CN105100560A - Electronic part packaging body side face photographing device - Google Patents
Electronic part packaging body side face photographing device Download PDFInfo
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- CN105100560A CN105100560A CN201510211965.XA CN201510211965A CN105100560A CN 105100560 A CN105100560 A CN 105100560A CN 201510211965 A CN201510211965 A CN 201510211965A CN 105100560 A CN105100560 A CN 105100560A
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- electronic part
- packaging body
- package body
- part package
- camera
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Abstract
The invention provides an electronic part packaging body side face photographing device which is simple in structure and which can check electronic part packaging bodies such as a QFN packaging body at a high speed. Two reflecting prisms are disposed at the periphery (four edges) of the oblique lower part of the outer side of a side face of the QFN packaging body of a photographing position P existing in a horizontal-conveying conveying path, and a CCD camera is configured below the two reflecting prisms through a telecentric lens. When the QFN packaging body comes at the photographing position P, light of the side face of the QFN packaging body is reflected for two times on the two reflecting prisms and goes downwards to photograph through the CCD camera. The QFN packaging body can stop at the photographing position of the QFN packaging body and can also pass through the photographing position without stop. For a condition that the QFN packaging body stops at the photographing position and then passes through the photographing position, photographing time of a photographing device is better to be set as short time which enables a photographing image to not generate a shake. Because the two reflecting prisms are configured at a position lower than the conveyed QFN packaging body, the QFN packaging body can perform photographing in a transfer path and does not need to move in the vertical direction.
Description
Technical field
The present invention relates to a kind of device packaging body side after the electronic component resin seal of semiconductor wafer etc. being carried out photograph.This device can be used in, and checks the device of the side of the electronic part package bodies such as QFN (QuadFlatNon-LeadPackage) packaging body.
Background technology
As being moved the widely used QFN packaging body 10 of the electronic components such as phone as shown in figures ia-c, there is the kenel exposing multiple metal terminal 11 in 4 limits (or 2 limits) of slightly foursquare resin seal packaging body respectively.Moreover the flat shape of QFN packaging body is not limited to one and is decided to be square, also there is the rectangular situation that the length of adjacent side is different.
QFN packaging body 10 so, after the semiconductor substrate resin seal configured with two-dimentional shape by multiple individual circuit, cuts off with cutting edge, cuts off as each packaging body (individual sheet), make therefrom.When this cuts off, as shown in Figure 2, the metal terminal 11 in section spreads, and produces bad situation because producing burr 12.
In order to detect the undesirable condition of this section (side), in the past, testing fixture is as shown in Figure 3 used.Namely, as shown in Figure 3A, existing packaging body side testing fixture 20, in being located at the four directions of central photographing space 21, configure the triangular prism prism 22a ~ 22d making inclined-plane horizontal to central authorities downside respectively, and as shown in Figure 3 B, the huge formation had in below configuration photographic element (CCD camera 23 etc.).By the QFN packaging body 10 be placed on the circular dividing table (not shown) of the leading portion of this packaging body side testing fixture 20 by vacuum attraction absorption be held in choose 25 bottom and rise, and by directly over horizontal transport mechanism (not shown) photographing space 21 that flatly conveyance is located at packaging body side testing fixture 20 as shown in Figure 3 B, and stop.In its position, are photographed by CCD camera by the reflected image on the inclined-plane from 4 triangular prism prism 22a ~ 22d in 4 of QFN packaging body 10 sides.After photography terminates, then make to choose 25 by vertical transport mechanism and rise to height originally, and be carried to the complete goods pallet (not shown) of the inspection of back segment by horizontal transport mechanism, receive to its commitment positions.
Patent documentation 1: Japanese Unexamined Patent Publication 2008-286617 publication
Summary of the invention
In above-mentioned existing packaging body side testing fixture 20, in order to take the side of QFN packaging body 10, QFN packaging body 10 is made to move horizontally from leading portion and-stop (photography)--stopping (photography)-action of the complexity moved horizontally of rising once after stopping, it must be made to fall directly over the photographing space 21 of device.Therefore, there is the problem making the high speed difficulty of photography (inspection).
In this present invention for the problem solved, provide a kind of electronic part package body side surface camera, its simple structure and can to check at a high speed the electronic part package body of QFN packaging body etc.
