CN105103295A - 具有垂直漂移区的横向GaN JFET - Google Patents
具有垂直漂移区的横向GaN JFET Download PDFInfo
- Publication number
- CN105103295A CN105103295A CN201380059315.7A CN201380059315A CN105103295A CN 105103295 A CN105103295 A CN 105103295A CN 201380059315 A CN201380059315 A CN 201380059315A CN 105103295 A CN105103295 A CN 105103295A
- Authority
- CN
- China
- Prior art keywords
- iii
- family nitride
- barrier layer
- gan
- epitaxial loayer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims abstract description 144
- 229910002601 GaN Inorganic materials 0.000 claims abstract description 124
- 230000005669 field effect Effects 0.000 claims abstract description 6
- 150000004767 nitrides Chemical class 0.000 claims description 98
- 230000004888 barrier function Effects 0.000 claims description 77
- 238000000034 method Methods 0.000 claims description 45
- 229910052751 metal Inorganic materials 0.000 claims description 39
- 239000002184 metal Substances 0.000 claims description 39
- 239000000758 substrate Substances 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 16
- 238000002347 injection Methods 0.000 claims description 12
- 239000007924 injection Substances 0.000 claims description 12
- 230000000903 blocking effect Effects 0.000 abstract 2
- 239000010410 layer Substances 0.000 description 120
- 239000000463 material Substances 0.000 description 48
- 239000002019 doping agent Substances 0.000 description 17
- 230000015572 biosynthetic process Effects 0.000 description 15
- 230000008859 change Effects 0.000 description 15
- 230000005684 electric field Effects 0.000 description 9
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 8
- 238000005530 etching Methods 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 239000004411 aluminium Substances 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229910052763 palladium Inorganic materials 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 229910002704 AlGaN Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000001657 homoepitaxy Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000013517 stratification Methods 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
- H01L29/808—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a PN junction gate, e.g. PN homojunction gate
- H01L29/8083—Vertical transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1066—Gate region of field-effect devices with PN junction gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66893—Unipolar field-effect transistors with a PN junction gate, i.e. JFET
- H01L29/66901—Unipolar field-effect transistors with a PN junction gate, i.e. JFET with a PN homojunction gate
- H01L29/66909—Vertical transistors, e.g. tecnetrons
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Junction Field-Effect Transistors (AREA)
Abstract
Description
Claims (20)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/675,826 | 2012-11-13 | ||
US13/675,826 US9472684B2 (en) | 2012-11-13 | 2012-11-13 | Lateral GaN JFET with vertical drift region |
PCT/US2013/069469 WO2014078238A1 (en) | 2012-11-13 | 2013-11-11 | Lateral gan jfet with vertical drift region |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105103295A true CN105103295A (zh) | 2015-11-25 |
CN105103295B CN105103295B (zh) | 2018-10-16 |
Family
ID=50680863
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201380059315.7A Active CN105103295B (zh) | 2012-11-13 | 2013-11-11 | 具有垂直漂移区的横向GaN JFET |
Country Status (3)
Country | Link |
---|---|
US (1) | US9472684B2 (zh) |
CN (1) | CN105103295B (zh) |
WO (1) | WO2014078238A1 (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9472684B2 (en) | 2012-11-13 | 2016-10-18 | Avogy, Inc. | Lateral GaN JFET with vertical drift region |
CN110739349A (zh) * | 2019-10-22 | 2020-01-31 | 深圳第三代半导体研究院 | 一种碳化硅横向jfet器件及其制备方法 |
WO2022261819A1 (en) * | 2021-06-15 | 2022-12-22 | Innoscience (Suzhou) Technology Co., Ltd. | Nitride-based semiconductor device and method for manufacturing thereof |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9324645B2 (en) | 2013-05-23 | 2016-04-26 | Avogy, Inc. | Method and system for co-packaging vertical gallium nitride power devices |
US9324809B2 (en) | 2013-11-18 | 2016-04-26 | Avogy, Inc. | Method and system for interleaved boost converter with co-packaged gallium nitride power devices |
US10147813B2 (en) * | 2016-03-04 | 2018-12-04 | United Silicon Carbide, Inc. | Tunneling field effect transistor |
US10177247B2 (en) * | 2017-01-20 | 2019-01-08 | Qorvo Us, Inc. | Continuous crystalline gallium nitride (GaN) PN structure with no internal regrowth interfaces |
US10312378B2 (en) * | 2017-01-30 | 2019-06-04 | QROMIS, Inc. | Lateral gallium nitride JFET with controlled doping profile |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000216407A (ja) * | 1999-01-20 | 2000-08-04 | Fuji Electric Co Ltd | 炭化けい素縦形fetおよびその製造方法 |
