone 3 used in the processing method cut, preferably applicable being based on are recorded by above-mentioned nano indentation test method
The hardness of grinding grinding stone with prescribed conditions ground is carried out to glass substrate end face using this grinding grinding stone when
Grinding speed dependency relation selected grinding grinding stone.
As described previously for the glass substrate of the outer circumferential side finishing substrate and the grinding of inner circumferential side end face, pass through
Scratch brushing grinding etc. carries out end surface grinding, and end face is processed into minute surface.Then, mirror ultrafinish operation, the chemistry of implementing first type surface are strong
Chemical industry sequence etc., thus obtain the glass substrate for disc 1 shown in Fig. 4.
In addition, the present invention also provides a kind of manufacture method of disk, wherein, in the disk glass by the invention described above
Magnetosphere is at least formed on the first type surface of the glass substrate for disc manufactured by the manufacture method of substrate.
That is, magnetic is for example at least formed on the glass substrate for disc obtaining by the embodiment of the invention described above
Layer, thus obtain disk.Generally, it is preferred to formed for example be provided with adhesive layer, soft ferromagnetic layer, bottom, magnetic on the glass substrate
The disk of layer, protective layer, lubricating layer etc..
For example as magnetosphere, the hcp crystal structure for example with Co system can be enumerated as perpendicular magnetic recording medium use
Alloy etc..
In addition, as protective layer, such as carbon system protective layer etc. preferably can be enumerated.In addition, as on formation protective layer
The lubricant of lubricating layer, can enumerate PFPE (PFPE) based compound.
With regard on the glass substrate by the method for above layers film forming, it is possible to use known sputtering method etc..With regard to carbon system
The film forming of protective layer, further preferably using plasma CVD method.In addition, infusion process etc. can be used in the film forming of lubricating layer.
To make by using the glass substrate for disc manufactured by the manufacture method by the glass substrate for disc of the present invention
Make disk, the end face of substrate can be polished it is provided that a kind of disk with high-quality, it is prevented from the surface shape of substrate end-face
The generation of the obstacle that state or form accuracy cause, is capable of further high record density.
Embodiment
Below, enumerate embodiment to further illustrate embodiments of the present invention.It should be noted that the present invention does not limit
Due to below example.
(embodiment 1～7, comparative example 1～3)
First, obtain a diameter of 66mm φ's by using the direct molding of upper die and lower die, cylindrical mould by melten glass
The discoid glass substrate (glass plate) being made up of amorphous aluminosilicate glass.
Next, carrying out to glass substrate polishing operation, to improve dimensional accuracy and form accuracy.This polishing operation utilizes
Double-sided burnishing device is carried out.
Then, bored a hole in the middle body of glass substrate using cylindric grinding stone, and by using above-mentioned Fig. 1 institute
The processing method of the molding grinding stone showing carries out the thick grinding of inner circumferential side end face, then, makes grinding stone shown in above-mentioned Fig. 2
The method contacting in the state of tilting with respect to glass substrate and processing to carry out accurate grinding processing.
Above-mentioned thick grinding employs by the electro-deposition of diamond lap grain electro-deposition bonding agent bonding
Bonding agent grinding stone.In addition, the diamond lap grain the use of mean diameter (D50) being 5 μm in the processing of above-mentioned accurate grinding, make
The resinoid bond grinding stone being phenolic resin with the binding agent that this abrasive grains is bonded to each other.This resinoid bond grinding stone is accurate
Standby constituent material is identical but grinding stone that hardness is different.Grinding stone hardness is measured by above-mentioned nano indentation test method.
Above-mentioned thick grinding to be carried out according to the configuration relation of the glass substrate shown in above-mentioned Fig. 1 and grinding stone, above-mentioned
Accurate grinding processing to be carried out according to the configuration relation of the glass substrate shown in above-mentioned Fig. 2 and grinding stone, and grinding stone is with respect to glass
The slope angle [alpha] of glass substrate is set as 10 degree.In addition, with regard to the respective peripheral speed of glass substrate and grinding stone, rotation side
To, tonnage, suitably set and carry out.