The present invention made to solve above-mentioned problem is a kind of electronic part package body side surface camera, take the side of this electronic part package body in camera positions photography target and electronic part package body existed in the way, path that its encapsulation dignity is transferred abreast, it possesses:
A) reflecting member, it is configured at the oblique below outside the side of the electronic part package body being present in aforementioned camera positions, and the light of the side from this electronic part package body is reflexed to below;
B) camera, it is located at the below of this reflecting member.
Preferably, described reflecting member is 2 reflecting prisms.
Preferably, in the side contrary with described camera positions of described 2 reflecting prisms, light source illumination being penetrated the side in electronic part package body is provided with.
Preferably, telecentric optical element is provided with between described reflecting member and described camera.
Preferably, described reflecting member is located at the surrounding of described camera positions respectively.
Preferably, between described reflecting member and described camera, be provided with half-reflecting mirror, and the light from described electronic part package body side surface reflected by described reflecting member is by after described half-reflecting mirror reflection, is incident upon described camera.
Preferably, in the side contrary with described reflecting member of described half-reflecting mirror, light source illumination being penetrated the side in electronic part package body is provided with.
Preferably, below the electronic part package body being present in described camera positions, and from the side of described electronic part package body toward the side of reflecting member photography light angulation be less than 45 degree.
In electronic part package body side surface camera of the present invention, is photographed as ensuing mode in the side of electronic part package body.First, electronic part package body is transferred in the direction being parallel to its encapsulation dignity.In the way in its transfer path, be set with camera positions, when electronic part package body comes its camera positions, from the light of its side, reflected by the reflecting member being configured at the oblique below outside it, and photographed by camera in its place downwards.Moreover be use for convenience of description in this " below " or " tiltedly below ", it doesn't matter with the direction of gravity.That is, above-mentioned " below ", consistent with gravity direction when the transfer direction of electronic part package body is horizontal direction, but be the situation of vertical direction in transfer direction, its indication is the side that there is not the method keeping electronic part package body.
Electronic part package body can stop in its camera positions, also can not stop and passing through.The situation that electronic part package body does not stop in camera positions and passes through, if the photography time that camera carries out is set as that the short time not making photographs produce shaking degree is good.
In electronic part package body side surface camera of the present invention, owing to being configured at reflecting member and the common oblique below of camera, namely, compared with being low position below the electronic part package body transferred, can be photographed in way, transfer path by the electronic part package body transferred, and not need to make it move in vertical direction.
The picture of the side of being photographed by electronic part package body side surface camera of the present invention, can be recorded in tape deck, also can check whether burr or scar by carrying out image analysis immediately.
In aforementioned reflecting member, though single panel reflective mirror can be used, be preferably use 2 reflecting prisms.By the profile using 2 reflecting prisms can take more undistorted electronic part package body.
This situation, also can be provided with telecentric optical element between aforementioned reflecting member and aforementioned camera.More undistorted profile can be taken further thus.In addition, 2 reflecting prisms are used in the situation of reflecting member, (namely light source can be configured at the rear of these 2 reflecting prisms, with check object and electronic part package body opposition side), and illumination light can be made from higher angle (oneself is front more) to the side-irradiation of electronic part package body.
Aforementioned reflecting member, is preferably 4 limits being located at the electronic part package body being present in aforementioned camera positions respectively.Thereby, it is possible to by 4 sides of 1 electronic part package body at one stroke shooting.The electronic part package body side surface camera of the application of the invention, do not need as existing electronic part package body side surface camera (packaging body side testing fixture), moving horizontally once stop in camera positions of electronic part package body, makes the compound action of its vertical movement.Therefore, it is possible to shorten photography time (review time).
Accompanying drawing explanation
Figure 1A, Figure 1B and Fig. 1 C is respectively the exterior view of QFN packaging body, back view and stereogram.
Fig. 2 is the amplification stereogram of a bad example of the side representing QFN packaging body.
Fig. 3 A and Fig. 3 B is the vertical view of existing electronic part package body side surface testing fixture and central longitudinal sectional drawing.
Fig. 4 is the central longitudinal sectional drawing in the photography portion, side of the first embodiment of the present invention and QFN packaging body side testing fixture.
