CN105140348B - 多晶太阳能电池背部钝化工艺 - Google Patents
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Abstract
本发明涉及太阳能电池生产领域，具体是一种多晶太阳能电池背部钝化工艺。顺序进行酸制绒、硼扩散、背部钝化、刻蚀、第一次去PSG、磷扩散、激光刻槽、第二次去PSG、正面钝化、丝网印刷，在酸制绒过程使用添加剂，硼扩散过程，N2流量20slm，激光刻槽中开槽宽度为1.9毫米，采用双线200kHz的激光频率,5 m/s的传送速度,32A电流,进行激光刻槽，刻蚀需要手动装卸片，电池正面向下，开启水膜，HF酸浓度为7%，滚轮速度为1m/min，刻蚀深度1.0‑1.2um。本发明高效多晶效率可提升0.6%以上，达到预期目的，组件封装损耗为0.5%左右，符合损耗要求。
Description
技术领域
本发明涉及太阳能电池生产领域，具体是一种多晶太阳能电池背部钝化工艺。
背景技术
目前多晶酸制绒正常工艺没有使用添加剂，造成多晶制绒面的均匀性差，亮片、黑丝等问题，工艺过程不合理，降低硅片了反射率。
发明内容
本发明所要解决的技术问题是：如何提高多晶制绒面的均匀性，减少亮片、黑丝等问题，提高硅片反射率，进而提高多晶太阳能电池的效率。
本发明所采用的技术方案是：多晶太阳能电池背部钝化工艺，顺序进行酸制绒、硼扩散、背部钝化、刻蚀、第一次去PSG、磷扩散、激光刻槽、第二次去PSG、正面钝化、丝网印刷，在酸制绒过程使用添加剂，添加剂中含：聚乙二醇10-20克/升，异丙醇20-50克/升，碳酸钠0-2克/升，氢氧化钠0-1克/升，柠檬酸钠0-1克/升，果糖钠0-1克/升，纤维素0-3克/升，亚硫酸钠10-20克/升，乳酸钠5-10克/升，木质素磺酸盐0-3克/升，余量为水，其中碳酸钠、氢氧化钠、柠檬酸钠、果糖钠浓度之和为1-3克/升，纤维素与木质素磺酸盐浓度之和为1-3克/升。硼扩散过程，N2流量20slm，激光刻槽中开槽宽度为1.9毫米，采用双线200kHz的激光频率, 5 m/s的传送速度, 32A电流,进行激光刻槽，刻蚀需要手动装卸片，电池正面向下，开启水膜，HF酸浓度为7%，滚轮速度为1m/min，刻蚀深度1.0-1.2um。
本发明的有益效果是：通过本发明多晶电池片转换效率比常规工艺至少高出0.5%（保守估计）；拉力、衰减性能符合要求；色差可控制。
具体实施方式
多晶太阳能电池背部钝化工艺，顺序进行酸制绒、硼扩散、背部钝化、刻蚀、第一次去PSG、磷扩散、激光刻槽、第二次去PSG、正面钝化、丝网印刷，在酸制绒过程使用添加剂，添加剂中含：聚乙二醇15克/升，异丙醇30克/升，1克/升，氢氧化钠1克/升，纤维素2克/升，亚硫酸钠11克/升，乳酸钠8克/升，木质素磺酸盐1克/升，余量为水。硼扩散过程，N2流量20slm，激光刻槽中开槽宽度为1.9毫米，采用双线200kHz的激光频率, 5 m/s的传送速度,32A电流,进行激光刻槽，刻蚀需要手动装卸片，电池正面向下，开启水膜，HF酸浓度为7%，滚轮速度为1m/min，刻蚀深度1.0-1.2um。
硼扩散均匀性实验
实验进一步对硼扩散配方中的工艺时间，气体流量，氮气流量及氧化时间进行不同的组合，测试硼扩散后的方阻均匀性。硼扩散配方列表如下：
表一
实验结果显示沉积时N2流量太大或者太小都会增大方阻；沉积时最佳N2流量是20slm；
制绒刻蚀深度实验
表二中，A组是常规多晶工艺，B组和D组工艺流程如下：酸制绒-硼扩散-刻蚀（聚晶设备）-背部钝化-第一次去PSG-磷扩散-激光刻槽（背面）-第二次去PSG-正面钝化-丝网印刷；C组工艺流程如下：酸制绒-硼扩散-背面钝化-刻蚀（聚晶设备）-第一次去PSG-磷扩散-背面激光刻槽-第二次去PSG-正面钝化-丝网印刷。B组用C-TEX设备，D组用Intex设备。
表二
实验结论：实验组比对比组最低高出0.62%，最高高出0.79%；C组比B、D组效率高出0.1%，背面镀膜后再进行聚晶刻蚀，饱和了B扩散层，本发明顺序的聚晶刻蚀最佳。
3.重复验证实验