The grinding of the inner circumferential side end face of 100 pieces of glass substrates executed as described above.
For 100 pieces of obtained glass substrates, in order to confirm the side wall of inner circumferential side end face and the shape of fillet surface
Dimensional accuracy, is determined the corner A that side wall and fillet surface formed and first type surface and is fallen using fine contour shape determinator
The radius of curvature of the corner B (with reference to Fig. 4) that edged surface is formed.With regard to radius of curvature, to each 1 point of every 1 piece of basal lamina determination the exterior and the interior, total
2 points of radius of curvature, is averaged value as the measured value of this substrate.This operation is repeated to 100 pieces of substrates, calculates partially
Difference (difference of maxima and minima).With regard to as a result, carrying out the relative evaluation in following 4 stages, being shown in table 1.If ◎,
0th, △, then actually used is above qualified.
◎：Excellent (deviation is below 0.015mm)
○：Well (deviation is below 0.025mm)
△：Substantially qualified (deviation is below 0.045mm)
×：Unqualified (deviation is more than 0.045mm)
In addition, calculate the surface roughness Ra of fillet surface according to the measured value being obtained by laser microscope, by its result
It is also depicted in table 1.
In addition, grinding speed during above-mentioned accurate grinding is also depicted in table 1.
[table 1]
From the result of above-mentioned table 1, if using the hardness being recorded by nano indentation test method be 0.4GPa～
The grinding grinding stone of the embodiment 1～7 in the range of 1.7GPa carries out the accurate grinding of substrate inner circumferential side end face, then thick in end face
Rugosity, end shape dimensional accuracy aspect have obtained good result.It should be noted that grinding speed is also good.
On the other hand, if be less than the grinding of the comparative example 1 of 0.4GPa using the hardness recording by nano indentation test method
Grinding stone, then end face quality and grinding speed these two aspects do not obtain good result.I.e. it is believed that：In the too low region of hardness
The holding low intensity of middle abrasive grains, work in-process promotes coming off of abrasive grains to form abrasive grains and burst state, therefore cannot obtain
Obtain grinding speed, for the state occurring relaxation of shapes, end face quality to be also deteriorated.
If in addition, the grinding being more than the comparative example 2,3 of 1.7GPa using the hardness being recorded by nano indentation test method is ground
Grinding stone, then the holding intensity of abrasive grains is excessive, and the sharping by oneself affect that grinding abscission leads to cannot be carried out it may occur that grindstone dust is piled up
The dulling leading in the blocking on grinding stone surface or the obliterated of abrasive grains, thus grinding speed cannot be obtained,
There is the state of quality deterioration for machined surface because of friction burn.
In addition, be can confirm that by above result：At the aspect of the grinding performance evaluating grinding grinding stone, will be by nanometer
The hardness that indentation test method records is optimal as index.
(embodiment 8～13)
Prepare diamond abrasive grains and the bonding that diamond lap grain is bonded to each other in the processing of above-mentioned accurate grinding
Agent is the resinoid bond grinding stone of phenolic resin, and this grinding stone is 1.3GPa by the hardness that nano indentation test method records,
Mean diameter is different and has 6 kinds, in the range of 1.5 μm～25 μm.
Using above-mentioned grinding stone, carry out the grinding of the inner circumferential side end face of glass substrate in addition similarly to Example 1
Processing, carries out evaluation same as Example 1 for obtained glass substrate, the results are shown in table 2.
[table 2]
From the result of above-mentioned table 2, even hardness identical grinding stone, if the mean diameter of abrasive grains be 2 μm～
In the range of 15 μm, then also can get especially good result in terms of surface roughness and end shape dimensional accuracy, because
And it is favourable.It should be noted that in the case that mean diameter is 1.5 μm, grinding shape vestige is slightly observed on surface.