Fig. 5 is the vertical view in the photography portion, side of the QFN packaging body side testing fixture of the first embodiment.
Fig. 6 is the central longitudinal profile in the photography portion, side of second embodiment of the invention and reflection-type QFN packaging body side testing fixture.
Fig. 7 is for representing the figure of an example of the image of being photographed by photography portion, side of the QFN packaging body side testing fixture of embodiment.
Fig. 8 be represent that the entirety of QFN packaging body side testing fixture forms face outside drawing.
Primary symbols illustrates:
10QFN packaging body
11 metal terminals
12 burr
20 packaging body side testing fixtures
21 photographing spaces
22a ~ 22d triangular prism prism
23CCD camera
25 choose head
40QFN packaging body side testing fixture
42 circular dividing tables
43 transfer devices
44 lifts
45 choose head
46 photography portion, sides
47 non-defective unit pallets
48 heavy industry trays
49 photographing spaces
50a ~ 50d2 face reflecting prism
51 telecentric lenses
52CCD camera
53a ~ 53dLED throws light on
60a ~ 60d2 face reflecting prism
61 telecentric lenses
62CCD camera
63 half-reflecting mirrors
64 light sources (LED illumination)
66 projection portion, sides.
Embodiment
First embodiment of electronic part package body side surface camera of the present invention and QFN packaging body side testing fixture are described.Fig. 8 be the QFN packaging body side testing fixture 40 of the present embodiment face outside drawing.QFN packaging body 10 loads to the acceptance division and circular dividing table 42 of this side testing fixture 40 from left.Moreover, receive to this side testing fixture 40, full QFN packaging body 10 all surface and back side inspected complete, check result is stored in the memory portion (not shown) of the packaging body testing fixture comprising this side testing fixture 40.
Be placed in the QFN packaging body 10 on circular dividing table 42, the QFN packaging body 10 (being 4 QFN packaging bodies 10 in Fig. 8) of requirement is lifted by the lift 44 of transfer device 43.Below lift 44, what be provided with requirement (situation of Fig. 8 is 4) chooses 45 in order to what make each QFN packaging body 10 be adsorbed by vacuum attraction.Lift 44, after lifting QFN packaging body 10 from circular dividing table 42, moves in horizontal direction, and by photography portion, side 46.As described later, in this photography portion, side 46, take 4 sides of each QFN packaging body 10, but now, transfer device 43 does not make lift 44 stop and continuing with constant speed mobile simultaneously.
Based on the image by 4 sides captured when on photography portion, side 46, not shown side checks that the side of judging part to each QFN packaging body 10 checks whether defectiveness.Do not find the QFN packaging body 10 of defect, by mounting in the corresponding recess (pocket) being close to the non-defective unit pallet 47 that photography portion, side 46 is placed.Find the QFN packaging body 10 of defect, by mounting in the corresponding recess (pocket) of its heavy industry pallet 48 placed of neighbour.Try to repair to the QFN packaging body 10 being placed in heavy industry pallet 48, and can the person of reparation become goods after reexamining, cannot the person of reparation be processed as defective products.The formation in photography portion, side 46 is described by Fig. 4 and Fig. 5.In the top in photography portion, side 46, the photographing space 49 of the size of the plane of corresponding QFN packaging body 10, as central authorities, configures 42 reflecting prism 50a ~ 50d around it.The position of the QFN packaging body 10 on the top of the photographing space 49 of these central authorities becomes camera positions P.Each 2 two sides reflecting prism 50a ~ 50d are located at, and are positioned at the oblique below in the outside of the side of the QFN packaging body 10 of camera positions P, that is, be outside compared with the side of QFN packaging body 10, are downside comparatively below.In addition, each of each 2 reflecting prism 50a ~ 50d, relative to the camera positions P of QFN packaging body 10, is configured at the position of the optical relation becoming following.From the light of side of QFN packaging body 10 being positioned at camera positions P, vertically through the inclined-plane (face on the right side in 2 reflecting prisms in the left side of Fig. 4) of 2 reflecting prism 50a ~ 50d, and reflected by vertical plane (face in the left side in 2 reflecting prisms in the left side of Fig. 4), and reflected again by inclined-plane and vertically below (this light is called side photography light).Be desirably, the face of QFN packaging body 10 (above or below), and be little from its place towards angle θ formed by the side of 2 reflecting prism 50a ~ 50d photography light, also can be less than 45 degree, be more preferred from less than 30 degree.
