CN105122488B - 晶片级换能器涂覆和方法 - Google Patents

晶片级换能器涂覆和方法 Download PDF

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Publication number
CN105122488B
CN105122488B CN201480014925.XA CN201480014925A CN105122488B CN 105122488 B CN105122488 B CN 105122488B CN 201480014925 A CN201480014925 A CN 201480014925A CN 105122488 B CN105122488 B CN 105122488B
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CN
China
Prior art keywords
transducer
protective layer
conductive layer
disposed
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201480014925.XA
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English (en)
Chinese (zh)
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CN105122488A (zh
Inventor
P·D·科尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Image Guided Therapy Corp
Original Assignee
Volcano Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Publication of CN105122488A publication Critical patent/CN105122488A/zh
Application granted granted Critical
Publication of CN105122488B publication Critical patent/CN105122488B/zh
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Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/12—Diagnosis using ultrasonic, sonic or infrasonic waves in body cavities or body tracts, e.g. by using catheters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629—Square array
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/02—Forming enclosures or casings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H10N30/2048—Membrane type having non-planar shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Medical Informatics (AREA)
  • Surgery (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biophysics (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Gynecology & Obstetrics (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)
CN201480014925.XA 2013-03-14 2014-03-14 晶片级换能器涂覆和方法 Active CN105122488B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361781159P 2013-03-14 2013-03-14
US61/781,159 2013-03-14
PCT/US2014/028552 WO2014152987A1 (en) 2013-03-14 2014-03-14 Wafer-scale transducer coating and method

Publications (2)

Publication Number Publication Date
CN105122488A CN105122488A (zh) 2015-12-02
CN105122488B true CN105122488B (zh) 2018-01-26

Family

ID=51530489

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480014925.XA Active CN105122488B (zh) 2013-03-14 2014-03-14 晶片级换能器涂覆和方法

Country Status (5)

Country Link
US (1) US10123775B2 (https=)
EP (1) EP2973767B1 (https=)
JP (1) JP6297131B2 (https=)
CN (1) CN105122488B (https=)
WO (1) WO2014152987A1 (https=)

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JP6189033B2 (ja) * 2012-12-14 2017-08-30 株式会社日立製作所 超音波探触子の製造方法、超音波探触子、及び超音波診断装置
JP2017080132A (ja) 2015-10-29 2017-05-18 セイコーエプソン株式会社 超音波デバイス、超音波プローブ、電子機器、および超音波画像装置
JP6569473B2 (ja) * 2015-10-29 2019-09-04 セイコーエプソン株式会社 超音波デバイス、超音波プローブ、電子機器、および超音波画像装置
US10618079B2 (en) * 2016-02-29 2020-04-14 Qualcomm Incorporated Piezoelectric micromechanical ultrasonic transducers and transducer arrays
US11411163B2 (en) * 2016-12-30 2022-08-09 Intel Corporation Packaging for ultrasonic transducers
WO2019002231A1 (en) * 2017-06-30 2019-01-03 Koninklijke Philips N.V. INTRALUMINAL ULTRASONIC IMAGING DEVICE COMPRISING A SUBSTRATE SEPARATED IN A PLURALITY OF SPACED SEGMENTS, INTRALUMINAL ULTRASONIC IMAGING DEVICE COMPRISING A TRENCH, AND METHOD OF MANUFACTURING
JP6922651B2 (ja) 2017-10-26 2021-08-18 セイコーエプソン株式会社 超音波デバイス、及び超音波測定装置
CN108652669A (zh) * 2018-03-14 2018-10-16 业成科技（成都）有限公司 超音波感测器及其运作方法
US11465177B2 (en) 2018-05-21 2022-10-11 Fujifilm Sonosite, Inc. PMUT ultrasound transducer with damping layer
US11890136B2 (en) * 2018-08-22 2024-02-06 Philips Image Guided Therapy Corporation Fluid barrier for intraluminal ultrasound imaging and associated devices, systems, and methods
EP3857308A4 (en) * 2018-09-25 2022-06-08 Exo Imaging Inc. IMAGING DEVICES WITH SELECTIVELY VARIABLE PROPERTIES
KR102670111B1 (ko) * 2018-09-28 2024-05-27 재단법인대구경북과학기술원 초음파 트랜스듀서 장치의 제조 방법
DE102019101325A1 (de) * 2019-01-17 2020-07-23 USound GmbH Herstellungsverfahren für mehrere MEMS-Schallwandler
JP7190590B2 (ja) * 2020-03-05 2022-12-15 エクソ イメージング，インコーポレイテッド プログラム可能な生体構造及びフロー撮像を有する超音波撮像デバイス
US20230247894A1 (en) * 2020-04-16 2023-08-03 Vuereal Inc. Micro thin-film device
EP4304485B1 (en) * 2021-03-09 2025-11-12 Oneprojects Design and Innovation Ltd. Catheter with rotatable image array
WO2022248133A1 (de) * 2021-05-28 2022-12-01 Robert Bosch Gmbh Verfahren zur herstellung eines mikro-elektronisch-mechanischen schwingungssystems und piezoelektrischer mikrogefertigter ultraschallwandler
US20240023929A1 (en) * 2022-07-20 2024-01-25 SoundCath, Inc. Ultrasonic catheter
US12599360B2 (en) 2022-10-24 2026-04-14 Boston Scientific Scimed, Inc. Ultrasonic imaging ablation catheter system and method
US12599361B2 (en) 2023-02-14 2026-04-14 Boston Scientific Scimed, Inc. Ultrasonic imaging system and method
FR3155598B1 (fr) * 2023-11-20 2025-10-10 Vermon Sonde ultrasonore à transducteurs MUT et méthode de fabrication d’une telle sonde