In addition, carried out the accurate grinding processing of external diameter end, knot using the grinding stone with embodiment 8～13 same size
Really regardless of whether making glass substrate tilt and circumscribed-type processing (with reference to Fig. 1, Fig. 2), endo-type processing (reference Fig. 7), if with
Table 2 similarly abrasive grains mean diameter be 2 μm～15 μm in the range of, then surface roughness and end shape dimensional accuracy
Aspect has obtained especially good result.
(embodiment 101～103, comparative example 101,102)
First, in the same manner as above-described embodiment, by using upper die and lower die, cylindrical mould direct molding by melting glass
Glass obtains the discoid glass substrate (glass plate) being made up of alumina silicate glass of a diameter of 66mm φ.Next, to glass
Glass substrate carries out polishing operation, to improve dimensional accuracy and form accuracy.
Then, bored a hole in the middle body of glass substrate using cylindric grinding stone, and by using above-mentioned Fig. 1 institute
The processing method of the molding grinding stone showing carries out the thick grinding of end face, then, shown in above-mentioned Fig. 2 make grinding stone with respect to
Glass substrate tilt in the state of contact and the method processed carrying out accurate grinding processing.
Above-mentioned thick grinding employs by the electro-deposition of diamond lap grain electro-deposition bonding agent bonding
Bonding agent grinding stone.In addition, employing, in the processing of above-mentioned accurate grinding, the diamond lap comprising that average abrasive particle diameter is 5 μm
Grain and the resinoid bond grinding stone of the phenolic resin as binding agent.This resinoid bond grinding stone has prepared constituent material
10 kinds of different grinding stones of identical but hardness of binding agent part.The hardness of the binding agent part of grinding stone is by above-mentioned nanometer
Indentation test method is measured.
In addition, before main processing, in advance using 10 kinds of above-mentioned accurate grinding under conditions of same with main processing
Resinoid bond grinding stone carries out the cross grinding processing of glass substrate, obtains by grinding that above-mentioned nano indentation test method records
Grinding stone hardness and the dependency relation of grinding speed, are shown in Fig. 6.In Fig. 6, the scope of the A that grinding speed is 0.5 μm/more than sec
As optimum range, select 3 kinds of grinding grinding stones with the hardness in the optimum range of this A, additionally, select a kind with optimal
In the range of compare grinding grinding stone in the region of the low B of grinding stone hardness, select a kind compared with optimum range grinding stone hard
Spend the grinding grinding stone in the high region of C.It should be noted that above-mentioned optimum range is 0.4GPa～1.7GPa.
Then, respectively using such whole 5 kinds of grinding grinding stones selecting, carry out main processing.Above-mentioned thick grinding is pressed
Configuration relation according to the glass substrate shown in above-mentioned Fig. 1 and grinding stone is carried out, and above-mentioned accurate grinding is processed according to shown in above-mentioned Fig. 2
Glass substrate carry out with the configuration relation of grinding stone, grinding stone is set as 10 degree with respect to the slope angle [alpha] of glass substrate.Separately
Outward, with regard to the respective peripheral speed of glass substrate and grinding stone, direction of rotation, tonnage, suitably set and carry out.
The cross grinding processing of glass substrate executed as described above, has made 100 pieces of glass substrates.
For 100 pieces of obtained glass substrates, carry out side wall and the fillet surface of end face in the same manner as above-described embodiment
Shape and size precision evaluation, the results are shown in table 3.In addition, the surface roughness Ra with regard to fillet surface and grinding
Speed, also shows the result in table 3.
[table 3]
From the result of above-mentioned table 3, if the dependency relation based on Fig. 6 is using the grinding grinding stone selecting from optimum range
Carry out the accurate grinding (embodiment 101～103) of substrate end-face, then obtain good grinding speed.In addition, it is coarse in end face
Degree, end shape dimensional accuracy aspect have also obtained good result.