CN1308774A (zh) * | 1998-07-09 | 2001-08-15 | 克里公司 | 碳化硅水平沟道缓冲栅极半导体器件 |
US20030089930A1 (en) * | 2001-11-09 | 2003-05-15 | Zhao Jian Hui | Double-gated vertical junction field effect power transistor |
US20080128862A1 (en) * | 2004-11-15 | 2008-06-05 | Masahiro Sugimoto | Semiconductor Devices And Method Of Manufacturing Them |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10350160B4 (de) | 2003-10-28 | 2012-12-06 | Infineon Technologies Ag | Verfahren zur Herstellung eines Sperrschicht-Feldeffekttransistors mit hoher Durchbruchspannung |
US20070029573A1 (en) | 2005-08-08 | 2007-02-08 | Lin Cheng | Vertical-channel junction field-effect transistors having buried gates and methods of making |
DE102006045312B3 (de) | 2006-09-26 | 2008-05-21 | Siced Electronics Development Gmbh & Co. Kg | Halbleiteranordnung mit gekoppelten Sperrschicht-Feldeffekttransistoren |
US7772621B2 (en) | 2007-09-20 | 2010-08-10 | Infineon Technologies Austria Ag | Semiconductor device with structured current spread region and method |
JP5032965B2 (ja) | 2007-12-10 | 2012-09-26 | パナソニック株式会社 | 窒化物半導体トランジスタ及びその製造方法 |
WO2010054073A2 (en) | 2008-11-05 | 2010-05-14 | Semisouth Laboratories, Inc. | Vertical junction field effect transistors having sloped sidewalls and methods of making |
JP5566670B2 (ja) | 2008-12-16 | 2014-08-06 | 古河電気工業株式会社 | GaN系電界効果トランジスタ |
AU2010262789A1 (en) | 2009-06-19 | 2012-02-02 | Power Integrations, Inc. | Methods of making vertical junction field effect transistors and bipolar junction transistors without ion implantation and devices made therewith |
US9472684B2 (en) | 2012-11-13 | 2016-10-18 | Avogy, Inc. | Lateral GaN JFET with vertical drift region |
-
2012
- 2012-11-13 US US13/675,826 patent/US9472684B2/en active Active
-
2013
- 2013-11-11 CN CN201380059315.7A patent/CN105103295B/zh active Active
- 2013-11-11 WO PCT/US2013/069469 patent/WO2014078238A1/en active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1308774A (zh) * | 1998-07-09 | 2001-08-15 | 克里公司 | 碳化硅水平沟道缓冲栅极半导体器件 |
JP2000216407A (ja) * | 1999-01-20 | 2000-08-04 | Fuji Electric Co Ltd | 炭化けい素縦形fetおよびその製造方法 |
US20030089930A1 (en) * | 2001-11-09 | 2003-05-15 | Zhao Jian Hui | Double-gated vertical junction field effect power transistor |
US20080128862A1 (en) * | 2004-11-15 | 2008-06-05 | Masahiro Sugimoto | Semiconductor Devices And Method Of Manufacturing Them |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9472684B2 (en) | 2012-11-13 | 2016-10-18 | Avogy, Inc. | Lateral GaN JFET with vertical drift region |
CN110739349A (zh) * | 2019-10-22 | 2020-01-31 | 深圳第三代半导体研究院 | 一种碳化硅横向jfet器件及其制备方法 |
WO2022261819A1 (en) * | 2021-06-15 | 2022-12-22 | Innoscience (Suzhou) Technology Co., Ltd. | Nitride-based semiconductor device and method for manufacturing thereof |
Also Published As
Publication number | Publication date |
---|---|
CN105103295B (zh) | 2018-10-16 |
WO2014078238A1 (en) | 2014-05-22 |
US20140131721A1 (en) | 2014-05-15 |
US9472684B2 (en) | 2016-10-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8969180B2 (en) | Method and system for junction termination in GaN materials using conductivity modulation | |
KR100850026B1 (ko) | Ⅲ-질화물 전류 제어 디바이스와 그 제조방법 | |
CN105103295A (zh) | 具有垂直漂移区的横向GaN JFET | |
US9117850B2 (en) | Method and system for a gallium nitride vertical JFET with self-aligned source and gate | |
CN103875075B (zh) | 利用再生长沟道的GaN垂直JFET的方法和系统 | |
CN103858236A (zh) | 利用再生长栅极的GaN垂直JFET的方法和系统 | |
US20200066921A1 (en) | Trench mos schottky diode | |
US8921903B2 (en) | Lateral junction field-effect transistor | |
US9502544B2 (en) | Method and system for planar regrowth in GaN electronic devices | |
US9608092B2 (en) | Method of manufacturing a semiconductor device having a rectifying junction at the side wall of a trench | |
US11139394B2 (en) | Silicon carbide field-effect transistors | |
US9029210B2 (en) | GaN vertical superjunction device structures and fabrication methods | |
US9257500B2 (en) | Vertical gallium nitride power device with breakdown voltage control | |
KR101964153B1 (ko) | 절연 또는 반절연 SiC 기판에 구현된 SiC 반도체 소자 및 그 제조 방법 | |
US9269793B2 (en) | Method and system for a gallium nitride self-aligned vertical MESFET | |
JP2006237116A (ja) | 半導体装置 | |
WO2020021298A1 (ja) | 半導体装置及びその製造方法 | |
US11894454B2 (en) | Silicon carbide field-effect transistors |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20190201 Address after: California, USA Patentee after: New Era Power System Co.,Ltd. Address before: California, USA Patentee before: Avoji (ABC) Co.,Ltd. Effective date of registration: 20190201 Address after: California, USA Patentee after: Avoji (ABC) Co.,Ltd. Address before: California, USA Patentee before: AVOGY, Inc. |
|
TR01 | Transfer of patent right |