CN105136020B - 一种对比式抗干扰微动阶梯平面反射镜激光干涉仪及标定方法和测量方法 - Google Patents
一种对比式抗干扰微动阶梯平面反射镜激光干涉仪及标定方法和测量方法 Download PDFInfo
- Publication number
- CN105136020B CN105136020B CN201510287549.8A CN201510287549A CN105136020B CN 105136020 B CN105136020 B CN 105136020B CN 201510287549 A CN201510287549 A CN 201510287549A CN 105136020 B CN105136020 B CN 105136020B
- Authority
- CN
- China
- Prior art keywords
- group
- interference
- photodetector
- laser beam
- directive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000033001 locomotion Effects 0.000 title claims abstract description 91
- 238000000034 method Methods 0.000 title claims abstract description 44
- 238000005259 measurement Methods 0.000 claims abstract description 112
- 238000005305 interferometry Methods 0.000 claims abstract description 86
- 230000001066 destructive effect Effects 0.000 claims description 16
- 230000005622 photoelectricity Effects 0.000 claims description 16
- 230000002452 interceptive effect Effects 0.000 claims description 13
- 238000004140 cleaning Methods 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000013461 design Methods 0.000 claims description 3
- 238000007689 inspection Methods 0.000 abstract description 2
- 230000007613 environmental effect Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000004556 laser interferometry Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 241000931526 Acer campestre Species 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510287549.8A CN105136020B (zh) | 2015-05-29 | 2015-05-29 | 一种对比式抗干扰微动阶梯平面反射镜激光干涉仪及标定方法和测量方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510287549.8A CN105136020B (zh) | 2015-05-29 | 2015-05-29 | 一种对比式抗干扰微动阶梯平面反射镜激光干涉仪及标定方法和测量方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105136020A CN105136020A (zh) | 2015-12-09 |
CN105136020B true CN105136020B (zh) | 2017-11-10 |
Family
ID=54721461
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201510287549.8A Expired - Fee Related CN105136020B (zh) | 2015-05-29 | 2015-05-29 | 一种对比式抗干扰微动阶梯平面反射镜激光干涉仪及标定方法和测量方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN105136020B (zh) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4702603A (en) * | 1985-07-23 | 1987-10-27 | Cmx Systems, Inc. | Optical phase decoder for interferometers |
CN2193993Y (zh) * | 1994-02-03 | 1995-04-05 | 艾勇 | 反馈型激光干涉计 |
CN102016549A (zh) * | 2008-05-08 | 2011-04-13 | 佳能株式会社 | 光学相干断层成像装置和光学相干断层成像方法 |
CN102458226A (zh) * | 2009-06-25 | 2012-05-16 | 佳能株式会社 | 使用光学相干断层成像的摄像设备及摄像方法 |
CN102645269A (zh) * | 2012-05-18 | 2012-08-22 | 山东省科学院海洋仪器仪表研究所 | 一种海洋背景噪声的声压监测装置 |
CN204988173U (zh) * | 2015-05-29 | 2016-01-20 | 北方民族大学 | 一种对比式抗干扰微动阶梯平面反射镜激光干涉仪 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11142243A (ja) * | 1997-11-13 | 1999-05-28 | Yokogawa Electric Corp | 干渉計及びこれを用いたフーリエ変換型分光装置 |
-
2015