On the other hand, if using from the low regioselective grinding grinding stone (comparative example of hardness compared with optimum range
101), then do not obtain good result in terms of grinding speed.In addition, in surface roughness, end shape dimensional accuracy side
Face does not obtain good result yet.I.e. it is believed that：The holding low intensity of abrasive grains in the low region of hardness, work in-process promotes
Coming off of abrasive grains and form abrasive grains and burst state, therefore cannot obtain grinding speed, for there is relaxation of shapes, end face quality
Also the state being deteriorated.
In addition, employing from the high regioselective grinding grinding stone (comparative example 102) of hardness compared with optimum range, tie
Fruit does not obtain good grinding speed.In addition, surface roughness, end shape dimensional accuracy aspect do not obtain good knot yet
Really.In this case it is believed that：The holding intensity of abrasive grains is excessive, and the sharping by oneself affect that grinding abscission leads to cannot be carried out, and can send out
Raw grindstone dust is piled up in the dulling that the blocking on grinding stone surface or the obliterated of abrasive grains lead to, thus cannot obtain
Obtain grinding speed, be that machined surface also occurs the state of quality deterioration because of friction burn.
Be can confirm that by above result：At the aspect of the grinding performance evaluating grinding grinding stone, obtain in advance by receiving
The rice hardness that records of indentation test method with certain conditions glass substrate end face is carried out at grinding using this grinding grinding stone
The dependency relation of grinding speed during reason, selects grinding grinding stone to be optimal based on calculated dependency relation.
(embodiment 201～212, comparative example 201～208)
In the same manner as above-described embodiment, the direct molding by using upper die and lower die, cylindrical mould is obtained by melten glass
The discoid glass substrate (glass plate) being made up of alumina silicate glass of a diameter of 66mm φ.Next, to glass substrate
Carry out polishing operation, to improve dimensional accuracy and form accuracy.
Then, bored a hole in the middle body of glass substrate using cylindric grinding stone, and by using above-mentioned Fig. 1 institute
The processing method of the molding grinding stone showing carries out the thick grinding of peripheral end face, then, carries out essence by the method for following explanation
Close grinding.
Above-mentioned thick grinding employs by the electro-deposition of diamond lap grain electro-deposition bonding agent bonding
Bonding agent grinding stone.In addition, employing, in the processing of above-mentioned accurate grinding, the diamond lap comprising that average abrasive particle diameter is 5 μm
Grain and the resinoid bond grinding stone of the phenolic resin as binding agent.This resinoid bond grinding stone has prepared constituent material
5 kinds of different grinding stones of identical but hardness of binding agent part.The hardness of the binding agent part of grinding stone is pressed by above-mentioned nanometer
Trace test method(s) is measured.
And, respectively using this 5 kinds of grinding grinding stones, carry out the accurate grinding processing of the peripheral end face of substrate.Accurate mill
The method cutting processing is following 4 kinds.
1st method carries out (being designated as " circumscribed in table 4 according to the configuration relation of the glass substrate shown in above-mentioned Fig. 1 and grinding stone
(Fig. 1) ")
2nd method is carried out according to the configuration relation of the glass substrate shown in above-mentioned Fig. 7 and grinding stone, and grinding stone is with respect to glass
The slope angle of glass substrate is 0 degree (no tilting) (being designated as " inscribe " in table 4).
3rd method is carried out according to the configuration relation of the glass substrate shown in above-mentioned Fig. 2 and grinding stone, and grinding stone is with respect to glass
The slope angle [alpha] of glass substrate is set as 10 degree (being designated as " circumscribed inclination (Fig. 2) " in table 4).
4th method is carried out according to the configuration relation of the glass substrate shown in above-mentioned Fig. 7 and grinding stone, and grinding stone is with respect to glass
The slope angle [alpha] of glass substrate is set as 10 degree (being designated as " inscribe tilts (Fig. 7) " in table 4).
It should be noted that with regard to the respective peripheral speed of glass substrate and grinding stone, direction of rotation, tonnage,
Suitably set and carry out.