为了对上次实验进行重复测试，设计了本次实验。ABC三组为XXS2硅片，DEF为XXS3硅片，A组和D组是常规多晶工艺，B组和E组工艺流程如下：酸制绒-硼扩散-刻蚀（聚晶设备）-背面钝化-第一次去PSG-磷扩散-激光刻槽（背面）-第二次去PSG-正面钝化-丝网印刷；C组和F组工艺流程如下：酸制绒-硼扩散-背面钝化-刻蚀（聚晶设备）-第一次去PSG-磷扩散-激光刻槽（背面）-第二次去PSG-正面钝化-丝网印刷。A、B、C组用C-TEX设备，D、E、F组用Intex设备。实验结果如下所示：
表3
实验结论：在刻蚀深度达到4.1μm时，效率仍然可以达到要求；高效工艺比普通工艺提高了0.64%，最高提升了0.8%；实验是可重复的，本发明顺序效果最佳。
具体实施过程，按照本发明工艺流程进行，沉积时间为15分钟，最高温度960℃，工艺时间1小时30分，装载方式为正背正，目前靠手动装卸。聚晶清洗（刻蚀）需要手动装卸片，电池正面向下，开启水膜，HF酸质量浓度为7%，滚轮速度为1m/min，刻蚀深度1.0-1.2um，半成品外观要求正面清洗干净，背面保留硼硅玻璃，装片时硅片反面插入载体正方向。背面钝化工艺时间为1900秒，卸载后需要将硅片方向从载体中翻转，随后进去PSG进行1min清洗。PSG回复清洗4min30s，进入PECVD常规多晶工艺进行镀膜。背激光采用双线200kHz的激光频率, 5 m/s的传送速度, 32A,进行激光刻槽，烧结温度为885摄氏度。添加剂中含：聚乙二醇10-20克/升，异丙醇20-50克/升，碳酸钠0-2克/升，氢氧化钠0-1克/升，柠檬酸钠0-1克/升，果糖钠0-1克/升，纤维素0-3克/升，亚硫酸钠10-20克/升，乳酸钠5-10克/升，木质素磺酸盐0-3克/升，余量为水，其中碳酸钠、氢氧化钠、柠檬酸钠、果糖钠浓度之和为1-3克/升，纤维素与木质素磺酸盐浓度之和为1-3克/升。酸制绒过程使用添加剂可以提高多晶效率，本具体过程高效多晶效率可提升了1.5%以上，达到预期目的，组件封装损耗为0.5%左右，符合损耗要求。
Claims (1)
1.多晶太阳能电池背部钝化工艺，其特征在于：顺序进行酸制绒、硼扩散、背部钝化、刻蚀、第一次去BSG、磷扩散、激光刻槽、第二次去PSG、正面钝化、丝网印刷，在酸制绒过程使用添加剂，硼扩散过程，N2流量20slm，激光刻槽中开槽宽度为1.9毫米，采用双线200kHz的激光频率，5 m/s的传送速度, 32A电流,进行激光刻槽，刻蚀需要手动装卸片，电池正面向下，开启水膜，HF酸浓度为7%，滚轮速度为1m/min，刻蚀深度1.0-1.2um，所述添加剂中：聚乙二醇10-20克/升，异丙醇20-50克/升，碳酸钠0-2克/升，氢氧化钠0-1克/升，柠檬酸钠0-1克/升，果糖钠0-1克/升，纤维素0-3克/升，亚硫酸钠10-20克/升，乳酸钠5-10克/升，木质素磺酸盐0-3克/升，余量为水，其中碳酸钠、氢氧化钠、柠檬酸钠、果糖钠浓度之和为1-3克/升，纤维素与木质素磺酸盐浓度之和为1-3克/升。
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| CN104576831A (zh) * | 2014-12-31 | 2015-04-29 | 江苏顺风光电科技有限公司 | 一种单晶硅片无醇制绒工艺及其制绒添加剂 |
| CN104733555A (zh) * | 2014-12-31 | 2015-06-24 | 江苏顺风光电科技有限公司 | 一种高效n型双面太阳电池及其制备方法 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102330091A (zh) * | 2011-07-27 | 2012-01-25 | 常州时创能源科技有限公司 | 一种多晶硅片酸性制绒液的添加剂及使用方法 |
| CN104576831A (zh) * | 2014-12-31 | 2015-04-29 | 江苏顺风光电科技有限公司 | 一种单晶硅片无醇制绒工艺及其制绒添加剂 |
| CN104733555A (zh) * | 2014-12-31 | 2015-06-24 | 江苏顺风光电科技有限公司 | 一种高效n型双面太阳电池及其制备方法 |
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