- 2015-05-29 CN CN201510287549.8A patent/CN105136020B/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4702603A (en) * | 1985-07-23 | 1987-10-27 | Cmx Systems, Inc. | Optical phase decoder for interferometers |
CN2193993Y (zh) * | 1994-02-03 | 1995-04-05 | 艾勇 | 反馈型激光干涉计 |
CN102016549A (zh) * | 2008-05-08 | 2011-04-13 | 佳能株式会社 | 光学相干断层成像装置和光学相干断层成像方法 |
CN102458226A (zh) * | 2009-06-25 | 2012-05-16 | 佳能株式会社 | 使用光学相干断层成像的摄像设备及摄像方法 |
CN102645269A (zh) * | 2012-05-18 | 2012-08-22 | 山东省科学院海洋仪器仪表研究所 | 一种海洋背景噪声的声压监测装置 |
CN204988173U (zh) * | 2015-05-29 | 2016-01-20 | 北方民族大学 | 一种对比式抗干扰微动阶梯平面反射镜激光干涉仪 |
Also Published As
Publication number | Publication date |
---|---|
CN105136020A (zh) | 2015-12-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN107727058B (zh) | 一种光频梳六自由度测量方法及测量系统 | |
CN105043242B (zh) | 一种对比式抗干扰阶梯平面反射镜激光干涉仪及标定方法和测量方法 | |
CN104964641B (zh) | 一种磁性微位移平台式级联阶梯角反射镜激光干涉仪及标定方法和测量方法 | |
CN104697443B (zh) | 一种移动补偿式级联阶梯型角反射镜激光干涉仪及测量方法 | |
CN104880147B (zh) | 一种磁性微位移平台式角反射镜激光干涉仪的标定方法和测量方法 | |
CN105004263B (zh) | 一种对比式抗干扰微动平面反射镜激光干涉仪及标定方法和测量方法 | |
CN105180801B (zh) | 一种对比式抗干扰阶梯型角反射镜激光干涉仪及标定方法和测量方法 | |
CN105157559B (zh) | 一种对比式抗干扰级联阶梯角反射镜激光干涉仪及标定方法和测量方法 | |
CN204757922U (zh) | 一种对比式抗干扰微动级联阶梯角反射镜激光干涉仪 | |
CN104848782B (zh) | 一种对比式抗干扰微动级联阶梯角反射镜激光干涉仪及标定方法和测量方法 | |
CN105136020B (zh) | 一种对比式抗干扰微动阶梯平面反射镜激光干涉仪及标定方法和测量方法 | |
CN105043241B (zh) | 一种对比式抗干扰角反射镜激光干涉仪及标定方法和测量方法 | |
CN104930968B (zh) | 一种磁性微位移平台式阶梯平面反射镜激光干涉仪及标定方法和测量方法 | |
CN105091739B (zh) | 一种对比式抗干扰微动阶梯角反射镜激光干涉仪及标定方法和测量方法 | |
CN204988173U (zh) | 一种对比式抗干扰微动阶梯平面反射镜激光干涉仪 | |
CN204740001U (zh) | 一种对比式抗干扰微动阶梯角反射镜激光干涉仪 | |
CN204705316U (zh) | 一种磁性微位移平台式平面反射镜激光干涉仪 | |
CN204740000U (zh) | 一种对比式抗干扰阶梯平面反射镜激光干涉仪 | |
CN204757921U (zh) | 一种对比式抗干扰阶梯型角反射镜激光干涉仪 | |
CN204854622U (zh) | 一种对比式抗干扰级联阶梯角反射镜激光干涉仪 | |
CN105043244B (zh) | 一种对比式抗干扰微动角反射镜激光干涉仪及标定方法和测量方法 | |
CN204757920U (zh) | 一种对比式抗干扰微动平面反射镜激光干涉仪 | |
CN104897049B (zh) | 一种磁性微位移平台式平面反射镜激光干涉仪的标定方法和测量方法 | |
CN204988174U (zh) | 一种对比式抗干扰微动角反射镜激光干涉仪 | |
CN204988175U (zh) | 一种对比式抗干扰平面反射镜激光干涉仪 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20201113 Address after: No.3 Chuangye Road, Shatou Town, Guangling District, Yangzhou City, Jiangsu Province, 225000 Patentee after: Beixin (Yangzhou) Pipeline Technology Co.,Ltd. Address before: 750021 No. 204, Wenchang North Street, Xixia District, the Ningxia Hui Autonomous Region, Yinchuan Patentee before: BEIFANG MINZU University |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20231109 Address after: Room 05, Building 3, Ruilianfu, Anyi Town, Baoying County, Yangzhou City, Jiangsu Province, 225800 Patentee after: Yangzhou Xiangheling Electric Power Technology Co.,Ltd. Address before: No. 3 Chuangye Road, Shatou Town, Guangling District, Yangzhou City, Jiangsu Province, 225000 Patentee before: Beixin (Yangzhou) Pipeline Technology Co.,Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171110 |