As described above, by above-mentioned 5 kinds of grinding grinding stones and above-mentioned 4 kinds of processing methods combination, carrying out the peripheral end face of substrate
Accurate grinding processing, each produce 100 pieces of glass substrates.
For 100 pieces of obtained glass substrates, carry out the side wall of peripheral end face in the same manner as above-described embodiment and fall
The evaluation of the shape and size precision of edged surface, the results are shown in table 4.In addition, surface roughness Ra with regard to fillet surface and
Grinding speed, also the results are shown in table 4.
[table 4]
Result from above-mentioned table 4：If using the hardness being recorded by nano indentation test method be 0.4GPa～
Grinding grinding stone in the range of 1.7GPa carries out the accurate grinding of substrate peripheral end face, no matter end face in which kind of processing method
Roughness, end shape dimensional accuracy have all obtained good result.It should be noted that grinding speed is also good.
If particularly mentioning surface roughness, with the configuration relation of the glass substrate shown in above-mentioned Fig. 1 and grinding stone (outward
Cut) compare, when the configuration relation (inscribe but no tilt) according to the glass substrate shown in above-mentioned Fig. 7 and grinding stone is processed
Obtain preferred result.In addition, as above-mentioned Fig. 2 or Fig. 7, making grinding stone tilt with respect to glass substrate and carry out adding
Man-hour has obtained preferred result.
On the other hand, if being less than 0.4GPa or the mill more than 1.7GPa using the hardness recording by nano indentation test method
Cut grinding stone, no matter be suitable for any processing method, end face quality and grinding speed these two aspects all do not obtain good result.
Symbol description
1 glass substrate for disc
2,7 outer circumference side edge face grinding grinding stones
3,8 inner circumferential side cross grinding grinding stones
6 grooves
The first type surface of 1a glass substrate
1b side wall
1c fillet surface
Claims (10)
1. a kind of grinding grinding stone, it is that the end face of the discoid glass substrate for having circular hole to center carries out grinding
Grinding grinding stone it is characterised in that
Described grinding grinding stone comprises abrasive grains and the binding agent that this abrasive grains is bonded to each other,
Using Bo Shi pressure head, nano indentation test method is passed through to described grinding grinding stone surface with the condition of the press-in load of 250mN
Binding agent part be measured, obtained hardness is in the range of 0.4GPa～1.7GPa.
2. grinding grinding stone as claimed in claim 1 is it is characterised in that the mean diameter of described abrasive grains is 2 μm～15 μm
In the range of.
3. grinding grinding stone as claimed in claim 1 or 2 is it is characterised in that described grinding grinding stone is in the following cases
The spin finishing stone using：Tilt with respect to the axle orthogonal with the first type surface of described glass substrate in the rotary shaft making grinding stone
Under state, so that this grinding stone and the end face of described glass substrate is abutted, ground is carried out to the end face of this glass substrate.
4. a kind of manufacture method of glass substrate for disc requires any one of 1～3 institute it is characterised in that including usage right
The grinding grinding stone stated carries out the operation of the ground of the end face of described glass substrate.
5. the manufacture method of glass substrate for disc as claimed in claim 4 is it is characterised in that according to described glass substrate
The mode that the surface roughness Ra of end face reaches less than 0.1 μm carries out ground.
6. a kind of manufacture method of glass substrate for disc, it is the manufacture of the glass substrate for disc including following ground
Method, this ground is that the end face of the discoid glass substrate having circular hole to center using grinding grinding stone grinds
Cut, the manufacture method of described glass substrate for disc is characterised by,
Described grinding grinding stone comprises abrasive grains and the binding agent that this abrasive grains is bonded to each other,
Obtain in advance and by nano indentation test method, described grinding is ground with the condition of the press-in load of 250mN using Bo Shi pressure head
Hardness that the binding agent part of grinding face records and when ground being carried out to glass substrate end face using this grinding grinding stone
Grinding speed dependency relation,
Select the grinding grinding stone with the hardness reaching desired grinding speed based on calculated dependency relation, use
The grinding grinding stone of this selection carries out described ground.