Under 42 reflecting prism 50a ~ 50d, be configured with CCD camera 52 by telecentric lens 51.The focus of CCD camera 52 with, close in 2 reflecting prism 50a ~ 50d internal reflection 2 times, and the mode of the optical path length of the light come by telecentric lens 51 is set.Be provided with light source and LED illumination 53a ~ 53d in the behind (vertical plane side) of each 2 reflecting prism 50a ~ 50d, and become by the vertical plane of 2 reflecting prism 50a ~ 50d and inclined-plane 4 side-irradiation light of the QFN packaging body 10 of camera positions P.
4 sides of QFN packaging body 10 are taken in following mode by photography portion, side 46.By transfer device 43, multiple QFN packaging body 10 is transferred from circular dividing table 42 place, and when 1 QFN packaging body 10 wherein comes camera positions P, CCD camera 52 is taken with short photography time (that is, time for exposure).Such as, if make the translational speed of transfer device 43 be 300mm/sec, by making photography time be 100 μ sec, the displacement (that is, camera shake) of the QFN packaging body 10 when can make shooting is 30 μm.In addition, if the interval (that is, the transfer spacing of QFN packaging body 10) choosing 45 making lifting platform 44 keep is 3cm, interval photography becomes 100msec.
Fig. 7 represents an example of the image taken by CCD camera 52.Be taken in central authorities below QFN packaging body 10, but this is not for passing through person captured by 2 reflecting prism 50a ~ 50d, therefore there is no and correctly aims at focus.As previously mentioned, in order to before coming this side testing fixture 40, the surface of QFN packaging body 10 and having checked of the back side, the image below this does not use this side testing fixture 40.
In the image of surrounding's shooting 4 sides of image below.These are the light come by 2 reflecting prism 50a ~ 50d and telecentric lens 51, therefore correctly aim at focus, and can carry out the inspection in thin portion.Aforesaid side checks that judging part (not shown) is based on the image of this side, has zero defect by video recording analysis inspection 4 sides.Side checks that the entity of judging part is equipped on the special formula of computer, based on the image of 4 sides, by comparing with normal image, detects the presence or absence of burr 12 as shown in Figure 2.When some QFN packaging body 10 detects defect, by the number of its QFN packaging body 10 specific, and the position that there is defective side is stored in the check result cognitive domains, set side of memory storage (not shown).QFN packaging body 10, based on the check result information being stored in this check result cognitive domains, side, as previously mentioned, is classified and is placed in non-defective unit pallet 47 and heavy industry pallet 48 by the control part of transfer device 43.
According to the present embodiment, generally speaking, 4 limits (side) or 2 limits of the QFN packaging body 10 of slightly rectangle can be checked.Moreover the situation of other summary multiangular packaging body, also can check odd number limit or polygon.
Then, the second embodiment of the present invention and QFN packaging body side testing fixture are described.The entirety of the QFN packaging body side testing fixture of the present embodiment forms identical with the QFN packaging body side testing fixture 40 of the first embodiment above-mentioned shown in Fig. 8, but the photography portion 46, side of the internal structure in its photography portion, side 66 and above-mentioned first embodiment is different.As shown in Figure 6, in the photography portion, side 66 of the QFN packaging body side testing fixture of the present embodiment, the configuration of 42 reflecting prism 60a ~ 60d and telecentric lens 61 is identical with the photography portion 46, side of the first embodiment, but have half-reflecting mirror 63 in telecentric lens 61, and be configured with CCD camera 62 in its reflection direction.And light source (LED illumination) 64 is not located at the behind of 2 reflecting prism 60a ~ 60d, and is located at the behind of half-reflecting mirror 63.Therefore, in the photography portion, side 66 of the present embodiment, light source 64 is 1.