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US5488954A (en) * 1994-09-09 1996-02-06 Georgia Tech Research Corp. Ultrasonic transducer and method for using same
US20050200241A1 (en) * 2004-02-27 2005-09-15 Georgia Tech Research Corporation Multiple element electrode cMUT devices and fabrication methods
EP1902789A1 (de) * 2006-09-22 2008-03-26 Baumer Electric AG Ultraschallwandler und Ultraschallsensor
JP2009244235A (ja) * 2008-03-31 2009-10-22 New Industry Research Organization 水中用超音波アレイセンサ
CN101754077A (zh) * 2008-12-19 2010-06-23 三星电子株式会社 压电声换能器及其制造方法
US20110090289A1 (en) * 2009-10-21 2011-04-21 Satoshi Mizukami Electro-mechanical transducer, method of making the transducer, liquid ejection head including the transducer, and liquid ejection apparatus including the head

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JP4271252B2 (ja) * 2006-10-12 2009-06-03 オリンパスメディカルシステムズ株式会社 超音波振動子セル、超音波振動子エレメント、超音波振動子アレイ及び超音波診断装置
KR20130014618A (ko) * 2006-11-03 2013-02-07 리써치 트라이앵글 인스티튜트 굴곡 모드 압전 트랜스듀서를 사용하는 보강된 초음파 촬영 프로브
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5488954A (en) * 1994-09-09 1996-02-06 Georgia Tech Research Corp. Ultrasonic transducer and method for using same
US20050200241A1 (en) * 2004-02-27 2005-09-15 Georgia Tech Research Corporation Multiple element electrode cMUT devices and fabrication methods
EP1902789A1 (de) * 2006-09-22 2008-03-26 Baumer Electric AG Ultraschallwandler und Ultraschallsensor
JP2009244235A (ja) * 2008-03-31 2009-10-22 New Industry Research Organization 水中用超音波アレイセンサ
CN101754077A (zh) * 2008-12-19 2010-06-23 三星电子株式会社 压电声换能器及其制造方法
US20110090289A1 (en) * 2009-10-21 2011-04-21 Satoshi Mizukami Electro-mechanical transducer, method of making the transducer, liquid ejection head including the transducer, and liquid ejection apparatus including the head

Also Published As

Publication number Publication date
EP2973767A4 (en) 2016-11-23
EP2973767A1 (en) 2016-01-20
JP2016513941A (ja) 2016-05-16
WO2014152987A1 (en) 2014-09-25
US10123775B2 (en) 2018-11-13
US20140276087A1 (en) 2014-09-18
JP6297131B2 (ja) 2018-03-20
EP2973767B1 (en) 2017-11-22
CN105122488A (zh) 2015-12-02

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Address after: California, USA

Patentee after: Philips image guided therapy Co.

Address before: California, USA

Patentee before: VOLCANO Corp.