7. the manufacture method of glass substrate for disc as claimed in claim 6 is it is characterised in that the institute of described grinding grinding stone
State binding agent to be made up of resin material, the scope being 0.4GPa～1.7GPa by the hardness that described nano indentation test method records
Interior.
8. the manufacture method of glass substrate for disc as claimed in claims 6 or 7 is it is characterised in that use described selected
Grinding grinding stone, tilt with respect to the axle orthogonal with the first type surface of described glass substrate making the rotary shaft of this grinding grinding stone
In the state of, so that this grinding grinding stone is abutted with the end face of described glass substrate, the end face of this glass substrate is carried out at grinding
Reason.
9. the manufacture method of glass substrate for disc as claimed in claims 6 or 7 is it is characterised in that according to described glass base
The mode that the surface roughness Ra of the end face of plate reaches less than 0.1 μm carries out ground.
10. a kind of manufacture method of disk is it is characterised in that by the disk glass any one of claim 4～8
Magnetosphere is at least formed on the first type surface of the glass substrate for disc manufactured by the manufacture method of glass substrate.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013096076 | 2013-04-30 | ||
| JP2013-096076 | 2013-04-30 | ||
| JP2013-096077 | 2013-04-30 | ||
| JP2013096077 | 2013-04-30 | ||
| PCT/JP2014/062030 WO2014178416A1 (en) | 2013-04-30 | 2014-04-30 | Grinding stone, method for manufacturing glass substrate for magnetic disc, and magnetic disc manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105142861A CN105142861A (en) | 2015-12-09 |
| CN105142861B true CN105142861B (en) | 2017-03-08 |
Family
ID=51843540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480023650.6A Active CN105142861B (en) | 2013-04-30 | 2014-04-30 | The manufacture method of grinding grinding stone, the manufacture method of glass substrate for disc and disk |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5994022B2 (en) |
| CN (1) | CN105142861B (en) |
| MY (1) | MY168094A (en) |
| SG (1) | SG11201508850YA (en) |
| WO (1) | WO2014178416A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107004431B (en) * | 2014-12-31 | 2019-09-13 | Hoya株式会社 | The manufacturing method and grinding grinding stone of substrate for magnetic disc |
| CN113924276B (en) * | 2019-06-28 | 2024-10-01 | Hoya株式会社 | Method for manufacturing glass plate and method for manufacturing magnetic disk |
| CN110722463A (en) * | 2019-09-09 | 2020-01-24 | 珠海粤清特环保科技有限公司 | Mirror finishing tool |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06254767A (en) * | 1993-03-03 | 1994-09-13 | Asahi Glass Co Ltd | Grinding wheel for grinding glass |
| US5385591A (en) * | 1993-09-29 | 1995-01-31 | Norton Company | Metal bond and metal bonded abrasive articles |
| US6375692B1 (en) * | 1999-07-29 | 2002-04-23 | Saint-Gobain Abrasives Technology Company | Method for making microabrasive tools |
| JP2001138244A (en) * | 1999-08-17 | 2001-05-22 | Mitsubishi Materials Corp | Resin bond type grinding wheel |
| US6641627B2 (en) * | 2001-05-22 | 2003-11-04 | 3M Innovative Properties Company | Abrasive articles |
| JP2004322231A (en) * | 2003-04-22 | 2004-11-18 | Read Co Ltd | Grinding wheel |
| WO2008007547A1 (en) * | 2006-07-13 | 2008-01-17 | Konica Minolta Opto, Inc. | Method for manufacturing glass substrate, method for manufacturing magnetic disk, and magnetic disk |
| US8431102B2 (en) * | 2008-04-16 | 2013-04-30 | The Regents Of The University Of California | Rhenium boride compounds and uses thereof |
| JP2010234597A (en) * | 2009-03-31 | 2010-10-21 | Mitsubishi Materials Corp | Cutting blade, method for manufacturing cutting blade, and cutting apparatus |
