CN105063574B - 用于mocvd系统化学源蒸汽管路的粉尘颗粒收集器 - Google Patents
用于mocvd系统化学源蒸汽管路的粉尘颗粒收集器 Download PDFInfo
- Publication number
- CN105063574B CN105063574B CN201510466016.6A CN201510466016A CN105063574B CN 105063574 B CN105063574 B CN 105063574B CN 201510466016 A CN201510466016 A CN 201510466016A CN 105063574 B CN105063574 B CN 105063574B
- Authority
- CN
- China
- Prior art keywords
- air inlet
- collector body
- inlet pipe
- collector
- dust granules
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510466016.6A CN105063574B (zh) | 2015-08-03 | 2015-08-03 | 用于mocvd系统化学源蒸汽管路的粉尘颗粒收集器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510466016.6A CN105063574B (zh) | 2015-08-03 | 2015-08-03 | 用于mocvd系统化学源蒸汽管路的粉尘颗粒收集器 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105063574A CN105063574A (zh) | 2015-11-18 |
CN105063574B true CN105063574B (zh) | 2018-02-06 |
Family
ID=54493071
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201510466016.6A Active CN105063574B (zh) | 2015-08-03 | 2015-08-03 | 用于mocvd系统化学源蒸汽管路的粉尘颗粒收集器 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN105063574B (zh) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2062652U (zh) * | 1990-03-17 | 1990-09-26 | 西安电子科技大学 | 高效粒子扑集器 |
CN1322121A (zh) * | 1998-10-07 | 2001-11-14 | 杰特凡澳大利亚有限公司 | 拾取与收集颗粒状物质的装置 |
CN202538522U (zh) * | 2012-03-15 | 2012-11-21 | 南昌航空大学 | 百叶式弯板重力除尘器 |
CN204874728U (zh) * | 2015-08-03 | 2015-12-16 | 苏州新材料研究所有限公司 | 用于mocvd系统化学源蒸汽管路的粉尘颗粒收集器 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110274836A1 (en) * | 2010-05-05 | 2011-11-10 | Applied Materials, Inc. | Removal of trapped silicon with a cleaning gas |
-
2015
- 2015-08-03 CN CN201510466016.6A patent/CN105063574B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2062652U (zh) * | 1990-03-17 | 1990-09-26 | 西安电子科技大学 | 高效粒子扑集器 |
CN1322121A (zh) * | 1998-10-07 | 2001-11-14 | 杰特凡澳大利亚有限公司 | 拾取与收集颗粒状物质的装置 |
CN202538522U (zh) * | 2012-03-15 | 2012-11-21 | 南昌航空大学 | 百叶式弯板重力除尘器 |
CN204874728U (zh) * | 2015-08-03 | 2015-12-16 | 苏州新材料研究所有限公司 | 用于mocvd系统化学源蒸汽管路的粉尘颗粒收集器 |
Also Published As
Publication number | Publication date |
---|---|
CN105063574A (zh) | 2015-11-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN202270443U (zh) | 一种免拆装在线清洁的新型过滤装置 | |
Wang et al. | Cu2O nanoparticles sensitized ZnO nanorod arrays: electrochemical synthesis and photocatalytic properties | |
CN105481002A (zh) | 自催化生长大尺寸β-Ga2O3微米线的方法 | |
CN105063574B (zh) | 用于mocvd系统化学源蒸汽管路的粉尘颗粒收集器 | |
CN104671230A (zh) | 一种单壁碳纳米管薄膜的连续收集方法与专用装置 | |
CN204874728U (zh) | 用于mocvd系统化学源蒸汽管路的粉尘颗粒收集器 | |
CN109133097A (zh) | 一种氨水的生产方法 | |
CN105714266A (zh) | 一种硫化亚铜纳米片的制备方法 | |
CN103160814B (zh) | 反应室及其气流控制方法 | |
CN103495293B (zh) | 氨法脱硫浆液中灰渣去除工艺及其设备 | |
CN109133096A (zh) | 一种氨水的制备工艺 | |
US20150267581A1 (en) | In-situation scr catalyst cleaning process | |
CN203222576U (zh) | 一种用于co变换的换热设备 | |
CN203293670U (zh) | 丝网印刷机硅片清洁装置 | |
CN209618887U (zh) | 一种防堵的用于液相氧化还原法脱硫的硫磺沉降塔 | |
CN103737010B (zh) | 一种InAsxP1-x合金纳米线及其制备方法 | |
CN205956645U (zh) | 一种mocvd尾气处理系统用的管道防结垢结构 | |
CN203380171U (zh) | 钨粉或碳化钨粉的粉尘回收系统 | |
CN202590560U (zh) | 气体过滤处理结构、尾气处理系统 | |
CN104549189A (zh) | 一种多孔TiO2薄膜及其制备方法 | |
CN220772679U (zh) | 一种快速实时采样装置 | |
CN204727847U (zh) | 一种用废弃轮胎炼油的排渣系统 | |
CN104437071A (zh) | 混合双相脱硫脱硝除尘装置及脱硫脱硝除尘方法 | |
CN204224495U (zh) | 一种辛醇精制系统 | |
CN216150380U (zh) | 粉末自动闭路回收系统 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20190819 Address after: 215000 C18 Floor, 218 Xinghu Street, Suzhou Industrial Park, Jiangsu Province Co-patentee after: Jiangsu Etern Co., Ltd. Patentee after: Suzhou Advanced Materials Research Istitute Co., Ltd. Address before: Xinghu Street Industrial Park of Suzhou city in Jiangsu province 215125 No. 218 BioBAY C18 Patentee before: Suzhou Advanced Materials Research Istitute Co., Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20190910 Address after: 215000 C18 Floor, 218 Xinghu Street Bio-nano Park, Suzhou Industrial Park, Jiangsu Province Patentee after: Suzhou Advanced Materials Research Istitute Co., Ltd. Address before: 215000 C18 Floor, 218 Xinghu Street, Suzhou Industrial Park, Jiangsu Province Co-patentee before: Jiangsu Etern Co., Ltd. Patentee before: Suzhou Advanced Materials Research Istitute Co., Ltd. |
|
TR01 | Transfer of patent right |