In the photography portion, side 66 of the present embodiment, from the light of light source 64 by after half-reflecting mirror 63, below the QFN packaging body 10 being irradiated camera positions P by telecentric lens 61, and the path irradiation side contrary with the photography light gone to CCD camera 62 from side.From the picture of light-struck 4 sides of light source 64, identical with aforementioned first embodiment, after 2 speculum 60a ~ 60d internal reflection twice, by telecentric lens 61, reflected by half-reflecting mirror 63 and photographed by CCD camera 62.In the QFN packaging body side testing fixture of this second embodiment, the height in photography portion, side 66 can be suppressed, and as previously mentioned, light source can be made to simplify.
Claims (8)
1. an electronic part package body side surface camera, it is for taking the side of this electronic part package body in camera positions photography target and electronic part package body existed in the way, path that its encapsulation dignity is transferred abreast, it is characterized in that, it possesses:
A) reflecting member, it is configured at the oblique below outside the side of the electronic part package body being present in aforementioned camera positions, and the light of the side from this electronic part package body is reflexed to below;
B) camera, it is located at the below of described reflecting member.
2. electronic part package body side surface camera according to claim 1, is characterized in that, described reflecting member is 2 reflecting prisms.
3. electronic part package body side surface camera according to claim 2, is characterized in that, in the side contrary with described camera positions of described 2 reflecting prisms, is provided with light source illumination being penetrated the side in electronic part package body.
4., according to described electronic part package body side surface camera arbitrary in claims 1 to 3 item, it is characterized in that, between described reflecting member and described camera, be provided with telecentric optical element.
5., according to described electronic part package body side surface camera arbitrary in claims 1 to 3 item, it is characterized in that, described reflecting member is located at the surrounding of described camera positions respectively.
6. according to described electronic part package body side surface camera arbitrary in claims 1 to 3 item, it is characterized in that, half-reflecting mirror is provided with between described reflecting member and described camera, and the light from described electronic part package body side surface reflected by described reflecting member is by after described half-reflecting mirror reflection, is incident upon described camera.
7. electronic part package body side surface camera according to claim 6, is characterized in that, in the side contrary with described reflecting member of described half-reflecting mirror, is provided with light source illumination being penetrated the side in electronic part package body.
8. according to described electronic part package body side surface camera arbitrary in claims 1 to 3 item, it is characterized in that, below the electronic part package body being present in described camera positions, and from the side of described electronic part package body toward the side of reflecting member photography light angulation be less than 45 degree.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-105573 | 2014-05-21 | ||
| JP2014105573A JP6491425B2 (en) | 2014-05-21 | 2014-05-21 | Electronic parts package side view photographing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105100560A true CN105100560A (en) | 2015-11-25 |
Family
ID=54580028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510211965.XA Pending CN105100560A (en) | 2014-05-21 | 2015-04-29 | Electronic part packaging body side face photographing device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6491425B2 (en) |
| KR (1) | KR20150134267A (en) |
| CN (1) | CN105100560A (en) |
| TW (1) | TWI547684B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114144662A (en) * | 2019-07-23 | 2022-03-04 | 科磊股份有限公司 | Combined transmission and reflected light imaging of internal cracks in semiconductor devices |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3435136B1 (en) * | 2016-03-31 | 2021-08-04 | Hirosaki University | Multi-surface image acquisition system |
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- 2015-04-23 KR KR1020150057403A patent/KR20150134267A/en active Search and Examination
- 2015-04-29 CN CN201510211965.XA patent/CN105100560A/en active Pending
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| JPH09304285A (en) * | 1996-05-13 | 1997-11-28 | Tsubakimoto Chain Co | Method and apparatus for inspecting surface, laser beam generator and prism |
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| CN114144662A (en) * | 2019-07-23 | 2022-03-04 | 科磊股份有限公司 | Combined transmission and reflected light imaging of internal cracks in semiconductor devices |
| CN114144662B (en) * | 2019-07-23 | 2023-09-19 | 科磊股份有限公司 | Imaging of combined transmitted and reflected light of internal cracks in semiconductor devices |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI547684B (en) | 2016-09-01 |
| KR20150134267A (en) | 2015-12-01 |
| JP6491425B2 (en) | 2019-03-27 |
| JP2015219224A (en) | 2015-12-07 |
| TW201544806A (en) | 2015-12-01 |
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