| JP5206591B2 (en) * | 2009-06-01 | 2013-06-12 | 新日鐵住金株式会社 | Tundish for continuous casting |
| CN102814747B (en) * | 2012-07-31 | 2015-09-30 | 安徽威铭耐磨材料有限公司 | A kind of CBN resin wheel and preparation method thereof |
-
2014
- 2014-04-30 WO PCT/JP2014/062030 patent/WO2014178416A1/en active Application Filing
- 2014-04-30 MY MYPI2015703764A patent/MY168094A/en unknown
- 2014-04-30 SG SG11201508850YA patent/SG11201508850YA/en unknown
- 2014-04-30 JP JP2015514871A patent/JP5994022B2/en active Active
- 2014-04-30 CN CN201480023650.6A patent/CN105142861B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| SG11201508850YA (en) | 2015-11-27 |
| WO2014178416A1 (en) | 2014-11-06 |
| JP5994022B2 (en) | 2016-09-21 |
| JPWO2014178416A1 (en) | 2017-02-23 |
| CN105142861A (en) | 2015-12-09 |
| MY168094A (en) | 2018-10-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104823239B (en) | Glass substrate for disc and disk | |
| CN105009212B (en) | Glass substrate for disc and disk | |
| US6166885A (en) | Magnetic recording medium and method for producing the same | |
| CN105142861B (en) | The manufacture method of grinding grinding stone, the manufacture method of glass substrate for disc and disk | |
| JP6645935B2 (en) | Substrate manufacturing method, substrate end surface processing apparatus, substrate end surface processing method, and grinding wheel | |
| JP6156967B2 (en) | Glass substrate manufacturing method, magnetic disk manufacturing method, and glass substrate end surface polishing apparatus | |
| JP2001191247A (en) | Both surface grinding method of disc-like substrate, manufacturing method of substrate for information recording medium and manufacturing method of information recording medium | |
| JP2010005772A (en) | Method of processing glass substrate for magnetic disk, method of manufacturing glass substrate for magnetic disk, glass substrate for magnetic disk, and method of manufacturing magnetic disk | |
| CN104170013A (en) | Manufacturing method for glass substrate for information recording medium, and information recording medium | |
| CN108564970B (en) | Method for manufacturing glass substrate, and method for manufacturing glass substrate for magnetic disk | |
| JP5177328B2 (en) | Method for manufacturing glass substrate for magnetic information recording medium | |
| JP6307407B2 (en) | Manufacturing method of glass substrate | |
| JP5639215B2 (en) | Glass substrate for magnetic disk, method for manufacturing glass substrate for magnetic disk, and method for manufacturing magnetic disk | |
| JP6104668B2 (en) | Method for manufacturing glass substrate for information recording medium and carrier | |
| JP5071603B2 (en) | Method for manufacturing glass substrate for magnetic information recording medium | |
| JP6138114B2 (en) | Method for manufacturing glass substrate for information recording medium, method for manufacturing magnetic disk, and carrier for polishing | |
| JP5492276B2 (en) | Glass substrate for magnetic disk and magnetic disk | |
| JP2014216042A (en) | Method of manufacturing glass substrate for magnetic disk, and magnetic disk manufacturing method | |
| CN109285565B (en) | Method for manufacturing glass substrate for magnetic disk and method for manufacturing magnetic disk | |
| CN104584128B (en) | The manufacture method of glass substrate for information recording medium | |
| JP2019079582A (en) | Manufacturing method of aluminum alloy substrate for magnetic recording medium | |
| CN104812529A (en) | Manufacturing method of glass substrate for use in information recording medium | |
| JP2010179395A (en) | Manufacturing method for glass substrate | |
| JPH0997427A (en) | Production of magnetic recording medium | |
| JP2014199704A (en) | Manufacturing method of glass substrate for magnetic disk and manufacturing method of magnetic disk |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |